CN101853799A - Substrate elevating transferring device and processing substrate transfer system - Google Patents
Substrate elevating transferring device and processing substrate transfer system Download PDFInfo
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- CN101853799A CN101853799A CN 201010145476 CN201010145476A CN101853799A CN 101853799 A CN101853799 A CN 101853799A CN 201010145476 CN201010145476 CN 201010145476 CN 201010145476 A CN201010145476 A CN 201010145476A CN 101853799 A CN101853799 A CN 101853799A
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Abstract
In substrate elevating transferring device, side at first substrate board treatment is switched the prime switching part of using retaining member can have prime around the mode setting that the axle center of level is shaken, side at second substrate board treatment is switched the second switching part of using retaining member can have second around the mode setting that the axle center of level is shaken, be arranged in setting that the mode with the walking that can circulate is provided with the endless member that extends along the vertical direction on the scaffold of a side of prime switching part, a plurality of lifting retaining members are set to devices spaced apart on endless member in a circumferential direction.According to this substrate elevating transferring device, can cut down it fully and occupy the area of plane, can effectively utilize space in the factory.
Description
Technical field
The present invention relates to carry the substrate elevating transferring device and the processing substrate transfer system of use such as (Clean Material Handling) field in cleaning.
Background technology
In the field that cleaning is carried, use following substrate elevating transferring device: be disposed at first substrate board treatment of lower floor's base plate and be disposed between second substrate board treatment of upper strata base plate, carrying out the lifting of substrates such as glass substrate and transfer.The structures of general substrate elevating transferring device etc. are following described.
Promptly, near first substrate board treatment, be provided with along the vertical direction the lifting guide part that extends, be provided with the self-powered platform that is used for supporting substrates at this lifting guide part in mode that can lifting.In addition, in the appropriate location of lifting guide part, be provided with the lifting motor that makes the self-powered platform lifting.Here, self-powered platform can be to draw substrate and send with corresponding relative first substrate board treatment of height of first substrate board treatment.In addition, self-powered platform can be to draw substrate and send with corresponding relative second substrate board treatment of height of second substrate board treatment.
Therefore, with the driving of motor lifting body is descended, make lifting body be positioned at the height corresponding with first substrate board treatment by lifting.Secondly, substrate is drawn out to self-powered platform from first substrate board treatment.And, with the driving of motor lifting body is risen by lifting, make lifting body be positioned at the height corresponding with second substrate board treatment.And substrate is sent second substrate board treatment from self-powered platform.
Like this, transfer to the lifting that second substrate board treatment carries out substrate from first substrate board treatment.In addition, carry out the action opposite, and transfer to the lifting that described first substrate board treatment carries out substrate from described second substrate board treatment with aforementioned activities by making substrate elevating transferring device.
In addition, as the prior art related, following patent documentation 1 disclosed technology is arranged with the present invention.
Patent documentation 1: the spy of Japan opens flat 1-318247 communique
But in above-mentioned general substrate elevating transferring device, because the self-powered platform of supporting substrates is arranged on the lifting guide part in mode that can lifting, institute carries out lifting so that substrate is held in lodging (level) posture.Thus, as substrate elevating transferring device occupy the area of plane (area of plane is set), at least one needs are opened more than the area of plane of amount of substrate.Therefore, the area of plane of occupying of substrate elevating transferring device increases, and effective utilization in space becomes difficult in the factory.Especially, in recent years, the maximization of substrate develops rapidly, and this problem becomes more remarkable.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can solve substrate elevating transferring device foregoing problems, new construction and processing substrate transfer system.
Substrate elevating transferring device of the present invention, be disposed at lower floor and carrying out first substrate board treatment of the processing of substrate and be configured in the upper strata and carry out between second substrate board treatment to the processing of substrate, carrying out the lifting of substrate transfers, possess: the prime switching part, can be arranged on a side of described first substrate board treatment around the mode that the axle center of level is shaken, and have the prime that keeps substrate and switch and use retaining member, the posture of substrate is switched in the posture and erecting between posture of lodging; Prime switches uses driver, and described prime switching part is shaken; The second switching part, can be arranged on a side of described second substrate board treatment around the mode that the axle center of level is shaken, and have the second that keeps substrate and switch and use retaining member, the posture of substrate is switched in the posture and erecting between posture of lodging; Second switches uses driver, and described second switching part is shaken; Endless member, the mode of walking circulating is arranged on the scaffold of erectting a side of being located at described prime switching part, and extends along the vertical direction; Driver is used in walking, makes described endless member circulation walking; A plurality of lifting retaining members are arranged on the described endless member to devices spaced apart in a circumferential direction, and keep erecting the substrate of posture.
