WO2012153454A1 - 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法 - Google Patents
流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法 Download PDFInfo
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/50—Correcting or compensating means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
- Y10T137/0368—By speed of fluid
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Definitions
- the present invention relates to an improvement of a pressure type flow rate control device, and a pressure type flow rate control device which is operating in real time by organically combining a thermal mass flow rate sensor with a pressure type flow rate control device using an orifice.
- the present invention relates to a pressure-type flow rate control device with a flow rate monitor capable of monitoring the control flow rate, a fluid supply system abnormality detection method using the same, and a treatment method when a monitor flow rate abnormality occurs.
- the pressure type flow rate control device FCS is composed of a control valve CV, a temperature detector T, a pressure detector P, an orifice OL, a calculation control unit CD, and the like. It is composed of a temperature correction / flow rate calculation circuit CDa, a comparison circuit CDb, an input / output circuit CDc, an output circuit CDd, and the like.
- the detection values from the pressure detector P and the temperature detector T are converted into digital signals and input to the temperature correction / flow rate calculation circuit CDa. After the temperature correction and flow rate calculation of the detected pressure are performed, the flow rate calculation is performed.
- the value Qt is input to the comparison circuit CDb.
- a set flow rate input signal Q S is input from the terminal In, converted to a digital value by the input / output circuit CDc, and then input to the comparison circuit CDb, where the flow rate calculation value from the temperature correction / flow rate calculation circuit CDa is input. Compared to Qt.
- the control signal Pd is output to the drive portion of the control valve CV, and the control valve CV is driven in the opening direction to calculate the set flow rate input signal Qs.
- the valve is driven in the valve opening direction until the difference (Qs ⁇ Qt) from the flow rate value Qt becomes zero.
- the pressure type flow control device FCS itself is known as described above, but the downstream pressure P 2 of the orifice OL (that is, the pressure P 2 on the process chamber side) and the upstream pressure P 1 of the orifice OL (that is, the control valve CV).
- the downstream pressure P 2 of the orifice OL that is, the pressure P 2 on the process chamber side
- the upstream pressure P 1 of the orifice OL that is, the control valve CV
- FIG. 17 and FIG. 18 show an example, and this mass flow control device (mass flow controller) 20 includes a flow path 23, a first pressure sensor 27a for upstream pressure, an open / close control valve 24, A thermal mass flow sensor 25 provided on the downstream side, a second pressure sensor 27b provided on the downstream side, a throttle (sonic nozzle) 26 provided on the downstream side of the second pressure sensor 27b, and an arithmetic control unit 28a And an input / output circuit 28b and the like.
- this mass flow control device (mass flow controller) 20 includes a flow path 23, a first pressure sensor 27a for upstream pressure, an open / close control valve 24, A thermal mass flow sensor 25 provided on the downstream side, a second pressure sensor 27b provided on the downstream side, a throttle (sonic nozzle) 26 provided on the downstream side of the second pressure sensor 27b, and an arithmetic control unit 28a And an input / output circuit 28b and the like.
- the arithmetic control unit 28a feeds back the pressure signals Spa and Spb from the pressure sensors 27a and 27b and the flow rate control signal Sf from the flow rate sensor 25 and outputs a valve opening degree control signal Cp to feedback control the on-off valve 24.
- the flow rate setting signal Fs is input to the arithmetic control unit 28a via the input / output circuit 28b, and the flow rate F of the fluid flowing through the mass flow rate control device 20 is adjusted to match the flow rate setting signal Fs.
- the flow rate F of the fluid flowing through the sonic nozzle 26 is controlled by the arithmetic control unit 28a using the output (pressure signal Spb) of the second pressure sensor 27b to feed back and control the open / close control valve 24.
- the flow rate F actually flowing is measured using the output (flow rate signal Sf) of the thermal flow sensor 25 at this time, and the operation of the mass flow rate control device 20 is confirmed.
- the pressure flow measurement using the second pressure sensor 27b for flow control and the heat for monitoring the flow are performed. Since two types of measurement methods called flow rate measurement using the flow rate sensor 25 are incorporated in the arithmetic control unit 28a, whether or not the fluid of the control flow rate (set flow rate Fs) is actually flowing, that is, the control flow rate and the actual flow rate. Whether or not there is a difference between the flow rate can be easily and reliably monitored, and has high practical utility.
- the first problem is that the calculation control unit 28a controls the opening / closing control valve 24 using both the output SPb of the second pressure sensor 27b and the flow output Sf of the thermal flow sensor 25, and the first pressure sensor.
- the flow rate output Sf of the thermal type flow sensor 25 is corrected using the output SPa of 27a, and the two pressure signals of the first pressure sensor 27a and the second pressure sensor 27b and the flow rate signal from the thermal type flow sensor 25 are The opening / closing control of the opening / closing control valve 24 is performed using these three signals. Therefore, there is a problem that not only the configuration of the arithmetic control unit 28a is complicated, but also stable flow rate control characteristics and excellent high responsiveness as the pressure type flow rate control device FCS are reduced.
- the second problem is that the mounting position of the thermal flow sensor 25 with respect to the open / close control valve 24 changes, that is, in the mass flow control device 20 of FIGS. There is a problem that the response of the flow sensor 25, the gas replacement property in the apparatus main body, and the evacuation characteristics are greatly changed, and the mass flow controller 20 is difficult to downsize.
- a so-called flow rate control device is widely used in, for example, a gas supply device of a semiconductor manufacturing facility as shown in FIG. 31, and a purge gas supply system B and a process gas supply are provided upstream of the flow rate control device D.
- a system A is connected in parallel, and a process gas use system C is connected to the downstream side of the flow rate control device D.
- valves V 1 , V 2, and V 3 are interposed in the gas supply systems A and B and the gas use system C, respectively.
- check in the inspection (hereinafter referred to as “check”) of the valves V 1 to V 3 , the operation state of each valve (including the operation of the valve actuator) is normally checked and the seat leak of each valve is checked.
- valves V 1 , V 2 and V 3 are removed from the pipe line. There is a problem that it is necessary to check using a test apparatus provided separately, and it takes a lot of work and time to check the seat leak of each valve.
- the present invention relates to the above-described problem in the mass flow control device using the sonic nozzle of Japanese Patent No. 4137666 shown in FIGS. 17 and 18, that is, the pressure signals of the first and second pressure sensors 27a and 27b. Since the opening / closing control of the opening / closing control valve 24 is performed using two types of signals different from the flow rate signal of the thermal type flow sensor 25, the configuration of the arithmetic control unit 28a is not only complicated, but also the pressure type flow rate. There is a possibility that the excellent response characteristics and stable flow control characteristics of the control device may be diminished, the enlargement of the mass flow control device 20 is unavoidable, and the gas replacement property is lowered and the evacuation time becomes long.
- the flow control unit of the pressure type flow control device FCS using an orifice and the thermal type flow monitor unit using a thermal type flow sensor are combined together, and the flow control and the flow monitor are solved.
- the full flow characteristics of the pressure type flow control device can be fully utilized, and the flow rate monitoring by the thermal type flow sensor can be performed in real time.
- a pressure-type flow rate control device with a flow rate monitor that can improve the gas replacement performance by greatly reducing the size of the part is provided.
- the present invention requires that each valve be removed from the pipe line when performing a seat leak check of the valves provided on the upstream side and the downstream side of the pressure type flow rate control device with a flow rate monitor. Even if a problem that requires a lot of time or an abnormality in the monitor flow rate is detected by the flow rate self-diagnosis mechanism provided in the pressure type flow rate control device with a flow rate monitor, the cause of the abnormality can be quickly grasped and necessary countermeasures such as This solves the problem that it is not possible to replace the pressure-type flow control device with a flow rate monitor itself, and makes it possible to easily and quickly check seat leaks of valves, etc.
- An abnormality detection method for a fluid supply system using a pressure-type flow control device with a flow rate monitor that can quickly take an appropriate response when the flow rate is abnormal. It is intended to provide a ⁇ method.
