WO2010024252A1 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
- Publication number
- WO2010024252A1 WO2010024252A1 PCT/JP2009/064791 JP2009064791W WO2010024252A1 WO 2010024252 A1 WO2010024252 A1 WO 2010024252A1 JP 2009064791 W JP2009064791 W JP 2009064791W WO 2010024252 A1 WO2010024252 A1 WO 2010024252A1
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- WIPO (PCT)
- Prior art keywords
- vibration
- drive device
- moving body
- moving
- vibration friction
- Prior art date
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- 230000005540 biological transmission Effects 0.000 claims description 32
- 230000008602 contraction Effects 0.000 claims description 21
- 238000003825 pressing Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 48
- 238000006073 displacement reaction Methods 0.000 abstract description 25
- 230000003287 optical effect Effects 0.000 description 26
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000004840 adhesive resin Substances 0.000 description 9
- 229920006223 adhesive resin Polymers 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 4
- 229920000106 Liquid crystal polymer Polymers 0.000 description 3
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000805 composite resin Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
Definitions
- the present invention relates to a drive device, and more particularly, to a drive device using an electromechanical transducer such as a piezoelectric element.
- linear actuators that use electromechanical transducer elements such as piezoelectric elements, electrostrictive elements, and magnetostrictive elements have been used as autofocus actuators and zoom actuators for cameras.
- Patent Document 1 discloses a driving method of a driving apparatus using an electromechanical transducer that can suppress ringing vibration generated in an electromechanical transducer such as a piezoelectric element and can be driven at high speed.
- the drive device disclosed in Patent Document 1 includes an electromechanical transducer such as a piezoelectric element, a drive member (vibration shaft) that is coupled to the transducer and displaced together with the transducer, and a driven that is frictionally coupled to the drive member.
- a member zoom lens barrel
- a driven member is driven by devising a piezoelectric element (a drive signal applied to an electromechanical transducer).
- Patent Document 2 Japanese Patent Laid-Open No. 2006-304529
- the mover is formed of a liquid crystal polymer containing carbon fiber.
- the drive device disclosed in Patent Document 2 includes a piezoelectric element (electromechanical conversion element) that expands and contracts according to an applied voltage, a drive shaft (vibration friction portion) that is fixed to one end in the expansion and contraction direction of the piezoelectric element, and a drive shaft.
- the movable element (moving member) is moved along the driving shaft (vibrating friction portion) by causing the driving shaft to vibrate by varying the expansion or contraction speed or acceleration of the piezoelectric element.
- Patent Document 3 discloses a drive device that can stably drive a moving member at high speed.
- the drive device disclosed in Patent Document 3 is coupled to a stationary member, an electromechanical conversion element having one end in the expansion / contraction direction fixed to the stationary member, and the other end in the expansion / contraction direction of the electromechanical conversion element.
- a driving member (vibration friction portion) supported so as to be movable in the expansion / contraction direction of the mechanical conversion element, and a moving member frictionally coupled to the driving member and supported so as to be movable in the expansion / contraction direction of the electromechanical conversion element; Friction force applying means for generating a friction force between the driving member (vibration friction portion) and the moving member is provided.
- the frictional force adding means includes an elastic member that is fixed to the moving member and generates a pressing force, and a sandwiching member that transmits the pressing force generated by the elastic member to the driving member. Moreover, the contact part of a moving member and a drive member and the contact part of a pinching member are made into V-shaped cross section.
- Patent Document 4 discloses a drive device using an electromechanical transducer.
- the driving device disclosed in Patent Document 4 includes an electromechanical transducer element fixed to a support base (stationary member) at one end, a vibration member (vibration friction portion) fixed to the other end of the electromechanical transducer element, A moving body (moving member) engaged with the vibrating member with a predetermined frictional force is provided. A carbon rod is used as the vibration member (vibration friction part).
- Patent Document 5 JP 2006-141133 A discloses a drive device having a short overall length.
- the drive device disclosed in Patent Document 5 includes an electromechanical transducer element having one end fixed to a fixed body (weight, stationary member), and a drive friction member (vibration friction portion) secured to the other end of the electromechanical transducer element. And a moving body (moving member) that frictionally engages with the driving friction member.
- a fixed body weight, stationary member
- LCP resin liquid crystal polymer
- carbon reinforced resin and glass fiber reinforced resin
- Patent Document 6 discloses an imaging apparatus that can simplify the structure and can reduce the cost.
- the imaging device disclosed in Patent Document 6 includes a lens driving unit that moves the imaging lens in the optical axis direction.
- SIDM Smooth Impact Drive Mechanism
- the lens driving unit includes a SIDM weight unit that is attached to the driving unit mounting unit with a predetermined adhesive, a piezoelectric element unit (electromechanical conversion element) that is connected to the SIDM weight unit, and expands and contracts in the optical axis direction when energized.
- a shaft portion (vibration friction portion) elongated in the optical axis direction connected to the element portion.
- the shaft portion of the lens driving unit is sandwiched by a driving unit clamping member (moving member) of the driving force transmission unit along a direction substantially orthogonal to the optical axis direction.
