CN101407284B - Substrate conveying device - Google Patents

Substrate conveying device Download PDF

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Publication number
CN101407284B
CN101407284B CN200810177914XA CN200810177914A CN101407284B CN 101407284 B CN101407284 B CN 101407284B CN 200810177914X A CN200810177914X A CN 200810177914XA CN 200810177914 A CN200810177914 A CN 200810177914A CN 101407284 B CN101407284 B CN 101407284B
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China
Prior art keywords
glass substrate
substrate
mentioned
loading stage
throughput direction
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Expired - Fee Related
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CN200810177914XA
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Chinese (zh)
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CN101407284A (en
Inventor
安田守
藤崎畅夫
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Olympus Corp
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Olympus Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention provides a substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction (C).

Description

Substrate conveying device
The application be that April 16, application number in 2003 are 03808707.3 the applying date, denomination of invention is the division of the application for a patent for invention of " substrate conveying device ".
Technical field
The present invention relates to make glass substrate on transport path, to float and the substrate conveying device carried; This glass substrate (substrate) be used for for example large-scale liquid crystal display (below; Economize slightly LCD) and flat-panel monitor such as Plasmia indicating panel (below, economize slightly PDP) (below, economize slightly FPD) etc.
Background technology
In recent years, for the maximization of corresponding screen with reduce the requirement of cost, in the FPD field in the FPD manufacturing process size of handled glass substrate the tendency that maximizes is day by day arranged.As the method for transportation large-scale glass substrate in the FPD manufacturing process, the known rolling conveying mechanism that has employing to use cylinder.
For example in No. 2000-9661, No. 2000-193604, open communique of patent and the open communique of patent, putting down in writing the technology of transportation large-scale glass substrate.The former supports through a pair of back-up roller mechanism only being contacted be examined the left and right sides below the substrate (being equivalent to glass substrate), and through with glass substrate about a pair of restriction cylinder mechanism that docks of the end position of limiting left and right directions.In addition because the centre portion of glass substrate is crooked downwards because of gravity, so in order to limit the bending of this glass substrate, and below glass substrate the injection pressure air.
The latter is transported to detection of defects portion through the rolling delivery section with glass substrate, the Locating Glass substrate, and carry out detection of defects through the end of clamping device clamping glass substrate.During detection of defects, for support glass substrate non-contiguously, from air float discharge high pressure air the exhausr port that platform is provided with after, the height of glass substrate is remained necessarily.
But the conveying of the former glass substrate so carry glass substrate as if high speed, has then produced the abrasion mark of cylinder owing to used a pair of back-up roller mechanism and a pair of restriction cylinder mechanism on the rolling surface of the glass substrate that contacts with cylinder.
The latter is in order to carry glass substrate through the rolling delivery section, and is identical with the former, if carry glass substrate at a high speed, then on the rolling surface of the glass substrate that contacts with cylinder, produced the abrasion mark of cylinder.
Summary of the invention
Therefore, the purpose of this invention is to provide and a kind ofly under contactless state, carry, can carry out the substrate conveying device that the high speed of not scratch glass substrate is carried.
According to main points of view of the present invention, a kind of substrate conveying device is provided, the rectangular-shaped glass substrate of manufacturing in the conveying flat display fabrication process; It is characterized in that; Comprise: substrate floats piece, is formed with airport, and this airport blows out the air that above-mentioned glass substrate is floated; Groove floats piece along the throughput direction of above-mentioned glass substrate and form at above-mentioned substrate; And substrate transfer unit; Be arranged to and in above-mentioned groove, move; And has the adsorbent pad that absorption keeps the back side of above-mentioned glass substrate; The absorption of above-mentioned substrate transfer unit keeps floating the back side of floating the above-mentioned glass substrate on the piece at above-mentioned substrate, and under the state that has floated above-mentioned glass substrate, carries to above-mentioned throughput direction.
According to substrate conveying device of the present invention, above-mentioned groove makes from above-mentioned airport and floats the air outflow that blows out between piece and the above-mentioned substrate to above-mentioned substrate.
According to substrate conveying device of the present invention, the absorption of above-mentioned substrate transfer unit keeps the back side and the conveying of the end of above-mentioned glass substrate.
According to substrate conveying device of the present invention, the back side of the central portion on the relative both sides of the above-mentioned glass substrate of above-mentioned substrate transfer unit absorption maintenance, and carry.
According to substrate conveying device of the present invention, above-mentioned substrate floats piece and is provided with in the above blowing on the air and the suction air hole.