- a pressure-type flow control device with a flow monitor was conceived. 6 and 7, 1 is a pressure type flow rate control device with a flow rate monitor, 2 is a thermal flow rate sensor, 3 is a control valve, 4 is a temperature sensor, 5 is a pressure sensor, 6 is an orifice, and 7 is a control unit. 8 is an inlet-side flow path, 9 is an outlet-side flow path, 10 is a fluid passage in the apparatus body, and the mounting positions of the thermal flow sensor 2 and the control valve 3 in FIG. This is a pressure type flow rate control device with a flow rate monitor.
- the reason why the pressure type flow rate control device using the orifice is adopted as the flow rate control method is that the flow rate control characteristics are good and the past use results are many.
- the reason why the thermal type flow sensor 2 is used as a flow rate monitoring sensor is mainly due to the flow rate, actual use as a sensor, and excellent characteristics as a flow rate sensor, and ease of real-time measurement and change in gas type. This is a result of taking into account the points that the compatibility, flow measurement accuracy, actual use, etc. are higher than those of other flow measurement sensors.
- the thermal flow sensor 2 is integrally assembled in the fluid passage 10 in the apparatus main body of the pressure type flow control device using the orifice so that the flow rate monitor is easy to perform and the pressure type flow control device with the flow monitor is small. This is because it is easy to achieve.
- the fluctuation of the output of the thermal flow sensor due to the change of the supply pressure can be considered. That is, since the output of the thermal flow sensor fluctuates due to a change in supply pressure, an error from the control flow rate may occur when the supply pressure changes. For this reason, it is necessary to take measures such as delaying the responsiveness of the thermal flow sensor to alleviate the output fluctuation due to the supply pressure change.
- the second problem is the condition of the zero point adjustment.
- the zero point adjustment is performed under a vacuum in a pressure sensor, and is performed in a sealed state in a flow sensor. Therefore, it is necessary to protect the zero adjustment from being performed under wrong conditions.
- the third problem is the phenomenon of the thermal siphon of the thermal flow sensor. In other words, it is necessary to determine the installation direction in advance by installing a thermal flow sensor, and as a result, in parallel with the design of the gas box, it is necessary to consider the installation direction of the pressure flow control device with a flow monitor. is there.
- the fifth problem is the response when the control flow rate is abnormal.
- alarms and errors in the control flow rate are displayed on the display, but the output difference between the pressure type flow control device and the monitor flow rate by the thermal flow rate sensor exceeds a predetermined threshold value. And a system to determine that it is abnormal.
- the inventors of the present application first conducted an evaluation test of various characteristics of the newly incorporated thermal flow sensor 2 for each pressure type flow control device 1 with a flow monitor shown in FIGS.
- the fluid supply source 11 composed of an N 2 container, the pressure regulator 12, the purge valve 13, and the input side pressure sensor 14 are connected to the inlet side flow path 8, and the data logger (NR500). 15 is connected to the control unit 7, and further, a characteristic evaluation system is configured such that the outlet side flow path 9 is evacuated by the vacuum pump 16, and the step response of the thermal flow sensor 2 is configured using the characteristic evaluation system. Characteristics, monitor flow accuracy, supply pressure fluctuation characteristics, and repeatability were evaluated.
- the step response characteristic is for evaluating the response of the thermal flow sensor output to a step input with a predetermined flow rate setting.
- the set flow rate is 100% (full scale)
- F.D. S. The output response when step-changing from 1000 (sccm) to 20%, 50%, and 100% was evaluated.
- 8, 9 and 10 show the flow rate setting input A 1 of the pressure type flow control device 1 and the flow rate output A 2 at that time in the data logger 15 when the set flow rate is 20%, 50% and 100%, and the thermal flow sensor. (in the case of FIG. 6) output B 1, shows the measurement results of the thermal flow sensor output B 2 (the case of FIG. 7).
- the monitor flow rate accuracy is set to S.D. from each flow rate setting. P.
- the amount of change in the output of the thermal flow sensor when shifted in units is measured and evaluated.
- the error setting conditions are -0.5% SP, -1.0% S.P. P., -2.0% S.P. P. and -3.0% S.P.
- the supply pressure fluctuation characteristic indicates the fluctuation state of the thermal flow sensor output when the supply pressure is changed during constant flow control, and the flow rate setting is 50% and the supply pressure fluctuation condition is 50 kPaG. .
- FIG. 13 shows the measurement results.
- the thermal flow sensor 2 is set on the upstream side (primary side) of the control valve 3 (in the case of FIG. 6)
- the thermal flow sensor 2 due to supply pressure fluctuation is shown.
- the change in flow rate output is ⁇ 0.5% F.V. S. It has been found that it is within the range of / div, i.e., hardly affected by fluctuations in the gas supply pressure.
- the repeatability is obtained by repeatedly inputting from 0% to a set flow rate with 20% and 100% flow rate settings, and measuring the reproducibility of the thermal flow sensor outputs B 1 and B 2 .
- the repeatability of the thermal flow sensor output is ⁇ 1% F.S. S. And 0.2% F.V. S. It has been found that it exhibits regular and accurate reproducibility.
- the thermal flow sensor 2 used in FIGS. 6 and 7 is a sensor mounted on the FCS-T1000 series manufactured by Fujikin Co., Ltd., which is a thermal type of a so-called thermal mass flow controller (mass flow controller). It is widely used as a flow sensor.
- the mounting position of the flow sensor 2 may be on the upstream side (primary side) or the downstream side (secondary side) of the control valve 3 in terms of step response characteristics, monitor flow accuracy characteristics, and repeatability characteristics. Although there is no superiority or inferiority in the meantime, it is desirable to provide the thermal flow rate sensor 2 on the downstream side (secondary side) of the control valve 3 of the pressure type flow rate control device from the viewpoint of supply pressure fluctuation characteristics. I found it better to do.
- the inventors of the present application increase the internal volume between the control valve 3 and the orifice 6, It has been found that the substitutability is lowered, and in the case of a small flow type pressure type flow rate control device, the pressure drop characteristic becomes slow (that is, the outgassing characteristic deteriorates), and these points become problems. It was.
- the invention of the present application was created based on the results of the above-described evaluation tests by the inventors of the present application.
- the invention of claim 1 is connected to the fluid inlet side passage 8 and the downstream side of the inlet side passage 8.
- the control valve 3 constituting the pressure type flow rate control unit 1a, the thermal type flow sensor 2 connected to the downstream side of the control valve 3, and the orifice provided in the fluid passage 10 communicating with the downstream side of the thermal type flow rate sensor 2 6, a temperature sensor 4 provided in the vicinity of the fluid passage 10 between the control valve 3 and the orifice 6, a pressure sensor 5 provided in the fluid passage 10 between the control valve 3 and the orifice 6, and the orifice 6
- the pressure signal from the pressure sensor 5 and the temperature signal from the temperature sensor 4 are input, and the flow rate value Q of the fluid flowing through the orifice 6 is calculated and the calculated flow rate value
- the flow rate signal 2c from the pressure type flow rate calculation control unit 7a for outputting the control signal Pd for opening and closing the control valve 3 to the valve
- the invention of claim 2 is the invention of claim 1, wherein the pressure sensor 5 is provided between the outlet side of the control valve 3 and the inlet side of the thermal flow sensor 2.
- the difference between the fluid flow rate calculated by the flow rate sensor control unit 7b and the fluid flow rate calculated by the pressure type flow rate calculation control unit 7a is a set value. When it exceeds, it is set as the control part 7 which performs a warning display.
- control valve 3, the thermal flow sensor 2, the orifice 6, the pressure sensor 5, the temperature sensor 4, the inlet side passage 8 and the outlet side passage 9 are combined into one body.
- the forming fluid passage 10 is formed integrally with the body body.
- the pressure signal from the pressure sensor 5 and the pressure sensor 17 and the temperature signal from the temperature sensor 4 are input, and the critical expansion condition of the fluid flowing through the orifice 6 is monitored and the orifice 6 is circulated.