In addition, here, so-called " setting " is except directly being provided with, and also comprises situation about being provided with indirectly by intermediary's parts.Similarly, so-called " configuration " is except directly disposing, and also comprises situation about disposing indirectly by intermediary's parts.In addition, so-called " processing of substrate " comprises the transport process of substrate, the routine processes of substrate, the keeping processing of substrate etc., comprises etch processes, CVD processing, PVD processing etc. in the routine processes process.
According to substrate elevating transferring device of the present invention, the substrate that is positioned at the assigned position of described first substrate board treatment is kept with retaining member by described prime switching.Secondly, described prime switching is driven with driver described prime switching part is shaken, and the posture of substrate is switched to erecting posture from the lodging posture.And the described lifting that the substrate that erects posture is positioned at the height corresponding with described first substrate board treatment keeps with retaining member, and removes described prime and switch hold mode with retaining member.And described walking driver is driven and makes described endless member to direction circulation walking, keeps making substrate to rise with erecting posture.By repeating aforesaid action, a plurality of substrates are sent to described substrate elevating transferring device from described first substrate board treatment.
The described lifting of maintenance substrate is positioned at retaining member after the height corresponding with described second substrate board treatment, is switched by described second to keep substrate with retaining member, and described lifting is disengaged with the hold mode of retaining member.And, described second being switched described second switching part is shaken with driver drives, the posture of substrate is switched to the lodging posture from erecting posture, and the hold mode that described second switches with retaining member is disengaged.By repeating aforesaid action, a plurality of substrates are sent to described second substrate board treatment from described substrate elevating transferring device.
Like this, carry out transferring to the lifting of the substrate of described second substrate board treatment from described first substrate board treatment.In addition, by the action opposite, carry out transferring to the lifting of the substrate of described first substrate board treatment from described second substrate board treatment with aforementioned activities.
In a word, in the present invention, have described prime and switch described prime switching part with retaining member can be arranged on a side of described first substrate board treatment around the mode that the axle center of level is shaken; Have described second and switch described second switching part with retaining member can be arranged on a side of described second substrate board treatment around the mode that the axle center of level is shaken; A plurality of described liftings are arranged on to devices spaced apart on the described endless member with retaining member in a circumferential direction, thereby as mentioned above, substrate elevating can be kept making with erecting posture, and the area of plane of occupying of described substrate elevating transferring device the area of plane less than the amount of a substrate can be suppressed to.
In addition, the described endless member that extends along the vertical direction is arranged on the described scaffold in the mode of the walking that can circulate; A plurality of described liftings are arranged on to devices spaced apart on the described endless member with retaining member in a circumferential direction, thereby can be from described first substrate board treatment to described second substrate board treatment, perhaps, to described first substrate board treatment, a plurality of substrates are transferred in lifting continuously from described second substrate board treatment.
Substrate elevating transferring device of the present invention is to carry out device that the lifting of the processing of substrate and substrate is transferred, has: be disposed at lower floor, carry out first substrate board treatment to the processing of substrate; Be configured in the upper strata, carry out second substrate board treatment to the processing of substrate; And the aforesaid substrate lifting transfer device that between described first substrate board treatment and described second substrate board treatment, carries out the lifting handover of substrate.
According to substrate elevating transferring device of the present invention, can bring into play the identical effect of effect with aforesaid substrate lifting transfer device.
The effect of invention
According to the present invention, the area of plane of occupying of described substrate elevating transferring device can be suppressed to the area of plane less than the amount of a substrate, and can cut down the area of plane of occupying of described substrate elevating transferring device fully, realize effective utilization in space in the factory.
In addition, because can be from described first substrate board treatment to described second substrate board treatment, perhaps, from described second substrate board treatment to described second substrate board treatment, a plurality of substrates are transferred in lifting continuously, so can shorten the circulation timei (productive temp time (tact time)) that the lifting of substrate is transferred, and can improve a series of operating efficiency relevant with substrate.
Description of drawings
Fig. 1 is the sectional view of the execution mode of expression processing substrate transfer system of the present invention.
