CN101312123B - Heat processing furnace and vertical-type heat processing apparatus - Google Patents
Heat processing furnace and vertical-type heat processing apparatus Download PDFInfo
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- CN101312123B CN101312123B CN2008101003779A CN200810100377A CN101312123B CN 101312123 B CN101312123 B CN 101312123B CN 2008101003779 A CN2008101003779 A CN 2008101003779A CN 200810100377 A CN200810100377 A CN 200810100377A CN 101312123 B CN101312123 B CN 101312123B
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- insulation barriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/04—Heating arrangements using electric heating
- F26B23/06—Heating arrangements using electric heating resistance heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
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Abstract
The invention provides a heat processing furnace and a vertical heat processing device capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace (2) comprises: a processing vessel (3) for accommodating an object to be processed (w) and performing thereto a heat process; and a cylindrical heater (5) disposed to surround an outer circumference of the processing vessel (3), for heating the object to be processed (w). The heater (5) includes a cylindrical heat insulating member (16), and heating resistors (18) arranged along an inner circumferential surface of the heat insulating member (16). Each of the heating resistors (18) is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members (20) are arranged in the heat insulating member (16) at suitable intervals therebetween, the pin members (20) holding the heating resistor (18) such that the heating resistor (18) is movable in a radial direction of the heater.
Description
Technical field
The present invention relates to heat-treatment furnace and vertical heat processing apparatus with this heat-treatment furnace.
Background technology
In the manufacturing of semiconductor device, for to implementing the processing of oxidation, diffusion, CVD (Chemical Vapor Deposition (chemical vapour deposition (CVD))) etc., and use various annealing devices as the semiconductor wafer of handled object.This common annealing device has heat-treatment furnace, and this heat-treatment furnace comprises: be used to accommodate semiconductor wafer and to its container handling of heat-treating (reaction tube); With that mode around this container handling is provided with to cover, be used for heater (heater) that the wafer in the container handling is heated.Above-mentioned heater comprises: thermal insulation barriers cylindraceous; With the heating resistor on the inner peripheral surface that is arranged on this thermal insulation barriers through supporter.
As above-mentioned heating resistor; For example under the situation of annealing device that can batch processing; Use can be heated to furnace high-temperature for example about 800～1000 ℃ along the spiral helicine heater block (being also referred to as heater wire, heating resistor) of the internal face configuration of thermal insulation barriers cylindraceous.In addition,, for example use and to be fired into cylindric and material that obtain by the heat-barrier material that ceramic fibre etc. constitutes, help to carry out the good heating of efficient thereby the heat of being captured with conduction heat as radiant heat is reduced as above-mentioned thermal insulation barriers.As above-mentioned supporter, use the supporter of for example processing by pottery, the mode that can carry out thermal expansion and thermal contraction with above-mentioned heater block supports above-mentioned heater block with the regulation pitch.
Yet, in above-mentioned heat-treatment furnace, above-mentioned heater block form helical form and with the mode that can carry out thermal expansion and thermal contraction and thermal insulation barriers between leave with gap and supported.But, because heater block can produce wriggling skew (creep) when at high temperature using, process and the slowly elongation in time of its line length.In addition, when heating, can cause the heater block thermal expansion.And when cooling, also oriented heater block ejection air is to carry out the type of quench cooled.Make the heater block distortion owing to repeating such heating and cooling action, take place and situation about breaking in abutting connection with the heater block short circuit.
Especially; Under the situation of vertical heat treatment furnace; Owing to heating and cooling cause repeatedly carrying out thermal expansion and thermal contraction, because gravity causes heater block moves gradually downwards, the part that causes moving is accumulated in descended circle (turn) most when heater block moved in supporter thus.Because accumulating of moving of heater block makes the radius of circle become big, arrive the inner peripheral surface of thermal insulation barriers and distortion up and down takes place for the heater block that can not expand laterally, and if short circuit between the heater block of adjacency, then break.
In addition; Following proposal has been proposed in order to address the above problem; That is: in order to prevent that extension that heater block causes because of wriggling or thermal expansion etc. is to a distolateral savings; Welding is equipped with the fixed part towards the outstanding axle shape of the radial direction foreign side of stove etc. on the outside portion of heater block, and (with reference to patent documentation 1) in the thermal insulation barriers imbedded and be fixed on the top of this fixed part.
[patent documentation 1] japanese kokai publication hei 10-233277 communique
[patent documentation 2] TOHKEMY 2005-197074 communique
But, as stated, only engage fixed part through welding in the outside portion of heater block, the junction surface is exposed at high temperature, and along with the thermal expansion of heating resistor is shunk, stress concentrate on the junction surface easily.At this moment, think the reduction (short lifeization) that can cause durability, and, if fixed part is a rod axle shape, then transfer to from thermal insulation barriers easily to be difficult to guarantee sufficient confining force.
