CN102161417B - 输送车*** - Google Patents

输送车*** Download PDF

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Publication number
CN102161417B
CN102161417B CN201010547578.0A CN201010547578A CN102161417B CN 102161417 B CN102161417 B CN 102161417B CN 201010547578 A CN201010547578 A CN 201010547578A CN 102161417 B CN102161417 B CN 102161417B
Authority
CN
China
Prior art keywords
loop
mentioned
article
mounting table
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010547578.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102161417A (zh
Inventor
川口正富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of CN102161417A publication Critical patent/CN102161417A/zh
Application granted granted Critical
Publication of CN102161417B publication Critical patent/CN102161417B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201010547578.0A 2010-02-24 2010-11-12 输送车*** Expired - Fee Related CN102161417B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP038082/2010 2010-02-24
JP2010038082A JP4973747B2 (ja) 2010-02-24 2010-02-24 搬送車システム

Publications (2)

Publication Number Publication Date
CN102161417A CN102161417A (zh) 2011-08-24
CN102161417B true CN102161417B (zh) 2015-04-01

Family

ID=44462933

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010547578.0A Expired - Fee Related CN102161417B (zh) 2010-02-24 2010-11-12 输送车***

Country Status (4)

Country Link
JP (1) JP4973747B2 (ja)
KR (1) KR101414530B1 (ja)
CN (1) CN102161417B (ja)
TW (1) TWI466809B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5648865B2 (ja) * 2012-06-18 2015-01-07 株式会社ダイフク 天井搬送車及び物品搬送設備
ES2627924T3 (es) * 2013-04-04 2017-08-01 Knapp Ag Sistema de almacenamiento con un sistema de transporte configurado por carros accionados magnéticamente
AT516404B1 (de) * 2015-03-04 2016-05-15 Knapp Ag Regallager mit einem Kreisverkehr auf einer geschlossenen Führungsbahn
CN110199470B (zh) * 2017-01-27 2022-06-10 村田机械株式会社 物品移载装置
JP6965646B2 (ja) 2017-09-06 2021-11-10 株式会社ダイフク 搬送車、及び、搬送設備
JP6874698B2 (ja) * 2018-01-10 2021-05-19 株式会社ダイフク 物品収納設備
JP6644819B2 (ja) * 2018-02-09 2020-02-12 本田技研工業株式会社 搬送作業設備
CN110112086B (zh) * 2019-05-30 2020-04-07 乐清市芮易经济信息咨询有限公司 一种半导体片清洗设备
CN111736540B (zh) * 2020-03-20 2021-10-15 北京京东乾石科技有限公司 货物分拣控制方法、装置、电子设备及存储介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224237A (zh) * 1998-01-23 1999-07-28 日本电气株式会社 工件传送方法及***
JP2006290491A (ja) * 2005-04-07 2006-10-26 Murata Mach Ltd 搬送車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
CN101234677A (zh) * 2008-02-19 2008-08-06 姜广峻 货物分拣分装设备及其方法
JP2009076578A (ja) * 2007-09-19 2009-04-09 Nikon Corp 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1159829A (ja) 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
JP2000355403A (ja) * 1999-06-17 2000-12-26 Murata Mach Ltd 搬送システム
TWI256372B (en) 2001-12-27 2006-06-11 Tokyo Electron Ltd Carrier system of polishing processing body and conveying method of polishing processing body
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
JP4389225B2 (ja) * 2006-01-30 2009-12-24 村田機械株式会社 搬送システム
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224237A (zh) * 1998-01-23 1999-07-28 日本电气株式会社 工件传送方法及***
JP2006290491A (ja) * 2005-04-07 2006-10-26 Murata Mach Ltd 搬送車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP2009076578A (ja) * 2007-09-19 2009-04-09 Nikon Corp 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法
CN101234677A (zh) * 2008-02-19 2008-08-06 姜广峻 货物分拣分装设备及其方法

Also Published As

Publication number Publication date
CN102161417A (zh) 2011-08-24
KR20110097599A (ko) 2011-08-31
JP2011173673A (ja) 2011-09-08
TWI466809B (zh) 2015-01-01
KR101414530B1 (ko) 2014-07-03
TW201139252A (en) 2011-11-16
JP4973747B2 (ja) 2012-07-11

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: MURATA MACHINERY CO., LTD.

Free format text: FORMER OWNER: ASYST TECHNOLOGIES

Effective date: 20130411

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20130411

Address after: Kyoto Japan

Applicant after: Murata Machinery Co., Ltd.

Address before: Kyoto Japan

Applicant before: Asyst Technologies

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150401

Termination date: 20161112