WO2012072114A1 - Actionneur piézoélectrique pour têtes d'impression à jet d'encre - Google Patents

Actionneur piézoélectrique pour têtes d'impression à jet d'encre Download PDF

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Publication number
WO2012072114A1
WO2012072114A1 PCT/EP2010/068533 EP2010068533W WO2012072114A1 WO 2012072114 A1 WO2012072114 A1 WO 2012072114A1 EP 2010068533 W EP2010068533 W EP 2010068533W WO 2012072114 A1 WO2012072114 A1 WO 2012072114A1
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WO
WIPO (PCT)
Prior art keywords
actuator
ceramic
piezoelectric
contact
base plate
Prior art date
Application number
PCT/EP2010/068533
Other languages
English (en)
Inventor
Andrew Barnett
Gian Rudolf Tratschin
Original Assignee
Reinhardt Microtech Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reinhardt Microtech Ag filed Critical Reinhardt Microtech Ag
Priority to PCT/EP2010/068533 priority Critical patent/WO2012072114A1/fr
Priority to EP10784536.4A priority patent/EP2646252B1/fr
Publication of WO2012072114A1 publication Critical patent/WO2012072114A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Definitions

  • the present invention relates to a piezoelectric actuator for ink jet printing heads.
  • this invention relates to the improvement of such piezoelectric actuators and the fabrication process of a ceramic component as a multi element panel to increase the manufacturing yield and the efficiency.
  • a piezoelectric actuator for ink jet printing heads comprising a ceramic base plate and a series of oblong, parallel orientated piezoelectric ceramic actuator cuboids bonded to a contact face of the ceramic base plate.
  • the piezoelectric ceramic actuator cuboids comprise metallization layers at their cuboid base corners that are located on front and rear ends of each actuator cuboid .
  • the ceramic base plate comprises on its contact face at least two contact areas that are located in approximately the distance of the actuator cuboid base corners and that are coated with a contact metallization layer.
  • the piezoelectric ceramic actuator cuboids are contacted with the metallization layers of their base corners to the contact metallization layers of the contact face of the ceramic base plate.
  • Some ceramic composites are composed of two different ceramic materials, one being a piezoelectric ceramic, the other a conventional ceramic material as a supporting element, for example Thomit 600, and include a direct electrical connection along the edge of the supporting element.
  • Such components are predominantly printing head assemblies. However, they can be used in other applications too.
  • the metallization on the surface and the edge of the supporting element is applied .
  • the metalized surface is patterned with resist in the image of the desired layout, followed by protecting the metalized edges with resist.
  • the metallization is etched away, the resist removed, there re- mains the desired layout on the surface of the ceramic supporting element with a patterned metallization and metalized edges.
  • one supporting element of any particular layout type with a metalized edge is assembled into a circuitry by combining one supporting element with a piezoelectric ceramic to form a composite.
  • the composite is glued together by pressure with an adhesive to achieve bonding .
  • a typical ink jet array and method of producing the same is known from the European patent EP 0 706 887 Bl .
  • Such an ink jet array is provided with a piezoelectric member in the form of a plate 20* opposite a duct plate 3* (see Fig. 1 that corresponds with Fig . 9 taken from EP 0 706 887 Bl and revised).
  • the surface of the duct plate 3* that faces the piezoelectric member 20* is provided with a number of parallel elongated ink ducts 4*.
  • the ink ducts 4* are covered with an elastic cover layer 2*.
  • the piezoelectric member 20* is provided with a number of elongated parallel piezoelectric elements 23* that are substantially rectangular in cross section.
  • Each piezoelectric element 23* is situated opposite an ink duct 4* such that the elastic cover layer 2* is situated between the ink ducts 4* and the piezoelectric elements 23*.
  • the associated piezoelectric element 23* expands such that the part of the cover layer 2* that extends over this particular piezoelectric element 23* is forced into the associated ink duct 4* and a portion of the ink in this ink duct 4* is ejected in the form of a drop via a jet opening 31* at the front of the ink duct 4*.
  • Separating strips 24* provided between the piezoelectric element 23* prevent the piezoelectric element 23* from adhering to each other.