Description of drawings
Fig. 1 is the plane structure chart of first embodiment of the substrate conveying device that the present invention relates to of expression;
Fig. 2 is the construction profile of same device;
Fig. 3 is in the same device, the scheme drawing of the glass substrate of on substrate loading stage 1, floating;
Fig. 4 is that the air of the glass substrate in the same device is carried the scheme drawing of action;
Fig. 5 is the scheme drawing of the location action in the same device;
Fig. 6 is the scheme drawing of the location action in the same device;
Fig. 7 is the scheme drawing of the location action in the same device;
Fig. 8 is the scheme drawing that the conveying glass substrate after the location action in the same device is carried;
Fig. 9 is the constructional drawing of second embodiment of the substrate conveying device that the present invention relates to of expression;
Figure 10 be in the same device at the scheme drawing that floats a plurality of grooves that form on the piece.
The specific embodiment
Below, with reference to the description of drawings first embodiment of the present invention.
Fig. 1 be with substrate (substrate) feedway be applicable to large LCD and PDP etc. the FPD operation become the plane structure chart under line (イ Application ラ イ Application) the inspection situation, Fig. 2 is the construction profile of same device.
The substrate loading stage 1 of moving into usefulness is arranged on the vibration-free tables 2.This substrate loading stage 1 loads the glass substrate of being moved into 3, and its width (direction vertical with throughput direction C) forms shorter slightly than the width of glass substrate 3.This above substrate loading stage 1 setting be also used as a plurality of airports 4 that blow on the air and suck.In addition, these airports 4 also can roughly be arranged on whole of substrate loading stage 1 regularly.On this substrate loading stage 1, be that the parallel direction and the predetermined space ground that is separated by form two grooves 5 with respect to throughput direction C.The a plurality of lifting pins (リ Off ト ピ Application) 6 that go up and down when in addition, glass substrate 3 being set on substrate loading stage 1 moving into.
The entrance side setting with respect to throughput direction C vertical direction at substrate loading stage 1 is moved into transfer robot 7.This is moved into transfer robot 7 and makes 8 rotations of two arms, advances and retreat through multi-joint arm not shown in the figures, from box, takes out unchecked glass substrate 3 simultaneously, and moves on the substrate loading stage 1.
At the outlet side of substrate loading stage 1, be set up in parallel conveying pallet 9 along throughput direction C.This conveying pallet 9 forms length and moves into side to taking out of side from glass substrate 3.Should carry pallet 9 to be loaded on the vibration-free tables 10.
From moving into side to taking out of side on this conveying pallet 9, run through this and move into side and float piece 11 with the total length setting of taking out of side.This floats piece 11, and to form its width (with respect to the vertical direction of throughput direction C) shorter slightly than the width of glass substrate 3.Setting is also used as a plurality of airports 12 that blow on the air and suck on this floats piece 11.In addition, also can these airports 12 roughly be set equably floating on whole of piece 11.Float on the piece 11 at this, be parallel direction and be separated by the compartment of terrain predetermined and form two grooves 13 with throughput direction C.The surface elevation of surface elevation and substrate loading stage 1 that floats piece 11 is roughly the same.
On the roughly midway location on the throughput direction C that carries pallet 9, the E of inspection portion that the glass substrate 3 of carrying with certain speed is carried out various inspections is set.The E of this inspection portion for example carries various inspections such as microscope, line sensor (ラ イ Application セ Application サ) or ccd video camera on door type arm 15 with equipment 14.For example, inspection a plurality of line sensors of passing through to be arranged with equipment 14 are obtained the view data of glass substrate 3.And, wait the image inspection of carrying out glass substrate 3 for example, detection of defects etc. through this view data of image processing.
Outlet side carrying pallet 9 is set up in parallel the substrate loading stage 16 of taking out of usefulness along throughput direction C.This substrate loading stage 16 is arranged on the vibration-free tables 17.This substrate loading stage 16 is in order to take out of from floating the glass substrate 3 that piece 11 transports and temporarily load, and its width (with respect to the vertical direction of throughput direction C) forms shorter slightly than the width of glass substrate 3.This above substrate loading stage 16 setting be also used as a plurality of airports 18 that blow on the air and suck.In addition, also these airports 18 can be set regularly roughly on whole of substrate loading stage 16.Be that the parallel direction and the predetermined space ground that is separated by form two grooves 19 with respect to throughput direction C on this substrate loading stage 16.The a plurality of lifting pins 20 that go up and down when in addition, glass substrate 3 being set on substrate loading stage 16 taking out of.The surface elevation of substrate loading stage 16 is roughly the same with the surface elevation that floats piece 11.
Is to be provided with on the outlet side of vertical direction to take out of with transfer robot 21 at substrate loading stage 16 with throughput direction C.This is taken out of with transfer robot and makes two arm rotations, moves forward and backward through multi-joint arm not shown in the figures, simultaneously the glass substrate that checks out 3 is received in the box.
