CN101853799B - Substrate elevating transferring device and substrate processing transferring system - Google Patents
Substrate elevating transferring device and substrate processing transferring system Download PDFInfo
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- CN101853799B CN101853799B CN2010101454766A CN201010145476A CN101853799B CN 101853799 B CN101853799 B CN 101853799B CN 2010101454766 A CN2010101454766 A CN 2010101454766A CN 201010145476 A CN201010145476 A CN 201010145476A CN 101853799 B CN101853799 B CN 101853799B
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Abstract
In a substrate elevating transferring device, a first posture shifting member having a first posture shifting maintenance member is arranged on one side of a first substrate processing device in a way shaking around a horizontal axle center; a second posture shifting member having a second posture shifting maintenance member is arranged on one side of a second substrate processing device in a way shaking around a horizontal axle center; a circular member which extends along the vertical direction in a circulation walking way is vertically arranged on a supporting frame on one side of the first posture shifting member; and a plurality of elevating maintenance members are arranged on the circumference direction of the circular member at an interval. The substrate elevating transferring device can sufficiently reduce the plane area occupation and effectively use the space in the factory.
Description
Technical field
The present invention relates to carry the substrate elevating transferring device and the processing substrate transfer system of use such as (Clean Material Handling) field in cleaning.
Background technology
In the field that cleaning is carried, use following substrate elevating transferring device: be disposed at first substrate board treatment of lower floor's base plate and be disposed between second substrate board treatment of upper strata base plate, carrying out the up-down of substrates such as glass substrate and transfer.The structures of general substrate elevating transferring device etc. are said as follows.
Promptly, near first substrate board treatment, be provided with along the vertical direction the up-down guide part that extends, be provided with the self-powered platform that is used for supporting substrates with the mode that can go up and down at this up-down guide part.In addition, in the appropriate location of up-down guide part, be provided with the up-down that self-powered platform is gone up and down and use motor.Here, self-powered platform can draw substrate and see off by relative first substrate board treatment with the height corresponding with first substrate board treatment.In addition, self-powered platform can draw substrate and see off by relative second substrate board treatment with the height corresponding with second substrate board treatment.
Therefore, make lifting body decline, make lifting body be positioned at the height corresponding with first substrate board treatment through the driving of going up and down with motor.Secondly, substrate is drawn out to self-powered platform from first substrate board treatment.And, make the lifting body rising through the driving of going up and down with motor, make lifting body be positioned at the height corresponding with second substrate board treatment.And substrate is passed out to second substrate board treatment from self-powered platform.
Like this, transfer to the up-down that second substrate board treatment carries out substrate from first substrate board treatment.In addition, carry out the action opposite, and transfer to the up-down that said first substrate board treatment carries out substrate from said second substrate board treatment with aforementioned activities through making substrate elevating transferring device.
In addition, as the prior art related, following patent documentation 1 disclosed technology is arranged with the present invention.
Patent documentation 1: the spy of Japan opens flat 1-318247 communique
But in above-mentioned general substrate elevating transferring device, because the self-powered platform of supporting substrates is arranged on the up-down guide part with the mode that can go up and down, institute is so that substrate is held in lodging (level) posture goes up and down.Thus, as substrate elevating transferring device occupy the area of plane (area of plane is set), at least one needs are opened more than the area of plane of amount of substrate.Therefore, the area of plane of occupying of substrate elevating transferring device increases, and effective utilization in space becomes difficult in the factory.Especially, in recent years, the maximization of substrate develops rapidly, and this problem becomes more remarkable.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can solve substrate elevating transferring device foregoing problems, new construction and processing substrate transfer system.
Substrate elevating transferring device of the present invention; Be disposed at lower floor and carrying out first substrate board treatment of the processing of substrate and be configured in the upper strata and carry out between second substrate board treatment to the processing of substrate; Carrying out the up-down of substrate transfers; Possess: the prime switching part; Can being arranged on a side of said first substrate board treatment, and having the prime that keeps substrate and switch and use retaining member, the posture of substrate is switched in the posture and erecting between posture of lodging around the mode that the axle center of level is shaken; Prime switches uses driver, and said prime switching part is shaken; The second switching part; Can be arranged on a side of said second substrate board treatment around the mode that the axle center of level is shaken; And have the second that keeps substrate and switch and use retaining member, the posture of substrate is switched in the posture and erecting between posture of lodging; Second switches uses driver, and said second switching part is shaken; Endless member, the mode of walking circulating is arranged on the scaffold of erectting a side of being located at said prime switching part, and extends along the vertical direction; Driver is used in walking, makes said endless member circulation walking; Retaining member is used in a plurality of up-downs, is arranged on the said endless member to devices spaced apart in a circumferential direction, and keeps erecting the substrate of posture.