  • the piezoelectric actuator 18* is constructed from of a preferably ceramic support layer 19* and a plate 20* of piezoelectric material stuck to the top surface thereof, the plate 19* projecting from the plate 20* at one end. This top surface, which faces the plate 20*, is covered with a thin metal layer.
  • the piezoelectric actuator 18* is fixed into a recess of a baseplate; then, the baseplate is fixed in a suitable processing machine for the formation of a number of slots extending parallel to one another in the longitudinal direction of the piezoelectric member.
  • the slots extend through the plate 20* and over a short distance in the plate 19* in such a manner that the plate 20* is divided into a large number of piezoelectric elements 23* separated from one another by slots or incisions 22*.
  • FIG. 2 shows diagrammatic views of a piezoelectric actuator produced according to a conventional method in the production of ink jet printing heads.
  • the reference numbers assigned to the features of this prior art piezoelectric actuator are the same as for the inventive piezoelectric actuator.
  • Fig . 2A shows a first cross section through a piezoelectric ceramic actuator cuboid 3 of a piezoelectric actuator 1 with a number of piezoelectric ceramic actuator cuboids 3 located on a contact face 4 of a ceramic base plate 2 as known from prior art.
  • the series of oblong, parallel orientated piezoelectric ceramic actuator cuboids 3 comprises metallization layers 5 at its front and rear ends 7,7', the metallization layers 5 reaching around the cuboid base corners 6,6'.
  • the piezoelectric ceramic actuator cuboid 3 is bonded to the contact face 4 of the ceramic base plate 2 with an adhesive 18.
  • the contact face 4 of the ceramic base plate 2 comprises contact areas 8,8', which are covered with contact metallization layers 9,9'. These at least two contact areas 8,8' are located in approximately the distance of the actuator cuboid base corners 6,6'.
  • the piezoelectric ceramic actuator cuboids 3 are contacted with the metallization layers 5 of their base corners 6,6' to the contact metallization layers 9,9' of the contact face 4 of the ceramic base plate 2; thus, electrical contacts are provided for each individual piezoelectric ceramic actuator cuboid 3.
  • the method of fabricating such a composite comprises providing one supporting element (a ceramic base plate 2) with a patterned surface and a metalized edge. Also provided is one piezoelectric ceramic plate 11 with metalized edges.
  • the composite is built by bonding the supporting element and the piezoelectric ceramic using an adhesive. When this composite is bonded and cut, the front and rear base corners 12,12' of the piezoelectric ceramic plate 11 become the cuboid base corners 6,6'.
  • Fig . 2B shows a second cross section through a separation cut 13 between two piezoelectric ceramic actuator cuboids 3 located on a contact face 4 of a ceramic base plate 2 as known from prior art.
  • the separation cut 13 reaches through the piezoelectric ceramic actuator cuboids 3, the adhesive 18, and the ceramic base plate contact face 4 with their contact metalliza- tion layers 9,9'.
  • a non-cut metallization layer portion 15 is visible. This non-cut metallization layer portion 15 provides a common electrical connection for the piezoelectric ceramic cuboids 3 that are individually activatable over residual strip conductors 16 of the rear end contact metallization layer 9' on the ceramic base plate contact face 4.
  • Fig . 2C shows a front view of the piezoelectric actuator 1 shown in the Figs. 2A and 2B.
  • the cross-sections according to Fig. 2A and Fig. 2B are indicated by the double arrows I and II respectively.
  • the separation cuts 13 are depicted as voids between the oblong, parallel orientated piezoelectric ceramic actuator cu- boids 3. These voids correspond with the slots or incisions 22* as disclosed in the prior art document EP 0 706 887 Bl .
  • separating strips 24* which can be provided between the piezoelectric elements 23* to prevent the piezoelectric elements 23* (or piezoelectric ceramic actuator cuboids 3) from adhering to each other, are not shown.
  • edges can be smoothed away.
  • this technique must also be applied to every single element and thus produces additional manufacturing costs.
  • polishing the surfaces of the elements is not possible, because a certain roughness is necessary for a good electrical and mechanical contact between the two elements bonded together.
