WO2008105444A1 - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
WO2008105444A1
WO2008105444A1 PCT/JP2008/053375 JP2008053375W WO2008105444A1 WO 2008105444 A1 WO2008105444 A1 WO 2008105444A1 JP 2008053375 W JP2008053375 W JP 2008053375W WO 2008105444 A1 WO2008105444 A1 WO 2008105444A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
hand
transfer apparatus
core chamber
substrate transfer
Prior art date
Application number
PCT/JP2008/053375
Other languages
English (en)
French (fr)
Inventor
Takafumi Kawaguchi
Kenji Ago
Toshio Koike
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to KR1020097019861A priority Critical patent/KR101221109B1/ko
Priority to US12/528,703 priority patent/US8571704B2/en
Priority to CN2008800062852A priority patent/CN101681863B/zh
Publication of WO2008105444A1 publication Critical patent/WO2008105444A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40562—Position and orientation of end effector, teach probe, track them

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

　基板の位置を検出するセンサの数量を低減して簡素化と低コスト化を実現する基板搬送装置。コアチャンバと周辺チャンバとの間で基板（Ｓ）を搬送する基板搬送装置において、コアチャンバには搬送ロボットが配置されている。搬送ロボットは、基板を載置するハンド（１７）を有し、ハンドを進退可能及び旋回可能である。センサが、基板の端面を検出するために設けられる。センサは、コアチャンバと周辺チャンバとの間でのハンドの進退時において基板の端面が通過し、かつコアチャンバ内でのハンドの旋回時において基板の端面が通過する位置に配置されている。
PCT/JP2008/053375 2007-02-28 2008-02-27 基板搬送装置 WO2008105444A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020097019861A KR101221109B1 (ko) 2007-02-28 2008-02-27 기판 이송 장치
US12/528,703 US8571704B2 (en) 2007-02-28 2008-02-27 Substrate transfer apparatus
CN2008800062852A CN101681863B (zh) 2007-02-28 2008-02-27 基板传送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007050039A JP5064835B2 (ja) 2007-02-28 2007-02-28 基板搬送装置
JP2007-050039 2007-02-28

Publications (1)

Publication Number Publication Date
WO2008105444A1 true WO2008105444A1 (ja) 2008-09-04

Family

ID=39721269

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053375 WO2008105444A1 (ja) 2007-02-28 2008-02-27 基板搬送装置

Country Status (6)

Country Link
US (1) US8571704B2 (ja)
JP (1) JP5064835B2 (ja)
KR (1) KR101221109B1 (ja)
CN (1) CN101681863B (ja)
TW (1) TWI352398B (ja)
WO (1) WO2008105444A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010162611A (ja) * 2009-01-13 2010-07-29 Ulvac Japan Ltd 相対ティーチング方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5185054B2 (ja) * 2008-10-10 2013-04-17 東京エレクトロン株式会社 基板搬送方法、制御プログラム及び記憶媒体
US8666551B2 (en) * 2008-12-22 2014-03-04 Asm Japan K.K. Semiconductor-processing apparatus equipped with robot diagnostic module
JP5728204B2 (ja) * 2010-11-17 2015-06-03 株式会社アルバック 基板位置検出方法
JP5851126B2 (ja) * 2011-06-24 2016-02-03 株式会社アルバック 基板位置検出方法
JP6063776B2 (ja) * 2013-03-04 2017-01-18 東京エレクトロン株式会社 基板搬送経路の決定方法、基板搬送装置、基板処理装置及びプログラム
JP5905521B2 (ja) * 2014-06-26 2016-04-20 ファナック株式会社 工具先端点制御中に生じるバックラッシを抑制することを特徴とする数値制御装置
CN114367970B (zh) * 2015-03-12 2024-04-05 柿子技术公司 具有从动末端执行器运动的机器人
US10818561B2 (en) * 2016-01-28 2020-10-27 Applied Materials, Inc. Process monitor device having a plurality of sensors arranged in concentric circles
JP6298109B2 (ja) * 2016-07-08 2018-03-20 キヤノントッキ株式会社 基板処理装置及びアライメント方法
JP7049909B2 (ja) * 2018-05-11 2022-04-07 川崎重工業株式会社 基板搬送ロボット及び基板保持ハンドの光軸ずれ検出方法
CN112384334B (zh) * 2018-07-03 2024-05-28 柿子技术公司 用于检测和校正机器人有效载荷位置的***和方法
CN110757447A (zh) * 2018-07-25 2020-02-07 西门子（中国）有限公司 一种机器人示教编程方法、装置、***和计算机可读介质
JP7340964B2 (ja) * 2018-08-10 2023-09-08 川崎重工業株式会社 仲介装置および仲介方法
JP7158238B2 (ja) * 2018-10-10 2022-10-21 東京エレクトロン株式会社 基板処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003165078A (ja) * 2001-11-27 2003-06-10 Kawasaki Heavy Ind Ltd 自動教示システム
JP2006351883A (ja) * 2005-06-16 2006-12-28 Tokyo Electron Ltd 基板搬送機構及び処理システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4819167A (en) 1987-04-20 1989-04-04 Applied Materials, Inc. System and method for detecting the center of an integrated circuit wafer
JPH0736417B2 (ja) * 1989-10-24 1995-04-19 株式会社メツクス ウエハーの位置決め装置
EP0597637B1 (en) 1992-11-12 2000-08-23 Applied Materials, Inc. System and method for automated positioning of a substrate in a processing chamber
US6707544B1 (en) * 1999-09-07 2004-03-16 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput
US7233841B2 (en) * 2002-04-19 2007-06-19 Applied Materials, Inc. Vision system
CN100524684C (zh) * 2005-02-22 2009-08-05 Oc欧瑞康巴尔斯公司 晶片的定位方法
US7532940B2 (en) 2005-06-16 2009-05-12 Tokyo Electron Limited Transfer mechanism and semiconductor processing system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003165078A (ja) * 2001-11-27 2003-06-10 Kawasaki Heavy Ind Ltd 自動教示システム
JP2006351883A (ja) * 2005-06-16 2006-12-28 Tokyo Electron Ltd 基板搬送機構及び処理システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010162611A (ja) * 2009-01-13 2010-07-29 Ulvac Japan Ltd 相対ティーチング方法

Also Published As

Publication number Publication date
JP2008218498A (ja) 2008-09-18
US20100121487A1 (en) 2010-05-13
US8571704B2 (en) 2013-10-29
KR20090123909A (ko) 2009-12-02
CN101681863A (zh) 2010-03-24
KR101221109B1 (ko) 2013-01-11
JP5064835B2 (ja) 2012-10-31
TWI352398B (en) 2011-11-11
CN101681863B (zh) 2011-05-04
TW200845285A (en) 2008-11-16

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