WO2021256370A1 - Procédé d'attaque, circuit d'attaque et dispositif d'attaque à déplacement - Google Patents

Procédé d'attaque, circuit d'attaque et dispositif d'attaque à déplacement Download PDF

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Publication number
WO2021256370A1
WO2021256370A1 PCT/JP2021/022113 JP2021022113W WO2021256370A1 WO 2021256370 A1 WO2021256370 A1 WO 2021256370A1 JP 2021022113 W JP2021022113 W JP 2021022113W WO 2021256370 A1 WO2021256370 A1 WO 2021256370A1
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drive
voltage
positive electrode
displacement
negative electrode
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PCT/JP2021/022113
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English (en)
Japanese (ja)
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隆幸 後藤
亮 伊藤
和宗 橘
寛之 清水
純明 岸本
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太陽誘電株式会社
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details

Definitions

  • the present invention relates to a method for driving a dielectric element, a drive circuit, and a displacement drive device.
  • piezoelectric actuators are used as vibration devices for generating tactile sensations.
  • Piezoelectric actuators are attracting particular attention as next-generation tactile module components because they have a high response speed, a wide range of drive frequencies that can be handled, and can express a variety of tactile sensations (for example, Patent Document 1).
  • the drive amplitude of the piezoelectric actuator is smaller than that of the electromagnetic type, and in order to increase the drive amplitude, it is necessary to increase the drive voltage of the piezoelectric element.
  • bipolar (bipolar) drive there is a limitation of the coercive electric field, and there is a problem of depolarization when the drive voltage amplitude is made larger than the coercive electric field.
  • unipolar drive in the polarization direction although it is not affected by the coercive electric field, there is a problem that reliability is impaired when the drive voltage amplitude is excessively increased, and the displacement becomes smaller depending on the number of drives. There was a problem.
  • PZT lead zirconate titanate
  • the lead-free piezoelectric material requires a regulated substance such as Bi or Sb or an expensive material such as Li, Ta or Nb, which poses a problem in terms of cost.
  • an object of the present invention is to provide a drive method, a drive circuit, and a displacement drive device capable of maximizing the displacement amount of the dielectric element within a range that does not impair the reliability. be.
  • the driving method is applied between the positive electrode and the negative voltage of the dielectric element in which the positive voltage and the negative voltage face each other via ceramics exhibiting an electric field-induced strain.
  • a drive voltage waveform having a predetermined drive frequency wherein the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is a voltage between 0 V and the breakdown voltage of the ceramics at the drive frequency.
  • the second drive maximum voltage, which is the other peak voltage of the drive voltage waveform is a voltage between 0.1 times and 0.8 times the coercive electric field of the ceramics in a polarity opposite to the first drive maximum voltage.
  • the drive voltage waveform is applied between the positive electrode and the negative voltage.
  • the drive voltage amplitude can be increased by oscillating a voltage within a range that does not exceed the coercive electric field even in the opposite type to the main drive side, and the variation characteristics due to the imprint effect are reduced. Can be prevented. Therefore, the displacement amount of the dielectric element can be maximized without impairing the drive stability and the drive reliability. Further, in this driving method, ceramics that exhibit electric field-induced strain can be used as the material of the dielectric element, and it is not necessary to use a material having high piezoelectricity and high ferroelectricity, so that the environmental load and the cost load are reduced. It is possible to do.
  • the ceramics may have a coercive electric field of less than 1 kV / mm or a Curie temperature of less than 300 ° C.
  • the drive voltage waveform may be a sine wave, a triangular wave, a harbor sine wave, a Gaussian wave, or a burst wave thereof.
  • the drive circuit according to one embodiment of the present invention is applied between the positive electrode and the negative voltage of the dielectric element in which the positive voltage and the negative voltage face each other via ceramics exhibiting an electric field-induced strain.
  • a drive voltage waveform having a predetermined drive frequency wherein the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is a voltage between 0 V and the breakdown voltage of the ceramics at the drive frequency.
  • the second drive maximum voltage which is the other peak voltage of the drive voltage waveform, is a voltage between 0.1 times and 0.8 times the coercive electric field of the ceramics in a polarity opposite to the first drive maximum voltage.
  • the drive voltage waveform is generated and applied between the positive electrode and the negative voltage.