- Pressure type flow rate calculation for calculating the flow rate value Q of the fluid to be output and outputting the control signal Pd for opening and closing the control valve 3 in the direction in which the difference between the calculated flow rate value and the set flow rate value decreases.
- the invention of claim 6 is the control unit 7 according to the invention of claim 5, which displays a warning when the fluid flowing through the orifice 6 deviates from the critical expansion condition.
- control valve 3 the thermal flow sensor 2, the orifice 6, the pressure sensor 5, the temperature sensor 4, the inlet side passage 8, the outlet side passage 9, and the pressure sensor 17 are provided. Is assembled in one body.
- the invention of claim 8 is a fluid supply system comprising a pressure type flow rate control device with a flow rate monitor having a pressure sensor comprising a flow rate setting mechanism and a flow rate and pressure display mechanism and / or a flow rate self-diagnosis mechanism.
- Abnormality of the valve provided upstream or downstream of the pressure type flow control device with flow rate monitor is detected using the pressure display value of the pressure type flow control device with flow rate monitor or the diagnostic value of the flow rate self-diagnosis mechanism.
- the valve is provided in the process gas use system on the downstream side, and the type of abnormality to be detected is the valve opening / closing operation and the seat leak. It is.
- a fluid supply system including a pressure type flow rate control device with a flow rate monitor having a pressure sensor including a flow rate setting mechanism and a flow rate and pressure display mechanism and / or a flow rate self-diagnosis mechanism.
- the pressure type flow control device with a flow rate monitor as well as the abnormality of the valve provided on the upstream side or downstream side thereof is detected using the pressure display value of the pressure type flow rate control device with flow rate monitor and / or the flow rate self-diagnosis mechanism.
- the invention of claim 11 performs self-diagnosis of the flow rate using the invention of the abnormality detection method of the fluid supply system of claim 10 to determine the cause of the abnormality of the monitor flow rate detected from the form of the pressure drop characteristic during the flow rate self-diagnosis. After the determination, check the zero point deviation of the pressure sensor.If the zero point is off, adjust the zero point and perform the flow rate self-diagnosis again.If the zero point is not off, It is determined whether or not the cause of the determined abnormality is an abnormality of the fluid supply system. If the fluid supply system is abnormal, the abnormality of the fluid supply system is recovered, and if there is no abnormality in the fluid supply system, the flow rate The pressure type flow control device with a monitor itself is judged to be abnormal and replaced.
- the flow rate self-diagnosis is performed using the fluid supply system abnormality detection method of the tenth aspect, and the monitor flow rate is abnormal due to a change in the diameter of the orifice of the pressure type flow rate control device with the flow rate monitor
- the pressure flow rate control device with a flow rate monitor is calibrated with the monitor flow rate being positive.
- a pressure type flow rate control device with a flow rate monitor is formed by a pressure type flow rate control unit 1a and a thermal type flow rate monitor unit 1b, and the thermal type flow rate sensor 2 of the thermal type flow rate monitor unit 1b is used as a pressure type flow rate control unit.
- Pressure type flow rate calculation control for controlling the opening and closing drive of the control type valve 3 of the pressure type flow rate control unit 1a while the control unit 7 is organically integrated by being positioned downstream of the control valve 3 of the control unit 1a.
- the unit 7a and the flow rate sensor control unit 7b for calculating and displaying the actual fluid flow rate flowing through the orifice 6 by the flow rate signal from the thermal flow rate sensor 2 are integrated in an independent state.
- control unit 7 having a simple configuration can easily and accurately perform stable pressure type flow rate control, and continuously and accurately monitor the flow rate by the thermal type flow rate sensor 2 in real time. I can do it.
- the thermal flow sensor 2 is positioned downstream of the control valve 3 and the apparatus main bodies such as the control valve 3 and the thermal flow sensor 2 are integrally assembled in one body, the apparatus main body The internal space volume is greatly reduced, and the gas substituting property and evacuation characteristics are not deteriorated. Furthermore, even if the fluid pressure on the fluid supply source side fluctuates, the output characteristics of the thermal flow sensor 2 do not fluctuate greatly. As a result, the flow monitor and flow control are stable against the pressure fluctuation on the fluid supply side. Can be done.
- the cause of the abnormality is accurately determined from the form of the pressure drop characteristic curve. It is possible to repair and adjust necessary equipment more efficiently.
- the monitor flow rate when an abnormality occurs in the monitor flow rate due to a change in the orifice diameter of the pressure type flow rate control device with a flow rate monitor, the monitor flow rate is positively calibrated quickly. It can be performed.
- FIG. 1 is a schematic configuration diagram of a pressure type flow rate control device with a flow rate monitor using an orifice according to an embodiment of the present invention. It is a structure schematic diagram which shows the other example of the pressure type flow control apparatus with a flow monitor. It is a structure schematic diagram which shows the further another example of the pressure type flow control apparatus with a flow monitor. It is explanatory drawing of a structure of a thermal type flow sensor. It is explanatory drawing of the operation principle of a thermal type flow sensor. It is the 1st conceptual diagram of the pressure type flow control device with a flow rate monitor which the present inventor conceived. It is the 2nd conceptual diagram of the pressure type flow control device with a flow rate monitor which the inventor of this application conceived.
- FIG. 27 shows four types of pressure drop characteristics derived from the forms (patterns) of the pressure drop characteristics shown in FIGS.
- FIG. 1 is a schematic diagram of the configuration of an embodiment of a pressure-type flow control device 1 with a flow rate monitor according to the present invention.
- the pressure-type flow rate control device 1 with a flow rate monitor includes a pressure-type flow rate control unit 1a and a thermal flow rate monitor unit. It consists of two parts 1b.
- the pressure type flow rate control unit 1 a is composed of a control valve 3, a temperature sensor 4, a pressure sensor 5, an orifice 6, and a pressure type flow rate calculation control unit 7 a forming a control unit 7.
- the pressure type flow rate control unit 1a passes control valve 3 mentioned above, the temperature sensor 4, the pressure sensor 5 is constituted by a orifice 6 and the pressure type flow rate calculation control unit 7a and the like, the flow rate setting signal from the input terminal 7a 1 is and flow rate output signal of the fluid flowing through the orifice computed by the pressure type flow rate control unit 1a from the output terminal 7a 2 is output.
- the pressure type flow rate control unit 1a itself using the orifice 6 is a well-known technique such as Japanese Patent No. 3291161, and the pressure detected by the pressure detection sensor 5 is the flow rate of the fluid flowing through the orifice 6 under the critical expansion condition.
- the pressure type flow rate calculation control unit 7 a Based on the calculation, the pressure type flow rate calculation control unit 7 a outputs a control signal Pd proportional to the difference between the set flow rate signal input from the input terminal 7 a 1 and the calculated flow rate signal to the valve drive unit 3 a of the control valve 3. .
- the pressure type flow rate control unit 1a Since the configuration of the pressure type flow rate control unit 1a and the flow rate calculation control unit 7a is substantially the same as that shown in FIG. 16, detailed description thereof is omitted here.
- the pressure type flow rate control unit 1a is provided with various auxiliary mechanisms such as a known zero adjustment mechanism, a flow rate abnormality detection mechanism, and a gas type conversion mechanism (FF value conversion mechanism). is there.
- 8 is an inlet side passage
- 9 is an outlet side passage
- 10 is a fluid passage in the apparatus main body.
- the thermal type flow rate monitoring unit 1b constituting the pressure type flow rate control device 1 with the flow rate monitor is composed of a thermal type flow rate sensor 2 and a flow rate sensor control unit 7b, and the flow rate sensor control unit 7b has an input terminal 7b 1. and the output terminal 7b 2 are provided respectively. Then, from the input terminal 7b 1 is input setting signal of the flow rate range to be monitored, from the output terminal 7b 2 is output monitor flow rate signal detected by the thermal flow sensor 2 (actual flow rate signal).
- the monitor flow rate signal and the calculated flow rate signal are appropriately input / output between the flow rate sensor control unit 7b and the pressure type flow rate calculation control unit 7a.