Carrying on pallet 9 and the vibration-free tables 17, along throughput direction C many groups are being set in parallel with each other and clip each a pair of slide block 23～28 that floats piece 11 and substrate loading stage 16.A pair of slide block 23,24 and 27,28 is arranged on the more lateral of a pair of slide block 25,26.In addition, the height and position of these slide blocks 23～28 is set to identical.
A pair of slide block 23,24 is arranged on location (the ア ラ イ メ Application ト) A of portion that carries pallet 9 entrance sides.On these slide blocks 23,24, be set to a pair of end 29,30 of respectively carrying respectively movably.These carry end 29,30 to have: each arm 29a, the 30a that can stretch along the vertical direction respectively and be provided with rotating freely; Be provided with at the leading section of these arms 29a, 30a, absorption keeps each adsorbent pad 29b, the 30b at the both ends at glass substrate 3 back sides respectively; Be arranged on and respectively carry in the end 29,30, and each push rod (プ ラ Application ジ ャ) that each arm 29a, the 30a edge direction vertical with throughput direction C are moved.
A pair of slide block 25,26 is arranged on the outlet side of location division (calibration portion) A and carries between the outlet side of pallet 9.On these slide blocks 25,26, be set to a pair of end 31,32 of respectively carrying respectively movably.These carry end 31,32 and each to carry end 29,30 identical, have each arm 31a, 32a and each adsorbent pad 31b, 32b.
A pair of slide block 27,28 is arranged between the outlet side of the outlet side of carrying pallet 9 and substrate loading stage 16.On these slide blocks 27,28, be set to a pair of end 33,34 of respectively carrying respectively movably.These carry end 33,34 and each to carry end 29,30 identical, have each arm 33a, 34a and each adsorbent pad 33b, 34b.
In addition; Because a pair of slide block 23,24 and 27,28 is set at the more lateral of a pair of slide block 25,26; So set the length of each arm 29a, 30a, 33a, 34a, make that the position of each adsorbent pad 31b, 32b of position and each slide block 25,26 of each slide block 23,24 and each adsorbent pad 29b of 27,28,30b, 33b, 34b is identical.
In addition, if can be used to keep each arm 29a, 30a, 31a, 32a, the 33a of glass substrate 3, the structure of 34a along XY direction minute movement, then these to carry ends 29,30,31,32,33,34 also can be arbitrary structures.
3 alignment sensors 43～45 are set on the location division A that floats on the piece 11.These alignment sensors 43～45 detect each edge on two orthogonal limits (vertical, horizontal stroke) of glass substrate 3, and the detection signal of its boundary position of output expression.These alignment sensors 43～45th are arranged the line sensor of a plurality of detecting elements respectively by wire.
Alignment sensor 43 is at the midway location that floats piece 11 Widths, be provided with edge and throughput direction C equidirectional the line detection side to.This alignment sensor 43 detects in the A of location division and floats the glass substrate 3 that the stops forward edge at throughput direction C.
The predetermined space of being separated by in the side of floating piece 11 is provided with each alignment sensor 44,45.Along making the line detection side to being that vertical direction is provided with these alignment sensors 44,45 with respect to throughput direction C.These alignment sensors 44,45 in the A of location division, detect float the glass substrate 3 that stops with throughput direction C equidirectional on the edge.
On the other hand; Compressed-air supply portion 46 through pipeline with the substrate loading stage 1 of moving into usefulness, float piece 11, each space part of taking out of the substrate loading stage 16 of usefulness is communicated with; And supply with pressurized air selectively respectively and from each airport 4,12,18 blowing compressed air, and moving into the substrate loading stage 1 of usefulness, floating piece 11 or take out of on the substrate loading stage 16 of usefulness glass substrate 3 is floated.In addition, compressed-air supply portion 46 blow from each airport 4,12,18 have the air that removes electric effect, for example by the air after plasma or the negative ion ionization.
Vacuum suction portion 47 through pipeline with the substrate loading stage 1 of moving into usefulness, float piece 11, each space part of taking out of the substrate loading stage 16 of usefulness is communicated with; And be evacuated selectively respectively, and glass substrate 3 absorption are remained on the substrate loading stage 1 of moving into usefulness and the substrate loading stage 16 of the taking out of usefulness through each airport 4,12,18.
In addition, vacuum suction portion 47 is communicated with each adsorbent pad 29b, 30b, 31b, 32b, 33b, 34b respectively through pipe arrangement, through these adsorbent pad 29b, 30b, 31b, 32b, 33b, 34b are evacuated, keeps glass substrate 3 and adsorb.
Mobile control division 48 moves control respectively and respectively carries end 29,30,31,32,33,34 on each slide block 23,24,25,26,27,28.
Each detection signal that 49 inputs of gesture recognition portion are exported respectively from three alignment sensors 43～45 according to by 3 three locational boundary position information of the glass substrate shown in these detection signals, is discerned the attitude of glass substrate 3.