- Patent Document 7 discloses an electromechanical actuator structure in which the moving speed of a passive member increases and the operating frequency of a drive pulse decreases.
- the electromechanical actuator structure disclosed in Patent Document 7 includes an electric actuator (electromechanical transducer) having a bottom surface joined to a base and a top surface, and an elastic drive joined to the top surface of the electric actuator. And a member (vibration friction part).
- the elastic drive member has a fixed portion that is joined to the top surface of the electric actuator and reciprocates therewith, and an elastic portion that extends from the fixed portion to the outside of the electric actuator and has a conductive portion.
- a passive member (moving member) is attached in the conductive member of the elastic part of the elastic drive member.
- An elastic member is attached to the elastic portion of the elastic drive member. The elastic member presses the passive member so as to frictionally engage the conductive portion of the elastic portion of the elastic drive member. Thereby, a passive member (moving member) moves with an elastic drive member (vibration friction part).
- the end surfaces of the electromechanical conversion element and the end surface of the vibration friction portion have their center axes aligned with each other (concentric). In the state, it is directly coupled.
- the vibration friction portion needs to efficiently transmit vibration (reciprocal displacement) generated by expansion and contraction of the electromechanical conversion element to the moving body (moving member).
- the central axis of the electromechanical transducer and the central axis of the vibration friction portion are on the same straight line. As a result, when one position of the electromechanical conversion element and the vibration friction portion is determined, the other position is also determined. With such a conventional drive device, there is a problem that the product space (empty space) cannot be effectively utilized with the miniaturization.
- the end face of the electric actuator (electromechanical transducer) and the end face of the fixed portion of the elastic drive member (vibration friction portion) are directly coupled (joined).
- the elastic drive member (vibration friction portion) needs to efficiently transmit vibration (reciprocal displacement) generated by expansion and contraction of the electric actuator (electromechanical conversion element) to the passive member (moving member).
- the central axis of the electric actuator (electromechanical transducer) and the central axis of the elastic drive member (vibration friction portion) are shifted from each other. Efficient communication becomes impossible.
- the problem to be solved by the present invention is to provide a drive device that can efficiently transmit the reciprocal displacement of the electromechanical transducer to the moving member and can effectively use the product space (empty space). It is in.
- the driving device is attached to the electromechanical conversion element having first and second end faces opposed to each other in the expansion and contraction direction, and the second end face of the electromechanical conversion element. It is understood that the vibration friction portion is provided and a moving member frictionally coupled to the vibration friction portion. The moving member is movable in the expansion / contraction direction of the electromechanical transducer.
- the drive device includes a vibration transmission member disposed between the second end face of the electromechanical transducer and the end face of the vibration friction portion. According to the exemplary aspect of the present invention, the central axis of the electromechanical transducer and the central axis of the vibration friction portion are not on the same straight line.
- the vibration transmitting member is disposed between the second end surface of the electromechanical transducer and the end surface of the vibration friction portion, the reciprocating displacement of the electromechanical transducer can be efficiently transmitted to the moving member. .
- the center axis of the electromechanical transducer and the center axis of the vibration friction portion are not on the same straight line, the product space (empty space) can be used effectively.
- FIG. 2 is a partially enlarged perspective view showing an enlarged main part of the drive device shown in FIG. 1.
- FIG. 2 is a partial cross-sectional front view showing a part of the drive device shown in FIG. 1 in cross section.
- FIG. 5 is a partially enlarged front cross-sectional view for explaining the function and effect of the drive device shown in FIGS. 1 to 4.
- FIG. 5 is a waveform diagram showing a change in voltage applied to a laminated piezoelectric element by a drive circuit for explaining a drive method of the drive device shown in FIGS. 1 to 4.
- FIG. 1 is a perspective view of the drive device 10 as viewed obliquely from above and front.
- FIG. 2 is a perspective view of the driving device 10 shown in FIG.
- FIG. 3 is a partially enlarged perspective view showing an enlarged main part of the driving apparatus 10 shown in FIG.
- FIG. 4 is a partial cross-sectional front view showing a part of the drive device 10 in cross section.
- an orthogonal coordinate system (X, Y, Z) is used.
- the X-axis direction is the front-rear direction (depth direction)
- the Y-axis direction is the left-right direction (width direction)
- Z The axial direction is the vertical direction (height direction).
- the illustrated driving device 10 is used, for example, as an autofocus lens driving unit.
- the vertical direction Z is the direction of the optical axis O of the lens.
- the autofocus lens driving unit is composed of a lens movable part and a lens driving part.
- the lens driving unit drives the lens moving unit as will be described later while supporting the lens moving unit slidably in the optical axis O direction.
- the illustrated driving device 10 is arranged in a housing (not shown).
- the housing includes a cup-shaped upper cover (not shown) and a lower base (not shown).
- a stationary member (weight) 11 is mounted on the lower base of the housing.
- the upper surface of the upper cover has a cylindrical portion (not shown) having the optical axis O of the lens as the central axis.