Fig. 2 is the sectional view of the action of the described processing substrate transfer system of expression.
Fig. 3 is the sectional view of the action of the described processing substrate transfer system of expression.
Fig. 4 is the flat cutting view along the IV-IV line among Fig. 1.
Fig. 5 is the flat cutting view along the V-V line among Fig. 1.
Fig. 6 is the stereogram of lifting with clamper (clamper) periphery.
Fig. 7 is the sectional view that unclamp (unclamp) action of expression lifting with clamper.
Among the figure:
LF-lower floor base plate, UF-upper strata base plate, W-substrate, 1-processing substrate transfer system, the 3-first substrate transport process device, the 5-second substrate transport process device, the 7-substrate elevating is transferred dress, 11-first floating unit, 15-first conveying roller, 17-first carries and uses motor, 21-second floating unit, 25-second conveying roller, 27-second carries and uses motor, 29-prime switching part, 33-first axis of rocking, 35 one the first swing arms, 37-prime switch use absorption layer, 39-prime switching motor, 41-second switching part, 45-second axis of rocking, 47-second swing arm, the 49-second switches uses absorption layer, and the 51-second switches uses motor, 53-scaffold, 55-top runner, 59-bottom runner, 63-endless member, 65-walking motor, the 67-connecting rod, 69-lifting clamper, 71-clamp body, 73-fixed clamp pawl, the movable gripper jaw of 77-, 79-working lever, 81-spring, 83-first unclamps and uses cylinder, and 87-second unclamps and uses cylinder.
Embodiment
Referring to figs. 1 through Fig. 7 an embodiment of the invention are described.In addition, in the accompanying drawing, " FF " expression the place ahead to, " FR " expression rear to, " L " expression left to, " R " represents right.
As shown in Figure 1, the processing substrate transfer system 1 of present embodiment is to carry out the transport process (to the processing of substrate) of substrate W of glass substrate etc. and the system that lifting is transferred.And processing substrate transfer system 1 has: be arranged at the base plate LF of lower floor and carry out the first substrate transport process device (first substrate board treatment) 3 of the transport process of substrate W; Be arranged at upper strata base plate UF and substrate W carried out the second substrate transport process device (second substrate board treatment) 5 of transport process; And the substrate elevating transferring device 7 of between the first substrate transport process device 3 and the second substrate transport process device 5, carrying out the lifting handover of substrate W.
Structure to the first substrate transport process device 3 describes.
As shown in Figure 1, be provided with the first processing unit main body 9 at the base plate LF of lower floor.The first processing unit main body 9 constitutes the pedestal of the first substrate transport process device 3.In addition, as shown in Figure 4, the first processing unit main body 9 is provided with a plurality of first floating units 11 that make substrate W suspension by the pressure of air.Be formed with the nozzle 11n of the frame shape of ejection air at the upper surface of each first floating unit 11.Each nozzle 11n opens shown in the 2006-182563 communique as the spy of Japan, constitutes oblique to the unit center inclination with respect to vertical direction.
In addition, also can replace the nozzle 11n of frame shape, form the nozzle of a plurality of circular hole at the upper surface of each first floating unit 11.
On conveying Width (fore-and-aft direction), be provided with the pair of first rolls support unit 13 that extends along throughput direction (left and right directions) on the first processing unit main body 9 isolator.On each first roller support unit 13, on throughput direction, be provided with to devices spaced apart a plurality of first conveying rollers 15 with the mode supporting substrates W that can carry.Each first conveying roller 15 can be around the rotation of the axle center of level.And, be respectively arranged with the first conveying motor 17 that makes 15 rotations of a plurality of first conveying roller in the appropriate location of each first roller support unit 13.Respectively first conveying is passed through to be linked by the interlinked mechanism (omitting diagram) of formations such as worm screw and worm gear (worm screwand worm gear wheel) and rotating shaft (omission illustrates) interlock of a plurality of first conveying rollers 15 with the output shaft (omit and illustrate) of motor 17.
Structure to the second substrate transport process device 5 describes.
As shown in Figure 1, base plate UF in upper strata is provided with the second processing unit main body 19.The second processing unit main body 19 constitutes the pedestal of the second substrate transport process device 5.In addition, as shown in Figure 5, the second processing unit main body 19 is provided with a plurality of second floating units 21 that make substrate W suspension by the pressure of air.Similarly be formed with the nozzle 21n of the frame shape of ejection air at the upper surface of each second floating unit 21 and first floating unit 11.
