A kind of wafer scale elastomer is pressed into the microballoon ball-planting device
Technical field
The present invention relates to a kind of semiconductor packaging device, especially relate to a kind of wafer scale elastomer and be pressed into the microballoon ball-planting device.
Background technology
Wafer scale microballoon ball attachment machine is a kind of high-end semiconductor packaging device, is used for microballoon (microballoon that comprises unlike materials such as tin ball, copper ball and gold goal) precisely is placed into the wafer of having smeared scaling powder, and one of its core technology is exactly to plant the ball mode.
Existing wafer scale to be planted ball equipment and in order realizing microballoon accurately to be implanted wafer, and basic in the world the employing sweeps that ball is planted ball, tool is inhaled the mode that ball is planted ball or sieve ball.
Sweep the ball mode and be and make a swivel head with the silk hairbrush and on web plate, back and forth sweep ball and ball is swept in the web plate hole be implanted on the wafer; This kind mode silk hairbrush consumption is big, the manufacturing process complex steps, need the professional often to change; Thereby cost is higher, sweeps also relatively waste of microballoon in the ball process, the situation influence that microballoon splashes occurs easily and produce.
Tool inhale ball be make one with the identical tool of wafer size, make on the tool and need plant the corresponding pin of ball position, utilize vacuum in the feeder channel that shakes, microballoon to be drawn onto on the tool, through the accurate localization system microballoon is implanted wafer again.This kind mode actuating mechanism is complicated, needs image identification system, Precise Position System, high-performance detection system etc., and quality of hardware is had relatively high expectations, and price is extremely expensive.
Sieve ball mode mechanism is simple, but plant the ball precision not high, plant the not high and easy oxidation of ball efficient, that therefore uses is less.
Summary of the invention
The object of the invention is exactly to provide in order to overcome the defective that above-mentioned prior art exists that a kind of making is simple relatively, cost is lower, plant the high wafer scale elastomer of ball success rate is pressed into the microballoon ball-planting device.
The object of the invention can be realized through following technical scheme:
A kind of wafer scale elastomer is pressed into the microballoon ball-planting device, it is characterized in that, this device comprises that pallet, leg, web plate, Y plant bulb to motion, line slideway, Z to motion, rotating mechanism, ball mechanism and elastomer to motion, X; Described leg has 4, is located at four jiaos of pallet bottom, and described web plate is fixed on the middle part of pallet; Described Y is located at a side of web plate to motion; Described X is erected at Y on motion to motion one end, and the other end is nested on the line slideway, and described line slideway is located at the opposite side of web plate; With Y to the motion level; Described Z is located at X to motion top to motion, and described rotating mechanism and ball mechanism are fixed in Z on the slide block of motion, and described elastomer is planted the bottom that bulb is located at ball mechanism.
X adopts motor to add ball-screw or synchronous cog belt drive to motion and Z to motion to motion, Y.
Described motor is AC servo motor or stepping motor.
Described rotating mechanism is hollow rotating motor or common electric machine, and hollow rotating motor or common electric machine drive the quill shaft rotation.
Described common electric machine is AC servo motor or stepping motor.
Described ball mechanism comprises microballoon container and confession bulb road, and described confession bulb road is located at the bottom of microballoon container, and the bottom on this confession bulb road connects elastomer and plants bulb.
Described elastomer is planted bulb and is made up of elastomeric body, contiguous block and antistatic cloth, and described antistatic cloth is wrapped in the outside of elastomeric body, and described contiguous block is located at the top of elastomeric body, compresses antistatic cloth.
The material of described elastomeric body is the material with certain expansion performance, comprises sponge or soft rubber.
Described X can do along the Y direction to motion and seesaw, and described Z can do side-to-side movement along directions X to motion, and described ball mechanism and rotating mechanism can move up and down along the Z direction.
Compared with prior art, the present invention has the following advantages:
(1) originally plant the used elastomer of ball mode and plant the bulb material and purchase, make simple relatively easily, cost significantly reduces;
(2) originally planting the ball mode does not need image identification system and high-performance detection system in planting the ball process, inhale ball with tool and plant the ball mode and compare cost and significantly reduce;
(3) to plant bulb little to microballoon injury for elastomer, and it is high to plant the ball success rate, and the microballoon utilance is high.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a plan structure sketch map of the present invention.
