WO2003086917A1 - Substrate conveying device - Google Patents

Substrate conveying device Download PDF

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Publication number
WO2003086917A1
WO2003086917A1 PCT/JP2003/004835 JP0304835W WO03086917A1 WO 2003086917 A1 WO2003086917 A1 WO 2003086917A1 JP 0304835 W JP0304835 W JP 0304835W WO 03086917 A1 WO03086917 A1 WO 03086917A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
transport
glass substrate
transfer
transfer device
Prior art date
Application number
PCT/JP2003/004835
Other languages
French (fr)
Japanese (ja)
Other versions
WO2003086917B1 (en
Inventor
Mamoru Yasuda
Nobuo Fujisaki
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to KR1020047014207A priority Critical patent/KR100633970B1/en
Priority to JP2003583893A priority patent/JP4384504B2/en
Priority to CN038087073A priority patent/CN1646400B/en
Publication of WO2003086917A1 publication Critical patent/WO2003086917A1/en
Publication of WO2003086917B1 publication Critical patent/WO2003086917B1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Definitions

  • the present invention relates to a glass substrate for a flat panel display (hereinafter abbreviated as FPD) such as a large liquid crystal display (hereinafter abbreviated as LCD) or a plasma display panel (hereinafter abbreviated as PDP).
  • FPD flat panel display
  • LCD large liquid crystal display
  • PDP plasma display panel
  • the present invention relates to a substrate transfer device that floats on a transfer path and transfers the substrate.
  • the glass substrate is transported to the defect inspection unit by the roller transport unit, the glass substrate is positioned, and the glass substrate is held by the gripping mechanism.
  • Defect inspection is performed by gripping the end.
  • high-pressure air is blown from the air outlet provided on the air-floating stage to keep the glass substrate at a constant height in order to support the glass substrate in a non-contact manner.
  • the former glass substrate transport uses a pair of support roller mechanisms and a pair of regulating roller mechanisms, when the glass substrate is transported at high speed, the glass substrate that comes into contact with the rollers rolls. Roller friction marks are formed on the beveled surface.
  • the glass substrate is transported by the roller transporter. Therefore, when the glass substrate is transported at a high speed in the same manner as the former, friction marks are generated on the rolling surface of the glass substrate in contact with the roller.
  • a substrate floating mechanism is provided along a transport path to lift a substrate on the transport path, and both ends of the substrate floated by the substrate floating mechanism are held on the transport path. And a transport mechanism for transporting the substrate along the substrate.
  • FIG. 1 is a plan view showing a substrate transfer apparatus according to a first embodiment of the present invention.
  • Figure 2 is a side view of the device.
  • FIG. 3 is a view showing a glass substrate floated on the substrate mounting table 1 in the apparatus.
  • Figure 4 is a diagram showing the air transfer operation of the glass substrate in the same device.
  • Figure 5 shows the alignment operation in the same device.
  • Figure 6 shows the alignment operation in the same device.
  • Figure 7 shows the alignment operation in the same device.
  • Fig. 8 is a view showing the transfer of the glass substrate after the alignment operation in the same apparatus.
  • FIG. 9 is a configuration diagram showing a second embodiment of the substrate transfer device according to the present invention.
  • FIG. 10 is a view showing a plurality of grooves formed on a floating block in the apparatus.
  • FIG. 1 is a plan view showing a case where the substrate transfer apparatus is applied to an in-line inspection in a process of manufacturing an FPD such as a large LCD or PDP
  • FIG. 2 is a side view showing the apparatus.
  • the loading substrate mounting table 1 is provided on the vibration isolation table 2.
  • the substrate mounting table 1 has the glass substrate 3 loaded thereon, and the width thereof (perpendicular to the transport direction C) is formed to be slightly shorter than the width of the glass substrate 3. I have.
  • a plurality of air holes 4 are provided on the upper surface of the substrate mounting table 1 for both air blowing and suction.
  • the air holes 4 may be provided almost regularly on the entire surface of the substrate mounting table 1.
  • Two grooves 5 are formed on the substrate mounting table 1 in a direction parallel to the transport direction C. And are formed at predetermined intervals.
  • the substrate mounting table 1 is provided with a plurality of lift bins 6 which move up and down when the glass substrate 3 is carried in.
  • a carry-in transfer robot 7 is provided on the entrance side of the substrate mounting table 1 in a direction perpendicular to the transfer direction C.
  • the carry-in port 7 is used to take an uninspected glass substrate 3 from the cassette while rotating, advancing and retracting the two hand arms 8 by an articulated arm (not shown). Exit and carry it onto the substrate mounting table 1.
  • transfer frames 9 are arranged side by side in the transfer direction C.
  • the transfer platform 9 is formed to have a length from the loading side of the glass substrate 3 to the unloading side.
  • the transfer frame 9 is placed on the vibration isolation table 10.
  • a floating block 11 is provided from the loading side to the unloading side on the transfer frame 9 over the entire length of the loading side and the unloading side.
  • the floating block 11 is formed to have a width (perpendicular to the transport direction C) slightly shorter than the width of the glass substrate-.3.
  • a plurality of air holes 12 for both air blowing and suction are provided on the upper surface of the floating block 11. Note that these air holes 12 need only be provided substantially uniformly over the entire surface of the floating block 11.
  • two grooves 13 are formed at a predetermined interval in a direction parallel to the transport direction C.
  • the surface height of the floating block 11 is almost the same as the surface height of the substrate mounting table 1.
  • An inspection unit that performs various inspections on the glass substrate 3 conveyed at a constant speed is provided at a substantially intermediate position in the conveyance direction C on the conveyance stand 9. E is provided.
  • various inspection devices 14 such as a microscope, a line sensor or a CCD camera are mounted on a portal arm 15.
  • the inspection equipment 14 acquires the image data of the glass substrate 3 by using a plurality of line sensors.
  • the image data is subjected to image processing or the like, for example, pattern inspection or defect inspection of the glass substrate 3 is performed.
  • substrate mounts 16 for unloading are arranged side by side along the transfer direction C.
  • the substrate mounting table 16 is provided on the vibration isolation table 17.
  • the substrate mounting table 16 temporarily holds the glass substrate 3 conveyed from the floating block 11 in order to carry out the glass substrate 3, and its width (in the direction perpendicular to the conveyance direction C) is glass. It is formed slightly shorter than the width of the substrate 3.
  • On the upper surface of the substrate mounting table 16 a plurality of air holes 18 that serve both air blowing and suction are provided.
  • the air holes 18 may be provided almost regularly on the entire surface of the substrate mounting table 16.
  • two grooves 1.9 are formed in a direction parallel to the transport direction C and at a predetermined interval.
  • the substrate mounting table 16 is provided with a plurality of lift pins 20 which move up and down when the glass substrate 3 is carried out.
  • the surface height of the substrate mounting table 16 is almost the same as the surface height of the floating block 11.
  • An unloading transfer port hot 21 is provided on the outlet side of the substrate mounting table 16 in the direction perpendicular to the transfer direction C.
  • the unloading transfer robot 21 has been inspected while rotating, advancing and retracting the two hand arms 22 by an articulated arm (not shown).
  • the glass substrate 3 is stored in the cassette.
  • a plurality of pairs of each of the sliders 23 to 28 are mounted on the transfer frame 9 and the vibration isolation table 17 with the floating block 11 and the substrate mounting table 16 interposed therebetween, and are parallel to each other along the transfer direction C. It is provided.
  • the pair of sliders 23, 24 and 27, 28 are provided outside the pair of sliders 25, 26. The height positions of the sliders 23 to 28 are the same.
  • the paired sliders 23 and 24 are provided in the alignment section A on the entrance side of the transfer stand 9.
  • the sliders 23 and 24 are provided with a pair of transport ends 29 and 30 movably, respectively.
  • the transport ends 29 and 30 are provided at the ends of the arms 29 a and 30 a, which are provided to be vertically expandable and contractible and rotatable, respectively, and the arms 29 a and 30 a.
  • the suction holes hold both ends of the back surface of the glass substrate 3 by suction.
  • Heads 29b, 30b and provided within each of the transport ends 29, 30.- Each platform for moving each arm 29a, 30a in the transport direction ⁇ C and in the vertical direction. And have
  • the pair of sliders 25 and 26 are provided between the exit side of the alignment unit A and the exit side of the transfer frame 9.
  • the sliders 25 and 26 are provided with a pair of transfer ends 31 and 32 movably, respectively.
  • These transport ends 31 and 32 are, like the transport ends 29 and 30, connected to the arms 31 a and 32 a and the suction nozzles, respectively. Heads 31b and 32b.
  • the pair of sliders 27 and 28 are provided between the exit side of the transfer stand 9 and the exit side of the substrate placing table 16. These sly The transfer ends 33, 34 in pairs are provided movably on the dies 27, 28, respectively. These transport ends 33 and 34 are, like the transport ends 29 and 30, each arm 33a and 34a and each suction end. Heads 33b and 34b.
  • each arm 29 a, 30 a, 33 a, 34 a is set so as to be the same as the position of the transfer end portions 29, 30, 3.
  • 1, 32, 33, and 34 are mechanisms that can finely move the arms 29 a, 30 a, 3 la, 32 b, 33 a, and 34 a that hold the glass substrate 3 in the XY direction. If so, any configuration may be used.
  • the alignment part A on the levitation block 11 is provided with three positioning means. Sensors 4-3 to 45 are provided.
  • the positioning sensors 43 to 45 detect each edge of the glass substrate 3 on two sides (vertical and horizontal) orthogonal to each other, and output each detection signal indicating the edge position.
  • Each of the positioning sensors 43 to 45 is a line sensor in which a plurality of detection elements are arranged in a line.
  • the positioning sensor 43 is provided at an intermediate position in the width direction of the floating block 11 and the line detection direction is the same as the transport direction C.
  • the positioning sensor 43 is an edge on the front side in the transport direction C of the glass substrate 3 stopped floating at the alignment portion A. Is detected.
  • the positioning sensors 44 and 45 are provided at predetermined intervals on the side surface of the floating block 11. These positioning sensors 44 and 45 are provided with the line detection direction perpendicular to the transport direction C. These positioning sensors 44 and 45 detect an edge in the same direction as the transfer direction C of the glass substrate 3 that has stopped floating at the alignment part A.
  • the compressed air supply unit 46 communicates with the gaps of the loading board mounting table 1, the floating block 11 and the unloading board mounting table 16 through the pipes, respectively. By selectively supplying compressed air, the compressed air is blown up from each of the air holes 4, 12, and 18, and the substrate mounting table 1 for loading, the floating block 11, or the substrate mounting table 16 for unloading Then, the glass substrate 3 is floated. Further, the compressed air supply unit 46 blows air having a static elimination effect from each of the air holes 4, 12, 18, for example, air ionized into a positive ion or a negative ion. .increase. -The vacuum suction part 47 communicates selectively with the board mounting table 1 for loading, the floating block 11 and the gaps of the board mounting table 16 for unloading through piping. The glass substrate 3 is sucked and held on the loading substrate mounting table 1 and the unloading substrate mounting table 16 via the air holes 4, 1 218 through the air holes 4.
  • the vacuum suction section 47 communicates with the suction pads 29b30b, 31b, 32b, 33b, and 34b through pipes.
  • the heads 29b, 30b, 31b, 32b, 33b34b are evacuated to hold the glass substrate 3 by suction.
  • the movement control unit 48 is configured to transfer each of the transport ends 29, 30, 31, 32, 33, and 34 to the respective sliders 23, 24, 25, 26, 27, and 2. 8 Move up control.
  • the posture recognition section 49 receives the respective detection signals output from the three positioning sensors 43 to 45, and based on the three edge position information of the glass substrate 3 indicated by the detection signals. The posture of the glass substrate 3 is recognized.
  • the posture control unit 50 moves the pair of conveyance ends 31 and 32 with the conveyance direction C. The movement is controlled in the direction perpendicular to the transport direction C.
  • Each of the transport ends 29 and 30 moves to the loading side on each of the sliders 23 and 24 and stops and stands by. .
  • the carry-in transfer robot 7 rotates the hand arm 8, advances and retreats, removes the uninspected glass substrate 3 from the cassette, and transfers the glass substrate 3 above the substrate mounting table 1. At the same time, each lift pin 6 of the substrate mounting table 1 rises.
  • the loading transport robot 7 lowers the hand arm 8 and places the glass substrate 3 on each lift bin 6.
  • the glass substrate 3 is placed on the substrate mounting table 1 by lowering each of the lift pins 6. Since the width of the glass substrate 3 is longer than the width of the substrate mounting table 1, both ends of the glass substrate 3 protrude from the substrate mounting table 1.
  • each transfer end 29, 30 raises each arm 29a, 30a and moves each suction pad 29b, 30b to the substrate mounting table 1. It is adsorbed on the back surface of the glass substrate 3 that comes out.
  • the suction positions of these suction pads 29 b and 30 b are at the rear end of the glass substrate 3 where the circuit pattern is not formed, for example, in front of the glass substrate 3 in the transport direction C. These are both ends of the back surface.
  • each of the suction nodes 29 b and 30 b slightly rises above the surface height of the substrate mounting table 1 in a state of being suctioned to the back surface of the glass substrate 3.
  • the compressed air supply section 46 supplies compressed air to the gap of the substrate mounting table 1 through a pipe, and blows up the compressed air from the air hole 4.
  • the compressed air which is ionized to have a static elimination effect, is used to neutralize the static electricity of the glass substrate 3 and prevent the glass substrate 3 from being charged.
  • the movement control section 48 includes the respective transport end sections 29, 30 b having the suction pads 29 b, 30 b adsorbed on the back surface of the glass substrate 3. (Arms 29a and 30a) are synchronized at the same speed, and are moved in the transport direction C on the respective sliders 23 and 24. As a result, the glass substrate 3 floats and is completely in non-contact with the upper surface of the substrate mounting table 1 and the upper surface of the floating block 11, and is pulled by the transport ends 29 and 30. It is transported at high speed in the transport direction C. By this high-speed transfer, the glass substrate 3 reaches the alignment portion A on the floating block 11.
  • the glass substrate 3 When reaching the alignment part A, the glass substrate 3 may be inclined with respect to the transport direction C as shown in FIG.
  • the positioning sensor 43 detects an edge of one side of the glass substrate 3 that has stopped rising and rising in the alignment section A in the transport direction C and outputs the detection signal. I do.
  • each of the positioning sensors 44 and 45 detects an edge of the other side in the same direction as the transport direction C of the glass substrate 3 that has stopped floating at the alignment portion A and outputs a detection signal. .
  • the posture recognition section 49 receives the detection signals output from the three positioning sensors 43 to 45, respectively, and outputs the detection signals from the three positions of the glass substrate 3 which are indicated by the detection signals.
  • the attitude of the glass substrate 3 is recognized based on the edge position information. In this case, the right end of the glass substrate 3 on the tip side with respect to the transport direction C projects forward from the left end, and is inclined leftward with respect to the transport direction C.
  • the posture control unit 50 first moves one of the conveying ends 30 in the conveying direction C as shown in FIG. Move slightly in the opposite direction (rear side).
  • the glass substrate 3 is adsorbed. It is rotated in the direction of arrow F with the rod 29 a as the center axis, and is arranged parallel to the transport direction C.