On the conveying Width, be provided with a pair of second roller support unit 23 that extends along throughput direction isolator on the second processing unit main body 19.On each second roller support unit 23, on throughput direction, be provided with to devices spaced apart a plurality of second conveying rollers 25 with the mode supporting substrates W that can carry.Each second conveying roller 25 can be around the rotation of the axle center of level.And, be respectively arranged with the second conveying motor 27 that makes 25 rotations of a plurality of second conveying roller in the appropriate location of each second roller support unit 23.Each second carries output shaft (omitting diagram) with motor 27 by rotating shaft (omitting diagram) the interlock binding with a plurality of second conveying rollers 25 of the interlinked mechanism (omitting diagram) that is made of worm screw and worm gear etc.
Concrete structure to substrate elevating transferring device 7 describes.
As shown in Figure 1, near the left side of the first processing unit main body 9 of the first substrate transport process device 3, be provided with the posture that makes substrate W and switch to the prime switching part 29 that erects (vertically) posture (posture of in Fig. 1, representing) and lodging (level) posture (posture of in Fig. 1, representing) by solid line by imaginary line.Prime switching part 29 can shake (rotation) around the axle center of level by a pair of carriage 31.In addition, as shown in Figure 4, prime switching part 29 has: first axis of rocking 33; A pair of first swing arm 35 of Yan Shening abreast; And a plurality of primes of the inside of absorption substrate W switch with absorption layer (prime switching retaining member) 37.First axis of rocking 33 is arranged in the mode that can rotate near the left side of the first processing unit main body 9 by a pair of carriage 31.The outer peripheral face of a pair of first swing arm 35 and first axis of rocking 33 forms.A plurality of primes switchings are arranged on to devices spaced apart on each first swing arm 35 in the longitudinal direction with absorption layer 37.
And a side carriage 31 is provided with the prime that prime switching part 29 is shaken and switches with motor (prime switching driver) 39.The output shaft (omitting diagram) that prime switches with motor 39 waits and the binding of first axis of rocking, 33 interlocks by shaft coupling (joint) (omitting diagram).Here, even prime switching part 29 shakes, a pair of first swing arm 35 is not interfered with first floating unit 11 yet.
In addition, also can replace the prime on first swing arm 35 to switch with absorption layer 37, keep the prime switching bernoulli gripper (Bernoulli chuck) (omitting diagram) of the inside of substrate W as the prime switching with the retaining member setting non-contactly, or control the prime switching clamper (omission diagram) of the end of (maintenance) substrate W.
As Fig. 1 and shown in Figure 3, near the left side of the second processing unit main body 19 of the second substrate transport process device 5, be provided with the posture that makes substrate W and switch to the second switching part 41 that erects posture (posture of in Fig. 3, representing) and lodging posture (posture of in Fig. 3, representing) by solid line by imaginary line.Second switching part 41 can shake (rotation) around the axle center of level by a pair of carriage 43.In addition, as shown in Figure 5, second switching part 41 has: second axis of rocking 45; A pair of second swing arm 47 of Yan Shening abreast; And a plurality of seconds of the inside of absorption substrate W switch with absorption layer (second switching retaining member) 49.Second axis of rocking 45 is arranged in the mode that can rotate near the left side of the second processing unit main body 19 by a pair of carriage 43.The outer peripheral face of a pair of second swing arm 47 and second axis of rocking 45 forms.A plurality of seconds switchings are arranged on to devices spaced apart on each second swing arm 47 in the longitudinal direction with absorption layer 49.
And a side carriage 43 is provided with the second that second switching part 41 is shaken and switches with motor (second switching driver) 51.The output shaft (omitting diagram) that second switches with motor 51 waits and the binding of second axis of rocking, 45 interlocks by shaft coupling (omitting diagram).Here, even second switching part 41 shakes, a pair of second swing arm 47 can not interfered with second floating unit 21 yet.
In addition, also can replace the second on second swing arm 47 to switch with absorption layer 49, keep the second switching bernoulli gripper (omitting diagram) of the inside of substrate W as the second switching with the retaining member setting non-contactly, or control the second switching clamper (omission diagram) of the end of (maintenance) substrate W.
