WO2008062778A1 - Dispositif de détection d'angle de rotation, dispositif de rotation et procédé de détection d'angle de rotation - Google Patents
Dispositif de détection d'angle de rotation, dispositif de rotation et procédé de détection d'angle de rotation Download PDFInfo
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- WO2008062778A1 WO2008062778A1 PCT/JP2007/072439 JP2007072439W WO2008062778A1 WO 2008062778 A1 WO2008062778 A1 WO 2008062778A1 JP 2007072439 W JP2007072439 W JP 2007072439W WO 2008062778 A1 WO2008062778 A1 WO 2008062778A1
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- magnet rotor
- rotation angle
- bridge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
Definitions
- Rotation angle detection device rotating machine, and rotation angle detection method
- the present invention relates to a rotation angle detection device that detects a rotation angle of a rotation shaft or the like, a rotating machine, and a rotation angle detection method.
- Japanese Patent Application Laid-Open No. 2003-075108 is a disk-shaped magnet that rotates in the circumferential direction of the disk, and detects the strength of a magnetic field, and calculates a value according to the rotation angle of the magnet.
- a plurality of magnetic sensors for outputting are disclosed, and the plurality of magnetic sensors disclose a rotation angle sensor disposed near the circumference of the magnet on a plane substantially perpendicular to the rotation center line of the magnet.
- FIG. 4 discloses a rotation angle sensor provided with a two-pole disk-shaped magnet supported by a rotation shaft and magnetic sensors A and B in the vicinity of the circumference of the magnet.
- Magnetic sensors A and B are Hall elements, which detect the strength of the magnetic field and calculate the rotation angle.
- the angle between the straight line passing through the center 0 of the disk-shaped magnet and the center of the magnetic sensor A and the straight line passing through the center 0 and the center of the magnetic sensor B is about 90 degrees in mechanical angle (ie 90 °).
- magnetic sensors A and B are provided.
- the mechanical angle is an angle of 360 degrees around the disk.
- These magnetic sensors A and B are provided at positions offset in the rotational axis direction with respect to the magnet.
- FIG. 6 of JP-A-2003-075108 discloses a rotation angle sensor having magnetic sensors A and B whose surface is inclined with respect to the rotation axis.
- the output sharply decreases. There is a problem that it is difficult to detect. Furthermore, when the temperature of the environment changes, the output fluctuates greatly in response to the characteristic change of the magnet (change in the amount of magnetic flux), so it was impossible to detect a stable rotation angle.
- Magnetic sensors A and B are not magnetic sensors that detect changes in the direction of magnetic flux. That is, when the Hall element is inclined with respect to the direction of the magnetic flux, only the magnetic flux component perpendicular to the plane of the Hall element can be detected, and the output becomes small. Because of this, each magnetic In order to increase the magnetic flux density received by the sensor to obtain the maximum output, the magnetic sensors A and B (hole elements) are offset from the rotating magnet in the rotational axis direction or inclined to the rotating axis. There is. In order to detect a change in the direction of the magnetic flux, it is necessary to correct the amplitude of the variations of the plurality of outputs by an external circuit, which complicates the configuration.
- Japanese Patent Laid-Open No. 2003-075108 describes a method of averaging the output values of a plurality of magnetic sensors provided at one place. This method is a signal processing method of adjusting the amplitude of the output by the circuit, and a method of suppressing the distortion of the output itself is disclosed.
- MR elements can be used as magnetic sensors.
- An MR sensor using an MR element is a magnetic sensor that obtains a waveform output of two cycles for one cycle of an electrical angle. Therefore, the corresponding angular force is obtained when the output Vo has a predetermined value. There is a problem that 3 ⁇ 4 exist and it is impossible to determine the absolute angle
- Japanese Patent Laid-Open No. 2000-078809 discloses, as shown in FIG. 21, a servomotor provided with a rotor 515 having permanent magnets 517 and an encoder 502 for detecting the rotational position of the aforementioned rotor.
- the permanent magnet has two-pole anisotropy
- the encoder 502 has a magnetic sensor 522 for detecting the magnetic field (leakage flux of the permanent magnet) of the rotor 515.
- the magnetic sensor of the servomotor described in Japanese Patent Laid-Open No. 2000-078809 is not a spin valve.
- Japanese Patent Application Laid-Open No. 2001-343206 discloses a rotation angle detection device in which each of an end surface and a peripheral surface of a detection magnet is magnetized in multiple poles as shown in FIGS. 22 (a) to 22 (c). ing. Specifically, as shown in FIG. 22 (a), a disc-shaped detection magnet 603 (disc) concentrically provided on the rotary shaft 606 is provided. On one surface of the detection magnet 603, as shown in FIG. 22 (b), for example, three pairs (six poles) of magnetic poles 603a are magnetized side by side at equal intervals concentrically. Further, as shown in FIG.
- the detection magnet 6 A detection substrate 602 is provided in parallel with an interval of an appropriate length at 03 and rotatably with respect to the rotation shaft 606.
- the detection substrate 602 is provided with two detection poles for detecting the magnetic pole 603b so that the phase differs by 1 ⁇ 4 ((360 deg./48)/4 at mechanical angle) with respect to the electrical angle formed by the 48 pairs of magnetic poles 603b.
- Magnetic detection elements 602 d and 602 e are provided along the circumferential surface of the detection magnet 603.
- Detection elements 602 a to 602 c are provided along one surface of the detection magnet 603. Hall elements or MR elements are used as the magnetic detection elements 602a to 602e.
- Japanese Patent Laid-Open No. 2 Japanese Patent Laid-Open No. 2
- the magnetic detection element of the rotation angle detection device described in 001-343206 is not a spin valve.
- Japanese Utility Model Application Publication No. 62-076607 (FIG. 1), the rotation angle of a rotating magnet is obtained using a ferromagnetic magnetic sensor to which a sine wave signal SW is applied and a ferromagnetic magnetic sensor to which a cosine wave signal CW is applied.
- a rotation angle detection device for detecting Discloses a rotation angle detection device for detecting.
- the rotation angle detection device described in Japanese Utility Model Application Publication No. 62-076607 requires a signal generation unit for applying SW and CW to a ferromagnetic magnetic sensor, and there is a problem that the device becomes complicated and large. Also, it can be seen from the disclosed graph (FIG. 6) that a magnetic sensor is used to obtain a waveform output of two cycles for one cycle of the electrical angle.
- This ferromagnetic magnetic sensor is an MR sensor that uses the magnetoresistive effect of ferromagnetic metals. As can be seen from the thin film pattern (FIG. 7), the MR sensor is given longitudinal shape anisotropy and used. When magnetization is rotated, smooth rotation can not be obtained because the magnetization is nonuniformly suppressed according to the angle formed by the direction of magnetization and the direction of anisotropy. Therefore, waveform distortion occurs in the output, and it is difficult to detect the rotation angle with high accuracy.
- Japanese Patent Application Laid-Open No. 2002-303536 discloses a rotation angle detection sensor in which a sensor substrate is opposed to an end face of a two-pole disc-like magnet provided at an end of a rotation shaft. doing. JP 20
- Figure 3 of 02- 303 536 discloses an arrangement in which the center of a sensor substrate having four GMR elements is on the center line (rotation axis) of the rotation axis !.
- This GMR element is provided with a pinned magnetic layer and is specified as a spin valve type giant magnetoresistive element.
- JP 2002-303536 In the rotation angle detection sensor, one sensor substrate is provided on the extension of the center of the rotation axis so that the centers coincide with each other, and the magnet is supported in a cantilever manner on the rotation axis. Therefore, it can not be applied to a structure (double-ended type) in which the magnet passes through the shaft. In addition, it is difficult to detect the rotation angle with high accuracy, because the rotation of the magnet is easily deviated. If you try to increase the accuracy of the center of rotation (suppressing the rotation of the magnet), the device will become larger.
- Japanese Patent Application Laid-Open No. 2006-010346 (FIG. 4) is a magnetic detection method in which a change in magnetic flux caused by the rotation of a magnet provided on a rotating member is detected by a magnetoresistive element to measure the amount of movement of external armature Disclose the position sensor of As described in FIG. 3 of JP-A-2006-010346, the angular error of the output increases when the magnetoresistive element deviates to the center axial force of the magnet or the direction of the arrow L due to the assembling process or the processing dimensional error. Resulting in. Therefore, it is difficult to detect the rotation angle with high accuracy.
- Japanese Patent Laid-Open Publication No. 2006-208025 (FIGS. 1 and 5) is a magnetoresistance effect element which outputs a cosine wave and a sine wave having a phase difference of 1 ⁇ 4 cycle, which is one cycle per rotation of a signal magnet.
- a magnetic sensor comprising a bias magnet.
- the magnetic sensor described in JP-A-2006-208025 attempts to detect an absolute angle by adding a bias magnet to the MR element.
- the ratio of the magnetic field of the bias magnet to the magnetic field of the magnet rotor fluctuates the amplitude of the output of the magnetic sensor. That is, when the magnetic field strength of the magnet rotor is large, the output of the magnetic sensor is reversed, and the distortion of the output also becomes large.
- the ratio B / B force of the magnetic field (B) of B exceeds .7, making it difficult to obtain a sinusoidal output.
- the magnetoresistive element is not limited to the magnetoresistive element (MR element) using the AMR effect, but it may be a magnetoresistive element that uses the GMR effect. It is described in [0029]. However, the invention described in JP-A-2006-208025 is to obtain an output of one cycle per rotation of the signal magnet by adding a bias magnet.
- the magnetoresistive effect element used is a device that includes a spin valve type giant magnetoresistive effect element, and is an element in which a stacked type giant magnetoresistive effect element and a sin- gle stack structure are repeated in multiple stages. Functionally the same as the MR element except that the rate of change in magnetoresistance is greater than that of the MR element. Point).
- the stacked giant magnetoresistive element has the same problems as the MR element described in the previous paragraph by using a bias magnet.