- an image sensor arranged on the substrate is mounted in the center of the lower base.
- This imaging device captures a subject image formed by a movable lens (described later) and converts it into an electrical signal.
- the image pickup device is configured by, for example, a charge coupled device (CCD) image sensor, a complementary metal oxide (CMOS) image sensor, or the like.
- a movable barrel (lens holder, lens support) 17 as a driven member is accommodated in the housing.
- the central axis of the driven member 17 coincides with the optical axis O of the lens.
- the movable lens barrel (lens holder, lens support) 17 has a cylindrical cylindrical portion 170 for holding a lens barrel (lens assembly) 18.
- a lens barrel (lens assembly) 18 holds an autofocus lens AFL.
- a female screw (not shown) is cut on the inner peripheral wall of the cylindrical portion 170 of the lens holder 17.
- a male screw (not shown) that is screwed into the female screw is cut on the outer peripheral wall of the lens barrel 18.
- the lens barrel 18 is rotated around the optical axis O and screwed along the optical axis O direction with respect to the cylindrical portion 170 of the lens holder 17.
- the lens barrel 18 is accommodated in the lens holder 17 and bonded to each other by an adhesive or the like.
- the lens holder 17 has a first protruding portion 172 that protrudes radially outward to the right in the left-right direction Y at the upper front end of the cylindrical portion 170 with respect to the optical axis O.
- the first protrusion 172 has a substantially triangular prism shape.
- a first moving body (moving shaft) 121 is fixed to the rear wall of the first projecting portion 172. In the illustrated example, the first moving body 121 has a V-shaped structure.
- the lens holder 17 has a second protruding portion 174 that protrudes radially outward to the right in the left-right direction Y at the upper rear end of the cylindrical portion 170 at a position different from the first protruding portion 172. Similar to the first protrusion 172, the second protrusion 174 has a substantially triangular prism shape. The second protrusion 174 has a right end extending in the front-rear direction X at the right end. A first end (rear end) 15a of the spring 15 is fixed to the right end side of the second protrusion 174 with an adhesive or the like.
- the spring 15 extends from the first end (rear end) 15a to the front end in the front-rear direction X to the second end (front end) 15b along the right end side 174a of the second protrusion 174. is doing.
- a plate-like second moving body (moving shaft) 122 is attached to the second end (front end) 15 b of the spring 15.
- the second moving body 122 has a planar structure.
- the second moving body (moving shaft) 122 is urged by the spring 15 in a direction approaching the first moving body (moving shaft) 121 (left direction in the left-right direction Y). Between a first moving body (moving shaft) 121 and a second moving body (moving shaft) 122, a cylindrical vibration friction portion (vibrating member) 14 described later is sandwiched.
- the first moving body 121 and the second moving body 122 are made of the same material.
- the combination of the first moving body 121 and the second moving body 122 serves as a moving member.
- the combination of the movable lens barrel (lens holder) 17, lens barrel (lens assembly) 18, spring 15, and first and second moving bodies 121 and 122 constitutes the lens movable part of the autofocus lens driving unit. Is done.
- a cylindrical guide shaft 22 is provided on the left back side in the housing.
- the guide shaft 22 extends in parallel with the optical axis O.
- the guide shaft 22 is erected from the lower base of the housing.
- the guide shaft 22 and the vibration friction portion (vibration member) 14 are disposed at rotationally symmetric positions around the optical axis O.
- the lens holder 17 has a third protrusion 176 that protrudes radially outward at the left back end of the cylindrical portion 170 with respect to the optical axis O.
- the third protrusion 176 has a through hole 176a through which the guide shaft 22 passes.
- the combination of the guide shaft 22 and the third projecting portion 176 prevents the lens movable portion from rotating, and acts as a guide member that guides the lens movable portion relative to the housing in the direction of the optical axis O. That is, this guide member allows the lens movable portion to move linearly only in the direction of the optical axis O with respect to the housing.
- the lens driving unit (driving device) 10 includes a laminated piezoelectric element 13 that functions as an electromechanical conversion element, the stationary member (weight) 11, the vibration friction unit (vibrating member) 14, and a vibration transmitting member 19.
- the lens driving unit (driving device) 10 includes a laminated piezoelectric element 13 that functions as an electromechanical conversion element, the stationary member (weight) 11, the vibration friction unit (vibrating member) 14, and a vibration transmitting member 19.
- the laminated piezoelectric element 13 expands and contracts in the direction of the optical axis O.
- the laminated piezoelectric element 13 has a structure in which a plurality of piezoelectric layers are laminated in the optical axis O direction. As shown in FIG. 4, the laminated piezoelectric element 13 has a first end face (lower end face) 13a and a second end face (upper end face) 13b that face each other in the expansion / contraction direction.
- the stationary member (weight) 11 is coupled to the first end surface (lower end surface) 13a of the laminated piezoelectric element 13 with an adhesive or the like. A combination of the laminated piezoelectric element 13 and the stationary member 11 is called a piezoelectric unit.
