CN101312123A - Heat processing furnace and vertical-type heat processing apparatus - Google Patents
Heat processing furnace and vertical-type heat processing apparatus Download PDFInfo
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- CN101312123A CN101312123A CNA2008101003779A CN200810100377A CN101312123A CN 101312123 A CN101312123 A CN 101312123A CN A2008101003779 A CNA2008101003779 A CN A2008101003779A CN 200810100377 A CN200810100377 A CN 200810100377A CN 101312123 A CN101312123 A CN 101312123A
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- thermal insulation
- insulation barriers
- heating resistor
- heat
- heater
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/04—Heating arrangements using electric heating
- F26B23/06—Heating arrangements using electric heating resistance heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
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Abstract
The invention provides a heat processing furnace and a vertical heat processing device capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace (2) comprises: a processing vessel (3) for accommodating an object to be processed (w) and performing thereto a heat process; and a cylindrical heater (5) disposed to surround an outer circumference of the processing vessel (3), for heating the object to be processed (w). The heater (5) includes a cylindrical heat insulating member (16), and heating resistors (18) arranged along an inner circumferential surface of the heat insulating member (16). Each of the heating resistors (18) is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members (20) are arranged in the heat insulating member (16) at suitable intervals therebetween, the pin members (20) holding the heating resistor (18) such that the heating resistor (18) is movable in a radial direction of the heater.
Description
Technical field
The present invention relates to heat-treatment furnace and vertical heat processing apparatus with this heat-treatment furnace.
Background technology
In the manufacturing of semiconductor device, for to implementing the processing of oxidation, diffusion, CVD (Chemical Vapor Deposition (chemical vapour deposition (CVD))) etc., and use various annealing devices as the semiconductor wafer of handled object.This common annealing device has heat-treatment furnace, and this heat-treatment furnace comprises: be used to accommodate semiconductor wafer and to its container handling of heat-treating (reaction tube); With that mode around this container handling is provided with to cover, be used for heater (heater) that the wafer in the container handling is heated.Above-mentioned heater comprises: thermal insulation barriers cylindraceous; With the heating resistor on the inner peripheral surface that is arranged on this thermal insulation barriers by supporter.
As above-mentioned heating resistor, for example under the situation of annealing device that can batch processing, use can be heated to furnace high-temperature for example about 800～1000 ℃ along the spiral helicine heater block (being also referred to as heater wire, heating resistor) of the internal face configuration of thermal insulation barriers cylindraceous.In addition,, for example use and to be fired into cylindric and material that obtain by the heat-barrier material that ceramic fibre etc. constitutes, help to carry out the good heating of efficient thereby the heat of being captured as radiant heat and conduction heat is reduced as above-mentioned thermal insulation barriers.As above-mentioned supporter, use the supporter of for example making by pottery, the mode that can carry out thermal expansion and thermal contraction with above-mentioned heater block supports above-mentioned heater block with the regulation pitch.
Yet, in above-mentioned heat-treatment furnace, above-mentioned heater block form helical form and with the mode that can carry out thermal expansion and thermal contraction and thermal insulation barriers between leave with gap and supported.But, because heater block can produce wriggling skew (creep) when at high temperature using, its line length in time process and slowly elongation.In addition, when heating, can cause the heater block thermal expansion.And when cooling, also oriented heater block ejection air is to carry out the type of quench cooled.Make the heater block distortion owing to repeating such heating and cooling action, take place and situation about breaking in abutting connection with the heater block short circuit.
Especially, under the situation of vertical heat treatment furnace, owing to heating and cooling cause repeatedly carrying out thermal expansion and thermal contraction, thus heater block in supporter when mobile because gravity causes heater block moves gradually downwards, the part that causes moving is accumulated in descends circle (turn) most.Because accumulating of moving of heater block makes the radius of circle become big, arrive the inner peripheral surface of thermal insulation barriers and distortion up and down takes place for the heater block that can not expand laterally, and if short circuit between the heater block of adjacency, then break.
In addition, following proposal has been proposed in order to address the above problem, that is: in order to prevent that extension that heater block causes because of wriggling or thermal expansion etc. is to a distolateral savings, welding is equipped with the fixed part towards the outstanding axle shape of the radial direction foreign side of stove etc. on the outside portion of heater block, and (with reference to patent documentation 1) in the thermal insulation barriers imbedded and be fixed on the top of this fixed part.
[patent documentation 1] Japanese kokai publication hei 10-233277 communique
[patent documentation 2] TOHKEMY 2005-197074 communique
But, as mentioned above, only engage fixed part by welding in the outside portion of heater block, the junction surface is exposed at high temperature, and along with the thermal expansion of heating resistor is shunk, stress concentrate on the junction surface easily.At this moment, think the reduction (short lifeization) that can cause durability, and, if fixed part is a rod axle shape, then transfer to from thermal insulation barriers easily to be difficult to guarantee sufficient confining force.