In addition, here, so-called " setting " is except directly being provided with, and also comprises situation about being provided with indirectly through intermediary's parts.Likewise, so-called " configuration " is except directly disposing, and also comprises situation about disposing indirectly through intermediary's parts.In addition, so-called " processing of substrate " comprises the transport process of substrate, the routine processes of substrate, the keeping processing of substrate etc., in the routine processes process, comprises etch processes, CVD processing, PVD processing etc.
According to substrate elevating transferring device of the present invention, the substrate that is positioned at the assigned position of said first substrate board treatment is kept with retaining member by said prime switching.Secondly, said prime switching is driven with driver shakes said prime switching part, and the posture of substrate is switched to erecting posture from the lodging posture.And the said up-down that the substrate that erects posture is positioned at the height corresponding with said first substrate board treatment keeps with retaining member, and removes said prime and switch the hold mode with retaining member.And said walking driver is driven and is made said endless member to direction circulation walking, keeps making substrate to rise with erecting posture.Through repeating aforesaid action, a plurality of substrates are seen off to said substrate elevating transferring device from said first substrate board treatment.
The said up-down of maintenance substrate is positioned at retaining member after the height corresponding with said second substrate board treatment, is switched by said second to keep substrate with retaining member, and said up-down is disengaged with the hold mode of retaining member.And, said second being switched said second switching part is shaken with driver drives, the posture of substrate is switched to the lodging posture from erecting posture, and the hold mode that said second switches with retaining member is disengaged.Through repeating aforesaid action, a plurality of substrates are seen off to said second substrate board treatment from said substrate elevating transferring device.
Like this, carry out transferring to the up-down of the substrate of said second substrate board treatment from said first substrate board treatment.In addition, through the action opposite, carry out transferring to the up-down of the substrate of said first substrate board treatment from said second substrate board treatment with aforementioned activities.
In a word, in the present invention, have said prime and switch said prime switching part with retaining member can be arranged on a side of said first substrate board treatment around the mode that the axle center of level is shaken; Have said second and switch said second switching part with retaining member can be arranged on a side of said second substrate board treatment around the mode that the axle center of level is shaken; A plurality of said up-downs are arranged on to devices spaced apart on the said endless member with retaining member in a circumferential direction; Thereby as stated; Can keep making substrate elevating with erecting posture, and can the area of plane of occupying of said substrate elevating transferring device be suppressed to the area of plane less than the amount of a substrate.
In addition, the said endless member that extends along the vertical direction is arranged on the said scaffold with the mode of the walking that can circulate; A plurality of said up-downs are arranged on to devices spaced apart on the said endless member with retaining member in a circumferential direction; Thereby can be from said first substrate board treatment to said second substrate board treatment; Perhaps; To said first substrate board treatment, go up and down to transfer a plurality of substrates from said second substrate board treatment continuously.
Substrate elevating transferring device of the present invention is to carry out device that the up-down of the processing of substrate and substrate is transferred, has: be disposed at lower floor, carry out first substrate board treatment to the processing of substrate; Be configured in the upper strata, carry out second substrate board treatment to the processing of substrate; And the aforesaid substrate up-down transfer device that between said first substrate board treatment and said second substrate board treatment, carries out the up-down handover of substrate.
According to substrate elevating transferring device of the present invention, can bring into play the identical effect of effect with aforesaid substrate up-down transfer device.
The effect of invention
According to the present invention; Can the area of plane of occupying of said substrate elevating transferring device be suppressed to the area of plane less than the amount of a substrate; And can cut down the area of plane of occupying of said substrate elevating transferring device fully, realize effective utilization in space in the factory.
In addition; Because can be from said first substrate board treatment to said second substrate board treatment; Perhaps, to said second substrate board treatment, go up and down to transfer a plurality of substrates from said second substrate board treatment continuously; So can shorten the circulation timei (productive temp time (tact time)) that the up-down of substrate is transferred, and can improve a series of operating efficiency relevant with substrate.
