WO2012105187A1 - Élément de production d'énergie du type à variation de capacité - Google Patents

Élément de production d'énergie du type à variation de capacité Download PDF

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Publication number
WO2012105187A1
WO2012105187A1 PCT/JP2012/000455 JP2012000455W WO2012105187A1 WO 2012105187 A1 WO2012105187 A1 WO 2012105187A1 JP 2012000455 W JP2012000455 W JP 2012000455W WO 2012105187 A1 WO2012105187 A1 WO 2012105187A1
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Prior art keywords
power generation
ferroelectric
dielectric
polarization
generation element
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PCT/JP2012/000455
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English (en)
Japanese (ja)
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坂下　幸雄
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富士フイルム株式会社
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/70—Energy storage systems for electromobility, e.g. batteries

Definitions

  • the present invention relates to a power generation element that generates power by a change in capacitance between electrodes.
  • fluorine-based resins such as polytetrafluoroethylene, Teflon (registered trademark), and CYTOP® (registered trademark) are mainly used as dielectrics used in electrets (Patent Documents 1 to 4).
  • these resin materials cannot have a very high surface charge density.
  • the surface charge density of the fluorine-based resin material is generally about 0.005 ⁇ C / cm 2 , and even a high one is about 0.15 ⁇ C / cm 2 .
  • Patent Document 5 proposes an electromechanical conversion element using a dielectric polarization plate made of a ferroelectric material as an electret material having a high surface charge density.
  • Patent Documents 1 to 4 there is a gap between the electret material and one electrode, and electrostatic induction is induced in the electrode with relative movement (movement in the horizontal direction) between the electret material and the electrode.
  • An element that performs mechanical-electrical conversion by utilizing the change in the amount of charge is disclosed.
  • Patent Document 5 as an electret is inserted between capacitors, one of the capacitor electrodes is used as a vibration plate, and the electrodes are displaced by being vibrated by sound. It is disclosed that a ferroelectric material having a high surface charge density is used as an electret in an electret condenser microphone (EMC) that converts it into a signal.
  • EMC electret condenser microphone
  • a ferroelectric For the surface charge density of a ferroelectric material, its remanent polarization value is one measure.
  • a ferroelectric has a large remanent polarization value and is considered to be 10 ⁇ C / cm 2 or more. Therefore, by using an electret made of a ferroelectric ceramic described in Patent Document 5, it is larger than a polymer material.
  • the electromechanical conversion efficiency can be achieved, and it is considered that there is a certain effect in the use as a microphone. However, when utilization as a power generation element is studied, sufficient power generation efficiency has not been obtained yet.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a capacitance change type power generation element with high power generation efficiency.
  • a capacitance change type power generating element of the present invention includes a laminate in which a dielectric polarization body and a dielectric elastomer layer are laminated, and a pair of electrodes arranged above and below in the lamination direction of the laminate,
  • the dielectric polarization body is made of a ferroelectric material having crystal orientation.
  • Another dielectric layer may be provided between the laminate and the electrode.
  • the ferroelectric material may contain inevitable impurities.
  • orientation rate F measured by the Lottgering method being 50% or more.
  • the orientation rate F is represented by the following formula.
  • F (%) (P ⁇ P0) / (1 ⁇ P0) ⁇ 100 (i)
  • P is the ratio of the total reflection intensity from the orientation plane to the total reflection intensity.
  • P is the sum ⁇ I (00l) of the reflection intensity I (00l) from the (00l) plane and the sum ⁇ I (hkl) of the reflection intensity I (hkl) from each crystal plane (hkl). ( ⁇ I (00l) / ⁇ I (hkl) ⁇ ).
  • P I (001) / [I (001) + I (100) + I (101) + I (110) + I (111)].
  • P0 is P of a sample having a completely random orientation.
  • F 0%
  • F 100%.
  • the polarization axis that minimizes the relative dielectric constant of the ferroelectric material is oriented substantially parallel to the layer thickness direction.
  • the dielectric polarization body preferably has a remanent polarization value of 5 ⁇ C / cm 2 or more and a relative dielectric constant of 400 or less.
  • the relative dielectric constant is more preferably less than 200.
  • the ferroelectric is a single crystal.
  • the Young's modulus of the dielectric elastomer layer is preferably 100 MPa or less, and more preferably 10 MPa or less.
