ZA200007009B - Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use. - Google Patents

Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use. Download PDF

Info

Publication number: ZA200007009B
Authority: ZA; South Africa
Prior art keywords: hydrogen peroxide; ppb; less; solution; peroxide solution
Prior art date: 1998-04-21

Application number

ZA200007009A

Other languages

English (en)

Inventor

Fischer Martin Stammer Achim

Stefan Quaiser

Original Assignee

Basf Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-04-21

Filing date

2000-11-29

Publication date

2004-11-17

2000-11-29 Application filed by Basf Ag filed Critical Basf Ag

2004-11-17 Publication of ZA200007009B publication Critical patent/ZA200007009B/en

Links

MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 title claims description 187
238000004519 manufacturing process Methods 0.000 title description 5
238000000034 method Methods 0.000 claims description 79
239000012535 impurity Substances 0.000 claims description 43
239000003054 catalyst Substances 0.000 claims description 30
229910052739 hydrogen Inorganic materials 0.000 claims description 26
239000001257 hydrogen Substances 0.000 claims description 25
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
229910052760 oxygen Inorganic materials 0.000 claims description 22
239000001301 oxygen Substances 0.000 claims description 22
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 20
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
238000002360 preparation method Methods 0.000 claims description 17
239000000758 substrate Substances 0.000 claims description 17
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 16
229910052751 metal Inorganic materials 0.000 claims description 15
239000002184 metal Substances 0.000 claims description 15
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
238000006243 chemical reaction Methods 0.000 claims description 10
239000007789 gas Substances 0.000 claims description 9
239000000463 material Substances 0.000 claims description 9
150000002894 organic compounds Chemical class 0.000 claims description 8
229910052763 palladium Inorganic materials 0.000 claims description 7
BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 claims description 5
229910052921 ammonium sulfate Inorganic materials 0.000 claims description 5
235000011130 ammonium sulphate Nutrition 0.000 claims description 5
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
230000002378 acidificating effect Effects 0.000 claims description 4
229910052799 carbon Inorganic materials 0.000 claims description 4
150000001875 compounds Chemical class 0.000 claims description 4
230000007717 exclusion Effects 0.000 claims description 4
239000003153 chemical reaction reagent Substances 0.000 claims description 3
239000012736 aqueous medium Substances 0.000 claims description 2
230000003197 catalytic effect Effects 0.000 claims description 2
230000008929 regeneration Effects 0.000 claims description 2
238000011069 regeneration method Methods 0.000 claims description 2
239000000243 solution Substances 0.000 description 62
239000004065 semiconductor Substances 0.000 description 23
238000004140 cleaning Methods 0.000 description 17
238000003786 synthesis reaction Methods 0.000 description 15
239000012498 ultrapure water Substances 0.000 description 15
230000015572 biosynthetic process Effects 0.000 description 14
239000012429 reaction media Substances 0.000 description 14
229910021642 ultra pure water Inorganic materials 0.000 description 12
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 10
238000001704 evaporation Methods 0.000 description 9
-1 stirred reactors Chemical compound 0.000 description 9
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
239000002253 acid Substances 0.000 description 8
238000009833 condensation Methods 0.000 description 8
230000005494 condensation Effects 0.000 description 8
238000004821 distillation Methods 0.000 description 8
230000008020 evaporation Effects 0.000 description 8
PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 7
150000004056 anthraquinones Chemical class 0.000 description 7
150000001768 cations Chemical class 0.000 description 7
230000006798 recombination Effects 0.000 description 7
238000005215 recombination Methods 0.000 description 7
239000000126 substance Substances 0.000 description 7
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
150000001450 anions Chemical class 0.000 description 6
239000000203 mixture Substances 0.000 description 6
239000000470 constituent Substances 0.000 description 5
150000002739 metals Chemical class 0.000 description 5
238000000746 purification Methods 0.000 description 5
238000001179 sorption measurement Methods 0.000 description 5
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
229910019142 PO4 Inorganic materials 0.000 description 4
QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 4
229910000147 aluminium phosphate Inorganic materials 0.000 description 4