Description of drawings
Fig. 1 is the sectional view of the execution mode of expression processing substrate transfer system of the present invention.
Fig. 2 is the sectional view of the action of the said processing substrate transfer system of expression.
Fig. 3 is the sectional view of the action of the said processing substrate transfer system of expression.
Fig. 4 is the flat cutting view along the IV-IV line among Fig. 1.
Fig. 5 is the flat cutting view along the V-V line among Fig. 1.
Fig. 6 goes up and down with the peripheral stereogram of clamper (clamper).
Fig. 7 is that expression is gone up and down with the sectional view that unclamps (unclamp) action of clamper.
Among the figure:
LF-lower floor base plate, UF-upper strata base plate, W-substrate, 1-processing substrate transfer system, the 3-first substrate transport process device, the 5-second substrate transport process device; The 7-substrate elevating is transferred dress, 11-first floating unit, and 15-first conveying roller, 17-first carries and uses motor, 21-second floating unit, 25-second conveying roller; 27-second carries and use motor, 29-prime switching part, and 33-first axis of rocking, 35 one the first swing arms, absorption layer is used in the switching of 37-prime; The 39-prime switches uses motor, 41-second switching part, and 45-second axis of rocking, 47-second swing arm, 49-second switch uses absorption layer; The 51-second switches uses motor, 53-scaffold, 55-top runner, 59-bottom runner, 63-endless member; Motor is used in the 65-walking, the 67-connecting rod, and 69-goes up and down to use clamper, 71-clamp body, 73-fixed clamp pawl; The movable gripper jaw of 77-, the 79-working lever, the 81-spring, 83-first unclamps and uses cylinder, and 87-second unclamps and uses cylinder.
Embodiment
Referring to figs. 1 through Fig. 7 an embodiment of the invention are described.In addition, in the accompanying drawing, " FF " expression the place ahead to, " FR " expression rear to, " L " expression left to, " R " expression right-hand to.
As shown in Figure 1, the processing substrate transfer system 1 of this execution mode is transport process (to the processing of substrate) and the system of going up and down to transfer that carries out the substrate W of glass substrate etc.And processing substrate transfer system 1 has: be arranged at the base plate LF of lower floor and carry out the first substrate transport process device (first substrate board treatment) 3 of the transport process of substrate W; Be arranged at upper strata base plate UF and substrate W carried out the second substrate transport process device (second substrate board treatment) 5 of transport process; And the substrate elevating transferring device 7 of between the first substrate transport process device 3 and the second substrate transport process device 5, carrying out the up-down handover of substrate W.
Structure to the first substrate transport process device 3 describes.
As shown in Figure 1, be provided with the first processing unit main body 9 at the base plate LF of lower floor.The first processing unit main body 9 constitutes the pedestal of the first substrate transport process device 3.In addition, as shown in Figure 4, the first processing unit main body 9 is provided with a plurality of first floating units 11 that make substrate W suspension through the pressure of air.Be formed with the nozzle 11n of the frame shape of ejection air at the upper surface of each first floating unit 11.Each nozzle 11n opens shown in the 2006-182563 communique like the spy of Japan, constitutes with respect to vertical direction to the unit center tilt.
In addition, also can replace the nozzle 11n of frame shape, form the nozzle of a plurality of circular hole at the upper surface of each first floating unit 11.
On conveying Width (fore-and-aft direction), be provided with the pair of first rolls support unit 13 that extends along throughput direction (left and right directions) on the first processing unit main body 9 isolator.On each first roller support unit 13, on throughput direction, be provided with to devices spaced apart a plurality of first conveying rollers 15 with the mode supporting substrates W that can carry.Each first conveying roller 15 can be around the rotation of the axle center of level.And, be respectively arranged with in the appropriate location of each first roller support unit 13 first of a plurality of first conveying rollers 15 rotations are carried with motor 17.Respectively first carry output shaft (omit and illustrate) to pass through to link by the interlinked mechanism (omitting diagram) of formations such as worm screw and worm gear (worm screwand worm gear wheel) and rotating shaft (omission illustrates) interlock of a plurality of first conveying rollers 15 with motor 17.
Structure to the second substrate transport process device 5 describes.