  • the ceramics may have a coercive electric field of less than 1 kV / mm or a Curie temperature of less than 300 ° C.
  • the displacement drive device includes a dielectric element, a drive object, and a drive circuit.
  • the positive electrode and the negative electrode face each other via ceramics that exhibit electric field-induced strain.
  • the dielectric element is bonded to the driving object.
  • the drive circuit is a drive voltage waveform that is applied between the positive and negative electrodes and has a predetermined drive frequency, and the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is 0 V.
  • the voltage during the breakdown voltage of the ceramics at the drive frequency, and the second drive maximum voltage, which is the other peak voltage of the drive voltage waveform has the polarity opposite to that of the first drive maximum voltage of the ceramics.
  • a drive voltage waveform which is a voltage between 0.1 and 0.8 times the coercive voltage, is generated and applied between the positive and negative electrodes.
  • the ceramics may have a coercive electric field of less than 1 kV / mm or a Curie temperature of less than 300 ° C.
  • the dielectric element and the driving object may form an actuator.
  • the driving method is applied between the positive electrode and the negative voltage of a piezoelectric element in which the positive electrode and the negative voltage face each other via a piezoelectric material made of a piezoelectric material, and is predetermined.
  • a drive voltage waveform having a drive frequency wherein the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is a voltage between 0 V and the breakdown voltage of the piezoelectric body at the drive frequency.
  • the second drive maximum voltage which is the other peak voltage of the drive voltage waveform, is a voltage between 0.1 times and 0.8 times the coercive electric field of the piezoelectric material in a polarity opposite to the first drive maximum voltage.
  • the drive voltage waveform is applied between the positive electrode and the negative electrode.
  • the drive voltage waveform may be a sine wave, a triangular wave, a harbor sine wave, a Gaussian wave, or a burst wave thereof.
  • the drive circuit according to one embodiment of the present invention is applied between the positive voltage and the negative voltage of the piezoelectric element in which the positive voltage and the negative voltage face each other via a piezoelectric material made of a piezoelectric material, and is predetermined.
  • a drive voltage waveform having a drive frequency wherein the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is a voltage between 0 V and the breakdown voltage of the piezoelectric body at the drive frequency.
  • the second drive maximum voltage, which is the other peak voltage of the drive voltage waveform is a voltage between 0.1 times and 0.8 times the coercive electric field of the piezoelectric material in a polarity opposite to the first drive maximum voltage.
  • the drive voltage waveform is generated and applied between the positive electrode and the negative voltage.
  • the displacement drive device includes a piezoelectric element, a vibrating body, and a drive circuit.
  • the piezoelectric element the positive electrode and the negative electrode face each other via a piezoelectric body made of a piezoelectric material.
  • the piezoelectric element is joined to the vibrating body.
  • the drive circuit is a drive voltage waveform that is applied between the positive and negative electrodes and has a predetermined drive frequency, and the first drive maximum voltage, which is the peak voltage of one of the drive voltage waveforms, is 0 V.
  • the second drive maximum voltage which is the voltage between the breakdown voltage of the piezoelectric body at the drive frequency and is the other peak voltage of the drive voltage waveform, has the same polarity as the first drive maximum voltage.
  • a drive voltage waveform which is a voltage between 0.1 and 0.8 times the coercive voltage of the material, is generated and applied between the positive and negative electrodes.
  • the piezoelectric element and the vibrating body constitute a piezoelectric actuator, and the vibrating body may generate a tactile sensation in the vibrating body.
  • the displacement drive device includes a vibration generator.
  • FIG. 1 is a schematic diagram of a displacement drive device 100 according to the present embodiment.
  • the displacement drive device 100 includes a piezoelectric actuator 101 and a drive circuit 102.
  • the piezoelectric actuator 101 is a unimorph type piezoelectric actuator composed of a vibrating body 103 and a piezoelectric element 104.
  • the vibrating body 103 presents a tactile sensation to the user who touches the vibrating body 103.
  • the vibrating body 103 can be a plate-shaped member made of a metal, glass, resin material, or the like, and is, for example, a liquid crystal panel, a housing of an electronic device, or the like.
  • the shape and size of the vibrating body 103 are not particularly limited.
  • the piezoelectric element 104 is joined to the vibrating body 103 to generate vibration.
  • FIG. 2 is a cross-sectional view of the piezoelectric element 104.