239000002585 base Substances 0.000 description 4
238000011109 contamination Methods 0.000 description 4
229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
229910000510 noble metal Inorganic materials 0.000 description 4
NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 4
239000010452 phosphate Substances 0.000 description 4
239000000047 product Substances 0.000 description 4
CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 3
239000007864 aqueous solution Substances 0.000 description 3
238000001354 calcination Methods 0.000 description 3
239000003990 capacitor Substances 0.000 description 3
238000005868 electrolysis reaction Methods 0.000 description 3
239000004744 fabric Substances 0.000 description 3
239000011261 inert gas Substances 0.000 description 3
150000002484 inorganic compounds Chemical class 0.000 description 3
239000002609 medium Substances 0.000 description 3
229910021645 metal ion Inorganic materials 0.000 description 3
238000012856 packing Methods 0.000 description 3
229910052697 platinum Inorganic materials 0.000 description 3
229920001343 polytetrafluoroethylene Polymers 0.000 description 3
238000012545 processing Methods 0.000 description 3
239000012495 reaction gas Substances 0.000 description 3
239000011347 resin Substances 0.000 description 3
229920005989 resin Polymers 0.000 description 3
BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 description 2
KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 2
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 2
101150003085 Pdcl gene Proteins 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 2
150000007513 acids Chemical class 0.000 description 2
238000004458 analytical method Methods 0.000 description 2
239000012298 atmosphere Substances 0.000 description 2
239000012045 crude solution Substances 0.000 description 2
238000009792 diffusion process Methods 0.000 description 2
239000010408 film Substances 0.000 description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
229910052737 gold Inorganic materials 0.000 description 2
239000010931 gold Substances 0.000 description 2
150000002431 hydrogen Chemical class 0.000 description 2
229910000039 hydrogen halide Inorganic materials 0.000 description 2
239000012433 hydrogen halide Substances 0.000 description 2
229910010272 inorganic material Inorganic materials 0.000 description 2
238000005342 ion exchange Methods 0.000 description 2
229910052741 iridium Inorganic materials 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
229910052742 iron Inorganic materials 0.000 description 2
239000011859 microparticle Substances 0.000 description 2
229910052757 nitrogen Inorganic materials 0.000 description 2
239000011368 organic material Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
230000001590 oxidative effect Effects 0.000 description 2
239000004033 plastic Substances 0.000 description 2
229920003023 plastic Polymers 0.000 description 2
239000004810 polytetrafluoroethylene Substances 0.000 description 2
238000004076 pulp bleaching Methods 0.000 description 2
230000000717 retained effect Effects 0.000 description 2
229910052703 rhodium Inorganic materials 0.000 description 2
239000010948 rhodium Substances 0.000 description 2
229910001379 sodium hypophosphite Inorganic materials 0.000 description 2
239000003381 stabilizer Substances 0.000 description 2
239000010959 steel Substances 0.000 description 2
238000007669 thermal treatment Methods 0.000 description 2
238000005406 washing Methods 0.000 description 2
238000004065 wastewater treatment Methods 0.000 description 2
238000010626 work up procedure Methods 0.000 description 2
239000002759 woven fabric Substances 0.000 description 2
NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
QIGBRXMKCJKVMJ-UHFFFAOYSA-N 1,4-Benzenediol Natural products OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 1
RZVHIXYEVGDQDX-UHFFFAOYSA-N 9,10-anthraquinone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1 RZVHIXYEVGDQDX-UHFFFAOYSA-N 0.000 description 1
VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
229920001774 Perfluoroether Polymers 0.000 description 1
239000004743 Polypropylene Substances 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
230000002159 abnormal effect Effects 0.000 description 1
230000000274 adsorptive effect Effects 0.000 description 1
230000002411 adverse Effects 0.000 description 1
150000008044 alkali metal hydroxides Chemical class 0.000 description 1
229910052784 alkaline earth metal Inorganic materials 0.000 description 1
150000001342 alkaline earth metals Chemical class 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
239000000956 alloy Substances 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
235000011114 ammonium hydroxide Nutrition 0.000 description 1
ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 1
239000012935 ammoniumperoxodisulfate Substances 0.000 description 1