- JP-A-61-142782 (FIG. 1) is formed by arranging a magnetic recording medium and a pattern forming surface of a ferromagnetic magnetoresistive element disposed opposite to the magnetic recording medium so as to form a predetermined angle with each other.
- a position detecting device is disclosed in which the angle between the surface and the longitudinal direction of the pattern is set to 1 to 45 °.
- Japanese Patent Application Laid-Open No. 61-142782 can provide a position detection device in which the instability of the detection output is suppressed and the position shift of the output peak value is eliminated by applying a bias magnetic field in the direction of the magnetization easy axis of the MR element. Described. While, as can be seen from FIG. 2 described in JP-A-61-142782, a signal of resistance change rate is obtained in a certain angle range near the center between the NS poles! //! Because it can not be used as an absolute angle sensor.
- JP 2007-40850 A (FIG. 5) shows components Bx and By in two axial directions parallel to the magnet surface of the magnetic flux density and orthogonal to each other at one space point above the ring magnet surface.
- a rotation angle sensor in which a magnetosensitive portion having two magnetoelectric conversion elements to be magnetosensitive is disposed.
- One space point where the magnetically sensitive portions are arranged is a position where the absolute values of the amplitudes of the changes of the components Bx and By due to the rotation of the magnet become equal.
- the magnetically sensitive portion senses the biaxial components of Bx and By parallel to the surface of the magnet by the Z-axis direction component Bz of the force magnetic flux density described.
- the sensors 12X and 12Y are respectively specified to the Hall elements. In order to make two sensors intersect three-dimensionally as shown in FIG. 5 of JP 2007-40850 A, it is necessary to form notches for fitting each other. However, when the magnetosensitive surface of the Hall element is located at one space point in one sensor, the notch is located at the one space point in the other sensor, so that a deviation occurs strictly. That is, the rotation angle sensor described in Japanese Patent Application Laid-Open No.
- 2007-40850 does not simultaneously detect Bx, By, and Bz by one magnetosensitive surface on one substrate.
- the sensor when the sensor is disposed inside the outer diameter of the magnet, there is a problem that the sensor strikes the magnet when the axis of rotation is deviated.
- the Hall element Because it is a child, the output drops sharply.
- a resolver is attached to a drive motor mounted on an IBRID car to detect the rotation angle of the rotating shaft, and control is performed by switching between the current for driving the motor and the current regenerated from the motor. Is going.
- the resolver has a shape similar to a motor, and has a yoke wound with a coil on each of the rotating shaft side and the fixed (housing) side.
- the positional information of the yokes on the rotating shaft side can be obtained by utilizing the fact that the yokes face each other and function in the same manner as the transformer, and the positional information is converted into a rotational angle. Since the force also includes the yoke and coil, there is a problem that the winding is complicated, large, heavy and expensive. Therefore, there is an increasing need for a sensor which is compact and lightweight and which detects an angle of rotation with high accuracy by suppressing an increase in error, but the configuration of the prior art does not achieve sufficient accuracy.
- an object of the present invention is to provide a rotation angle detection device and a rotary machine with high detection accuracy of the rotation angle.
- the present inventors have detected the direction of the magnetic field when the magnet rotor rotates by detecting the direction of the magnetic field with a sensor device using a spin valve type giant magnetoresistance effect element.
- the inventors have found that the rotation angle of the magnet rotor can be measured with high accuracy, and conceived the present invention.
- a magnet rotor having magnetic poles of four or more poles on its surface, a sensor device for detecting a magnetic flux from the magnet rotor, and a plurality of sensor devices obtained from the sensor device.
- a rotation angle detection device comprising: an electronic circuit unit that outputs a rotation angle signal according to a rotation angle of the magnet rotor using a signal, wherein the sensor device is a rotating magnetic field generated in the vicinity of the rotating magnet.
- a plurality of spin-valve giant magnetoresistance effect elements which output two or more phase signals different from each other (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction is in the direction of the magnetic field Rotate accordingly (A magnetoresistive element), and the plurality of spin valve type giant magnetoresistive elements comprises: a first spin valve type giant magnetoresistive element having a reference magnetic sensitive direction; and the first spin valve And a second spin valve type giant magnetoresistive effect element having a magnetosensitive direction different from that of the giant magnetic magnetoresistive effect element.
- outputting the rotation angle signal according to the rotation angle means performing processing including arctangent calculation. Specifically, it is processing of digitally performing arctangent operation.
- the spin valve giant magnetoresistive element When the magnet rotor rotates, the spin valve giant magnetoresistive element itself does not mechanically rotate, but the magnetization direction of the free layer of the spin valve giant magnetoresistive element magnetically rotates. .
- the period of rotation of the magnetization direction in the free layer is 1 / ⁇ (N is an integer of 2 or more) times the period of the magnet rotor, and the resolution becomes high.
- the above-mentioned rotation angle detection device is preferably provided on a rotating machine.
- a second rotation angle detection device comprises a magnet rotor having magnetic poles of four or more poles on its surface, a first sensor device and a second sensor device for detecting the direction of magnetic flux from the magnet rotor.
- the first sensor device incorporates a sensor bridge X01 and a sensor bridge Y01 in which the magnetization directions of the fixed layers are orthogonal to each other, and the second sensor devices are mutually fixed layers.
- a sensor bridge X02 and a sensor bridge Y02 whose magnetization directions are orthogonal are built in, and each of the sensor bridge X01, ⁇ 1, ⁇ 02 and ⁇ 02 is a spin valve type giant magnetoresistive effect element (having a fixed layer and a free layer, The fixed layer magnetization direction is fixed, and the free layer magnetization direction is a full bridge of a magnetic resistance element rotating in accordance with the direction of the magnetic field, and the spins of adjacent sides in the full bridge are The fixed layer magnetization directions of the valve-type giant magnetoresistance effect element are antiparallel, and by applying a voltage to each of the full bridges, the angle between the fixed layer magnetization direction and the free layer magnetization direction is made. A differential output is obtained, and an angle signal is obtained based on the differential output.
- the four spin-valve giant magnetoresistive elements correspond to four elements (elements) constituting an electrical full bridge circuit.
- the differential output is fully It is the difference between the two outputs obtained at the midpoint of the edge.
- a first rotation angle signal (cosine signal) is obtained based on angle information independently detected by the sensor bridge X01 and the sensor bridge Y02, and the sensor bridge Y01 and the sensor bridge X02 are independent. It is preferable to obtain a second rotation angle signal (sine signal) delayed by 90 degrees in electrical angle from the first rotation angle signal, based on the angle information detected in the above.
- a sine signal is a waveform in which one wavelength corresponds to an electrical angle of 360 degrees. In other words, it is a waveform that can be divided into a fundamental wave of an ideal sine wave (sin) and harmonics that cause rotation angle errors, when Fourier series expansion is performed.
- the cosine signal is a waveform that can be divided into the fundamental wave and the harmonics of the ideal cosine wave (cos) when Fourier series expansion is performed.
- the magnet rotor is a multi-pole magnetized magnet rotor having two or more pole pairs.
- One pole pair corresponds to one N pole and one S pole adjacent to it.
- it is a magnet rotor of 6 pole pair.
- the sensor bridge has orthogonal magnetization directions in the fixed layer of the element.
- the magnet rotor and the sensor are arranged so as to satisfy the relationship that the free layer of the spin valve type giant magnetoresistance effect element, which is an element, rotates when the magnet rotor rotates. Indicates that the device distance is set.
- the rotation angle can be accurately determined even if the positions of the sensor devices are not 90 degrees in phase difference. It can be measured to
- the rotation angle detection device has a first sensor device that outputs two pieces of angle information, and a second sensor device that outputs two pieces of angle information, and the output from the first sensor device is A first sinusoidal output signal having a smaller harmonic content rate than the output signals 01 and 02 from the one output signal 01 and the one output signal 02 output from the second sensor device
- the output signals 03 and 04 have a first synthesizer, and the other output signal 03 output from the first sensor device and the other output signal 04 output from the second sensor device.
- V lower than the harmonic content ratio, a second sinusoidal output signal (the second sinusoidal output signal is 90 ° in phase with the first sinusoidal output signal. deg.
- the second sine wave output signal and the second sine wave output signal are input to an inverse tangent calculation device to obtain a rotation angle signal of the magnet rotor as an output. preferable.
- Inversion means for performing the signal processing after inverting at least one of the signals output from the first sensor device or the second sensor device further has a detection accuracy of the rotation angle. It is preferable for enhancing.
- the inversion includes the case where one is inverted and the case where three are substantially equivalent to a state in which one is inverted by inverting three.
- the full bridge is preferred because the signal magnitude is halved! /.
- a spin valve giant magnetoresistive effect element on only one side of the bridge as an element and using a simple electrical resistance on the other side, unnecessary components due to asymmetry (a signal that is not necessary to obtain an accurate rotation angle) Component) increases. Therefore, the four elements use a full bridge which is a spin valve type giant magnetoresistive element.
- the sensor bridge Y01 and the sensor bridge Y02 have the same magnetic sensing direction with one direction of the rotation direction of the magnet rotor, and the angle information detected by the sensor bridge X01
- a first rotation angle signal (cosine signal) is obtained by performing differential amplification on the angle signal obtained by inverting the angle information detected by the sensor bridge Y02, and the sensor bridge Y01 and the sensor bridge A signal processing portion for obtaining a second rotation angle signal (sine signal) delayed by 90 ° in electrical angle from the first rotation angle signal by differentially amplifying angle information detected independently at X02 Have.
- the first rotation angle signal (cosine signal) is input to the signal processing portion having the first signal, and the differential outputs from the sensor bridges Y01 and X02 are input to the respective differential amplifiers, and then the difference is obtained.