Attitude control part 50 navigates to the reference position for the attitude of the glass substrate 3 that will be discerned by gesture recognition portion 49, and moves a pair of conveying of control end 31,32 along throughput direction C, the direction vertical with respect to throughput direction C.
The action of the device that constitutes as stated then, is described.
Each carries end 29,30 to move to the side of moving on each slide block 23,24, and stops standby.
Move into transfer robot 7 rotations, the arm 8 that moves forward and backward, and from box, take out unchecked glass substrate 3, and be transported to the top of substrate loading stage 1.And each lifting pin 6 of substrate loading stage 1 raises.Move into transfer robot 7 and arm 8 is descended and glass substrate 3 is loaded on each lifting pin 6.Descend through each lifting pin 6, glass substrate 3 is loaded on the substrate loading stage 1.Because the width of glass substrate 3 is longer than the width of substrate loading stage 1, so give prominence to the two end portions of glass substrate 3 from substrate loading stage 1.
Then, each carries end 29,30 that each arm 29a, 30a are raise, and makes each adsorbent pad 29b, 30b absorption back side from the outstanding glass substrate 3 of substrate loading stage 1.The absorption position of these adsorbent pad 29b, 30b is the end, the back side of the not formation circuit pattern (パ タ-Application) in the glass substrate 3, for example, is the both ends that become the back side of glass substrate 3 front sides to throughput direction C.At this moment, each adsorbent pad 29b, 30b are raising under the state at the back side that is adsorbed in glass substrate 3 on only than the high position of the surface elevation of substrate loading stage 1.
And compressed-air supply portion 46 supplies with pressurized air through pipe arrangement to the space part of substrate loading stage 1, and from airport 4, goes up blowing compressed air.At this moment, pressurized air is removed the air after the ionization of electric effect because of use has, and can in the static of glass substrate, stop charged on the glass substrate 3.
Blow through on compressed-air actuated, between substrate loading stage 1 and glass substrate 3, form air layer, as shown in Figure 3, glass substrate 3 is floated from the surface of substrate loading stage 1.At this moment, the air that blows out from each airport 4 flows out from air layer through each groove 5 between substrate loading stage 1 and glass substrate 3.Therefore, because airiness, and be not trapped between substrate loading stage 1 and the glass substrate 3, so glass substrate 3 keeps levelness ground on substrate loading stage 1, to float.
Then, mobile control division 48 is as shown in Figure 4, respectively carries end 29,30 ( arm 29a, 30a) synchronous with what same speed made each adsorbent pad 29b with the glass substrate of being adsorbed in 3 back sides, 30b respectively, and moves at each slide block 23,24 upper edge throughput direction C.
Thus, glass substrate 3 float and with above the substrate loading stage 1 with float piece 11 above under the complete non-contacting state, carry end 29,30 to draw through each, and carry at a high speed along throughput direction C.Carry at a high speed through this, glass substrate 3 arrives floats the location division A on the piece 11.
When arriving location division A, glass substrate 3 is as shown in Figure 5, and relative throughput direction C bevelled situation is arranged.Alignment sensor 43 among the A of location division detects and in the A of location division, floats the glass substrate 3 that stops at the edge on one side, front side of throughput direction C, and exports its detection signal.
In addition, each alignment sensor 44,45 detect in the A of location division, float the glass substrate 3 that stops with throughput direction C be that its detection signal is exported at the edge of the another side of equidirectional.
Each detection signal that gesture recognition portion 49 input is exported respectively from three alignment sensors 43～45, according to by the glass substrate 3 shown in these detection signals three locational boundary position information, discern the attitude of glass substrate 3.At this moment, glass substrate 3 relative throughput direction C, the right part of front is more side-prominent forward than the left part, and throughput direction C tilts to the left relatively.
Then, attitude control part 50 is from the gesture recognition result of the glass substrate 3 that obtained by gesture recognition portion 49, and is at first as shown in Figure 5, makes one to carry end 30 relative throughput direction C to reversing sense (rear side) minute movement.Thus, glass substrate 3 is that center shaft rotates along arrow F direction with adsorbent pad 29a, and throughput direction C is configured abreast relatively.
Once more, each detection signal of exporting respectively from three alignment sensors 43～45 of gesture recognition portion 49 input is discerned the attitude of glass substrate 3.The result of this identification, glass substrate 3 is as shown in Figure 6, and the left part is near slide block 23 sides.
Attitude control part 50 is as shown in Figure 6; Drive a push rod of carrying end 29; And along arrow H direction (direction vertical with respect to throughput direction C) extension arm 29a, and, synchronous with it; Drive another push rod of carrying end 30 and shorten arm 30a, thereby and move glass substrate 3 along arrow H direction the center of glass substrate 3 and the center of transport path are mated along arrow H direction.