  • the piezoelectric element 104 includes a piezoelectric body 111, a positive electrode 112, and a negative electrode 113.
  • the piezoelectric material 111 is made of a piezoelectric material such as PZT (lead zirconate titanate).
  • the positive electrode 112 includes a positive electrode internal electrode 114 and a positive electrode external electrode 115.
  • the positive electrode internal electrode 114 is made of a conductive material, and a plurality of layers are provided in the piezoelectric material 111.
  • the positive electrode external electrode 115 is made of a conductive material, is formed on the surface of the piezoelectric material 111, and is connected to the positive electrode internal electrode 114.
  • the negative electrode 113 includes a negative electrode internal electrode 116 and a negative electrode external electrode 117.
  • the negative electrode internal electrode 116 is made of a conductive material, and a plurality of layers are provided in the piezoelectric material 111.
  • the negative electrode external electrode 117 is made of a conductive material, is formed on the surface of the piezoelectric material 111, and is connected to the negative electrode internal electrode 116.
  • the positive electrode internal electrodes 114 and the negative electrode internal electrodes 116 are alternately arranged and face each other via the piezoelectric material 111.
  • the positive electrode external electrode 115 and the negative electrode external electrode 117 are provided apart from each other on the front surface and the back surface of the piezoelectric element 104.
  • a positive electrode wiring 105 is connected to the positive electrode external electrode 115, and the positive electrode external electrode 115 functions as a positive electrode terminal.
  • the negative electrode wiring 106 is connected to the negative electrode external electrode 117, and the negative electrode external electrode 117 functions as a negative electrode terminal.
  • the piezoelectric element 104 when a voltage is applied between the positive electrode 112 and the negative electrode 113, the piezoelectric body 111 is deformed due to the inverse piezoelectric effect, and vibration occurs.
  • the piezoelectric element 104 may have a laminated structure in which a positive electrode 112 and a negative electrode 113 are alternately laminated via a piezoelectric material 111, or may have another structure.
  • the piezoelectric element 104 can be joined to the vibrating body 103 with a resin or the like. Further, two or more piezoelectric elements 104 may be joined to the vibrating body 103.
  • the drive circuit 102 is connected to the piezoelectric element 104 via the positive electrode wiring 105 and the negative electrode wiring 106, and supplies a drive signal to the piezoelectric element 104. Specifically, the drive circuit 102 generates a drive voltage waveform described later and supplies it between the positive electrode 112 and the negative electrode 113.
  • the displacement drive device 100 has the above configuration.
  • the displacement drive device 100 can be mounted on various electronic devices such as smartphones and tactile function devices.
  • the drive voltage waveform generated by the drive circuit 102 will be described.
  • the drive voltage waveform generated by the drive circuit 102 is a voltage in which the first drive maximum voltage, which is one of the peak voltages, is between 0 V and the breakdown voltage (dielectric breakdown voltage) of the piezoelectric material 111 at the drive frequency.
  • the second drive maximum voltage which is the other peak voltage of the drive voltage waveform, is a voltage between 0.1 times and 0.8 times the coercive electric field of the piezoelectric material in the polarity opposite to the first drive maximum voltage. ..
  • FIG. 3 is a drive voltage waveform generated by the drive circuit 102. As shown in FIG. 3, in this drive voltage waveform, one peak voltage and the other peak voltage have opposite polarities, the positive peak voltage is the first drive maximum voltage Vp +, and the negative peak voltage is the second. The maximum drive voltage is Vp-.
  • the breakdown voltage of the piezoelectric material 111 at the frequency (drive frequency) of the drive voltage waveform is defined as the breakdown voltage BV
  • the breakdown voltage BV on the plus side is defined as BV + as shown in FIG.
  • the coercive electric field of the piezoelectric material constituting the piezoelectric body 111 is defined as the coercive electric field Ec.
  • the positive field Ec is defined as the negative field Ec +
  • the negative field Ec is defined as the negative field Ec-.
  • the drive voltage waveform generated by the drive circuit 102 is a voltage in which the first drive maximum voltage Vp + is larger than 0 V and the breakdown voltage is less than BV +. Further, the second drive maximum voltage Vp-is 0.8 times or more and 0.1 times or less the coercive electric field Ec-. That is, the first drive maximum voltage Vp + and the second drive maximum voltage Vp- satisfy the following (Equation 1) and (Equation 2).