- the magnitude of the difference or the difference may be monitored, or a warning may be issued if the difference between the two exceeds a certain value.
- FIG. 2 shows another example of the pressure type flow rate control device 1 with a flow rate monitor, in which the fluid pressure between the control valve 3 and the thermal type flow rate sensor 2 is detected by the pressure sensor 5. is there.
- movement of the pressure type flow control apparatus 1 with a flow rate monitor are completely the same as the case of FIG.
- FIG. 3 shows still another example of the pressure type flow rate control device 1 with a flow rate monitor.
- a pressure sensor 17 is separately provided on the downstream side of the orifice 6, and the fluid flowing through the orifice 6 is under critical expansion conditions. Whether the flow rate can be controlled by using the differential pressure between the pressure sensor 5 and the pressure sensor 17.
- the flow rate signal 2c is introduced into a flow rate sensor control unit 7b made of, for example, a microcomputer, and the actual flow rate of the currently flowing fluid is obtained based on the flow rate signal 2c.
- FIG. 5 shows the basic structure of the sensor circuit 2b of the thermal flow sensor 2, and a series connection circuit of two reference resistors R2 and R3 is connected in parallel to the series connection of the resistance wires R1 and R4. Forming a bridge circuit. A constant current source is connected to the bridge circuit, and a differential circuit is provided by connecting the connection point between the resistance lines R1 and R4 and the connection point between the reference resistors R2 and R3 to the input side. Thus, the potential difference between the two connection points is obtained, and this potential difference is output as the flow rate signal 2c.
- thermal flow sensor 2 and the flow sensor control unit 7b themselves are well-known techniques, and thus detailed description thereof is omitted here.
- a sensor mounted on the FCS-T1000 series manufactured by Fujikin Co., Ltd. is used as the thermal flow rate monitoring unit 1b.
- a pressure type flow rate control unit 1a of a pressure type flow rate control device with a flow rate monitor has substantially the same configuration as the conventional pressure type flow rate control device FCS shown in FIG.
- the pressure-type flow rate control unit 1a includes a flow rate setting circuit (not shown) corresponding to a flow rate setting mechanism, a pressure display mechanism (not shown) corresponding to a pressure display mechanism, and a flow rate output circuit (not shown). (Omitted) etc. are provided.
- the pressure type flow rate control unit 1a is provided with a so-called flow rate self-diagnosis mechanism (not shown), and compares the initially set pressure drop characteristic with the pressure drop characteristic at the time of diagnosis as described later. It is configured to determine an abnormal state and output the determination result.
- the pressure type flow rate control unit 1a may not be able to supply the gas flow rate at the set flow rate or maintain the critical expansion condition due to insufficient supply pressure from the gas supply source to the control valve 3. In some cases, a mechanism for transmitting a supply pressure shortage signal is provided.
- FIG. 19 shows an example of a fluid supply system using the pressure type flow rate control apparatus 1 with a flow rate monitor, which is an object of the present invention.
- the fluid supply system includes a purge gas supply system B and a process gas supply system.
- A a pressure type flow rate control device 1 with a flow rate monitor, a process gas use system C, and the like.
- the purge gas supply system B first uses an inert gas such as N 2 or Ar as the purge gas Go, the pipe 8, the pressure-type flow control device 1 with a flow monitor, the pipe 9, etc. And purge the fluid supply system. Thereafter, the process gas Gp is supplied instead of the purge gas Go, and the process gas Gp is supplied to the process gas use system C while adjusting to a desired flow rate in the pressure type flow rate control unit 1 with a flow rate monitor.
- V 1 , V 2 , and V 3 are valves, and an automatic opening / closing valve having a fluid pressure drive unit or an electric drive unit is generally used.
- Valves to be inspected using the present invention are the valves V 1 , V 2, V 3 and the like in FIG. 19, and so-called seat leak and abnormal operation of the valves V 1 to V 3 are caused by pressure-type flow rate with a flow rate monitor. This is performed using a control device (hereinafter referred to as a pressure-type flow rate control unit 1a) during preparation for starting the supply of process gas to the process chamber E or preparation for stopping the supply of process gas.
- a control device hereinafter referred to as a pressure-type flow rate control unit 1a
- abnormal operation of each of the valves V 1 , V 2 , V 3 is inspected by the following procedure using the pressure type flow control unit 1a (that is, the pressure type flow control device FCS).
- the pressure type flow control unit 1a that is, the pressure type flow control device FCS.
- a valve V 1 A predetermined actual gas (process gas Gp) is circulated, and a gas having a predetermined set flow rate is circulated by FCS.
- FCS flow indicator value and the pressure indication value FCS (pipe passage 8 and or distribution line 9) is changed to 0, so that the operation of the valve V 1 is abnormal (non-operating).
- the actual gas flow rate self-diagnosis whether or not the actual gas control flow rate of the FCS is the predetermined flow rate by circulating the predetermined actual gas (process gas Gp) to the FCS, If the error signal of the supply shortage originated would the operation of the valve V 1 is abnormal (non-operating).
- N 2 is circulated as the purge gas G, and a gas having a predetermined set flow rate is circulated by FCS. If the flow indicator value and the pressure instruction value at this time FCS is changed to 0, abnormal operation (non-operating) of the valve V 2 will be there.
- FCS An error signal indicating insufficient supply pressure from the FCS while diagnosing whether or not the N 2 control flow rate of the FCS is the set flow rate by flowing N 2 gas to the FCS (hereinafter referred to as N 2 flow rate self-diagnosis) there when originated would the operation of the valve V 2 is abnormal (non-operating).
- the flow factor F. of real gas (process gas Gp).
- F. If> 1, the diagnosis result is on the negative side and the actual gas (process gas Gp) F.V. F. In the case of ⁇ 1, the diagnosis result is shifted to the + side.
- F. A value defined by the actual gas flow rate / N 2 flow rate (see JP 2000-66732 A).
- FCS valves V 3 After completion of the flow control by the sheet leaks FCS valves V 3, holds the valve V 3 in the closed state, the flow rate setting of FCS to 0 (set so that the flow rate is zero). Thereafter, if the downward pressure indication value of FCS, so that sheet leaks are occurring in the valve V 3.
- FIG. 20 shows a flow sheet when checking the abnormality of each valve V 1 , V 2 , V 3 of the fluid supply apparatus shown in FIG. This flow sheet is shown in FIG.
- Each valve V 1 , V 2 , V 3 , FCS and piping systems 8, 9, 9 b have no external leaks other than seat leaks (for example, leaks from joints, bonnets, etc.), b.
- C The drive part of each valve operates normally.
- FCS should operate normally, d. It is premised that V 1 and V 2 are not opened simultaneously.
- step So an abnormality check is started at step So. Subsequently, V 1 closed at step S 1, V 2 open ⁇ closed (switching), V 3 performs closed, FCS control valve opening operation, is filled with N 2 to the downstream side pipe 9 of the FCS.
- step S 2 check the pressure display P 1 of the pressure sensor 1a in the pressure display P 1, i.e., FIG. 1 of FCS, decrease [Delta] P 1 P 1 determines whether zero or not.
- step S 4 V 1 closed, V 2 closed, V 3 opened, after evacuating the pipe in FCS control valve opening, V 1 open, the process gas in the V 2 closed (real gas) Gp flow to FCS, checks the pressure display P 1 of the FCS at step S 5. Operation of V 1 if there is increase in P 1 is normal (step S7), and it is determined that the operation anomaly of V 1 Without elevated P 1 (step S 6), to check the operation status of V 1.
- V 1 closed at step S 8 V 2 closed, V 3 opened, after evacuating the pipe in FCS control valve opening, V 1 and closed, and V 2 opens, check the pressure display P 1 of the FCS (step S 9). If P 1 does not increase, it is determined that V 2 is operating abnormally (step 10), and the operating status of V 2 is confirmed. Also, if rising is P 1, the operation of the V 2 are determined to be normal (step S 11).
