WO2011055665A1 - β型サイアロン蛍光体の製造方法 - Google Patents
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- C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
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- C09K11/7728—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing europium
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- C01P2006/60—Optical properties, e.g. expressed in CIELAB-values
Definitions
- the present invention relates to a method for producing a ⁇ -type sialon phosphor.
- a light-emitting device that combines a light-emitting element that emits primary light and a phosphor that absorbs primary light and emits secondary light is expected to have low power consumption, downsizing, high brightness, and wide color reproducibility. It is attracting attention as a next-generation light-emitting device, and is actively researched and developed.
- a white LED that obtains white light by combining a semiconductor light emitting element that emits blue to violet short-wavelength visible light and a phosphor and mixing the light emitted from the semiconductor light emitting element and the light that has been wavelength-converted by the phosphor is disclosed. Has been.
- Nitride and oxynitride phosphors typified by ⁇ -type sialon phosphors have attracted attention.
- the ⁇ -type sialon phosphor is obtained by mixing silicon nitride (Si 3 N 4 ), aluminum nitride (AlN), and an optically active element compound such as europium oxide (Eu 2 O 3 ) at a predetermined molar ratio. It is known that it is obtained by firing at a temperature of about 2000 ° C. and pulverizing the obtained fired product, or by further acid treatment of the obtained fired product (Patent Document 1).
- the ⁇ -sialon phosphor obtained by the above-described method has low emission intensity, there is a problem that its emission efficiency is low when a white LED is combined with a semiconductor light emitting element.
- Patent Document 2 In order to improve the emission intensity of the ⁇ -type sialon phosphor, a fluoride, chloride, iodide, bromide or phosphate of an element selected from Li, Na, K, Mg, Ca, Sr or Ba is added before firing. It has been proposed to add (Patent Document 2). This method was intended to improve the reactivity during firing and promote the growth of crystal grains by adding the aforementioned compound.
- An object of the present invention is to improve the emission intensity without adding a metal element other than the elements constituting the ⁇ -type sialon phosphor.
- the present inventors have increased the emission intensity by performing a heat treatment in a nitrogen atmosphere and a heat treatment in a rare gas atmosphere after firing. As a result, the present invention has been completed.
- the present invention relates to a method for producing a phosphor containing an optically active element as an emission center in a crystal of nitride or oxynitride, wherein the mixture containing silicon nitride, aluminum compound powder and optically active element compound is heat-treated.
- a ⁇ -sialon phosphor comprising: a step, a high-temperature annealing step in which the fired product is cooled and then heat-treated in a nitrogen atmosphere; and a rare gas annealing step in which the high-temperature annealed product is heat-treated in a rare gas atmosphere Provide a method.
- the present invention also relates to a method for producing a phosphor containing an optically active element as a luminescent center in a nitride or oxynitride crystal, wherein a mixture containing silicon, an aluminum compound powder and an optically active element compound is placed in a nitrogen atmosphere.
- a nitriding step of heating at a temperature, a firing step of heat-treating the nitrided metal compound and the optically active element compound, a high-temperature annealing step of cooling the fired product and then heat-treating in a nitrogen atmosphere Provided is a method for producing a ⁇ -type sialon phosphor, which includes a rare gas annealing step in which heat treatment is performed in a rare gas atmosphere, and a step in which a rare gas treatment product is treated with an acid.
- the heat treatment temperature in the high-temperature annealing step is preferably lower than the heating temperature in the firing step.
- the heat processing temperature of the said rare gas annealing process is a temperature lower than the heating temperature of a baking process.
- the emission intensity can be improved by heat treatment in a nitrogen atmosphere and a rare gas atmosphere after firing.
- the phosphor of the present invention when used as a backlight light source of an image display device such as an LCD, the phosphor exhibits superior characteristics as compared with the conventional ⁇ -sialon phosphor in terms of brightness and color reproducibility.