  • the piezoelectric actuator comprises:
  • a ceramic base plate comprising on a contact face at least two contact areas that are located in approximately the distance of actuator cuboid base corners and that are coated with a contact metallization layer;
  • the ceramic base plate comprises in its contact face a groove with a bottom; the groove, which extends below the piezoelectric ceramic actuator cuboids and over the entire length of the piezoelectric actuator, and at least one adjacent base plate contact face being coated with that one of the contact metallization layers to which the front actuator cuboid base corners are contacted;
  • the piezoelectric actuator comprises a ceramic base plate and a series of oblong, parallel orientated piezoelectric ceramic actuator cuboids that are located on a contact face of the ceramic base plate.
  • the piezoelectric ceramic actuator cuboids comprise metalliza- tion layers at their cuboid base corners that are located on font and rear ends of each actuator cuboid.
  • the ceramic base plate comprises on its contact face at least two contact areas that are located in approximately the distance of the actuator cuboid base corners and that are coated with a contact metallization layer.
  • the piezoelectric ceramic actuator cuboids are contacted with the metallization layers of their base corners to the contact metallization layers of the contact face of the ceramic base plate.
  • the method of producing piezoelectric actuators according to the present invention is characterized in that the method comprises the steps of: (a) forming in the contact face of the ceramic base plate a groove with a bottom, which groove extends below the piezoelectric ceramic actuator cuboids and over the entire length of the piezoelectric actuator;
  • a groove or "blind channel” for establishing a common electrical connection for the piezoelectric ceramic cuboids allows for the multi component production of piezoelectric actuators, because all contact metallization layers on the ceramic base plate are located on or in its contact face.
  • a fabrication method with better yield and improved efficiency is provided; the average yield has been increased from 65% to 95%.
  • dry film resists can be used for masking the applied metallization of the panel by hot roll lamination. Dry films generally have increased film thickness and mask the peaks in the ceramic material much better than liquid resists.
  • Fig . l a revised Fig . 9 of the prior art document EP 0 706 887 Bl, explaining the construction and function principle of a piezoelectric actuator for ink jet printing heads; diagrammatic views of a piezoelectric actuator produced according a conventional method, wherein :
  • Fig . 2A shows a first cross section through a piezoelectric ceramic actuator cuboid located on a contact face of a ceramic base plate as known from prior art
  • Fig . 2B shows a second cross section through a separation cut between two piezoelectric ceramic actuator cuboids located on a contact face of a ceramic base plate as known from prior art
  • Fig . 2C shows a front view of the piezoelectric actuator shown in the
  • FIG. 2A and 2B diagrammatic views of a piezoelectric actuator produced according to the method of the present invention, wherein :
  • Fig . 3A shows a first cross section through a piezoelectric ceramic actuator cuboid located on a contact face of a ceramic base plate;
  • Fig . 3B shows a second cross section through a separation cut between two piezoelectric ceramic actuator cuboids located on a contact face of a ceramic base plate;
  • Fig . 3C shows a third cross section through a common contact line at one extreme of a confectioned piezoelectric actuator
  • Fig . 3D shows a front view of the confectioned piezoelectric actuator shown in the Figs. 3A to 3C;
  • Fig . 4 overviews over a larger ceramic supporting substrate (panel) comprising several single supporting elements for the multi component production of piezoelectric actuators according to the present invention, wherein : Fig . 4A shows intended unit cuts for selecting a certain intermediate assembly size, intended confection cuts for the piezoelectric actuators, and intended grooves in the contact face of the panel;
  • Fig . 4B shows an intermediate assembly with grooves, contact metallization layers, common contact layer portions, and portions of epoxy resin glue deposited on the contact face of the panel;
  • Fig . 4C shows the intermediate assembly of Fig. 4B with piezoelectric ceramic plates bonded to the contact face of the panel; and
  • Fig . 4D shows a number of applied separation cuts for separating piezoelectric ceramic actuator cuboids and their arrangement on the confectioned piezoelectric actuators.
  • FIG. 3 shows diagrammatic views of a piezoelectric actuator produced according to the method of the present invention.
  • the reference numbers assigned to the features of the actual invention as claimed are the same as for the prior art piezoelectric actuator according to Fig. 2, in order to directly compare this invention with the existing prior art.
  • Fig . 3A shows a first cross section through a piezoelectric ceramic actuator cuboid of a piezoelectric actuator, the piezoelectric ceramic actuator cuboid being located on a contact face of a ceramic base plate.