Under the situation that will carry out the processing of heating and cooling rapidly to wafer, when heating up rapidly, be necessary heater block is applied bigger power, but up to now for common heater block, excessive and the easy broken string because load, so can not apply bigger power, have restriction during heating and cooling are handled rapidly.In addition, in order addressing this problem, to need to use the high price heater block that is difficult to break, thereby to cause the problem that cost increases.
On the other hand, for the load that makes heater block reduces, realize long lifetime (raising durability), with respect to the power of increasing input, the ratio that increases heater block surface area (components list area) is effective.When increasing the heater block surface area, owing to reducing the load that the heater table surface temperature reduces heater block.In the heater block of so-called spiral type (spiral type), for can be in the space of regulation arrangement components efficiently, the design that applied load reduces.But, in the heater or heat-treatment furnace that use this spiral type heater block, as shown in figure 14, formation is for fixing heater block 18 and imbed the structure of heater block 18 in thermal insulation barriers 16, so the heating target thing with respect to the stove heart heats by thermal insulation barriers 16, therefore be difficult to heat up rapidly.Also be to cool off during cooling, also increased the thermal capacity of thermal insulation barriers 16 in addition, be difficult to rapid cooling by 16 pairs of heater blocks 18 of thermal insulation barriers.And, because the gap of not guaranteeing the dilation of heater block 18 so heater block itself is subjected to stress when expanding, causes the reduction of durability.
In addition, as heater block, known have the heating resistor parts with band shape to be configured as the formed parts of waveform (patent documentation 2), and this is identical with the spiral type heater block, though can increase surface area, have same problem in the structure that in cylindric thermal insulation barriers, is provided with.
Summary of the invention
The present invention considers the problems referred to above and proposes, and its purpose is to provide a kind of and can carries out heating and cooling rapidly and realize the raising of durability and the heat-treatment furnace and the vertical heat processing apparatus of the reduction of cost.
A kind of heat-treatment furnace of the present invention is characterized in that, comprising: be used to take in handled object and to its container handling of heat-treating; With mode heater cylindraceous that be provided with, that be used to heat handled object with the periphery that covers this container handling, described heater has thermal insulation barriers cylindraceous and along the heating resistor of the inner peripheral surface of this thermal insulation barriers configuration, described heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent, on described thermal insulation barriers, be equipped with the pin parts, these pin parts keep described heating resistor with appropriate intervals, make described heating resistor upwards to move in the footpath of heater.
A kind of heat-treatment furnace of the present invention, it is characterized in that: described pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, this each foot connects thermal insulation barriers laterally from the inboard, and only blocks the outer peripheral face at thermal insulation barriers in outside curve.
A kind of heat-treatment furnace of the present invention is characterized in that: on the inner peripheral surface of described thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of described heating resistor thus.
A kind of heat-treatment furnace of the present invention is characterized in that: on described thermal insulation barriers, between the heating resistor of adjacency up and down, be formed with forced air-cooling air squit hole inside and outside a plurality of perforations with appropriate intervals along Zhou Fangxiang.
A kind of heat-treatment furnace of the present invention, it is characterized in that: described thermal insulation barriers is divided into left and right sides two parts by the divisional plane that extends longitudinally, the corresponding left and right sides two parts that also are divided into of described heating resistor with thermal insulation barriers, and its up and down the heating resistor of adjacency make with the mutual end of this heating resistor by connecting plate and be connected to each other, this connecting plate is configured in cutting apart on the face of described thermal insulation barriers.
A kind of heat-treatment furnace of the present invention is characterized in that: described connecting plate is fixed on cutting apart on the face of described thermal insulation barriers by the fixed part that is made of pin.
A kind of heat-treatment furnace of the present invention is characterized in that: described connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on described thermal insulation barriers.
A kind of heat-treatment furnace of the present invention is characterized in that: described connecting plate is provided with the stator that enters into described thermal insulation barriers and be fixed.
A kind of heat-treatment furnace of the present invention is characterized in that: described thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep described heating resistor.
A kind of heat-treatment furnace of the present invention is characterized in that: described thermal insulation barriers is provided with the bottom of the peak portion that is used to support described heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
A kind of vertical heat processing apparatus of the present invention, it is characterized in that, comprise: heat-treatment furnace, this heat-treatment furnace have the bottom as fire door and open, be used to accommodate handled object and to the container handling of its lengthwise of heat-treating and be arranged on this container handling periphery, be used to heat the heater cylindraceous of described handled object; Be used to seal the lid of described fire door; Be positioned on this lid, be used for the keeper that multistage keeps handled object; And elevating mechanism, this elevating mechanism is used to make described lid lifting, with the switching of carrying out described lid and carry out moving into of keeper with respect to described container handling and take out of, described heater has thermal insulation barriers cylindraceous and is configured in heating resistor on the inner peripheral surface of this thermal insulation barriers, described heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent, on described thermal insulation barriers, be equipped with the pin parts, these pin parts keep described heating resistor with appropriate intervals, make described heating resistor upwards to move in the footpath of heater.
