WO2012111254A1 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- WO2012111254A1 WO2012111254A1 PCT/JP2012/000313 JP2012000313W WO2012111254A1 WO 2012111254 A1 WO2012111254 A1 WO 2012111254A1 JP 2012000313 W JP2012000313 W JP 2012000313W WO 2012111254 A1 WO2012111254 A1 WO 2012111254A1
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Definitions
- the present invention relates to a semiconductor device and a method of manufacturing the same.
- Control devices for example, inverter control devices
- semiconductor devices for example, power modules
- Patent Document 1 describes a semiconductor device in which a recessed creeping surface structure (concave structure) is provided in a region between external terminals, and the creeping distance is secured by the recessed creeping surface structure.
- FIGS. 11A to 11C show a conventional semiconductor device provided with a general creeping structure.
- the semiconductor device provided with the conventional creeping surface structure includes a lead frame 103, a power element 101 held on a die pad 109A, a control element 111 held on a die pad 109B, and an outer package made of a resin material. And 106.
- the lead frame 103 has a plurality of leads (external terminals) 105 and a plurality of die pads 109A and 109B.
- the package 106 seals the die pad 109A, 109B and the end of each lead 105 on the die pad 109A, 109B side, including the power element 101 and the control element 111.
- the power element 101 and the end of the lead 105 on the side of the die pad 109 A are electrically connected by the metal member 121.
- the control element 111 and the power element 101, and the end of the lead 105 on the die pad 109B side are electrically connected by a gold (Au) wire 122.
- the concave structure 106a is provided in the region between the plurality of leads 105 in the package 106 respectively. It is formed.
- the conventional semiconductor device secures the creeping distance between the leads 105 adjacent to each other by each concave structure 106a, and reduces the distance between the leads 105, thereby achieving the miniaturization of the semiconductor device. There is.
- An object of the present invention is to realize a semiconductor device in which a creeping distance is secured without providing a concave structure in an outer package.
- a semiconductor device includes a lead having a notch, a die pad, a first element held by the die pad, and a die pad including the first element and a lead.
- the outer case is made of a resin material for sealing the inner end portion of the lead, and the notch is disposed in the region including the boundary portion with the outer case at the lead and is filled with the resin material.
- the die pad portion for holding the first element and the lead having the notch portion are prepared, and the notch portion of the lead is disposed at the clamp position of the mold By injecting a resin material for stopping into the mold, the resin material seals the die pad portion including the first element and the inner end portion of the lead.
- the semiconductor device and the method of manufacturing the same according to the present invention it is possible to realize a semiconductor device in which the creepage distance is secured without forming a concave structure in the outer package.
- FIG. 1A is a plan view showing a semiconductor device according to an embodiment of the present invention.
- FIG.1 (b) is the top view to which the area
- FIG. 1C is a detailed plan view of the region A.
- Fig.2 (a) is the top view to which area
- FIG.2 (b) is the top view to which area
- FIG. 2C is an enlarged plan view of the region A of the semiconductor device according to another embodiment.
- FIG. 3A is a bottom view showing a semiconductor device according to an embodiment of the present invention.
- FIG.3 (b) is the bottom view to which the area
- FIG. 4A is a plan view showing the internal structure of a semiconductor device according to an embodiment of the present invention.
- FIG.4 (b) and FIG.4 (c) are partial top views which show the modification of the shape of the notch part which concerns on one Embodiment.
- FIG. 5 is a cross-sectional view taken along the line VV of FIG.
- FIG. 6 is a schematic cross-sectional view showing a step of the method of manufacturing the semiconductor device according to the embodiment of the present invention.
- FIG. 7 is a schematic cross-sectional view showing one step of a method of manufacturing a semiconductor device according to an embodiment of the present invention.
- FIG. 8 is a schematic cross-sectional view showing a step of the method of manufacturing the semiconductor device according to the embodiment of the present invention.
- FIG. 9 is a schematic cross-sectional view showing a process of the method of manufacturing a semiconductor device according to the embodiment of the present invention.
- FIG. 10 is a schematic cross-sectional view showing a step of the method of manufacturing the semiconductor device according to the embodiment of the present invention.
- FIG. 11A is a plan view showing a conventional semiconductor device.