- the sensor bridge has a circuit configuration in which the signal of the dynamic amplifier output is input to a signal processing unit for obtaining a second rotation angle signal (sign signal) to obtain a second rotation angle signal (signal sine signal). Input differential output from Y02 to differential amplifier In this case, the sensor bridge X01, X02 and Y02 are connected in reverse polarity.
- the input polarity of the voltage applied to the sensor bridge Y02 is inverted from the sensor bridges X01, X02 and Y02!
- the fixed layer magnetization direction is different from the rotation direction of the magnet rotor in the direction in which the output signal increases, and the sensor bridge X01 and the sensor
- the first rotation angle signal (cosine signal) is obtained by performing differential amplification on the angle information independently detected by the bridge Y02, and is independently detected by the sensor bridge Y01 and the sensor bridge X02. It is preferable to have a signal processing portion for differentially amplifying angle information to obtain a second rotation angle signal (sine signal) delayed by 90 degrees in electrical angle from the first rotation angle signal.
- a first rotation angle signal (cosine signal) is obtained by differentially amplifying the angle information detected by the sensor bridge X01 and the angle signal obtained by inverting the angle information detected by the sensor bridge Y02. And differentially amplifying angle information independently detected by the sensor bridge Y01 and the sensor bridge X02, and delaying the electrical angle by 90 ° from the first rotation angle signal, Signal processing for obtaining a rotation angle signal (sine signal), and analog-to-digital conversion of the angle information detected by the four sensor bridges independently to invert the polarity of only the digital signal obtained from the Y02 signal. It is preferable to treat.
- the differential outputs from the sensor bridges X01 and Y02 are input to respective differential amplifiers, and the summing circuit is provided to obtain the first rotation angle signal (cosine signal) from the differential amplifier outputs.
- the first rotation angle signal (cosine signal) is input to the signal processing section to obtain the first rotation angle signal, and the differential outputs from the sensor bridges Y01 and X02 are input to the respective differential amplifiers, and then the differential amplifier outputs are obtained. It is preferable to take a circuit configuration to obtain a second rotation angle signal (sine signal) by inputting the signal to a signal processing portion having an addition circuit for obtaining a second rotation angle signal (sine signal).
- An analog-to-digital converter that converts the first rotation angle signal (cosine signal) and the second rotation angle signal (sine signal) into digital signals, and the converted digital signals are calculated into angle signals It is preferable to have an angle signal portion.
- the first sensor device and the second sensor device may be electrically connected to each other by the magnet rotor. This is preferred V, which is placed at a position approximately 90 ⁇ 180 n deg. Away at the corner ( ⁇ is an integer). It is preferable that the first sensor device and the second sensor device be installed at a position approximately 90 degrees away from each other at the electrical angle of the magnet rotor! .
- an angle formed by the first sensor device and the second sensor device is preferably represented by ⁇ 90 + 180 N deg. In electrical angle.
- Another sensor having the same configuration as the first sensor device group including the first sensor device and the second sensor device, and the sensor device used in the first sensor device group Devices and the second sensor device group having the same relative arrangement as that of the first sensor device group, wherein the first sensor device group and the second sensor device group are mutually connected
- the electrical angle is preferably 180 n deg. (Where n is an integer), and it is preferable to install it.
- a fifth signal is obtained by averaging four signals obtained by inputting the signals from the sensor bridges ⁇ 01, ⁇ 01, ⁇ 02 and ⁇ 02 to respective differential amplifiers, to obtain a fifth signal, and the fifth It is preferable to output a failure detection signal by comparing the difference between the signal and a preset DC voltage.
- the absolute value of the difference is preferably about 1 ⁇ 8 or less of the amplitude value of the original four signals, in order to allow deviation occurring when the respective waveforms are distorted.
- the third rotation angle detection device of the present invention is a rotation angle detection device including a magnet rotor having magnetic poles of two or more poles on its surface, and a sensor device for detecting the direction of the magnetic flux from the magnet rotor.
- the sensor device whose distance between the center of the sensor device and the central axis of rotation of the magnet rotor is larger than the radius of the magnet rotor is a sensor bridge X01 and a sensor bridge Y01 in which the fixed layer magnetization directions are orthogonal to each other.
- the sensor bridge X01 and Y01 are each a force S spin valve type giant magnetoresistance effect device (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction is a magnetic field Of the sensor bridge X01 and the sensor bridge X01).
- the fixed layer magnetization directions of the spin valve type giant magnetoresistance effect elements of the electrically adjacent sides are antiparallel, and a voltage is applied to each of the sensor bridges X01 and Y01 to form the fixed layer.
- An output according to an angle formed by the magnetization direction and the magnetization direction of the free layer is obtained, and an angle signal is obtained based on the output.
- the thickness t of the magnet corresponds to the dimension of the magnet in the rotation axis direction.
- the center of the sensor device is the center of the spin valve giant magnetoresistive element or, if there are a plurality of spin bulb giant magnetoresistive elements, the center point is approximately equidistant therefrom. Since the thickness of the spin valve giant magnetoresistive element is sufficiently thinner than the magnet rotor, the center may be on the substrate forming the spin valve giant magnetoresistive element. That is, it can be said that the center of the sensor device is on the sensor surface.
- a magnet rotor having magnetic poles of two or more poles on its surface, and a first sensor device and a second sensor device for detecting the direction of magnetic flux from the magnet rotor.
- a rotation angle detection device wherein a distance between a center of the first sensor device and a rotation center axis of the magnet rotor is larger than a radius of the magnet rotor. The distance between the central axis of rotation of the magnet rotor and the center axis of rotation of the magnet rotor is larger than the radius of the magnet rotor, and the first sensor device incorporates a sensor bridge X01 and a sensor bridge Y01 whose magnetization directions are perpendicular to each other.
- the second sensor device incorporates a sensor bridge X02 and a sensor bridge Y02 whose fixed layer magnetization directions are orthogonal to each other, and each of the sensor bridges X01, Y01, ⁇ 02 and ⁇ 02 is a sensor.
- Purge circuit of a single-valve giant magnetoresistive element (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction rotates according to the direction of the magnetic field)
- the sensor bridge ⁇ 01, ⁇ ⁇ ⁇ 01, ⁇ 02 and ⁇ 02 the magnetization direction of the fixed layer of the spin valve type giant magnetoresistive element on the electrically adjacent side is antiparallel, and the sensor bridge ⁇ 01, ⁇ 01, ⁇ 02 and ⁇ ⁇ 02
- an output according to the angle between the magnetization direction of the fixed layer and the magnetization direction of the free layer is obtained, and an angle signal is obtained based on the output. It is preferable that a voltage to each of the ridges 02
- the plane including the fixed layer magnetization directions of the sensor bridges X01 and Y01 and the plane including the fixed layer magnetization directions of the sensor bridges ⁇ ⁇ 02 and ⁇ 02 are respectively referred to as sensor surfaces.
- the definition of% will be described later.
- the centers of the first sensor device and the second sensor device are separated from the plane passing through the thickness center point of the magnet rotor and perpendicular to the rotation axis in the rotation axis direction of the magnet rotor. Is preferred.
- Two or four spin-valve giant magnetoresistive elements are used, each corresponding to two or four elements (elements) constituting an electric herb bridge circuit or a full bridge circuit.
- a first rotation angle signal (corsine signal) is obtained based on angle information independently detected by the sensor bridge X01 and the sensor bridge ⁇ 02.
- a second rotation angle signal delayed 90 degrees in electrical angle from the first rotation angle signal based on angle information independently detected by the sensor bridge Y01 and the sensor bridge ⁇ 02 (sign signal It is preferred to obtain
- the magnet rotor is preferably a magnet rotor magnetized to two or more poles. Two poles correspond to one N pole and one S pole adjacent to it (also referred to as one pole pair). There are three sensor bridge forces in the sensor device, and the sensor bridge has orthogonal magnetization directions in the fixed layer of the element. In the vicinity of the magnet rotor, the distance between the magnet rotor and the sensor device is set so as to satisfy the relation that the free layer of the spin valve type giant magnetoresistive element, which is an element, rotates when the magnet rotor rotates. Indicates the set state. In particular, when two sensor devices are used, since the elements are arranged at an angle of 90 degrees in the sensor bridge in one sensor device, the positions of the sensor devices are not 90 degrees in phase difference. Also, the rotation angle can be measured accurately.
- the full bridge circuit is preferable because the signal magnitude is halved.
- a spin valve giant magnetoresistive element on one side of a bridge circuit as an element and using a simple electrical resistance on the other side, unnecessary components due to asymmetry Signal components that are not necessary to obtain a proper rotation angle. Therefore, we use a full bridge circuit in which the four elements are spin valve giant magnetoresistive elements.
- the third and fourth rotation angle detecting devices an analog that converts the first rotation angle signal (cosine signal) and the second rotation angle signal (sine signal) into digital signals It is preferable to have a digital conversion unit and an angle operation unit that calculates the converted digital signal into an angle signal.
- first sensor device and the second sensor device are disposed at positions separated by approximately 90 ⁇ 180 n deg. In electrical angle of the magnet rotor ( ⁇ is an integer). Furthermore, it is preferable that the first sensor device and the second sensor device be disposed at an electrical angle of approximately 90 degrees away from each other at an electrical angle of the magnet rotor. ! / ⁇
- an angle formed by the first sensor device and the second sensor device is preferably represented by ⁇ 90 + 180 N deg. In electrical angle.
- a fifth signal is obtained by averaging four signals obtained by inputting the signals from the sensor bridges ⁇ 01, ⁇ 01, ⁇ 02 and ⁇ 02 to respective differential amplifiers, and the fifth signal is obtained. It is preferable to output a failure detection signal by comparing the difference between the signal and a preset DC voltage.
- the absolute value of the difference is preferably about 1 ⁇ 8 or less of the amplitude value of the original four signals, in order to allow deviation occurring when the respective waveforms are distorted.