As Fig. 1, Fig. 4 and shown in Figure 5, near the left side of prime switching part 29, erect and be provided with a pair of scaffold 53 that extends along the vertical direction.A pair of scaffold 53 separate front and back ground is provided with, and is bonded integratedly.Be provided with a pair of top runner 55 of top belt wheel (pulley) or top sprocket wheel (sprocket) etc. in the mode that can rotate by common top rotating shaft 57 on the top of each scaffold 53.In addition, be provided with a pair of bottom runner 59 of bottom belt wheel or bottom sprocket wheel etc. in the mode that can rotate by common bottom rotating shaft 61 in the bottom of each scaffold 53.
And, the endless belt of can circulate walking upwardly extending at upper and lower or the endless member 63 of endless chain etc. are wound up into bottom runner 59 from the top runner 55 with corresponding relation.In other words, a pair of endless member 63 is arranged on 53 of a pair of scaffolds by top runner 55 and bottom runner 59 in the mode of walking that can circulate.And, make the walking of a pair of endless member 63 circulation walkings be arranged on the appropriate location on top of a side scaffold 53 with motor (walk and use driver) 65.Walking links with top rotating shaft 57 interlocks by shaft coupling (omitting diagram) with the output shaft (omitting diagram) of motor 65.
As Fig. 1, Figure 6 and Figure 7, be arranged on the circumferencial direction of endless member 63 to upwardly extending a plurality of connecting rod 67 devices spaced apart in front and back, to link a pair of endless member 63.Be provided with the lifting clamper (lifting retaining member) 69 of the end of controlling the substrate W that erects posture at the both ends of each connecting rod 67.That is, a plurality of liftings are arranged on to devices spaced apart on a pair of endless member 63 by a plurality of connecting rods 67 in a circumferential direction with clamper 69.
Each lifting possesses clamp body 71, fixed clamp pawl 73, movable gripper jaw 77, working lever 79 and spring 81 with clamper 69.Clamp body 71 is arranged on the connecting rod 67.Fixed clamp pawl 73 is provided with (formation) integratedly with clamp body 71.Movable gripper jaw 77 is arranged on the clamp body 71, and can or unclamp direction and shake (rotation) to clamping direction by locking pin 75.In addition, movable gripper jaw 77 is cooperated with fixed clamp pawl 73 and is controlled the end of substrate W.Working lever 79 is provided with integratedly with the base portion of movable gripper jaw 77.Spring 81 is arranged on the clamp body 71 in the mode between connecting rod 67 and working lever 79.In addition, spring 81 suppresses movable gripper jaw 77 to clamping direction.
First unclamps the appropriate location that is arranged on the bottom of each scaffold 53 with cylinder (first unclamp use driver) 83 by top hold-down arm 85.First unclamps the lifting that is positioned at the height corresponding with the first substrate transport process device 3 with 83 pairs in cylinder pushes with the working lever 79 of clamper 69, and the elastic force pressure of antagonistic spring 81 makes movable gripper jaw 77 shake (moving) to unclamping direction.Similarly, second unclamps the appropriate location that is arranged on the top of each scaffold 53 with cylinder (second unclamp use driver) 87 by bottom hold-down arm 89.Second unclamps the lifting that is positioned at the height corresponding with the second substrate transport process device 5 with 87 pairs in cylinder pushes with the working lever 79 of clamper 69, and the elastic force pressure of antagonistic spring 81 makes movable gripper jaw 77 shake to unclamping direction.
In addition, lifting is arranged on a pair of endless member 63 by connecting rod 67 with clamper 69, replaces it as other lifting retaining members, also can the lifting absorption layer (omitting diagram) that the surface of substrate W is adsorbed be set by connecting rod 67 grades.
Then, effect and the effect to present embodiment describes.
By nozzle 11n ejection air from a plurality of first floating units 11, and drive a pair of first and carry with motor 17 a plurality of first conveying rollers 15 are rotated, thereby substrate W direction suspension is left carried, make substrate W be positioned at the upside (assigned position of the first substrate transport process device 3) (with reference to Fig. 4) of a pair of first swing arm 35 of standby.
Substrate W is positioned at after the upside of a pair of first swing arm 35 of standby, switches the inside with absorption layers 37 absorption substrate W by a plurality of primes.In addition, as shown in Figure 1, drive first and unclamp with cylinder 83 and the lifting that makes the height and position corresponding and shake (with reference to Fig. 7) to unclamping direction with the elastic force pressure of movable gripper jaw 77 antagonistic springs 81 of clamper 69 with the first substrate transport process device 3.Secondly, as shown in Figure 1, drive prime and switch and prime switching part 29 is shaken, and the posture of substrate W switched to from the posture that lodges erect posture with motor 39.