  • the posture recognition unit 49 recognizes the posture of the glass substrate 3 by inputting the respective detection signals output from the three positioning sensors 43 to 45, respectively. As a result of this recognition, the left end of the glass substrate 3 is closer to the slider 23 as shown in FIG.
  • the attitude control unit 50 drives the plunger at one of the transport ends 29 to extend the arm 29a in the direction of arrow H (in the direction perpendicular to the transport direction C).
  • the plunger of the other transfer end 30 is driven to shrink the arm 30a in the direction of the arrow H, and the glass substrate 3 is moved in the direction of the arrow H to move the center of the glass substrate 3 to the center. Adjust the position to the center position of the transport path.
  • the attitude control section 50 synchronizes the transport ends 29 and 30 so that the front ends of the glass substrates 3 are aligned with the center of the positioning sensor 43 and moves them forward.
  • each of the transport ends 29 and 30 slightly moves in the direction of arrow N, for example, as shown in FIG. 7.
  • the glass substrate 3 moves to the reference position, ie, And the center of the glass substrate 3 is aligned so as to substantially coincide with the center position of the transport path.
  • the reference position is where each of the three positioning sensors 43 to 45 detects the edge position of the glass substrate 3 at the center of the sensor.
  • the movement control unit 48 moves the transport ends 31 and 32 at the same speed in the direction opposite to the transport direction C as shown in FIG. And synchronize them to move them on the respective sliders 25 26.
  • These transport ends 3 1 and 3 2 reach below the glass substrate 3 Then, it stops at the substrate transfer reference position on each slider 25, 26, raises each arm 31a, 32a, and moves each suction pad 31b, 32b to the glass substrate. Adsorb on the back of 3.
  • the suction positions of the suction pads 31b and 32b are both ends of the rear surface which is on the front side in the transport direction C on the glass substrate 3.
  • the suction holding of the glass substrate 3 is transferred to the respective transport ends 31 and 32 from the respective transport ends 29 and 30.
  • the transport end portions 29 and 30 move on the respective sliders 23 and 24 in the direction opposite to the transport direction C (rear side), and move to the substrate transfer reference position of the loading substrate mounting table 1. Stop and wait.
  • the respective transport ends 31 1 and 32 are synchronized at the same speed as shown in FIG. 8 to move on the respective sliders 25 and 26 in the transport direction C. Moving.
  • the glass substrate 3 floating on the floating block 11 is pulled by the respective transport ends 31 and 32 and transported at high speed in the transport direction C.
  • the inspection unit E is reached.
  • the compressed air supply section 46 stops the supply of the compressed air to each of the air holes 4 of the floating block 11.
  • the vacuum suction part 47 evacuates each air hole 12 of the floating block 11 through a pipe to suck and hold the glass substrate 3 on the floating block 11. At this time, the suction pads 3 1 b and 3 2 b holding the back surface of the glass substrate 3 by suction were used. Suction is released and each arm 31a and 32a descends.
  • a pattern inspection and a defect inspection of the glass substrate 3 are performed by using image data acquired by various inspections of the glass substrate 3 using an inspection device 14 having a sensor. What do you do? In this case, the entire surface of the glass substrate 3 is inspected by the inspection device 14 by moving the portal arm 15 on which the inspection device 14 is mounted in the front-rear direction with respect to the transport direction C. .
  • each transport end 31, 32 raises each arm 31a, 32a, and moves each suction pad 31b32b to the glass substrate 3.
  • the back surface which is the front side in the transport direction C in the above.
  • the vacuum suction unit 47 stops the evacuation of the air holes 12 of the floating block 11. Then, switching from the vacuum suction section 47 to the compressed air supply section 46 is performed.
  • the compressed air supply unit 46 supplies compressed air to each of the air holes 12 of the levitation block 11 to blow up ionized compressed air from these air holes 12. Float the glass substrate 3.
  • the transport ends 3 1 and 3 2 were synchronized with the transport direction C at a constant speed, with the glass substrate 3 floating above the floating block 11. Then, it may be performed while moving on each of the sliders 23 and 24.
  • each of the transport ends 3 1, 3 2 is moved to the respective slider 25.
  • the glass substrate 3 is moved at high speed in the transfer direction C by moving on the substrate 26.
  • the suction holding of the glass substrate 3 is transferred from each of the transfer ends 31 and 32 to each of the transfer ends 33 and 34.
  • the compressed air supply unit 46 supplies compressed air to each air hole 8 of the substrate mounting table 16. .
  • the transfer of the glass substrate 3 to the transfer ends 3 3, 3 4 from the transfer ends 3 1, 3 2 is performed from the transfer ends 29, 30 to the transfer ends 31, 3. It is performed in the same way as the transfer to 2.
  • the respective transport ends 33, 34 move on the respective sliders 27, 28 to transport the glass substrate 3 in the transport direction C. Then, when the glass substrate 3 reaches above the substrate mounting table 16 for unloading, each of the transport ends 33, 34 stops at the substrate transfer reference position.
  • Each lift pin 20 rises on the substrate mounting table 16.
  • the compressed air supply section 46 stops the supply of compressed air to the air holes 18 of the substrate mounting table 16 and, at the same time, the suction pads 33 b and 34 are attached to the back of the glass substrate 3. Release the adsorption to, and lower each arm 33a and 34a. Thus, the glass substrate 3 is placed on each of the lift pins 20.
  • the unloading transfer robot 21 rotates, advances, and retracts the handle arm 22 to take out the inspected glass substrate 3 from each lift bin 20 and stores it in the cassette. I do.
  • each substrate mounting The glass substrate 3 is conveyed while air is blown up from the air holes 4, 18, and 12 formed in the tables 1, 16 and the floating block 11 to float the glass substrate 3. It transports while holding both ends of the tip in the direction C by suction.
  • the large glass substrate 3 can be conveyed at a high speed without damaging the glass substrate 3 in a floating state.
  • a plurality of air holes 4, 18 and 12 are regularly provided on the air carrying surface of each of the substrate mounting tables 1 and 16 and the floating block 11 and the grooves 5, 13 and 19 are formed. Since the air blown by the plurality of air holes 4, 18 and 12 flows through each groove 5, 13 and 19, the glass substrate 3 and the substrate mounting table 1 and Air does not accumulate between 16 and the floating block 11 and flows through each groove 5, 13 19. Thus, the large-sized glass substrate 3 can be transported while maintaining a high flatness without bending such as rising at the center.
  • the air blowing pressure distribution becomes uniform in the transport direction C. Thereby, the glass substrate 3 can be transported in a stable state without swinging in the vertical direction during transport.
  • the glass substrate 3 is conveyed at a high speed while forcibly pulling while sucking and holding both front and rear ends of the glass substrate 3 in the conveying direction C of the glass substrate 3. Thereby, the glass substrate 3 can be stably conveyed in a floating state without swinging in the conveying direction C such as meandering.
  • both sides of the back surface of the glass substrate 3 are held by suction, the portion of the circuit pattern formed on the glass substrate 3 It does not touch the circuit and does not affect the circuit pattern.
  • the large glass substrate 3 can be transferred at a high speed in a non-contact manner in this way, in a semiconductor manufacturing field such as FPD manufacturing, the product productivity is improved without deteriorating the product quality. Can be satisfied.
  • the alignment is performed by the three positioning sensors 43 to 45, the attitude recognition section 49 and the attitude control section 50 while the glass substrate 3 is floated. In a non-contact state in which the glass substrate 3 is floated, the alignment can be surely performed without damaging the large glass substrate 3.
  • each of the transport ends 29, 30 for transporting the glass substrate 3 is slightly moved in the two-dimensional direction so that the transport ends 29, 30 are moved.
  • the glass substrate 3 transfer function it can also be used as an argument, and the transfer of the glass substrate 3 can be followed by successive alignments. The time required for ment can be shortened.
  • the position of the glass substrate 3 is recognized by the three positioning sensors 43 to 45, so that the position of the glass substrate 3 can be detected with high accuracy.
  • each positioning sensor 43 to 45 are embedded in the levitation block 11, each positioning sensor 43 to 45 The reference position of No. 5 does not shift, and the glass substrates 3 can always be aligned with high accuracy based on the edge position information of the three points.
  • the first embodiment may be applied to, for example, a process in which a plurality of inspection units E are provided or in which various processing processes are provided.
  • FIG. 9 is a configuration diagram of the substrate transfer device.
  • the forward and backward directions of the hand arms 8, 22 of the transfer robots 7, 21 for loading and unloading are set so that the forward and backward directions are the same as the transfer direction C.
  • the transfer robots 7 and 21 are provided, and the holder 60 that holds the glass substrate 3 by suction on the transfer stand 9 can be moved in the transfer direction C.
  • each of the transfer robots 7 and 16 has been removed.
  • the glass substrate 3 was directly mounted on the substrate mounting table 21 by inserting the respective node arms 82 into the grooves 5 and 19 of the substrate mounting tables 1 and 16. Remove the glass substrate 3 directly from the substrate mounting table 16.
  • a moving floating block 60 (hereinafter, referred to as a holder) 60 is movably provided.
  • the surface of the holder 60 is used for both air blowing and suction
  • a plurality of air holes 62 are provided on the entire surface.
  • This holder 6 ⁇ has a width slightly smaller than the width of the glass substrate 3, and the height of the holder surface is almost the same as the surface height of the substrate mounting table 1, similarly to the substrate mounting table 1. Is formed.
  • a pair of sliders 6 3 and 6 4 are provided on the transfer stand 9 in parallel with each other along the transfer direction C with the holder 60 interposed therebetween. These sliders 6 3 and 6 4 are connected to the loading side. It is provided between the substrate mounting table 1 and the transfer robot 21 on the unloading side. The sliders 6 3 and 6 4 are capable of moving a pair of transport ends 29 and 30 on the alignment side and a transport end 31 and 32 on the inspection side, respectively. Is provided.
  • the transfer ends 29 and 30 on the alignment side are the left end on the transfer robot 7 side on the loading side and the right end of the alignment section A on each of the sliders 63 and 64. Reciprocate between section A a and.
  • the transport ends 31 and 32 on the inspection side are located on the right end A a.
  • Reciprocate between and the right end of the side is performed in the same manner as in the first embodiment.
  • the glass substrate 3 carried in from the carat by the transfer robot 7 floats on the substrate mounting table 1 and moves in the transfer direction C.
  • each of the transfer ends 29, 30 is pulled by the transfer ends 29, waits at the alignment unit A, and is transferred above the holder 60.
  • the suction positions of the transfer ends 29 and 30 are both ends of the rear surface of the glass substrate 3 which is on the front side in the transfer direction C.
  • the glass substrate 3 is aligned on the holder 60 by the fine movement of the transfer ends 29 and 30 in the same manner as in the first embodiment. .
  • the compressed air supply unit 46 is switched to the vacuum suction unit 47, and the glass substrate 3 is suction-held on the holder 60.
  • the transfer end portions 29 and 30 release the suction holding to the glass substrate 3, and the left end portion of the transfer side transfer robot 7 side on each of the sliders 63 and 64 (substrate delivery).
  • the holder 60 moves in the transport direction C while holding the glass substrate 3 by suction.
  • various inspections of the glass substrate 3 are performed in the inspection section E in the same manner as described above.
  • the arms of the transport ends 3 1 and 3 2 waiting at the substrate transfer reference position—3 1 a 3 2 a are raised, and the suction pads 3 1 b
  • the rear surface of the glass substrate 3 is sucked and held by 3b.
  • the suction positions of the transfer ends 31 and 32 are both ends of the rear surface of the glass substrate 3 on the front side in the transfer direction C.
  • compressed air is supplied from the compressed air supply unit 46 to the substrate mounting table 16 to float the glass substrate 3 from above the holder 60. In this state, the glass substrate 3 is pulled by the transfer ends 31 and 32 and transferred at high speed onto the substrate mounting table 16.
  • the unloading transfer robot 21 is inserted into the groove 19 and slightly raised. To hold the back surface of the glass substrate 3 by suction. At this time, the suction of the suction pads 3 1 b 3 2 b of the respective transport ends 31 and 32 from the back surface of the glass substrate 3 is released. The unloading transfer robot 21 raises the hand arm 22 and rotates the hand arm 22 forward and backward to remove the glass substrate 3 that has been inspected from the substrate mounting table 16. And store it in cassette ⁇ .
  • the same effects as those of the first embodiment can be obtained.
  • the lift pins 6 and 20 provided on the substrate mounting tables 1 and 16 for loading and unloading were eliminated, the operation time of each of the lift pins 6 and 20 was reduced. Can save time.
  • the method of floating the glass substrate 3 is not limited to blowing air on the back surface of the glass substrate 3, but may be floating by an electrostatic method.
  • the glass substrate 3 is levitated by the electrostatic method, it is preferable that the glass substrate 3 be neutralized.
  • the method of transporting the floating glass substrate 3 is not limited to, for example, moving the pair of transport ends 29, 30 to a pair of sliders 23, 24, but also moving each groove 13
  • Each transfer end having each suction pad may be movably provided therein, and the transfer end may transfer the suction while holding the back surface of the front end of the glass substrate 3.
  • the suction holding position when the glass substrate 3 is transported is not limited to both ends of the glass substrate 3 in the transport direction C, but may be a glass substrate.
  • the glass substrate 3 may be sucked and held at both ends of the front end and the rear end, or may be sucked and held at a plurality of locations along the center of each of two opposing sides of the glass substrate 3 or along the two sides. If the glass substrate 3 is sucked and held at the four corners of the glass substrate 3, the center of the two opposing sides, or at a plurality of locations along the two sides, not only the conveyance in the conveyance direction C but also the conveyance direction C The transport in the opposite direction is also possible. Further, the suction holding position of the glass substrate 3 may be the front surface or the front and back surfaces of the glass substrate 3 as long as it is a portion where a circuit pattern is not formed.
  • any mechanism other than the transfer robots 7 and 21 may be used.
  • substrate floating transfer means such as air transfer from another line may be used.
  • the transfer of the glass substrate 3 in the in-line inspection in the manufacturing process of a flat panel such as a large LCD or a PDP has been described.
  • the present invention is not limited to this. It can also be applied to levitating various substrates and plate-like objects and transporting them at high speed.
  • the method of floating the glass substrate 3 and transporting it at high speed is not limited to the transport from the substrate mounting table 1 to the holder 60, but also to the case where a plurality of movable holders 60 are provided. It can also be applied to transport between different locations.
  • Each of the positioning sensors 43 to 45 used in the alignment unit A uses a line sensor, but is not limited to this, and uses a two-dimensional CCD camera to recognize the edge position of the glass substrate 3. May be.
  • Two grooves 5, 13, and 19, which serve as air escape paths, are provided to eliminate flatness in the center of the substrate 3 and maintain flatness, but these grooves 5, 13, and 19 are provided. As shown in FIG. 10, a plurality may be provided in parallel with the transport direction C. These grooves 5, 13 19 are air escape holes for the air holes 4, 12, and 18, so that both ends of the grooves are air-tight so that air can be discharged well. It is better to open the hole or to provide a round-slit air escape hole penetrating the back surface in the groove.
  • each of the grooves 5, 13 and 19 may be quadrilateral, U-shaped, V-shaped, or arc-shaped.
  • the width of each of the grooves 5, 13 and 19 is determined by forming an air layer between each of the substrate mounting tables 1 and 16 and the floating block 11 and the glass substrate 3 to form the glass substrate 3. The width length that allows for floating is good.