  • This piezoelectric actuator 1 for ink jet printing heads comprises a ceramic base plate 2 and a series of oblong, parallel orientated piezoelectric ceramic actuator cuboids 3 that are located on a contact face 4 of the ceramic base plate 2.
  • the piezoelectric ceramic actuator cuboids 3 comprise metallization layers 5 around their cuboid base corners 6,6', which cu- boid base corners 6,6' are located on front and rear ends 7,7' of each actuator cuboid 3.
  • the ceramic base plate 2 comprises on its contact face 4 at least two contact areas 8,8' that are located in approximately the distance of the actuator cuboid base corners 6,6' and that are coated with a contact metallization layer 9,9'.
  • the piezoelectric ceramic actuator cuboids 3 are bonded to the ceramic base plate contact face 4. Such bonding preferably is carried out by the application of an adhesive and by heating and pressing the piezoelectric ceramic plate 11 (see Figs. 4B and 4C) against the ceramic base plate 2.
  • the piezoelectric ceramic actuator cuboids 3 are contacted at least at their front and rear base corners 6,6' with the metallization layers 5 of their base corners 6,6' to the contact metallization layers 9,9' of the contact face 4 of the ceramic base plate 2.
  • the piezoelectric ceramic actuator cuboids 3 are separates, which are cut from a piezoelectric ceramic plate 11 that is bonded to the ceramic base plate 2.
  • the ceramic base plate 2 comprises in its contact face 4 a groove 10 with a bottom 14.
  • This groove 10 preferably extends at an essentially perpendicular direction to the piezoelectric ceramic actuator cuboids 3.
  • This is groove 10 preferably is located close to the actuator cuboid front ends 7. In any case, the groove 10 extends below the piezoelectric ceramic actuator cuboids 3 and over the entire length of the piezoelectric actuator 1.
  • the groove 10 and at least one of the adjacent base plate contact face 4 are coated with that one of the contact metallization layers 9 to which the front actuator cuboid base corners 6 are contacted later.
  • both adjacent base plate contact faces 4 are coated with the contact metallization layer 9.
  • each separation cut 13 reaches through the piezoelectric ceramic actuator cuboids 3, the adhesive 18, and the ceramic base plate contact face 4 with their contact metallization layers 9,9.
  • the separation cuts 13 do not reach the bottom 14 of the groove 10 (see Fig . 3B).
  • a non-cut contact metallization layer portion 15 is left in the groove 10.
  • This non-cut contact metallization layer portion 15 provides a common electrical connection for the piezoelectric ceramic cuboids 3 that are in- dividually activatable over residual strip conductors 16 of the rear end contact metallization layer 9' on the ceramic base plate contact face 4.
  • This groove 10 in the contact face 4 of the ceramic base plate 2 preferably is performed up to half of the thickness of the ceramic base plate 2.
  • this layout results in a good electrical contact between the piezoelectric ceramic actuator cuboids 3.
  • this layout guarantees a high mechanical stability of the ceramic base plate 2.
  • the minimum depth of the groove 10 is variable according to the requirements of the subsequent production processes. A larger groove depth is also possible, but dictated by the requirement of the mechanical stability of the elements.
  • the preferred shape of the groove cross-section as shown is half-lentoid or half-circular; it can also be chosen as a three-center arch or any other depression in the contact face 4 of the ceramic base plate 2.
  • the non- cut contact metallization layer portion 15 is wider; thus providing better electrical connection. It is preferred that the borders of the groove 10 are beveled such that no sharp edges occur between the groove surface and the adjacent contact face 4.
  • one or more additional metallization portions can be deposited on the contact face 4 of the ceramic base plate 2 (not shown).
  • Figure 3C shows a third cross section through a common contact line 22 that is located at at least one extreme of a confectioned piezoelectric actuator 1.
  • the contact metallization layers 9,9' that extend in the direction of the dashed arrow "m" in Fig .
  • a coating for the common contact lines 22 is applied (compare with Fig . 4B).
  • This coating for the common contact lines 22 includes a portion 23 which extends in the direction of the dashed arrow "n" in Fig . 4A.
  • This portion 23 connects both contact metallization layers 9,9' to each other.