As shown in Figure 1, upper strata base plate UF is provided with the second processing unit main body 19.The second processing unit main body 19 constitutes the pedestal of the second substrate transport process device 5.In addition, as shown in Figure 5, the second processing unit main body 19 is provided with a plurality of second floating units 21 that make substrate W suspension through the pressure of air.Likewise be formed with the nozzle 21n of the frame shape of ejection air at the upper surface of each second floating unit 21 and first floating unit 11.
On the conveying Width, be provided with a pair of second roller support unit 23 that extends along throughput direction isolator on the second processing unit main body 19.On each second roller support unit 23, on throughput direction, be provided with to devices spaced apart a plurality of second conveying rollers 25 with the mode supporting substrates W that can carry.Each second conveying roller 25 can be around the rotation of the axle center of level.And, be respectively arranged with in the appropriate location of each second roller support unit 23 second of a plurality of second conveying rollers 25 rotations are carried with motor 27.Each second carries output shaft (omitting diagram) with motor 27 through rotating shaft (omitting diagram) the interlock binding with a plurality of second conveying rollers 25 of the interlinked mechanism (omitting diagram) that is made up of worm screw and worm gear etc.
Concrete structure to substrate elevating transferring device 7 describes.
As shown in Figure 1; Near the left side of the first processing unit main body 9 of the first substrate transport process device 3, be provided with the posture that makes substrate W and switch to the prime switching part 29 that erects (vertically) posture (posture of in Fig. 1, representing) and lodging (level) posture (posture of in Fig. 1, representing) by solid line by imaginary line.Prime switching part 29 can shake (rotation) around the axle center of level through a pair of carriage 31.In addition, as shown in Figure 4, prime switching part 29 has: first axis of rocking 33; A pair of first swing arm 35 that extends abreast; And a plurality of primes of the inside of absorption substrate W switch with absorption layer (retaining member is used in the prime switching) 37.First axis of rocking 33 is arranged on the mode that can rotate near the left side of the first processing unit main body 9 through a pair of carriage 31.The outer peripheral face of a pair of first swing arm 35 and first axis of rocking 33 forms.A plurality of primes switchings are arranged on to devices spaced apart on each first swing arm 35 with absorption layer 37 in the longitudinal direction.
And a side carriage 31 is provided with the prime that prime switching part 29 is shaken and switches with motor (driver is used in the prime switching) 39.The output shaft (omitting diagram) that prime switches with motor 39 waits and the binding of first axis of rocking, 33 interlocks through shaft coupling (joint) (omitting diagram).Here, even prime switching part 29 shakes, a pair of first swing arm 35 is not interfered with first floating unit 11 yet.
In addition; Also can replace the prime on first swing arm 35 to switch with absorption layer 37; Switch with the retaining member setting as prime and to keep the prime of the inside of substrate W to switch non-contactly, or the prime of controlling the end of (maintenances) substrate W switches with clamper (omission illustrates) with bernoulli gripper (Bernoulli chuck) (omitting diagram).
Like Fig. 1 and shown in Figure 3; Near the left side of the second processing unit main body 19 of the second substrate transport process device 5, be provided with the posture that makes substrate W and switch to the second switching part 41 that erects posture (posture of in Fig. 3, representing) and lodging posture (posture of in Fig. 3, representing) by solid line by imaginary line.Second switching part 41 can shake (rotation) around the axle center of level through a pair of carriage 43.In addition, as shown in Figure 5, second switching part 41 has: second axis of rocking 45; A pair of second swing arm 47 that extends abreast; And a plurality of seconds of the inside of absorption substrate W switch with absorption layer (retaining member is used in the second switching) 49.Second axis of rocking 45 is arranged on the mode that can rotate near the left side of the second processing unit main body 19 through a pair of carriage 43.The outer peripheral face of a pair of second swing arm 47 and second axis of rocking 45 forms.A plurality of seconds switchings are arranged on to devices spaced apart on each second swing arm 47 with absorption layer 49 in the longitudinal direction.
And a side carriage 43 is provided with the second that second switching part 41 is shaken and switches with motor (driver is used in the second switching) 51.The output shaft (omitting diagram) that second switches with motor 51 waits and the binding of second axis of rocking, 45 interlocks through shaft coupling (omitting diagram).Here, even second switching part 41 shakes, a pair of second swing arm 47 can not interfered with second floating unit 21 yet.