  • the width of these grooves 5, 13 and 19 is preferably the same in the transport direction C, and the air pressure applied to the glass substrate 3 in the transport direction C is preferably uniform.
  • a number of air blowing holes are provided at both ends of each substrate mounting table 1, 16 and the floating block 11. Air may be blown to both ends of the glass substrate 3 respectively.
  • the respective sliders 63 and 64 are extended to the carry-out transfer port 21 side, but may be extended to the carry-in transfer port port 7 side.
  • the present invention is applicable to manufacturing of large-sized LCDs and FPDs such as PDPs. It is used for the transfer of glass substrates in in-line inspection in the process, and the high-speed transfer of various substrates and plate-like objects by floating.

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Abstract

A substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction (C).

Description

明 細 書  Specification
基板搬送装置 Substrate transfer device
技術分野 Technical field
本発明は、 例えば大型の液晶ディ スプレイ （以下、 L C D と省略する） やプラズマディ スプレイパネル （以下、 P D P と省略する） な どのフラ ッ トパネルディ スプレイ （以下、 F P D と省略する） 等におけるガラス基板を搬送路に浮上させ て搬送する基板搬送装置に関する。  The present invention relates to a glass substrate for a flat panel display (hereinafter abbreviated as FPD) such as a large liquid crystal display (hereinafter abbreviated as LCD) or a plasma display panel (hereinafter abbreviated as PDP). The present invention relates to a substrate transfer device that floats on a transfer path and transfers the substrate.
背景技術 Background art
近年、 画面の大型化ゃコス ト削減といった要望に対応する ために、 F P Dの分野において F P D製造工程で処理するガ ラ ス基板のサイズが益々大型化する傾向にある。 F P D製造 工程において大型ガラス基板を搬送する方法と しては、 ロ ー ラを用いた転が り 搬送機構を用いるのが知られている。  In recent years, the size of glass substrates to be processed in the FPD manufacturing process has been increasing in the field of FPDs in order to respond to demands for larger screens and reduced costs. As a method for transferring a large glass substrate in the FPD manufacturing process, it is known to use a rolling transfer mechanism using a roller.
大型ガラス基板を搬送する技術は、 例えば特開 2 0 0 0 - 1 9 3 6 0 4号公報及ぴ特開 2 0 0 0 — 9 6 6 .1 号公報に記 載されている。 前者は、 被検査基板 （ガラス基板に相当） の 下面の左右両側のみに一対の支持ローラ機構を接触させて支 持し、 かつガラス基板の左右の端辺に当接する一対の規制口 ーラ機構によ り 左右方向を位置規制する。 又、 ガラス基板の 中間部が 自重によ り 下方に撓むので、 このガラス基板の橈み を規制するためにガラス基板の下面に圧力空気を吹き付けて いる。  Techniques for transporting large glass substrates are described in, for example, JP-A-2000-196364 and JP-A-2000-966.1. In the former, a pair of supporting roller mechanisms are brought into contact with and supported only on the left and right sides of the lower surface of the substrate to be inspected (corresponding to a glass substrate), and a pair of regulating roller mechanisms contacting the left and right edges of the glass substrate. Controls the position in the left-right direction. Also, since the middle portion of the glass substrate bends downward due to its own weight, pressurized air is blown to the lower surface of the glass substrate to regulate the radius of the glass substrate.
後者は、 ころ搬送部によ り ガラス基板を欠陥検査部に搬送 し、 ガラス基板を位置决め して把持機構によ り ガラス基板の 端部を把持して欠陥検査を行う。 欠陥検査時には、 ガラス基 板を非接触支持するために、 エア浮上ステージに設け られた 吹出 口から高圧エアを吹出 してガラス基板の高さ を一定に保 つている。 In the latter, the glass substrate is transported to the defect inspection unit by the roller transport unit, the glass substrate is positioned, and the glass substrate is held by the gripping mechanism. Defect inspection is performed by gripping the end. At the time of defect inspection, high-pressure air is blown from the air outlet provided on the air-floating stage to keep the glass substrate at a constant height in order to support the glass substrate in a non-contact manner.
しかしなが ら、 前者のガラス基板の搬送は、 一対の支持口 ーラ機構及び一対の規制ローラ機構を用いているため、 ガラ ス基板を高速搬送する と、 ローラ と接触するガラ ス基板の転 が り 面にローラの摩擦痕が生じる。  However, since the former glass substrate transport uses a pair of support roller mechanisms and a pair of regulating roller mechanisms, when the glass substrate is transported at high speed, the glass substrate that comes into contact with the rollers rolls. Roller friction marks are formed on the beveled surface.
後者は、 ころ搬送部によ り ガラス基板を搬送するために、 前者と 同様にガラス基板を高速搬送する と 、 ローラ と接触す るガラス基板の転が り 面にローラの摩擦痕が生じる。  In the latter, the glass substrate is transported by the roller transporter. Therefore, when the glass substrate is transported at a high speed in the same manner as the former, friction marks are generated on the rolling surface of the glass substrate in contact with the roller.
そこで本発明は、 非接触状態で搬送 して、 ガラス基板に傷 を付ける こ と なく 高速搬送ができ る基板搬送装置を提供する こ と を 目 的とする。  Accordingly, it is an object of the present invention to provide a substrate transfer device that can transfer a glass substrate in a non-contact state and perform high-speed transfer without damaging the glass substrate.
発明の開示 Disclosure of the invention
本発明の主要な観点によれば、 搬送路上に沿つて設.け られ 基板を搬送路上で浮上させる基板浮上機構と、 基板浮上機構 によ り 浮上した基板の両端部を保持して搬送路に沿って搬送 する搬送機構と を具備 した基板搬送装置が提供される。  According to a main aspect of the present invention, a substrate floating mechanism is provided along a transport path to lift a substrate on the transport path, and both ends of the substrate floated by the substrate floating mechanism are held on the transport path. And a transport mechanism for transporting the substrate along the substrate.
図面の簡単な説明 BRIEF DESCRIPTION OF THE FIGURES
図 1 は本発明に係わる基板搬送装置の第 1 の実施の形態を 示す平面構成図。  FIG. 1 is a plan view showing a substrate transfer apparatus according to a first embodiment of the present invention.
図 2 は同装置の側面構成図。  Figure 2 is a side view of the device.
図 3 は同装置において基板載置台 1 上に浮上したガラス基 板を示す図。 図 4 は同装置におけるガラス基板のエアー搬送動作を示す 図。 FIG. 3 is a view showing a glass substrate floated on the substrate mounting table 1 in the apparatus. Figure 4 is a diagram showing the air transfer operation of the glass substrate in the same device.
図 5 は同装置におけるァライ メ ン ト動作を示す図。  Figure 5 shows the alignment operation in the same device.
図 6 は同装置におけるァライ メ ン ト動作を示す図。  Figure 6 shows the alignment operation in the same device.
図 7 は同装置におけるァライ メ ン ト動作を示す図。  Figure 7 shows the alignment operation in the same device.
図 8 は同装置におけるァライ メ ン ト動作後のガラス基板の 搬送を示す図。  Fig. 8 is a view showing the transfer of the glass substrate after the alignment operation in the same apparatus.
図 9 は本発明に係わる基板搬送装置の第 2 の実施の形態を 示す構成図。  FIG. 9 is a configuration diagram showing a second embodiment of the substrate transfer device according to the present invention.
図 1 0 は同装置における浮上プロ ック に形成した複数の溝 を示す図。  FIG. 10 is a view showing a plurality of grooves formed on a floating block in the apparatus.
発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION
以下、 本発明の第 1 の実施の形態について図面を参照 して 説明する。  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
図 1 は基板搬送装置を大型の L C Dや P D Pな どの F P D の製造工程におけるインライ ン検査に適用 した場合の平面構 成図であ り 、 図 2は同装置の側面構成図である。  FIG. 1 is a plan view showing a case where the substrate transfer apparatus is applied to an in-line inspection in a process of manufacturing an FPD such as a large LCD or PDP, and FIG. 2 is a side view showing the apparatus.
搬入用の基板载置台 1 は、 除振台 2上に設けられている。 この基板載置台 1 は、 搬入されたガラ ス基板 3 を载置する も ので、 その幅 （搬送方向 C に対して垂直方向） は、 ガラス基 板 3 の幅よ り も僅かに短く 形成されている。 この基板载置台 1 の上面には、 エアー吹上げと吸引 と を兼用する複数の空気 孔 4 が設け られている。 なお、 これら空気孔 4 は、 基板载置 台 1 の全面にほぼ規則的に設け られていればよい。 この基板 載置台 1 上には、 2本の溝 5 が搬送方向 Cに対して平行方向 でかつ所定の間隔をおいて形成されている。 又、 基板载置台 1 には、 ガラス基板 3 の搬入時に昇降する複数の リ フ ト ビン 6 が設け られている。 The loading substrate mounting table 1 is provided on the vibration isolation table 2. The substrate mounting table 1 has the glass substrate 3 loaded thereon, and the width thereof (perpendicular to the transport direction C) is formed to be slightly shorter than the width of the glass substrate 3. I have. A plurality of air holes 4 are provided on the upper surface of the substrate mounting table 1 for both air blowing and suction. The air holes 4 may be provided almost regularly on the entire surface of the substrate mounting table 1. Two grooves 5 are formed on the substrate mounting table 1 in a direction parallel to the transport direction C. And are formed at predetermined intervals. Further, the substrate mounting table 1 is provided with a plurality of lift bins 6 which move up and down when the glass substrate 3 is carried in.
基板載置台 1 の搬送方向 Cに対して垂直方向の入口側には 搬入用搬送ロ ボッ ト 7 が設けられている。 こ の搬入用搬送口 ポッ ト 7 は、 2本のハン ドアーム 8 を図示しない多関節ァー ムによ り 回転、 前進及び後退させなが ら未検査のガラス基板 3 をカセ ッ ト から取 り 出 して基板載置台 1 上に搬入する。 基板載置台 1 の出 口側には、 搬送架台 9 が搬送方向 C に沿 つて並設されている。 この搬送架台 9 は、 ガラス基板 3 の搬 入側から搬出側に至る長さ に形成されている。 この搬送架台 9 は、 除振台 1 0上に載せられている。  A carry-in transfer robot 7 is provided on the entrance side of the substrate mounting table 1 in a direction perpendicular to the transfer direction C. The carry-in port 7 is used to take an uninspected glass substrate 3 from the cassette while rotating, advancing and retracting the two hand arms 8 by an articulated arm (not shown). Exit and carry it onto the substrate mounting table 1. On the exit side of the substrate mounting table 1, transfer frames 9 are arranged side by side in the transfer direction C. The transfer platform 9 is formed to have a length from the loading side of the glass substrate 3 to the unloading side. The transfer frame 9 is placed on the vibration isolation table 10.
こ の搬送架台 9 上の搬入側から搬出側には、 これら搬入側 と搬出側 との全長に亘つて浮上ブロ ック 1 1 が設けられてい る。 この浮上ブロ ック 1 1 は、 その幅 （搬送方向 Cに対 して 垂直方向） · をガ -ラ ス基板-.3 の幅よ り も僅かに短く 形成 してい る。 この浮上ブロ ッ ク 1 1 の上面には、 エアー吹上げと 吸引 と を兼用する複数の空気孔 1 2 が設け られている。 なお、 こ れら空気孔 1 2 は、 浮上プロ ック 1 1 の全面にほぼ均一に設 け られていればよい。 この浮上ブロ ッ ク 1 1 上には、 2本の 溝 1 3 が搬送方向 C に対して平行方向でかつ所定の間隔をお いて形成されている。 浮上ブロ ック 1 1 の表面高さは、 基板 載置台 1 の表面の高さ と ほぼ同一である。  A floating block 11 is provided from the loading side to the unloading side on the transfer frame 9 over the entire length of the loading side and the unloading side. The floating block 11 is formed to have a width (perpendicular to the transport direction C) slightly shorter than the width of the glass substrate-.3. A plurality of air holes 12 for both air blowing and suction are provided on the upper surface of the floating block 11. Note that these air holes 12 need only be provided substantially uniformly over the entire surface of the floating block 11. On the floating block 11, two grooves 13 are formed at a predetermined interval in a direction parallel to the transport direction C. The surface height of the floating block 11 is almost the same as the surface height of the substrate mounting table 1.
搬送架台 9 における搬送方向 Cの略中間位置には、 一定速 度で搬送されるガラス基板 3 に対する各種検査を行う検査部 Eが設け られている。 この検査部 Eは、 例えば顕微鏡、 ライ ンセンサ又は C C Dカメ ラ などの各種検査用機器 1 4 を門型 アーム 1 5 に搭載している。 例えば、 検査用機器 1 4 は、 複 数配列したライ ンセンサによ り ガラス基板 3 の画像データ を 取得する。 そ して、 この画像データ を画像処理等 して例えば ガラス基板 3 のパターン検査、 欠陥検査などが行なわれる。 An inspection unit that performs various inspections on the glass substrate 3 conveyed at a constant speed is provided at a substantially intermediate position in the conveyance direction C on the conveyance stand 9. E is provided. In the inspection section E, various inspection devices 14 such as a microscope, a line sensor or a CCD camera are mounted on a portal arm 15. For example, the inspection equipment 14 acquires the image data of the glass substrate 3 by using a plurality of line sensors. The image data is subjected to image processing or the like, for example, pattern inspection or defect inspection of the glass substrate 3 is performed.
搬送架台 9 の出口側には、 搬出用の基板載置台 1 6 が搬送 方向 Cに沿って並設されている。 この基板載置台 1 6 は、 除 振台 1 7 上に設け られている。 この基板載置台 1 6 は、 浮上 ブロ ック 1 1 から搬送されてきたガラス基板 3 を搬出するた めに一時載置する も ので、 その幅 （搬送方向 Cに対して垂直 方向） は、 ガラス基板 3 の幅よ り も僅かに短く形成されてい る。 この基板載置台 1 6 の上面には、 エアー吹上げと 吸引 と を兼用する複数の空気孔 1 8 が設け られている。 なお、 これ ら空気孔 1 8 は、 基板載置台 1 6 の全面にほぼ規則的に設け られていればよい。 この基板載置台 1 6 上には、 2本の溝 1 . 9 が搬送方向 C に対 して平行方向でかつ所定の間隔をおいて 形成されている。 又、 基板載置台 1 6 には、 ガラ ス基板 3 の 搬出時に昇降する複数の リ フ ト ピン 2 0 が設けられている。 基板載置台 1 6 の表面高さ は、 浮上ブロ ック 1 1 の表面の高 さ と ほぼ同一である。  On the exit side of the transfer gantry 9, substrate mounts 16 for unloading are arranged side by side along the transfer direction C. The substrate mounting table 16 is provided on the vibration isolation table 17. The substrate mounting table 16 temporarily holds the glass substrate 3 conveyed from the floating block 11 in order to carry out the glass substrate 3, and its width (in the direction perpendicular to the conveyance direction C) is glass. It is formed slightly shorter than the width of the substrate 3. On the upper surface of the substrate mounting table 16, a plurality of air holes 18 that serve both air blowing and suction are provided. The air holes 18 may be provided almost regularly on the entire surface of the substrate mounting table 16. On the substrate mounting table 16, two grooves 1.9 are formed in a direction parallel to the transport direction C and at a predetermined interval. Further, the substrate mounting table 16 is provided with a plurality of lift pins 20 which move up and down when the glass substrate 3 is carried out. The surface height of the substrate mounting table 16 is almost the same as the surface height of the floating block 11.
