FR2959305B1 - Dispositif optique et procede d'inspection d'objets structures. - Google Patents

Dispositif optique et procede d'inspection d'objets structures.

Info

Publication number
FR2959305B1
FR2959305B1 FR1053173A FR1053173A FR2959305B1 FR 2959305 B1 FR2959305 B1 FR 2959305B1 FR 1053173 A FR1053173 A FR 1053173A FR 1053173 A FR1053173 A FR 1053173A FR 2959305 B1 FR2959305 B1 FR 2959305B1
Authority
FR
France
Prior art keywords
optical device
structured objects
inspecting
inspecting structured
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1053173A
Other languages
English (en)
Other versions
FR2959305A1 (fr
Inventor
Gilles Fresquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanotec Solution SAS
Original Assignee
Nanotec Solution SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1053173A priority Critical patent/FR2959305B1/fr
Application filed by Nanotec Solution SAS filed Critical Nanotec Solution SAS
Priority to CN201180021226.4A priority patent/CN102893121B/zh
Priority to SG2012078218A priority patent/SG184974A1/en
Priority to EP11721347A priority patent/EP2564153A1/fr
Priority to PCT/FR2011/050900 priority patent/WO2011135231A1/fr
Priority to KR1020127028050A priority patent/KR101842291B1/ko
Priority to US13/643,435 priority patent/US9151941B2/en
Priority to JP2013506713A priority patent/JP6273142B2/ja
Publication of FR2959305A1 publication Critical patent/FR2959305A1/fr
Application granted granted Critical
Publication of FR2959305B1 publication Critical patent/FR2959305B1/fr
Priority to JP2016235402A priority patent/JP2017096956A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
FR1053173A 2010-04-26 2010-04-26 Dispositif optique et procede d'inspection d'objets structures. Active FR2959305B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1053173A FR2959305B1 (fr) 2010-04-26 2010-04-26 Dispositif optique et procede d'inspection d'objets structures.
SG2012078218A SG184974A1 (en) 2010-04-26 2011-04-19 Optical device and method for inspecting structured objects
EP11721347A EP2564153A1 (fr) 2010-04-26 2011-04-19 Dispositif optique et procede d'inspection d'objets structures
PCT/FR2011/050900 WO2011135231A1 (fr) 2010-04-26 2011-04-19 Dispositif optique et procede d'inspection d'objets structures
CN201180021226.4A CN102893121B (zh) 2010-04-26 2011-04-19 用于检查结构化对象的光学设备和方法
KR1020127028050A KR101842291B1 (ko) 2010-04-26 2011-04-19 광학 장치 및 구조화된 물체들을 조사하는 방법
US13/643,435 US9151941B2 (en) 2010-04-26 2011-04-19 Optical device and method for inspecting structured objects
JP2013506713A JP6273142B2 (ja) 2010-04-26 2011-04-19 構造物体を検査するための光学装置及び方法
JP2016235402A JP2017096956A (ja) 2010-04-26 2016-12-02 構造物体を検査するための光学装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1053173A FR2959305B1 (fr) 2010-04-26 2010-04-26 Dispositif optique et procede d'inspection d'objets structures.

Publications (2)

Publication Number Publication Date
FR2959305A1 FR2959305A1 (fr) 2011-10-28
FR2959305B1 true FR2959305B1 (fr) 2014-09-05

Family

ID=43301813

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1053173A Active FR2959305B1 (fr) 2010-04-26 2010-04-26 Dispositif optique et procede d'inspection d'objets structures.

Country Status (8)