Afterwards, attitude control part 50 makes respectively carries synchronously side shifting forward of end 29,30, makes that the leading section of glass substrate 3 is consistent with the center of alignment sensor 43.At this moment, each carries end 29,30 for example as shown in Figure 7, along arrow N direction minute movement.
As a result, as shown in Figure 7, Locating Glass substrate 3 makes reference position, promptly parallel with respect to throughput direction C and center glass substrate 3 is roughly consistent with the center of transport path.In addition, the reference position is the place that each boundary position of glass substrate 3 in three alignment sensors 43～45 detects respectively with center sensor.
When the location of glass substrate 3 stopped, mobile control division 48 was as shown in Figure 4, and the edge direction opposite with throughput direction C makes with same speed respectively respectively carries end 31,32 synchronous, and on each slide block 25,26, moved.
When these carry end 31,32 to arrive the below of glass substrate 3, on the substrate transfer reference position on each slide block 25,26, stop, each arm 31a, 32a are raise, and make the back side of each adsorbent pad 31b, 32b absorption glass substrate 3.The absorption position of these adsorbent pad 31b, 32b is the both ends, the back side that the throughput direction C in glass substrate 3 becomes the front side.
During these adsorbent pad 31b, 32b absorption glass substrate 3, remove the absorption of each adsorbent pad 29a of respectively carrying end 29,30,30b after, each arm 29a, 30a descend.
Thus, the absorption of glass substrate 3 maintenance is carried end 29,30 to be delivered to and is respectively carried end 31,32 from each.Each carries end 29,30 direction (rear side) opposite with throughput direction C in each slide block 23,24 upper edge to move, and after stopping on the substrate transfer reference position of the substrate loading stage 1 of moving into usefulness, carries out standby.If when the transmission of glass substrate 3 stopped, each carried end 31,32 as shown in Figure 8, with same speed synchronization, and mobile on each slide block 25,26 along throughput direction C.Thus, carry end 31,32 tractions floating the glass substrate of floating on the piece 11 3, C carries at a high speed along throughput direction, and arrives the inspection E of portion through each.
Among the E of inspection portion, compressed-air supply portion 46 stops the compressed-air actuated supply to each airport 4 that floats piece 11.
Then, carry out the switching to vacuum suction portion 47 from compressed-air supply portion 46.This vacuum suction portion 47 vacuumizes each airport 12 that floats piece 11 through pipe arrangement, floats on the piece 11 and glass substrate 3 absorption are remained on.In addition, at this moment, after each adsorbent pad 31b at the back side of releasing absorption maintenance glass substrate 3, the absorption of 32b, each arm 31a, 31b descend.
Among the E of inspection portion, for example, the view data of using inspection with line sensor to obtain through the various inspections by glass substrate 3 with equipment 14 is carried out the pattern inspection, detection of defects of glass substrate 3 etc.At this moment, loaded inspection and moved along fore-and-aft direction relative to throughput direction C through making, and carried out various inspections by the whole face of checking with 14 pairs of glass substrate 3 of equipment with the door type arm of equipment 14 15.
When the inspection of the E of inspection portion stopped, each carried end 31,32 that each arm 31a, 32a are raise, and made each adsorbent pad 31b, 32b two ends to the back side of throughput direction C absorption becoming front side to glass substrate 3.
And vacuum suction portion 47 stops vacuumizing each airport 12 that floats piece 11.And, carry out the switching to compressed-air supply portion 46 from vacuum suction portion 47.This compressed-air supply portion 46 supplies with pressurized airs to each airport that floats piece 11 12, and blows the pressurized air after the ionization from these airports 12, and glass substrate 3 is floated.
In addition, also can float under the state that floats glass substrate 3 on the piece 11, make with certain speed respectively along throughput direction and respectively carry end 31,32 synchronous, and on each slide block 23,24, move, check the inspection of the E of portion simultaneously.
Afterwards, same as described above, under the state that the glass substrate 3 of floating on the piece 11 is floated through blowing on compressed-air actuated fully, each carries end 31,32 on each slide block 25,26, to move, and carries glass substrate 3 at a high speed along throughput direction C.
Glass substrate 3 arrives when floating the outlet side of piece 11, and the absorption of glass substrate 3 keeps carrying end 31,32 to be delivered to and respectively carries end 33,34 from each, and compressed-air supply portion supplies with pressurized air to each airport 8 of substrate loading stage 16.Carry end 29,30 to carry the transmission of end 31,32 same with above-mentioned from each, carry out carrying end 31,32 to carry the transmission of the glass substrate 3 of end 33,34 to each from these to each.
When the transmission of glass substrate 3 stopped, each was carried end 33,34 on each slide block 27,28, to move and carries glass substrate 3 along throughput direction C.And when glass substrate 3 arrived the top of the substrate loading stage 16 of taking out of usefulness, each carried end 33,34 to stop on the substrate transfer reference position.