基板载置台 1 6 の搬送方向 C に対して垂直方向の出 口側に は、 搬出用搬送口ホ ッ ト 2 1 が設け られている。 この搬出用 搬送ロホ ッ ト 2 1 は、 2本のハン ドアーム 2 2 を図示 しない 多関節アームによ り 回転、 前進及び後退させなが ら検査済み のガラス基板 3 をカセ ッ ト内に収納する。 An unloading transfer port hot 21 is provided on the outlet side of the substrate mounting table 16 in the direction perpendicular to the transfer direction C. The unloading transfer robot 21 has been inspected while rotating, advancing and retracting the two hand arms 22 by an articulated arm (not shown). The glass substrate 3 is stored in the cassette.
搬送架台 9 及び除振台 1 7 上には、 浮上ブロ ッ ク 1 1 及び 基板載置台 1 6 を挟んで一対の各スライ ダ 2 3 〜 2 8 が複数 組み搬送方向 C に沿って互いに平行に設け られている。 一対 のス ライ ダ 2 3 、 2 4及ぴ 2 7 、 2 8 は、 一対のスライ ダ 2 5 、 2 6 よ り も外側に設けられている。 又、 これらス ライ ダ 2 3 〜 2 8 の高さ位置は同一に設けられている。  A plurality of pairs of each of the sliders 23 to 28 are mounted on the transfer frame 9 and the vibration isolation table 17 with the floating block 11 and the substrate mounting table 16 interposed therebetween, and are parallel to each other along the transfer direction C. It is provided. The pair of sliders 23, 24 and 27, 28 are provided outside the pair of sliders 25, 26. The height positions of the sliders 23 to 28 are the same.
—対のス ライ ダ 2 3 、 2 4 は、 搬送架台 9 の入口側.のァラ ィ メ ン ト部 Aに設け られている。 これらスライ ダ 2 3 、 2 4 には、 それぞれ一対と なる各搬送端部 2 9 、 3 0 が移動可能 に設けられている。 これら搬送端部 2 9 、 3 0 は、 それぞれ 上下方向に伸縮可能でかつ回転自在に設け られた各アーム 2 9 a 、 3 0 a と 、 これらアーム 2 9 a 、 3 0 a の先端部に設 け られ、 ガラス基板 3 の裏面の両端部をそれぞれ吸着保持す る各吸着ノ、。ッ ド 2 9 b 、 3 0 b と、 各搬送端部 2 9 、 3 0 内 に設け られ、 - 各ァ ム 2 9 a 、 3 0 a を搬送方向 ~C と垂直方 向に移動させる各プラ ンジャ と を有する。  —The paired sliders 23 and 24 are provided in the alignment section A on the entrance side of the transfer stand 9. The sliders 23 and 24 are provided with a pair of transport ends 29 and 30 movably, respectively. The transport ends 29 and 30 are provided at the ends of the arms 29 a and 30 a, which are provided to be vertically expandable and contractible and rotatable, respectively, and the arms 29 a and 30 a. However, the suction holes hold both ends of the back surface of the glass substrate 3 by suction. Heads 29b, 30b and provided within each of the transport ends 29, 30.- Each platform for moving each arm 29a, 30a in the transport direction ~ C and in the vertical direction. And have
一対のス ライ ダ 2 5 、 2 6 は、 ァライ メ ン ト部 Aの出口側 と搬送架台 9 の出口側の間に設け られている。 これらスライ ダ 2 5 、 2 6 には、 それぞれ一対と なる各搬送端部 3 1 、 3 2 が移動可能に設け られている。 これら搬送端部 3 1 、 3 2 は、 各搬送端部 2 9 、 3 0 と 同様に、 各アーム 3 1 a 、 3 2 a と各吸着ノヽ。ッ ド 3 1 b 、 3 2 b と を有する。  The pair of sliders 25 and 26 are provided between the exit side of the alignment unit A and the exit side of the transfer frame 9. The sliders 25 and 26 are provided with a pair of transfer ends 31 and 32 movably, respectively. These transport ends 31 and 32 are, like the transport ends 29 and 30, connected to the arms 31 a and 32 a and the suction nozzles, respectively. Heads 31b and 32b.
—対のス ライ ダ 2 7 、 2 8 は、 搬送架台 9 の出 口側 と基板 载置台 1 6 の出 口側との間に設け られている。 これらスライ ダ 2 7 、 2 8 には、 それぞれ一対となる各搬送端部 3 3 、 3 4 が移動可能に設け られている。 これら搬送端部 3 3 、 3 4 は、 各搬送端部 2 9 、 3 0 と同様に、 各アーム 3 3 a 、 3 4 a と各吸着ノ、。ッ ド 3 3 b 、 3 4 b と を有する。 —The pair of sliders 27 and 28 are provided between the exit side of the transfer stand 9 and the exit side of the substrate placing table 16. These sly The transfer ends 33, 34 in pairs are provided movably on the dies 27, 28, respectively. These transport ends 33 and 34 are, like the transport ends 29 and 30, each arm 33a and 34a and each suction end. Heads 33b and 34b.
なお、 一対のス ライ ダ 2 3 、 2 4及び 2 7 、 2 8 は一対の スライ ダ 2 5 、 2 6 よ り も外側に設け られてレヽるので、 各ス ライ ダ 2 3 、 2 4及び 2 7 、 2 8 の各吸着パッ ド 2 9 b 、 3 0 b 、 3 3 b 、 3 4 b の位置は、 各ス ライ ダ 2 5 、 2 6 の各 吸着パッ ド 3 1 b 、 3 2 b の位置と同一になる よ う に各ァー ム 2 9 a 、 3 0 a 、 3 3 a 、 3 4 a の長さが設定されている， なお、 これら搬送端部 2 9 、 3 0 、 3 1 、 3 2 、 3 3 、 3 4 は、 ガラス基板 3 を保持する各アーム 2 9 a 、 3 0 a 、 3 l a 、 3 2 b , 3 3 a 、 3 4 a を X Y方向に微動でき る機構 であれば、 どのよ う な構成であっても よい。  Since the pair of sliders 23, 24 and 27, 28 are provided outside the pair of sliders 25, 26, the sliders 23, 24, and Positions of suction pads 29 b, 30 b, 33 b, and 34 b of 27, 28 are located on suction pads 31 b, 32 b of sliders 25, 26. The length of each arm 29 a, 30 a, 33 a, 34 a is set so as to be the same as the position of the transfer end portions 29, 30, 3. 1, 32, 33, and 34 are mechanisms that can finely move the arms 29 a, 30 a, 3 la, 32 b, 33 a, and 34 a that hold the glass substrate 3 in the XY direction. If so, any configuration may be used.
浮上ブロ ック 1 1 上におけるァライ メ ン ト部 Aには、 3 つ の位置決-め.セン-サ 4-3 〜 4 5 が設けられている-。-これ.ち位置 決めセンサ 4 3 〜 4 5 は、 ガラス基板 3 の互いに直交する 2 辺 （縦、 横） の各エッ ジを検出 し、 そのエッジ位置を示す各 検出信号を出力する。 これら位置決めセンサ 4 3 〜 4 5 は、 それぞれ複数の検出素子をライ ン状に配列 したライ ンセンサ である。  The alignment part A on the levitation block 11 is provided with three positioning means. Sensors 4-3 to 45 are provided. The positioning sensors 43 to 45 detect each edge of the glass substrate 3 on two sides (vertical and horizontal) orthogonal to each other, and output each detection signal indicating the edge position. Each of the positioning sensors 43 to 45 is a line sensor in which a plurality of detection elements are arranged in a line.
位置決めセンサ 4 3 は、 浮上ブロ ック 1 1 の幅方向の中間 位置で、 ライ ン検出方向を搬送方向 C と 同一方向に設け られ ている。 この位置決めセンサ 4 3 は、 ァライ メ ン ト部 Aで浮 上停止 しているガラス基板 3 の搬送方向 Cの前方側のェ ッジ を検出する。 The positioning sensor 43 is provided at an intermediate position in the width direction of the floating block 11 and the line detection direction is the same as the transport direction C. The positioning sensor 43 is an edge on the front side in the transport direction C of the glass substrate 3 stopped floating at the alignment portion A. Is detected.
各位置決めセンサ 4 4 、 4 5 は、 浮上ブロ ック 1 1 の側面 に所定の間隔をおいて設け られている。 これら位置決めセン サ 4 4 、 4 5 は、 ライ ン検出方向を搬送方向 Cに対して垂直 方向に設け られている。 これら位置決めセ ンサ 4 4 、 4 5 は. ァライ メ ン ト部 Aで浮上停止 しているガラス基板 3 の搬送方 向 C と 同一方向のエッジを検出する。  The positioning sensors 44 and 45 are provided at predetermined intervals on the side surface of the floating block 11. These positioning sensors 44 and 45 are provided with the line detection direction perpendicular to the transport direction C. These positioning sensors 44 and 45 detect an edge in the same direction as the transfer direction C of the glass substrate 3 that has stopped floating at the alignment part A.
—方、 圧搾空気供給部 4 6 は、 配管を通 して搬入用の基板 載置台 1 と、 浮上ブロ ック 1 1 と、 搬出用の基板載置台 1 6 の各空隙部に連通 し、 それぞれ選択的に圧搾エアーを供給し て各空気孔 4 、 1 2 、 1 8 から圧搾エアーを吹き上げ、 搬入 用の基板載置台 1 、 浮上ブロ ック 1 1 又は搬出用の基板載置 台 1 6 上においてガラス基板 3 を浮上させる。 又、 圧搾空気 供給部 4 6 は、 各空気孔 4 、 1 2 、 1 8 か ら除電効果を有す るエアー、 例えばプラ スイ オン又はマイナスイ オンにイ オン 化されたェ-ァ を.吹.上げる。 - 真空吸着部 4 7 は、 配管を通 して搬入用の基板載置台 1 と 浮上ブロ ッ ク 1 1 と 、 搬出用の基板载置台 1 6 の各空隙部と に連通 し、 それぞれ選択的に真空引き し、 各空気孔 4 、 1 2 1 8 を介 して搬入用の基板载置台 1 や搬出用の基板載置台 1 6 上にガラス基板 3 を吸着保持させる。  The compressed air supply unit 46 communicates with the gaps of the loading board mounting table 1, the floating block 11 and the unloading board mounting table 16 through the pipes, respectively. By selectively supplying compressed air, the compressed air is blown up from each of the air holes 4, 12, and 18, and the substrate mounting table 1 for loading, the floating block 11, or the substrate mounting table 16 for unloading Then, the glass substrate 3 is floated. Further, the compressed air supply unit 46 blows air having a static elimination effect from each of the air holes 4, 12, 18, for example, air ionized into a positive ion or a negative ion. .increase. -The vacuum suction part 47 communicates selectively with the board mounting table 1 for loading, the floating block 11 and the gaps of the board mounting table 16 for unloading through piping. The glass substrate 3 is sucked and held on the loading substrate mounting table 1 and the unloading substrate mounting table 16 via the air holes 4, 1 218 through the air holes 4.
又、 真空吸着部 4 7 は、 配管を通して各吸着パッ ド 2 9 b 3 0 b 、 3 1 b 、 3 2 b 、 3 3 b 、 3 4 b にそれぞれ連通し これら吸着ノヽ。ッ ド 2 9 b 、 3 0 b 、 3 1 b 、 3 2 b 、 3 3 b 3 4 b を真空引き してガラ ス基板 3 を吸着保持する。 移動制御部 4 8 は、 各搬送端部 2 9 、 3 0 、 3 1 、 3 2、 3 3 、 3 4 をそれぞれ各ス ライ ダ 2 3 、 2 4、 2 5 、 2 6 、 2 7 、 2 8 上に移動制御する。 The vacuum suction section 47 communicates with the suction pads 29b30b, 31b, 32b, 33b, and 34b through pipes. The heads 29b, 30b, 31b, 32b, 33b34b are evacuated to hold the glass substrate 3 by suction. The movement control unit 48 is configured to transfer each of the transport ends 29, 30, 31, 32, 33, and 34 to the respective sliders 23, 24, 25, 26, 27, and 2. 8 Move up control.
姿勢認識部 4 9 は、 3 つの位置決めセンサ 4 3 〜 4 5 から それぞれ出力 された各検出信号を入力 し、 これら検出信号に よ り 示されるガラス基板 3 の 3箇所のエッジ位置情報に基づ いてガラ ス基板 3 の姿勢を認識する。  The posture recognition section 49 receives the respective detection signals output from the three positioning sensors 43 to 45, and based on the three edge position information of the glass substrate 3 indicated by the detection signals. The posture of the glass substrate 3 is recognized.
姿勢制御部 5 0 は、 姿勢認識部 4 9 によ り認識されたガラ ス基板 3 の姿勢を基準位置にァライ メ ン トするために一対の 搬送端部 3 1 、 3 2 を搬送方向 C と、 搬送方向 C に対して垂 直方向に移動制御する。  In order to align the posture of the glass substrate 3 recognized by the posture recognition unit 49 to the reference position, the posture control unit 50 moves the pair of conveyance ends 31 and 32 with the conveyance direction C. The movement is controlled in the direction perpendicular to the transport direction C.
次に、 上記の如く 構成された装置の動作について説明する , 各搬送端部 2 9 、 3 0 は、 各ス ライ ダ 2 3 、 2 4 上の搬入 側に移動 して停止 し待機している。  Next, the operation of the apparatus configured as described above will be described. Each of the transport ends 29 and 30 moves to the loading side on each of the sliders 23 and 24 and stops and stands by. .
搬入用搬送ロボッ ト 7 は、 ハン ドアーム 8 を回転、 前進及 ぴ後退して未検査のガラス基板 3 をカセ ッ トから取り 出 し.、 基板載置台 1 の上方に搬送する。 これと共に基板載置台 1 の 各リ フ ト ピン 6 は、 上昇する。 搬入用搬送ロボッ ト 7 は、 ハ ン ドアーム 8 を下降させてガラス基板 3 を各 リ フ ト ビン 6 上 に載置する。 各 リ フ ト ピン 6 が下降する こ と に よ り 、 ガラ ス 基板 3 は基板載置台 1 上に载置される。 ガラ ス基板 3 の幅は 基板載置台 1 の幅よ り も長いので、 ガラス基板 3 の両端部分 が基板載置台 1 から出る。  The carry-in transfer robot 7 rotates the hand arm 8, advances and retreats, removes the uninspected glass substrate 3 from the cassette, and transfers the glass substrate 3 above the substrate mounting table 1. At the same time, each lift pin 6 of the substrate mounting table 1 rises. The loading transport robot 7 lowers the hand arm 8 and places the glass substrate 3 on each lift bin 6. The glass substrate 3 is placed on the substrate mounting table 1 by lowering each of the lift pins 6. Since the width of the glass substrate 3 is longer than the width of the substrate mounting table 1, both ends of the glass substrate 3 protrude from the substrate mounting table 1.