And, make each first unclamp driving with cylinder 83 and stop and controlling the end of the substrate W that erects posture with clamper 69 with lifting, remove the adsorbed state of a plurality of primes switching usefulness absorption layers 37.And, as shown in Figure 2, make walking drive and make endless member 63 to direction circulation walking with motor 65, keep making substrate W to rise with erecting posture.By repeating aforesaid action, a plurality of substrate W can be sent to substrate elevating transferring device 7 from the first substrate transport process device 3 successively.
As shown in Figure 3, when the lifting of controlling the end of substrate W rose to the height corresponding with the second substrate transport process device 5 with clamper 69, the circulation walking of endless member 63 stopped.Secondly, switch the inside of adsorbing substrate W by a plurality of seconds with absorption layer 49.Make each second unclamp the lifting that drives and make the height and position corresponding with cylinder 87 and shake the gripping state (with reference to Fig. 7) of releasing lifting usefulness clamper 69 to unclamping direction with the elastic force pressure of movable gripper jaw 77 antagonistic springs 81 of clamper 69 with the second substrate transport process device 5.
And, as shown in Figure 3, drive the second switching and second switching part 41 is shaken with motor 51, the posture of substrate W is switched to the lodging posture from erecting posture, remove the adsorbed state of a plurality of seconds switchings with absorption layer 49.By repeating aforesaid action, a plurality of substrate W can be sent to the second substrate transport process device 5 from substrate elevating transferring device 7 successively.
Removing a plurality of seconds switches with after the adsorbed state of absorption layer 49, make the nozzle 21n ejection of air from a plurality of second floating units 21, and drive a pair of second and carry with motor 27 a plurality of second conveying rollers 25 are rotated, thus substrate W is suspended to right and carry, make substrate W be positioned at the assigned position (with reference to Fig. 5) of the second substrate transport process device 5.
As described above, can carry out successively the substrate W of the first substrate transport process device 3 transport process, from the first substrate transport process device 3 to the lifting of the substrate W of the second substrate transport process device 5 transfer, and the transport process of the substrate W of the second substrate transport process device 5.In addition, by the action opposite with aforementioned activities, can carry out successively the substrate W of the second substrate transport process device 5 transport process, from the second substrate transport process device 5 to the lifting of the substrate W of the first substrate transport process device 3 transfer, and the transport process of the substrate W of the first substrate transport process device 3.
In a word, in the present embodiment, i) having a plurality of primes switches with the prime switching part 29 of absorption layer 37 can be arranged on around the mode that the axle center of level is shaken near the left side of the first substrate transport process device 3, ii) having a plurality of seconds switches with the second switching part 41 of absorption layer 49 can be arranged on around the mode that the axle center of level is shaken near the left side of the second substrate transport process device 5, iii) a plurality of liftings are arranged on to devices spaced apart on a pair of endless member 63 with clamper 69 in a circumferential direction, thereby as mentioned above, substrate W lifting can be kept making with erecting posture, the area of plane of occupying of substrate elevating transferring device 7 the area of plane less than the amount of a substrate W can be suppressed to.
In addition, in the present embodiment, iv) a pair of endless member 63 that extends along the vertical direction is arranged on a pair of scaffold 53 in the mode of the walking that can circulate, v) a plurality of liftings are arranged on to devices spaced apart on a pair of endless member 63 with clamper 69 in a circumferential direction, thereby can be from the first substrate transport process device 3 to the second substrate transport process device 5, perhaps, to the first substrate transport process device 3, a plurality of substrate W are transferred in lifting continuously from the second substrate transport process device 5.
Therefore, owing to the area of plane of occupying of substrate elevating transferring device 7 can be suppressed to the area of plane less than the amount of a substrate W, thus can fully cut down the area of plane of occupying of substrate elevating transferring device 7, and realize effective utilization in space in the factory.
In addition, because can be from the first substrate transport process device 3 to the second substrate transport process device 5, perhaps, from the second substrate transport process device 5 to the first substrate transport process device 3 continuously lifting transfer a plurality of substrate W, so can shorten the circulation timei that the lifting of substrate W is transferred, can improve a series of operating efficiency relevant with substrate W.