Under the situation that will carry out the processing of heating and cooling rapidly to wafer; When heating up rapidly, be necessary heater block is applied bigger power; But up to now for common heater block; So can not apply bigger power, there is restriction in the excessive and easy broken string because load during heating and cooling are handled rapidly.In addition, in order addressing this problem, to need to use the high price heater block that is difficult to break, thereby to cause the problem that cost increases.
On the other hand, for the load that makes heater block reduces, realize long lifetime (raising durability), with respect to the power of increasing input, the ratio that increases heater block surface area (components list area) is effective.When increasing the heater block surface area, owing to reducing the load that the heater table surface temperature reduces heater block.In the heater block of so-called spiral type (spiral type), for can be in the space of regulation arrangement components efficiently, the design that applied load reduces.But; In the heater or heat-treatment furnace that use this spiral type heater block; Shown in figure 14; The structure of heater block 18 is imbedded in formation in thermal insulation barriers 16 for fixed heated parts 18, so heat through thermal insulation barriers 16 with respect to the heating target thing of the stove heart, therefore be difficult to heat up rapidly.Also be to cool off during cooling, also increased the thermal capacity of thermal insulation barriers 16 in addition, be difficult to rapid cooling through 16 pairs of heater blocks 18 of thermal insulation barriers.And, because the gap of not guaranteeing the dilation of heater block 18 so heater block itself receives stress when expanding, causes the reduction of durability.
In addition; As heater block, known have the heating resistor parts with band shape to be configured as the formed parts of waveform (patent documentation 2), and this is identical with the spiral type heater block; Though can increase surface area, have same problem in the structure that in cylindric thermal insulation barriers, is provided with.
Summary of the invention
The present invention considers the problems referred to above and proposes, and its purpose is to provide a kind of heat-treatment furnace and vertical heat processing apparatus of reduction that can carry out heating and cooling rapidly and realize raising and the cost of durability.
A kind of heat-treatment furnace of the present invention is characterized in that, comprising: be used to take in handled object and to its container handling of heat-treating; With mode heater cylindraceous that be provided with, that be used to heat handled object with the periphery that covers this container handling; Said heater has thermal insulation barriers cylindraceous and along the heating resistor of the inner peripheral surface of this thermal insulation barriers configuration; Said heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent; On said thermal insulation barriers, be equipped with the pin parts; These pin parts keep said heating resistor with appropriate intervals, make said heating resistor upwards to move in the footpath of heater.
A kind of heat-treatment furnace of the present invention; It is characterized in that: said pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor; This each foot connects thermal insulation barriers laterally from the inboard, and only blocks the outer peripheral face at thermal insulation barriers in outside curve.
A kind of heat-treatment furnace of the present invention is characterized in that: on the inner peripheral surface of said thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of said heating resistor thus.
A kind of heat-treatment furnace of the present invention is characterized in that: on said thermal insulation barriers, between the heating resistor of adjacency up and down, use the air squit hole along the forced air-cooling that Zhou Fangxiang is formed with appropriate intervals inside and outside a plurality of perforations.
A kind of heat-treatment furnace of the present invention; It is characterized in that: said thermal insulation barriers is divided into left and right sides two parts through the divisional plane that extends longitudinally; The corresponding left and right sides two parts that also are divided into of said heating resistor with thermal insulation barriers; And heating resistor of adjacency makes with the mutual end of this heating resistor through connecting plate and is connected to each other about it, and this connecting plate is configured in cutting apart on the face of said thermal insulation barriers.
A kind of heat-treatment furnace of the present invention is characterized in that: said connecting plate is fixed on cutting apart on the face of said thermal insulation barriers through the fixed part that is made up of pin.
A kind of heat-treatment furnace of the present invention is characterized in that: said connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on said thermal insulation barriers.
A kind of heat-treatment furnace of the present invention is characterized in that: said connecting plate is provided with the stator that enters into said thermal insulation barriers and be fixed.
A kind of heat-treatment furnace of the present invention is characterized in that: said thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep said heating resistor.
A kind of heat-treatment furnace of the present invention is characterized in that: said thermal insulation barriers is provided with the bottom of the peak portion that is used to support said heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
A kind of vertical heat processing apparatus of the present invention; It is characterized in that; Comprise: heat-treatment furnace, this heat-treatment furnace have the bottom as fire door and open, be used to accommodate handled object and to the container handling of its lengthwise of heat-treating and be arranged on this container handling periphery, be used to heat the heater cylindraceous of said handled object; Be used to seal the lid of said fire door; Carry the keeper of putting on this lid, being used for multistage maintenance handled object; And elevating mechanism; This elevating mechanism is used to make said lid to go up and down; With the switching of carrying out said lid and carry out moving into of keeper with respect to said container handling and take out of; Said heater has thermal insulation barriers cylindraceous and the heating resistor that is configured on the inner peripheral surface of this thermal insulation barriers, and said heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent, and on said thermal insulation barriers, is equipped with the pin parts; These pin parts keep said heating resistor with appropriate intervals, make said heating resistor upwards to move in the footpath of heater.
A kind of vertical heat processing apparatus of the present invention; It is characterized in that: said pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor; This each foot connects thermal insulation barriers laterally from the inboard, and only blocks the outer peripheral face at thermal insulation barriers in outside curve.
