CN102161417B - 输送车*** - Google Patents
输送车*** Download PDFInfo
- Publication number
- CN102161417B CN102161417B CN201010547578.0A CN201010547578A CN102161417B CN 102161417 B CN102161417 B CN 102161417B CN 201010547578 A CN201010547578 A CN 201010547578A CN 102161417 B CN102161417 B CN 102161417B
- Authority
- CN
- China
- Prior art keywords
- loop
- mentioned
- article
- mounting table
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP038082/2010 | 2010-02-24 | ||
JP2010038082A JP4973747B2 (ja) | 2010-02-24 | 2010-02-24 | 搬送車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102161417A CN102161417A (zh) | 2011-08-24 |
CN102161417B true CN102161417B (zh) | 2015-04-01 |
Family
ID=44462933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010547578.0A Expired - Fee Related CN102161417B (zh) | 2010-02-24 | 2010-11-12 | 输送车*** |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4973747B2 (ja) |
KR (1) | KR101414530B1 (ja) |
CN (1) | CN102161417B (ja) |
TW (1) | TWI466809B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5648865B2 (ja) * | 2012-06-18 | 2015-01-07 | 株式会社ダイフク | 天井搬送車及び物品搬送設備 |
ES2627924T3 (es) * | 2013-04-04 | 2017-08-01 | Knapp Ag | Sistema de almacenamiento con un sistema de transporte configurado por carros accionados magnéticamente |
AT516404B1 (de) * | 2015-03-04 | 2016-05-15 | Knapp Ag | Regallager mit einem Kreisverkehr auf einer geschlossenen Führungsbahn |
CN110199470B (zh) * | 2017-01-27 | 2022-06-10 | 村田机械株式会社 | 物品移载装置 |
JP6965646B2 (ja) | 2017-09-06 | 2021-11-10 | 株式会社ダイフク | 搬送車、及び、搬送設備 |
JP6874698B2 (ja) * | 2018-01-10 | 2021-05-19 | 株式会社ダイフク | 物品収納設備 |
JP6644819B2 (ja) * | 2018-02-09 | 2020-02-12 | 本田技研工業株式会社 | 搬送作業設備 |
CN110112086B (zh) * | 2019-05-30 | 2020-04-07 | 乐清市芮易经济信息咨询有限公司 | 一种半导体片清洗设备 |
CN111736540B (zh) * | 2020-03-20 | 2021-10-15 | 北京京东乾石科技有限公司 | 货物分拣控制方法、装置、电子设备及存储介质 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1224237A (zh) * | 1998-01-23 | 1999-07-28 | 日本电气株式会社 | 工件传送方法及*** |
JP2006290491A (ja) * | 2005-04-07 | 2006-10-26 | Murata Mach Ltd | 搬送車システム |
JP2007191235A (ja) * | 2006-01-17 | 2007-08-02 | Murata Mach Ltd | 天井走行車システム |
CN101234677A (zh) * | 2008-02-19 | 2008-08-06 | 姜广峻 | 货物分拣分装设备及其方法 |
JP2009076578A (ja) * | 2007-09-19 | 2009-04-09 | Nikon Corp | 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1159829A (ja) | 1997-08-08 | 1999-03-02 | Mitsubishi Electric Corp | 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法 |
JP2000355403A (ja) * | 1999-06-17 | 2000-12-26 | Murata Mach Ltd | 搬送システム |
TWI256372B (en) | 2001-12-27 | 2006-06-11 | Tokyo Electron Ltd | Carrier system of polishing processing body and conveying method of polishing processing body |
JP3991852B2 (ja) * | 2002-12-09 | 2007-10-17 | 村田機械株式会社 | 天井搬送車システム |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
JP4389225B2 (ja) * | 2006-01-30 | 2009-12-24 | 村田機械株式会社 | 搬送システム |
JP5266683B2 (ja) * | 2007-08-03 | 2013-08-21 | 村田機械株式会社 | 搬送システム、及び該搬送システムにおける教示方法 |
-
2010
- 2010-02-24 JP JP2010038082A patent/JP4973747B2/ja not_active Expired - Fee Related
- 2010-11-12 KR KR1020100112589A patent/KR101414530B1/ko not_active IP Right Cessation
- 2010-11-12 CN CN201010547578.0A patent/CN102161417B/zh not_active Expired - Fee Related
-
2011
- 2011-01-20 TW TW100102077A patent/TWI466809B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1224237A (zh) * | 1998-01-23 | 1999-07-28 | 日本电气株式会社 | 工件传送方法及*** |
JP2006290491A (ja) * | 2005-04-07 | 2006-10-26 | Murata Mach Ltd | 搬送車システム |
JP2007191235A (ja) * | 2006-01-17 | 2007-08-02 | Murata Mach Ltd | 天井走行車システム |
JP2009076578A (ja) * | 2007-09-19 | 2009-04-09 | Nikon Corp | 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法 |
CN101234677A (zh) * | 2008-02-19 | 2008-08-06 | 姜广峻 | 货物分拣分装设备及其方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102161417A (zh) | 2011-08-24 |
KR20110097599A (ko) | 2011-08-31 |
JP2011173673A (ja) | 2011-09-08 |
TWI466809B (zh) | 2015-01-01 |
KR101414530B1 (ko) | 2014-07-03 |
TW201139252A (en) | 2011-11-16 |
JP4973747B2 (ja) | 2012-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130411 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20130411 Address after: Kyoto Japan Applicant after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Applicant before: Asyst Technologies |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 Termination date: 20161112 |