Country Link
US (1) US9151941B2 (fr)
EP (1) EP2564153A1 (fr)
JP (2) JP6273142B2 (fr)
KR (1) KR101842291B1 (fr)
CN (1) CN102893121B (fr)
FR (1) FR2959305B1 (fr)
SG (1) SG184974A1 (fr)
WO (1) WO2011135231A1 (fr)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9323398B2 (en) 2009-07-10 2016-04-26 Apple Inc. Touch and hover sensing
US8982060B2 (en) 2010-08-27 2015-03-17 Apple Inc. Touch and hover sensor compensation
US9201547B2 (en) 2012-04-30 2015-12-01 Apple Inc. Wide dynamic range capacitive sensing
EP2662661A1 (fr) * 2012-05-07 2013-11-13 Leica Geosystems AG Appareil de mesure doté d'un interféromètre et d'un milieu d'absorption définissant un spectre de raies épais
FR2994734B1 (fr) * 2012-08-21 2017-08-25 Fogale Nanotech Dispositif et procede pour faire des mesures dimensionnelles sur des objets multi-couches tels que des wafers.
KR20140054645A (ko) * 2012-10-29 2014-05-09 한국전자통신연구원 알츠하이머병을 진단하기 위한 진단 장치 및 이를 이용한 진단 방법
US9835444B2 (en) 2013-05-20 2017-12-05 Koh Young Technology Inc. Shape measuring device using frequency scanning interferometer
ITBO20130403A1 (it) * 2013-07-26 2015-01-27 Marposs Spa Metodo e apparecchiatura per il controllo ottico mediante interferometria dello spessore di un oggetto in lavorazione
DE102013019348A1 (de) * 2013-08-15 2015-02-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
US9933879B2 (en) 2013-11-25 2018-04-03 Apple Inc. Reconfigurable circuit topology for both self-capacitance and mutual capacitance sensing
US20150253127A1 (en) * 2014-03-04 2015-09-10 Honeywell Asca Inc. Thickness Determination of Web Product by Mid-infrared Wavelength Scanning Interferometry
KR102316146B1 (ko) * 2014-08-13 2021-10-22 삼성전자주식회사 표면 검사용 광학 모듈 및 이를 포함하는 표면 검사 장치
FR3026481B1 (fr) * 2014-09-25 2021-12-24 Fogale Nanotech Dispositif et procede de profilometrie de surface pour le controle de wafers en cours de process
US11300773B2 (en) * 2014-09-29 2022-04-12 Agilent Technologies, Inc. Mid-infrared scanning system
US9787916B2 (en) * 2014-10-28 2017-10-10 The Boeing Company Active real-time characterization system
FR3045813B1 (fr) * 2015-12-22 2020-05-01 Unity Semiconductor Dispositif et procede de mesure de hauteur en presence de couches minces
EP3222964B1 (fr) * 2016-03-25 2020-01-15 Fogale Nanotech Dispositif et procédé confocal chromatique pour l'inspection 2d/3d d'un objet tel qu'une plaquette
KR101855816B1 (ko) * 2016-05-13 2018-05-10 주식회사 고영테크놀러지 생체 조직 검사 장치 및 그 방법
CN105910541A (zh) * 2016-06-13 2016-08-31 东莞市普密斯精密仪器有限公司 一种用于测量物件尺寸的测量装置和测量方法
JP6768442B2 (ja) * 2016-10-12 2020-10-14 株式会社キーエンス 形状測定装置
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置
CN107036539B (zh) * 2017-06-14 2018-07-13 深圳中科飞测科技有限公司 膜厚测量***及方法
TWI791046B (zh) * 2017-10-02 2023-02-01 美商奈米創尼克影像公司 減少顯微鏡成像中之暈影的設備及方法
WO2019070226A1 (fr) 2017-10-02 2019-04-11 Nanotronics Imaging, Inc. Appareil et procédé pour réduire le vignettage dans une imagerie microscopique
JP6986452B2 (ja) * 2018-01-04 2021-12-22 浜松ホトニクス株式会社 蛍光測定装置および蛍光測定方法
US10712265B2 (en) 2018-02-22 2020-07-14 The Boeing Company Active real-time characterization system providing spectrally broadband characterization
CN111213029A (zh) * 2018-09-27 2020-05-29 合刃科技（深圳）有限公司 检测透明/半透明材料缺陷的方法、装置及***
CN109297991B (zh) * 2018-11-26 2019-12-17 深圳市麓邦技术有限公司 一种玻璃表面缺陷检测***及方法
FR3089286B1 (fr) * 2018-11-30 2022-04-01 Unity Semiconductor Procédé et système pour mesurer une surface d’un objet comprenant des structures différentes par interférométrie à faible cohérence
CN109828365B (zh) * 2019-02-25 2021-05-04 南京理工大学 Mirau型超分辨率干涉显微物镜
FR3093560B1 (fr) * 2019-03-05 2021-10-29 Fogale Nanotech Procédé et dispositif de mesure d’interfaces d’un élément optique
WO2020245511A1 (fr) * 2019-06-07 2020-12-10 Fogale Nanotech Dispositif et procédé de mesure d'interfaces d'un élément optique
CN111122508A (zh) * 2019-11-08 2020-05-08 桂林电子科技大学 基于f-p干涉仪的双波长共路相位显微成像测量***
EP4279861A1 (fr) * 2022-05-19 2023-11-22 Unity Semiconductor Procédé et système de caractérisation de structures gravées dans un substrat
EP4279862A1 (fr) * 2022-05-19 2023-11-22 Unity Semiconductor Procédé et système de caractérisation combinée de structures gravées dans un substrat
EP4279860A1 (fr) * 2022-05-19 2023-11-22 Unity Semiconductor Procédé et système de caractérisation de structures à travers un substrat
KR102573768B1 (ko) * 2023-02-01 2023-09-01 (주)토핀스 단파장 적외선 하이퍼 스펙트럴 이미징 현미경 시스템