A kind of vertical heat processing apparatus of the present invention, it is characterized in that: described pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, this each foot connects thermal insulation barriers laterally from the inboard, and only blocks the outer peripheral face at thermal insulation barriers in outside curve.
A kind of vertical heat processing apparatus of the present invention is characterized in that: on the inner peripheral surface of described thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of described heating resistor thus.
A kind of vertical heat processing apparatus of the present invention is characterized in that: on described thermal insulation barriers, between the heating resistor of adjacency up and down, be formed with forced air-cooling air squit hole inside and outside a plurality of perforations with appropriate intervals along Zhou Fangxiang.
A kind of vertical heat processing apparatus of the present invention, it is characterized in that: described thermal insulation barriers is divided into left and right sides two parts by the divisional plane that extends longitudinally, the corresponding left and right sides two parts that also are divided into of described heating resistor with thermal insulation barriers, and its up and down the heating resistor of adjacency make with the mutual end of this heating resistor by connecting plate and be connected to each other, this connecting plate is configured in cutting apart on the face of described thermal insulation barriers.
A kind of vertical heat processing apparatus of the present invention is characterized in that: described connecting plate is fixed on cutting apart on the face of described thermal insulation barriers by the fixed part that is made of pin.
A kind of vertical heat processing apparatus of the present invention is characterized in that: described connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on described thermal insulation barriers.
A kind of vertical heat processing apparatus of the present invention is characterized in that: described connecting plate is provided with the stator that enters into described thermal insulation barriers and be fixed.
A kind of vertical heat processing apparatus of the present invention is characterized in that: described thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep described heating resistor.
A kind of vertical heat processing apparatus of the present invention is characterized in that: described thermal insulation barriers is provided with the bottom of the peak portion that is used to support described heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
According to the present invention, the heating resistor that is processed to waveform owing to shoestring is set up with the state that exposes along the inner peripheral surface of thermal insulation barriers, so can carry out heating and cooling rapidly and realize the raising of durability and the reduction of cost.
Description of drawings
Fig. 1 is the longitudinal section of representing briefly as the vertical heat processing apparatus of embodiment of the present invention.
Fig. 2 is that cross-sectional view amplifies in the A portion of Fig. 1.
Fig. 3 is that longitudinal section amplifies in the A portion of Fig. 1.
Fig. 4 is the plane graph of expression heater block.
Fig. 5 is the side view of expression heater block.
Fig. 6 (a) is the plane graph of an example of expression thermal insulation barriers, and Fig. 6 (b) is the B-B line sectional view of Fig. 6 (a).
To be expression be fixed on the amplification stereogram of major part of an example of the structure on the thermal insulation barriers with the connecting plate of the end of heating resistor to Fig. 7 (a), and Fig. 7 (b) is the sectional view of expression stationary state.
Fig. 8 is the sectional view that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.
Fig. 9 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.
Figure 10 (a) is that expression utilizes anti-down pin to keep the part stereogram of structure of the protuberance of heating resistor, and Figure 10 (b) is the concise and to the point stereogram of the anti-down pin of expression.
Figure 11 (a) and (b) are stereograms of other example of the anti-down pin of expression.
Figure 12 (a) is that expression utilizes anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices to keep the part stereogram of structure of the protuberance of heating resistor, and Figure 12 (b) is the concise and to the point stereogram of the anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices of expression.
Figure 13 is the part stereogram of other example of expression thermal insulation barriers.
Figure 14 (a) is the sectional view of an example of the existing heater of expression, and Figure 14 (b) is the inner peripheral surface figure of expression heater.
Embodiment
Below, be elaborated to being used to implement optimum way of the present invention based on accompanying drawing.Fig. 1 is the longitudinal section of schematic representation as the vertical heat processing apparatus of embodiment of the present invention, Fig. 2 is that cross-sectional view amplifies in the A portion of presentation graphs 1, Fig. 3 is that longitudinal section amplifies in expression A portion, and Fig. 4 is the plane graph of expression heater block, and Fig. 5 is the side view of expression heater block.
In Fig. 1, label 1 expression be vertical heat processing apparatus as one of semiconductor-fabricating device, this annealing device 1 has can once accommodate a plurality of handled objects (for example semiconductor wafer w) and it is implemented the heat treated vertical heat treatment furnace 2 of oxidation, diffusion, decompression CVD etc.This heat-treatment furnace 2 comprises: be used to accommodate wafer w and to its container handling of heat-treating (being called reaction tube) 3; Be provided with and the heater cylindraceous that be used for heated chip w (heater) 5 of mode with the outside that covers this container handling 3.