In addition; Also can replace the second on second swing arm 47 to switch with absorption layer 49; Switch with the retaining member setting as second and to keep the second of the inside of substrate W to switch non-contactly, or the second of controlling the end of (maintenances) substrate W switches with clamper (omission illustrates) with bernoulli gripper (omitting diagram).
Like Fig. 1, Fig. 4 and shown in Figure 5, near the left side of prime switching part 29, erect and be provided with a pair of scaffold 53 that extends along the vertical direction.A pair of scaffold 53 separate front and back ground is provided with, and is bonded integratedly.Be provided with the pair of upper runner 55 of top belt wheel (pulley) or top sprocket wheel (sprocket) etc. with the mode that can rotate through common top rotating shaft 57 on the top of each scaffold 53.In addition, be provided with a pair of bottom runner 59 of bottom belt wheel or bottom sprocket wheel etc. with the mode that can rotate through common bottom rotating shaft 61 in the bottom of each scaffold 53.
And the endless member 63 of endless belt or the endless chain etc. of, can circulate walking upwardly extending at upper and lower is wound up into bottom runner 59 from the top runner 55 with corresponding relation.In other words, a pair of endless member 63 is arranged on 53 of a pair of scaffolds through top runner 55 and bottom runner 59 with the mode of walking that can circulate.And, make the walking of a pair of endless member 63 circulation walkings be arranged on the appropriate location on top of a side scaffold 53 with motor (walk and use driver) 65.Walking links with top rotating shaft 57 interlocks through shaft coupling (omitting diagram) with the output shaft (omitting diagram) of motor 65.
Like Fig. 1, Fig. 6 and shown in Figure 7, be arranged on the circumferencial direction of endless member 63 to upwardly extending a plurality of connecting rod 67 devices spaced apart in front and back, to link a pair of endless member 63.The up-down that is provided with the end of controlling the substrate W that erects posture at the both ends of each connecting rod 67 is with clamper (going up and down to use retaining member) 69.That is, a plurality of up-downs are arranged on to devices spaced apart on a pair of endless member 63 through a plurality of connecting rods 67 with clamper 69 in a circumferential direction.
Each goes up and down and possesses clamp body 71, fixed clamp pawl 73, movable gripper jaw 77, working lever 79 and spring 81 with clamper 69.Clamp body 71 is arranged on the connecting rod 67.Fixed clamp pawl 73 is provided with (formation) integratedly with clamp body 71.Movable gripper jaw 77 is arranged on the clamp body 71, and can or unclamp direction and shake (rotation) to clamping direction through locking pin 75.In addition, movable gripper jaw 77 is controlled the end of substrate W with 73 cooperations of fixed clamp pawl.Working lever 79 is provided with the base portion of movable gripper jaw 77 integratedly.Spring 81 is arranged on the clamp body 71 with the mode between connecting rod 67 and working lever 79.In addition, spring 81 suppresses movable gripper jaw 77 to clamping direction.
First unclamps the appropriate location that is arranged on the bottom of each scaffold 53 with cylinder (first unclamp use driver) 83 through top hold-down arm 85.First unclamps the up-down that is positioned at the height corresponding with the first substrate transport process device 3 with 83 pairs in cylinder pushes with the working lever 79 of clamper 69, and the elastic force pressure of antagonistic spring 81 makes movable gripper jaw 77 shake (moving) to unclamping direction.Likewise, second unclamps the appropriate location that is arranged on the top of each scaffold 53 with cylinder (second unclamp use driver) 87 through bottom hold-down arm 89.Second unclamps the up-down that is positioned at the height corresponding with the second substrate transport process device 5 with 87 pairs in cylinder pushes with the working lever 79 of clamper 69, and the elastic force pressure of antagonistic spring 81 makes movable gripper jaw 77 shake to unclamping direction.
In addition, going up and down is arranged on a pair of endless member 63 through connecting rod 67 with clamper 69, replaces it to go up and down use retaining member as other, also can up-down that the surface of substrate W is adsorbed be set with absorption layer (omission illustrates) through connecting rod 67 grades.
Then, effect and the effect to this execution mode describes.
Through nozzle 11n ejection air from a plurality of first floating units 11; And drive a pair of first and carry with motor 17 a plurality of first conveying rollers 15 are rotated; Thereby substrate W direction suspension is left carried, make substrate W be positioned at the upside (assigned position of the first substrate transport process device 3) (with reference to Fig. 4) of a pair of first swing arm 35 of standby.