A kind of vertical heat processing apparatus of the present invention is characterized in that: on the inner peripheral surface of said thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of said heating resistor thus.
A kind of vertical heat processing apparatus of the present invention is characterized in that: on said thermal insulation barriers, between the heating resistor of adjacency up and down, use the air squit hole along the forced air-cooling that Zhou Fangxiang is formed with appropriate intervals inside and outside a plurality of perforations.
A kind of vertical heat processing apparatus of the present invention; It is characterized in that: said thermal insulation barriers is divided into left and right sides two parts through the divisional plane that extends longitudinally; The corresponding left and right sides two parts that also are divided into of said heating resistor with thermal insulation barriers; And heating resistor of adjacency makes with the mutual end of this heating resistor through connecting plate and is connected to each other about it, and this connecting plate is configured in cutting apart on the face of said thermal insulation barriers.
A kind of vertical heat processing apparatus of the present invention is characterized in that: said connecting plate is fixed on cutting apart on the face of said thermal insulation barriers through the fixed part that is made up of pin.
A kind of vertical heat processing apparatus of the present invention is characterized in that: said connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on said thermal insulation barriers.
A kind of vertical heat processing apparatus of the present invention is characterized in that: said connecting plate is provided with the stator that enters into said thermal insulation barriers and be fixed.
A kind of vertical heat processing apparatus of the present invention is characterized in that: said thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep said heating resistor.
A kind of vertical heat processing apparatus of the present invention is characterized in that: said thermal insulation barriers is provided with the bottom of the peak portion that is used to support said heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
According to the present invention, the heating resistor that is processed to waveform owing to shoestring is set up with the state that exposes along the inner peripheral surface of thermal insulation barriers, so can carry out heating and cooling rapidly and realize the raising of durability and the reduction of cost.
Description of drawings
Fig. 1 is the longitudinal section of representing briefly as the vertical heat processing apparatus of embodiment of the present invention.
Fig. 2 is that cross-sectional view amplifies in the A portion of Fig. 1.
Fig. 3 is that longitudinal section amplifies in the A portion of Fig. 1.
Fig. 4 is the plane graph of expression heater block.
Fig. 5 is the side view of expression heater block.
Fig. 6 (a) is the plane graph of an example of expression thermal insulation barriers, and Fig. 6 (b) is the B-B line sectional view of Fig. 6 (a).
To be expression be fixed on the amplification stereogram of major part of an example of the structure on the thermal insulation barriers with the connecting plate of the end of heating resistor to Fig. 7 (a), and Fig. 7 (b) is the sectional view of expression stationary state.
Fig. 8 is the sectional view that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.
Fig. 9 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.
Figure 10 (a) is that expression utilizes anti-down pin to keep the part stereogram of structure of the protuberance of heating resistor, and Figure 10 (b) is the concise and to the point stereogram of the anti-down pin of expression.
Figure 11 (a) and (b) are stereograms of other example of the anti-down pin of expression.
Figure 12 (a) is that expression utilizes anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices to keep the part stereogram of structure of the protuberance of heating resistor, and Figure 12 (b) is the concise and to the point stereogram of the anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices of expression.
Figure 13 is the part stereogram of other example of expression thermal insulation barriers.
Figure 14 (a) is the sectional view of an example of the existing heater of expression, and Figure 14 (b) is the inner peripheral surface figure of expression heater.
Embodiment
Below, based on accompanying drawing the optimum way that is used for embodiment of the present invention is elaborated.Fig. 1 is the longitudinal section of schematic representation as the vertical heat processing apparatus of embodiment of the present invention; Fig. 2 is that cross-sectional view amplifies in the A portion of presentation graphs 1; Fig. 3 is that longitudinal section amplifies in expression A portion, and Fig. 4 is the plane graph of expression heater block, and Fig. 5 is the side view of expression heater block.
In Fig. 1; What label 1 was represented is the vertical heat processing apparatus as one of semiconductor-fabricating device, and this annealing device 1 has can once accommodate a plurality of handled objects (for example semiconductor wafer w) and it is implemented the heat treated vertical heat treatment furnace 2 of oxidation, diffusion, decompression CVD etc.This heat-treatment furnace 2 comprises: be used to accommodate wafer w and to its container handling of heat-treating (being called reaction tube) 3; Be provided with and the heater cylindraceous that be used for heated chip w (heater) 5 of mode with the outside that covers this container handling 3.
Above-mentioned annealing device 1 has the substrate 6 that is used to be provided with heater 5.Be used for peristome 7 that container handling 3 is inserted above the lower direction being formed with on this substrate 6, the mode of sentencing the gap between covered substrate 6 and the container handling 3 at this peristome 7 is provided with the unshowned thermal insulation barriers of figure.