- a phosphor can be suitably used for a semiconductor light emitting device, and the semiconductor light emitting device can be suitably used for an image display device.
- FIG. 3 is a diagram showing a scanning electron microscope (SEM) image of the phosphor powder after acid treatment in Example 1.
- FIG. 3 is a graph showing the particle size distribution of the phosphor powders of Example 1 and Comparative Example 1.
- 5 is a graph showing the amount of change in crystal defects for each step of Example 1 and Comparative Example 1.
- 4 is a graph showing the emission intensity of the phosphor powders of Example 1 and Comparative Example 1.
- the method for producing a ⁇ -type sialon phosphor according to the first embodiment of the present invention includes a firing step of heat-treating a mixture containing silicon nitride, an aluminum compound and an optically active element compound, and after cooling the fired product, under a nitrogen atmosphere And a noble gas annealing step in which the high-temperature annealed product is heat-treated in a rare gas atmosphere.
- FIG. 1 shows an outline of the processing flow.
- the aluminum compound refers to one or more aluminum compounds selected from aluminum nitride, aluminum oxide, or an aluminum-containing compound that decomposes by heating to produce aluminum oxide.
- the optically active element compound is a compound of one or more elements selected from the group consisting of Mn, Ce, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, and Yb.
- An oxide is preferable. These elements function as luminescent centers and exhibit fluorescence characteristics.
- a commonly used element as a phosphor that emits yellow light from blue light irradiation is europium oxide.
- the firing step may be performed by heating in a nitrogen atmosphere or in a non-oxidizing condition according to a standard condition.
- the heating temperature is preferably in the range of 1850 to 2050 ° C. If the heating temperature is 1850 ° C. or higher, Eu 2+ can enter the ⁇ -type sialon crystal, and a phosphor having sufficient emission intensity can be obtained. Further, if the heating temperature is 2050 ° C. or less, it is not necessary to suppress the decomposition of ⁇ -sialon by applying a very high nitrogen pressure, and a special apparatus is not required for this purpose, which is industrially preferable. .
- heat treatment is performed in a nitrogen atmosphere.
- the heat treatment in a nitrogen atmosphere after cooling is referred to as a high temperature annealing step.
- the fired product Since the fired product is granular or agglomerated, it may be cooled and then made into a powder of a predetermined size in combination with crushing, pulverization and / or classification operations.
- pulverizing to a predetermined particle size using a grinder is mentioned.
- the pulverization by the jet mill may generate crystal defects on the particle surface and cause a decrease in light emission efficiency under excessive processing conditions. When a pulverizer is used, it is preferable to make the pulverization conditions more relaxed.
- the heating temperature in the high temperature annealing step is preferably in the range of 1700 to 1900 ° C.
- the heating temperature is 1900 ° C. or higher, the ⁇ -sialon is decomposed and Eu, which is the emission center, is volatilized. Further, it is not preferable that the heating temperature is 1700 ° C. or lower because the crystallinity cannot be sufficiently improved.
- the pressure condition is preferably 0.1 MPa or more. When the pressure is 0.1 MPa or less, ⁇ -sialon is decomposed, which is not preferable.
- the processed material obtained in the high temperature annealing step is heat-treated in a rare gas atmosphere.
- This process is called a rare gas annealing process.
- the treated product in the high-temperature annealing step is cooled to about room temperature and is heat-treated in the rare gas annealing step, like the fired product or the powder of the fired product.
- the heating temperature in the rare gas annealing step is in the range of 1300 to 1500 ° C, and particularly preferably in the range of 1300 to 1500 ° C. If it is 1300 degreeC or more, the low crystalline part can be destabilized, and if it is 1500 degrees C or less, decomposition
- the rare gas one kind of gas selected from He, Ne, Ar, Kr, Xe, or Rn, or two or more kinds of mixed gases can be used.
- Ar gas is preferable.