- the vibration friction portion (vibration member) 14 is attached to the second end face (upper end face) 13b of the laminated piezoelectric element 13 with an adhesive or the like via the vibration transmission member 19. That is, the upper end surface 13b of the laminated piezoelectric element 13 is bonded (joined) to the lower end surface 19a of the vibration transmitting member 19 with an adhesive (adhesive resin), and the lower end surface 14a of the vibration friction portion (vibrating member) 14 is bonded to the adhesive. (Adhesive resin) is coupled (joined) to the upper end surface 19b of the vibration transmitting member 19.
- the vibration transmission member 19 is added (intervened) between the vibration friction portion (vibration member) 14 and the laminated piezoelectric element (electromechanical conversion element) 13, vibration is generated.
- the friction part (vibrating member) 14 only needs to have a structure that takes into account the slidability with the first and second moving bodies 121 and 122. Therefore, it is not necessary to select the material of the vibration friction portion (vibration member) 14 in consideration of resin adhesiveness with the electromechanical transducer (laminated piezoelectric element) 13. Thereby, the vibration friction part (vibration member) 14 expands not only the freedom degree of the material selection but the freedom degree of the shape.
- the vibration friction portion (vibration member) 14 aluminum whose surface is subjected to fluorine lubrication plating is used.
- the vibration transmission speed and the rigidity of the metal or fiber are enhanced.
- a resin composite is used.
- the fiber reinforced resin composite may be, for example, carbon fiber reinforced plastic (CFRP).
- the vibration transmitting member 19 by adding the vibration transmitting member 19, the material and shape of the vibration transmitting member 19 are combined with other members, so that the resonance phenomenon of the spring 15 can be suppressed. Further, it is possible to compensate for the performance variation for each product caused by the variation in the dimensions of the spring 15 with the vibration transmission member 19 having a relatively simple shape. In other words, since the vibration transmission member 19 can be manufactured with a simple shape, it is possible to reduce variation in performance of each product of the driving device 10.
- the vibration transmitting member 19 it is possible to efficiently transmit the vibration (reciprocal displacement) generated by the expansion and contraction of the electromechanical transducer (laminated piezoelectric element) 13 to the moving members (121, 122). . As a result, the movement (displacement) of the moving members (121, 122) can be performed smoothly.
- the illustrated vibration transmission member 19 has a rectangular parallelepiped shape that extends inward from the electromechanical transducer (laminated piezoelectric element) 13 (that is, the left side in the left-right direction Y and the back side (rear side) in the front-rear direction X). ing. As a result, it is possible, as shown in FIG. 4, it shifted the center axis 14 O of the electromechanical transducer element center axis 13 O and the vibration friction portion 14 of the (laminated piezoelectric element) 13 to each other. In other words, the electro-mechanical conversion element and the central axis 13 O of (laminated piezoelectric element) 13 and the central axis 14 O of the vibration friction portion 14 is not collinear.
- the center axis 14 O of the vibration friction portion 14 is shifted to the inner side (that is, the side closer to the optical axis O direction of the lens) than the center axis 13 O of the electromechanical transducer (laminated piezoelectric element) 13. Yes.
- the vibration friction portion 14 can be disposed within the range of the shape of the vibration transmission member 19 as shown in FIG. 5.
- the central axis 14 O of the vibration friction portion 14 with respect to the central axis 13 O of the electromechanical conversion element 13
- electromechanical transducer 13 and the vibration friction portion 14 It is possible to secure empty spaces ES 1 and ES 2 in the vicinity of. Thereby, the space of the drive device 10 can be reduced. That is, it is possible to reduce the free space ES 1.
- the line extending in the vertical direction on the right side of FIG. 5 indicates the outer shape restriction OL of the driving device 10.
- the first and second moving bodies 121 and 122 are frictionally coupled to the vibration friction portion (vibration member) 14.
- the first moving body 121 has a V-shaped structure
- the second moving body 122 has a planar structure.
- the lens movable portion includes the spring 15 for sandwiching the vibration friction portion (vibration member) 14 between the first and second moving bodies 121 and 122. That is, the spring 15 is a second friction body (vibration member) having a first end 15a fixed to the second projecting plate 174 and attached to the second end 15b. ) 14 is generated toward the first moving body 121. In other words, the spring 15 biases the second moving body 122 against the vibration friction portion (vibration member) 14, and causes the vibration friction portion (vibration member) 14 to move with the first and second movement bodies 121 and 122. By sandwiching, it acts as a frictional force adding means (biasing means) for applying a frictional force between the vibration friction portion (vibrating member) 14 and the first and second moving bodies 121 and 122.
- biasing means biasing means for applying a frictional force between the vibration friction portion (vibrating member) 14 and the first and second moving bodies 121 and 122.
- the vibration friction portion (vibration member) 14 is sandwiched between the first and second moving bodies 121 and 122, the position of the lens movable portion can be regulated.