  • Vp +> Ec + is suitable for increasing the displacement amount of the piezoelectric element 104.
  • FIG. 3 shows a drive voltage waveform in which the polarization direction is on the plus side (> 0V), the polarization direction may be on the minus side ( ⁇ 0V).
  • FIG. 4 is a drive voltage waveform generated by the drive circuit 102 in which the polarization direction is on the minus side.
  • the negative peak voltage is the first drive maximum voltage Vp-
  • the positive peak voltage is set.
  • the second drive maximum voltage is Vp +.
  • the breakdown voltage BV on the negative side is defined as BV ⁇ .
  • the positive field Ec is defined as the negative field Ec +
  • the negative field Ec is defined as the negative field Ec-.
  • the first drive maximum voltage Vp- is larger than the breakdown voltage BV- and is less than 0V.
  • the second drive maximum voltage Vp + is 0.1 times or more and 0.8 times or less the coercive electric field Ec +. That is, the first drive maximum voltage Vp- and the second drive maximum voltage Vp + satisfy the following (Equation 3) and (Equation 4).
  • Vp- ⁇ Ec- is suitable for increasing the displacement amount of the piezoelectric element 104.
  • the drive circuit 102 generates the drive voltage waveform shown in FIG. 3 or 4, and supplies the drive voltage waveform between the positive electrode 112 and the negative electrode 113 via the positive electrode wiring 105 and the negative electrode wiring 106.
  • the drive voltage waveform generated by the drive circuit 102 is not limited to the sine wave as shown in FIGS. 3 and 4, and may be any one in which the first drive maximum voltage and the second drive maximum voltage satisfy the above conditions.
  • the drive voltage waveform generated by the drive circuit 102 may be a sine wave, a triangular wave, a harbor sine wave, a Gaussian wave, or a burst wave thereof.
  • FIG. 5 is a graph showing a driving voltage waveform of bipolar driving, which is a conventional driving voltage waveform.
  • FIG. 6 is a graph showing a drive voltage waveform of unipolar drive, which is a conventional drive voltage waveform.
  • the entire drive voltage waveform is on the plus side of 0V, but the whole may be on the minus side of 0V.
  • the dielectric constant at the time of driving decreases due to the imprint effect by continuing to drive with a voltage biased to the plus side or the minus side, and the displacement characteristic deteriorates by continuing to drive. ..
  • the drive voltage waveform (see FIGS. 3 and 4) generated by the drive circuit 102 according to the present embodiment oscillates a voltage within a range not exceeding the coercive electric field Ec even in the opposite type to the main drive side.
  • This makes it possible to increase the drive voltage amplitude Vp-p and prevent deterioration of the variable characteristics due to the imprint effect. Therefore, the displacement amount of the piezoelectric element 104 can be maximized without impairing the drive stability and the drive reliability.
  • the second drive maximum voltage Vp is preferably a voltage between 0.1 times and 0.8 times the coercive electric field Ec, but the second drive maximum voltage Vp is 0.1 of the coercive electric field Ec. If it is smaller than twice, the imprint effect will occur as in the case of unipolar drive. Further, when the second drive maximum voltage Vp exceeds 0.8 times the coercive electric field Ec, depolarization and deterioration of the insulating property occur. Therefore, the second drive maximum voltage Vp is preferably a voltage between 0.1 times and 0.8 times the coercive electric field Ec.
  • the displacement drive device includes a vibration generator.
  • FIG. 7 is a schematic view of the displacement drive device 200 according to the present embodiment.
  • the displacement drive device 200 includes an actuator 201 and a drive circuit 202.
  • the actuator 201 is a unimorph type piezoelectric actuator composed of a drive object 203 and a dielectric element 204.
  • the drive object 203 is, for example, a diaphragm, and presents a tactile sensation to a user who touches the drive object 203.
  • the drive object 203 can be a plate-shaped member made of a metal, glass, resin material, or the like, and is, for example, a liquid crystal panel, a housing of an electronic device, or the like.
  • the shape and size of the drive object 203 are not particularly limited.
  • the dielectric element 204 is joined to the drive target object 203 to drive the drive target object 203.
  • the dielectric element 204 can generate vibration in, for example, the driven object 203.