- a fifth rotation angle detection device is a rotation angle detection device including a magnet rotor having a two-pole magnet and a sensor device for detecting the direction of magnetic flux from the magnet rotor,
- the device has a plurality of spin-valve giant magnetoresistance elements (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction is rotated according to the direction of the magnetic field) And the magnetic flux is made to intersect the magnetic sensing surface so that the amplitudes of the magnetic flux density components orthogonal to each other in the magnetic sensing surface become equal in amplitude.
- the sensor device is provided for a child.
- the two-pole magnet may be in the form of a disk, a ring, a rectangle, etc., as long as one N pole and one S pole are magnetized. .
- the two-pole magnet is magnetized along the direction orthogonal to the rotation axis of the magnet rotor.
- the rotation axis corresponds to the center line of the object (rotary body or rotation axis) whose rotation angle is to be measured.
- a seventh rotation angle detection device is a rotation angle detection device including a magnet rotor having a two-pole magnet, and a sensor device for detecting the direction of magnetic flux from the magnet rotor.
- the sensor device comprises a plurality of spin-valve giant A magnetoresistive element having a free layer, a fixed layer magnetization direction being fixed, and a free layer magnetization direction formed of a magnetoresistive element rotating in accordance with the direction of a magnetic field;
- a line connecting the center of thickness of the magnet rotor and the center of the magnetic sensitive surface of the sensor device is a sensor arrangement angle at an angle formed by passing through the center of thickness of the magnet rotor and perpendicular to the rotation axis.
- ⁇ be the sensor tilt angle X when a plane passing through the thickness center point of the magnet rotor and perpendicular to the axis of rotation is the sensor tilt angle X.
- the sensor device is provided so as to be in any of the ranges, and the sensor device incorporates a sensor bridge A01 and a sensor bridge B01 in which the fixed layer magnetization directions are orthogonal to each other, and the sensor bridges A01 and B01 are respectively The bridge circuit of the spin valve type giant magnetoresistance effect element, wherein the magnetization direction of the fixed layer of the spin valve type giant magnetoresistance effect element of the electrically adjacent side of the bridge circuit is antiparallel, and the sensor bridge By applying a voltage to each of A01 and B01, an output according to the angle between the fixed layer magnetization direction and the free layer magnetization direction is obtained, and an angle signal is obtained based on the output. I assume.
- the rotation angle detection device having the two-pole magnet can measure an absolute angle with respect to one rotation of the magnet rotor. Therefore, it is suitable for measurement of mechanical rotation (measurement of mechanical angle).
- the resolution of the detection angle can be multiplied by N with respect to the two poles because the number of poles is large.
- the double-ended type magnet rotor is better than a cantilever type (a magnet rotor whose rotation axis extends on only one side). There is no shake of the rotation axis, and the rotation angle can be detected with high accuracy. Furthermore, the double-supported magnet rotor, the inner one can make the detection device smaller. (Eighth Rotation Angle Detection Device)
- An eighth rotation angle detection device of the present invention is a rotation angle detection device including a magnet rotor having four or more magnetic poles and a sensor device for detecting the direction of magnetic flux from the magnet rotor,
- the sensor device comprises a plurality of spin-valve giant magnetoresistance elements (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction is rotated according to the direction of the magnetic field And the magnetic flux is made to intersect with the magnetic sensing surface so that the amplitudes of the magnetic flux density components orthogonal to each other in the magnetic sensing surface become equal.
- the sensor device is provided for the magnet rotor.
- the magnet rotor having four or more magnetic poles may be such that at least two N poles and two S poles are magnetized.
- a magnet rotor provided with a multipole magnet in which four or more magnetic poles are magnetized on the circumferential surface along the circumferential direction, or a large number of segment magnets (two poles) arranged around a rotation axis.
- an integrated magnet rotor is an integrated magnet rotor.
- a ninth rotation angle detection device is a rotation angle detection device comprising a magnet rotor having four or more magnetic poles and a sensor device for detecting the direction of magnetic flux from the magnet rotor,
- a device is provided! /, Characterized in that.
- a tenth rotation angle detection device is a rotation angle detection device comprising: a magnet rotor having four or more magnetic poles; and a sensor device for detecting the direction of magnetic flux from the magnet rotor,
- the sensor device comprises a plurality of spin-valve giant magnetoresistance elements (having a fixed layer and a free layer, the fixed layer magnetization direction is fixed, and the free layer magnetization direction is rotated according to the direction of the magnetic field
- a magnetosensitive surface formed of a resistive element Let a line connecting the center of thickness of the rotor and the center of the magnetosensitive surface of the sensor device make an angle with a plane passing through the center of thickness of the magnet rotor and perpendicular to the rotation axis as a sensor arrangement angle ⁇ .
- the sensor device is provided so as to be in any of the ranges, and the sensor device incorporates a sensor bridge A01 and a sensor bridge B01 in which the fixed layer magnetization directions are orthogonal to each other, and the sensor bridges A01 and B01 are respectively The bridge circuit of the spin valve type giant magnetoresistance effect element, wherein the magnetization direction of the fixed layer of the spin valve type giant magnetoresistance effect element of the electrically adjacent side of the bridge circuit is antiparallel, and the sensor bridge By applying a voltage to each of A01 and B01, an output according to the angle between the fixed layer magnetization direction and the free layer magnetization direction is obtained, and an angle signal is obtained based on the output. I assume.
- the distance between the center of the magnetosensitive surface of the sensor device and the rotation axis of the magnet rotor is larger than the radius of the magnet rotor.
- the magnetosensitive surface is relative to the rotation axis of the magnet rotor.
- the sensor device incorporates a sensor bridge A01 and a sensor bridge B01 in which the fixed layer magnetization directions are orthogonal to each other, and the sensor bridges A01 and B01 are respectively the spin valve type giant magnetoresistive element In the bridge circuit, the fixed layer magnetization directions of the spin valve type giant magnetoresistance effect elements of the electrically adjacent sides are antiparallel to each other, and a voltage is applied to each of the sensor bridges A01 and B01. It is preferable to obtain an output according to the angle between the magnetization direction of the fixed layer and the magnetization direction of the free layer by applying a voltage, and to obtain an angle signal based on the output.
- the distance between the center of the magnetosensitive surface of the sensor device and the rotation axis of the magnet rotor passes through the thickness center point of the magnet rotor larger than the radius of the magnet rotor and on the rotation axis. From the vertical plane, the center of the magnetosensitive surface of the sensor device is away from the rotational direction of the magnet rotor, and the sensor device has sensor bridge AO 1 and sensor bridge BO 1 whose fixed layer magnetization directions are orthogonal to each other. And the sensor bridge AO 1 and BO 1 are In each of the bridge circuits of the spin valve type giant magnetoresistive effect elements, the magnetization directions of the fixed layers of the spin valve type giant magnetoresistive elements of the electrically adjacent sides are antiparallel, respectively. By applying a voltage to each of the sensor bridges A01 and B01, an output corresponding to the angle between the magnetization direction of the fixed layer and the magnetization direction of the free layer is obtained, and an angle signal is obtained based on the output. Is preferred.
- the distance between the center of the magnetosensitive surface of the sensor device and the rotation axis of the magnet rotor is equal to or less than the radius of the magnet rotor, and the magnetosensitive surface is relative to the rotation axis of the magnet rotor.
- the sensor device incorporates a sensor bridge A01 and a sensor bridge B01 in which the fixed layer magnetization directions are orthogonal to each other, and the sensor bridges A01 and B01 are respectively the spin valve type giant magnetoresistive element In the bridge circuit, the fixed layer magnetization directions of the spin valve type giant magnetoresistance effect elements of the electrically adjacent sides are antiparallel to each other, and a voltage is applied to each of the sensor bridges A01 and B01. It is preferable to obtain an output according to the angle between the magnetization direction of the fixed layer and the magnetization direction of the free layer by applying a voltage, and to obtain an angle signal based on the output.
- the distance between the center of the magnetosensitive surface of the sensor device and the rotation axis of the magnet rotor is equal to or less than the radius of the magnet rotor and greater than 0, passing through the thickness center point of the magnet rotor and
- the center of the magnetosensitive surface of the sensor device is away from the plane perpendicular to the rotation axis in the direction of the rotation axis of the magnet rotor, and the sensor device has a sensor bridge A01 and a sensor bridge B01 in which the fixed layer magnetization directions are orthogonal to each other.
- the sensor bridges A01 and B01 are respectively bridge circuits of the spin valve type giant magnetoresistance effect elements, and the bridge circuits are spin valve type giant magnetoresistance effect elements on electrically adjacent sides.
- the magnetization direction of the fixed layer is antiparallel to that of the free layer magnetization by applying a voltage to each of the sensor bridges A01 and B01. Obtaining an output corresponding to the angle between rectangular direction, to obtain an angle signal based on the output favored arbitrariness.
- the center of the magnetosensitive surface of the sensor device is a central point that is approximately equidistant from the plurality of spin valve giant magnetoresistive elements. Since the thickness of the spin valve giant magnetoresistance effect element is sufficiently thinner than that of the magnet rotor, the center is the spin valve giant magnetoresistance effect. As long as it is on the substrate on which the element is formed,.
- each element is an element (element) of 2 or 4 elements constituting an electric herb bridge circuit or a full bridge circuit. Equivalent to. Four are preferred to get high output.
- An analog-digital conversion unit that converts the signal (cosine signal) of sensor bridge A01 and the signal (sine signal) of sensor bridge B01 into a digital signal
- an angle calculation unit that calculates the converted digital signal into an angle signal It is preferable to have
- At least one or more sensor devices other than the above-described sensor devices may be disposed in the vicinity of the magnet rotor, and signals obtained from these may be synthesized and calculated to obtain a rotation angle signal.
- a rotating machine according to the present invention is characterized by comprising any one of the above-described rotation angle detecting devices.
- a generator and a motor are mentioned as a specific example of a rotary machine.