- the heat treatment in the rare gas annealing is a treatment for destabilizing the low crystalline portion in the phosphor.
- the low crystalline portion is destabilized by heat treatment in a rare gas atmosphere, and is removed in the acid treatment step which is the next step.
- the unstable low crystalline portion generated in the rare gas annealing step and the phase different from the ⁇ sialon phosphor are removed by treatment with an acid (hereinafter referred to as an acid treatment step).
- the acid treatment can be performed, for example, by heat treatment with a mixed acid of hydrofluoric acid and nitric acid. By removing the low crystalline portion, the fluorescence characteristics are remarkably improved.
- As the heat treatment temperature a dissolution treatment carried out by heating at 60 ° C. or more for 5 minutes or more with a mixture of hydrofluoric acid and nitric acid is effective and preferable.
- a dispersion of ⁇ -sialon phosphor obtained by acid treatment is washed with water and dried to obtain phosphor powder. Further, fine powder may be removed from the phosphor powder by a wet precipitation method or the like.
- silicon is used instead of silicon nitride, and at least one aluminum selected from aluminum nitride, aluminum oxide, or an aluminum-containing compound that decomposes by heating to produce aluminum oxide.
- the nitriding treatment is performed before firing the mixture containing the compound and the optically active element compound.
- FIG. 2 shows an outline of a processing flow of the ⁇ -type sialon phosphor according to the second embodiment of the present invention. That is, a nitriding step of heating a mixture containing the metal compound powder and the optically active element compound in a nitrogen atmosphere, a baking step of heating the nitrided metal compound and the optically active element compound, and after cooling the fired product ⁇ -sialon fluorescence comprising a high-temperature annealing step for heat-treating in a nitrogen atmosphere, a rare-gas annealing step for heat-treating the high-temperature annealed product in a rare gas atmosphere, and a step for treating the rare-gas treated product with an acid It is a manufacturing method of a body.
- the nitriding treatment step is a treatment for nitriding silicon, and may be performed by heating in a nitrogen atmosphere in accordance with a usual nitriding treatment condition. That is, it is heated to 1200 to 1550 ° C. in order to nitride silicon and convert it into Si 3 N 4 .
- the heating temperature is preferably in the range of 1450 to 1500 ° C. If the heating temperature is 1450 ° C. or higher, Eu 2+ can enter the ⁇ -type sialon crystal, and a phosphor having sufficient emission intensity can be obtained.
- the baking, high temperature annealing, noble gas annealing and acid treatment conditions are the same as in the first embodiment. Further, as in the first embodiment, the ⁇ -sialon phosphor dispersion obtained by acid treatment is washed with water and dried to obtain a phosphor powder, and the phosphor powder is further subjected to wet sedimentation or the like to remove fine powder. Also good.
- Example 1 (1) Preparation of Eu-containing ⁇ -sialon raw material powder ⁇ -type silicon nitride powder (“SN-E10” grade, Ube Industries, Ltd., oxygen content 1.1 mass%) 95.5 mass%, aluminum nitride powder (Tokuyama Corporation) “F” grade made by the company, oxygen content 0.9 mass%) 3.3 mass%, aluminum oxide powder (“TM-DAR” grade made by Daimei Chemical Co., Ltd.) 0.4 mass%, and europium oxide powder (Shin-Etsu Chemical Co., Ltd.) 0.8% by mass of “RU” grade manufactured by the company was blended to obtain 1 kg of a raw material mixture.
- SN-E10 grade, Ube Industries, Ltd., oxygen content 1.1 mass%) 95.5 mass%
- aluminum oxide powder (“TM-DAR” grade made by Daimei Chemical Co., Ltd.) 0.4 mass%
- the raw material mixture was mixed by dry using a V-type mixer for 30 minutes, and further passed through a nylon sieve having an opening of 150 ⁇ m to obtain a raw material powder for phosphor synthesis.