次に、 各搬送端部 2 9 、 3 0 は、 各アーム 2 9 a 、 3 0 a を上昇させて、 各吸着パッ ド 2 9 b、 3 O b を基板載置台 1 か ら出ているガラス基板 3 の裏面に吸着させる。 これ ら吸着 パッ ド 2 9 b、 3 0 b の吸着位置は、 ガラ ス基板 3 における 回路パターンの形成されていない裏面端部であっ て、 例えば 搬送方向 C に向ってガラス基板 3 の前方側 と なる裏面の両端 部である。 この と き各吸着ノ ッ ド 2 9 b、 3 0 b は、 ガラ ス 基板 3 の裏面に吸着 した状態で基板载置台 1 の表面高 さ よ り も僅かに上昇する。 Next, each transfer end 29, 30 raises each arm 29a, 30a and moves each suction pad 29b, 30b to the substrate mounting table 1. It is adsorbed on the back surface of the glass substrate 3 that comes out. The suction positions of these suction pads 29 b and 30 b are at the rear end of the glass substrate 3 where the circuit pattern is not formed, for example, in front of the glass substrate 3 in the transport direction C. These are both ends of the back surface. At this time, each of the suction nodes 29 b and 30 b slightly rises above the surface height of the substrate mounting table 1 in a state of being suctioned to the back surface of the glass substrate 3.
これと共に圧搾空気供給部 4 6 は、 配管を通 して基板載置 台 1 の空隙部に圧搾エアーを供給 し、 空気孔 4 か ら圧搾エア 一を吹き上が らせる。 この と き圧搾エアーは、 除電効果を有 するイ オン化されている ものを使用する こ と で、 ガラ ス基板 3 の静電気を中和 してガラ ス基板 3 への帯電を阻止する。 圧搾エアーの吹き上げに よ り 、 基板載置台 1 と ガラ ス基板 At the same time, the compressed air supply section 46 supplies compressed air to the gap of the substrate mounting table 1 through a pipe, and blows up the compressed air from the air hole 4. At this time, the compressed air, which is ionized to have a static elimination effect, is used to neutralize the static electricity of the glass substrate 3 and prevent the glass substrate 3 from being charged. Substrate mounting table 1 and glass substrate by blowing up compressed air
3 と の間にエアー層が形成され、 ガラ ス基板 3 は図 3 に示す よ う に基板載置台 1 の表面から浮上する。 こ の と き、 各空気 孔 4 か ら.吹上げ.られたエアーは、 基板載置台 1 と ガラ ス基板 3 と の間にエアー層から各溝 5 を通 して流れる。 従って、 ェ ァ一は、 基板载置台 1 と ガラ ス基板 3 と の間に溜ま らずに流 通する ので、 ガラス基板 3 は平面度を保って基板载置台 1 上 に浮上する。 3, an air layer is formed, and the glass substrate 3 floats from the surface of the substrate mounting table 1 as shown in FIG. At this time, the air blown up from each air hole 4 flows from the air layer through each groove 5 between the substrate mounting table 1 and the glass substrate 3. Therefore, the glass flows through the glass substrate 3 without collecting between the substrate mounting table 1 and the glass substrate 3, so that the glass substrate 3 floats on the substrate mounting table 1 while maintaining flatness.
次に、 移動制御部 4 8 は、 図 4 に示すよ う にガラス基板 3 の裏面に吸着 している各吸着パ ッ ド 2 9 b、 3 0 b を有する 各搬送端部 2 9、 3 0 (アーム 2 9 a、 3 0 a ) をそれぞれ 同一速度で同期 させて各ス ライ ダ 2 3、 2 4 上を搬送方向 C に移動 させる。 これによ り 、 ガラス基板 3 は、 浮上して基板載置台 1 上面 及び浮上ブロ ッ ク 1 1 上面とは完全に非接触の状態で、 各搬 送端部 2 9 、 3 0 によ り 引 っ張られて、 搬送方向 Cに高速で 搬送される。 この高速搬送によ り ガラス基板 3 は、 浮上プロ ック 1 1 上におけるァライ メ ン ト部 Aに到達する。 Next, as shown in FIG. 4, the movement control section 48 includes the respective transport end sections 29, 30 b having the suction pads 29 b, 30 b adsorbed on the back surface of the glass substrate 3. (Arms 29a and 30a) are synchronized at the same speed, and are moved in the transport direction C on the respective sliders 23 and 24. As a result, the glass substrate 3 floats and is completely in non-contact with the upper surface of the substrate mounting table 1 and the upper surface of the floating block 11, and is pulled by the transport ends 29 and 30. It is transported at high speed in the transport direction C. By this high-speed transfer, the glass substrate 3 reaches the alignment portion A on the floating block 11.
ァ ライ メ ン ト部 Aに到達した と きガラス基板 3 は、 図 5 に 示すよ う に搬送方向 C に対して傾いている場合がある。 ァラ ィメ ン ト部 Aにおいて位置決めセンサ 4 3 は、 ァライ メ ン ト 部 Aで浮上停止 しているガラス基板 3 の搬送方向 Cの前方側 の一辺のエッジを検出 してその検出信号を出力する。  When reaching the alignment part A, the glass substrate 3 may be inclined with respect to the transport direction C as shown in FIG. In the alignment section A, the positioning sensor 43 detects an edge of one side of the glass substrate 3 that has stopped rising and rising in the alignment section A in the transport direction C and outputs the detection signal. I do.
又、 各位置決めセ ンサ 4 4 、 4 5 は、 ァライ メ ン ト部 Aで 浮上停止 しているガラス基板 3 の搬送方向 C と 同一方向の他 辺のエッジを検出 してその検出信号を出力する。  Further, each of the positioning sensors 44 and 45 detects an edge of the other side in the same direction as the transport direction C of the glass substrate 3 that has stopped floating at the alignment portion A and outputs a detection signal. .
姿勢認識部 4 9 は、 3 つの位置決めセ ンサ 4 3 〜 4 5 から それぞれ出力された各検出信号を入力 し、 これら検出信号に よ-り 示 .さ-れるガ.ラス基板 3 の 3 箇所のェ.ッジ.位置情報に基づ いてガラス基板 3 の姿勢を認識する。 この場合、 ガラス基板 3 は、 搬送方向 Cに対して先端側の右端部が左端部よ り も前 側に出て搬送方向 Cに対して左側に傾いている。  The posture recognition section 49 receives the detection signals output from the three positioning sensors 43 to 45, respectively, and outputs the detection signals from the three positions of the glass substrate 3 which are indicated by the detection signals. The attitude of the glass substrate 3 is recognized based on the edge position information. In this case, the right end of the glass substrate 3 on the tip side with respect to the transport direction C projects forward from the left end, and is inclined leftward with respect to the transport direction C.
次に、 姿勢制御部 5 0 は、 姿勢認識部 4 9 によ るガラス基 板 3 の姿勢の認識結果から、 先ず、 図 5 に示すよ う に一方の 搬送端部 3 0 を搬送方向 C に対して逆方向 （後側） に微動さ せる。 これによ り 、 カ ラス基板 3 は、 吸着ノ、。 ッ ド 2 9 a を中 心軸に して矢印 F方向に回転して、 搬送方向 Cに対して平行 に配置される。 再ぴ、 姿勢認識部 4 9 は、 3 つの位置決めセンサ 4 3 〜 4 5 からそれぞれ出力 された各検出信号を入力 してガラス基板 3 の姿勢を認識する。 この認識の結果、 ガラス基板 3 は、 図 6 に示すよ う に左端部がス ライ ダ 2 3側に寄っている。 Next, based on the recognition result of the posture of the glass substrate 3 by the posture recognizing unit 49, the posture control unit 50 first moves one of the conveying ends 30 in the conveying direction C as shown in FIG. Move slightly in the opposite direction (rear side). Thus, the glass substrate 3 is adsorbed. It is rotated in the direction of arrow F with the rod 29 a as the center axis, and is arranged parallel to the transport direction C. The posture recognition unit 49 recognizes the posture of the glass substrate 3 by inputting the respective detection signals output from the three positioning sensors 43 to 45, respectively. As a result of this recognition, the left end of the glass substrate 3 is closer to the slider 23 as shown in FIG.
姿勢制御部 5 0 は、 図 6 に示すよ う に一方の搬送端部 2 9 のプラ ンジャを駆動 してアーム 2 9 a を矢印 H方向 （搬送方 向 C に対して垂直方向） に伸ばすと共に、 これと 同期 して他 方の搬送端部 3 0 のプラ ンジャを駆動 してアーム 3 0 a を矢 印 H方向に縮め、 ガラス基板 3 を矢印 H方向に移動してガラ ス基板 3 の中心位置を搬送路の中心位置を合せる。  As shown in FIG. 6, the attitude control unit 50 drives the plunger at one of the transport ends 29 to extend the arm 29a in the direction of arrow H (in the direction perpendicular to the transport direction C). In synchronization with this, the plunger of the other transfer end 30 is driven to shrink the arm 30a in the direction of the arrow H, and the glass substrate 3 is moved in the direction of the arrow H to move the center of the glass substrate 3 to the center. Adjust the position to the center position of the transport path.
この後、 姿勢制御部 5 0 は、 位置決めセ ンサ 4 3 の中心に ガラ ス基板 3 の先端部が合致する よ う に各搬送端部 2 9 、 3 0 を同期させて前側に移動させる。 この場合、 各搬送端部 2 9 、 3 0 は、 例えば図 7 に示すよ う に矢印 N方向に微動する この結果、 ガラス基板 3 は、 図 7 に示すよ う に基準位置、 すなわち搬送方向 Cに対して平行で、 かつガラス基板 3 の-中 心が搬送路の中心位置に略一致する よ う にァライ メ ン ト され る。 なお、 基準位置は、 3 つの位置決めセンサ 4 3 〜 4 5 に おいてそれぞれガラ ス基板 3 の各エッジ位置がセンサ中心で 検出する と ころである。  Thereafter, the attitude control section 50 synchronizes the transport ends 29 and 30 so that the front ends of the glass substrates 3 are aligned with the center of the positioning sensor 43 and moves them forward. In this case, each of the transport ends 29 and 30 slightly moves in the direction of arrow N, for example, as shown in FIG. 7. As a result, the glass substrate 3 moves to the reference position, ie, And the center of the glass substrate 3 is aligned so as to substantially coincide with the center position of the transport path. The reference position is where each of the three positioning sensors 43 to 45 detects the edge position of the glass substrate 3 at the center of the sensor.
ガラ ス基板 3 のァ ライ メ ン トが終了する と、 移動制御部 4 8 は、 図 4 に示すよ う に各搬送端部 3 1 、 3 2 を搬送方向 C と は逆方向にそれぞれ同一速度で同期させて各ス ライ ダ 2 5 2 6 上に移動させる。  When the alignment of the glass substrate 3 is completed, the movement control unit 48 moves the transport ends 31 and 32 at the same speed in the direction opposite to the transport direction C as shown in FIG. And synchronize them to move them on the respective sliders 25 26.
これら搬送端部 3 1 、 3 2 は、 ガラス基板 3 の下方に到達 する と、 各スライ ダ 2 5 、 2 6 上の基板受渡し基準位置に停 止 し、 各アーム 3 1 a 、 3 2 a を上昇させて、 各吸着パッ ド 3 1 b 、 3 2 b をガラス基板 3 の裏面に吸着させる。 これら 吸着パッ ド 3 1 b 、 3 2 b の吸着位置は、 ガラス基板 3 にお ける搬送方向 Cに向って前方側と なる裏面の両端部である。 These transport ends 3 1 and 3 2 reach below the glass substrate 3 Then, it stops at the substrate transfer reference position on each slider 25, 26, raises each arm 31a, 32a, and moves each suction pad 31b, 32b to the glass substrate. Adsorb on the back of 3. The suction positions of the suction pads 31b and 32b are both ends of the rear surface which is on the front side in the transport direction C on the glass substrate 3.
これら吸着パッ ド 3 1 b 、 3 2 b が-ガラス基板 3 を吸着す る と、 各搬送端部 2 9 、 3 0 の各吸着ノ、。ッ ド 2 9 b 、 3 0 b の吸着が解除され、 各アーム 2 9 a 、 3 0 a が下降する。  When these suction pads 31b and 32b suck the glass substrate 3, the suction ends of the transfer ends 29 and 30 are removed. The suction of the heads 29b and 30b is released, and the arms 29a and 30a descend.
これによ り 、 ガラス基板 3 の吸着保持が各搬送端部 2 9 、 3 0 力ゝら各搬送端部 3 1 、 3 2 に受け渡される。 各搬送端部 2 9 、 3 0 は、 各ス ライ ダ 2 3 、 2 4上を搬送方向 C と は逆 方向 （後側） に移動 し、 搬入用の基板載置台 1 の基板受渡し 基準位置に停止 して待機する。 ガラス基板 3 の受け渡しが終 了する と 、 各搬送端部 3 1 、 3 2 は、 図 8 に示すよ う に同一 速度で同期 して各ス ライ ダ 2 5 、 2 6 上を搬送方向 Cに移動 する。 これによ り 、 - 浮上ブロ ック 1 1 上に浮上しているガ-ラ ス基板 3 は、 各搬送端部 3 1 、 3 2 によ り 引っ張られて搬送 方向 Cに高速で搬送され、 検査部 Eに到達する。  As a result, the suction holding of the glass substrate 3 is transferred to the respective transport ends 31 and 32 from the respective transport ends 29 and 30. The transport end portions 29 and 30 move on the respective sliders 23 and 24 in the direction opposite to the transport direction C (rear side), and move to the substrate transfer reference position of the loading substrate mounting table 1. Stop and wait. When the transfer of the glass substrate 3 is completed, the respective transport ends 31 1 and 32 are synchronized at the same speed as shown in FIG. 8 to move on the respective sliders 25 and 26 in the transport direction C. Moving. As a result, the glass substrate 3 floating on the floating block 11 is pulled by the respective transport ends 31 and 32 and transported at high speed in the transport direction C. The inspection unit E is reached.
検査部 E において圧搾空気供給部 4 6 は、 浮上ブロ ッ ク 1 1 の各空気孔 4 への圧搾エアーの供給を停止する。  In the inspection section E, the compressed air supply section 46 stops the supply of the compressed air to each of the air holes 4 of the floating block 11.
次に、 圧搾空気供給部 4 6 から真空吸着部 4 7 への切 り 替 えを行う 。 この真空吸着部 4 7 は、 配管を通 して浮上ブロ ッ ク 1 1 の各空気孔 1 2 を真空引き し、 浮上ブロ ック 1 1 上に ガラス基板 3 を吸着保持させる。 なお、 このと きガラス基板 3 の裏面を吸着保持 している各吸着パッ ド 3 1 b 、 3 2 b の 吸着が解除され、 各アーム 3 1 a、 3 2 a が下降する。 Next, switching from the compressed air supply unit 46 to the vacuum suction unit 47 is performed. The vacuum suction part 47 evacuates each air hole 12 of the floating block 11 through a pipe to suck and hold the glass substrate 3 on the floating block 11. At this time, the suction pads 3 1 b and 3 2 b holding the back surface of the glass substrate 3 by suction were used. Suction is released and each arm 31a and 32a descends.