  • FIG. 8 is a cross-sectional view of the dielectric element 204.
  • the dielectric element 204 includes a dielectric 211, a positive electrode 212, and a negative electrode 213.
  • the dielectric 211 is made of a dielectric material, specifically ceramics that exhibit electric field-induced strain.
  • the ceramics may have a coercive electric field Ec of less than 1 kV / mm or a Curie temperature Tc of less than 300 ° C. as long as they are accompanied by the development of electric field-induced strain.
  • Examples of such a material include BT (BaTIO 3 ) (see Examples).
  • the dielectric material constituting the dielectric 211 is preferably a ferroelectric material, but may be a material close to a normal dielectric as long as it is a material accompanied by the development of electric field-induced strain.
  • the positive electrode 212 includes a positive electrode internal electrode 214 and a positive electrode external electrode 215.
  • the positive electrode internal electrode 214 is made of a conductive material, and a plurality of layers are provided in the dielectric 211.
  • the positive electrode external electrode 215 is made of a conductive material, is formed on the surface of the dielectric 211, and is connected to the positive electrode internal electrode 214.
  • the negative electrode 213 includes a negative electrode internal electrode 216 and a negative electrode external electrode 217.
  • the negative electrode internal electrode 216 is made of a conductive material, and a plurality of layers are provided in the dielectric 211.
  • the negative electrode external electrode 217 is made of a conductive material, is formed on the surface of the dielectric 211, and is connected to the negative electrode internal electrode 216.
  • the positive electrode internal electrode 214 and the negative electrode internal electrode 216 are alternately arranged and face each other via the dielectric 211.
  • the positive electrode external electrode 215 and the negative electrode external electrode 217 are provided apart from each other on the front surface and the back surface of the dielectric element 204.
  • the positive electrode wiring 205 is connected to the positive electrode external electrode 215, and the positive electrode external electrode 215 functions as a positive electrode terminal.
  • the negative electrode wiring 206 is connected to the negative electrode external electrode 217, and the negative electrode external electrode 217 functions as a negative electrode terminal.
  • the dielectric element 204 when a voltage is applied between the positive electrode 212 and the negative electrode 213, the dielectric 211 is deformed due to the electric field-induced strain.
  • the dielectric element 204 may have a laminated structure in which a positive electrode 212 and a negative electrode 213 are alternately laminated via a dielectric 211, or may have another structure. ..
  • the dielectric element 204 may be joined to the drive object 203 by a resin or the like. Further, two or more dielectric elements 204 may be joined to the driving object 203.
  • the drive circuit 202 is connected to the piezoelectric element 204 via the positive electrode wiring 205 and the negative electrode wiring 206, and supplies a drive signal to the piezoelectric element 204. Specifically, the drive circuit 202 generates a drive voltage waveform described later and supplies it between the positive electrode 212 and the negative electrode 213.
  • the displacement drive device 200 has the above configuration.
  • the displacement drive device 200 can be mounted on various electronic devices such as smartphones and tactile function devices.
  • the drive voltage waveform generated by the drive circuit 202 will be described.
  • the drive voltage waveform generated by the drive circuit 202 can be the same as in the first embodiment. That is, the drive voltage waveform generated by the drive circuit 202 satisfies the above (Equation 1) and (Equation 2) when the polarization direction is the plus side (> 0V) (see FIG. 3), and the polarization direction is the minus side ( ⁇ 0V). In the case of, it is possible to satisfy the above (Equation 3) and (Equation 4) (see FIG. 4).
  • the drive circuit 202 generates the drive voltage waveform shown in FIG. 3 or 4, and supplies the drive voltage waveform between the positive electrode 212 and the negative electrode 213 via the positive electrode wiring 205 and the negative electrode wiring 206.
  • the drive voltage waveform generated by the drive circuit 202 is not limited to the sine wave as shown in FIGS. 3 and 4, and the first drive maximum voltage and the second drive maximum voltage may satisfy the above conditions.
  • the drive voltage waveform generated by the drive circuit 202 may be a sine wave, a triangular wave, a harbor sine wave, a Gaussian wave, or a burst wave thereof.