- Firing step 170 g of a raw material powder is filled in a cylindrical boron nitride container (NEC grade, manufactured by Denki Kagaku Kogyo Co., Ltd.) with a lid with an internal size of 10 cm in diameter and 10 cm in height.
- NEC grade manufactured by Denki Kagaku Kogyo Co., Ltd.
- the obtained powder was gradually cooled to room temperature.
- the obtained fired product was a loosely agglomerated lump and could be loosened lightly by hand wearing clean rubber gloves.
- it passed through a sieve having an opening of 150 ⁇ m.
- the synthetic powder was pulverized with a supersonic jet pulverizer (PJM-80SP, manufactured by Nippon Pneumatic Industry Co., Ltd.) to obtain pulverized powder.
- FIG. 3 shows a scanning electron microscope (SEM) image of the pulverized powder obtained.
- the particle size of the pulverized powder can be controlled by the sample supply speed to the pulverization chamber and the pulverization air pressure.
- the obtained ⁇ -type phosphor powder was subjected to fine powder removal treatment by a wet precipitation method.
- the phosphor powder After 10 g of the phosphor powder is sufficiently dispersed in 500 mL of distilled water to which sodium hexametaphosphate has been added, it is transferred to a container with an inner dimension of 80 mm and a height of 140 mm, left to stand for 50 minutes, and a supernatant liquid of 90 mm from the surface of the water. Was removed.
- the hexametaphosphoric acid aqueous solution was again added, dispersed, allowed to stand for a predetermined time, and then the operation of removing the supernatant was repeated until the supernatant became transparent. Thereafter, the precipitate was filtered, sufficiently washed with water to remove the dispersant, and dried to obtain a ⁇ -type phosphor powder from which fine powder was removed.
- ⁇ Comparative Example 1> The phosphor powder was obtained by performing the same treatment steps and conditions as in Example 1 except that the high-temperature annealing step was omitted. That is, a ⁇ -type phosphor powder was produced by a method including “baking step”, “argon annealing step”, and “acid treatment step”. A scanning electron microscope (SEM) image after the acid treatment is shown in FIG.
- the particle sizes of the pulverized powder obtained by supersonic jet pulverization, the ⁇ -type phosphor powder after the acid treatment of Example 1 and the ⁇ -type phosphor powder after the acid treatment of Comparative Example 1 were measured by a laser diffraction scattering type particle size distribution measuring device ( Measurement was performed using a Beckman Coulter LS230. The particle size distribution is shown in FIG. It can be seen that the particle size is increased by performing both the high-temperature annealing process and the argon annealing process rather than the argon annealing process alone.
- Example 1 the elemental compositions of the ⁇ -type phosphor powder after acid treatment of Example 1 and the ⁇ -type phosphor powder after acid treatment of Comparative Example 1 were measured.
- An oxygen / nitrogen analyzer (Horiba, Ltd., EMGA-920) was used for measuring oxygen.
- a high frequency inductively coupled plasma emission spectrometer (Spectro, Ciros) was used for the measurement of europium, aluminum and silicon. The results are shown in Table 2.
- the oxygen amount is reduced by passing through the high temperature annealing step and the argon annealing step as compared with the argon annealing step alone.
- the emission intensity of the ⁇ -type phosphor powder obtained in Example 1 and Comparative Example 1 was measured with a spectrofluorometer (manufactured by Hitachi High-Technologies Corporation, “F4500”). The emission intensity was evaluated as follows. First, the phosphor powder was filled with a concave cell so that the surface was smooth, and an integrating sphere was attached. Monochromatic light dispersed at a predetermined wavelength from a light emission source (Xe lamp) was introduced into the integrating sphere via an optical fiber. Using this monochromatic light as an excitation source, the phosphor sample was irradiated, and the spectrum of the fluorescence and reflected light of the sample was measured using a spectrophotometer.
- a light emission source Xe lamp
- blue light having a wavelength of 455 nm was used as the monochromatic light.