検査部 Eでは、 例えばライ ンセ ンサを備えた検查用機器 1 4 を用いてガラス基板 3 の各種検査によ り 取得された画像デ ータ によ り ガラス基板 3 のパターン検査、 欠陥検査な どを行 う。 この場合、 検査用機器 1 4 を搭載 した門型アーム 1 5 を 搬送方向 Cに対して前後方向に移動させる こ と によ り 、 ガラ ス基板 3 の全面を検査用機器 1 4 で各種検査する。  In the inspection unit E, for example, a pattern inspection and a defect inspection of the glass substrate 3 are performed by using image data acquired by various inspections of the glass substrate 3 using an inspection device 14 having a sensor. What do you do? In this case, the entire surface of the glass substrate 3 is inspected by the inspection device 14 by moving the portal arm 15 on which the inspection device 14 is mounted in the front-rear direction with respect to the transport direction C. .
検査部 Eでの検査が終了する と 、 各搬送端部 3 1、 3 2 は 各アーム 3 1 a、 3 2 a を上昇させて、 各吸着パッ ド 3 1 b 3 2 b をガラ ス基板 3 における搬送方向 Cに向って前方側と なる裏面の両端部に吸着させる。  When the inspection in the inspection section E is completed, each transport end 31, 32 raises each arm 31a, 32a, and moves each suction pad 31b32b to the glass substrate 3. At the both ends of the back surface, which is the front side in the transport direction C in the above.
これと共に真空吸着部 4 7 は、 浮上プロ ック 1 1 の各空気 孔 1 2 に対する真空引き を停止する。 そして、 真空吸着部 4 7 から圧搾空気供給部 4 6 への切替えを行 う。 この圧搾空気 供給部 4 6 は、 浮上プロ ック 1 1 の各空気孔 1 2 に圧搾エア 一を供給 して、 これら空気孔 1 2 からイオン化された圧搾ェ ァーを吹き上が らせ、 ガラス基板 3 を浮上させる。  At the same time, the vacuum suction unit 47 stops the evacuation of the air holes 12 of the floating block 11. Then, switching from the vacuum suction section 47 to the compressed air supply section 46 is performed. The compressed air supply unit 46 supplies compressed air to each of the air holes 12 of the levitation block 11 to blow up ionized compressed air from these air holes 12. Float the glass substrate 3.
なお、 検查部 Eでの検査は、 浮上ブロ ック 1 1 上にガラス 基板 3 を浮上させた状態で、 各搬送端部 3 1、 3 2 を搬送方 向 C にそれぞれ一定の速度で同期させて各ス ライ ダ 2 3、 2 4上に移動させなが ら行っても よい。  In the inspection at the inspection unit E, the transport ends 3 1 and 3 2 were synchronized with the transport direction C at a constant speed, with the glass substrate 3 floating above the floating block 11. Then, it may be performed while moving on each of the sliders 23 and 24.
こ の後、 上記同様に、 浮上ブロ ック 1 1 上のガラス基板 3 が圧搾エアーの吹き上げ圧力によ り完全に浮上した状態で、 各搬送端部 3 1、 3 2 は、 各スライダ 2 5、 2 6 上を移動 し てガラス基板 3 を搬送方向 Cに高速搬送する。 ガラス基板 3 が浮上プロ ック 1 1 の出 口側に到達する と、 ガラス基板 3 の吸着保持が各搬送端部 3 1 、 3 2 から各搬送 端部 3 3 、 3 4 に受け渡される と共に、 圧搾空気供給部 4 6 は基板載置台 1 6 の各空気孔 8 に圧搾エアーを供給する。 。 これら搬送端部 3 1 、 3 2 力ゝら各搬送端部 3 3 、 3 4へのガ ラス基板 3 の受け渡しは、 上記各搬送端部 2 9 、 3 0 から各 搬送端部 3 1 、 3 2への受け渡 しと 同様に行なわれる。 Thereafter, in the same manner as described above, with the glass substrate 3 on the floating block 11 completely lifted by the blowing pressure of the compressed air, each of the transport ends 3 1, 3 2 is moved to the respective slider 25. The glass substrate 3 is moved at high speed in the transfer direction C by moving on the substrate 26. When the glass substrate 3 reaches the exit side of the floating block 11, the suction holding of the glass substrate 3 is transferred from each of the transfer ends 31 and 32 to each of the transfer ends 33 and 34. The compressed air supply unit 46 supplies compressed air to each air hole 8 of the substrate mounting table 16. . The transfer of the glass substrate 3 to the transfer ends 3 3, 3 4 from the transfer ends 3 1, 3 2 is performed from the transfer ends 29, 30 to the transfer ends 31, 3. It is performed in the same way as the transfer to 2.
ガラス基板 3 の受け渡しが終了する と、 各搬送端部 3 3 、 3 4 は、 各スライ ダ 2 7 、 2 8 上を移動 してガラス基板 3 を 搬送方向 C に搬送する。 そ して、 ガラス基板 3 が搬出用の基 板載置台 1 6 の上方に到達する と、 各搬送端部 3 3 、 3 4 は. 基板受渡し基準位置に停止する。  When the transfer of the glass substrate 3 is completed, the respective transport ends 33, 34 move on the respective sliders 27, 28 to transport the glass substrate 3 in the transport direction C. Then, when the glass substrate 3 reaches above the substrate mounting table 16 for unloading, each of the transport ends 33, 34 stops at the substrate transfer reference position.
基板載置台 1 6 において各リ フ ト ピン 2 0 は上昇する。 圧 搾空気供給部 4 6 は、 基板載置台 1 6 の各空気孔 1 8 への圧 搾エアーの供給を停止 し、 これと共に各吸着パッ ド 3 3 b 、 3 4 は、 ガラス基板 3 の裏面に対する吸着を解除し、 各ァ ーム 3 3 a 、 3 4 a を下降させる。 これによ り 、 ガラス基板 3 は、 各リ フ ト ピン 2 0上に載置される。 搬出用搬送ロ ボッ ト 2 1 は、 ノ、ン ドアーム 2 2 を回転、 前進及び後退させて、 各リ フ ト ビン 2 0上から検査済みのガラス基板 3 を取り 出 し てカセッ ト 内に収納する。  Each lift pin 20 rises on the substrate mounting table 16. The compressed air supply section 46 stops the supply of compressed air to the air holes 18 of the substrate mounting table 16 and, at the same time, the suction pads 33 b and 34 are attached to the back of the glass substrate 3. Release the adsorption to, and lower each arm 33a and 34a. Thus, the glass substrate 3 is placed on each of the lift pins 20. The unloading transfer robot 21 rotates, advances, and retracts the handle arm 22 to take out the inspected glass substrate 3 from each lift bin 20 and stores it in the cassette. I do.
これ以降、 複数のガラス基板 3 の基板載置台 1 への搬入、 エアー搬送、 ァライ メ ン ト 、 検査、 基板載置台 1 6 か ら の搬 出が順次繰り 返される。  Thereafter, the loading of the plurality of glass substrates 3 into the substrate mounting table 1, air conveyance, alignment, inspection, and unloading from the substrate mounting table 16 are sequentially repeated.
こ のよ う に上記第 1 の実施の形態においては、 各基板載置 台 1 、 1 6 及び浮上ブロ ッ ク 1 1 に形成された複数の空気孔 4、 1 8 、 1 2 からエアーを吹上げてガラス基板 3 を浮上さ せた状態で、 ガラス基板 3 の搬送.方向 Cの先端部両端を吸着 保持して引 っ張り なが ら搬送する。 これによ り 、 大型のガラ ス基板 3 を浮上させた状態でガラス基板 3 に傷を付ける こ と 無く 、 高速で搬送でき る。 As described above, in the first embodiment, each substrate mounting The glass substrate 3 is conveyed while air is blown up from the air holes 4, 18, and 12 formed in the tables 1, 16 and the floating block 11 to float the glass substrate 3. It transports while holding both ends of the tip in the direction C by suction. Thus, the large glass substrate 3 can be conveyed at a high speed without damaging the glass substrate 3 in a floating state.
複数の空気孔 4、 1 8 、 1 2 は、 各基板載置台 1 、 1 6及 び浮上ブロ ック 1 1 のエアー搬送面に規則的に設け、 かつ各 溝 5 、 1 3 、 1 9 を設けたので、 複数の空気孔 4、 1 8 、 1 2力、ら吹上げられたエアーは、 各溝 5 、 1 3 、 1 9 内を流れ るので、 ガラス基板 3 と各基板载置台 1 、 1 6及び浮上プロ ック 1 1 と の間にエアーが溜ま る こ と が無く 、 各溝 5、 1 3 1 9 を通 して流れる。 これによ り 、 大型のガラス基板 3 は、 中央部が盛 り 上がる等の撓むこ と なく 高い平面度を保って搬 送でき る。  A plurality of air holes 4, 18 and 12 are regularly provided on the air carrying surface of each of the substrate mounting tables 1 and 16 and the floating block 11 and the grooves 5, 13 and 19 are formed. Since the air blown by the plurality of air holes 4, 18 and 12 flows through each groove 5, 13 and 19, the glass substrate 3 and the substrate mounting table 1 and Air does not accumulate between 16 and the floating block 11 and flows through each groove 5, 13 19. Thus, the large-sized glass substrate 3 can be transported while maintaining a high flatness without bending such as rising at the center.
各溝 5 、 1 - 3 、 1 - 9 -は、 搬送方向 C と 同一方向に.形成され- ているので、 エアーの吹上げ圧力分布が搬送方向 Cに一様に なる。 これによ り 、 ガラス基板 3 は、 搬送時に上下方向に振 れずに、 安定した状態で搬送でき る。  Since the grooves 5, 1-3 and 1-9- are formed in the same direction as the transport direction C, the air blowing pressure distribution becomes uniform in the transport direction C. Thereby, the glass substrate 3 can be transported in a stable state without swinging in the vertical direction during transport.
ガラス基板 3 の搬送は、 ガラス基板 3 の搬送方向 Cに向つ て前側の裏面両端側をそれぞれ吸着保持して強制的に引っ張 り なが ら高速で搬送する。 これによ り 、 ガラス基板 3 は、 浮 上した状態で蛇行な ど搬送方向 Cに対して振れる こ となく 安 定して搬送でき る。 又、 ガラス基板 3 の裏面両端側を吸着保 持するので、 ガラス基板 3 に形成される回路パターンの部分 に接触する こ と な く 、 回路パターンに影響を与える こ と はな い。 The glass substrate 3 is conveyed at a high speed while forcibly pulling while sucking and holding both front and rear ends of the glass substrate 3 in the conveying direction C of the glass substrate 3. Thereby, the glass substrate 3 can be stably conveyed in a floating state without swinging in the conveying direction C such as meandering. In addition, since both sides of the back surface of the glass substrate 3 are held by suction, the portion of the circuit pattern formed on the glass substrate 3 It does not touch the circuit and does not affect the circuit pattern.
こ の よ う に大型のガラ ス基板 3 を非接触で高速搬送でき る ので、 F P D製造な どのよ う な半導体の製造分野において、 製品の品質を劣化させる こ と な く 製品生産性を向上させる と い う 要求を満たすこ と ができ る。  Since the large glass substrate 3 can be transferred at a high speed in a non-contact manner in this way, in a semiconductor manufacturing field such as FPD manufacturing, the product productivity is improved without deteriorating the product quality. Can be satisfied.
各空気孔 4 、 1 8 、 1 2 からイ オン化された圧搾エアーを 吹上げてガラ ス基板 3 を高速搬送する ので、 静電気が中和 さ れて、 ガラ ス基板 3 への帯電を阻止でき る。  Since the ionized compressed air is blown up from each of the air holes 4, 18 and 12 to transport the glass substrate 3 at high speed, static electricity is neutralized and the glass substrate 3 can be prevented from being charged. You.
ァ ライ メ ン ト部 Aでは、 ガラ ス基板 3 を浮上させた状態で 3 つの位置決めセンサ 4 3 〜 4 5 、 姿勢認識部 4 9 及び姿勢 制御部 5 0 によ り ァ ライ メ ン トするので、 ガラ ス基板 3 を浮 上させた非接触状態で、 大型のガラス基板 3 に傷等を付ける こ と な く 確実にァラ イ メ ン ト ができ る。  In the alignment section A, the alignment is performed by the three positioning sensors 43 to 45, the attitude recognition section 49 and the attitude control section 50 while the glass substrate 3 is floated. In a non-contact state in which the glass substrate 3 is floated, the alignment can be surely performed without damaging the large glass substrate 3.
又、 このァ ライ メ ン ト では、 ガラス基板 3 を搬送する各搬 送端部 2 9 .、 .3 0.を 2 次元方向に微動させる こ と で、 これら 搬送端部 2 9 、 3 0 をガラ ス基板 3 の搬送機能に他に、 ァラ ィ メ ン ト と して兼用でき、 ガラ ス基板 3 の搬送に続いてァ ラ ィ メ ン ト を連続的に行 う こ と ができ、 ァライ メ ン ト に要する 時間を短く でき る。  In this alignment, each of the transport ends 29, 30 for transporting the glass substrate 3 is slightly moved in the two-dimensional direction so that the transport ends 29, 30 are moved. In addition to the glass substrate 3 transfer function, it can also be used as an argument, and the transfer of the glass substrate 3 can be followed by successive alignments. The time required for ment can be shortened.
ァ ライ メ ン ト では、 3 つの位置決めセンサ 4 3 〜 4 5 によ り ガラス基板 3 の姿勢を認識する ので、 ガラ ス基板 3 の姿勢 を精度高 く 検出でき る。  In the alignment, the position of the glass substrate 3 is recognized by the three positioning sensors 43 to 45, so that the position of the glass substrate 3 can be detected with high accuracy.
さ ら に、 3 つの位置決めセ ンサ 4 3 〜 4 5 は、 浮上ブロ ッ ク 1 1 に埋め込まれている ので、 各位置決めセ ンサ 4 3 〜 4 5 の基準位置がずれる こ と無く 、 3 点のエッジ位置情報に基 づいて各ガラス基板 3 を常に精度高く ァライ メ ン トでき る。 Furthermore, since the three positioning sensors 43 to 45 are embedded in the levitation block 11, each positioning sensor 43 to 45 The reference position of No. 5 does not shift, and the glass substrates 3 can always be aligned with high accuracy based on the edge position information of the three points.
なお、 上記第 1 の実施の形態は、 例えば検査部 Eが複数設 けられていた り 、 各種処理工程が設け られた工程に適用 して も よい。  Note that the first embodiment may be applied to, for example, a process in which a plurality of inspection units E are provided or in which various processing processes are provided.
次に、 本発明の第 2 の実施の形態について説明する。 なお 図 1 と同一部分には同一符号を付してその詳しい説明は省略 する。  Next, a second embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.
図 9 は基板搬送装置の構成図である。 こ の基板搬送装置は 搬入用及ぴ搬出用の各搬送ロポッ ト 7、 2 1 の各ハン ドア一 ム 8、 2 2 の前進及び後退の方向を搬送方向 C と 同一方向に なる よ う に各搬送ロ ボッ ト 7、 2 1 を設け、 かつ搬送架台 9 上にガラス基板 3 を吸着保持するホルダ 6 0 を搬送方向 Cに 移動可能に している。  FIG. 9 is a configuration diagram of the substrate transfer device. In this board transfer device, the forward and backward directions of the hand arms 8, 22 of the transfer robots 7, 21 for loading and unloading are set so that the forward and backward directions are the same as the transfer direction C. The transfer robots 7 and 21 are provided, and the holder 60 that holds the glass substrate 3 by suction on the transfer stand 9 can be moved in the transfer direction C.