  • the crystal structure of the ferroelectric material is preferably a perovskite structure, a bismuth layer structure, or a tungsten bronze structure, and the ferroelectric material mainly contains a perovskite oxide that does not contain lead. preferable.
  • a perovskite oxide a bismuth-containing perovskite oxide is preferable.
  • the electrostatic capacity change type power generating element of the present invention uses a ferroelectric material having crystal orientation as a dielectric polarization body. According to such a configuration, a ferroelectric material having a large remanent polarization value is further oriented to form a dielectric polarization material, thereby having a very large surface charge density.
  • a dielectric elastomer is disposed between the dielectric polarization body and one of the electrodes, and the distance between the electrode and the dielectric polarization body can be greatly changed by the elasticity of the dielectric elastomer, thereby improving the amount of power generation. be able to.
  • the dielectric constant of the dielectric polarization layer may be lowered. And greater power generation characteristics can be achieved.
  • a configuration using an inorganic material such as a perovskite oxide as a ferroelectric provides a capacitance change type power generation element having higher heat resistance and higher power generation characteristics than a resin material. be able to.
  • FIG. 1 is a schematic cross-sectional view in the thickness direction showing the configuration of a capacitance change power generating element according to an embodiment of the present invention.
  • FIG. 1 is a schematic cross-sectional view of a power generating element 1 according to an embodiment of the present invention, where (A) shows a state before element compression (state A), and (B) shows an element compression state (state B).
  • A shows a state before element compression
  • B shows an element compression state
  • the scales of the constituent elements of each part are appropriately changed and shown.
  • the power generating element 1 includes a laminated body 12 including a dielectric polarization body layer 10 made of a ferroelectric material having crystal orientation and a dielectric elastomer layer 11 laminated on the dielectric polarization body layer 10.
  • a lower electrode 21 and an upper electrode 22 which are a pair of electrodes provided on the upper and lower surfaces of the laminate 12 are provided.
  • the dielectric polarization layer 10 is made of a polarized ferroelectric layer and has a surface charge due to remanent polarization in the ferroelectric.
  • the lower electrode 21 and the upper electrode 22 are electrically connected to a load (not shown), and the power generating element 1 generates electric energy by changing the capacitance by changing the distance between the electrodes 21 and 22.
  • This is a capacitance change type power generating element.
  • the distance between the electrodes 21 and 22 is changed in a state where charges are electrostatically induced in the electrodes 21 and 22 by the electrostatic field formed by the dielectric polarization layer 10. As the distance between the electrodes changes, an asymmetry occurs in the charge distribution, and a potential difference occurs between the electrodes. Charge transfer occurs so that this potential difference becomes 0, and this becomes a current flowing in the external circuit (load).
  • the state B before the compressive force is applied to the power generating element 1 shown in FIG. 1A in the stacking direction from the state A before the compressive force shown in FIG.
  • a potential difference is generated between the electrodes 21 and 22, and a function as a power generation element is obtained by taking out the change in the potential difference as electric power.
  • the thickness of the elastomer layer 11 is changed by the external pressure (compression force), and the ferroelectric layer 10 is hardly changed.
  • the power generation amount P in the element of the present invention is defined by the following formula (1), where f is the frequency at which the compressive force is applied between the electrodes.
  • q eA is the surface charge density of the elastomer in state A
  • q eB is the surface charge density of the elastomer after charge transfer that occurs after becoming compressed state B.
  • ⁇ V is the amount of change in potential difference when changing from state A to state B.
  • the amount of change in potential difference is the potential difference of the elastomer layer.
  • V eA is the potential of the elastomer side electrode in the state A
  • ⁇ V eB is the potential of the elastomer side electrode before the charge transfer in the compressed state B.
  • the charge density q eA electrostatically induced on the surface of the elastomer layer by dielectric polarization by the ferroelectric layer and the charge density q f on the surface of the ferroelectric layer can be expressed by the following formula (2).
  • the power generation amount P is expressed by the following expression (3).
  • the dielectric polarization layer 10 has a higher surface charge density q f and a smaller relative dielectric constant ⁇ f because a higher power generation amount can be obtained. Further, the thickness d eA in the state A of the elastomeric layer, as the difference between the thickness d eB in state B (the amount of change in thickness) is large, it is also clear that the power generation amount increases.
  • the lower electrode 21 is not particularly limited as long as it is a base material made of a conductor that does not impair the crystal orientation of the dielectric polarization layer 10 formed on the surface thereof.
