CN100552464C - 导电图案检查装置 - Google Patents

导电图案检查装置 Download PDF

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Publication number
CN100552464C
CN100552464C CNB2004100691699A CN200410069169A CN100552464C CN 100552464 C CN100552464 C CN 100552464C CN B2004100691699 A CNB2004100691699 A CN B2004100691699A CN 200410069169 A CN200410069169 A CN 200410069169A CN 100552464 C CN100552464 C CN 100552464C
Authority
CN
China
Prior art keywords
pattern
electrode
conductive pattern
voltage
sensor electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100691699A
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English (en)
Chinese (zh)
Other versions
CN1576870A (zh
Inventor
小原徹
板垣卓男
藤井昌幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNION ARROW TECHNOLOGIES Inc
Original Assignee
Tokyo Cathode Inst K K
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Tokyo Cathode Inst K K filed Critical Tokyo Cathode Inst K K
Publication of CN1576870A publication Critical patent/CN1576870A/zh
Application granted granted Critical
Publication of CN100552464C publication Critical patent/CN100552464C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CNB2004100691699A 2003-07-04 2004-07-05 导电图案检查装置 Expired - Fee Related CN100552464C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003270954A JP4562358B2 (ja) 2003-07-04 2003-07-04 導電パターン検査装置
JP2003270954 2003-07-04

Publications (2)

Publication Number Publication Date
CN1576870A CN1576870A (zh) 2005-02-09
CN100552464C true CN100552464C (zh) 2009-10-21

Family

ID=34190767

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100691699A Expired - Fee Related CN100552464C (zh) 2003-07-04 2004-07-05 导电图案检查装置

Country Status (4)

Country Link
JP (1) JP4562358B2 (ja)
KR (1) KR101116164B1 (ja)
CN (1) CN100552464C (ja)
TW (1) TWI289674B (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4629531B2 (ja) * 2005-08-03 2011-02-09 日置電機株式会社 短絡検査装置および短絡検査方法
JP5276774B2 (ja) * 2005-11-29 2013-08-28 株式会社日本マイクロニクス 検査方法及び装置
JP5050394B2 (ja) 2006-04-20 2012-10-17 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4915776B2 (ja) * 2006-04-27 2012-04-11 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4730904B2 (ja) * 2006-04-28 2011-07-20 日本電産リード株式会社 基板検査装置及び基板検査方法
JP2008014918A (ja) * 2006-06-30 2008-01-24 Oht Inc 回路パターン検査装置及び回路パターン検査方法
KR100799161B1 (ko) * 2006-07-20 2008-01-29 마이크로 인스펙션 주식회사 비접촉 싱글사이드 프로브와 이를 이용한 패턴전극의 단선및 단락 검사장치 및 그 방법
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置
JP2009121894A (ja) * 2007-11-14 2009-06-04 Fujitsu Ltd 導電体パターンの欠陥検査方法及び欠陥検査装置
JP5387818B2 (ja) * 2008-12-11 2014-01-15 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5122512B2 (ja) * 2009-04-17 2013-01-16 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5391819B2 (ja) * 2009-05-14 2014-01-15 日本電産リード株式会社 タッチパネル検査装置
JP5438538B2 (ja) 2010-02-08 2014-03-12 日本碍子株式会社 異常判定機能付き装置、及び異常判定方法
JP5533169B2 (ja) * 2010-04-13 2014-06-25 日本電産リード株式会社 検査装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP2012238066A (ja) * 2011-05-10 2012-12-06 Japan Display East Co Ltd 静電容量方式のタッチパネル、および表示装置
CN103308817B (zh) * 2013-06-20 2015-11-25 京东方科技集团股份有限公司 阵列基板线路检测装置及检测方法
KR101537563B1 (ko) * 2013-11-06 2015-07-20 마이크로 인스펙션 주식회사 비접촉 프로브를 이용한 패턴전극의 결함 위치 검출 방법
CN104122689A (zh) * 2014-07-29 2014-10-29 深圳市华星光电技术有限公司 一种测试装置及其测试方法
JP6674842B2 (ja) * 2016-05-24 2020-04-01 京セラ株式会社 センサ基板およびセンサ装置
KR101823317B1 (ko) * 2016-07-01 2018-03-14 로체 시스템즈(주) 패널의 배선패턴 검사장치 및 배선패턴 검사방법
CN108226695B (zh) * 2018-01-02 2021-10-15 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
CN111007432B (zh) * 2019-12-12 2022-06-17 芜湖伦丰电子科技有限公司 一种寻找银浆开短路位置的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000227452A (ja) 1999-02-04 2000-08-15 Hioki Ee Corp 回路基板検査装置
JP4450143B2 (ja) 2001-05-24 2010-04-14 オー・エイチ・ティー株式会社 回路パターン検査装置並びに回路パターン検査方法及び記録媒体

Also Published As

Publication number Publication date
TW200508625A (en) 2005-03-01
CN1576870A (zh) 2005-02-09
KR101116164B1 (ko) 2012-03-06
KR20050004046A (ko) 2005-01-12
JP2005024518A (ja) 2005-01-27
TWI289674B (en) 2007-11-11
JP4562358B2 (ja) 2010-10-13

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: CO., LTD. ARROW TECHNOLOGY

Free format text: FORMER OWNER: TOKYO CATHODE INST K. K.

Effective date: 20091204

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20091204

Address after: Okayama County, Japan

Patentee after: UNION ARROW TECHNOLOGIES Inc.

Address before: Tokyo, Japan

Patentee before: TOKYO CATHODE LABORATORY CO.,LTD.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091021