- step S 12 the abnormality of the valves in the step S 2 determines whether relevant to abnormal operation of the valve V 3. That is, a decision step S 2 is No (or the operation abnormality of the valve V 1, V 2, V 3), and if the operation of the valves V 1 and V 2 is normal, valve V 3 Is determined to be abnormal (step S 13 ), and if the determination in step S 2 is yes, it is determined that the operation of each valve V 1 , V 2 , V 3 is normal (step S 13 ). S 14).
- step S 15 the seat leak of each valve V 1 , V 2 , V 3 is checked. That is, in step S 15, V 1 closed, V 2 closed, V 3 opened, after evacuating the inside of the pipe with the control valve 3 open FCS, V 1 closed as in step S 1, V 2 open ⁇ closed ( switching), V 3 in the closed, maintain the pressure between the FCS and holding a pipe 9b between the valve V 3 a pressure display of pressurized FCS to P 1 (control valve 3 and the valve V 3) to.
- step S 16 checking the decompression of the P 1, vacuum is determined that there is a sheet leak valve V 3 If (step S 17). Further, if there reduced pressure, it is determined that no sheet leaks in the valve V 3 (step S 18).
- step S 19 V 1 closed, V 2 closed, V 3 opened, after evacuating the inside of the pipe with the control valve 3 opens the FCS, the valve V 1 closed, V 2 closed, V 3 pipe path is opened reduced pressure 8,9,9B (vacuum) after, the valve V 3 to a closed (step S 20). Then check the pressure display P 1 of the FCS at step S 21, if boosts the pressure display P 1, it is determined that there is no sheet leaks in valves V 1, V 2 at step S 22, to complete the abnormality check (step S 31).
- step S 21 determines whether the valve is a one with a sheet leaks Enter the process.
- step S 24 if there is no abnormality in the diagnostic value, it is determined that there is sheet leaks only valve V 1 (step S 26). Even if sheet leaks to the valve V 1, if there is no sheet leaks to the valve V 2, fluid flowing into the flow monitor with a pressure type flow rate control apparatus 1 (FCS) is only a process gas Gp, thus the actual gas flow rate This is because there is no abnormality in the diagnostic value of the self-diagnosis.
- FCS pressure type flow rate control apparatus 1
- step S 24 when there is abnormality in the diagnostic value in step S 24, the valve V 1 closed in step S 27, the valve V 2 opens, N 2 flow rate self-diagnostic of the flow monitor with a pressure type flow rate control apparatus 1 (FCS) Is done. That is, the pressure drop characteristic when N 2 gas is flowed is compared with the initial pressure drop characteristic, and if the difference between the two is less than the allowable value, it is diagnosed that there is no abnormality in the diagnostic value. If the difference between the two is equal to or greater than the allowable value, the diagnosis value is diagnosed as abnormal.
- FCS pressure type flow rate control apparatus 1
- step S 28 if there is no abnormality in the diagnostic value of the N 2 flow rate self-diagnostic, only the valve V 2 in step S 29 is judged to be a sheet leaks. This is because if the valve V 1 has caused a seat leak, the actual gas will be mixed into N 2 and an abnormality will occur in the flow rate self-diagnosis value of the FCS.
- step S 28 if there is an abnormality in the N 2 flow rate self-diagnostic value in step S 28 , the valve V 1 causes a seat leak, and the mixed gas of N 2 and the actual gas flows into the FCS. This will cause an abnormality in the diagnostic value. Thus, in step S 30, it is determined that both valves V 1 and V 2 is a sheet leaks.
- step S 3 After detecting the abnormality of the valve V 1, V 2, V 3 in step S 3, the operation abnormality of the valve V 1, V 2, V 3, sheet leaks abnormal The flow is to check each in turn. However, if abnormality is detected in step S 3, the type of abnormality from the fluctuation degrees of abnormality is first determined whether there are any abnormal operation or sheet leaks of valves, the operation when the abnormality Step S 4 ⁇ up to step S 13, also the steps S 15 ⁇ step S 30 if sheet leaks abnormal, may be respectively performed for.
- the determination of the abnormal operation can be made from the rate of increase of P 1 or the rate of decrease of P 1 in step S 3 .
- the greater the increase rate of P 1 valve closing abnormality it can be determined that sheet leaks of valves the smaller the increasing rate of P 1 abnormality.
- the flow rate self-diagnosis is to compare the initially set pressure drop characteristic with the pressure drop characteristic at the time of diagnosis as described above, and determine that an abnormality occurs when the difference is outside a predetermined range. .
- the inventors constructed the basic fluid supply system shown in FIG. 19 to simulate a failure (abnormality) and to investigate the pressure drop characteristics at each abnormality.
- the relationship between the obtained pressure drop characteristic and the cause of the occurrence was analyzed, and from the analysis result, it was found that there is a close and constant relationship between the form of the pressure drop characteristic and the cause of the occurrence of the abnormality. That is, it has been found that the cause of the abnormality can be known if the form of the pressure drop characteristic at the time of occurrence of the abnormality is known.
- FIG. 21 shows a specific type of failure A (fault identification) generated in simulation in the flow rate self-diagnosis, a phenomenon B generated thereby, and a general factor C of the failure directly related to the generated phenomenon B.
- failure A fault identification
- the numerical values (1 to 4) in the column of the pressure drop characteristic form indicate the types of the pressure drop characteristic forms respectively generated for the specific failure type A as will be described later.
- the 22 to 28 show the pressure drop characteristics in the flow rate self-diagnosis when each of the specific faults shown in FIG. 21 occurs.
- the horizontal axis represents time, and the vertical axis represents the pressure flow rate.
- the control part 1a that is, the detected pressure of FCS is shown respectively. That is, in FIG. 22, since the supply pressure from the gas supply source side is insufficient, the control pressure is insufficient when the 100% flow rate is held, and the form of the pressure drop characteristic is the form of type 4 described later.
- a gas having a large flow factor (FF) flows into the pressure control unit 1a, that is, the primary side of the FCS, so that the gas can easily escape from the throttle mechanism (orifice).
- the pressure drop in the pressure drop characteristic is accelerated (form of type 3).
- FIG. 24B since a gas having a small flow factor (FF) flows in, it is difficult for the gas to escape from the throttle mechanism (orifice), and the pressure drop in the pressure drop characteristic is delayed (type). 1 form).
- the throttle mechanism is expressed by an orifice.
- FIG. 28 shows a case where the zero point adjustment of the pressure type flow rate control unit 1a is out of order.
- the pressure drop is delayed and the type 1 form is obtained.
- the pressure drop is accelerated, and the pressure drop characteristic is in the form of type 3.
- FIG. 29 collectively shows the types of pressure drop characteristics at the time of the flow rate self-diagnosis shown in FIGS.
- the pressure drop characteristics are roughly classified into the following four types (patterns) 1 to 4.
- Type 1 pressure drop characteristics pressure drop is delayed immediately after diagnosis
- Type 2 pressure drop characteristics pressure drop delays during diagnosis
- the flow rate self-diagnosis of the pressure type flow rate control apparatus 1 with a flow rate monitor is performed (step 40).
- the flow rate self-diagnosis method is the same as the method described with reference to FIG.
- the monitor flow rate abnormality generally includes a zero point deviation of the thermal type flow rate monitoring unit 1b, a zero point deviation of the pressure type flow rate control unit 1a, a fluid supply system abnormality and a pressure type with a flow rate monitor shown in FIG. It has been found that it occurs due to a failure of the flow control device 1 itself.
- step 40 After the flow rate self-diagnosis is performed in step 40 and the result is diagnosed in step 41 and the flow rate self-diagnosis result is within a predetermined normal range, the zero point adjustment of the thermal flow sensor 2 is performed in step 42. In step 43, the monitor flow rate output is confirmed again, and if the flow rate output is within the predetermined normal range in step 44, it is determined that it can be used, and is subsequently used.
- the cause analysis of the flow rate self-diagnosis abnormality is performed according to the description with reference to FIG. 21 to FIG. 29, and it is determined which of the four types the cause of the abnormality corresponds to.