  • two such portions 23 are provided on both extremes of the piezoelectric actuators 1 (see Fig . 4D).
  • all piezoelectric ceramic cuboids 3 can individually be energized by applying electrical tension to a residual strip conductor 16 and to one or both common contact lines 22 of a piezoelectric actuator 1.
  • Figure 3D shows a front view of the confectioned piezoelectric actuator shown in the Figs. 3A to 3C.
  • the cross-sections according to the Figs. 3A, 3B, and 3C are indicated by the double arrows I, II, and III respectively.
  • the exemplary layout for the production of six piezoelectric actuators 1 for ink jet printing heads is shown.
  • two grooves 10, each with a bottom 14, are formed .
  • grooves 10 (additionally indicated by arrows) preferably extend at an essentially perpendicular direction to the piezoelectric ceramic actuator cuboids 3, and these grooves 10 preferably are located close to the actuator cuboid front ends 7 of the respective piezoelectric actuators 1. In any case, these grooves 10 extend below the piezoelectric ceramic actuator cuboids 3 and over the entire length of the piezoelectric actuator 1.
  • Figure 4A shows intended unit cuts 19,19' for selecting a certain size of one ore more intermediate assemblies 24.
  • one unit cut 19 will be carried out.
  • the intended confection cuts 20,21 for the piezoelectric actuators are also shown here. With the first confection cuts 20 a column of piezoelectric actuators 1 is cut out of the panel 17. With the second confection cuts 21, the individual piezoelectric actuators 1 are separated from the column.
  • Figure 4B shows an intermediate assembly 24 with grooves 10, contact metallization layers 9,9', common contact layer portions 23, and portions of an adhesive 18 deposited on the contact face 4 of the panel 17.
  • Preferred adhesives are selected for a group that comprises adhesive tapes, polycarbonates, acrylic adhesives and epoxy resins; most preferred are epoxy resins.
  • portions of adhesives 18 preferably are exactly chosen so that no adhesive 18 covers the contact metallization layers 9,9' during bonding; alternatively, other precautions can be taken (such as leading away superfluous glue form the sensitive areas).
  • each contact area 8 comprises a groove 10 and at least one (preferably both) adjacent base plate contact face 4 portions. Coating of the grooves 10 is made with that ones of the contact metallization layers 9 to which the front actuator cuboid base corners 6 are to be bonded.
  • a coating for the common contact lines 22 is applied.
  • This coating for the common contact lines 22 includes a portion 23, which extends in the direction of the "n" arrow in Fig . 4A, and which connects both contact metallization layers 9,9' to each other.
  • two such portions 23 are provided on both extremes of the piezoelectric actuators 1.
  • Figure 4C shows the intermediate assembly of Fig . 4B with six piezoelectric ce- ramie plates 11 bonded to the contact face 4 of the panel 17. All piezoelectric ceramic plates 11 are bonded to the contact face 4 of the ceramic panel 17, preferably by heat adhesive bonding (i.e. using an electrically non-conducting epoxy resin). Preferably (as shown), the individual piezoelectric ceramic plates 11 are bonded separately to the ceramic base plate 2; thus, more precise bonding is pos- sible. These piezoelectric ceramic plates 11 comprise metallization layers 5 at or around their front and rear base corners 12,12' that are located on font and rear ends 7,7' of each future actuator cuboid 3.
  • a series of unit cuts 19 is applied in the "n" direction according to Fig. 4A.
  • intermediate assemblies 24 are cut out.
  • Figure 4D shows a number of applied separation cuts 13 for separating piezoelectric ceramic actuator cuboids 3 and the arrangement of these piezoelectric ceramic actuator cuboids 3 on the confectioned piezoelectric actuators 1.
  • each separation cut 13 reaches through the piezoelectric ceramic actuator cuboids 3, the adhesive 18, and the ceramic base plate contact face 4 with their contact metallization layers 9,9', but not the bottom 14 of the groove 10.
  • the piezoelectric ceramic actuator cuboids 3 remain bonded to the contact face 4 of the ceramic base plate 2 and remain in electrical contact with the metallization layers 5 of their base corners 6,6' to the contact metallization layers 9,9' of the contact face 4 of the ceramic base plates 2.