Above-mentioned container handling 3 is processed by quartz, forms the upper end and is closed, and the lower end is as fire door 3a and the lengthwise of opening cylindric.Openend at container handling 3 is formed with export-oriented flange 3b, and this flange 3b is supported by aforesaid substrate 6 through scheming unshowned flange pressing piece.The container handling 3 of illustrative example has importing port (introducing port) 8 that in container handling 3, imports processing gas, inertness gas etc. and the unshowned exhaust port of figure (exhaust outlet) that is used for the gas in the container handling 3 is carried out exhaust in the following side.Import port 8 and be connected with the gas supply source, exhaust port and having can reduce pressure and for example control to 10～10
-8The gas extraction system of the vacuum pump about Torr is connected.
Below container handling 3, be provided with can through elevating mechanism 10A carry out lifting moving, at the lid 10 that above-below direction can open and close, it is used to seal the 3a of lower ending opening portion (fire door) of container handling 3.Be placed with heat-preservation cylinder 11 as the fire door heat preservation component on the top of this lid 10; Be placed with the boat body of processing as the quartz of keeper 12 on the top of this heat-preservation cylinder 11, being used for carrying a plurality of (for example about 100～150) diameter with predetermined distance at above-below direction for example is the wafer w of 300mm.Lid 10 is provided with and makes the rotating mechanism 13 of boat body 12 with its axle center rotation.Boat body 12 moves through the decline of lid 10 and in container handling 3, is taken out of (unloading) to the loading area 15 of below in, finish wafer w alternately after, move and quilt is moved into (loading) and arrived in the processing container 3 through the rising of lid 10.
Like Fig. 2～shown in Figure 5, above-mentioned heater 5 comprises: thermal insulation barriers 16 cylindraceous; The shelf portion 17 of the ditch shape that forms along direction of principal axis (above-below direction in the illustrated example) multistage ground at the inner peripheral surface of this thermal insulation barriers 16; And along the heater block (heater wire, heating resistor) 18 of each shelf portion 17 configurations.Thermal insulation barriers for example is made up of the inorfil that contains silicon dioxide, aluminium oxide or silicic acid aluminium oxide.For thermal insulation barriers, consider the installation of heater block and the assembling of heater, preferably be divided into two parts about divisional plane 16a quilt through the longitudinal direction extension.
On above-mentioned thermal insulation barriers 16, be equipped with pin parts 20, these pin parts 20 are used for appropriate intervals above-mentioned heater block 18 being kept, and make above-mentioned heater block 18 move and do not come off or deviate from from shelf portion 17 at radial direction.Inner peripheral surface at above-mentioned cylindric thermal insulation barriers 16; Pitch multistage ground with regulation on direction of principal axis is formed with the annular groove portion 21 concentric with it, is formed at along the above-mentioned shelf portion 17 of circumferencial direction ring-shaped continuous between the ditch portion 21 of ditch portion 21 and bottom on adjacent top.Be provided with between the upper and lower of the heater block 18 in above-mentioned ditch portion 21 and the inwall 21a of ditch portion 21 and the heater block 18 and allow that heater block 18 carries out enough gaps that thermal expansion contraction and radial direction move; In addition; Cooling air in the time of can making forced air-cooling through these gaps is back to the back side of heater block 18, thereby cools off heater block 18 effectively.
For above-mentioned pin parts 20, it comprises a pair of 20b of foot of the 18b of paddy portion (recess) of the inner peripheral surface that utilizes base portion 20a to support heater block 18, and forms the side and be " コ " word shape, and the 20b of this two foot penetrates into the outside from the inboard of thermal insulation barriers 16.Thereby the crooked round about each other card of the end 20c of the 20b of this two foot ends on the outer peripheral face of thermal insulation barriers 16.Pin parts 20 are preferably and heater block 18 identical materials.In addition, as shown in Figure 3, roughly half is housed in the ditch portion 21 preferred heater block 18 with the outside of radial direction, and roughly half exposes outside ditch portion 21 with the inboard of radial direction.
Above-mentioned heater block 18 be not as existing heater block on above-below direction helically continuous, but as Fig. 2 or shown in Figure 3, be configured on the shelf portion 17 of each section, and terminate at each section.Therefore, heater block 18 can not move downwards because of deadweight and accumulate (accumulation).In addition; As shown in Figure 5; For heater block 18; Between adjacent epimere and hypomere, connect (continuously), thereby each of a plurality of sections (in the illustrated example being 7 sections) is connected in series, and the top 18e of the hypomere of each group of a plurality of sections and the terminal 18r of epimere are connected terminal board 22 connections of usefulness respectively with electrode.Thus, heater 5 constitutes along above-below direction and controls so that can carry out temperature being divided into a plurality of zones in the heat-treatment furnace 2.
The end of heater block 18 and connecting plate 23 engage through the welding mode.Above-mentioned terminal board 22 is configured to connect diametrically thermal insulation barriers 16.Above-mentioned connecting plate 23 for prevent and the end of heater block 18 between weld portion be exposed under the high temperature and preferably be embedded in the thermal insulation barriers 16.In addition, as the continuous pattern of heater block 18, also can be suitable for above-mentioned situation in addition.Above-mentioned terminal board 22 and connecting plate 23 be by constituting with heater block 18 identical materials, from preventing to fuse and suppressing the viewpoint of thermal discharge, is preferably formed tabular into required sectional area.