- FIG.11 (b) is the top view to which the area
- FIG. 11C is a schematic plan view showing the internal structure of the conventional semiconductor device.
- the present invention is not limited to the contents described below as long as it is based on the basic features described in the present specification.
- FIG. 1A is a plan view showing a semiconductor device according to an embodiment of the present invention.
- FIG.1 (b) is the top view to which the area
- FIG. 1C is a detailed plan view of the region A.
- FIG. 3A is a bottom view showing a semiconductor device according to an embodiment of the present invention.
- FIG.3 (b) is the bottom view to which the area
- FIG. 4A is a plan view showing an internal structure of a semiconductor device according to an embodiment of the present invention.
- FIG.4 (b) and FIG.4 (c) are partial top views which show the modification of the shape of the notch part which concerns on one Embodiment.
- FIG. 5 is a cross-sectional view taken along the line VV of FIG.
- the semiconductor device 15 includes the power device 1, the heat sink 2, the lead frame 3, the control device 4, and the exterior body 6.
- the lead frame 3 has a first die pad portion 9, a second die pad portion 11, and a plurality of leads 5 serving as external terminals.
- the package 6 integrally seals the inner end portions of the power element 1, the control element 4 and the leads 5.
- the exterior body 6 is made of a resin material for sealing.
- the power element 1 is an example of a first element.
- the control element 4 is an example of a second element.
- a power module is an example of the semiconductor device 15 of the present embodiment.
- the semiconductor device 15 of the present embodiment is used, for example, by being incorporated in a control device.
- the lead frame 3 is made of, for example, a material having excellent conductivity such as copper (Cu).
- the leads 5 protruding from the side surface of the exterior body 6 constitute an external terminal, and are connected to a circuit such as an inverter control device as a mounting terminal of the present semiconductor device 15.
- the power element 1 is fixed and held on the upper surface 9 a of the first die pad portion 9 of the lead frame 3 by, for example, a brazing material 8 or a silver (Ag) paste material.
- a bonding pad (not shown) of power element 1 and a plurality of leads 5 of lead frame 3 are electrically connected to each other by metal member 21.
- metal member 21 For example, an IGBT (insulated gate bipolar transistor) or a MOSFET (metal oxide film field effect transistor) can be used as the power element 1.
- a metal wire made of aluminum (Al) wire, gold (Au), copper (Cu) or the like, an aluminum (Al) ribbon or a copper (Cu) clip can be used.
- the aluminum ribbon or copper clip has a large cross-sectional area and a small resistance value of the wiring as compared with the aluminum wire, the power loss in the metal member 21 can be reduced.
- a lateral power MOSFET with a built-in diode is used as an example of the power element 1
- an aluminum wire is used as an example of the metal member 21.
- the heat dissipation plate 2 is fixed to the lower surface 9 b of the first die pad portion 9 in the lead frame 3 through the insulating sheet 10.
- a metal excellent in thermal conductivity such as copper (Cu) or aluminum (Al) can be used.
- the insulating sheet 10 is made of a thermally conductive insulating material, and has, for example, a three-layer structure in which the insulating layer is sandwiched between adhesive layers.
- the insulating sheet 10 is provided to efficiently conduct the heat generated by the power element 1 to the heat sink 2.
- the control element 4 incorporates, for example, a drive circuit and an overcurrent protection circuit.
- the control element 4 is fixed and held on the upper surface 11 a of the second die pad portion 11 in the lead frame 3 by, for example, a silver (Ag) paste material 16.
- the bonding pads (not shown) of control element 4 and the plurality of leads 5 of lead frame 3 are electrically connected to each other by gold (Au) wire 22.
- the bonding pad (not shown) of power element 1 and the bonding pad (not shown) of control element 4 are electrically connected by gold wire 22.
- the power element 1 can be controlled by the control element 4 by the gold wire 22.
- the exterior body 6 covers the power element 1, the first die pad portion 9, the control element 4, the second die pad portion 11 and the inner end portion of each lead 5, and the upper surface and the side surface 2 c of the heat dissipation plate 2. Therefore, the lower surface 2 b of the heat sink 2 is exposed from the lower surface 6 b of the exterior body 6.