- the first moving body 121 and the second moving body 122 are made of the same material. Therefore, the first friction coefficient between the first moving body 121 and the vibration friction portion 14 and the second friction coefficient between the second movement body 122 and the vibration friction portion 14 are substantially reduced. Can be equal. Thereby, the lens movable part can be driven linearly stably. As a result, the vibration motion generated by the expansion and contraction of the laminated piezoelectric element (electromechanical conversion element) 13 can be efficiently transmitted to the first and second moving bodies 121 and 122.
- the driving device 10 can design the effective length of the spring 15 to be long. Therefore, even if the dimensions and assembly dimensions of the spring 15 vary, the influence on the load can be reduced. As a result, it is possible to manufacture the drive device 10 with less performance variation for each product.
- the effective length of the spring 15 can be designed to be long, even if the material of the spring 15 is not only a metal but also a resin molded product, a sufficient elastic effect can be exhibited.
- the first moving body 121 having a V-shaped structure and the vibration friction portion 14 are in two linear contact with each other, and the second moving body 122 having a planar structure and the vibration friction portion 14 are in one linear contact with each other.
- the device 10 has an effect that the contact state of the friction coupling portion is stable and friction drive with good reproducibility can be obtained.
- the angle of the V-shaped structure of the first moving body 121 is desirably in the range of 30 degrees to less than 180 degrees.
- first and second moving bodies 121 and 122 are pressed against the vibration friction portion 14 by the spring 15.
- first and second moving bodies 121 and 122 are pressed against the vibration friction portion 14 by the spring 15.
- the spring 15 is attached not to the vibration friction portion 13 but to the lens movable portion side.
- the vibration friction portion 13 and the spring 15 it is possible to prevent the resonance phenomenon of the spring 15 from occurring. Therefore, the phase of the vibration friction portion 13 and the spring 15 is not reversed, and the lens movable portion can be moved efficiently.
- the traveling direction of the lens movable portion can be controlled to proceed in the intended direction.
- the lens driving unit and the lens moving unit are juxtaposed with respect to the optical axis O as shown in FIG. Therefore, the drive device 10 can be reduced in height.
- FIGS. 6A to 6D show a change in voltage applied to the laminated piezoelectric element 13 by a drive circuit (not shown) and a displacement of the laminated piezoelectric element 13, respectively.
- FIG. 6C is a diagram showing the displacement of the moving members (121, 122) when there is no vibration transmission member 19 (conventional drive device), and FIG. 6D shows the case where the vibration voltage member 19 is present (drive according to the present invention). It is a figure which shows the displacement of the moving member (121,122) of the apparatus 10).
- the horizontal axis indicates time [ ⁇ sec].
- 6A indicates the voltage [V].
- 6B to 6D the vertical axis represents the displacement [nm].
- a rectangular wave voltage composed of a repetitive waveform of a negative voltage and a positive voltage is applied to the laminated piezoelectric element 13 as a drive voltage.
- the negative voltage is -2.8V and the positive voltage is + 2.8V.
- the driving frequency of the rectangular wave voltage is 96 kHz, and the duty ratio is 30/70.
- the duty ratio is a ratio of the pulse width of the negative voltage to the pulse width of the positive voltage.
- the illustrated example shows an example in which the lens holder 17 (lens barrel 18) is continuously moved downward along the optical axis O direction (vertical direction Z).
- the laminated piezoelectric element 13 has a sudden displacement (elongation) corresponding to a negative voltage with a short pulse width and a gentle displacement (contraction) corresponding to a positive voltage with a long pulse width. ) Occur alternately.
- a rectangular wave voltage (driving voltage) is applied to the laminated piezoelectric element 13 (FIG. 6A), and a sawtooth wave-like reciprocating displacement (expansion / contraction) is caused to the laminated piezoelectric element 13 (FIG. 6B).
- the operation of the driving device 10 will be described with reference to FIG. 1 in addition to FIGS. 6A to 6D. First, an operation when the lens movable portion is moved downward along the vertical direction Z will be described.
- the laminated piezoelectric element 13 rapidly undergoes an elongation displacement in the thickness direction.
- the vibration friction portion 14 rapidly moves upward along the optical axis O direction (vertical direction Z) via the vibration transmission member 19.
- the lens movable portion (the first and second moving bodies 121 and 122) does not move. This is because, due to the inertial force, the lens movable portion overcomes the frictional force between the vibration friction portion 14 and the first and second moving bodies 121 and 122 and substantially remains at that position.
- the laminated piezoelectric element 13 is gradually contracted and displaced in the thickness direction.
- the vibration friction portion 14 moves slowly downward along the optical axis O direction (vertical direction Z) via the vibration voltage member 19.
- the lens movable portion (the first and second moving bodies 121 and 122) moves downward along the optical axis O direction (vertical direction Z) substantially together with the vibration friction portion 14. This is because the vibration friction portion 14 and the first and second moving bodies 121 and 122 are in surface contact with each other and are coupled by a frictional force generated on a contact surface between them.
- a negative voltage with a short pulse width and a positive voltage with a long pulse width are alternately applied to the laminated piezoelectric element 13, and an expansion displacement and a contraction displacement are alternately generated in the laminated piezoelectric element 13.
- the holder 17 (lens barrel 18) can be continuously moved downward along the optical axis O direction (vertical direction Z).