And, under the big situation of the vertical separation of base plate LF of lower floor and upper strata base plate UF, increase the number of lifting with clamper 69, can utilize substrate elevating transferring device 7 as the device of taking care of a plurality of substrate W.
In addition, the invention is not restricted to the explanation of aforesaid execution mode, can implement in every way.In addition, scope of the present invention is not limited to these execution modes.
Claims (3)
1. substrate elevating transferring device, be disposed at lower floor and carrying out first substrate board treatment of the processing of substrate and be disposed at the upper strata and carry out between second substrate board treatment to the processing of substrate, carry out the lifting of substrate and transfer, it is characterized in that possessing:
The prime switching part can being arranged on a side of described first substrate board treatment around the mode that the axle center of level is shaken, and having the prime that keeps substrate and switches and use retaining member, and the posture of substrate is switched to the lodging posture and erects posture;
Prime switches uses driver, and described prime switching part is shaken;
The second switching part can being arranged on a side of described second substrate board treatment around the mode that the axle center of level is shaken, and having the second that keeps substrate and switches and use retaining member, and the posture of substrate is switched to the lodging posture and erects posture;
Second switches uses driver, and described second switching part is shaken;
Endless member, the mode of walking circulating is arranged on the scaffold of erectting a side that is arranged at described prime switching part, and extends along the vertical direction;
Driver is used in walking, makes described endless member circulation walking; And
A plurality of lifting retaining members are arranged on the described endless member to devices spaced apart in a circumferential direction, and keep erecting the substrate of posture.
2. substrate elevating transferring device according to claim 1 is characterized in that,
Each lifting possesses a pair of gripper jaw with retaining member, is the lifting clamper of being controlled the end of substrate by this gripper jaw,
This substrate elevating transferring device also possesses:
First unclamps and uses driver, and the described lifting that is positioned at the height corresponding with described first substrate board treatment is moved to unclamping direction with at least one side's of clamper described gripper jaw; And
Second unclamps and uses driver, and the described lifting that is positioned at the height corresponding with described second substrate board treatment is moved to unclamping direction with at least one side's of clamper described gripper jaw.
3. a processing substrate transfer system carries out the processing of substrate and the lifting of substrate are transferred, and it is characterized in that having:
First substrate board treatment is disposed at lower floor and carries out processing to substrate;
Second substrate board treatment is disposed at the upper strata and carries out processing to substrate; And
The substrate elevating transferring device of claim 1 or claim 2 record is carried out the lifting of substrate and is transferred between described first substrate board treatment and described second substrate board treatment.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-082699 | 2009-03-30 | ||
| JP2009082699A JP5347652B2 (en) | 2009-03-30 | 2009-03-30 | Substrate lifting / lowering transfer apparatus and substrate processing / transfer system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101853799A true CN101853799A (en) | 2010-10-06 |
| CN101853799B CN101853799B (en) | 2012-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101454766A Active CN101853799B (en) | 2009-03-30 | 2010-03-23 | Substrate elevating transferring device and substrate processing transferring system |
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| Country | Link |
|---|---|
| JP (1) | JP5347652B2 (en) |
| CN (1) | CN101853799B (en) |
| TW (1) | TWI397494B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102931120A (en) * | 2012-10-25 | 2013-02-13 | 上海集成电路研发中心有限公司 | Workpiece transmission system |
| CN110775863A (en) * | 2019-09-17 | 2020-02-11 | 苏州晶洲装备科技有限公司 | Lifting system for OLED panel display cleaning equipment |
| CN114346406A (en) * | 2022-02-14 | 2022-04-15 | 福建骏鹏智能制造有限公司 | Connecting device for welding battery energy storage box |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102931120A (en) * | 2012-10-25 | 2013-02-13 | 上海集成电路研发中心有限公司 | Workpiece transmission system |
| CN110775863A (en) * | 2019-09-17 | 2020-02-11 | 苏州晶洲装备科技有限公司 | Lifting system for OLED panel display cleaning equipment |
| CN114346406A (en) * | 2022-02-14 | 2022-04-15 | 福建骏鹏智能制造有限公司 | Connecting device for welding battery energy storage box |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5347652B2 (en) | 2013-11-20 |
| TW201038457A (en) | 2010-11-01 |
| TWI397494B (en) | 2013-06-01 |
| JP2010238764A (en) | 2010-10-21 |
| CN101853799B (en) | 2012-02-22 |
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