- the rotation angle detection method of the present invention uses a magnet rotor having magnetic poles of four or more poles on its surface, a sensor device for detecting the direction of magnetic flux from the magnet rotor, and a plurality of signals obtained from the sensor device. And an electronic circuit unit that outputs a rotation angle signal corresponding to the rotation angle of the magnet rotor, using two or more phase signals different from a rotating magnetic field generated in the vicinity of the rotating magnet using the rotation angle detection device A process including arctangent calculation is performed using two signals that are detected from the device, combined in the electronic circuit unit, and combined, and a rotation angle signal corresponding to the rotation angle of the magnet rotor is output. It is characterized by
- the electronic circuit unit From the rotating magnetic field generated in the vicinity of the magnet rotor, two or more different phase signals are detected by the sensor device and synthesized by the electronic circuit section, and the two circuits combined are used to perform the arc tangent operation And a rotation angle signal corresponding to the rotation angle of the magnet rotor is output.
- the electronic circuit unit performs processing including arctangent operation. Specifically, the arctangent operation is processed digitally.
- the rotation angle detection device of the present invention has high detection accuracy of the rotation angle, and thus is suitable for a rotating machine that needs to be miniaturized such as a drive motor mounted on a hybrid vehicle.
- FIG. 1 (a) is a schematic front view showing an example of a rotation angle detection device of the present invention.
- FIG. 1 (b) is a schematic side view showing an example of the rotation angle detection device of the present invention, and the lower side from the alternate long and short dash line is a partial sectional view showing the magnet rotor in cross section.
- FIG. 2 (a) is a schematic view showing an arrangement of sensor elements in a sensor device used for the rotation angle detection device of the first embodiment.
- FIG. 2 (b) is a schematic view showing the arrangement of sensor elements in another sensor device used in the rotation angle detection device of the first embodiment.
- FIG. 2 (c) is a circuit diagram showing the connection between sensor elements and terminals in the sensor device of FIG. 2 (a).
- Fig. 2 (d) is a circuit diagram showing a connection between a sensor element and a terminal in the sensor device of Fig. 2 (b).
- FIG. 3 is a view showing an example of a circuit used for the rotation angle detection device of the first embodiment.
- FIG. 4 is a schematic front view showing another example of a magnet rotor used in the rotation angle detection device of the present invention.
- FIG. 5 is a schematic front view showing still another example of a magnet rotor used in the rotation angle detection device of the present invention.
- FIG. 6 is a schematic cross-sectional view showing an example of a rotating machine of the present invention.
- FIG. 7 (a) is a schematic cross-sectional view showing another example of the rotary machine of the present invention.
- FIG. 7 (b) is a schematic cross-sectional view showing still another example of the rotating machine of the present invention.
- FIG. 7 (c) is a schematic cross-sectional view showing still another example of the rotary machine of the present invention.
- FIG. 7 (d) is a schematic cross-sectional view showing still another example of the rotary machine of the present invention.
- FIG. 8 (a) is a schematic cross-sectional view showing still another example of the rotating machine of the present invention.
- FIG. 8 (b) is a schematic cross-sectional view showing still another example of the rotary machine of the present invention.
- FIG. 8 (c) is a schematic cross-sectional view showing still another example of the rotating machine of the present invention.
- 9 (a)] A schematic view showing an arrangement of elements (elements) in a sensor device used for a rotation angle detection device of Example 2.
- FIG. 9 (b) is a bridge circuit diagram showing a connection between an element and a terminal in which the fixed layer magnetization direction is in the X and -X directions in the sensor device of FIG. 9 (a).
- FIG. 9 (c) is a bridge circuit diagram showing the connection between an element and a terminal in which the fixed layer magnetization direction is in the Y and -Y directions in the sensor device of FIG. 9 (a).
- FIG 9 (d) is a schematic view showing the arrangement of elements (elements) in another sensor device used in the rotation angle detection device of the second embodiment.
- FIG. 9 (e) This is a bridge circuit diagram showing a connection between an element and a terminal in which the pinned layer magnetization direction is in the ⁇ and ⁇ directions in the sensor device of FIG. 9 (d).
- FIG. 9 (f) This is a bridge circuit diagram showing the connection between an element and a terminal whose fixed layer magnetization direction is in the ⁇ and - ⁇ directions in the sensor device of FIG. 9 (d).
- FIG. 10 It is a figure which shows another example of the circuit used for the rotation angle detection apparatus of Example 2.
- FIG. Garden 11 (a) It is a schematic cross section which shows the rotary machine of this invention as described in Example 2.
- FIG. 10 It is a figure which shows another example of the circuit used for the rotation angle detection apparatus of Example 2.
- FIG. Plant 11 (a) It is a schematic cross section which shows the rotary machine of this invention as described in Example 2.
- FIG. 11 (b) A partial enlarged view showing a rotation angle detection device in a rotary machine of the present invention described in Embodiment 2.
- FIG. 11 (b) A partial enlarged view showing a rotation angle detection device in a rotary machine of the present invention described in Embodiment 2.
- FIG. 11 (c) Another partially enlarged view showing the rotation angle detection device in the rotary machine of the present invention described in Embodiment 2.
- FIG. 11 (c) Another partially enlarged view showing the rotation angle detection device in the rotary machine of the present invention described in Embodiment 2.
- FIG. 12 (a) A schematic front view showing a rotation angle detection device of an embodiment 3.
- FIG. 12 (a) A schematic front view showing a rotation angle detection device of an embodiment 3.
- Example 12 (b)] is a schematic side view showing the rotation angle detection device of Example 3, and the lower side of the alternate long and short dash line is a partial cross sectional view showing the magnet rotor in cross section.
- FIG. 13 It is a schematic diagram which shows an example of the rotation angle detection apparatus of Example 3.
- FIG. 13 It is a schematic diagram which shows an example of the rotation angle detection apparatus of Example 3.
- FIG. 14 It is a schematic diagram which shows another example of the rotation angle detection apparatus of Example 3.
- FIG. 14 It is a schematic diagram which shows another example of the rotation angle detection apparatus of Example 3.
- FIG. 15 (a)] is a schematic view showing still another example of the rotation angle detection device of the embodiment 3.
- FIG. Garden 15 (b)] It is a graph which shows the sensor output of the rotation angle detection apparatus of FIG. 15 (a).
- FIG. 15 (d) is a graph showing detection angles and angular errors of the rotation angle detection device of FIG. 15 (a)
- 16 (a) is a schematic view showing still another example of the rotation angle detection device of the embodiment 3.
- FIG. Garden 16 (b)] It is a graph which shows the sensor output of the rotation angle detection apparatus of FIG. 16 (a).
- FIG. 16 (d)] is a graph showing the detection angle and angle error of the rotation angle detector of FIG. 16 (a).
- Garden 17] is a view showing another example of a circuit used for the rotation angle detector of Example 3.
- 18 (a) is a schematic view showing another example of a sensor device used for the rotation angle detection device of embodiment 3.
- FIG. 16 (d)] is a graph showing the detection angle and angle error of the rotation angle detector of FIG. 16 (a).
- Garden 17] is a view showing another example of a circuit used for the rotation angle detector of Example 3.
- 18 (a) is a schematic view showing another example of a sensor device used for the rotation angle detection device of embodiment 3.
- FIG. 18 (b) is a schematic view showing still another example of a sensor device used for the rotation angle detection device of embodiment 3.
- FIG. 18 (b) is a schematic view showing still another example of a sensor device used for the rotation angle detection device of embodiment 3.
- FIG. 18 (c) is a schematic view showing still another example of the sensor device used for the rotation angle detection device of the embodiment 3.
- FIG. 18 (c) is a schematic view showing still another example of the sensor device used for the rotation angle detection device of the embodiment 3.
- FIG. 19 A diagram showing still another example of a circuit used for the rotation angle detection device of the third embodiment.
- 20 A diagram showing still another example of a circuit used for the rotation angle detection device of the third embodiment.
- FIG. 21 is a view showing still another example of the circuit used for the rotation angle detection device of the third embodiment.
- Garden 22 (a) is a schematic front view showing another example of the rotation angle detection device of the third embodiment.
- FIG. 22 (b) is a sectional view taken on line AA of FIG. 22 (a).
- 22 (c)] is a graph showing the sensor output of the rotation angle detection device of FIG. 22 (a).
- FIG. 22 (d)] is a graph showing a sensor output of the rotation angle detection device of FIG. 22 (a).
- FIG. 22 (e)] is a graph showing the detection angle and angle error of the rotation angle detection device of FIG. 22 (a) garden 22 (f)] The detection angle and angle error of the rotation angle detection device of FIG. 22 (a) I will see it in an enlarged manner.
- FIG. 24 (a) is a schematic front view showing still another example of the rotation angle detection device of the third embodiment.
- FIG. 24 (b) is a sectional view taken on line AA of FIG. 24 (a).
- FIG. 24 (e)] is a graph showing the detection angle and angle error of the rotation angle detection device of FIG. 24 (a) garden 24 (f)] The detection angle and angle error of the rotation angle detection device of FIG. 24 (a) I will see it in an enlarged manner.
- FIG. 25 (a)] is a schematic view showing still another example of the rotation angle detection device of the embodiment 3.
- FIG. 25 (b)] is a schematic view showing still another example of the rotation angle detection device of the embodiment 3.
- Garden 26] It is a schematic diagram which shows another example of the rotation angle detection apparatus of Example 3.
- FIG. 25 (b)] is a schematic view showing still another example of the rotation angle detection device of the embodiment 3.
- Garden 27 (a)] is a graph showing radial distance dependency of the sensor bridge output of the present invention.
- Garden 27 (b)] is a graph showing circumferential distance dependency of the sensor bridge output of the present invention.
- 27 (c)] is a graph showing the radial distance dependency of the IC output.
- FIG. 27 (e) is a graph showing the sensor bridge output characteristics of the sensor device with respect to the distance from the rotor surface of the output voltage characteristics of the sensor device and Hall IC 27 (f) to the magnetic flux density.