- the reciprocating displacement (vibration) of the laminated piezoelectric element (electromechanical conversion element) 13 is directly transmitted to the vibration friction portion 14. Therefore, it is difficult to efficiently transmit the vibration (reciprocal displacement) generated by the expansion / contraction of the laminated piezoelectric element (electromechanical conversion element) 13 to the moving members (121, 122). As a result, as shown in FIG. 6C, the lens movable portion (moving member) cannot be moved smoothly.
- the reciprocating displacement (vibration) of the laminated piezoelectric element (electromechanical conversion element) 13 is applied to the vibration friction portion 14 via the vibration transmission member 19. Communicated. Therefore, vibration (reciprocal displacement) generated by expansion / contraction of the laminated piezoelectric element (electromechanical conversion element) 13 can be efficiently transmitted to the moving members (121, 122). As a result, as shown in FIG. 6D, the lens movable portion (moving member) can be moved smoothly.
- the electromechanical conversion element 13 is reciprocally displaced in a sawtooth wave, and the reciprocating displacement of the electromechanical conversion element 13 is transmitted to the vibration friction portion 14 via the vibration transmission member 19. , 122) can be smoothly linearly driven in a predetermined direction (downward in the above example).
- the lens movable portion is moved upward along the optical axis O direction (vertical direction Z). Conversely, this can be achieved by alternately applying a negative voltage having a long pulse width and a positive voltage having a short pulse width to the laminated piezoelectric element 13.
- the duty ratio of the rectangular wave voltage (the ratio of the negative voltage pulse width to the positive voltage pulse width or the ratio of the positive voltage pulse width to the negative voltage pulse width) is 30/70.
- the case is described as an example. However, if the duty ratio is in the range of 25/75 to 35/65, the lens movable portion (moving member) can be moved smoothly.
- a rectangular wave voltage is applied to the electromechanical conversion element 13 to reciprocate the electromechanical conversion element 13 into a sawtooth wave.
- the electromechanical conversion element 13 is converted into a sawtooth wave.
- the method of reciprocating is not limited to this.
- the moving member (121, 122) is linearly moved in a predetermined direction by repeating the non-slip state and the slip state with respect to the vibration friction portion 14. It is moved.
- slipping occurs between the vibration friction portion 14 and the moving member (121, 122) when the electromechanical conversion element 13 is expanded or contracted, and vibration occurs when the electromechanical conversion element 13 is expanded or contracted.
- the driving device 10 is driven so as not to cause a slip between the friction portion 14 and the moving members (121, 122).
- Such a driving method is called a non-slip / slip driving method in this technical field.
- the moving member (121, 122) may be linearly moved in a predetermined direction by repeating the slip state of the moving member (121, 122) with respect to the vibration friction portion 14.
- the drive device 10 is driven so as to cause slippage between the vibration friction portion 14 and the moving members (121, 122) both when the electromechanical conversion element 13 is expanded and contracted. Also good.
- Such a driving method is called a slip / slip driving method in this technical field.
- the laminated piezoelectric element 13 has a rectangular parallelepiped shape, and the element size is 0.9 [mm] ⁇ 0.9 [mm] ⁇ 1.5 [mm].
- a low Qm material such as PZT is used as the piezoelectric material.
- the laminated piezoelectric element 13 is manufactured by laminating 50 layers of piezoelectric materials having a thickness of 20 [ ⁇ m] and internal electrodes having a thickness of 2 [ ⁇ m] alternately in a comb shape.
- the effective internal electrode size of the laminated piezoelectric element 13 is 0.6 [mm] ⁇ 0.6 [mm]. In other words, a ring-shaped dead zone portion (clearance) having a width of 0.15 [mm] exists in the peripheral portion located outside the effective internal electrode of the laminated piezoelectric element 13.
- the drive apparatus 10 In the drive apparatus 10 according to the first embodiment described above, it is shifted to the central axis 14 O of the vibration friction portion 14 on the inner side with respect to the central axis 13 O of the electromechanical conversion element 13.
- a central axis 14 O of the vibration friction portion 14 on the outer side with respect to the central axis 13 O of the electromechanical conversion element 13 It may be shifted.
- FIG. 8 is a partially enlarged cross-sectional front view showing an enlarged main part of the driving device 10B.
- the illustrated driving apparatus 10B has the same configuration as that of the driving apparatus 10 illustrated in FIGS. 1 to 4 except that the first and second moving bodies 121 and 122 are omitted.
- the first protrusion 172 also serves as the first moving body
- the second end 15b of the spring 15 also serves as the second moving body.
- the first moving body 121 and the first projecting portion 172 in the driving device 10 illustrated in FIGS. 1 to 4 are combined into one first projecting portion 172 in the driving device 10B illustrated in FIG.
- the second moving body 122 and the spring 15 in the driving apparatus 10 illustrated in FIGS. 1 to 4 form one spring 15 in the driving apparatus 10B illustrated in FIG.
- the number of parts can be reduced as compared with the drive device 10 illustrated in FIGS.