- the lower surface 2 b of the heat sink 2 is exposed from the lower surface 6 b of the exterior body 6. Therefore, the heat generated in the power element 1 can be efficiently conducted from the lower surface 2 b of the heat sink 2 to the outside. Moreover, since the side surface 2 c of the heat sink 2 is covered by the exterior body 6, the bonding between the heat sink 2 and the lead frame 3 is strong.
- the notch (concave portion) 5 a is formed in advance on the side surface of the lead 5 as the external terminal protruding from the side surface of the exterior body 6. It features. Therefore, in the semiconductor device 15 according to the present embodiment, as shown in FIG. 1B and FIG. 3B, the resin material constituting the exterior body 6 in the notch 5a formed on the side surface of the lead 5 A resin-filled portion 6c is formed by being filled with
- the resin material is simultaneously filled in the step of sealing the exterior body 6 to the notch 5a formed in the lead 5 in advance to form the resin filling portion 6c. ing.
- the resin filling portion 6 c has an integral structure in which there is no interface with the exterior body 6.
- the lead 5 provided with the notch 5 a is a lead directly connected to the control element 4. This is because, generally, the number of input / output signals required for the control element 4 is larger than the number of input / output signals required for the power element 1. Therefore, in order to miniaturize the semiconductor device itself, it is necessary to reduce the distance between the leads 5 directly connected to the control element 4 as shown in FIG. 1A.
- the notch 5a of the lead 5 connected to the power element 1 is used. In advance to form the resin filling portion 6c.
- FIG. 1 (c) is an enlarged view of FIG. 1 (b).
- the dam bar 5b is cut so that the dam bars 5b are left on the side surfaces of the plurality of leads 5, respectively, and the deburring of the resin filling portion 6c is performed. Is doing.
- the resin-filled portion 6c and the notch portion 5a of the semiconductor device 15 according to the present embodiment are not in contact with the dam bar 5b, as shown in FIG. 1 (c), and inside the dam bar 5b 6) are provided. This is to prevent the resin filled portion 6 c from being cut by the dam bar cutting blade 14 when the dam bar 5 b is cut.
- FIG. 2 (c) is constituted by the steps of FIG. 2 (a) and FIG. 2 (b).
- FIG.2 (a) is a figure which shows the state which filled resin between notch part 5a in another form.
- FIG. 2B is a view in which a groove 6 d is formed by cutting the resin filled between the notches 5 a with the dam bar cutting blade 14 in another embodiment.
- the dambar cutting blade 14 is configured not to cut the resin-filled portion 6c.
- the dambar cutting blade 14 is not.
- the resin filling portion 6c of another form is cut to form the groove 6d.
- the resin filling portion 6 c in which the groove 6 d is formed between the leads 5 can be configured.
- the creeping distance can be increased by forming the grooves 6d as shown in FIGS. 2 (a) to 2 (c).
- the dambar cutting blade 14 when it is desired to increase the creepage distance, it is desirable to insert the dambar cutting blade 14 into the exterior body 6 and provide a recess in the exterior body 6 as shown in FIG. 2C. At this time, since the height (width in the direction perpendicular to the sheet of the drawing) of the exterior body 6 is sufficiently larger than that of the lead 5, the exterior body 6 does not break or the like. As described above, by forming the recess in the exterior body 6 with the dam bar cutting blade 14, a part of the groove 6 d formed in the resin-filled portion 6 c can be disposed in the exterior body 6.
- the exterior body 6 is made of, for example, a thermosetting resin material such as an epoxy resin. It is desirable to use the material which knead
- alumina aluminum oxide
- the thermal conductivity of the resin-filled portion 6c can be improved.
- the leads 5 including the resin-filled portion 6 c need to have a predetermined strength. Therefore, in the semiconductor device 15 of this embodiment, in FIG. 1B, the distance L2 between the resin-filled portions 6c in one lead 5 is L2 ⁇ 0.4 mm. Although the distance L2 between the resin-filled portions 6c differs depending on the material, width and length of the lead 5, it is desirable that at least L2 ⁇ 0.4 mm. Here, the distance L2 is substantially equal to the width of the portion of the lead 5 in which the notch 5a is provided.