Strengthen thermal insulation barriers 16 when keeping thermal insulation barriers 16 shapes, as shown in Figure 1, the crust (shell) 28 of the for example stainless steel that the outer peripheral face of thermal insulation barriers 16 is made of metal covers.In addition, in order to suppress the thermal impact outside to heater, the outer peripheral face of crust 28 covers through water collar 30.The top of thermal insulation barriers 16 is provided with the top thermal insulation barriers 31 that covers it, is provided with the top board 32 that the stainless steel at the top (upper end) that covers crust 28 is processed on the top of this top thermal insulation barriers 31.
, the wafer rapid cooling handles rapidization to improve output for thereby being made; In heater 5, be provided with the heat-extraction system 35 that the atmosphere gas in the space 33 between heater 5 and the container handling 3 is discharged to the outside, and in above-mentioned space 33, import the forced air-cooling device 36 of air to force to cool off of normal temperature (20～30 ℃).Above-mentioned gas extraction system 35 mainly is made up of the exhaust outlet 37 on the top that for example is arranged on heater 5 and the unshowned heat extraction pipe of figure that connects this exhaust outlet 37 and scheme unshowned factory gas extraction system.In the heat extraction pipe, be provided with unshowned vented drum blower fan of figure and heat exchanger.
Above-mentioned forced air-cooling device 36 comprises: a plurality of ring-type streams 38 that between above-mentioned thermal insulation barriers 16 and crust 28, form along short transverse; Be arranged on forced air-cooling on the thermal insulation barriers 16 with air squit hole 40, be used for from the centroclinal direction ejection air of each ring-type stream 38, thereby the circumferencial direction in above-mentioned space 33 produces cycle stream to thermal insulation barriers 16.Above-mentioned ring-type stream 38 is pasted with the thermal insulation barriers 41 of band shape or ring-type on the outer peripheral face of thermal insulation barriers 16, perhaps the outer peripheral face through ring-type cutting thermal insulation barriers 16 forms.Above-mentioned air squit hole 40 as on the shelf portion 17 between the heater block 18 of adjacency up and down, forms with the mode of radially inside and outside perforation in thermal insulation barriers 16 preferably shown in Fig. 6 (a) and (b).Through above-mentioned air squit hole 40 is arranged on the shelf portion 17, air is ejected in the above-mentioned space 33 and can not damage heater block ground.
On the outer peripheral face of above-mentioned crust 28, be provided with a common unshowned service of figure that is used for distributing the supply cooling fluid, on crust 28, be formed with in the connection service and the connected entrance of each ring-type stream 38 to each ring-type stream 38 along short transverse.Service is through open and close valve, be used to attract in the clean room as the air of cooling fluid and it carried out unshowned cooling fluid supply source of figure (for example forced draft fan) that force feed supplies with being connected.
According to heat-treatment furnace of said structure 2 or vertical heat processing apparatus 1, comprising: be used to accommodate wafer w and its container handling of heat-treating 3; With the cylindric heater 5 that is used for heated chip w that is provided with the mode on every side that covers this container handling 3.Above-mentioned heater 5 comprises: thermal insulation barriers 16 cylindraceous; The shelf portion 17 of the ditch shape that on the inner peripheral surface of this thermal insulation barriers 16, forms along direction of principal axis multistage ground; And along the heater block 18 of each shelf portion 17 configurations.Above-mentioned heater block 18 forms band shape with the mode of waveform; On above-mentioned thermal insulation barriers 16, be equipped with pin parts 20, these pin parts 20 are so that above-mentioned heater block 18 can on the radial direction of heater 5, move and above-mentioned heater block 18 does not keep it with proper spacing from the mode that shelf portion 17 comes off.Therefore, undulatory heater block 5 is set, can carries out heating and cooling rapidly and improve durability and reduce cost with the state that on the shelf portion 17 of each section of the inner peripheral surface of thermal insulation barriers 16, exposes.Through using undulatory heater block 18, can increase the ratio of components list area effectively, realize reducing the load of heater block through the reduction of heater table surface temperature, can suppress disrumpent feelings.Therefore, in heater block 18, drop into more powerful air blast and can heating up rapidly.In addition, owing to suppressed broken string, thus improved durability and long lifetime, and can adopt cheap kanthals material as heater block 18, to realize the reduction of cost.
On the shelf portion 17 about the conduct in above-mentioned thermal insulation barriers 16 between the heater block 18 of adjacency; Since be formed with connect this shelf portion 17 along inward-outward direction forced air-cooling with air squit hole 40, so can not damage heater block air is not easily sprayed.Above-mentioned thermal insulation barriers 16 is cut apart by two through the divisional plane 16a of longitudinal direction extension, cut apart because above-mentioned heater block 18 is also corresponding with thermal insulation barriers, thus can at an easy rate the heater block group be paid on thermal insulation barriers, to improve associativity.