- both the first moving body 121 and the second moving body 122 are omitted, but whichever of the first moving body 121 and the second moving body 122 is used? Only one of them may be omitted.
- FIG. 9 is a front sectional view showing the vibration transmitting member 19 ⁇ / b> A used in the driving device 10 ⁇ / b> C together with the vibration friction portion 14 and the laminated piezoelectric element (electromechanical conversion element) 13.
- the illustrated drive device 10C has the same configuration as the drive device 10 shown in FIGS. 1 to 4 except that the vibration transmission member 19 is transformed into a vibration transmission member 19A as will be described later.
- the vibration transmission member 19A is wider in the horizontal and vertical widths (dimensions) than the vibration transmission member 19 shown in FIGS.
- the vibration transmitting member 19 ⁇ / b> A has a first concave portion (dent) 191 formed on the surface facing the upper end surface 13 b of the laminated piezoelectric element (electromechanical conversion element) 13, and the vibration friction portion A second recess (dent) 192 is formed on the surface of the 14 facing the lower end surface 14a. Therefore, the laminated piezoelectric element (electromechanical conversion element) 13 is loosely fitted in the first concave portion 191, and the lower end surface 14 a of the vibration friction portion 14 is loosely fitted in the second concave portion 192.
- the first recess (indent) 191 clearly defines the application region of the adhesive (adhesive resin) 20 between the upper end surface 13b of the laminated piezoelectric element (electromechanical transducer) 13 and the lower end surface 19a of the vibration transmitting member 19A. Is to do.
- the 2nd recessed part (dent) 192 is for clarifying the application
- the laminated piezoelectric element (electromechanical conversion element) 13, the vibration transmission member 19 ⁇ / b> A, and the vibration friction portion 14 can be attached without any adhesive resin layer therebetween.
- the first and second moving bodies (moving members) 121 efficiently generate vibrations generated by the expansion and contraction of the laminated piezoelectric element (electromechanical conversion element) 13 via the vibration transmitting member 19A and the vibration friction portion 14. , 122 can be transmitted.
- the recesses (dents) 191 and 192 are formed on both the lower end surface 19a and the upper end surface 19b of the vibration transmission member 19A.
- the lower end surface 19a of the vibration transmission member 19A You may form a recessed part (dent) only in either one of the upper end surfaces 19b.
- the driving device is for moving the cylindrical driven member along its central axis, and the moving member is attached to the driven member, and the driven member. It may be arranged in the vicinity of the outer periphery.
- the vibration transmission member may extend inward of the electromechanical conversion element and closer to the central axis of the driven member. In this case, the center axis of the vibration friction portion is shifted inward from the center axis of the electromechanical transducer.
- the vibration transmitting member may extend outward from the central axis of the driven member with respect to the electromechanical conversion element. In this case, the center axis of the vibration friction portion is shifted outward from the center axis of the electromechanical transducer.
- the vibration friction portion may have a cylindrical shape
- the moving member may include a first moving body and a second moving body that sandwich the vibration friction portion from both sides.
- the first moving body may have a V-shaped structure
- the second moving body may have a planar structure.
- the angle of the V-shaped structure of the first moving body is preferably in the range of 30 degrees to less than 180 degrees.
- the driving device further includes a frictional force adding unit that generates a frictional force between the vibration friction unit and the first moving body and between the vibration friction unit and the second moving body.
- the frictional force adding means may be composed of a biasing member having a first end attached to the driven member and a second moving body attached to the second end.
- the urging member generates a pressing force for pressing the vibration friction portion while sandwiching the vibration friction portion between the first moving body and the second moving body.
- the driven member includes a cylindrical portion, a first protruding portion that protrudes outward from the cylindrical portion to hold the first moving body, and the first protruding portion at a different position.
- You may provide the 2nd protrusion part which protrudes outside from a cylindrical part.
- the urging member may be configured by a spring in which the first end is fixed to the second protrusion and the second moving body is attached to the second end.
- the driven member includes a cylindrical portion, a first protruding portion that protrudes outward from the cylindrical portion and serves as the first moving body, and a cylindrical portion at a position different from the first protruding portion. And a second protruding portion protruding outward from the shape portion.
- the urging member may be composed of a spring in which the first end is fixed to the second protrusion and the second end also serves as the second moving body.
- the vibration transmitting member has a first recess in which the second end face of the electromechanical transducer is loosely fitted, and a second recess in which the end face of the vibration friction portion is loosely fitted. It is preferable.
- the first moving body has a V-shaped structure and the second moving body has a planar structure, but the shapes of the first and second moving bodies are these.
- the vibration friction portion has a columnar shape (bar shape), but may have a complicated shape (an irregular shape).