Substrate W is positioned at after the upside of a pair of first swing arm 35 of standby, switches the inside of adsorbing substrate W by a plurality of primes with absorption layer 37.In addition, as shown in Figure 1, drive first and unclamp with cylinder 83 and the up-down that makes the height and position corresponding and shake (with reference to Fig. 7) to unclamping direction with the elastic force pressure of movable gripper jaw 77 antagonistic springs 81 of clamper 69 with the first substrate transport process device 3.Secondly, as shown in Figure 1, drive prime and switch and prime switching part 29 is shaken, and the posture of substrate W switched to from the posture that lodges erect posture with motor 39.
And, make each first unclamp driving with cylinder 83 and stop and controlling the end of the substrate W that erects posture with clamper 69 with up-down, remove the adsorbed state of a plurality of primes switchings with absorption layer 37.And, as shown in Figure 2, make walking drive and make endless member 63 to direction circulation walking with motor 65, keep making substrate W to rise with erecting posture.Through repeating aforesaid action, can a plurality of substrate W be seen off to substrate elevating transferring device 7 from the first substrate transport process device 3 successively.
As shown in Figure 3, when the up-down of controlling the end of substrate W rose to the height corresponding with the second substrate transport process device 5 with clamper 69, the circulation walking of endless member 63 stopped.Secondly, switch the inside by a plurality of seconds with absorption layer 49 absorption substrate W.Make each second unclamp the up-down that drives and make the height and position corresponding with the second substrate transport process device 5 with cylinder 87 and shake to unclamping direction with the elastic force pressure of movable gripper jaw 77 antagonistic springs 81 of clamper 69, the releasing up-down is with the gripping state (with reference to Fig. 7) of clamper 69.
And, as shown in Figure 3, drive the second switching and second switching part 41 is shaken with motor 51, the posture of substrate W is switched to the lodging posture from erecting posture, remove a plurality of seconds and switch adsorbed state with absorption layer 49.Through repeating aforesaid action, can a plurality of substrate W be seen off to the second substrate transport process device 5 from substrate elevating transferring device 7 successively.
Removing a plurality of seconds switches after the adsorbed state with absorption layer 49; Make the nozzle 21n ejection of air from a plurality of second floating units 21; And drive a pair of second and carry with motor 27 a plurality of second conveying rollers 25 are rotated; Thus substrate W direction suspension is to the right carried, make substrate W be positioned at the assigned position (with reference to Fig. 5) of the second substrate transport process device 5.
That kind as described above, can carry out successively the substrate W of the first substrate transport process device 3 transport process, from the first substrate transport process device 3 to the up-down of the substrate W of the second substrate transport process device 5 transfer, and the transport process of the substrate W of the second substrate transport process device 5.In addition; Through the action opposite with aforementioned activities, can carry out successively the substrate W of the second substrate transport process device 5 transport process, from the second substrate transport process device 5 to the up-down of the substrate W of the first substrate transport process device 3 transfer, and the transport process of the substrate W of the first substrate transport process device 3.
In a word; In this execution mode; I) having a plurality of primes switches with the prime switching part 29 of absorption layer 37 can be arranged on around the mode that the axle center of level is shaken near the left side of the first substrate transport process device 3; Ii) having a plurality of seconds switches with the second switching part 41 of absorption layer 49 can be arranged on around the mode that the axle center of level is shaken near the left side of the second substrate transport process device 5; Iii) a plurality of up-downs are arranged on to devices spaced apart on a pair of endless member 63 with clamper 69 in a circumferential direction; Thereby as stated, can keep making substrate W to go up and down with erecting posture, can the area of plane of occupying of substrate elevating transferring device 7 be suppressed to the area of plane less than the amount of a substrate W.
In addition; In this execution mode, a pair of endless member 63 that iv) extends along the vertical direction is arranged on a pair of scaffold 53 with the mode of the walking that can circulate, and v) a plurality of up-downs are arranged on to devices spaced apart on a pair of endless member 63 with clamper 69 in a circumferential direction; Thereby can be from the first substrate transport process device 3 to the second substrate transport process device 5; Perhaps, to the first substrate transport process device 3, go up and down to transfer a plurality of substrate W from the second substrate transport process device 5 continuously.