239000003957 anion exchange resin Substances 0.000 description 1
239000012431 aqueous reaction media Substances 0.000 description 1
230000033228 biological regulation Effects 0.000 description 1
GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
229910052794 bromium Inorganic materials 0.000 description 1
230000005587 bubbling Effects 0.000 description 1
239000001569 carbon dioxide Substances 0.000 description 1
229960004424 carbon dioxide Drugs 0.000 description 1
229910002092 carbon dioxide Inorganic materials 0.000 description 1
239000003729 cation exchange resin Substances 0.000 description 1
238000005119 centrifugation Methods 0.000 description 1
239000003638 chemical reducing agent Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000000052 comparative effect Effects 0.000 description 1
239000012141 concentrate Substances 0.000 description 1
230000001143 conditioned effect Effects 0.000 description 1
238000010924 continuous production Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
229920001577 copolymer Polymers 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
229910001431 copper ion Inorganic materials 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
230000008878 coupling Effects 0.000 description 1
238000010168 coupling process Methods 0.000 description 1
238000005859 coupling reaction Methods 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
230000007547 defect Effects 0.000 description 1
239000007857 degradation product Substances 0.000 description 1
230000002939 deleterious effect Effects 0.000 description 1
238000007865 diluting Methods 0.000 description 1
238000007598 dipping method Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005530 etching Methods 0.000 description 1
239000011552 falling film Substances 0.000 description 1
238000001914 filtration Methods 0.000 description 1
239000012530 fluid Substances 0.000 description 1
239000011888 foil Substances 0.000 description 1
238000001640 fractional crystallisation Methods 0.000 description 1
239000000446 fuel Substances 0.000 description 1
229910052736 halogen Inorganic materials 0.000 description 1
150000002367 halogens Chemical class 0.000 description 1
229910000042 hydrogen bromide Inorganic materials 0.000 description 1
238000005984 hydrogenation reaction Methods 0.000 description 1
125000000687 hydroquinonyl group Chemical class C1(O)=C(C=C(O)C=C1)* 0.000 description 1
230000001939 inductive effect Effects 0.000 description 1
150000007529 inorganic bases Chemical class 0.000 description 1
229910052500 inorganic mineral Inorganic materials 0.000 description 1
230000010354 integration Effects 0.000 description 1
238000004255 ion exchange chromatography Methods 0.000 description 1
239000003456 ion exchange resin Substances 0.000 description 1
229920003303 ion-exchange polymer Polymers 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
239000007788 liquid Substances 0.000 description 1
238000001459 lithography Methods 0.000 description 1
239000000314 lubricant Substances 0.000 description 1
238000004949 mass spectrometry Methods 0.000 description 1
238000005374 membrane filtration Methods 0.000 description 1
239000011707 mineral Substances 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910052756 noble gas Inorganic materials 0.000 description 1
150000002835 noble gases Chemical class 0.000 description 1
239000003960 organic solvent Substances 0.000 description 1
239000003791 organic solvent mixture Substances 0.000 description 1
229910052762 osmium Inorganic materials 0.000 description 1
150000002978 peroxides Chemical class 0.000 description 1
230000001699 photocatalysis Effects 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
238000005498 polishing Methods 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
229920001155 polypropylene Polymers 0.000 description 1
229920002981 polyvinylidene fluoride Polymers 0.000 description 1
238000011084 recovery Methods 0.000 description 1
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
229910052707 ruthenium Inorganic materials 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
238000000926 separation method Methods 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
150000003377 silicon compounds Chemical class 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
239000011734 sodium Substances 0.000 description 1
230000006641 stabilisation Effects 0.000 description 1
238000011105 stabilization Methods 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
238000012360 testing method Methods 0.000 description 1
229910052723 transition metal Inorganic materials 0.000 description 1
150000003624 transition metals Chemical class 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1
239000010457 zeolite Substances 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
- C01B15/0135—Purification by solid ion-exchangers or solid chelating agents
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/029—Preparation from hydrogen and oxygen