- the flow rate output value of the pressure type flow rate control device with a monitor may be calibrated assuming that the monitored flow rate value is correct.
- a method for calibrating the flow rate output value of the pressure type flow control device with a monitor for example, 5 to 10 flow rate detection points are appropriately selected, and the difference between the monitor flow rate value and the flow rate output value at each point. A method of calibrating using can be used.
- step 46 it is checked whether or not there is a deviation in the zero point of the pressure sensor. If there is no deviation in the zero point of the pressure sensor, it is determined in step 47 whether or not there is an abnormality in the fluid supply system. To check. Conversely, if it is found in step 46 that there is a deviation in the zero point of the pressure sensor, the zero point of the pressure sensor is adjusted in step 48, and then the process returns to step 40 to execute the flow rate self-diagnosis.
- step 47 it is checked whether the cause of the abnormality corresponds to an abnormality in the fluid supply system. If the abnormality does not correspond to the abnormality in the fluid supply system, the cause of the monitor flow rate abnormality is added to the pressure type flow control device with a flow monitor itself. It is judged that there is, and the replacement of the pressure type flow rate control device with a flow rate monitor is performed. If it is determined in step 47 that the cause of the abnormality corresponds to an abnormality in the fluid supply system, the fluid supply system is repaired or restored in step 49, and then the process returns to step 40 to return to flow rate self-diagnosis. To do.
- the present invention can be widely applied not only to gas supply equipment for semiconductor manufacturing equipment but also to all fluid supply equipment using a pressure type flow rate control device with a flow rate monitor having a pressure sensor in the chemical industry or the food industry.
- A is a process gas supply system A 1 is a pipe B is a purge gas supply system B 1 is a pipe C is a process gas using system E is a process chamber
- FCS is a pressure type flow control device V 1 to V 3 is a valve
- Go is a purge gas Gp is a process gas
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Abstract
Description
この圧力式流量制御装置FCSは、図16に示すようにコントロール弁CV、温度検出器T、圧力検出器P、オリフィスOL及び演算制御部CD等から構成されており、その演算制御部CDは、温度補正・流量演算回路CDa、比較回路CDb、入出力回路CDc及び出力回路CDd等から構成されている。
また、絞り部26は、その一次側と二次側における圧力差が所定値以上であるときに一次側の圧力に応じた流量の流体を流す音速ノズルである。尚、図17及び図18に於いて、SPa、SPbは圧力信号、Pa、Pbは圧力、Fは流量、Sfは流量信号、Cpは弁開度制御信号である。
第1の問題は、演算制御部28aが、第2圧力センサ27bの出力SPbと熱式流量センサ25の流量出力Sfの両信号を用いて開閉制御弁24を開閉制御すると共に、第1圧力センサ27aの出力SPaを用いて熱式流量センサ25の流量出力Sfを補正する構成としており、第1圧力センサ27a及び第2圧力センサ27bの二つの圧力信号と熱式流量センサ25からの流量信号との三つの信号を用いて、開閉制御弁24の開閉制御を行うようにしている。
そのため、演算制御部28aの構成が複雑になるだけでなく、圧力式流量制御装置FCSとしての安定した流量制御特性や優れた高応答性が逆に低減されてしまうと云う問題がある。
更に、前記各ガス供給系A、B及びガス使用系Cには夫々バルブV1、V2及びV3が夫々介設されている。
図6及び図7に於いて、1は流量モニタ付圧力式流量制御装置、2は熱式流量センサ、3はコントロール弁、4は温度センサ、5は圧力センサ、6はオリフィス、7は制御部、8は入口側流路、9は出口側流路、10は機器本体内の流体通路であり、図6に於ける熱式流量センサ2とコントロール弁3の取付位置を入れ替えしたものが図7の流量モニタ付圧力式流量制御装置である。
また、熱式流量センサ2を流量モニタ用センサとしたのは、主として流量やセンサとしての使用実績と流量センサとしての優れた特性のためであり、また、リアルタイム測定の容易性、ガス種の変化に対する対応性、流量測定精度、使用実績等が他の流量測定センサよりも高い点を勘案した結果である。更に、オリフィスを用いた圧力式流量制御装置の機器本体内の流体通路10に熱式流量センサ2を一体的に組み付けしたのは、流量モニタが行い易く且つ流量モニタ付き圧力式流量制御装置の小型化が図り易いからである。
更に、流体供給源側の流体圧力に変動があっても、熱式流量センサ2の出力特性に大きな変動が発生せず、結果として流体供給側の圧力変動に対して安定した流量モニタと流量制御が行える。
図1は本発明に係る流量モニタ付圧力式流量制御装置1の実施形態に係る構成概要図であり、流量モニタ付圧力式流量制御装置1は、圧力式流量制御部1aと熱式流量モニタ部1bとの二つの部分から構成されている。
また、この圧力式流量制御部1aには、公知の零点調整機構や流量異常検出機構、ガス種変換機構(F.F.値変換機構)等の各種付属機構が設けられていることは勿論である。
更に、図1に於いて8は入口側通路、9は出口側通路、10は機器本体内の流体通路である。
即ち、図4に示すように、熱式流量センサ2は、バイパス群2dとこれを迂回するセンサ管2eとを有しており、これにバイパス群2dと比較して少量のガス流体を一定の比率で流通させている。
また、このセンサ管2eには直列に接続された制御用の一対の抵抗線R1、R4が巻回されており、これに接続されたセンサ回路2bによりモニタされた質量流量値を示す流量信号2cを出力する。
また、本実施形態においては、熱式流量モニタ部1bとして、株式会社フジキン製のFCS-T1000シリーズに搭載されるセンサを使用している。
図1を参照して、流量モニタ付圧力式流量制御装置の圧力式流量制御部1aは、実質的に図16に示した従前の圧力式流量制御装置FCSと同等の構成を有しており、当該圧力式流量制御部1aには、流量の設定機構に該当する流量設定回路(図示省略)と、圧力の表示機構に該当する圧力表示機構(図示省略)と流量を表示する流量出力回路(図示省略)等が設けられている。