Above-mentioned annealing device 1 has the substrate 6 that is used to be provided with heater 5.Be formed with on this substrate 6 be used for container handling 3 from below the peristome 7 that inserts upward, the mode of sentencing the gap between covered substrate 6 and the container handling 3 at this peristome 7 is provided with the unshowned thermal insulation barriers of figure.
Above-mentioned container handling 3 is made by quartz, forms the upper end and is closed, and the lower end is as fire door 3a and the lengthwise of opening cylindric.Openend at container handling 3 is formed with export-oriented flange 3b, and this flange 3b is supported by aforesaid substrate 6 by scheming unshowned flange pressing piece.The container handling 3 of illustrative example has importing port (introducing port) 8 that imports processing gas, inertness gas etc. in container handling 3 and the unshowned exhaust port of figure (exhaust outlet) that is used for the gas in the container handling 3 is carried out exhaust in the following side.Import port 8 and be connected with the gas supply source, exhaust port and having can reduce pressure and for example control to 10～10
-8The gas extraction system of the vacuum pump about Torr is connected.
Below container handling 3, be provided with can by elevating mechanism 10A carry out lifting moving, at the lid 10 that above-below direction can open and close, it is used to seal the 3a of lower ending opening portion (fire door) of container handling 3.Be placed with heat-preservation cylinder 11 as the fire door heat preservation component on the top of this lid 10, be placed with the boat body of making as the quartz of keeper 12 on the top of this heat-preservation cylinder 11, being used for carrying a plurality of (for example about 100～150) diameter with predetermined distance at above-below direction for example is the wafer w of 300mm.Lid 10 is provided with and makes the rotating mechanism 13 of boat body 12 with its axle center rotation.Boat body 12 moves by the decline of lid 10 and taken out of (unloading) to the loading area 15 of below in container handling 3, after finish the replacing of wafer w, moving and is moved into (loading) by the rising of lid 10 and arrive in the processing container 3.
As Fig. 2～shown in Figure 5, above-mentioned heater 5 comprises: thermal insulation barriers 16 cylindraceous; The shelf portion 17 of the ditch shape that forms along direction of principal axis (above-below direction in the illustrated example) multistage ground at the inner peripheral surface of this thermal insulation barriers 16; And along the heater block (heater wire, heating resistor) 18 of each shelf portion 17 configurations.Thermal insulation barriers for example is made up of the inorfil that contains silicon dioxide, aluminium oxide or silicic acid aluminium oxide.For thermal insulation barriers, consider the installation of heater block and the assembling of heater, preferably be divided into two parts about divisional plane 16a quilt by the longitudinal direction extension.
Be equipped with pin parts 20 on above-mentioned thermal insulation barriers 16, these pin parts 20 are used for appropriate intervals above-mentioned heater block 18 being kept, and make above-mentioned heater block 18 move and do not come off or deviate from from shelf portion 17 at radial direction.Inner peripheral surface at above-mentioned cylindric thermal insulation barriers 16, pitch multistage ground with regulation on direction of principal axis is formed with the annular groove portion 21 concentric with it, is formed at along the above-mentioned shelf portion 17 of circumferencial direction ring-shaped continuous between the ditch portion 21 of the ditch portion 21 on adjacent top and bottom.Be provided with between the upper and lower of the heater block 18 in above-mentioned ditch portion 21 and the inwall 21a of ditch portion 21 and the heater block 18 and allow that heater block 18 carries out enough gaps that thermal expansion contraction and radial direction move, in addition, cooling air in the time of can making forced air-cooling by these gaps is back to the back side of heater block 18, thereby cools off heater block 18 effectively.
For above-mentioned pin parts 20, it comprises a pair of 20b of foot of the 18b of paddy portion (recess) of the inner peripheral surface that utilizes base portion 20a to support heater block 18, and forms the side and be " コ " word shape, and the 20b of this two foot penetrates into the outside from the inboard of thermal insulation barriers 16.Thereby the crooked round about mutually card of the end 20c of the 20b of this two foot ends on the outer peripheral face of thermal insulation barriers 16.Pin parts 20 are preferably and heater block 18 identical materials.In addition, as shown in Figure 3, roughly half is housed in the ditch portion 21 preferred heater block 18 with the outside of radial direction, and roughly half exposes outside ditch portion 21 with the inboard of radial direction.
Above-mentioned heater block 18 be not as existing heater block on above-below direction helically continuous, but as Fig. 2 or as shown in Figure 3, be configured on the shelf portion 17 of each section, and terminate at each section.Therefore, heater block 18 can not move downwards because of deadweight and accumulate (accumulation).In addition, as shown in Figure 5, for heater block 18, between adjacent epimere and hypomere, connect (continuously), each of a plurality of sections thereby (in the illustrated example being 7 sections) is connected in series, and the terminal 18r of the top 18e of the hypomere of each group of a plurality of sections and epimere is connected terminal board 22 connections of usefulness respectively with electrode.Thus, heater 5 constitutes along above-below direction and will be divided into a plurality of zones in the heat-treatment furnace 2 so that can carry out temperature control.