To be expression be fixed on the figure of an example of the structure on the thermal insulation barriers with the connecting plate of the end of heating resistor to Fig. 7, and Fig. 7 (a) is the amplification stereogram of expression major part, and Fig. 7 (b) is the sectional view of expression stationary state.In order to suppress and to prevent that the part (U turning part) of turning back of heater block 18 from being that above-mentioned connecting plate 23 deforms; Connecting plate 23 utilizes the fixed part (being the pin of " コ " word shape in the illustrative example) 45 of pin etc. and to be fixed on end (the cutting apart face) 16a of above-mentioned thermal insulation barriers 16 last, and above-mentioned connecting plate 23 is provided with the card extension portion 46 on the outer peripheral face that card hangs over above-mentioned thermal insulation barriers 16.
Fig. 8 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.End at thermal insulation barriers 16 is fixed with connecting plate 23 through fixed part 45, and is provided with auxiliary thermal insulation barriers 47 with the mode that covers this connecting plate 23.Auxiliary thermal insulation barriers 47 is positioned at or is filled between the end (cutting apart face) of thermal insulation barriers 16.As fixed part 45, the pipe that except that pin, can also use, pole, angle rod etc.
Fig. 9 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.On connecting plate 23, be formed with and be inserted in thermal insulation barriers 16 or the auxiliary thermal insulation barriers 47 and fixing stator 48.This stator 48 for example bends to the right angle through the top ends with connecting plate 23 and forms.End at thermal insulation barriers 16 is provided with auxiliary thermal insulation barriers 47 with the mode that covers connecting plate 23.Though preferably stator 48 is inserted into the side (with reference to Fig. 9 (b)) of thermal insulation barriers 16, also can be inserted into the side (with reference to Fig. 9 (a)) of auxiliary thermal insulation barriers 47.
Figure 10 is that expression utilizes anti-down pin to keep the structure chart of the protuberance of heating resistor, and Figure 10 (a) is the part stereogram, and Figure 10 (b) is the concise and to the point stereogram of anti-down pin.Thermal insulation barriers 16 is provided with anti-down pin 49, and it is used to keep, and makes the protuberance 18a of appropriate location that becomes the heater block 18 of waveform from the inner peripheral surface sag and swell of thermal insulation barriers 16 not fall down downwards.This anti-down pin 49 carries out bending machining through the wire rod to steel wire etc. and forms.Article one, bending wire becomes two parts, it is further bent to " コ " word shape, the top bend is pushed enlarge the feasible expansion section 49a that becomes ring-type or general triangular.The protuberance 18a of heater block 18 is accepted in the inboard of " コ " word shape part 49b of this anti-down pin 49, and the expansion section 49a of below is positioned near thermal insulation barriers 16 sides top of ditch portion 21 for example or shelf portion 17.The last two ends 49c of anti-down pin 49,49c connect thermal insulation barriers 16 and side-prominent to outer peripheral face, only block the outer peripheral face at thermal insulation barriers 16 through these two ends 49c that bends right and left, 49c as card extension portion.
Through such installation method, anti-down pin 49 along the heater block 18 of thermal insulation barriers 16 circumferentially with appropriate intervals and thermal insulation barriers 16 axially on dispose multiple row and for example dispose 3 row on the thermal insulation barriers at folk prescription.According to above-mentioned anti-down pin 49, can prevent heater block 18 occurrence of tilting or sagging, thus, can reduce the degree of depth and even the overhang of shelf portion (eaves portion) 17 of the ditch portion 21 of thermal insulation barriers 16, even if do not have ditch portion 21 or shelf portion 17 also passable.
Figure 11 is a stereogram of expressing other example of anti-down pin.As anti-down pin 49, a wire material is bent to " コ " word shape (with reference to Figure 11 (a)), perhaps a wire material is bent to two parts, and it is bent to " コ " word shape (with reference to Figure 11 (b)).In addition, with two ends 49,49c bending with as card extension portion.
Figure 12 is that expression utilizes anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices to keep the structure chart of the protuberance of heating resistor, and Figure 12 (a) is that part stereogram, Figure 12 (b) are the concise and to the point stereograms of anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices.Thermal insulation barriers 16 is provided with anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 50, and it is used to support, and makes not fall down downwards from the bottom of protuberance 18a of appropriate location that the inner peripheral surface sag and swell of thermal insulation barriers 16 becomes the heater block 18 of waveform.Should for example be made up of the rectangular slab that pottery is processed by anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 50, preferably an end of its length direction is formed with and is used for thrusting the sharp-pointed 50a of portion that thermal insulation barriers is fixed.Horizontal support is carried out in the bottom of protuberance 18a through 50 pairs of heater blocks 18 of this anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, can prevent heater block 18 occurrence of tilting or sagging, and is same as the previously described embodiments thus, even if do not have ditch portion 21 or shelf portion 17 also passable.