  • the upper electrode 22 is made of a hard material such as metal or conductive ceramic. Specifically, a metal or metal oxide such as Au, Pt, Ir, Al, Ta, Cr, Fe, Ni, Ti, Cu, IrO 2 , RuO 2 , LaNiO 3 , and SrRuO 3 , and combinations thereof are used. Can be mentioned.
  • the dielectric polarization body 10 is a ferroelectric film formed on the lower electrode 21, it is preferable that the dielectric polarization body 10 has good lattice matching with the formed ferroelectric film.
  • the upper electrode 22 is not particularly limited as long as it is a conductor, but is preferably made of a stretchable conductive material.
  • a stretchable conductive material obtained by containing a conductive filler in an elastomer material can be used. If the electrode has elasticity, it is easy to follow the change in expansion and contraction of the dielectric elastomer, and the effect of suppressing peeling between the upper electrode 22 and the elastomer layer 11 can be obtained.
  • the thicknesses of the lower electrode 21 and the upper electrode 22 are not particularly limited, and may be a minimum thickness for having sufficient conductivity for taking out a current generated by a change in potential difference between both electrodes.
  • the thickness can be determined by the conductivity of the electrode material and the overall size of the power generating element 1, and is preferably, for example, 50 nm to 100 ⁇ m.
  • Each electrode may have a multilayer structure.
  • the dielectric elastomer layer 11 has a small Young's modulus, and the thickness can be greatly changed with respect to the force.
  • the Young's modulus is preferably 100 MPa or less, more preferably 10 MPa or less.
  • the external force is used to expand and contract the dielectric elastomer layer 11, and almost no external force is applied to the dielectric polarization layer made of a ferroelectric material, and the thickness hardly changes. Therefore, it is considered that the piezoelectricity hardly functions in the dielectric polarization layer.
  • dielectric elastomer materials include thermosetting elastomers such as acrylic rubber, acrylonitrile butadiene rubber, isoprene rubber, silicone rubber and fluoro rubber, which are synthetic rubbers, and thermoplastic elastomers such as polystyrene, polyolefin and polyurethane. Can be used.
  • the ferroelectric constituting the dielectric polarization layer 10 may be an organic ferroelectric, an inorganic ferroelectric, or a composite material thereof as long as it has crystal orientation. Since higher power generation efficiency can be obtained, it is preferable to use a ferroelectric having a higher remanent polarization value as the ferroelectric. Further, from the viewpoint of heat resistance, an inorganic ferroelectric is preferable, and a ferroelectric having a higher Curie temperature is preferable.
  • the dielectric polarization layer 10 has a uniform polarization axis of the ferroelectric and is substantially parallel to the thickness direction.
  • it is more preferably a single crystal, an oriented ceramic, or an epitaxial film.
  • the dielectric polarization layer 10 is mainly composed of an inorganic ferroelectric material capable of giving a large remanent polarization value.
  • Examples of the crystal structure of an inorganic ferroelectric that can give a large remanent polarization value (excellent ferroelectricity) include a perovskite structure, a bismuth layered structure, and a tungsten bronze structure, with a perovskite structure being preferred.
  • perovskite type oxides having excellent ferroelectricity lead-based perovskite type oxides are known, but from the viewpoint of environmental impact, those containing a perovskite type oxide containing no lead as a main component are preferable. The containing perovskite oxide is more preferable.
  • perovskite-type oxides include lead titanate, lead zirconate titanate (PZT), lead zirconate, lead lanthanum titanate, lead lanthanum zirconate titanate, lead zirconium titanate titanate niobate.
  • Lead-containing compounds such as lead zirconium titanate nickel niobate and lead zirconium niobate titanate, and mixed crystals thereof;
  • the polarization axis parallel to the thickness direction is preferably the polarization axis that minimizes the relative dielectric constant when the polarization treatment is performed.
  • the surface charge density is high and the relative dielectric constant is small. It can be a dielectric polariser layer.
  • the polarization axis having a large remanent polarization value and a small relative dielectric constant is the ⁇ 001> direction (c-axis) for tetragonal crystal, the ⁇ 110> direction for orthorhombic crystal, and the ⁇ 111> direction for rhombohedral It is.
  • a c-axis oriented layer of a perovskite oxide such as PZT has a remanent polarization value of 10 ⁇ C / cm 2 or more and a relative dielectric constant of 400 or less, preferably less than 200, which is preferable.