Therefore, owing to can the area of plane of occupying of substrate elevating transferring device 7 be suppressed to the area of plane less than the amount of a substrate W, thus can fully cut down the area of plane of occupying of substrate elevating transferring device 7, and realize effective utilization in space in the factory.
In addition; Because can be from the first substrate transport process device 3 to the second substrate transport process device 5; Perhaps; Go up and down to transfer a plurality of substrate W continuously to the first substrate transport process device 3 from the second substrate transport process device 5,, can improve a series of operating efficiency relevant with substrate W so can shorten the circulation timei that the up-down of substrate W is transferred.
And, under the big situation of the vertical separation of base plate LF of lower floor and upper strata base plate UF, increase the number of going up and down with clamper 69, can utilize substrate elevating transferring device 7 as the device of taking care of a plurality of substrate W.
In addition, the invention is not restricted to the explanation of aforesaid execution mode, can implement in every way.In addition, scope of the present invention is not limited to these execution modes.
Claims (3)
1. substrate elevating transferring device; Be disposed at lower floor and carrying out first substrate board treatment of the processing of substrate and be disposed at the upper strata and carry out between second substrate board treatment to the processing of substrate; Carry out the up-down of substrate and transfer, it is characterized in that possessing:
The prime switching part can being arranged on a side of said first substrate board treatment around the mode that the axle center of level is shaken, and having the prime that keeps substrate and switches and use retaining member, and the posture of substrate is switched to the lodging posture and erects posture;
Prime switches uses driver, and said prime switching part is shaken;
The second switching part can being arranged on a side of said second substrate board treatment around the mode that the axle center of level is shaken, and having the second that keeps substrate and switches and use retaining member, and the posture of substrate is switched to the lodging posture and erects posture;
Second switches uses driver, and said second switching part is shaken;
Endless member, the mode of walking circulating is arranged on the scaffold of erectting the same side that is arranged at said prime switching part and second switching part, and extends along the vertical direction;
Driver is used in walking, makes said endless member circulation walking; And
Retaining member is used in a plurality of up-downs, is arranged on the said endless member to devices spaced apart in a circumferential direction, and keeps erecting the substrate of posture.
2. substrate elevating transferring device according to claim 1 is characterized in that,
Each goes up and down and to possess a pair of gripper jaw with retaining member, is to use clamper by the up-down that this gripper jaw is controlled the end of substrate,
This substrate elevating transferring device also possesses:
First unclamps and uses driver, and the said up-down that is positioned at the height corresponding with said first substrate board treatment is moved to unclamping direction with at least one side's of clamper said gripper jaw; And
Second unclamps and uses driver, and the said up-down that is positioned at the height corresponding with said second substrate board treatment is moved to unclamping direction with at least one side's of clamper said gripper jaw.
3. a processing substrate transfer system carries out the processing of substrate and the up-down of substrate are transferred, and it is characterized in that having:
First substrate board treatment is disposed at lower floor and carries out the processing to substrate;
Second substrate board treatment is disposed at the upper strata and carries out the processing to substrate; And
The substrate elevating transferring device of claim 1 or claim 2 record is carried out the up-down of substrate and is transferred between said first substrate board treatment and said second substrate board treatment.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-082699 | 2009-03-30 | ||
| JP2009082699A JP5347652B2 (en) | 2009-03-30 | 2009-03-30 | Substrate lifting / lowering transfer apparatus and substrate processing / transfer system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101853799A CN101853799A (en) | 2010-10-06 |
| CN101853799B true CN101853799B (en) | 2012-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101454766A Active CN101853799B (en) | 2009-03-30 | 2010-03-23 | Substrate elevating transferring device and substrate processing transferring system |
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| Country | Link |
|---|---|
| JP (1) | JP5347652B2 (en) |
| CN (1) | CN101853799B (en) |
| TW (1) | TWI397494B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102931120B (en) * | 2012-10-25 | 2017-09-29 | 上海集成电路研发中心有限公司 | Work-piece transmission system |
| CN110775863A (en) * | 2019-09-17 | 2020-02-11 | 苏州晶洲装备科技有限公司 | Lifting system for OLED panel display cleaning equipment |
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-
2009
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2010
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5347652B2 (en) | 2013-11-20 |
| TW201038457A (en) | 2010-11-01 |
| TWI397494B (en) | 2013-06-01 |
| JP2010238764A (en) | 2010-10-21 |
| CN101853799A (en) | 2010-10-06 |
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