Landscapes

Organic Chemistry (AREA)
Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Catalysts (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

ZA200007009A 1998-04-21 2000-11-29 Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use. ZA200007009B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19817794A DE19817794A1 (de)	1998-04-21	1998-04-21	Hochreine wässrige Wasserstoffperoxid-Lösungen, Verfahren zu ihrer Herstellung und ihre Verwendung

Publications (1)

Publication Number	Publication Date
ZA200007009B true ZA200007009B (en)	2004-11-17

Family

ID=7865323

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ZA200007009A ZA200007009B (en)	1998-04-21	2000-11-29	Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use.

Country Status (12)

Country	Link
US (1)	US6592840B1 (no)
EP (1)	EP1080036A1 (no)
JP (1)	JP2002512168A (no)
KR (1)	KR20010042857A (no)
CN (1)	CN1306495A (no)
AU (1)	AU763221B2 (no)
BR (1)	BR9909820A (no)
CA (1)	CA2328952A1 (no)
DE (1)	DE19817794A1 (no)
NO (1)	NO20005281L (no)
WO (1)	WO1999054254A1 (no)
ZA (1)	ZA200007009B (no)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10144013A1 (de) *	2001-09-07	2003-03-27	Basf Ag	Verfahren zur Aufarbeitung einer wässrigen Wasserstoffperoxid-Lösung aus einer Direktsynthese
US7722847B2 (en) *	2002-09-30	2010-05-25	Evonik Degussa Gmbh	Aqueous hydrogen peroxide solutions and method of making same
EP1520839A1 (en) *	2003-10-02	2005-04-06	SOLVAY (Société Anonyme)	Process for the purification of aqueous peroxygen solutions, solutions obtainable thereby and their use
IT1395127B1 (it) *	2009-07-30	2012-09-05	Saipem Spa	Procedimento per il recupero di ammoniaca da una corrente gassosa
US8459275B2 (en) *	2009-09-23	2013-06-11	Ecolab Usa Inc.	In-situ cleaning system
US8937037B2 (en)	2011-03-02	2015-01-20	Ecolab Usa Inc.	Electrochemical enhancement of detergent alkalinity
CN109205572B (zh) *	2017-06-30	2021-03-05	中国石油化工股份有限公司	一种纯化双氧水的方法
CN107482081B (zh) *	2017-07-20	2020-06-12	东莞南玻光伏科技有限公司	太阳能电池片及其制备方法和太阳能电池
CN113620255B (zh) *	2021-08-18	2022-09-20	华中科技大学	一种光催化***及其应用
EP4163252A1 (en) *	2021-10-06	2023-04-12	Solvay SA	Method for purifying an aqueous hydrogen peroxide solution