The end of heater block 18 and connecting plate 23 engage by the welding mode.Above-mentioned terminal board 22 is configured to connect diametrically thermal insulation barriers 16.Above-mentioned connecting plate 23 for prevent and the end of heater block 18 between weld portion be exposed under the high temperature and preferably be embedded in the thermal insulation barriers 16.In addition, as the continuous pattern of heater block 18, also can be suitable for above-mentioned situation in addition.Above-mentioned terminal board 22 and connecting plate 23 be by constituting with heater block 18 identical materials, from preventing to fuse and suppressing the viewpoint of thermal discharge, is preferably formed tabular into required sectional area.
Strengthen thermal insulation barriers 16 when keeping thermal insulation barriers 16 shapes, as shown in Figure 1, the crust (shell) 28 of for example stainless steel that the outer peripheral face of thermal insulation barriers 16 is made of metal covers.In addition, in order to suppress the thermal impact to the heater outside, the outer peripheral face of crust 28 covers by water collar 30.The top of thermal insulation barriers 16 is provided with the top thermal insulation barriers 31 that covers it, is provided with the top board 32 that the stainless steel at the top (upper end) that covers crust 28 is made on the top of this top thermal insulation barriers 31.
, the wafer rapid cooling handles rapidization to improve output for thereby being made, in heater 5, be provided with the heat-extraction system 35 that the atmosphere gas in the space 33 between heater 5 and the container handling 3 is discharged to the outside, and the forced air-cooling device 36 of air to force to cool off that in above-mentioned space 33, imports normal temperature (20～30 ℃).Above-mentioned gas extraction system 35 mainly is made of the exhaust outlet 37 on the top that for example is arranged on heater 5 and the unshowned heat extraction pipe of figure that connects this exhaust outlet 37 and scheme unshowned factory gas extraction system.In the heat extraction pipe, be provided with unshowned vented drum blower fan of figure and heat exchanger.
Above-mentioned forced air-cooling device 36 comprises: a plurality of ring-type streams 38 that form along short transverse between above-mentioned thermal insulation barriers 16 and crust 28; With the forced air-cooling air squit hole 40 that is arranged on the thermal insulation barriers 16, be used for from the centroclinal direction ejection air of each ring-type stream 38, thereby the circumferencial direction in above-mentioned space 33 produces cycle stream to thermal insulation barriers 16.Above-mentioned ring-type stream 38 is pasted with the thermal insulation barriers 41 of band shape or ring-type on the outer peripheral face of thermal insulation barriers 16, perhaps the outer peripheral face by ring-type cutting thermal insulation barriers 16 forms.Above-mentioned air squit hole 40 as on the shelf portion 17 between the heater block 18 of adjacency up and down, forms in the mode of radially inside and outside perforation in thermal insulation barriers 16 preferably shown in Fig. 6 (a) and (b).By above-mentioned air squit hole 40 is arranged on the shelf portion 17, air is ejected in the above-mentioned space 33 and can not damage heater block ground.
On the outer peripheral face of above-mentioned crust 28, be provided with a common unshowned service of figure that is used for distributing the supply cooling fluid, on crust 28, be formed with in the connection service and the connected entrance of each ring-type stream 38 to each ring-type stream 38 along short transverse.Service is by open and close valve, be used to attract in the clean room as the air of cooling fluid and it carried out unshowned cooling fluid supply source of figure (for example forced draft fan) that force feed supplies with being connected.
Heat-treatment furnace 2 or vertical heat processing apparatus 1 according to said structure comprise: be used to accommodate wafer w and to its container handling of heat-treating 3; With the cylindric heater 5 that is used for heated chip w that is provided with in the mode on every side that covers this container handling 3.Above-mentioned heater 5 comprises: thermal insulation barriers 16 cylindraceous; The shelf portion 17 of the ditch shape that on the inner peripheral surface of this thermal insulation barriers 16, forms along direction of principal axis multistage ground; And along the heater block 18 of each shelf portion 17 configurations.Above-mentioned heater block 18 forms band shape in the mode of waveform, be equipped with pin parts 20 on above-mentioned thermal insulation barriers 16, these pin parts 20 are so that above-mentioned heater block 18 can move on the radial direction of heater 5 and above-mentioned heater block 18 does not keep it with proper spacing from the mode that shelf portion 17 comes off.Therefore, undulatory heater block 5 is set, can carries out heating and cooling rapidly and improve durability and reduce cost with the state that on the shelf portion 17 of each section of the inner peripheral surface of thermal insulation barriers 16, exposes.By using undulatory heater block 18, can increase the ratio of components list area effectively, realize reducing the load of heater block by the reduction of heater table surface temperature, can suppress disrumpent feelings.Therefore, in heater block 18, drop into more powerful air blast and can heating up rapidly.In addition, owing to suppressed broken string, thus improved durability and long lifetime, and can adopt cheap kanthals material as heater block 18, to realize the reduction of cost.