Among the figure, 1 for rotating mechanism, 8 for ball mechanism, 9 for elastomer plants bulb, 10 for line slideway for web plate, 7 to motion, 5 for leg, 6 to motion, 4 for X to motion, 3 for Z for Y for pallet, 2.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is elaborated.
Embodiment
A kind of wafer scale elastomer is pressed into the microballoon ball-planting device, and its structure is shown in Fig. 1~2, and this device comprises that pallet 1, Y plant bulb 9, line slideway 10 to motion 3, X to motion 4, leg 5, web plate 6, rotating mechanism 7, ball mechanism 8, elastomer to motion 2, Z; Leg 5 has four, is located at four jiaos of pallet 1 bottom, and web plate 6 is fixed on the middle part of pallet 1; Y is located at a side of web plate 6 to motion 2, and X is erected at Y on motion 2 to motion 4 one ends, and the other end is nested on the line slideway 10; Line slideway 10 is located at the opposite side of web plate 6; With Y to motion 2 levels, X can do along the Y direction to motion 4 and seesaw, Z is located at X to motion 4 tops to motion 3; Can do side-to-side movement along directions X; Rotating mechanism 7 and ball mechanism 8 are fixed in Z on the slide block of motion 3, can move up and down along the Z direction, and elastomer is planted the bottom that bulb 9 is located at ball mechanism 8.
In preceding working procedure application finish scaling powder wafer via the wafer transport mechanism deliver to be close to web plate 6 below after; Elastomer is planted bulb 9 and to the drive of motion 3 under is moved to lift-launch initial position to motion 4, Y to motion 2 and Z at X, and ball mechanism 8 provides microballoon then.After supplying ball to accomplish, elastomer is planted bulb 9 and is dropped to loading position, and turns at the drive underspin of rotating mechanism 7.Elastomer plant bulb 9 X to motion 4 and Y under the drive of motion 2, according to the path of prior setting microballoon is pressed on the wafer in web plate 6 holes.
X to motion 4, Y to motion 2 and Z to motion 3, both can adopt motor to add the type of drive of ball-screw, also can adopt motor to add the type of drive of synchronous cog belt; Motor both can adopt AC servo motor, also can adopt stepping motor.To motion 4 and the cooperation of Y to motion 2, making elastomer plant bulb 9 can move in the scope of whole web plate 6, and can in industrial computer or other controllers, set moving line in advance so that plant the ball best results through X.
Z is equipped with rotating mechanism 7, ball mechanism 8, elastomer and plants mechanisms such as bulb 9 on motion 3; And the parts such as transducer that match with it; Because Z is heavier to motion 3 integral body, the motor situation decision Z of quality situation and use that need be in practical application plants all mechanisms such as bulb 9 according to rotating mechanism 7, ball mechanism 8 and elastomer is to motion 3 needs electromagnetic brake mechanism whether.
It is available that rotating mechanism 7 has hollow rotating motor and common electric machine to drive quill shaft rotation dual mode, is used to drive that elastomer is planted the bulb rotation so that to plant the ball effect better.Hollow rotating motor manufacturing process requirement is higher, price is high but volume is exerted oneself for a short time height, take up room little.And use common AC servo motor or stepping motor to drive the mode of quill shaft rotation through modes such as synchronous cog belt or gears, and realize comparatively complicacy but cost is lower, easy to maintenance.
Elastomer is planted bulb 9 and is made up of elastomeric body, contiguous block and antistatic cloth, and antistatic cloth wraps in the elastomer outside, compresses via contiguous block, is used for microballoon is pressed into wafer from the web plate hole.Elastomer can be any materials with certain expansion performance such as sponge, soft rubber.Elastomeric expansion performance makes boarded head have the downward pressure of certain necessity to microballoon; Boarded head is less to the infringement of microballoon simultaneously; Antistatic cloth can be eliminated static between microballoon preventing to plant the generation of situation such as microballoon adhesion in the ball process, and the existence of antistatic cloth has simultaneously also avoided elastomer fines that microballoon and elastomeric direct contact friction institute possibly cause to wafer generation pollution.The height of elastomer boarded head 9 can be adjusted to improve according to the situation of microballoon and web plate and carry success rate simultaneously.