Figure 13 is the stereogram of other example of expression thermal insulation barriers.Thermal insulation barriers 16 as heater 5; Because exist because the situation that caused internal stress causes on inner peripheral surface, producing be full of cracks is shunk in thermal expansion, so, in order to prevent this situation; Shown in figure 12, preferably on inner peripheral surface, be formed with along axial otch (slit) 42.In addition, consider the associativity of heater, preferred thermal insulation barriers 16 at the lower position of each shelf portion 17 along being cut apart up and down.Promptly; Thermal insulation barriers 16 is made up of the block 16a that is divided into multistage along above-below direction; On the shelf portion 17 of first section block 16a, heater block is set; Overlapping then second section block 16a also is provided with heater block 18 on the shelf portion 17 of this block 16a of second section, adopt this mode easily and well heater block 18 to be arranged on the shelf portion 17 of each section, thereby improves associativity.At this moment, preferably form the recess 43a and the protuberance 43b of the location usefulness that is bonded with each other with the mode of opposite face at the block 16a upper edge Zhou Fangxiang of adjacency up and down.
In addition, the present invention is not limited to above-mentioned execution mode, in the scope of purport of the present invention, can carry out various design alterations to it.For example as container handling, also can with the heating resisting metal with ingress pipe portion and blast pipe portion for example the cylindric collector (house steward) processed of stainless steel be connected to the bottom, also can be the structure of dual pipe in addition.
Claims (18)
1. a heat-treatment furnace is characterized in that, comprising:
Be used to take in handled object and to its container handling of heat-treating; With
With the mode heater cylindraceous that be provided with, that be used to heat handled object of the periphery that covers this container handling,
Said heater has thermal insulation barriers cylindraceous and along the heating resistor of the inner peripheral surface of this thermal insulation barriers configuration,
Said heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent,
On said thermal insulation barriers, be equipped with the pin parts, these pin parts keep said heating resistor with appropriate intervals, make said heating resistor upwards to move in the footpath of heater,
Said thermal insulation barriers is divided into left and right sides two parts through the divisional plane that extends longitudinally; The corresponding left and right sides two parts that also are divided into of said heating resistor with thermal insulation barriers; And heating resistor of adjacency makes with the mutual end of this heating resistor through connecting plate and is connected to each other about it, and this connecting plate is configured in cutting apart on the face of said thermal insulation barriers.
2. heat-treatment furnace according to claim 1 is characterized in that:
Said pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, and this each foot connects thermal insulation barriers laterally from the inboard, and only block the outer peripheral face at thermal insulation barriers in outside curve.
3. heat-treatment furnace according to claim 1 is characterized in that:
On the inner peripheral surface of said thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of said heating resistor thus.
4. heat-treatment furnace according to claim 1 is characterized in that:
On said thermal insulation barriers, between the heating resistor of adjacency up and down, use the air squit hole along the forced air-cooling that Zhou Fangxiang is formed with appropriate intervals inside and outside a plurality of perforations.
5. heat-treatment furnace according to claim 1 is characterized in that:
Said connecting plate is fixed on cutting apart on the face of said thermal insulation barriers through the fixed part that is made up of pin.
6. heat-treatment furnace according to claim 1 is characterized in that:
Said connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on said thermal insulation barriers.
7. heat-treatment furnace according to claim 1 is characterized in that:
Said connecting plate is provided with the stator that enters into said thermal insulation barriers and be fixed.
8. heat-treatment furnace according to claim 1 is characterized in that:
Said thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep said heating resistor.
9. heat-treatment furnace according to claim 1 is characterized in that:
Said thermal insulation barriers is provided with the bottom of the peak portion that is used to support said heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
10. a vertical heat processing apparatus is characterized in that, comprising:
Heat-treatment furnace, this heat-treatment furnace have the bottom as fire door and open, be used to accommodate handled object and to the container handling of its lengthwise of heat-treating and be arranged on this container handling periphery, be used to heat the heater cylindraceous of said handled object;
Be used to seal the lid of said fire door;
Carry the keeper of putting on this lid, being used for multistage maintenance handled object; With
Elevating mechanism, this elevating mechanism are used to make said lid to go up and down, with the switching of carrying out said lid and carry out moving into of keeper with respect to said container handling and take out of,
Said heater has thermal insulation barriers cylindraceous and the heating resistor that is configured on the inner peripheral surface of this thermal insulation barriers,
Said heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent,
On said thermal insulation barriers, be equipped with the pin parts, these pin parts keep said heating resistor with appropriate intervals, make said heating resistor upwards to move in the footpath of heater,
Said thermal insulation barriers is divided into left and right sides two parts through the divisional plane that extends longitudinally; The corresponding left and right sides two parts that also are divided into of said heating resistor with thermal insulation barriers; And heating resistor of adjacency makes with the mutual end of this heating resistor through connecting plate and is connected to each other about it, and this connecting plate is configured in cutting apart on the face of said thermal insulation barriers.
11. vertical heat processing apparatus according to claim 10 is characterized in that:
Said pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, and this each foot connects thermal insulation barriers laterally from the inboard, and only block the outer peripheral face at thermal insulation barriers in outside curve.