- the emission intensity was expressed as a relative peak intensity (%) with the emission intensity of YAG: Ce (P46Y3; Kasei Optonics) as 100%.
- the results are shown in Table 3 and FIG.
- Example 2 shows an example using silicon powder.
- Silicon powder purity: 99.999% or higher, ⁇ 45 ⁇ m, manufactured by Kojun Chemical Co., Ltd.
- 96.41% by mass aluminum nitride powder (E grade manufactured by Tokuyama Co.) 1.16 Mass% and Europium oxide powder (RU grade made by Shin-Etsu Chemical Co., Ltd.) 2.43 mass% were mixed using a mortar and pestle made of a silicon nitride fired body, and further passed through a sieve with an opening of 250 ⁇ m to remove aggregation.
- Raw material mixed powder was used.
- the raw material mixed powder is filled into a cylindrical boron nitride container (made by Denki Kagaku Kogyo Co., Ltd., “N-1” grade) with a lid of 40 mm in diameter and 30 mm in height, and 0 in a carbon heater electric furnace.
- Heat treatment was performed at 1550 ° C. for 8 hours in a pressurized nitrogen atmosphere of 48 MPa.
- the heating rate during heating was from room temperature to 1200 ° C. at 20 ° C./min and from 1200 to 1500 ° C. at 0.5 ° C./min.
- the obtained product was massive and was pulverized using a mortar and pestle made of a silicon nitride fired body.
- the pulverized powder was classified with a sieve having an opening of 45 ⁇ m, and the powder of 45 ⁇ m or less was used as Eu-activated aluminum-containing silicon nitride powder for phosphor synthesis. Further, the obtained Eu-activated aluminum-containing silicon nitride powder was passed through a sieve having a mesh size of 250 ⁇ m to obtain a raw material mixed powder for ⁇ -type sialon phosphor.
- the emission intensity was measured under the same conditions as in Example 1 using a xenon lamp light source that was split into excitation light. The results are shown in Table 4.
- the emission intensity is improved by performing the treatment by the high temperature annealing process. It can also be seen that the emission intensity is further improved by combining the high temperature annealing step and the argon annealing step.