  • the drive circuit 202 In the displacement drive device 200, the drive circuit 202 generates the drive voltage waveform (see FIGS. 3 and 4) as described above and supplies it to the dielectric element 204. Similar to the first embodiment, the drive voltage amplitude Vp-p can be increased and imprinted by applying a voltage in a range not exceeding the coercive electric field Ec in the opposite type to the main drive side. It is possible to prevent the deterioration of the variable characteristics due to the effect. Therefore, the displacement amount of the piezoelectric element 204 can be maximized without impairing the drive stability and the drive reliability.
  • the conditions of the dielectric material forming the dielectric 211 can be expanded by using the drive voltage waveform (see FIGS. 3 and 4) as described above.
  • the dielectric material generally required for the piezoelectric actuator it is necessary to use a material having a Curie temperature Tc of 300 ° C. or higher, a coercive electric field Ec of 1 kV / mm, and reflow resistance and bipolar drive performance.
  • FIG. 9 shows an example of a PE hysteresis loop of a dielectric material generally required for a piezoelectric actuator, in which the horizontal axis is an electric field (P) and the vertical axis is polarization (E).
  • the material in the displacement drive device 200, by using the drive voltage waveform as described above, if the material is accompanied by the occurrence of electric field-induced strain, ceramics having a coercive electric field Ec of less than 1 kV / mm or a Curie temperature Tc of less than 300 ° C. can be used. It can be used as a material for the dielectric 211. Further, the material of the dielectric 211 does not require high ferroelectricity as shown in FIG. FIG. 10 is an example of a PE hysteresis loop of the dielectric material constituting the dielectric 211, in which the horizontal axis is the electric field (P) and the vertical axis is the polarization (E).
  • the dielectric material of a commonly used piezoelectric actuator requires polarization processing by DC polarization.
  • polarization processing a difference in the degree of polarization, that is, a difference in the degree of rotation of the polarization phase is likely to occur, the displacement characteristics are likely to vary, and a polarization device having a complicated mechanism for making the degree of polarization uniform is required.
  • the burden on costs is also great.
  • the polarization treatment becomes unnecessary by using the ceramics accompanied by the development of the electric field-induced strain as the material of the dielectric 211. This is because the electrolysis-induced strain develops regardless of the presence or absence of polarization.
  • the piezoelectric element 204 may also be prepolarized for performance inspection or the like.
  • a material that does not have high piezoelectricity or high ferroelectricity can be used as the material of the dielectric 211, and the environment is higher than that of the dielectric material generally required for the piezoelectric actuator. It is possible to select a dielectric material with a low load and cost load. Further, since the dielectric element 204 does not require a polarization treatment, a complicated and effective polarization device and a polarization treatment step are not required, and it is possible to improve the production tact and suppress the production equipment cost. Further, since the inspection for confirming the degree of polarization is not required, the inspection process can be reduced.
  • the unimorph type piezoelectric actuator 101 (see FIG. 1) according to the first embodiment was manufactured.
  • the vibrating body 103 is a plate made of stainless steel, and has a length of 40 mm, a width of 15 mm, and a thickness of 0.3 mm.
  • the piezoelectric element 104 had a length of 30 mm, a width of 15 mm, and a thickness of 0.3 mm, and was bonded to the vibrating body 103 with a resin adhesive.
  • the coercive electric field Ec of the piezoelectric material constituting the piezoelectric body 111 was 1.1 kV / mm, and the breakdown voltage of the piezoelectric element 104 was 9.5 kV / mm.
  • FIG. 11 is a schematic diagram showing a displacement measurement method of the piezoelectric actuator.
  • the fixing portion 302 and the fixing portion 303 are provided on the fixed substrate 301, and both ends of the vibrating body 103 are fixed to the fixing portion 302 and the fixing portion 303, respectively.
  • the free length of the vibrating body 103 is shown as the free length L.
  • the bending displacement of the central portion (1 / 2L) of the vibrometer 103 was measured by a laser Doppler vibrometer (LDV) 304.
  • LUV laser Doppler vibrometer
  • [Table 1] is a table showing the measurement results.
  • the drive waveform is a sine wave, the drive frequency is 100 Hz, the first drive maximum voltage Vp +: 3.5 kV / mm, the second drive maximum voltage Vp-: ⁇ 0.8 kV / mm, Vp-p: 4. It was set to 3 kV / mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm).