Each lifting pin 20 raises in the substrate loading stage 16.Compressed-air supply portion 46 stops the compressed-air actuated supply to each airport 18 of substrate loading stage 16, and each adsorbent pad 33b, 34b remove the absorption to the back side of glass substrate 3, and each arm 33a, 34a are descended.Thus, glass substrate 3 is loaded on each lifting pin 20.Take out of with transfer robot 21 and make arm 22 rotation, move forward and backward, and after each lifting pin 20 takes out the glass substrate 3 that checks out, be contained in the box.
Afterwards, repeat successively a plurality of glass substrate 3 to the moving into of substrate loading stage 1, air carry, location, inspection, taking out of from substrate loading stage 16.
Like this; Among above-mentioned first embodiment; From each substrate loading stage 1,16 with float a plurality of airports 4,18,12 that piece 11 forms and blow air and make under the state that glass substrate 3 floats, absorption keeps glass substrate 3 to draw at the leading section two ends of throughput direction C, carries simultaneously.Thus, can be under the state that floats large glass substrate 3, not scratch glass substrate 3 is carried and carry out high speed.
Owing to a plurality of airports 4,18,12 being arranged on each substrate loading stage 1,16 regularly and floating on the air conveyor surface of piece 11; And be provided with each groove 5,13,19; So cross each groove 5,13,19 from the windstream that a plurality of airports 4,18,12 blow out; So glass substrate 3 and each substrate loading stage 1,16 and float between the piece 11 not air entrapment, and flow through through each groove 5,13,19.Thus, large-scale glass substrate 3 bending that can carry out that middle body does not swell etc., keep very high levelness ground to carry.
Each groove 5,13,19 forms on the direction identical with throughput direction C, so the last blow pressure power of air distributes the same with throughput direction C.Thus, glass substrate 3 is when carrying, and vibration along the vertical direction can not carried under stabilized conditions.
The back side both end sides of maintenance to the front side of the throughput direction C of glass substrate 3 adsorbed in the conveying of glass substrate 3 respectively, and forces traction, carries out high speed simultaneously and carries.Thus, glass substrate 3 can carry out not being relative throughput direction C stable feed quiveringly such as crawl under float state.In addition, because absorption keeps the back side both end sides of glass substrate 3,, can not influence circuit pattern so do not contact the part of the circuit pattern that forms on the glass substrate 3.
Like this, because high speed transportation large-scale glass substrate 3 non-contactly,, can satisfy the requirement that not making the product quality deterioration and improving the production rate so make etc. in such field of semiconductor manufacture at FPD.
Owing to blow the pressurized air after the ionization from each airport 4,18,12, and carry glass substrate 3 at a high speed, thus can in and static, stop charged on glass substrate 3.
Because among the A of location division; Under the state that glass substrate 3 is floated, position through three alignment sensors 43～45, gesture recognition portion 49 and attitude control part 50, so can be under the contactless state that floats glass substrate 3; The glass substrate 3 that not scratch is large-scale, and carry out reliable localization.
In addition; In this location; Respectively carry end 29,30 through what carry glass substrate 3 along the two-dimensional direction minute movement, make these carry ends 29,30 except the conveying function of glass substrate 3, can be also used as the location; And the conveying that can follow glass substrate 3 positions continuously, can shorten the required time of location.
In the location, owing to pass through the attitude of three alignment sensors, 43～45 identification glass substrate 3, so can detect the attitude of glass substrate 3 accurately.
Further, float in the piece 11,, can locate each glass substrate 3 accurately according to 3 boundary position information usually so the reference position of each alignment sensor 43～45 does not have deviation because three alignment sensors 43～45 embed.
In addition, above-mentioned first embodiment for example can be provided with a plurality of inspection E of portion, applicable to the operation that is provided with various treatment process.
Then, the second embodiment of the present invention is described.In addition, the part identical with Fig. 1 added prosign and omitted its detailed description.
Fig. 9 is the constructional drawing of substrate conveying device.This substrate conveying device is provided with each transfer robot 7,21; The feasible direction that moves forward and backward of moving into each arm 8,22 of usefulness and each transfer robot 7,21 of taking out of usefulness becomes the direction identical with throughput direction C, and can move the retainer (ホ Le ダ) 60 that absorption remains on the glass substrate 3 on the conveying pallet 9 along throughput direction C.
In addition, remove move into and take out of each lifting pin 6,20 that each substrate loading stage 1 and 16 of usefulness has.Thus, each transfer robot 7,21 is through stretching into each arm 8,22 in each groove 5,19 of each substrate loading stage 1 and 16, and directly on substrate loading stage 1, loads glass substrate 3, or directly from substrate loading stage 16, takes out glass substrate 3.
On conveyance pallet 9, throughput direction C lays two tracks 61 in parallel with each other relatively.On these tracks 61, be provided with movably and move with floating piece (below, be called retainer) 60.