- Garden 29 A diagram showing still another example of a circuit used for the rotation angle detection device of the present invention.
- Garden 30 (a) is a schematic front view showing still another example of the rotation angle detection device of the present invention.
- FIG. 30 (b) is a sectional view taken on line AA of FIG. 30 (a).
- FIG. 31 (a) is a schematic front view showing another example of the rotation angle detection device of the embodiment 4.
- FIG. 31 (a) is a schematic front view showing another example of the rotation angle detection device of the embodiment 4.
- 31 (b) is a schematic side view showing another example of the rotation angle detection device of the fourth embodiment, and the lower side from the alternate long and short dash line is a partial cross sectional view showing the magnet rotor in cross section.
- 32] is a diagram showing a circuit used for a rotation angle detection device of a fourth embodiment.
- FIG. 32 (a)] is a schematic front view showing an example of a rotation angle detection device of an embodiment 5.
- FIG. 32 (a) is a schematic front view showing an example of a rotation angle detection device of an embodiment 5.
- Garden 33 (d)] is a graph showing the detection angle and angle error of the rotation angle detection device of FIG. 33 (a).
- Garden 34 (a)] A schematic front view showing another example of the rotation angle detection device of the fifth embodiment. It is.
- 34 (b)] is a schematic side view showing another example of the rotation angle detection device of the fifth embodiment.
- 34 (c)] It is a graph which shows the sensor output of the rotation angle detection apparatus of FIG. 34 (a).
- FIG. 34 (d) is a graph showing detection angles and angular errors of the rotation angle detector of FIG. 34 (a).
- FIG. 35 is a graph showing the relationship between sensor inclination angle% and maximum angle error.
- FIG. 38 (a)] is a schematic front view showing another example of the rotation angle detection device of the embodiment 7.
- FIG. Garden 38 (b) is a schematic side view showing another example of the rotation angle detection device of the seventh embodiment.
- Garden 38 (c)] It is a graph which shows the sensor output of the rotation angle detection apparatus of FIG. 38 (a).
- FIG. 38 (d)] is a graph showing the detection angle and angle error of the rotation angle detection device of FIG. 38 (a)
- FIG. 39 (a)] A schematic front view showing another example of the rotation angle detection device of the eighth embodiment It is.
- FIG. 39 (b) is a schematic side view showing another example of the rotation angle detection device of the eighth embodiment.
- Fig. 40 (a)] A schematic front view for explaining the positional relationship between the magnetic field of a two-pole magnet and the sensor device It is.
- FIG. 40 (b) is a sectional view taken on line AA of FIG. 40 (a).
- FIG. 41 (a) is a schematic front view for explaining the positional relationship between the magnetic field of the magnet rotor having four or more magnetic poles and the sensor device.
- FIG. 41 (b) It is a sectional view taken on line AA of FIG. 41 (a).
- 43 (a)] is a graph showing the relationship between Z-direction distance and I B I and B
- FIG. 44 (a) is a schematic front view showing an example of the rotation angle detection device of the tenth embodiment.
- FIG. 44 (b) is a cross-sectional view taken along the line AA of FIG. 44 (a).
- FIG. 34 (a)] is a schematic front view showing another example of the rotation angle detection device of the embodiment 10.
- FIG. 34 (a) is a schematic front view showing another example of the rotation angle detection device of the embodiment 10.
- FIG. 45 (b) It is an AA sectional view of FIG. 45 (a).
- FIG. 45 (d) is a graph showing detection angles and angular errors of the rotation angle detector of FIG. 45 (a).
- FIG. 45 (e) is a graph showing a detection angle and an angle error of the rotation angle detection device of FIG. 45 (a) in an enlarged manner.
- FIG. 46 (a) is a schematic front view showing the rotational angle detection device of the eleventh embodiment.
- FIG. 46 (b) is a sectional view taken on line AA of FIG. 46 (a).
- FIG. 47 (a) is a schematic front view showing the rotational angle detection device of the twelfth embodiment.
- FIG. 47 (b) It is AA sectional drawing of FIG. 47 (a).
- FIG. 48 is a schematic cross-sectional view showing still another example of the rotary machine of the present invention.
- FIG. 49 is a schematic cross-sectional view showing still another example of the rotary machine of the present invention.
- the angle detection principle of the rotation angle detection device of the present invention will be described for a magnet rotor having 2N poles (N is a natural number) in the rotation direction.
- This magnet rotor can be rephrased to have a magnet of N pole pair, and has N times of axial symmetry.
- the mechanical angle ⁇ ⁇ at a certain reference angle is expressed by equation (1) by the electrical angle ⁇ .
- Equations (3-1) and (3-2) the fundamental wave component is not zero (ie, A is zero).
- a magnetoresistance effect element is an element (element) that senses a magnetic field and changes its resistance value, and is usually used to one-dimensionally detect a magnetic field component in the anisotropic direction of the element (element).
- the entire sensor system is configured by paying attention to the change in resistance when an element (element) is placed in a rotating magnetic field.
- An element (element) that changes the resistance of cos a (a is the angle formed by the magnetization of the fixed layer and the magnetization of the free layer) with respect to the rotating magnetic field, an element that changes the resistance of ( -cos a ) with the opposite sign ( Element) or an element pair combining them.
- ⁇ is the rate of change in resistance.
- the direction of magnetization of the fixed layer is determined by the manufacturing process and does not change due to the movement of the external magnetic field.
- the magnetization of the free layer is the same as the direction of the external magnetic field, the resistance change depends only on the direction of the external magnetic field, and an operation independent of the magnitude of the absolute value of the magnetic field is possible.
- an output corresponding to the angle between the magnetic field and the magnetic sensing direction can be obtained, so that waveform output for one period per one electric angle period can be obtained.
- the tangent angle can be used to determine the absolute angle.
- the magnetization of the free layer rotates smoothly according to the magnetic flux applied from the magnet rotor. Therefore, it is suitable as an element (element) used in the present invention.
- the inverse tangent calculation means tan ⁇ from the first sine wave output signal x (eg, a signal obtained from the sensor bridge AO 1) and the second sine wave output signal y (eg, a signal obtained from the sensor bridge B01). It is to find ⁇ that has a relation of y / x.
- the optimal arrangement is determined as follows. In the coordinate system ( ⁇ , ⁇ , ⁇ ) whose origin is at the center of the magnet rotor, as shown in Fig. 9 (a) to Fig. 9 (c) at the position (X, ⁇ , ⁇ )
- the fixed layer magnetization direction of the sensor bridge A01 was disposed parallel to the X axis, and the fixed layer magnetization direction of the sensor bridge B01 was disposed parallel to the Y axis (the tangential direction of the magnet rotation). Assuming that the angle between the XY plane and the line connecting the origin of the magnet and the center of the sensor device is the sensor arrangement angle ⁇ , X, Y, and Z when the magnet rotor rotates in the circumferential direction. Flux component in the direction B, ⁇
- the magnetic moment is considered to approximate to m.
- B-sm 6 L B ,, n sm 9 m (7-1) m
- B is the amplitude of B
- B is the amplitude of B.
- Space flux density which is the ratio of these
- the amplitude ratio K is expressed by equation (8).
- each sensor bridge receives magnetic flux of the same amplitude and 90 ° different in phase. Therefore, the output of each sensor bridge becomes a sine wave or cosine wave without distortion, and an error does not occur in the angle signal after the inverse tangent calculation.
- B is the amplitude of B
- B is the amplitude of B
- the spin valve type giant magnetoresistive effect element is
- the demagnetizing factor of the magnet rotor or the sensor changes depending on the mounting position of the support.
- the magnetic moment m can be approximated.
- the optimum sensor placement angle ⁇ and the optimum sensor inclination eff best are the effective magnetic flux density amplitude ratio K force according to an analysis that can be approximated to the magnetic moment m.
- the space flux density amplitude ratio K is determined from the magnetic flux density component at an arbitrary point by magnetic field analysis such as the finite element method, and the sensor device is determined such that the effective flux density amplitude ratio K force is obtained.
- the chair is inclined by% from the XY plane, it is possible to configure the rotation angle detection device with small angle error, and the force S can be obtained.
- a sensor bridge corresponds to four elements (spin valve type giant magnetoresistance effect elements) assembled in an electric circuit bridge. Furthermore, the one on which two sensor bridges are mounted is called a sensor device.
- the configuration in which the magnet rotor and the sensor device face each other is called a rotation angle detection device (knit).
- the rotation angle detection device A unit that combines multiple sensor devices so that they can be attached is called a module.
- a first rotation angle detection device includes a magnet rotor 1 and a magnetic sensor unit 2 disposed outside the outer periphery of a magnetic rotor. And a housing 3 for fixing the magnetic sensor unit 2.
- the magnet rotor 1 supports a ring-shaped permanent magnet la having an outer peripheral shape obtained by connecting a plurality of arcs, a soft magnetic ring lb integrally formed on the inner peripheral side of the ring-shaped permanent magnet, and the soft magnetic ring Have a nonmagnetic ring-shaped adapter lc.
- the magnetic sensor unit 2 includes a plate-like circuit substrate 2c whose peripheral edge facing the magnet rotor 1 is concave, a pair of sensor devices 2a and 2b fixed to the surface of the circuit substrate 2c, the sensor device and A cable 2d and a connector 2e for electrically connecting the circuit substrate 2c to the control circuit, and a nonmagnetic cover 2f covering the sensor device.
- Two stacked spin valve type giant magnetoresistive elements are mounted on the sensor devices 2a and 2b, respectively (not shown, and the rotation angle of the ring-shaped permanent magnet la is detected by the sensor devices 2a and 2b).
- the housing 3 is provided with a U-shaped angnole 3a and a bolt 3c for fixing the circuit board 2c so that the sensor devices 2a and 2b face the magnet rotor 1 at a predetermined distance.