On the shelf portion 17 about the conduct in above-mentioned thermal insulation barriers 16 between the heater block 18 of adjacency, owing to be formed with the forced air-cooling air squit hole 40 that connects this shelf portion 17 along inward-outward direction, air easily do not sprayed so can not damage heater block.Above-mentioned thermal insulation barriers 16 is cut apart by two by the divisional plane 16a of longitudinal direction extension, cut apart because above-mentioned heater block 18 is also corresponding with thermal insulation barriers, thus can at an easy rate the heater block group be paid on thermal insulation barriers, to improve associativity.
To be expression be fixed on the figure of an example of the structure on the thermal insulation barriers with the connecting plate of the end of heating resistor to Fig. 7, and Fig. 7 (a) is the amplification stereogram of expression major part, and Fig. 7 (b) is the sectional view of expression stationary state.In order to suppress and to prevent that the part (U turning part) of turning back of heater block 18 from being that above-mentioned connecting plate 23 deforms, connecting plate 23 utilizes the fixed part (being the pin of " コ " word shape in the illustrative example) 45 of pin etc. and is fixed on end (the cutting apart face) 16a of above-mentioned thermal insulation barriers 16, and above-mentioned connecting plate 23 is provided with the card extension portion 46 on the outer peripheral face that card hangs over above-mentioned thermal insulation barriers 16.
Fig. 8 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.End at thermal insulation barriers 16 is fixed with connecting plate 23 by fixed part 45, and is provided with auxiliary thermal insulation barriers 47 in the mode that covers this connecting plate 23.Auxiliary thermal insulation barriers 47 is positioned at or is filled between the end (cutting apart face) of thermal insulation barriers 16.As fixed part 45, the pipe that except that pin, can also use, pole, angle rod etc.
Fig. 9 (a) and (b) are sectional views that expression is fixed on the connecting plate of the end of heating resistor other example of the structure on the thermal insulation barriers.On connecting plate 23, be formed with and be inserted in thermal insulation barriers 16 or the auxiliary thermal insulation barriers 47 and fixing stator 48.This stator 48 for example bends to the right angle by the top ends with connecting plate 23 and forms.End at thermal insulation barriers 16 is provided with auxiliary thermal insulation barriers 47 in the mode that covers connecting plate 23.Though preferably stator 48 is inserted into the side (with reference to Fig. 9 (b)) of thermal insulation barriers 16, also can be inserted into the side (with reference to Fig. 9 (a)) of auxiliary thermal insulation barriers 47.
Figure 10 is that expression utilizes anti-down pin to keep the structure chart of the protuberance of heating resistor, and Figure 10 (a) is the part stereogram, and Figure 10 (b) is the concise and to the point stereogram of anti-down pin.Thermal insulation barriers 16 is provided with anti-down pin 49, and it is used to keep, and makes the protuberance 18a of appropriate location that becomes the heater block 18 of waveform from the inner peripheral surface sag and swell of thermal insulation barriers 16 not fall down downwards.This anti-down pin 49 carries out bending machining by the wire rod to steel wire etc. and forms.Article one, bending wire becomes two parts, it is further bent to " コ " word shape, the top bend is pushed enlarge the feasible expansion section 49a that becomes ring-type or general triangular.The protuberance 18a of heater block 18 is accepted in the inboard of " コ " word shape part 49b of this anti-down pin 49, and the expansion section 49a of below is positioned near thermal insulation barriers 16 sides top of ditch portion 21 for example or shelf portion 17.Last two ends 49c, the 49c of anti-down pin 49 connect thermal insulation barriers 16 and side-prominent to outer peripheral face, and these two ends 49c, 49c only block outer peripheral face at thermal insulation barriers 16 as card extension portion by bending right and left.
By such installation method, anti-down pin 49 along the heater block 18 of thermal insulation barriers 16 circumferentially with appropriate intervals and thermal insulation barriers 16 axially on dispose multiple row and for example dispose 3 row on the thermal insulation barriers at folk prescription.According to above-mentioned anti-down pin 49, can prevent that heater block 18 from toppling over or sagging, thus, can reduce the degree of depth of ditch portion 21 of thermal insulation barriers 16 and even the overhang of shelf portion (eaves portion) 17, even if do not have ditch portion 21 or shelf portion 17 also passable.
Figure 11 is a stereogram of expressing other example of anti-down pin.As anti-down pin 49, a wire material is bent to " コ " word shape (with reference to Figure 11 (a)), perhaps a wire material is bent to two parts, and it is bent to " コ " word shape (with reference to Figure 11 (b)).In addition, with two ends 49,49c bending with as card extension portion.