Be provided with on whole on the surface of retainer 60 the double as air on a plurality of airports 62 of blowing and sucking.Same with substrate loading stage 1, it is shorter slightly than the width of glass substrate 3 that this retainer 60 forms width, and the retainer surface height forms with the surface elevation of substrate loading stage 1 roughly the same.
Carry on the pallet 9, a pair of slide block 63,64 that clips retainer 60 is set along throughput direction C in parallel with each other.At the substrate loading stage 1 of moving into side with take out of between the transfer robot 21 of side these slide blocks 63,64 are set.On these slide blocks 63,64, be set to movably respectively a pair of oriented side respectively carry end 29,30 and inspection side respectively carry end 31,32.
The end 29,30 of respectively carrying of oriented side moves back and forth between the right-hand end Aa of the left end of the transfer robot of moving into side 7 sides on each slide block 63,64 and location division A.The inspection side respectively carry end 31,32 at the right-hand end Aa of the location division A on each slide block 63,64 with take out of between the right-hand end of substrate loading stage 16 of usefulness and move back and forth.Carry out transmitting to the glass substrate of respectively carrying end 31,32 3 of inspection side with above-mentioned first embodiment from the end 29,30 of respectively carrying of oriented side identically.
The action of the device that constitutes as stated then, is described.
Glass substrate 3 by transfer robot 7 is moved into from box is floated at substrate loading stage 1, and with carry end 29,30 to draw to moving synchronously of throughput direction C through each, and be transported to above the retainer 60 of standby on the A of location division.In addition, each absorption position of carrying end 29,30 be glass substrate 3 become the two ends at the back side of front side to throughput direction C.
Among the A of location division, glass substrate 3 is identical with above-mentioned first embodiment, on retainer 60, carries the small movements of end 29,30 to position through each.When the location of glass substrate 3 stops, switch to vacuum suction portion 47, and glass substrate 3 absorption are remained on the retainer 60 from compressed-air supply portion 46.
At this moment, each absorption of carrying end 29,30 to remove glass substrate 3 keeps, and turns back to the left end of moving into side transfer robot 7 sides (substrate transfer reference position) on each slide block 63,64.
Then, retainer 60 has kept under the state of glass substrate 3 in absorption, and C moves along throughput direction.When retainer 11 arrives the inspection E of portion, same as described above, in the E of inspection portion, carry out the various inspections of glass substrate 3.
When the inspection of glass substrate 3 is stopped, each arm 31a that respectively carries end 31,32 of standby on the substrate transfer reference position, 32a are raise, and the back side that keeps glass substrate 3 through each adsorbent pad 31b, 32b absorption.These absorption positions of carrying ends 31,32 are the two ends to the back side of throughput direction C front side of glass substrate 3.Afterwards, supply with pressurized air from compressed-air supply portion 46 to substrate loading stage 16, and glass substrate 3 is floated from retainer 60.Under this state, glass substrate 3 is carried end 31,32 tractions through each, and highly is transported on the substrate loading stage 16.
Take out of with in transfer robot 21 insertion grooves 19, and raise, adsorb the back side that keeps glass substrate 3.At this moment, respectively carry the adsorbent pad 31b of end 31,32, the absorption of 32b from the back side releasing of glass substrate 3.Take out of with transfer robot 21 and make arm 22 risings, and, make arm 22 rotations, move forward and backward, and take out the glass substrate 3 that checks out from substrate loading stage 16, be received in the box.
Like this, according to above-mentioned second embodiment, can reach and the identical effect of above-mentioned first example.In addition, owing to do not move into usefulness and take out of each the lifting pin 6,20 that has in each substrate loading stage 1 and 16 of usefulness, so can be shortened the opening time of each lifting pin 6,20 time.
In addition, the present invention is not limited to above-mentioned each example, the implementation phase various distortion can be arranged in the scope that does not break away from its main idea.
Make the mode that glass substrate 3 is floated be not limited to also can float through electrostatic means to the back side of glass substrate 3 injection air.Under the situation of floating, can carry out removing to glass substrate 3 through electrostatic means.
The mode of the glass substrate 3 that conveying is floated is not limited to for example on a pair of slide block 23,24, move a pair of end 29,30 of respectively carrying; Also can be in each groove 13 be provided with movably have each adsorbent pad respectively carry the end, and carry ends absorption to keep the back side of glass substrate 3 leading sections to carry through these.
Absorption holding position when carrying glass substrate 3 is not limited to the leading section both sides of the glass substrate 3 among the throughput direction C; Also can bring in absorption and keep, or adsorb maintenance by each central portion on the relative both sides of glass substrate 3 or along a plurality of positions on both sides by the leading section two ends of glass substrate 3 and rearward end two.If adsorb maintenance glass substrate 3 by the central portion on four angles of this glass substrate 3, relative both sides or along a plurality of positions on both sides, then not only can carry to conveyance direction C, also can carry to the direction opposite with throughput direction C.In addition, if the absorption holding position of glass substrate 3 is the parts that do not form circuit pattern, then also can be the surface or the back of the body surface of glass substrate 3.