又、 搬入用及び搬出用の各基板載置台 1 及ぴ 1 6 に備えら れていた各 リ フ ト ピン 6..、 2 0 は除かれている ό これによ り 各搬送ロボッ ト 7、 2 1 は、 各ノヽ ン ドアーム 8 2 2 を各基 板載置台 1 及び 1 6 の各溝 5、 1 9 内に入れる と によ り ガ ラス基板 3 を直接基板載置台 1 上に載置した り ガラス基板 3 を基板載置台 1 6 から直接取り 出す。 In addition, the lift pins 6 .., 20 provided on each of the substrate mounting tables 1 and 16 for loading and unloading have been removed. Accordingly, each of the transfer robots 7 and 16 has been removed. The glass substrate 3 was directly mounted on the substrate mounting table 21 by inserting the respective node arms 82 into the grooves 5 and 19 of the substrate mounting tables 1 and 16. Remove the glass substrate 3 directly from the substrate mounting table 16.
搬送架台 9上には、 2本のレール 6 1 が搬送方向 C に対し て互いに平行に敷設されている。 これら レール 6 1 上に移動 用浮上ブロ ック （以下、 ホルダと称する） 6 0 が移動可能に 設け られている。  On the transfer stand 9, two rails 61 are laid in parallel with each other in the transfer direction C. On these rails 61, a moving floating block (hereinafter, referred to as a holder) 60 is movably provided.
ホルダ 6 0 の表面には、 エアーの吹き上げと吸引 と を兼用 する複数の空気孔 6 2 が全面に設け られている。 このホルダ 6 ◦ は、 基板载置台 1 と 同様に、 幅がガラス基板 3 の幅よ り も僅かに短く 形成され、 かつホルダ表面の高さが基板載置台 1 の表面の高さ と ほぼ同一に形成されている。 The surface of the holder 60 is used for both air blowing and suction A plurality of air holes 62 are provided on the entire surface. This holder 6 ◦ has a width slightly smaller than the width of the glass substrate 3, and the height of the holder surface is almost the same as the surface height of the substrate mounting table 1, similarly to the substrate mounting table 1. Is formed.
搬送架台 9 上には、 ホルダ 6 0 を挟んで一対のス ライ ダ 6 3 、 6 4 が搬送方向 C に沿って互いに平行に設け られている これらス ライ ダ 6 3 、 6 4 は、 搬入側の基板載置台 1 と搬出 側の搬送ロボッ ト 2 1 と の間に設け られている。 これらスラ イ ダ 6 3 、 6 4 には、 それぞれ一対と なるァライ メ ン ト側の 各搬送端部 2 9 、 3 0 と、 検査側の各搬送端部 3 1 、 3 2 と が移動可能に設けられている。  A pair of sliders 6 3 and 6 4 are provided on the transfer stand 9 in parallel with each other along the transfer direction C with the holder 60 interposed therebetween. These sliders 6 3 and 6 4 are connected to the loading side. It is provided between the substrate mounting table 1 and the transfer robot 21 on the unloading side. The sliders 6 3 and 6 4 are capable of moving a pair of transport ends 29 and 30 on the alignment side and a transport end 31 and 32 on the inspection side, respectively. Is provided.
ァライ メ ン ト側の各搬送端部 2 9 、 3 0 は、 各スライ ダ 6 3 、 6 4 上における搬入側の搬送ロ ボッ ト 7側の左側端部と ァライ メ ン ト部 Aの右側端部 A a と の間を往復移動する。 検 査側の各搬送端部 3 1 、 3 2 は、 各スライ ダ 6 3 、 6 4 上に おけるァライ メ ン ト部- Aの右側端部 A a .と搬出用の基板载置 台 1 6側の右側端部と の間を往復移動する。 ァライ メ ン ト側 の各搬送端部 2 9 、 3 0 から検査側の各搬送端部 3 1 、 3 2 へのガラス基板 3 の受渡しは、 上記第 1 の実施の形態と 同様 に行なわれる。  The transfer ends 29 and 30 on the alignment side are the left end on the transfer robot 7 side on the loading side and the right end of the alignment section A on each of the sliders 63 and 64. Reciprocate between section A a and. The transport ends 31 and 32 on the inspection side are located on the right end A a. Of the alignment section -A on the sliders 63 and 64 and the board mounting table 16 for unloading. Reciprocate between and the right end of the side. The delivery of the glass substrate 3 from each of the transfer ends 29 and 30 on the alignment side to each of the transfer ends 31 and 32 on the inspection side is performed in the same manner as in the first embodiment.
次に、 上記の如く 構成された装置の動作について説明する 搬送ロ ポッ ト 7 によ り カ ラ ッ トから搬入されたガラス基板 3 は、 基板載置台 1 上に浮上して搬送方向 Cへの移動に同期 して各搬送端部 2 9 、 3 0 によ り 引っ張られて、 ァライ メ ン ト部 Aに待機してレ、る ホルダ 6 0 の上方に搬送される。 なお 各搬送端部 2 9 、 3 0 の吸着位置は、 ガラス基板 3 における 搬送方向 Cに向って前方側と なる裏面の両端部である。 Next, the operation of the apparatus configured as described above will be described. The glass substrate 3 carried in from the carat by the transfer robot 7 floats on the substrate mounting table 1 and moves in the transfer direction C. In synchronization with the movement, each of the transfer ends 29, 30 is pulled by the transfer ends 29, waits at the alignment unit A, and is transferred above the holder 60. Note that The suction positions of the transfer ends 29 and 30 are both ends of the rear surface of the glass substrate 3 which is on the front side in the transfer direction C.
了ライ メ ン ト部 Aにおいてガラス基板 3 は、 上記第 1 の実 施の形態と 同様にホルダ 6 0上で各搬送端部 2 9 、 3 0 の微 動に よ り ァライ メ ン ト される。 ガラス基板 3 のァライ メ ン ト が終了する と 、 圧搾空気供給部 4 6 から真空吸着部 4 7 に切 替え られ、 ガラス基板 3 はホルダ 6 0上に吸着保持される。  In the alignment section A, the glass substrate 3 is aligned on the holder 60 by the fine movement of the transfer ends 29 and 30 in the same manner as in the first embodiment. . When the alignment of the glass substrate 3 is completed, the compressed air supply unit 46 is switched to the vacuum suction unit 47, and the glass substrate 3 is suction-held on the holder 60.
こ のと き各搬送端部 2 9 、 3 0 は、 ガラ ス基板 3 に対する 吸着保持を解除し、 各スライ ダ 6 3 、 6 4 上における搬入側 搬送ロボッ ト 7側の左側端部 （基板受渡し基準位置） に戻る , 次に、 ホルダ 6 0 は、 ガラス基板 3 を吸着保持した状態で 搬送方向 Cに移動する。 ホルダ 1 1 が検査部 Eに到達する と 上記同様に検査部 E においてガラス基板 3 の各種検査が行わ れる。  At this time, the transfer end portions 29 and 30 release the suction holding to the glass substrate 3, and the left end portion of the transfer side transfer robot 7 side on each of the sliders 63 and 64 (substrate delivery). Returning to the reference position), the holder 60 moves in the transport direction C while holding the glass substrate 3 by suction. When the holder 11 reaches the inspection section E, various inspections of the glass substrate 3 are performed in the inspection section E in the same manner as described above.
ガラス基板 3 に対する検査が終了する と、 基板受渡し基準 位置に待機して.いる各搬送端部 3 1 、 3 2 の各アーム— 3 1 a 3 2 a を上昇させ、 各吸着パッ ド 3 1 b 、 3 2 b によ り ガラ ス基板 3 の裏面を吸着保持する。 これら搬送端部 3 1 、 3 2 の吸着位置は、 ガラス基板 3 における搬送方向 Cに向って前 側の裏面の両端部である。 この後、 圧搾空気供給部 4 6 から 基板载置台 1 6 に圧搾エアーを供給し、 ガラ ス基板 3 をホル ダ 6 0上から浮上させる。 この状態で、 カ ラス基板 3 は、 各 搬送端部 3 1 、 3 2 によ り 引 っ張られて、 基板載置台 1 6上 に高速で搬送される。  When the inspection of the glass substrate 3 is completed, the arms of the transport ends 3 1 and 3 2 waiting at the substrate transfer reference position—3 1 a 3 2 a are raised, and the suction pads 3 1 b The rear surface of the glass substrate 3 is sucked and held by 3b. The suction positions of the transfer ends 31 and 32 are both ends of the rear surface of the glass substrate 3 on the front side in the transfer direction C. Thereafter, compressed air is supplied from the compressed air supply unit 46 to the substrate mounting table 16 to float the glass substrate 3 from above the holder 60. In this state, the glass substrate 3 is pulled by the transfer ends 31 and 32 and transferred at high speed onto the substrate mounting table 16.
搬出用搬送ロボッ ト 2 1 は、 溝 1 9 に挿入し、 若干上昇さ せてガラ ス基板 3 の裏面を吸着保持する。 こ の と き、 ガラ ス 基板 3 の裏面から各搬送端部 3 1 、 3 2 の吸着パッ ド 3 1 b 3 2 b の吸着を解除する。 搬出用搬送ロボッ ト 2 1 は、 ハン ドアーム 2 2 を上昇させる と共に、 ハン ドアーム 2 2·を回転 前進及び後退させて、 基板載置台 1 6 上から検查済みのガラ ス基板 3 を取り 出 してカセ ッ ト 內に収納する。 The unloading transfer robot 21 is inserted into the groove 19 and slightly raised. To hold the back surface of the glass substrate 3 by suction. At this time, the suction of the suction pads 3 1 b 3 2 b of the respective transport ends 31 and 32 from the back surface of the glass substrate 3 is released. The unloading transfer robot 21 raises the hand arm 22 and rotates the hand arm 22 forward and backward to remove the glass substrate 3 that has been inspected from the substrate mounting table 16. And store it in cassette て.
このよ う に上記第 2 の実施の形態によれば、 上記第 1 の実 施の形態と 同様の効果を奏する こ とができ る。 又、 搬入用及 び搬出用の各基板載置台 1 及び 1 6 に備えられていた各 リ フ ト ピン 6 、 2 0 を無く したので、 各リ フ ト ピン 6 、 2 0 の動 作時間分だけ、 時間を短縮でき る。  As described above, according to the second embodiment, the same effects as those of the first embodiment can be obtained. In addition, since the lift pins 6 and 20 provided on the substrate mounting tables 1 and 16 for loading and unloading were eliminated, the operation time of each of the lift pins 6 and 20 was reduced. Can save time.
なお、 本発明は、 上記各実施の形態に限定される も のでな く 、 実施段階ではその要旨を逸脱しない範囲で種々 に変形す る こ とが可能である。  The present invention is not limited to the above embodiments, and can be variously modified in the implementation stage without departing from the scope of the invention.
ガラス基板 3 を浮上させる方式は、 エアーをガラス基板 3 の裏面に吹き付ける.に限らず、 静電方式によ り 浮上させても よい。 静電方式によ り 浮上させた場合には、 ガラ ス基板 3 に 対する除電を行 う と よい。  The method of floating the glass substrate 3 is not limited to blowing air on the back surface of the glass substrate 3, but may be floating by an electrostatic method. When the glass substrate 3 is levitated by the electrostatic method, it is preferable that the glass substrate 3 be neutralized.
浮上しているガラス基板 3 を搬送させる方式は、 例えば一 対のス ライ ダ 2 3 、 2 4 に一対の各搬送端部 2 9 、 3 0 を移 動させるのに限らず、 各溝 1 3 内に各吸着パッ ドを有する各 搬送端部を移動可能に設け、 これら搬送端部によ り ガラス基 板 3 の先端部の裏面を吸着保持して搬送しても よい。  The method of transporting the floating glass substrate 3 is not limited to, for example, moving the pair of transport ends 29, 30 to a pair of sliders 23, 24, but also moving each groove 13 Each transfer end having each suction pad may be movably provided therein, and the transfer end may transfer the suction while holding the back surface of the front end of the glass substrate 3.
ガラ ス基板 3 を搬送させる と き の吸着保持位置は、 搬送方 向 C におけるガラス基板 3 の先端部両端に限らず、 ガラス基 板 3 の先端部両端及び後端部両端で吸着保持した り 、 ガラス 基板 3 の対向する 2辺の各中央部又は 2辺に沿って複数箇所 で吸着保持しても よい。 これらガラス基板 3 の 4 隅、 対向す る 2辺の中央部、 又は 2辺に沿って複数箇所でガラス基板 3 を吸着保持すれば、 搬送方向 Cへの搬送だけでな く 、 搬送方 向 C とは逆方向への搬送も可能になる。 又、 ガラ ス基板 3 の 吸着保持位置は、 回路パターンの形成されていない部分であ れば、 ガラス基板 3 の表面又は表裏面であっても よい。 The suction holding position when the glass substrate 3 is transported is not limited to both ends of the glass substrate 3 in the transport direction C, but may be a glass substrate. The glass substrate 3 may be sucked and held at both ends of the front end and the rear end, or may be sucked and held at a plurality of locations along the center of each of two opposing sides of the glass substrate 3 or along the two sides. If the glass substrate 3 is sucked and held at the four corners of the glass substrate 3, the center of the two opposing sides, or at a plurality of locations along the two sides, not only the conveyance in the conveyance direction C but also the conveyance direction C The transport in the opposite direction is also possible. Further, the suction holding position of the glass substrate 3 may be the front surface or the front and back surfaces of the glass substrate 3 as long as it is a portion where a circuit pattern is not formed.
基板載置台 1 へのガ ラ ス基板 3 の載置又は基板載置台 1 6 からのガラス基板 3 の取り 出 しは、 各搬送ロボッ ト 7、 2 1 の他に如何なる機構を用いても よい し、 他のライ ンからエア 一搬送等の基板浮上搬送手段であっても よい。  For mounting the glass substrate 3 on the substrate mounting table 1 or removing the glass substrate 3 from the substrate mounting table 16, any mechanism other than the transfer robots 7 and 21 may be used. Alternatively, substrate floating transfer means such as air transfer from another line may be used.
上記実施の形態では、 大型の L C Dや P D Pな どのフ ラ ッ トパネル等の製造工程におけるィ ンライ ン検査でのガラス基 板 3 の搬送について説明 したが、 これに限らず、 半導体ゥェ ハな どの各種基板や板状の物体を浮上させて高速搬送するの にも適用でき る。 又、 ガラス基板 3 を浮上させて高速搬送す る方式は、 基板載置台 1 上からホルダ 6 0 上への搬送に限ら ず、 移動可能なホルダ 6 0 を複数台設けた場合の各ホルダ 6 0 間での搬送にも適用でき る。  In the above-described embodiment, the transfer of the glass substrate 3 in the in-line inspection in the manufacturing process of a flat panel such as a large LCD or a PDP has been described. However, the present invention is not limited to this. It can also be applied to levitating various substrates and plate-like objects and transporting them at high speed. The method of floating the glass substrate 3 and transporting it at high speed is not limited to the transport from the substrate mounting table 1 to the holder 60, but also to the case where a plurality of movable holders 60 are provided. It can also be applied to transport between different locations.
ァライ メ ン ト部 Aで用いる各位置決めセンサ 4 3〜 4 5 は ライ ンセンサを用いているが、 これに限らず、 2 次元 C C D カメ ラを用いてガラス基板 3 のエッジ位置を認識する よ う に しても よい。  Each of the positioning sensors 43 to 45 used in the alignment unit A uses a line sensor, but is not limited to this, and uses a two-dimensional CCD camera to recognize the edge position of the glass substrate 3. May be.