  • the displacement measurement result by the laser Doppler vibrometer 304 was 26.5 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was -1%, and very high characteristic stability was obtained. As described above, in Example 1, both the displacement amount and the characteristic stability were good.
  • the drive waveform is a sine wave
  • the drive frequency is 100 Hz
  • the first drive maximum voltage Vp + 5 kV / mm
  • the second drive maximum voltage Vp- ⁇ 0.8 kV / mm
  • Vp-p 5.8 kV /. It was set to mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm).
  • the displacement measurement result by the laser Doppler vibrometer 304 was 32.8 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was -2%, and high characteristic stability was obtained. As described above, in Example 2, both the displacement amount and the characteristic stability were good.
  • the drive waveform is a sine wave, the drive frequency is 100 Hz, the first drive maximum voltage Vp +: 8 kV / mm, the second drive maximum voltage Vp-: ⁇ 0.8 kV / mm, Vp-p: 8.8 kV /. It was set to mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm).
  • the displacement measurement result by the laser Doppler vibrometer 304 was 45.4 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was -4%, and high characteristic stability was obtained. As described above, in Example 3, both the displacement amount and the characteristic stability were good.
  • the drive waveform is a sine wave and the drive frequency is 100 Hz.
  • the first drive maximum voltage Vp + 3.5 kV / mm
  • the second drive maximum voltage Vp- 0 kV / mm
  • Vp-p 3.5 kV / mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is not a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm), but a voltage larger than 0.1 times.
  • the displacement measurement result by the laser Doppler vibrometer 304 was 23.1 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was ⁇ 7%, and the characteristic stability was low. As described above, in Comparative Example 1, although the displacement amount was good, the characteristic stability was insufficient.
  • the drive waveform is a sine wave and the drive frequency is 100 Hz.
  • the first drive maximum voltage Vp + 1 kV / mm
  • the second drive maximum voltage Vp- -1 kV / mm
  • Vp-p 2 kV / mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is not a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm), but a voltage smaller than 0.8 times.
  • the displacement measurement result by the laser Doppler vibrometer 304 was 16.8 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was 0%, and high characteristic stability was obtained. As described above, in Comparative Example 2, although the characteristic stability was good, the displacement amount was insufficient.
  • the drive waveform is a sine wave and the drive frequency is 100 Hz.
  • the first drive maximum voltage Vp + 8 kV / mm
  • the second drive maximum voltage Vp- 0 kV / mm
  • Vp-p 8 kV / mm.
  • the first drive maximum voltage Vp + is a voltage between 0 V and the breakdown voltage (9.5 kV / mm).
  • the second drive maximum voltage Vp- is not a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm), but a voltage larger than 0.1 times.
  • the displacement measurement result by the laser Doppler vibrometer 304 was 41.3 ⁇ m. Further, when the displacement was measured after continuous driving for 20 M cycles under high humidity of 40 ° C. and 90% RH, the displacement reduction rate was -12%, and the characteristic stability was low. As described above, in Comparative Example 3, although the displacement amount was good, the characteristic stability was insufficient.
  • the drive waveform is a sine wave and the drive frequency is 100 Hz.
  • the first drive maximum voltage Vp + 10 kV / mm
  • the second drive maximum voltage Vp- 0 kV / mm
  • Vp-p 10 kV / mm.
  • the first drive maximum voltage Vp + is not a voltage between 0 V and the breakdown voltage (9.5 kV / mm), but a voltage larger than the breakdown voltage.
  • the second drive maximum voltage Vp- is not a voltage between 0.1 times and 0.8 times the coercive electric field Ec-( ⁇ 1.1 kV / mm), but a voltage larger than 0.1 times.
  • the dielectric element 204 (see FIG. 8) according to the second embodiment was manufactured.
  • the dielectric element 204 is formed by alternately laminating 10 layers of a positive electrode internal electrode 214 and a negative electrode internal electrode 216 of a dielectric having a thickness of 26 ⁇ m per layer, and has a 3216 shape.
  • a dielectric element 204 made of various dielectric materials was produced, and the dielectric element 204 was driven by the above-mentioned drive voltage waveform (drive voltage -2 V to + 104 V, drive frequency 10 Hz, see FIG. 3).
  • drive voltage -2 V to + 104 V drive frequency 10 Hz, see FIG. 3
  • a laser Doppler vibrometer a laser was irradiated from above the dielectric element 204 (Z direction, see FIG.