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632116A (en) * 1979-08-23 1981-04-01 Toshiba Corp Specimen observing device
US4873989A (en) * 1984-03-08 1989-10-17 Optical Technologies, Inc. Fluid flow sensing apparatus for in vivo and industrial applications employing novel optical fiber pressure sensors
US4627731A (en) * 1985-09-03 1986-12-09 United Technologies Corporation Common optical path interferometric gauge
US4755668A (en) * 1986-10-03 1988-07-05 Optical Technologies, Inc. Fiber optic interferometric thermometer with serially positioned fiber optic sensors
JP2813331B2 (ja) * 1988-04-12 1998-10-22 シチズン時計株式会社 放射温度計
GB9022969D0 (en) * 1990-10-23 1990-12-05 Rosemount Ltd Displacement measurement apparatus
US6134003A (en) * 1991-04-29 2000-10-17 Massachusetts Institute Of Technology Method and apparatus for performing optical measurements using a fiber optic imaging guidewire, catheter or endoscope
US6501551B1 (en) * 1991-04-29 2002-12-31 Massachusetts Institute Of Technology Fiber optic imaging endoscope interferometer with at least one faraday rotator
JP3325056B2 (ja) * 1992-11-18 2002-09-17 オリンパス光学工業株式会社 光断層イメージング装置
FR2718231B1 (fr) 1994-04-05 1996-06-21 Sofie Procédé et dispositif pour quantifier in situ la morphologie et l'épaisseur dans une zone localisée d'une couche superficielle en cours de traitement sur une structure à couches minces .
ATE396497T1 (de) * 2000-01-21 2008-06-15 Hamamatsu Photonics Kk Dickenmessvorrichtung, dickenmessverfahren und nassätzvorrichtung und nassätzverfahren, die diese verwenden
US6496265B1 (en) * 2000-02-16 2002-12-17 Airak, Inc. Fiber optic sensors and methods therefor
US6368881B1 (en) * 2000-02-29 2002-04-09 International Business Machines Corporation Wafer thickness control during backside grind
JP4208069B2 (ja) * 2003-03-26 2009-01-14 住友大阪セメント株式会社 屈折率及び厚さの測定装置ならびに測定方法
DE10360570B4 (de) * 2003-12-22 2006-01-12 Carl Zeiss Optisches Meßsystem und optisches Meßverfahren
JP4381847B2 (ja) * 2004-02-26 2009-12-09 株式会社トプコン 光画像計測装置
ES2243129B1 (es) * 2004-04-23 2006-08-16 Universitat Politecnica De Catalunya Perfilometro optico de tecnologia dual (confocal e interferometrica) para la inspeccion y medicion tridimensional de superficies.
US7034271B1 (en) * 2004-05-27 2006-04-25 Sandia Corporation Long working distance incoherent interference microscope
US7310151B2 (en) * 2004-08-30 2007-12-18 Chian Chiu Li Interferometric optical apparatus and method using wavefront division
JP4837300B2 (ja) * 2005-03-24 2011-12-14 株式会社トプコン 光画像計測装置
US20070002331A1 (en) * 2005-06-30 2007-01-04 Hall William J In line thickness measurement
FR2892188B1 (fr) 2005-10-14 2007-12-28 Nanotec Solution Soc Civ Ile Procede et dispositif de mesure de hauteurs de motifs
DE102006021557B3 (de) * 2006-05-08 2007-07-12 Carl Mahr Holding Gmbh Vorrichtung und Verfahren zur kombinierten interferometrischen und abbildungsbasierten Geometrieerfassung, insbesondere in der Mikrosystemtechnik
US7450243B2 (en) * 2006-07-10 2008-11-11 The Board Of Trustees Of The University Of Illinois Volumetric endoscopic coherence microscopy using a coherent fiber bundle
US20080062429A1 (en) * 2006-09-12 2008-03-13 Rongguang Liang Low coherence dental oct imaging
EP4292573A3 (fr) * 2007-03-13 2024-02-21 AMO Development, LLC Appareil pour créer des incisions chirurgicales oculaires et de relâchement
JP5290322B2 (ja) * 2007-12-14 2013-09-18 ザイゴ コーポレーション 走査干渉法を使用した表面構造の解析
WO2011044057A1 (fr) * 2009-10-05 2011-04-14 Comentis, Inc. Composés sulfonamido pyrrolidine qui inhibent l'activité bêta sécrétase et procédés d'utilisation associés