- the lead 5 can be given a predetermined strength, and an increase in resistance of the lead 5 provided with the notch 5a can be suppressed.
- the length L4 of the resin-filled portion 6c is set to the protrusion length L3 of the lead 5 of 2.0 mm or more in order to increase the creepage distance between the adjacent leads 5 as much as possible.
- L4 2.0 mm at the maximum for 5.0 mm or less.
- the resin filled portion 6c can be provided on both side surfaces of the lead 5, as shown in FIG. 1B, as long as the lead 5 has sufficient strength. If the resin-filled portion 6 c is provided on at least one of the adjacent leads 5, the creeping distance between the leads 5 can be increased. However, when it is desired to make the creepage distance as long as possible, it is desirable to provide the resin-filled portions 6 c on both side surfaces of one lead 5.
- the length L5 (see FIG. 4A) of the notch 5a disposed in the outer package 6 may be larger than the diameter of the filler to be mixed with the resin material.
- L5 ⁇ 20 ⁇ m is set.
- the wall surface shape of the notch 5a disposed in the exterior body 6 may be inclined toward the inside of the exterior body 6 as shown in FIG. 4 (b). Further, as shown in FIG. 4 (c), it may be stepped. By making the shape of the wall surface as shown in FIG. 4B or 4C, the resin material for forming the resin filling portion 6c can be easily filled.
- the notch 5 a is formed in advance at the boundary with the exterior body 6 in the lead 5 serving as the external terminal. And the resin filling part 6c with which the resin material which comprises the exterior body 6 was filled is provided in this notch part 5a.
- the shape of the exterior body 6 is simple, the structure of a mold for manufacturing the exterior body 6 can be simplified.
- the resin material filled in the resin filling portion 6c is filled when the resin material constituting the exterior body 6 is injected. Accordingly, the composition of the resin material constituting the exterior body 6 and the resin material constituting the resin-filled portion 6c are the same.
- each notch 5a is made of a resin material having a composition different from that of the resin material forming the exterior body 6, for example, an insulating resin material having a low dielectric constant or an insulating resin material having high heat dissipation. It is also possible to fill By filling the cutout portion 5 a with a low dielectric constant insulating resin material, the insulation of the resin-filled portion 6 c can be enhanced. Moreover, the heat dissipation of the resin filling part 6c can be improved by being filled with the insulating resin material with high heat dissipation in the notch part 5a.
- the heat sink 2 with the insulating sheet 10 temporarily attached to the upper surface is placed on the bottom of the lower mold 12 with the insulating sheet 10 at the top.
- the lower mold 12 is assembled such that the power frame 1 and the control element 4 are fixed and the lead frame 3 connected by the metal member and the gold wire is in contact with the insulating sheet 10 with the lower surface 9 b of the first die pad portion 9.
- the notch 5 a is formed in advance in the lead 5 directly connected to the control element 4.
- a mechanical pressing method or a chemical etching method can be used to form the notch 5a.
- 6 to 10 are cross-sectional views equivalent to FIG. 5, and the illustration of the metal member 21 and the gold wire 22 is omitted.
- a mold insertion pin 13A is formed in the upper mold 13 corresponding to the lower mold 12.
- the end of the notch portion 5a on the side surface side of the lead 5 serving as the external terminal does not overflow the resin material from the notch portion 5a.
- the upper mold 13 is lowered toward the lower mold 12, and the lead frame 3 is clamped vertically by the upper mold 13 and the lower mold 12.
- the plurality of mold insertion pins 13 ⁇ / b> A provided in the upper mold 13 are disposed above the first die pad portion 9 in the lead frame 3. Therefore, when the upper mold 13 is lowered and the lead frame 3 is clamped in the vertical direction by the upper mold 13 and the lower mold 12, the leads placed on the heat sink 2 by the respective mold insertion pins 13 A The first die pad portion 9 of the frame 3 is pressed downward. As a result, the heat sink 2 attached to the lower surface 9 b of the first die pad portion 9 of the lead frame 3 is pressed by the lower mold 12.
- At least one mold insertion pin 13A of the plurality of mold insertion pins 13A is disposed between the power element 1 and the control element 4 in a plan view.