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Lens Barrels (AREA)
Abstract
Description
Claims (12)
- 伸縮方向で互いに対向する第1及び第2の端面(13a、13b)を持つ電気機械変換素子(13)と、
該電気機械変換素子の前記第2の端面(13b)に取り付けられた振動摩擦部(14)と、
該振動摩擦部と摩擦結合される移動部材(121,122;172,15b)であって、前記電気機械変換素子(13)の伸縮方向に移動可能な前記移動部材(121,122;172,15b)と、
前記電気機械変換素子(13)の前記第2の端面(13b)と前記振動摩擦部(14)の端面(14a)との間に配置された振動伝達部材(19;19A)と、
を備えた駆動装置(10;10A;10B;10C)であって、
前記電気機械変換素子(13)の中心軸線(13O)と前記振動摩擦部(14)の中心軸線(14O)とが同一直線上にないことを特徴とする駆動装置。 - 前記駆動装置は、筒状の被駆動部材(17)をその中心軸(O)に沿って移動させるためのものであり、
前記移動部材(121,122;172,15b)は、前記被駆動部材(17)に取り付けられ、かつ前記被駆動部材(17)の外周に近接して配置されている、請求項1に記載の駆動装置。 - 前記振動伝達部材(19)は、前記電気機械変換素子(13)に対して、前記被駆動部材(17)の中心軸(O)に近づく内側に延在しており、
前記振動摩擦部(14)の中心軸線(14O)が前記電気機械変換素子(13)の中心軸線(13O)よりも内側にずれている、請求項2に記載の駆動装置。 - 前記振動伝達部材(19)は、前記電気機械変換素子(13)に対して、前記被駆動部材(17)の中心軸(O)から離れる外側に延在しており、
前記振動摩擦部(14)の中心軸線(14O)が前記電気機械変換素子(13)の中心軸線(13O)よりも外側にずれている、請求項2に記載の駆動装置。 - 前記振動摩擦部(14)は円柱状をしており、
前記移動部材は、前記振動摩擦部(14)を両側から挟持する第1の移動体(121;172)及び第2の移動体(122;15b)から構成されている、請求項2乃至4のいずれか1つに記載の駆動装置。 - 前記第1の移動体(121;172)がV字型構造をしており、
前記第2の移動体(122;15b)が平面構造をしている、
請求項5に記載の駆動装置 - 前記第1の移動体(121;172)のV字型構造の角度は、30度から180度未満の範囲にある、請求項6に記載の駆動装置。
- 前記振動摩擦部(14)と前記第1の移動体(121;172)との間と、前記振動摩擦部(14)と前記第2の移動体(122;15b)との間と、に摩擦力を発生させる摩擦力付加手段(15)を更に備える請求項5乃至7のいずれか1つに記載の駆動装置。
- 前記摩擦力付加手段は、前記被駆動部材(17)に第1の端部(15a)が取り付けられ、第2の端部(15b)に前記第2の移動体が取り付けられた付勢部材(15)から構成され、該付勢部材(15)は、前記振動摩擦部(14)をその両側から前記第1の移動体(121;172)及び前記第2の移動体(122;15b)により挟みながら押えるための押付力を発生する、請求項8に記載の駆動装置。
- 前記被駆動部材(17)は、筒状部(170)と、該筒状部から外側に突出して前記第1の移動体(122)を保持する第1の突出部(172)と、該第1の突出部とは異なる位置で前記筒状部から外側に突出する第2の突出部(174)とを備え、
前記付勢部材は、前記第1の端部(15a)が前記第2の突出部(174)に固着され、前記第2の端部(15b)に前記第2の移動体(122)が取り付けられたバネ(15)から構成される請求項9に記載の駆動装置。 - 前記被駆動部材(17)は、筒状部(170)と、該筒状部から外側に突出して前記第1の移動体を兼ねる第1の突出部(172)と、該第1の突出部とは異なる位置で前記筒状部から外側に突出する第2の突出部(174)とを備え、
前記付勢部材は、前記第1の端部(15a)が前記第2の突出部に固着され、前記第2の端部(15b)が前記第2の移動体を兼ねるバネ(15)から構成される請求項9に記載の駆動装置。 - 前記振動伝達部材(19A)は、
前記電気機械変換素子(13)の前記第2の端面(13b)が遊嵌される第1の窪み(191)と、
前記振動摩擦部(14)の端面(14a)が遊嵌される第2の窪み(192)と、
を持つ、請求項1乃至11のいずれか1つに記載の駆動装置。
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CN200980133782.3A CN102138279B (zh) | 2008-09-01 | 2009-08-25 | 驱动装置 |
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US8824071B2 (en) * | 2010-09-15 | 2014-09-02 | Nikon Corporation | Lens barrel and camera |
KR101782999B1 (ko) * | 2011-06-21 | 2017-09-29 | 삼성전자주식회사 | 손떨림 보정 장치 |
JP2015080286A (ja) * | 2013-10-15 | 2015-04-23 | ソニー株式会社 | 駆動装置および撮像装置 |
DE102014014997B4 (de) * | 2014-10-09 | 2018-05-17 | Attocube Systems Ag | Haft-Gleit-Antrieb, insbesondere piezo-aktuierter Trägheitsantrieb |
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JPH02261073A (ja) * | 1989-03-29 | 1990-10-23 | Sony Corp | 超音波モータ |
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JP2010063206A (ja) | 2010-03-18 |
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