Figure 12 is that expression utilizes anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices to keep the structure chart of the protuberance of heating resistor, and Figure 12 (a) is that part stereogram, Figure 12 (b) are the concise and to the point stereograms of anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices.Thermal insulation barriers 16 is provided with anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 50, and it is used to support, and makes not fall down downwards from the bottom of protuberance 18a of appropriate location that the inner peripheral surface sag and swell of thermal insulation barriers 16 becomes the heater block 18 of waveform.Should for example be made of the rectangular slab that pottery is made by anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 50, preferably an end of its length direction is formed with and is used for thrusting the sharp-pointed 50a of portion that thermal insulation barriers is fixed.Horizontal support is carried out in the bottom of protuberance 18a by 50 pairs of heater blocks 18 of this anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, can prevent that heater block 18 from toppling over or sagging, same as the previously described embodiments thus, even if do not have ditch portion 21 or shelf portion 17 also passable.
Figure 13 is the stereogram of other example of expression thermal insulation barriers.Thermal insulation barriers 16 as heater 5, because exist because caused internal stress causes producing be full of cracks on inner peripheral surface situation is shunk in thermal expansion, so, in order to prevent this situation, as shown in figure 12, preferably on inner peripheral surface, be formed with along axial otch (slit) 42.In addition, consider the associativity of heater, preferred thermal insulation barriers 16 at the lower position of each shelf portion 17 along being cut apart up and down.Promptly, thermal insulation barriers 16 is made of the block 16a that is divided into multistage along above-below direction, on the shelf portion 17 of first section block 16a, heater block is set, overlapping then second section block 16a also is provided with heater block 18 on the shelf portion 17 of this block 16a of second section, adopt this mode easily and well heater block 18 to be arranged on the shelf portion 17 of each section, thereby improve associativity.At this moment, preferably form the recess 43a and the protuberance 43b of the location usefulness that is bonded with each other in the mode of opposite face at the block 16a upper edge Zhou Fangxiang of adjacency up and down.
In addition, the present invention is not limited to above-mentioned execution mode, can carry out various design alterations to it in the scope of purport of the present invention.For example as container handling, also can with heating resisting metal with ingress pipe portion and blast pipe portion for example the cylindric collector (house steward) made of stainless steel be connected to the bottom, also can be the structure of dual pipe in addition.
Claims (20)
1. a heat-treatment furnace is characterized in that, comprising:
Be used to take in handled object and to its container handling of heat-treating; With
With the mode heater cylindraceous that be provided with, that be used to heat handled object of the periphery that covers this container handling,
Described heater has thermal insulation barriers cylindraceous and along the heating resistor of the inner peripheral surface of this thermal insulation barriers configuration,
Described heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent,
Be equipped with the pin parts on described thermal insulation barriers, these pin parts keep described heating resistor with appropriate intervals, make described heating resistor upwards to move in the footpath of heater.
2. heat-treatment furnace according to claim 1 is characterized in that:
Described pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, and this each foot connects thermal insulation barriers laterally from the inboard, and only block the outer peripheral face at thermal insulation barriers in outside curve.
3. heat-treatment furnace according to claim 1 is characterized in that:
On the inner peripheral surface of described thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of described heating resistor thus.
4. heat-treatment furnace according to claim 1 is characterized in that:
On described thermal insulation barriers, between the heating resistor of adjacency up and down, be formed with forced air-cooling air squit hole inside and outside a plurality of perforations with appropriate intervals along Zhou Fangxiang.
5. heat-treatment furnace according to claim 1 is characterized in that:
Described thermal insulation barriers is divided into left and right sides two parts by the divisional plane that extends longitudinally, the corresponding left and right sides two parts that also are divided into of described heating resistor with thermal insulation barriers, and its up and down the heating resistor of adjacency make with the mutual end of this heating resistor by connecting plate and be connected to each other, this connecting plate is configured in cutting apart on the face of described thermal insulation barriers.
6. heat-treatment furnace according to claim 5 is characterized in that:
Described connecting plate is fixed on cutting apart on the face of described thermal insulation barriers by the fixed part that is made of pin.
7. heat-treatment furnace according to claim 5 is characterized in that:
Described connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on described thermal insulation barriers.
8. heat-treatment furnace according to claim 5 is characterized in that:
Described connecting plate is provided with the stator that enters into described thermal insulation barriers and be fixed.
9. heat-treatment furnace according to claim 1 is characterized in that:
Described thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep described heating resistor.
10. heat-treatment furnace according to claim 1 is characterized in that:
Described thermal insulation barriers is provided with the bottom of the peak portion that is used to support described heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
11. a vertical heat processing apparatus is characterized in that, comprising:
Heat-treatment furnace, this heat-treatment furnace have the bottom as fire door and open, be used to accommodate handled object and to the container handling of its lengthwise of heat-treating and be arranged on this container handling periphery, be used to heat the heater cylindraceous of described handled object;
Be used to seal the lid of described fire door;
Be positioned on this lid, be used for the keeper that multistage keeps handled object; With
Elevating mechanism, this elevating mechanism are used to make described lid lifting, with the switching of carrying out described lid and carry out moving into of keeper with respect to described container handling and take out of,
Described heater has thermal insulation barriers cylindraceous and is configured in heating resistor on the inner peripheral surface of this thermal insulation barriers,
Described heating resistor is processed into waveform and has peak portion and the shoestring of paddy portion constitutes by being bent,
Be equipped with the pin parts on described thermal insulation barriers, these pin parts keep described heating resistor with appropriate intervals, make described heating resistor upwards to move in the footpath of heater.