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Abstract
Description
本発明の第一実施形態に係るβ型サイアロン蛍光体の製造方法は、窒化ケイ素、アルミニウム化合物及び光学活性元素化合物を含む混合物を加熱処理する焼成工程と、焼成物を冷却した後、窒素雰囲気下において加熱処理する高温アニール工程と、高温アニール処理物を希ガス雰囲気下において加熱処理する希ガスアニール工程とを含むことを特徴とする。図1に処理フローの概要を示す。
第一実施形態と異なる点は、第二実施形態では窒化ケイ素の代わりにケイ素を用い、窒化アルミニウム、酸化アルミニウム又は加熱により分解して酸化アルミニウムを産生するアルミニウム含有化合物から選ばれる1種以上のアルミニウム化合物と光学活性元素化合物とを含む混合物を焼成する前に窒化処理する点にある。
(1)Eu含有βサイアロン用原料粉末の準備
α型窒化ケイ素粉末(宇部興産社製「SN-E10」グレード、酸素含有量1.1質量%)95.5質量%、窒化アルミニウム粉末(トクヤマ社製「F」グレード、酸素含有量0.9質量%)3.3質量%、酸化アルミニウム粉末(大明化学社製「TM-DAR」グレード)0.4質量%、及び酸化ユーロピウム粉末(信越化学工業社製「RU」グレード)0.8質量%を配合し、原料混合物1kgを得た。
原料粉末を内寸で直径10cm×高さ10cmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製、「N-1」グレード)に170g充填し、カーボンヒーターの電気炉で0.9MPaの加圧窒素雰囲気中、2000℃で15時間の加熱処理を行った後、得られた粉末を室温まで徐冷した。得られた焼成物は、緩く凝集した塊状であり、清浄なゴム手袋を着用した人手で軽くほぐすことができた。こうして、軽度の解砕を行った後、目開き150μmの篩を通した。これらの操作によって、160gの合成粉末を得た。
直径70mm×高さ45mmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製「N-1」グレード)に粉砕粉を70g充填し、カーボンヒーターの電気炉で0.9MPaの加圧窒素雰囲気中、1900℃で8時間の加熱処理を行った。得られた粉末は、目開き45μmの篩を全て通過した。
得られた粉末15gを、直径40mm×高さ45mmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製「N-1」グレード)に充填し、カーボンヒーターの電気炉で大気圧アルゴン雰囲気中、1450℃で8時間の加熱処理を行った。得られた粉末には焼成を伴う収縮はなく、加熱前とほとんど同じ性状であり、目開き45μmの篩を全て通過した。なお、以下の記載において、希ガス工程でアルゴンガスを用いた加熱処理をアルゴンアニール工程という。
粉末を50%フッ化水素酸と70%硝酸の1:1混酸中で処理した。処理中に懸濁液は深緑色から鮮やかな緑色に変化した。その後、水洗及び乾燥してβ型蛍光体粉末を得た。図4に走査型電子顕微鏡(SEM)像を示す。
高温アニール工程を省いた他は、実施例1と同じ処理工程及び条件で処理を行い、蛍光体粉末を得た。すなわち、「焼成工程」、「アルゴンアニール工程」及び「酸処理工程」を含む方法により、β型蛍光体粉末を製造した。酸処理後の走査型電子顕微鏡(SEM)像を図5に示す。
実施例1の窒化ケイ素粉末に代えて、実施例2ではシリコン粉末を使用した例を示す。
(1)Eu含有βサイアロン用原料粉末の準備
シリコン粉末(純度99.999%以上、-45μm、高純度化学社製)96.41質量%、窒化アルミニウム粉末(トクヤマ社製Eグレード)1.16質量%、及び酸化ユーロピウム粉末(信越化学工業社製RUグレード)2.43質量%を窒化ケイ素焼成体製の乳鉢と乳棒を用い混合し、更に目開き250μmの篩を全通させ凝集を取り除き、原料混合粉末とした。
原料混合粉末を直径40mm×高さ30mmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製、「N-1」グレード)に充填し、カーボンヒーターの電気炉で0.48MPaの加圧窒素雰囲気中、1550℃で8時間の加熱処理を行った。なお、加熱時の昇温速度は、室温~1200℃を20℃/分で、1200~1500℃を0.5℃/分とした。得られた生成物は塊状であり、これを窒化ケイ素焼成体製の乳鉢と乳棒を用い粉砕した。粉砕した粉末を目開き45μmの篩で分級し、45μm以下の粉末を蛍光体合成用のEu付活アルミニウム含有窒化ケイ素粉末とした。さらに、得られたEu付活アルミニウム含有窒化ケイ素粉末を目開き250μmの篩を全通させ、β型サイアロン蛍光体用原料混合粉末とした。