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3152052A (en)	1961-08-04	1964-10-06	Fmc Corp	Distillation of hydrogen peroxide
JPS514097A (en) *	1974-07-02	1976-01-13	Tokuyama Soda Kk	Kasankasuisono seizohoho
CA1146148A (en)	1981-06-30	1983-05-10	James Den Hartog	Ordered bed packing module
US4471014A (en)	1981-06-30	1984-09-11	Atomic Energy Of Canada Limited	Ordered bed packing module
ATE25839T1 (de) *	1983-06-22	1987-03-15	Du Pont	Verfahren zur katalytischen herstellung von wasserstoffperoxid aus sauerstoff und wasserstoff.
EP0201614B1 (de)	1985-05-14	1989-12-27	GebràDer Sulzer Aktiengesellschaft	Reaktor zum Durchführen von heterogenen, katalysierten chemischen Reaktionen
US4999179A (en) *	1988-12-26	1991-03-12	Mitsubishi Gas Chemical Company, Inc.	Method for purifying impure aqueous hydrogen peroxide solution
JPH0672740B2 (ja)	1989-01-20	1994-09-14	ル・エール・リクイツド・ソシエテ・アノニム・プール・ル・エチユド・エ・ル・エクスプルワテション・デ・プロセデ・ジエオルジエ・クロード	空気分離及び超高純度酸素製造方法並びに装置
US5112702A (en) *	1990-03-19	1992-05-12	E. I. Du Pont De Nemours And Company	Electrochemical synthesis of H2 O2
DE69019731T2 (de)	1990-03-30	1996-01-18	Koch Eng Co Inc	Struktur und Verfahren zum katalytischen Reagieren von Fluidströmen in einem Stoffaustauschapparat.
BE1005198A3 (fr)	1991-08-27	1993-05-25	Solvay Interox	Procede pour l'obtention de solutions aqueuses epurees de peroxyde d'hydrogene.
IT1270875B (it) *	1993-04-29	1997-05-13	Getters Spa	Procedimento di purificazione dell'idrogeno e purificatore relativo
DE69309448T2 (de) *	1992-11-20	1997-08-07	Showa Denko Kk	Verfahren zur herstellung von wasserstoffperoxid
DE4240370C1 (de)	1992-12-01	1994-05-11	Degussa	Verfahren zur Verringerung des Kohlenstoffgehalts wäßriger Wasserstoffperoxidlösungen
US5395522A (en) *	1993-02-23	1995-03-07	Anatel Corporation	Apparatus for removal of organic material from water
TW305821B (no)	1993-09-13	1997-05-21	Mitsubishi Gas Chemical Co
FI97538C (fi)	1995-02-15	1997-01-10	Kemira Chemicals Oy	Menetelmä vetyperoksidin oleellisesti puhtaan vesiliuoksen valmistamiseksi
US5621847A (en) *	1995-05-25	1997-04-15	Texas Instruments Incorporation	Dynamic vacuum evaporation system
JP2002514968A (ja) *	1995-06-05	2002-05-21	スターテック・ベンチャーズ・インコーポレーテッド	半導体プロセス用超高純度過酸化水素のオンサイト生成
US5528906A (en) *	1995-06-26	1996-06-25	The Boc Group, Inc.	Method and apparatus for producing ultra-high purity oxygen
JP3835488B2 (ja) *	1995-09-20	2006-10-18	三菱瓦斯化学株式会社	過酸化水素水溶液中の有機不純物の除去方法
JPH09100106A (ja)	1995-10-02	1997-04-15	Mitsubishi Gas Chem Co Inc	過酸化水素中の有機質不純物除去方法
JP3715371B2 (ja) *	1996-04-08	2005-11-09	三菱化学株式会社	過酸化水素水の精製方法
JPH09278416A (ja)	1996-04-15	1997-10-28	Mitsubishi Gas Chem Co Inc	高純度過酸化水素水溶液の製造法
JPH09278417A (ja)	1996-04-15	1997-10-28	Mitsubishi Gas Chem Co Inc	高純度過酸化水素水溶液の製造法
US5682763A (en)	1996-10-25	1997-11-04	Air Products And Chemicals, Inc.	Ultra high purity oxygen distillation unit integrated with ultra high purity nitrogen purifier

1998
- 1998-04-21 DE DE19817794A patent/DE19817794A1/de not_active Withdrawn
1999
- 1999-04-19 JP JP2000544602A patent/JP2002512168A/ja not_active Withdrawn
- 1999-04-19 CN CN99807654A patent/CN1306495A/zh active Pending
- 1999-04-19 EP EP99920708A patent/EP1080036A1/de not_active Withdrawn
- 1999-04-19 BR BR9909820-2A patent/BR9909820A/pt not_active Application Discontinuation
- 1999-04-19 WO PCT/EP1999/002627 patent/WO1999054254A1/de not_active Application Discontinuation
- 1999-04-19 KR KR1020007011629A patent/KR20010042857A/ko not_active Application Discontinuation
- 1999-04-19 CA CA002328952A patent/CA2328952A1/en not_active Abandoned
- 1999-04-19 US US09/673,247 patent/US6592840B1/en not_active Expired - Fee Related
- 1999-04-19 AU AU38189/99A patent/AU763221B2/en not_active Ceased
2000
- 2000-10-20 NO NO20005281A patent/NO20005281L/no not_active Application Discontinuation
- 2000-11-29 ZA ZA200007009A patent/ZA200007009B/en unknown

Also Published As

Publication number	Publication date
CA2328952A1 (en)	1999-10-28
BR9909820A (pt)	2000-12-19
NO20005281D0 (no)	2000-10-20
JP2002512168A (ja)	2002-04-23
US6592840B1 (en)	2003-07-15
AU763221B2 (en)	2003-07-17
DE19817794A1 (de)	1999-10-28
AU3818999A (en)	1999-11-08
CN1306495A (zh)	2001-08-01
KR20010042857A (ko)	2001-05-25
EP1080036A1 (de)	2001-03-07
WO1999054254A1 (de)	1999-10-28
NO20005281L (no)	2000-11-13

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