  • a common electrical connection for the piezoelectric ceramic cuboids 3 is provided by leaving a non-cut contact metallization layer portion 15 in the groove 10.
  • piezoelectric ceramic cuboids 3 are individually activatable over residual strip conductors 16 of the rear end contact metallization layer 9' on the ceramic base plate contact face 4 and to one or both common contact lines 22 of a piezoelectric actuator 1.
  • Fig. 4D only the first and last four separation cuts 13 are drawn for each piezoelectric actuator 1. At both extremes of these piezoelectric actuators 1, a portion will be cut away by first confection cuts 20; thus, these portions do not show separation cuts 13. Preferably at both extremes of these piezoelectric actuators 1, another portion does not show separation cuts 13 as well; these other portions constitute common contact lines 22 with common contact line portions 23.
  • first confection cuts 20 in the "n” direction
  • second confection cuts 21 in the "m” direction
  • m x n piezoelectric actuators 1 for ink jet printing heads
  • the inventive method relates to the production of piezoelectric actuators 1 for ink jet printing heads, which piezoelectric actuator 1 comprises a ceramic base plate 2 and a series of oblong, parallel orientated piezoelectric ceramic actuator cuboids 3 located on a contact face 4 of the ceramic base plate 2.
  • the piezoelectric ceramic actuator cuboids 3 comprise metallization layers at or around their cuboid base corners 6,6' that are located on font and rear ends 7,7' of each actuator cuboid 3.
  • the ceramic base plate 2 comprises on its contact face 4 at least two contact areas 8,8' that are located in approximately the distance of the actuator cuboid base corners 6,6' and that are coated with a contact metallization layer 9,9'.
  • the piezoelectric ceramic actuator cuboids 3 are contacted with the metallization layers 5 of their base corners 6,6' to the contact metallization layers 9,9' of the contact face 4 of the ceramic base plate 2.
  • the inventive method comprises the steps of:
  • This method may include the step of using a larger ceramic supporting substrate (panel 17) comprising several (m x n) single supporting elements (ceramic base plates 2).
  • Various methods may be used to fabricate the electrical structure.
  • the best metallization scheme is sputtering at high pressure (e.g . at a pressure of 5 x 10 "3 mbar Ar), thus producing good adhesion and good wetting inside the grooves with sputtered materials (see table 1).
  • manual repairing defects in the dry resist may be applied giving an even higher throughput rate.
  • the process is particularly suited for metallization systems which are very sensitive to any kind of chemicals used during the fabrication process.
  • the new fabrication process is particularly suited, but not limited to ceramic substrates with a high peak roughness (i.e. see rms roughness in table 1).
  • Actuating of the piezoelectric actuator 1 produced according to the present invention may be carried out with an actuating device as known from EP 1 291 181 Bl, for example.
  • the method of the present invention is illustrated by the following example of a piezoelectric actuator 1 produced according to the present invention :

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

La présente invention concerne un actionneur piézoélectrique (1) pour des têtes d'impression à jet d'encre comprenant une plaque de base en céramique (2) et une série de cuboïdes d'actionnement en céramique piézoélectrique oblongs orientés de manière parallèle (3). La plaque de base en céramique (2) comporte sur sa face de contact (4) des zones de contact (8,8') revêtues d'une couche de métallisation de contact (9,9'). Les cuboïdes d'actionnement (3) sont mis en contact avec des couches de métallisation (5) de leurs coins de base (6,6') avec les couches de métallisation de contact (9,9') de la face de contact (4) de la plaque de base en céramique (2). Selon l'invention, la plaque de base en céramique (2) comprend dans sa face de contact (4) une rainure (10) qui s'étend en dessous des cuboïdes d'actionnement en céramique piézoélectrique (3) et sur ​​toute la longueur de l'actionneur piézoélectrique (1). La rainure (10) et au moins une face de contact de plaque de base adjacente (4) sont revêtues d'une des couches de métallisation de contact (9). Selon l'invention également, chaque découpe (13) qui sépare les cuboïdes d'actionnement (3) pénètre dans ces cuboïdes (3) et la face de contact de plaque de base en céramique (4) avec leurs couches de métallisation de contact (9,9'), mais sans atteindre un fond (14) de la rainure (10). Ainsi, il reste dans la rainure (10) une partie de couche de métallisation de contact non découpée (15) qui fournit une connexion électrique commune pour les cuboïdes en céramique piézoélectrique (3) qui peuvent être activés individuellement sur des pistes conductrices résiduelles (16) de la couche de métallisation de contact (9'). L'invention concerne également un procédé de fabrication correspondant ainsi que l'utilisation d'un procédé multi-éléments.