また、当該圧力式流量制御部1aには、所謂流量自己診断機構(図示省略)が設けられており、後述するように初期設定した圧力降下特性と診断時の圧力降下特性とを対比して、異常状態を判定すると共にその判定結果を出力するよう構成されている。
尚、図19において、V1、V2、V3はバルブであり、流体圧駆動部や電動駆動部を備えた自動開閉弁が一般に使用されている。
イ バルブV1の動作異常
a.所定の実ガス(プロセスガスGp)を流通せしめて、FCSにより所定の設定流量のガスを流通させる。この時、FCSの流量指示値や圧力指示値(配管路8及び又は配管路9)が0へと変化する場合には、バルブV1の動作に異常(不動作)があることになる。
b.FCSへ所定の実ガス(プロセスガスGp)を流通せしめて、FCSの実ガス制御流量が所定流量となっているか否かを診断中(以下、実ガス流量自己診断時と呼ぶ)に、FCSから供給圧不足のエラー信号が発信された場合には、バルブV1の動作に異常(不動作)があることになる。
a.パージガスGとしてN2を流通せしめて、FCSにより所定の設定流量のガスを流通させる。この時FCSの流量指示値や圧力指示値が0へと変化する場合には、バルブV2の動作異常(不動作)があることになる。
b.FCSへN2ガスを流通せしめて、FCSのN2制御流量が設定流量となっているか否かを診断中(以下、N2流量自己診断時と呼ぶ)に、FCSから供給圧不足のエラー信号が発信された場合には、バルブV2の動作に異常(不動作)があることになる。
a.N2又は実ガスを流した状態下におけるN2流量自己診断時又は実ガス流量自己診断時に、FCSから流量自己診断エラー信号が発信された場合には、バルブV3の動作に異常(不動作)があることになる。
b.配管9b等の真空引きの際に、FCSの圧力出力表示が零に下降しない場合には、バルブV3の動作に異常(不動作)があることになる。
c.FCSの流量設定時に、前記流量設定値を適宜に変化させてもFCSの圧力表示値に変化がない場合には、バルブV3の動作異常(不動作)があることになる。
イ バルブV1のシートリーク
a.N2によるFCSの流量自己診断時に、バルブV1にシートリークがあると、N2が実ガスGp側へ逆流し、バルブV1の上流側の実ガスGpがN2と実ガスGpとの混合ガスになる。
その後、FCSの実ガス流量自己診断を実施すると、当該実ガス流量自己診断が混合ガスで行われることになり、診断値が異常値となる。
この診断値が異常値となることにより、バルブV1にシートリークがあることが判明する。
実ガス流量自己診断時の診断値が異常値となった場合には、バルブV2にシートリークが発生していることになる。
何故なら、FCSの上流側配管8の実ガスGp内へN2ガスが混入することになり、FCSでは混合ガスによる実ガス流量自己診断が行われるために、診断値が異常値となる。
FCSによる流量制御の完了後、バルブV3を閉の状態に保持すると共に、FCSの流量設定を0(流量が零となるように設定)にする。
その後、FCSの圧力指示値が下降すれば、バルブV3にシートリークが発生していることになる。
尚、本フローシートは、図19において、イ.各バルブV1、V2、V3、FCS及び配管系8、9、9b等には、シートリーク以外の外部リーク(例えば継手やボンネット等からの漏れ)は無いこと、ロ.各バルブの駆動部は正常に動作すること、ハ.FCSは正常に動作すること、ニ.V1、V2は同時に開放することが無いこと等が前提となっている。
また、P1が上昇すれば、V2の動作は正常と判断される(ステップS11)。
その後ステップS21でFCSの圧力表示P1をチェックし、圧力表示P1が増圧しなければ、ステップS22でバルブV1、V2にシートリークが無いと判断して、異常チェックを完了する(ステップS31)。
尚、流量自己診断とは、前記したように初期設定した圧力降下特性と診断時の圧力降下特性とを対比し、その差が予め定めた範囲外となった場合に異常と判断するものである。
また、圧力降下特性の形態の欄の数値(1~4)は、後述するように具体的な故障の種類Aに対して夫々発生する圧力降下特性の形態の類形を示すものである。
即ち、図22では、ガス供給源側からの供給圧不足のために、100%流量保持時に制御圧が不足することになり、圧力降下特性の形態が後述する類形4の形態となる。
また、図23・(b)では、オリフィス2次側の外部からリークガスが2次側へ流入するためオリフィス2次側圧力が上昇し、圧力降下特性の形態は上記図23・(a)の場合と同じ類形2の形態となる。
逆に、図24・(b)では、フローファクタ(F.F.)の小さなガスが流入するため、絞り機構(オリフィス)からガスが抜け難くなり、圧力降下特性における圧力降下が遅れる(類形1の形態)。尚、以下の記述では、絞り機構をオリフィスでもって表現する。
逆に、図25・(b)ではオリフィスが拡経するため、オリフィスからガスが抜け易くなり、圧力降下が早まることになる(類形3の形態)。
また、零点がマイナス側に変動しているときには、圧力降下が早まることになり、その圧力降下特性は類形3の形態となる。
[類形1の圧力降下特性(診断直後から圧力降下が遅れる)]
フローファクタの小さなガスの混入、オリフィスへの生成物の付着・ゴミ詰まり、コントロールバルブのゴミの噛み、生成物付着(シートリーク)、ゼロ点のプラス変動等の故障の場合に発生する。
[類形2の圧力降下特性(診断途中から圧力降下が遅れる)]
2次側バルブのエアオペレーション機構の故障、2次側への外部からのリーク等の故障の場合に発生する。
[類形3の圧力降下特性(診断直後から圧力降下が早くなる)]
フローファクタの大きなガスの混入、不適切なゼロ点入力、腐食による穴(オリフィス)の詰まり、オリフィスプレートの破損、ゼロ点のマイナス変動等の故障の場合に発生する。
[類形4の圧力降下特性(診断時の初期が100%流量に達しない)]
供給圧力の不足、1次側バルブのエアオペレーション機構の故障、(プレフィルタの)ゴミ詰まり、コントロールバルブ駆動部の伝達系の異常(コントロールバルブの故障)等の場合に発生する。
尚、流量自己診断方法は、前記図20等により説明した方法と同様である。また、当該モニタ流量の異常は、一般に図1に示した熱式流量モニタ部1bのゼロ点のずれ、圧力式流量制御部1aのゼロ点のずれ、流体供給系の異常及び流量モニタ付圧力式流量制御装置1自体の故障等が原因となって発生することが判明している。
尚、当該モニタ付圧力式流量制御装置の流量出力値の校正方法としては、例えば流量検出点を5~10点ほど適宜に選定し、各点に於けるモニタ流量値と流量出力値との差異を用いて校正する方法等が可能である。
逆に、前記ステップ46で圧力センサのゼロ点にずれが在ることが判れば、ステップ48で圧力センサのゼロ点を調整したあと、再度処理をステップ40へ戻して流量自己診断を実行する。
また、ステップ47で、異常の要因が流体供給系の異常に該当すると判明した場合には、ステップ49で流体供給系の補修若しくは復旧を行い、その後、処理を再度ステップ40へ戻して流量自己診断を行なう。
1aは 圧力式流量制御部
1bは 熱式流量モニタ部
2は 熱式流量センサ
2bは センサ回路
2dは バイパス管群
2eは センサ管
3は コントロール弁
3aは 弁駆動部
4は 温度センサ
5は 圧力センサ
6は オリフィス
7は 制御部
7aは 圧力式流量演算制御部
7bは 流量センサ制御部
7a1は 入力端子
7a2は 出力端子
7b1は 入力端子
7b2は 出力端子
8は 入口側通路
9は 出口側通路
10は 機器本体内の流体通路
11は ガス供給源
12は 圧力調整器
13は パージ用バルブ
14は 入力側圧力センサ
15は データロガ
16は 真空ポンプ
17は 圧力センサ
Pdは コントロール弁の制御信号
Pcは 流量信号
A1は 流量設定入力
A2は 圧力式流量制御装置の流量出力
B1は 熱式流量センサ出力(図6・熱式流量センサが1次側の場合)
B2は 熱式流量センサ出力(図7・熱式流量センサが2次側の場合)
Aは プロセスガス供給系
A1は 配管
Bは パージガス供給系
B1は 配管
Cは プロセスガス使用系
Eは プロセスチャンバ
FCSは圧力式流量制御装置
V1~V3はバルブ
Goは パージガス
Gpは プロセスガス
Claims (12)
- 流体の入口側通路と,入口側通路の下流側に接続した圧力式流量制御部を構成するコントロール弁と,コントロール弁の下流側に接続した熱式流量センサと,熱式流量センサの下流側に連通する流体通路に介設したオリフィスと,前記コントロール弁とオリフィスの間の流体通路の近傍に設けた温度センサと,前記コントロール弁とオリフィスの間の流体通路に設けた圧力センサと,前記オリフィスに連通する出口側通路と,前記圧力センサからの圧力信号及び温度センサからの温度信号が入力され、オリフィスを流通する流体の流量値Qを演算すると共に演算した流量値と設定流量値との差が減少する方向に前記コントロール弁を開閉作動させる制御信号Pdを弁駆動部へ出力する圧力式流量演算制御部及び前記熱式流量センサからの流量信号が入力され当該流量信号からオリフィスを流通する流体流量を演算表示する流量センサ制御部とからなる制御部と,から構成したことを特徴とする流量モニタ付圧力式流量制御装置。
- 圧力センサを、コントロール弁の出口側と熱式流量センサの入口側の間に設けるようにした請求項1に記載の流量モニタ付圧力式流量制御装置。
- 流量センサ制御部で演算した流体流量と圧力式流量演算制御部で演算した流体流量間の差が設定値を越えると警報表示を行う制御部とした請求項1又は請求項2に記載の流量モニタ付圧力式流量制御装置。