- the details of the magnetic sensor unit 2 will be described later.
- the housing 3 provided with the magnetic sensor unit 2 is fixed to the main body of the machine tool using the bolting holes 3b, and the magnet rotor 1 is fixed to the rotating shaft of the machine tool using the bolting holes Id. It was fixed so as to be coaxial (The illustration of the machine tool is omitted in Figure 1 (a) and Figure 1 (b)). As shown in FIG. 1 (a), when the rotation shaft of the machine tool was driven with the magnet rotor 1 and the magnetic sensor unit 2 facing each other, the rotation angle could be detected with high accuracy.
- the magnet rotor 1 comprises a ring-shaped permanent magnet la formed by molding NdFeB-based magnetic powder and a binder, a soft magnetic ring lb formed by molding soft iron powder and a binder, and the soft magnetic ring. It consisted of S45C adapter lc for attaching to a shaft. Magnet rotor 1 has an outer peripheral surface Is magnetized to 12 poles (ie 6 pole pairs). A mechanical angle of 60 deg., Which corresponds to one pole pair, corresponds to an electrical angle of 360 deg.
- the sensor device 2a and the sensor device 2b form two half bridge circuits as shown in FIG. 2 (a) and FIG. 2 (b) with four spin valve elements, respectively.
- the terminal 23 was formed and molded with a resin-based material.
- the sensor device 2a and the sensor device 2b are fixed to the circuit substrate 2c so as to form a mechanical angle of 15 deg. (Ie, an electrical angle of 90 deg.) Around the rotation axis of the magnet rotor 1.
- the sensor devices 2a and 2b functioned to configure the circuit of FIG. 3 via the cable 2d with the connector 2e.
- the housing 3 and the U-shaped angle 3a were also made of nonmagnetic SUS316.
- the radius of the circumscribed circle (shown by a dotted line) of the magnet rotor 1 is 40 mm, and the distance r between the circumscribed circle of the magnet rotor 1 (shown by a dotted line) and the center of the sensor device is 3.5 mm.
- the thickness t was 25 mm, and the thickness T of the housing 3 was 2 mm (a plate of 2 mm thickness was punched out and formed by drawing). Even if the distance r was increased to 10 mm, it could be used without any problem. Also, even when the thickness t of the magnet rotor 1 was 5 mm, it could be used without any problem.
- the sensor devices 2a and 2b are formed by molding four spin-valve giant magnetoresistance effect elements 22a, 22b, 22c, 22d as sensor elements. It is internally provided, and is provided with six terminals 23 by a lead frame.
- the magnetization direction of the fixed layer is fixed in the direction of the thick arrow shown.
- the thick arrows in the spin valve giant magnetoresistance effect elements 22a and 22e correspond to the direction pointing to the center of the magnet rotor.
- FIG. 2 (d) are circuit diagrams showing the relationship between the four spin valve giant magnetoresistive elements (shown as electrical resistance in the circuit diagram) of the sensor devices 2a and 2b and the terminals, respectively. is there.
- a constant voltage Vccx is applied to the spin valve type giant magnetoresistance elements 22a and 22d connected in series, and Voutx is output from the middle point of the connection
- a constant voltage Vccy was applied to the spin valve giant magnetoresistance effect elements 22b and 22c connected in series to output the midpoint force of the connection, etc.
- Vouty. Gndx and Gndy correspond to ground (earth potential).
- the sensor device 2b was similarly connected as shown in FIG. 2 (d).
- a circuit used for the rotation angle detection device is schematically shown in FIG. 4 half bridge times The paths are connected in parallel, terminals of constant voltage are combined to Vcc, and terminals of ground are combined to Gnd.
- the spin valve type giant magnetoresistance effect elements 22a, 22b, 22c and 22d correspond to the sensor device 2a of FIG. 2A, and the spin valve type giant magnetoresistance effect elements 22e, 22f, 22g and 22h are as shown in FIG. It corresponds to sensor device 2b of).
- Each thick arrow represents the magnetization direction of the pinned layer of the spin valve giant magnetoresistive element.
- a spin valve type giant magnetoresistance effect element 22h is obtained by amplifying the middle point output of the spin valve type giant magnetoresistance effect elements 22d and 22a and the middle point output of the spin valve type giant magnetoresistance effect elements 22g and 22f with a first amplifier. , 22e and the middle point output of the spin valve type giant magnetoresistance effect elements 22b and 22c were amplified by the second operational amplifier. Then, the output of the first operational amplifier and the output of the second operational amplifier were input to the AD converter, and both of the obtained outputs were input to the angle calculator to obtain the value of the detected angle as the final output. As shown in FIGS.
- ⁇ 15 deg.
- De 90 deg.
- This multipolarizing reduces the ⁇ for the eyebrows, making the sensor device smaller in size and having a smaller diameter S.
- the above-described spin valve type giant magnetoresistance effect elements each detect an angle formed by the magnetic sensing direction and the magnetic field direction at the position where the element is disposed.
- the spin valve type giant magnetoresistance effect device having the magnetic sensing direction in the circumferential direction and the magnetic sensing direction in the radial direction disposed at a position different by 90 degrees in electrical angle with respect to it. It has a bridge configuration combining it with the spin valve type giant magnetoresistive effect element, and distortion of the output signal waveform is canceled compared to the bridge configuration where the spin valve type giant magnetoresistive effect element arranged at the same place is combined. was able to obtain an output closer to a more ideal sine wave.
- the rotation angle accuracy of the rotation angle detection device of Example 1 was within ⁇ 5 deg. In mechanical angle.
- the error of the maximum detection angle expressed in mechanical angle becomes smaller as the number of magnetic poles is increased in electric angle.
- mechanical angle is expressed It becomes a 1/6 rotation angle error. For this reason, it is possible to reduce the detection error more than the force using a magnet rotor having a large number of magnetic poles.
- the magnet rotor 11 has a ring-shaped permanent magnet 11 a having a circular outer periphery and having an inner peripheral shape in which a plurality of arcs are connected, and a yoke 1 i integrally formed on the inner peripheral side of the ring-shaped permanent magnet 11 a. And an annular soft magnetic ring l ib integrally formed on the inner periphery of the yoke li, and a nonmagnetic ring adapter 1 l c for supporting the soft magnetic ring 1 lb (bolt hole 1 Have an Id).
- the surface magnetic flux density distribution on the outer peripheral surface of the magnet rotor 11 was brought close to an ideal sin wave by making the magnet thickness inclined for each magnetic pole and forming a convex shape or a lens shape.
- the rotation angle detection device of the present invention is provided with a magnetic sensor (a pair of sensors arranged in proximity to each other) having a sensor bridge of a spin valve type giant magnetoresistance effect element in proximity to the magnet rotor. Even with a ring-shaped permanent magnet having such a shape, the rotation angle could be detected with high accuracy.
- FIG. 1 Yet another magnet rotor for use in the rotation angle detection device of the present invention is shown in FIG.
- the magnet rotor 21 has a plurality of segment magnets 21a arranged on the outer peripheral surface of an annular soft magnetic ring 21b via an adhesive and a nonmagnetic ring adapter for supporting the soft magnetic ring 21b. 21c (having a bolting hole 21d) is provided.
- the configuration of the magnetic sensor unit 2 is the same as in FIGS. 1 (a) and 1 (b). However, the inner diameter of the housing 13 (only the-part is shown) is smaller than the shape of the housing 3 shown in FIGS. 1 (a) and 1 (b) except in the vicinity of the magnetic sensor unit 2.
- a thin iron plate 13 b (S 45 C) was fixed to the inner circumferential surface of the housing 13. By providing the iron thin plate 13b in this manner, it is possible to prevent external magnetic disturbance and to further reduce the harmonic component of the magnetic flux from the magnet rotor.
- FIG. 1 A rotating machine of the present invention is shown in FIG.
- This rotating machine is a motor, and in the frame 73c, a permanent magnet rotor 71a having a shaft 71b as a central shaft and a stator 73a having a stator coil 73b fixed to the inner peripheral surface of the frame 73c are installed.
- the shaft 71b was rotatably fixed to the frame 73c via a bearing (not shown).
- the magnet rotor 71c is mounted on the shaft 71b, and the sensor device 72a is mounted on the frame 73c via the support 72c.
- the rotating magnetic field of the magnet rotor 71c is detected by the sensor device 72a, and the output thereof is calculated by an arithmetic circuit 7 It processed by 2b and output the rotation angle of the magnet rotor 71c.
- the magnetization direction of the free layer in the spin valve giant magnetoresistive element in the sensor device 72 a is magnetically rotated.
- the electrical axis of the magnetization direction of the free layer is indicated by an alternate long and short dash line in the figure.
- These rotating machines are modified examples of the rotating machine shown in FIG.
- symbol was abbreviate
- the supporting portion 72c is replaced with a supporting portion 72f in the rotating machine shown in FIG. 6, and a sensor device 72e is disposed on the end face of the supporting portion 72f.
- the surface on which the magnetization direction of the free layer in the spin valve giant magnetoresistive element magnetically rotates is made to face the magnet rotor 71c.
- FIG. 7A the supporting portion 72c is replaced with a supporting portion 72f in the rotating machine shown in FIG. 6, and a sensor device 72e is disposed on the end face of the supporting portion 72f.
- the surface on which the magnetization direction of the free layer in the spin valve giant magnetoresistive element magnetically rotates is made to face the magnet rotor 71c.
- the magnet rotor 71c is replaced by a magnet rotor 71d magnetized in multiple poles along the direction of the shaft 71b, and the magnetic field of the end face of the magnet rotor 71d is detected.
- the sensor device 72g was placed on the support 72h via the support 72h, the output of the sensor device 72g was processed by the arithmetic circuit 72i, and the rotation angle of the magnet rotor was output.
- the magnet rotor 71c is eliminated, and the rotor 71e having a shape in which the axial length of the permanent magnet rotor 71a is extended is provided to detect the magnetic field of the circumferential surface of the rotor 71e.