  • the thickness of the dielectric polarization layer 10 is preferably thicker from the viewpoint of increasing the amount of power generation. It is preferable to design the thickness in consideration of the required power generation amount and the size of the element depending on the application. Since the power generation element 1 of the present embodiment has high mechanical-electrical conversion efficiency, it can achieve the same amount of power generation with a relatively thin film thickness as compared with conventional electret materials.
  • the dielectric polarization layer 10 is preferably a ferroelectric film formed on the lower electrode 21.
  • the method of forming the ferroelectric film is not particularly limited, but a ferroelectric film having crystal orientation can be formed, and the direction of polarization should be made substantially uniform without polarization treatment. It is preferable to use a vapor deposition method capable of An example of such a film forming method is a sputtering method using plasma.
  • a ferroelectric film formed by a vapor phase method has a crystalline orientation in which the polarization axis is substantially uniform and the orientation of polarization is uniform without special polarization treatment depending on the composition of the film.
  • lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT) having high ferroelectricity has a c-axis oriented film ⁇ 001> orientation in the as-depo state after sputter deposition, and is spontaneous
  • a film in which the direction of polarization is substantially uniformly aligned upward in the c-axis direction is obtained. It is known that the relative dielectric constant when polarized in the c-axis direction is the smallest relative to that when polarized in another polarization axis.
  • the dielectric polarization layer 10 having a high surface charge density and a relatively low dielectric constant by a simple process without requiring a polarization treatment.
  • the dielectric polarization layer may be formed by performing polarization treatment.
  • the polarization method of the ferroelectric layer is not particularly limited, and examples thereof include a corona discharge treatment that is a general method. From the viewpoint of preventing characteristic deterioration due to depolarization, the coercive electric field value of the ferroelectric constituting the dielectric polarization layer is preferably high. From the viewpoints of heat resistance and deterioration of characteristics due to depolarization, it is preferable that the Curie temperature of the ferroelectric constituting the dielectric polarization layer is higher.
  • the electrostatic capacity change type power generating element 1 is configured as described above.
  • the manufacturing method of the power generation element 1 is not particularly limited as long as it has the above configuration.
  • a method for forming the ferroelectric layer (dielectric polarization layer before polarization treatment) 10 on the lower electrode 21 a suitable method may be used as appropriate depending on the mode of the ferroelectric layer 10.
  • the lower electrode 21 may be vapor-deposited or coated with a conductive paste on the ferroelectric 10.
  • the ferroelectric 10 when it is a film, it can be formed by a normal thin film forming technique such as the sputtering method described above. According to the thin film formation technique, the orientation can be controlled relatively easily, and the advantages relating to the polarization treatment in the film formation by sputtering or the like are as already described.
  • the power generating element 1 uses a ferroelectric material having crystal orientation as the dielectric polarization layer 10. At this time, the polarization axis having the smallest relative dielectric constant is oriented so as to be substantially parallel to the thickness direction. According to such a configuration, not only has a very large surface charge density but also a low dielectric constant, it is possible to achieve greater power generation characteristics. In addition, in a configuration using an inorganic material such as a perovskite oxide as the ferroelectric, the power generating element 1 having higher heat resistance and higher power generation efficiency than the resin material can be obtained.
  • Table 1 shows the power generation amount of the capacitance change type power generation element when the dielectric polarization layer 10 is formed using various ferroelectrics, and the surface charge density and the dielectric constant values in the above formula (1). The value estimated by substituting is shown.
  • the power generation amount is the relative power generation amount when the power generation amount obtained as the dielectric polarization layer 10 made of a fluorine-based polymer (Cytop (registered trademark), manufactured by Asahi Glass Co., Ltd.) is set to the reference value “1”. It is shown.
  • the composition of the ferroelectrics in Table 1 is as follows: PbTTi ceramics and c-PZT are Pb (Ti 0.5 , Zr 0.5 ) O 3 , c-BFO-BTO is (Bi 0.8 , Ba 0.2). ) (Fe 0.8 , Ti 0.2 ) O 3 , BFO-BTO ceramics are (Bi 0.7 , Ba 0.3 ) (Fe 0.7 , Ti 0.3 ) O 3 , KNN ceramics are ( K 0.5 , Na 0.5 ) NbO 3 and c-BFO were BiTiO 3 .
  • the notation c- means c-axis orientation.
  • the PZT component was obtained by dispersing Pb (Ti 0.5 , Zr 0.5 ) O 3 fine particles in an organic binder at a rate of 60 vol%.