  • the “material” in the above [Table 2] is a dielectric material constituting the dielectric 211 of the dielectric element 204 in each embodiment.
  • the following [Table 3] is a table showing the composition of BT1 according to Examples 4 and 5 and the composition of BT2 according to Example 6.
  • the following [Table 4] is a table showing the composition of LNKN1 according to Example 7.
  • the composition of PZT1 according to Example 8 is PZT-PZN (Pb (Zr 1/2 Ti 1/2 ) O 3- Pb (Zn 1/3 Nb 2/3 ) O 3 ).
  • the dielectric element 204 according to Examples 4, 7 and 8 was polarized at 25 ° C., 3.5 kV / mm, and 15 min, and displacement was measured. On the other hand, the displacement of the dielectric element 204 according to Examples 5 and 6 was measured in a non-polarized state.
  • both LNKN1 according to Example 7 and PZT1 according to Example 8 are materials having a Curie temperature Tc of 300 ° C. or higher and a coercive electric field Ec of 1 kV / mm or higher.
  • the displacement amount d33 * was 190 pm / V
  • the displacement amount d33 * was 450 pm / V.
  • BT1 and BT2 according to Example 4-6 are materials having a Curie temperature Tc of less than 300 ° C. and a coercive electric field Ec of less than 1 kV / mm.
  • the displacement amount d33 * was 370 pm / V
  • the displacement amount d33 * was 390 pm / V. Therefore, even if the material has a Curie temperature Tc of less than 300 ° C. and a coercive electric field Ec of less than 1 kV / mm, the displacement is comparable to that of a material having a Curie temperature Tc of 300 ° C. or more and a coercive electric field Ec of 1 kV / mm or more. The amount was obtained.
  • Example 4-6 even if the dielectric element 204 is in the unpolarized state, the same amount of displacement as in the polarized state can be obtained. Therefore, the dielectric element 204 does not require a polarization process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

Le problème décrit par la présente invention est de fournir un procédé d'attaque, un circuit d'attaque et un dispositif d'attaque à déplacement avec lesquels il est possible de maximiser la quantité de déplacement d'un élément diélectrique dans une plage qui ne compromet pas la fiabilité. À cet effet, le procédé d'attaque selon la présente technologie implique l'application, entre une électrode positive et une électrode négative d'un élément diélectrique dans lequel l'électrode positive et l'électrode négative se font face à travers une céramique qui présente une contrainte induite par champ électrique, une forme d'onde de tension d'attaque qui a une fréquence d'attaque prescrite et qui est appliquée entre l'électrode positive et l'électrode négative, la forme d'onde de tension d'attaque étant l'une dans laquelle : une première tension maximale d'attaque, qui est une tension de crête de la forme d'onde de tension d'attaque, est une tension entre 0 V et la tension de claquage de la céramique dans la fréquence d'attaque ; et une seconde tension maximale d'attaque, qui est une autre tension de crête de la forme d'onde de tension d'attaque, est une tension entre 0,1 fois et 0,8 fois le champ électrique coercitif de la céramique à la polarité opposée à celle de la première tension maximale d'attaque.
PCT/JP2021/022113 2020-06-16 2021-06-10 Procédé d'attaque, circuit d'attaque et dispositif d'attaque à déplacement WO2021256370A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023139928A1 (fr) * 2022-01-18 2023-07-27 太陽誘電株式会社 Dispositif de génération de détection tactile, système de génération de détection tactile, et procédé de commande de dispositif de génération de détection tactile

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014172314A (ja) * 2013-03-11 2014-09-22 Ricoh Co Ltd 液滴吐出ヘッド、電圧制御方法、および、画像形成装置
JP2017157586A (ja) * 2016-02-29 2017-09-07 セイコーエプソン株式会社 圧電デバイスの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014172314A (ja) * 2013-03-11 2014-09-22 Ricoh Co Ltd 液滴吐出ヘッド、電圧制御方法、および、画像形成装置
JP2017157586A (ja) * 2016-02-29 2017-09-07 セイコーエプソン株式会社 圧電デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023139928A1 (fr) * 2022-01-18 2023-07-27 太陽誘電株式会社 Dispositif de génération de détection tactile, système de génération de détection tactile, et procédé de commande de dispositif de génération de détection tactile

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