β型サイアロン蛍光体用原料混合粉末を直径60mm×高さ30mmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製、「N-1」グレード)に充填し、カーボンヒーターの電気炉で0.8MPaの加圧窒素雰囲気中、2000℃で8時間の加熱処理を行った。得られた生成物は緑色の緩く凝集した塊状物であり、室温まで徐冷した後、清浄なゴム手袋を着用した人手で軽くほぐすことができた。こうして、軽度の解砕を行った後、目開き45μmの篩を通過させた。
直径60mm×高さ30mmの蓋付きの円筒型窒化ホウ素製容器(電気化学工業社製、「N-1」グレード)に蛍光体粉末を充填し、カーボンヒーターの電気炉で大気圧窒素雰囲気中、1800℃で8時間の再加熱処理を行った。
得られた蛍光体粉末をカーボンヒーターの電気炉で大気圧アルゴン雰囲気中、1400℃で8時間の加熱処理を行なった。
50%フッ化水素酸と70%硝酸の1:1混酸中、75℃での加熱処理、その後、実施例1と同様に処理して、ろ過、水洗及び乾燥してβ型蛍光体粉末を得た。
高温アニール工程及びアルゴンアニール工程を省いた他は、実施例2と同じ処理工程及び条件で処理を行い、蛍光体粉末を得た。
高温アニール工程を省いた他は、実施例2と同じ処理工程及び条件で処理を行い、蛍光体粉末を得た。
Claims (4)
- 窒化物または酸窒化物の結晶中に発光中心としての光学活性元素を含有する蛍光体の製造方法において、
窒化ケイ素、アルミニウム化合物粉末及び光学活性元素化合物を含む混合物を加熱処理する焼成工程と、
焼成物を冷却した後、窒素雰囲気下において加熱処理する高温アニール工程と、
高温アニール処理物を希ガス雰囲気下において加熱処理する希ガスアニール工程と、
希ガス処理物を酸で処理する工程と、
を含むことを特徴とする、β型サイアロン蛍光体の製造方法。 - 窒化物または酸窒化物の結晶中に発光中心としての光学活性元素を含有する蛍光体の製造方法において、
ケイ素、アルミニウム化合物粉末及び光学活性元素化合物を含む混合物を窒素雰囲気下で加熱する窒化工程と、
窒化処理された金属化合物と光学活性元素化合物を加熱処理する焼成工程と、
焼成物を冷却した後、窒素雰囲気下において加熱処理する高温アニール工程と、
高温アニール処理物を希ガス雰囲気下において加熱処理する希ガスアニール工程と、
希ガス処理物を酸で処理する工程と、
を含むことを特徴とする、β型サイアロン蛍光体の製造方法。 - 前記高温アニール工程の加熱処理温度が、焼成工程の加熱温度より低い温度であることを特徴とする、請求項1又は2記載のβ型サイアロン蛍光体の製造方法。
- 前記希ガスアニール工程の加熱処理温度が焼成工程の加熱温度より低い温度であることを特徴とする、請求項1又は2記載のβ型サイアロン蛍光体の製造方法。
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CN109775674A (zh) * | 2019-04-02 | 2019-05-21 | 青岛瓷兴新材料有限公司 | 一种氮化硅镁粉体的制备方法 |
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JP5558787B2 (ja) * | 2009-11-13 | 2014-07-23 | 電気化学工業株式会社 | β型サイアロンの製造方法 |
JP6222288B2 (ja) * | 2015-08-07 | 2017-11-01 | 日亜化学工業株式会社 | βサイアロン蛍光体の製造方法 |
JP6536622B2 (ja) * | 2016-05-30 | 2019-07-03 | 日亜化学工業株式会社 | βサイアロン蛍光体の製造方法 |
US10894917B2 (en) | 2016-05-30 | 2021-01-19 | Nichia Corporation | Method of producing beta-sialon fluorescent material |
CN110997869B (zh) * | 2017-07-19 | 2023-12-29 | 三菱化学株式会社 | 氮化物荧光体和氮化物荧光体的制造方法 |
JP6982245B2 (ja) * | 2018-06-27 | 2021-12-17 | 日亜化学工業株式会社 | βサイアロン蛍光体の製造方法 |
WO2020054350A1 (ja) | 2018-09-12 | 2020-03-19 | デンカ株式会社 | 蛍光体及び発光装置 |
JP2020152876A (ja) * | 2019-03-22 | 2020-09-24 | 三菱ケミカル株式会社 | 窒化物蛍光体、該窒化物蛍光体を含む発光装置、および該発光装置を含む照明装置 |
JP7497206B2 (ja) | 2020-05-18 | 2024-06-10 | デンカ株式会社 | リチウム含有α-サイアロン蛍光体の製造方法 |
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