12. vertical heat processing apparatus according to claim 11 is characterized in that:
Described pin parts form " コ " word shape with a pair of foot for the paddy portion that supports heating resistor, and this each foot connects thermal insulation barriers laterally from the inboard, and only block the outer peripheral face at thermal insulation barriers in outside curve.
13. vertical heat processing apparatus according to claim 11 is characterized in that:
On the inner peripheral surface of described thermal insulation barriers, along above-below direction with appropriate intervals be formed with a plurality of on Zhou Fangxiang continuous trenches, accommodate all or part of of described heating resistor thus.
14. vertical heat processing apparatus according to claim 11 is characterized in that:
On described thermal insulation barriers, between the heating resistor of adjacency up and down, be formed with forced air-cooling air squit hole inside and outside a plurality of perforations with appropriate intervals along Zhou Fangxiang.
15. vertical heat processing apparatus according to claim 11 is characterized in that:
Described thermal insulation barriers is divided into left and right sides two parts by the divisional plane that extends longitudinally, the corresponding left and right sides two parts that also are divided into of described heating resistor with thermal insulation barriers, and its up and down the heating resistor of adjacency make with the mutual end of this heating resistor by connecting plate and be connected to each other, this connecting plate is configured in cutting apart on the face of described thermal insulation barriers.
16. vertical heat processing apparatus according to claim 15 is characterized in that:
Described connecting plate is fixed on cutting apart on the face of described thermal insulation barriers by the fixed part that is made of pin.
17. vertical heat processing apparatus according to claim 15 is characterized in that:
Described connecting plate is provided with the card extension portion on the outer peripheral face that card is hung on described thermal insulation barriers.
18. vertical heat processing apparatus according to claim 15 is characterized in that:
Described connecting plate is provided with the stator that enters into described thermal insulation barriers and be fixed.
19. vertical heat processing apparatus according to claim 11 is characterized in that:
Described thermal insulation barriers is provided with the anti-down pin of the peak portion that is used to keep described heating resistor.
20. vertical heat processing apparatus according to claim 11 is characterized in that:
Described thermal insulation barriers is provided with the bottom of the peak portion that is used to support described heating resistor so that its anti-a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices that does not fall down downwards.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007072477 | 2007-03-20 | ||
| JP2007-072477 | 2007-03-20 | ||
| JP2007072477 | 2007-03-20 | ||
| JP2008-025113 | 2008-02-05 | ||
| JP2008025113A JP5248874B2 (en) | 2007-03-20 | 2008-02-05 | Heat treatment furnace and vertical heat treatment equipment |
| JP2008025113 | 2008-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101312123A true CN101312123A (en) | 2008-11-26 |
| CN101312123B CN101312123B (en) | 2012-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101003779A Active CN101312123B (en) | 2007-03-20 | 2008-03-20 | Heat processing furnace and vertical-type heat processing apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5248874B2 (en) |
| KR (1) | KR101117016B1 (en) |
| CN (1) | CN101312123B (en) |
| TW (1) | TWI392843B (en) |
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| CN102137521A (en) * | 2010-01-25 | 2011-07-27 | 蒂尔克&希尔英格有限公司 | Electric heater |
| CN102842523A (en) * | 2011-06-21 | 2012-12-26 | 霓佳斯株式会社 | Heat treatment furnace and heat treatment apparatus |
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| CN110087354A (en) * | 2018-01-26 | 2019-08-02 | 鸿成国际科技股份有限公司 | A kind of heater supporter |
| CN110444489A (en) * | 2018-05-02 | 2019-11-12 | 东京毅力科创株式会社 | Annealing device |
| CN112414107A (en) * | 2020-11-04 | 2021-02-26 | 北京北方华创微电子装备有限公司 | Vertical heat treatment equipment and furnace body loading and unloading method and transfer device thereof |
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| KR101096602B1 (en) * | 2009-07-21 | 2011-12-20 | 가부시키가이샤 히다치 고쿠사이 덴키 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI392843B (en) | 2013-04-11 |
| KR20080085744A (en) | 2008-09-24 |
| TW200914783A (en) | 2009-04-01 |
| JP2008263170A (en) | 2008-10-30 |
| KR101117016B1 (en) | 2012-03-15 |
| JP5248874B2 (en) | 2013-07-31 |
| CN101312123B (en) | 2012-06-20 |
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