- the mold insertion pin 13A provided between the power element 1 and the control element 4 has a frusto-conical shape spreading upward from the contact surface with the first die pad portion 9 of the lead frame 3 There is.
- the shape of the mold insertion pin 13A may be a truncated pyramid shape.
- a resin material for sealing made of, for example, an epoxy resin is injected between the upper mold 13 and the lower mold 12 by a transfer molding method.
- a resin material As shown in FIG. 8, an exterior body is sealed so as to cover the side surfaces of the power element 1, the control element 4, and the heat dissipation plate 2 including the inner portion of the die of the lead frame 3.
- Form 6 At this time, since the heat sink 2 is pressed against the lower mold 12 by the mold insertion pin 13A, the injected resin material does not enter the lower surface 2b side of the heat sink 2.
- the resin material injected is filled in the notched portion 5a formed in advance in the predetermined lead 5 protruding from the side surface of the exterior body 6, and a resin-filled portion having the same composition as the exterior body 6 6c is formed integrally with the exterior body 6.
- the injected resin material does not exist in the lower surface 2b of the heat sink 2 after resin sealing.
- heat dissipation from the power element 1 to the outside of the exterior body 6 through the heat sink 2 is effectively performed.
- the heat is transmitted from the lower die 12 and the upper die 13 in the resin sealing step to be disposed between the first die pad portion 9 of the lead frame 3 and the heat sink 2.
- the adhesive layer (not shown) of the insulating sheet 10 is melted and further cured. For this reason, the adhesion between the insulating sheet 10 and the lower surface 9 b of the first die pad portion 9 of the lead frame 3 and the heat dissipation plate 2 becomes stronger.
- each mold insertion pin 13A in the exterior body 6 is inserted. Openings 6A are formed to expand upward from the first die pad portion 9 of the frame 3, respectively. Since each mold insertion pin 13A has a frusto-conical shape, each opening 6A also has a frusto-conical shape, each mold insertion pin 13A can be easily removed from the exterior body 6. At this time, the first die pad portion 9 of the lead frame 3 is exposed on the bottom surface of each opening 6A without the sealing resin material being attached. Each opening 6A can be easily filled with a resin material according to the application and purpose, and it is also possible to fill the resin material and close each opening 6A.
- the semiconductor device 15 shown in FIG. 10 can be manufactured.
- the notches 5a are provided in advance in the leads 5, which are external terminals protruding from the side surfaces of the outer package 6, and the notches 5a are identical to the resin material for sealing.
- the resin filling material is filled to form a resin filling portion 6c.
- the electrical insulation of the leads 5 arranged in close proximity to each other can be improved, and the external size of the exterior body 6 can be miniaturized.
- the structure of the mold for producing the exterior body 6 can be simplified.
- the semiconductor device and the method of manufacturing the same according to the present invention can be applied to a semiconductor device such as an IGBT module or an intelligent power module (IPM).
- a semiconductor device such as an IGBT module or an intelligent power module (IPM).