12. vertical heat processing apparatus according to claim 10 is characterized in that:
On the inner peripheral surface of said thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of said heating resistor thus.
13. vertical heat processing apparatus according to claim 10 is characterized in that:
On said thermal insulation barriers, between the heating resistor of adjacency up and down, use the air squit hole along the forced air-cooling that Zhou Fangxiang is formed with appropriate intervals inside and outside a plurality of perforations.
14. vertical heat processing apparatus according to claim 10 is characterized in that:
Said connecting plate is fixed on cutting apart on the face of said thermal insulation barriers through the fixed part that is made up of pin.
15. vertical heat processing apparatus according to claim 10 is characterized in that:
Said connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on said thermal insulation barriers.
16. vertical heat processing apparatus according to claim 10 is characterized in that:
Said connecting plate is provided with the stator that enters into said thermal insulation barriers and be fixed.
17. vertical heat processing apparatus according to claim 10 is characterized in that:
Said thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep said heating resistor.
18. vertical heat processing apparatus according to claim 10 is characterized in that:
Said thermal insulation barriers is provided with the bottom of the peak portion that is used to support said heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007072477 | 2007-03-20 | ||
| JP2007-072477 | 2007-03-20 | ||
| JP2007072477 | 2007-03-20 | ||
| JP2008-025113 | 2008-02-05 | ||
| JP2008025113A JP5248874B2 (en) | 2007-03-20 | 2008-02-05 | Heat treatment furnace and vertical heat treatment equipment |
| JP2008025113 | 2008-02-05 |
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| CN101312123A CN101312123A (en) | 2008-11-26 |
| CN101312123B true CN101312123B (en) | 2012-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101003779A Active CN101312123B (en) | 2007-03-20 | 2008-03-20 | Heat processing furnace and vertical-type heat processing apparatus |
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| JP (1) | JP5248874B2 (en) |
| KR (1) | KR101117016B1 (en) |
| CN (1) | CN101312123B (en) |
| TW (1) | TWI392843B (en) |
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| KR101096602B1 (en) * | 2009-07-21 | 2011-12-20 | 가부시키가이샤 히다치 고쿠사이 덴키 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| JP5544121B2 (en) | 2009-07-21 | 2014-07-09 | 株式会社日立国際電気 | Heating apparatus, substrate processing apparatus, and semiconductor device manufacturing method |
| US9064912B2 (en) | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| JP5529646B2 (en) * | 2010-06-25 | 2014-06-25 | 株式会社日立国際電気 | Heating apparatus, substrate processing apparatus, substrate processing method, and semiconductor device manufacturing method |
| DE202010001370U1 (en) * | 2010-01-25 | 2010-05-06 | Türk & Hillinger GmbH | Electric heater |
| JP5686467B2 (en) * | 2010-10-15 | 2015-03-18 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
| JP5868619B2 (en) * | 2011-06-21 | 2016-02-24 | ニチアス株式会社 | Heat treatment furnace and heat treatment apparatus |
| JP5743746B2 (en) * | 2011-06-27 | 2015-07-01 | 東京エレクトロン株式会社 | Heat treatment furnace and heat treatment apparatus |
| JP5743788B2 (en) * | 2011-07-29 | 2015-07-01 | 東京エレクトロン株式会社 | Heat treatment equipment |
| JP5770042B2 (en) | 2011-08-04 | 2015-08-26 | 東京エレクトロン株式会社 | Heat treatment equipment |
| JP5824082B2 (en) * | 2014-02-05 | 2015-11-25 | 株式会社日立国際電気 | Heating apparatus, substrate processing apparatus, and semiconductor device manufacturing method |
| KR101677560B1 (en) * | 2014-03-18 | 2016-11-18 | 주식회사 유진테크 | Apparatus for processing substrate with heater adjusting process space temperature according to height |
| KR20170071171A (en) * | 2015-12-15 | 2017-06-23 | 주식회사 대유위니아 | electric rice cooker |
| KR102234898B1 (en) * | 2015-12-16 | 2021-04-01 | 주식회사 위니아딤채 | electric rice cooker |
| KR102231034B1 (en) * | 2015-12-17 | 2021-03-23 | 주식회사 위니아딤채 | Electric rice cooker |
| CN110087354B (en) * | 2018-01-26 | 2022-05-03 | 鸿成国际科技股份有限公司 | Heater supporting device |
| JP7122856B2 (en) * | 2018-05-02 | 2022-08-22 | 東京エレクトロン株式会社 | Heat treatment equipment |
| CN112414107B (en) * | 2020-11-04 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Vertical heat treatment equipment and furnace body loading and unloading method and transfer device thereof |
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Also Published As
| Publication number | Publication date |
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| CN101312123A (en) | 2008-11-26 |
| TWI392843B (en) | 2013-04-11 |
| KR20080085744A (en) | 2008-09-24 |
| TW200914783A (en) | 2009-04-01 |
| JP2008263170A (en) | 2008-10-30 |
| KR101117016B1 (en) | 2012-03-15 |
| JP5248874B2 (en) | 2013-07-31 |
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