PCT/EP2010/068533 2010-11-30 2010-11-30 Actionneur piézoélectrique pour têtes d'impression à jet d'encre WO2012072114A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/EP2010/068533 WO2012072114A1 (fr) 2010-11-30 2010-11-30 Actionneur piézoélectrique pour têtes d'impression à jet d'encre
EP10784536.4A EP2646252B1 (fr) 2010-11-30 2010-11-30 Actionneur piézoélectrique pour têtes d'impression à jet d'encre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2010/068533 WO2012072114A1 (fr) 2010-11-30 2010-11-30 Actionneur piézoélectrique pour têtes d'impression à jet d'encre

Publications (1)

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WO2012072114A1 true WO2012072114A1 (fr) 2012-06-07

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EP (1) EP2646252B1 (fr)
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2873527A1 (fr) 2013-11-19 2015-05-20 OCE-Technologies B.V. Réseau d'actionneurs piézoélectriques
JP2015112875A (ja) * 2013-12-06 2015-06-22 ゼロックス コーポレイションＸｅｒｏｘ Ｃｏｒｐｏｒａｔｉｏｎ ２種類の接着剤を含む印刷ヘッド
CN104808486A (zh) * 2015-02-13 2015-07-29 中国科学院自动化研究所 基于模糊ts模型的压电陶瓷执行器的预测控制方法和装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706887B1 (fr) 1994-10-14 1999-03-17 Océ-Technologies B.V. Rangée de buses de jet d'encre et procédé de fabrication
DE10039255A1 (de) * 2000-08-11 2002-02-21 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere für den Düsenkopf eines Tintendruckers
EP1275504A1 (fr) * 2001-07-13 2003-01-15 Illinois Tool Works Inc. Configurations d'électrodes pour imprimante jet d'encre piézoélectrique
US20060197809A1 (en) * 2005-03-04 2006-09-07 Satoru Tobita Inkjet recording head
EP1291181B1 (fr) 2001-09-07 2007-07-25 Océ-Technologies B.V. Dispositif d'actionnement d'une tête à jet d'encre à plusieurs buses

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706887B1 (fr) 1994-10-14 1999-03-17 Océ-Technologies B.V. Rangée de buses de jet d'encre et procédé de fabrication
DE10039255A1 (de) * 2000-08-11 2002-02-21 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere für den Düsenkopf eines Tintendruckers
EP1275504A1 (fr) * 2001-07-13 2003-01-15 Illinois Tool Works Inc. Configurations d'électrodes pour imprimante jet d'encre piézoélectrique
EP1291181B1 (fr) 2001-09-07 2007-07-25 Océ-Technologies B.V. Dispositif d'actionnement d'une tête à jet d'encre à plusieurs buses
US20060197809A1 (en) * 2005-03-04 2006-09-07 Satoru Tobita Inkjet recording head

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2873527A1 (fr) 2013-11-19 2015-05-20 OCE-Technologies B.V. Réseau d'actionneurs piézoélectriques
US9842982B2 (en) 2013-11-19 2017-12-12 Océ-Technologies B.V. Piezoelectric actuator array
JP2015112875A (ja) * 2013-12-06 2015-06-22 ゼロックス コーポレイションＸｅｒｏｘ Ｃｏｒｐｏｒａｔｉｏｎ ２種類の接着剤を含む印刷ヘッド
CN104808486A (zh) * 2015-02-13 2015-07-29 中国科学院自动化研究所 基于模糊ts模型的压电陶瓷执行器的预测控制方法和装置
CN104808486B (zh) * 2015-02-13 2017-09-12 中国科学院自动化研究所 基于模糊ts模型的压电陶瓷执行器的预测控制方法和装置

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EP2646252B1 (fr) 2015-06-17

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