- コントロール弁,熱式流量センサ,オリフィス,圧力センサ,温度センサ,入口側通路,出口側通路を一つのボディ体に一体的に組み付けすると共に、流体通路をボディ体に一体的に形成するようにした請求項1に記載の流量モニタ付圧力式流量制御装置。
- 流体の入口側通路と,入口側通路の下流側に接続した圧力式流量制御部を構成するコントロール弁と,コントロール弁の下流側に接続した熱式流量センサと,熱式流量センサの下流側に連通する流体通路に介設したオリフィスと,前記コントロール弁とオリフィスの間の流体通路の近傍に設けた温度センサと,前記コントロール弁とオリフィスの間の流体通路に設けた圧力センサと,前記オリフィスに連通する出口側通路と,前記オリフィスの下流側の出口側通路に設けた圧力センサと,前記圧力センサ及び圧力センサからの圧力信号及び温度センサからの温度信号が入力され、オリフィスを流通する流体の臨界膨張条件の監視やオリフィスを流通する流体の流量値Qを演算すると共に、演算した流量値と設定流量値との差が減少する方向に前記コントロール弁を開閉作動させる制御信号Pdを弁駆動部へ出力する圧力式流量演算制御部及び前記熱式流量センサからの流量信号が入力され当該流量信号からオリフィスを流通する流体流量を演算表示する流量センサ制御部とからなる制御部と,から構成したことを特徴とする流量モニタ付圧力式流量制御装置。
- オリフィスを流通する流体が臨界膨張条件を外れると、警報表示を行う制御部とした請求項5に記載の流量モニタ付圧力式流量制御装置。
- コントロール弁,熱式流量センサ,オリフィス,圧力センサ,温度センサ,入口側通路,出口側通路,圧力センサを一つのボディ体に一体的に組み付けすると共に、流体通路をボディ体に一体的に形成するようにした請求項5に記載の流量モニタ付圧力式流量制御装置。
- 流量の設定機構と流量及び圧力の表示機構及び又は流量自己診断機構とで構成される圧力センサを保有する流量モニタ付圧力式流量制御装置を備えた流体供給系における前記流量モニタ付圧力式流量制御装置の上流側及び又は下流側に設けたバルブの異常を、前記流量モニタ付圧力式流量制御装置の圧力の表示値及び又は流量自己診断機構の診断値を用いて検出する方法であって、異常検出の対象とするバルブを、流量モニタ付圧力式流量制御装置の上流側に設けたパージガス供給系のバルブとプロセスガス供給系のバルブ及び流量モニタ付圧力式流量制御装置の下流側のプロセスガス使用系に設けたバルブとすると共に、検出する異常の種類をバルブの開閉動作及びシートリークとした流量モニタ付圧力式流量制御装置を用いた流体供給系の異常検出方法。
- 流量モニタ付圧力式流量制御装置の流量自己診断機構を、初期設定をした圧力降下特性と診断時の圧力降下特性とを対比して異常を診断する構成の機構とすると共に、プロセスガスとパージガスとの混合ガスが流入した際の前記診断値の変化から、プロセスガス供給系又はパージガス供給系のバルブのシートリークを検出するようにした請求項8に記載の流量モニタ付圧力式流量制御装置を用いた流体供給系の異常検出方法。
- 流量の設定機構と流量及び圧力の表示機構及び又は流量自己診断機構とで構成される圧力センサを保有する流量モニタ付圧力式流量制御装置を備えた流体供給系における前記流量モニタ付圧力式流量制御装置並にその上流側及び又は下流側に設けたバルブの異常を、前記流量モニタ付圧力式流量制御装置の圧力の表示値及び又は流量自己診断機構を用いて検出する方法において、前記流量モニタ付圧力式流量制御装置の流量自己診断機構を、初期設定をした圧力降下特性と診断時の圧力降下特性とを対比して異常を診断する構成の機構とすると共に、当該流量自己診断機構による流量自己診断時の圧力降下特性が、前記初期設定時の圧力降下特性に対比して、診断直後から圧力降下が遅れ出すか、診断途中から圧力降下が遅れ出すか、診断直後から圧力降下が早まるか、診断開始時の圧力が初期設定時の圧力に達していないか、の何れの形態に該当するかを判別し、前記判別された流量自己診断時の圧力降下特性の形態から、検出された異常の原因を判定するようにした流量モニタ付圧力式流量制御装置を用いた流体供給系の異常検出方法。
- 請求項10に記載の流体供給系の異常検出方法を用いて流量自己診断をし、流量自己診断時の圧力降下特性の形態から検出された異常の原因を判定したあと圧力センサのゼロ点のずれを確認し、ゼロ点がずれている場合にはそのゼロ点を調整してから再度流量自己診断を行い、また、前記ゼロ点にずれが無い場合には前記判定した異常の原因が流体供給系の異常か否かを判別し、流体供給系が異常の場合には流体供給系の異常を復旧させ、また、流体供給系に異常が無い場合には前記流量モニタ付圧力式流量制御装置自体の異常と判断してその取換えをするようにした流量モニタ付圧力式流量制御装置を用いた流体供給系のモニタ流量異常時の処置方法。
- 請求項10に記載の流体供給系の異常検出方法を用いて流量自己診断をし、前記流量モニタ付圧力式流量制御装置のオリフィスの径変化が原因でモニタ流量が異常の場合には、モニタ流量を正として前記流量モニタ付圧力式流量制御装置の校正を行うようにした流量モニタ付圧力式流量制御装置を用いた流体供給系のモニタ流量異常時の処置方法。
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US15/450,417 US10386861B2 (en) | 2011-05-10 | 2017-03-06 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same |
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Cited By (9)
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JPWO2020031629A1 (ja) * | 2018-08-10 | 2021-08-10 | 株式会社フジキン | 流体制御装置、流体制御機器、及び動作解析システム |
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CN109738030A (zh) * | 2019-01-25 | 2019-05-10 | 中国计量大学 | 压力位差式层流流量测量方法及装置 |
CN109738030B (zh) * | 2019-01-25 | 2023-10-03 | 中国计量大学 | 压力位差式层流流量测量方法及装置 |
CN111665877A (zh) * | 2020-06-18 | 2020-09-15 | 北京七星华创流量计有限公司 | 压力控制方法和装置、光伏设备 |
CN111665877B (zh) * | 2020-06-18 | 2023-04-14 | 北京七星华创流量计有限公司 | 压力控制方法和装置、光伏设备 |
WO2022240775A1 (en) * | 2021-05-10 | 2022-11-17 | Applied Materials, Inc. | Packaging for a sensor and methods of manufacturing thereof |
Also Published As
Publication number | Publication date |
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CN103518165B (zh) | 2016-06-08 |
TW201305765A (zh) | 2013-02-01 |
KR20140039181A (ko) | 2014-04-01 |
KR20140003611A (ko) | 2014-01-09 |
US20140182692A1 (en) | 2014-07-03 |
US20160370808A1 (en) | 2016-12-22 |
US9870006B2 (en) | 2018-01-16 |
CN103518165A (zh) | 2014-01-15 |
KR101599343B1 (ko) | 2016-03-03 |
CN103502902A (zh) | 2014-01-08 |
US9632511B2 (en) | 2017-04-25 |
US20140230911A1 (en) | 2014-08-21 |
TWI492014B (zh) | 2015-07-11 |
TW201312311A (zh) | 2013-03-16 |
TWI488017B (zh) | 2015-06-11 |
US20170234455A1 (en) | 2017-08-17 |
US10386861B2 (en) | 2019-08-20 |
JP5605969B2 (ja) | 2014-10-15 |
JPWO2012153454A1 (ja) | 2014-07-31 |
WO2012153455A1 (ja) | 2012-11-15 |
JP5727596B2 (ja) | 2015-06-03 |
US9494947B2 (en) | 2016-11-15 |
JPWO2012153455A1 (ja) | 2014-07-31 |
CN103502902B (zh) | 2015-12-02 |
KR101550255B1 (ko) | 2015-09-04 |
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