Also Published As

Publication number Publication date
SG184974A1 (en) 2012-11-29
KR101842291B1 (ko) 2018-05-04
EP2564153A1 (fr) 2013-03-06
US9151941B2 (en) 2015-10-06
CN102893121A (zh) 2013-01-23
FR2959305A1 (fr) 2011-10-28
CN102893121B (zh) 2015-12-16
JP6273142B2 (ja) 2018-01-31
KR20130083830A (ko) 2013-07-23
WO2011135231A1 (fr) 2011-11-03
JP2013528791A (ja) 2013-07-11
JP2017096956A (ja) 2017-06-01
US20130038863A1 (en) 2013-02-14

Similar Documents

Publication Publication Date Title
FR2959305B1 (fr) Dispositif optique et procede d'inspection d'objets structures.
FR2987120B1 (fr) Procede et dispositif de mesure de la couleur d'un objet
FR2995089B1 (fr) Dispositif optique et procede de fabrication d'un tel dispositif
FR2937734B1 (fr) Procede et dispositif de mesure de caracteristiques optiques d'un objet
FR2913265B1 (fr) Dispositif pour la mesure optique d'un objet.
FR2970096B1 (fr) Dispositif et procede optoelectronique de determination de position bidimensionnelle
FR2965930B1 (fr) Dispositif de test electromagnetique d'un objet
FR2991807B1 (fr) Dispositif et procede de focalisation d'impulsions
FR2974913B1 (fr) Dispositif et procede de recherche de cibles
FR2978243B1 (fr) Dispositif de capteur a ultrasons et son procede de fabrication
FR2942899B1 (fr) Dispositif et procede d'analyse optique de documents
FR2967497B1 (fr) Dispositif et procede pour immunoessais
FR2977966B1 (fr) Procede d'identification d'extincteur et dispositif d'identification d'extincteur
FR2967278B1 (fr) Procede de detection d'objet d'interet dans un environnement perturbe, et dispositif d'interface gestuel mettant en oeuvre ce procede.
FR3004582B1 (fr) Systeme et procede d'inspection optique de circuits electroniques
FR2965956B1 (fr) Procede et dispositif de representation optique de l'environnement d'un vehicule
FR2982992B1 (fr) Dispositif destine a de l'imagerie neutronique en milieu immerge et procede d'imagerie utilisant ledit dispositif
FR2976505B1 (fr) Dispositif et procede pour immunoessais
FR2977965B1 (fr) Procede d'identification d'extincteur et dispositif d'identification d'extincteur
FR2935803B1 (fr) Dispositif et procede de mesure optique de transmission et de diffusion de milieux oculaires
FR3013174B1 (fr) Dispositif de test d'un module photovoltaique a concentration
FR2976663B1 (fr) Dispositif et procede de caracterisation d'un faisceau de lumiere.
FR2973132B1 (fr) Dispositif et procede d'evaluation des capacites operationnelles d'un aeronef
FR2970725B1 (fr) Dispositif et procede de manutention de plaque
FR2956510B1 (fr) Procede et dispositif de detection autonome

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12

CL Concession to grant licences

Name of requester: UNITY-SC, FR

Effective date: 20210616

PLFP Fee payment

Year of fee payment: 13

PLFP Fee payment

Year of fee payment: 14

PLFP Fee payment

Year of fee payment: 15