各基板載置台 1、 1 6及び浮上ブロ ック 1 1 には、 ガラス 基板 3 の中央部の撓みを無く して平面度を保っためにエアー の逃げ道と なる 2本の溝 5 、 1 3 、 1 9 をそれぞれ設けてい るが、 これ ら溝 5 、 1 3 、 1 9 は、 図 1 0 に示すよ う に搬送 方向 Cに対 して平行に複数設けても よい。 これら溝 5 、 1 3 1 9 には、 各空気孔 4、 1 2、 1 8 力、ら吹上げられたエアー の逃げ道になるので、 エアーを良好に排出でき る よ う に溝の 両端を大気に開放した り 、 又は溝内に裏面に貫通する丸ゃス リ ッ ト状のエアー逃げ孔を設けるのがよい。 Glass is used for each of the substrate mounting tables 1, 16 and the floating block 11. Two grooves 5, 13, and 19, which serve as air escape paths, are provided to eliminate flatness in the center of the substrate 3 and maintain flatness, but these grooves 5, 13, and 19 are provided. As shown in FIG. 10, a plurality may be provided in parallel with the transport direction C. These grooves 5, 13 19 are air escape holes for the air holes 4, 12, and 18, so that both ends of the grooves are air-tight so that air can be discharged well. It is better to open the hole or to provide a round-slit air escape hole penetrating the back surface in the groove.
又、 これ ら溝 5、 1 3 、 1 9 の形状は、 四辺形状や U字形 状、 V字形状、 円弧状の四形状であっても よい。 なお、 これ ら溝 5 、 1 3、 1 9 の幅は、 各基板載置台 1 、 1 6及び浮上 ブロ ック 1 1 と ガラス基板 3 と の間にエアー層を形成 してガ ラス基板 3 を浮上可能とする幅長がよい。  Further, the shape of these grooves 5, 13 and 19 may be quadrilateral, U-shaped, V-shaped, or arc-shaped. The width of each of the grooves 5, 13 and 19 is determined by forming an air layer between each of the substrate mounting tables 1 and 16 and the floating block 11 and the glass substrate 3 to form the glass substrate 3. The width length that allows for floating is good.
これら溝 5、 1 3 、 1 9 の幅は、 搬送方向 Cに対して同一 に形成し、 搬送方向 Cにおけるガラス基板 3 に加わるエアー 圧力部分を均一する のがよい。  The width of these grooves 5, 13 and 19 is preferably the same in the transport direction C, and the air pressure applied to the glass substrate 3 in the transport direction C is preferably uniform.
又、 ガラ ス基板 3 の両端部での下方への橈みを無く すため に、 各基板载置台 1 、 1 6及び浮上ブロ ック 1 1 の両端部に 多数のエアー吹き出 し孔を設け、 ガラス基板 3 の両端部にそ れぞれエアーを吹き付けても よい。  Also, in order to eliminate the downward radius at both ends of the glass substrate 3, a number of air blowing holes are provided at both ends of each substrate mounting table 1, 16 and the floating block 11. Air may be blown to both ends of the glass substrate 3 respectively.
上記第 2 の実施の形態では、 各スライ ダ 6 3 、 6 4 を搬出 用の搬送口 ポッ ト 2 1 側まで延ばしているが、 搬入用の搬送 口ポッ ト 7側まで延ばしても よい。  In the above-described second embodiment, the respective sliders 63 and 64 are extended to the carry-out transfer port 21 side, but may be extended to the carry-in transfer port port 7 side.
産業上の利用可能性 Industrial applicability
本発明は、 大型の L C Dや P D Pな どの F P D等の製造ェ 程におけるィ ンライ ン検査でのガラ ス基板の搬送、 各種基板 や板状の物体を浮上させて高速搬送な どに用い られる。 The present invention is applicable to manufacturing of large-sized LCDs and FPDs such as PDPs. It is used for the transfer of glass substrates in in-line inspection in the process, and the high-speed transfer of various substrates and plate-like objects by floating.

Claims

請 求 の 範 囲 The scope of the claims
1 . 搬送路上に沿って設け られ、 基板を前記搬送路上に浮上 させる基板浮上機構と 、  1. a substrate floating mechanism provided along the transport path to float the substrate on the transport path;
前記基板浮上機構によ り 浮上している前記基板の両端部を 保持して前記搬送路に沿って搬送する搬送機構と、  A transport mechanism that holds both ends of the substrate floating by the substrate floating mechanism and transports the substrate along the transport path;
を具備したこ と を特徴とする基板搬送装置。 A substrate transfer device, comprising:
2 . 前記基板浮上機構は、 少な く と もエアーを吹上げて前記 基板を浮上させる こ と を特徴とする請求項 1 記載の基板搬送  2. The substrate transport according to claim 1, wherein the substrate floating mechanism lifts the substrate by blowing at least air.
3 . 前記基板浮上機構は、 エアーの吹上げとエアーの吸引 と によ り 前記基板を浮上させる こ と を特徴とする請求項 1 記載 の基板搬送装置。 3. The substrate transfer device according to claim 1, wherein the substrate floating mechanism lifts the substrate by blowing air and sucking air.
4 . 前記基板浮上機構は、 浮上ブロ ック と、  4. The substrate floating mechanism includes a floating block,
前記浮上プロ ック に形成された少な く と もエアーを吹上げ を行 う複数の孔と、  A plurality of holes formed in the levitation block for blowing up at least air;
前記浮上プロ ック に前記基板の搬送方向に沿って形成され た前記エアーの逃げ溝と、  An air escape groove formed in the floating block along the substrate transfer direction;
を有する こ と を特徴とする請求項 1記載の基板搬送装置。2. The substrate transfer device according to claim 1, comprising:
5 . 前記搬送機構は、 前記搬送路の両側に沿って配置された 各ス ライ ダと、 5. The transport mechanism comprises: a slider disposed along each side of the transport path;
これらス ライ ダ上にそれぞれ移動可能に設け られ、 前記基 板の搬送方向の前方側と なる前記基板の両端側をそれぞれ保 持する各搬送端部と、  Transport ends respectively provided movably on these sliders and respectively holding both ends of the substrate in front of the substrate in the transport direction;
を有する こ と を特徴とする請求項 1記載の基板搬送装置。2. The substrate transfer device according to claim 1, comprising:
6 . 前記各搬送端部は、 前記基板の裏面の両端部をそれぞれ 吸着保持する吸着パッ ドを有する こ と を特徴とする請求項 5 記載の基板搬送装置。 6. Each of the transport ends corresponds to both ends of the back surface of the substrate. 6. The substrate transfer device according to claim 5, comprising a suction pad for holding by suction.
7 . 前記基板浮上機構は、 前記搬送路の全長に設けられた浮 上プロ ック と、  7. The substrate floating mechanism includes a floating block provided on the entire length of the transport path;
前記浮上プロ ック に形成された少な く と もエアーを吹上げ を行 う複数の孔と、  A plurality of holes formed in the levitation block for blowing up at least air;
前記浮上プロ ック に前記基板の搬送方向に沿つて形成され た前記エアーの逃げ溝と、  An air escape groove formed in the floating block along the substrate transfer direction;
前記搬送路全長の両側に沿って配置された複数のス ライ ダ と、  A plurality of sliders arranged along both sides of the entire length of the transport path;
これらス ライ ダ上にそれぞれ移動可能に設けられ、 前記基 板の搬送方向の前方側と なる前記基板裏面の両端側をそれぞ れ吸着保持する各吸着パッ ドと、  Suction pads respectively movably provided on these sliders and suction-holding both end sides of the back surface of the substrate, which are forward in the transport direction of the substrate, respectively;
を有する こ と を特徴とする請求項 1 記載の基板搬送装置。 2. The substrate transfer device according to claim 1, comprising:
8 . 前記基板浮上機構は、 前記搬送路の全長に設けられた搬 …送架台と、. 8. The substrate levitation mechanism includes a transfer rack provided along the entire length of the transfer path.
前記搬送架台上に移動可能に設け られたホルダと、 前記ホルダに形成された少な く と もエアーを吹上げを行う 複数の孔と 、  A holder movably provided on the transfer gantry, and a plurality of holes formed in the holder for blowing up at least air.
前記ホルダに前記基板の搬送方向に沿って形成された前記 エアーの逃げ溝と、  An air escape groove formed in the holder along a transport direction of the substrate;
前記搬送路全長の両側に沿って配置された複数のス ライ ダ と、  A plurality of sliders arranged along both sides of the entire length of the transport path;
これらス ライ ダ上にそれぞれ移動可能に設けられ、 前記基 板の搬送方向の前方側と なる前記基板裏面の両端側をそれぞ れ吸着保持する各吸着パッ ドと、 Both ends of the back surface of the substrate, which are provided movably on these sliders, respectively, are located on the front side in the transport direction of the substrate. Suction pads to hold
を有する こ と を特徴とする請求項 1記載の基板搬送装置。2. The substrate transfer device according to claim 1, comprising:
9 . 前記搬送機構は、 浮上している前記基板の両端部をそれ ぞれ保持し、 これら保持している少な く と も一方を前記搬送 方向に微動 して前記基板を回転させて前記基板を基準位置に ァライ メ ン トするァライ メ ン ト部、 9. The transfer mechanism holds both ends of the floating substrate, and finely moves at least one of the held substrates in the transfer direction to rotate the substrate, thereby transferring the substrate. Alignment to align to the reference position,
を有する こ と を特徴とする請求項 1記載の基板搬送装置。2. The substrate transfer device according to claim 1, comprising:
1 0 . 前記搬送機構は、 浮上している前記基板の両端部をそ れぞれ保持し、 これら保持している少な く と も一方を前記搬 送方向に微動して前記基板を回転させ、 10. The transfer mechanism holds both ends of the floating substrate, and rotates the substrate by finely moving at least one of the held substrates in the transfer direction.
前記基板の回転の結果、 前記基板が前記基板位置にァライ メ ン ト されていなければ、 前記基板を前記搬送方向に対して 垂直方向に微動させて前記基板を基準位置にァライ メ ン トす る ァ ライ メ ン ト部、  If the substrate is not aligned at the substrate position as a result of the rotation of the substrate, the substrate is finely moved in a direction perpendicular to the transport direction to align the substrate at a reference position. The alignment section,
を有する こ と を特徴とする請求項 1 記載の基板搬送装置。2. The substrate transfer device according to claim 1, comprising:
1 1 . 前記ァライ メ ン ト部は、 前記基板の互いに直交する 2 辺のエッジ位置を検出する複数のセ ンサ と、 1 1. The alignment unit includes a plurality of sensors for detecting edge positions of two sides of the substrate that are orthogonal to each other;
これらセンサによ り 検出された前記基板の 2辺のエッジ位 置情報に基づいて前記基板の姿勢を認識する姿勢認識部と、 前記姿勢認識部によ り認識された前記基板の姿勢を前記基 準位置にァライ メ ン トする よ う に前記搬送機構を移動制御す る姿勢制御部と 、  A posture recognition unit that recognizes the posture of the board based on edge position information of two sides of the board detected by these sensors, and a posture recognition unit that recognizes the posture of the board recognized by the posture recognition unit. An attitude control unit for controlling the movement of the transport mechanism so as to be aligned with the reference position;
を有する こ と を特徴とする請求項 9又は 1 0記載の基板搬送 装置。 The substrate transfer device according to claim 9, wherein the substrate transfer device has:
1 2 . 前記複数のセ ンサは、 複数の検出素子をラ イ ン状に配 列した 3 つのライ ンセンサであ り 、 1 2. The plurality of sensors have a plurality of detection elements arranged in a line. There are three line sensors in a row,
1 つの前記ライ ンラ ンサは、 前記搬送方向に対 して垂直方 向の中央部でかつライ ン方向を前記基板の搬送方向と 同一方 向に設け られ、  The one line lancer is provided at a central portion in a direction perpendicular to the transfer direction and the line direction is provided in the same direction as the transfer direction of the substrate,
2 つの前記ライ ンラ ンサは、 前記基板の一方の端側に互い に所定間隔離し、 かつライ ン方向を前記基板の搬送方向に対 して垂直方向に設け られた、  The two line lancers are provided at one end side of the substrate and are separated from each other by a predetermined distance, and the line direction is provided in a direction perpendicular to the transport direction of the substrate.
こ と を特徴とする請求項 1 1記載の基板搬送装置。 The substrate transfer device according to claim 11, wherein:
1 3 . 前記姿勢制御部は、 前記基板の搬送方向の前方側とな る前記基板の両端側をそれぞれ保持して前記搬送路の両側に 沿って配置された各スライ ダ上にそれぞれ移動する各搬送端 部の う ち少なく と も一方を前記搬送方向に微動して前記基板 を回転させる こ と によ り 前記基板を前記搬送方向に平行に配 置する こ と を特徴とする請求項 1 1記載の基板搬送装置。 13. The attitude control unit holds each of both ends of the substrate, which is the front side of the substrate in the transport direction, and moves on each of the sliders arranged along both sides of the transport path. 11. The substrate is arranged in parallel with the transport direction by rotating the substrate by slightly moving at least one of the transport ends in the transport direction. The substrate transfer device according to any one of the preceding claims.
1 4 . 前記姿勢制御部は、 前記基板の搬送方向の前方側と な る前記基板の両端側をそれぞれ保持して前記搬送路の両側に 沿って配置された各スライ ダ上にそれぞれ移動する各基板保 持部の う ち少な く と も一方を前記搬送方向に微動 して前記基 板を回転させる こ と によ り 前記基板を前記搬送方向に平行に 配置 し、 14. The attitude control unit holds each of both ends of the substrate, which is the front side in the transport direction of the substrate, and moves on each of the sliders arranged along both sides of the transport path. At least one of the substrate holding units is finely moved in the transport direction to rotate the substrate, thereby disposing the substrate in parallel to the transport direction,
前記基板の回転の結果、 前記基板が前記基板位置にァライ メ ン ト されていなければ、 前記各基板保持部を同期 して前記 搬送方向に対して垂直方向に微動 して前記基板を前記搬送路 の中心位置に合わせて前記基板を基準位置にァライ メ ン トす る、 こ と を特徴とする請求項 1 1 記載の基板搬送装置。 As a result of the rotation of the substrate, if the substrate is not aligned with the substrate position, the substrate holding units are synchronously finely moved in a direction perpendicular to the transport direction to move the substrate in the transport path. Aligning the substrate to a reference position in accordance with the center position of 12. The substrate transfer device according to claim 11, wherein:
1 5 . 前記搬送機構は、 前記搬送路の搬入側から搬入された 前記基板を検査部に搬送し、 前記検查部での前記基板に対す る検査終了後に前記基板を前記搬送路の搬出側に搬送する こ と を特徴とする請求項 1 記載の基板搬送装置。 15. The transport mechanism transports the substrate loaded from the loading side of the transport path to an inspection unit, and removes the substrate from the transport path after the inspection of the substrate by the inspection unit is completed. The substrate transfer device according to claim 1, wherein the substrate is transferred to a substrate.
PCT/JP2003/004835 2002-04-18 2003-04-16 Substrate conveying device WO2003086917A1 (en)

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