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Abstract
Description
以下、図6~図10を参照しながら、本実施形態に係る半導体装置の製造方法の一例について説明する。
2 放熱板
2b 下面
2c 側面
3 リードフレーム
4 制御素子
5 リード
5a 切り欠き部
5b ダムバー
6 外装体
6a 上面
6b 下面
6c 樹脂充填部
6d 溝
6A 開口部
8 ろう材
9 第1ダイパッド部
9a 上面
9b 下面
10 絶縁シート
11 第2ダイパッド部
11a 上面
12 下金型
13 上金型
13A 金型挿入ピン
14 ダムバー切断用刃
21 金属部材
22 金ワイヤ
Claims (16)
- 切り欠き部が形成されたリードと、
ダイパッド部と、
前記ダイパッド部に保持された第1素子と、
前記第1素子を含むダイパッド部及び前記リードの内側の端部を封止する樹脂材から構成される外装体と、を備え、
前記切り欠き部は、前記リードにおける前記外装体との境界部分を含む領域に配置されると共に、
樹脂材が充填された半導体装置。 - 請求項1において、
前記切り欠き部に充填された樹脂材は、前記外装体を構成する樹脂材と組成が同一である半導体装置。 - 請求項1又は2において、
前記切り欠き部は、隣り合うリード同士の少なくとも一方に形成された半導体装置。 - 請求項1~3のいずれか1項において、
前記切り欠き部は、1つのリードの両側面に形成された半導体装置。 - 請求項1~4のいずれか1項において、
前記切り欠き部に充填された樹脂材と、前記外装体を構成する樹脂材とは一体に形成された半導体装置。 - 請求項1~5のいずれか1項において、
前記第1素子は、パワー素子である半導体装置。 - 請求項6において、
前記パワー素子を制御する第2素子である制御素子をさらに備え、
前記切り欠き部が形成されたリードは、前記制御素子と接続された半導体装置。 - 請求項1~7のいずれか1項において、
前記切り欠き部は、前記リードにおいて、前記リードに形成されたダムバーよりも内側に形成された半導体装置。 - 請求項1~7のいずれか1項において、
前記切り欠き部間に充填された樹脂材に、前記リードの突出方向と平行な溝が形成されている半導体装置。 - 請求項9において、
前記溝の一部が、前記外装体の内部に配置された半導体装置。 - 請求項1~10のいずれか1項において、
1つのリードにおいて、前記切り欠き部に充填された樹脂材による樹脂充填部同士の間隔が0.4mm以上である半導体装置。 - 請求項1~11のいずれか1項において、
前記切り欠き部の一部が、前記外装体内に配置された半導体装置。 - 請求項12において、
前記外装体内に配置された前記切り欠き部の長さが、前記樹脂材に混錬されたフィラーの径よりも大きい半導体装置。 - 請求項1~13のいずれか1項において、
前記切り欠き部の内側の形状が、傾斜状又は階段状である半導体装置。 - 第1素子を保持するダイパッド部と、切り欠き部を有するリードとを用意し、
前記リードの切り欠き部を金型のクランプ位置に配置して封止用の樹脂材を前記金型に注入することで、前記樹脂材により前記第1素子を含むダイパッド部及び前記リードの内側の端部を封止する半導体装置の製造方法。 - 請求項15において、
前記リードの切り欠き部を前記金型のクランプ位置に配置して前記樹脂材を前記金型内に注入することで、
前記リードに形成された切り欠き部に前記樹脂材を充填する半導体装置の製造方法。
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EP12746473.3A EP2677539B1 (en) | 2011-02-15 | 2012-01-19 | Process for manufacture of a semiconductor device |
CN201280001500.6A CN102934225B (zh) | 2011-02-15 | 2012-01-19 | 半导体装置及其制造方法 |
JP2012526567A JP5873998B2 (ja) | 2011-02-15 | 2012-01-19 | 半導体装置及びその製造方法 |
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JP2017516309A (ja) * | 2014-05-15 | 2017-06-15 | インテル コーポレイション | 集積回路アセンブリ用の成形コンポジットエンクロージャ |
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JP2018073892A (ja) * | 2016-10-26 | 2018-05-10 | 日立オートモティブシステムズ株式会社 | 回路体および回路体の製造方法 |
JP2019021823A (ja) * | 2017-07-20 | 2019-02-07 | 日立オートモティブシステムズ株式会社 | パワー半導体装置、それを用いた電力変換装置及びパワー半導体装置の製造方法 |
JP2021190522A (ja) * | 2020-05-28 | 2021-12-13 | 三菱電機株式会社 | 半導体装置 |
JP7308793B2 (ja) | 2020-05-28 | 2023-07-14 | 三菱電機株式会社 | 半導体装置 |
WO2022264982A1 (ja) * | 2021-06-14 | 2022-12-22 | ローム株式会社 | 絶縁モジュール |
Also Published As
Publication number | Publication date |
---|---|
CN102934225B (zh) | 2016-05-04 |
JPWO2012111254A1 (ja) | 2014-07-03 |
US20120326289A1 (en) | 2012-12-27 |
EP2677539B1 (en) | 2017-07-05 |
JP5873998B2 (ja) | 2016-03-01 |
EP2677539A4 (en) | 2016-03-30 |
CN102934225A (zh) | 2013-02-13 |
EP2677539A1 (en) | 2013-12-25 |
US8772923B2 (en) | 2014-07-08 |
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