  • a power generation amount that is significantly larger than a general electret material amount can be obtained.
  • the amount of power generation is estimated several hundred times that of Cytop, and further, the amount of power generation is estimated to be several thousand times that of membranes and 16,000 times that of single crystals. It was. Further, a PZT composite in which PZT is dispersed in a polymer material can also generate a power generation amount several tens of times that of Cytop.
  • a power generation apparatus in which a plurality of the above-described electrodes, dielectric polarization bodies, and dielectric elastomers are stacked and connected in series or in parallel may improve the power generation amount.
  • the power generation element of the present invention can be used for power generation by natural energy such as wave power, hydraulic power, wind power, etc., power generation by walking of people embedded in shoes and floors, power generation by running of automobiles embedded in automobile tires, etc. It is.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'objectif de l'invention est de produire un élément de production d'énergie du type à variation de capacité ayant un rendement de production d'énergie élevé. A cet effet, un élément de production d'énergie (1) comprend un stratifié (12) qui est constitué par stratification d'un corps de polarisation diélectrique (10) et d'une couche élastomère diélectrique (11), et une paire d'électrodes (21, 22) qui sont agencées au niveau des côtés supérieur et inférieur dans la direction de stratification du stratifié (12). Le corps de polarisation diélectrique (10) comprend un matériau ferroélectrique ayant une orientation cristalline.
PCT/JP2012/000455 2011-02-04 2012-01-25 Élément de production d'énergie du type à variation de capacité WO2012105187A1 (fr)

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JP2011022342A JP2012164727A (ja) 2011-02-04 2011-02-04 静電容量変化型発電素子
JP2011-022342 2011-02-04

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014179549A (ja) * 2013-03-15 2014-09-25 Ricoh Co Ltd 電気機械変換素子の製造方法、電気機械変換素子、液滴吐出ヘッド、液滴吐出装置、及び電気機械変換素子の製造装置
JP2021064690A (ja) * 2019-10-11 2021-04-22 株式会社リコー 素子および素子の製造方法
TWI827012B (zh) * 2022-02-02 2023-12-21 台灣積體電路製造股份有限公司 積體晶片及其形成方法

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JP6633852B2 (ja) * 2014-07-28 2020-01-22 ローム株式会社 圧電素子、およびインクジェットヘッド
JP6870200B2 (ja) 2014-11-13 2021-05-12 株式会社リコー 素子、及び発電装置
JP6699119B2 (ja) 2015-01-22 2020-05-27 株式会社リコー 素子及び発電装置
JP6618035B2 (ja) 2015-03-09 2019-12-11 株式会社リコー 素子、及び発電装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003146660A (ja) * 2001-11-13 2003-05-21 Fuji Electric Co Ltd 強誘電体および誘電体薄膜コンデンサ、圧電素子
JP2006131776A (ja) * 2004-11-08 2006-05-25 Saitama Univ 自己診断機能を有する複合部材とその製造方法
JP2008053527A (ja) * 2006-08-25 2008-03-06 Nsk Ltd 誘電性ゴム積層体及びその製造方法
JP2009224740A (ja) * 2008-03-19 2009-10-01 Fujifilm Corp 積層構造体とそれを用いたデバイス、デバイスの製造方法，液体吐出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003146660A (ja) * 2001-11-13 2003-05-21 Fuji Electric Co Ltd 強誘電体および誘電体薄膜コンデンサ、圧電素子
JP2006131776A (ja) * 2004-11-08 2006-05-25 Saitama Univ 自己診断機能を有する複合部材とその製造方法
JP2008053527A (ja) * 2006-08-25 2008-03-06 Nsk Ltd 誘電性ゴム積層体及びその製造方法
JP2009224740A (ja) * 2008-03-19 2009-10-01 Fujifilm Corp 積層構造体とそれを用いたデバイス、デバイスの製造方法，液体吐出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014179549A (ja) * 2013-03-15 2014-09-25 Ricoh Co Ltd 電気機械変換素子の製造方法、電気機械変換素子、液滴吐出ヘッド、液滴吐出装置、及び電気機械変換素子の製造装置
JP2021064690A (ja) * 2019-10-11 2021-04-22 株式会社リコー 素子および素子の製造方法
TWI827012B (zh) * 2022-02-02 2023-12-21 台灣積體電路製造股份有限公司 積體晶片及其形成方法

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