Loading glass substrate 3 or take out glass substrate 3 from substrate loading stage 16 and also can use certain mechanism except that each transfer robot 7,21 to substrate loading stage 1, also can be to carry the substrate of air etc. to float supply unit from other lines.
In the above-mentioned example; Although the conveying that becomes the glass substrate 3 in the ray examination of the manufacturing process such as flat board of clear large LCD and PDP etc.; But be not limited to this, also applicable to various substrates such as semiconductor wafer and tabular object being floated carry out the situation of carrying at a high speed.In addition, glass substrate 3 is floated carry out the mode of carrying at a high speed to be not limited to, also applicable to the conveying between each retainer that is provided with under a plurality of movably retainer 60 situation from the conveying of substrate loading stage 1 on retainer 60.
Each used among the A of location division alignment sensor 43～45 uses line sensor, but is not limited to this, also can use the boundary position of bidimensional ccd video camera identification glass substrate 3.
For at each substrate loading stage 1,16 with float the bending that does not have glass substrate 3 central portions on the piece 11; And the maintenance levelness; Be provided with two grooves 5,13,19 of exhaust passage (escaping the げ road) respectively as air; But shown in figure 10, these grooves 5,13,19 also relatively throughput direction C be provided with a plurality of abreast.Because these grooves 5,13,19 are from the air exhaust passage that each airport 4,12,18 blows out, thus can make the two ends of groove open in air, or the circle at the perforation back side or the air escape hole of striated are set in groove, make its well air-out.
In addition, the shape of these grooves 5,13,19 also can be quadrangle, U font, vee shape, circular-arc concavity.In addition, the width of these grooves 5,13,19 also can be each substrate loading stage 1,16 and float piece 11 and glass substrate 3 between form air layer and can float the width size of glass substrate 3.
It is identical that the width of these grooves 5,13,19 forms relative throughput direction C, and the air pressure part that imposes on the glass substrate 3 of throughput direction C also can be even.
In addition, for the two ends that make glass substrate 3 do not have downward bending, also can a plurality of air squit holes be set, respectively to the both ends of glass substrate 3 injection air at each substrate loading stage 1,16 and the two ends of floating piece 11.
Among above-mentioned second embodiment, though each slide block 63,64 extends to conveyance robot 21 sides of taking out of usefulness,, also may extend into transfer robot 7 sides of moving into usefulness.
Utilizability on the industry
The present invention is used for the conveying that becomes the glass substrate in the ray examination of the operations such as FPD of large LCD and PDP etc., various substrates and tabular object is floated carry out that high speed is carried etc.

Claims (5)

1. substrate conveying device, the rectangular-shaped glass substrate of manufacturing is characterized in that in the conveying flat display fabrication process, comprising:
Substrate floats piece, is formed with airport, and this airport blows out the air that above-mentioned glass substrate is floated;
Groove floats piece along the throughput direction of above-mentioned glass substrate and form at above-mentioned substrate; And
The substrate transfer unit; Possess and have the conveying end that absorption keeps the adsorbent pad of the back side of above-mentioned glass substrate or the side of one side at least in the surface; Above-mentioned conveying end is arranged to and can in above-mentioned groove, be moved; The absorption of above-mentioned substrate transfer unit keeps floating the above-mentioned back side of floating the above-mentioned glass substrate on the piece at above-mentioned substrate, and under the state that has floated above-mentioned glass substrate, carries to above-mentioned throughput direction.
2. substrate conveying device as claimed in claim 1 is characterized in that,
Above-mentioned groove makes from above-mentioned airport and floats the air outflow that blows out between piece and the above-mentioned substrate to above-mentioned substrate.
3. substrate conveying device as claimed in claim 1 is characterized in that,
The absorption of above-mentioned substrate transfer unit keeps the above-mentioned back side and the conveying of the end of above-mentioned glass substrate.
4. substrate conveying device as claimed in claim 1 is characterized in that,
The above-mentioned back side of the central portion on the relative both sides of the above-mentioned glass substrate of above-mentioned substrate transfer unit absorption maintenance, and carry.
5. substrate conveying device as claimed in claim 1 is characterized in that,
Above-mentioned airport be arranged at above-mentioned substrate float piece above, with blowing on the air and sucking.
CN200810177914XA 2002-04-18 2003-04-16 Substrate conveying device Expired - Fee Related CN101407284B (en)

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CN101412472A (en) 2009-04-22
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CN1646400A (en) 2005-07-27
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TW200306938A (en) 2003-12-01

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