- the sensor device 72j was disposed via the support portion 72k, the output of the sensor device 72j was processed by the arithmetic circuit 72i, and the rotation angle of the magnet rotor was output.
- the rotary machine shown in FIG. 7 (d) has the configuration of FIG. 7 (a) in which the rotor 71a and the magnet rotor 71c are replaced by a rotor 71e shown in FIG. 7 (c).
- FIGS. 8 (a), 8 (b) and 8 (c) Still another rotating machine of the present invention is shown in FIGS. 8 (a), 8 (b) and 8 (c).
- This is an example in which the configuration of the rotating machine shown in FIGS. 7 (a) to 7 (d) is further modified.
- the magnetic field applied to the sensor device is not a rotating magnetic field.
- the rotation of the magnetization direction of the free layer of the spin valve giant magnetoresistive element is limited (tilts about the alternate long and short dash line but does not extend to one rotation). Therefore, the length and position of the support in the rotating machine shown in FIGS.
- a rotating magnetic field component parallel to the plane perpendicular to the dot-and-dash line is applied to the sensor device, so the magnetization direction of the free layer of the spin valve giant magnetoresistive element is Also began to rotate.
- the above embodiment shows the configuration applied to a rotating machine, the same angle detection can be performed by a position detection device in which the relative movement direction is converted from the circumference to the linear direction. When converted to the linear direction, it can be applied to position detection of a linear motor.
- the second rotation angle detection device of the present invention is a spin valve as shown in FIGS. 9 (a) to 9 (f) as the sensor devices 2a and 2b shown in FIGS. 2 (a) to 2 (d).
- Eight resistance effect elements are built in.
- thick dots and arrows indicate the magnetization direction of the fixed layer in one element.
- substrates were used in which two elements with the same fixed layer magnetization direction were formed on one substrate.
- elements whose magnetization directions were fixed layer magnetization in the ⁇ and - ⁇ directions were connected as shown in the circuit diagram in Fig. 9 (b), and a sensor bridge X01 was configured.
- Eight effect elements are built-in.
- the elements with the fixed layer magnetization direction in the ⁇ , ⁇ direction are connected as shown in the circuit diagram of FIG. 9 (e), and form a sensor bridge ⁇ 02.
- the elements whose magnetization directions are fixed in the ⁇ and ⁇ directions are connected as shown in the circuit diagram of Fig. 9 (f), and a sensor bridge ⁇ 02 was constructed.
- the sensor bridge X01 has the fixed layer magnetization direction in the radial direction of the magnet rotor
- the sensor bridge Y01 has the fixed layer magnetization direction in the rotational direction (circumferential direction) of the magnet rotor
- the sensor bridge ⁇ 02 is the magnet rotor
- the sensor bridge has a fixed layer magnetization direction in the radial direction
- the sensor bridge ⁇ 02 The sensor device is provided in the rotation angle detection device so as to have the fixed layer magnetization direction in the rotation direction of the magnet rotor.
- FIG. 9 (a) two spin valve giant magnetoresistance effect elements 22a, 22b, 22c and 22d are connected as shown in FIG. 9 (b) and FIG. It was connected to the terminal 23 of the book and molded integrally with resin to form the sensor device 12a.
- the thick arrows of the spin valve type giant magnetoresistance effect elements 22a and 22d are arranged parallel to the direction pointing the center of the magnet rotor in FIGS. 1 (a) and 1 (b).
- V ccx is applied, and Vxl and Vx2 are output from the middle point of the bridge connection.
- Gndxl, Gndx2, Gndyl and Gndy2 are at ground (earth potential).
- a force in which four elements each having two elements having the same fixed layer magnetization direction are formed on one substrate, or an element having eight elements formed on one substrate or one element Eight substrates on which elements are formed may be used. Elements can be cut out one by one from a wafer formed in the same direction in all fixed layer magnetization directions, arranged as shown in FIG. 9A, and wired so as to form a bridge. Using the self-pinned spin valve giant magnetoresistance effect element, we can determine the pinned layer magnetization direction of the element.
- each sensor device incorporates two sensor bridges in which the fixed layer magnetization directions are orthogonal to each other, and the fixed layer magnetization direction of each sensor bridge is determined by the lithography method or the ultra-precise positioning accuracy.
- the sensor devices are positioned with higher accuracy than in the case where they are mounted on a printed circuit board or the like.
- By making the fixed layer magnetization directions orthogonal it is possible to obtain the rotation angle with high accuracy.
- by using the same specifications for the first sensor device and the second sensor device it is possible to prevent mounting errors that occur when using sensor devices of different specifications.
- the same specifications refer to sensor devices manufactured under the same conditions. For example, when an element is manufactured by a wafer process, a range in which manufacturing conditions are the same even if it is formed on wafers having different ports is referred to as the same specification.
- each sensor device has two bridge circuits, and a DC voltage is applied between Vcc and Gnd to rotate the magnet. Place the sensor device in the magnetic field of the child Thus, differential outputs can be obtained between Vxl and Vx2 and between Vyl and Vy2, respectively.
- Differential outputs from these four sensor bridges X01, Y01, X02 and Y02 are amplified by differential amplifiers (op amps 26a, 26b, 26c, 26d, 26e, 26f) as shown in FIG.
- the first rotation angle signal output from the amplified X01 and Y02, and the second rotation angle signal output from the amplified Y01 and X02 are digitally converted by the AD conversion unit 27, and the angle calculation unit 28
- the angle calculation is performed in step (7), and a signal (angle signal) corresponding to the electrical angle is finally output.
- the phase difference between the first rotation angle signal and the second rotation angle signal is different by 90 degrees, and when the first rotation angle signal is regarded as a cosine signal, the second rotation angle signal is a sine. It can be regarded as a signal, and these signal power inverse tangent operations (tan ⁇ are performed to obtain an angle signal corresponding to 0 deg. To 360 deg.).
- FIG. 11 (a) shows a rotating machine to which the rotation angle detecting device of the present invention is applied.
- This rotating machine is a motor, and in the frame 73c, a rotor 71a of a permanent magnet having a shaft 71b as a central axis and a stator 73a with a stator coil 73b fixed on the inner peripheral surface of the frame 73c are installed.
- the shaft 71b is rotatably fixed to the frame 73c via a bearing (not shown).
- a magnet rotor 71c and a magnet rotor 71d are provided on the shaft 71b so as to be adjacent to the rotor 71a.
- the sensor devices 72a and 72b were installed on the frame 73c via the support 72d.
- the direction of the magnetic flux applied from the magnet rotor 71c is detected by the sensor devices 72a and 72b as shown in FIG. 11 (b), and the output is processed by the arithmetic circuit 72c to rotate the magnet rotor 71c. I output the corner.
- a spin valve type giant magnetoresistance effect element 74a in which a single magnet portion 74c provided in the magnet rotor 71d (shown in FIG. 11C) is supported by a support portion 74b.
- a Z signal obtained by detecting the sensor bridge X 01 shown in FIG. 9 (b) was derived.
- the Z signal was used in the arithmetic circuit as a signal corresponding to the period in which the magnet rotor rotates.
- the magnetization direction of the free layer in the spin valve giant magnetoresistive element in the sensor devices 72 a and 72 b is magnetically rotated.
- the axis of the magnetic rotation of the magnetization direction of the free layer is indicated by an alternate long and short dash line in the figure.
- the magnet rotor 1 which is two-pole magnetized on the outer peripheral surface, and the sensor device 12
- the 12 shows another rotation angle detection device of the present invention provided with a fixed housing 3.
- the point 0 corresponds to the central axis of rotation of the magnet rotor 1.
- the two sensor devices 12a and 12b were placed 90 degrees apart from each other.
- the rotation angle of the ring-shaped permanent magnet la in the magnet rotor 1 can be detected by the sensor devices 12a and 12b (mounted with two spin valve type giant magnetoresistive elements in which the fixed layer magnetization directions are orthogonal to each other).
- the magnet rotor 1 includes a ring-shaped permanent magnet la, a soft magnetic ring lb integrally formed on the inner peripheral side of the ring-shaped permanent magnet, and a non-magnetic ring-shaped flexible magnetic ring supporting the soft magnetic ring. It has a tar lc.
- the magnetic sensor unit 2 has a plate-like turn whose peripheral side faces the magnet rotor 1.
- the configuration of the circuit board etc. of the magnetic sensor unit 2 is the same as that of the magnetic sensor unit 2.
- the rotational angle detection devices of FIGS. 12 (a) and 12 (b) have the magnetic sensor units 2 and 2 installed.
- the magnet rotor 1 comprises a ring-shaped permanent magnet la composed of a sintered NdFeB-based permanent magnet, a soft magnetic ring lb formed by molding soft iron powder and a binder, and the soft magnetic ring attached to a rotating shaft For the S45C made of adapter lc.
- Each sensor device 12a, 12 The same b as the sensor devices 12a and 12b shown in FIGS. 9 (a) to 9 (f) used in Example 2 was used.
- Each of the circuit boards 2 c was fixed to the housing 3 so that the sensor device 12 a and the sensor device 12 b make an angle of 90 degrees around the rotation center 0 of the magnet rotor 1.
- the sensor devices 12a and 12b are connected to the connector 2e through the cables 2d and 2d, respectively.
- the housing 3 and the U-shaped angle 3a were made of nonmagnetic SUS316.
- the radius r of the magnet rotor 1 is 40 mm, and the center of the sensor device from the outer peripheral surface of the magnet rotor 1
- a plate of 2 mm in thickness was punched out and formed by drawing). These dimensions indicate the dimensions of the magnet itself. Even if the distance r is increased to 10 mm, it can be used without any problem.
- FIG. 13 schematically shows only the positional relationship between parts.
- the sensor devices 12a and 12b were disposed around the disc-shaped magnet 11 at an angle of 90 degrees.
- the substrate surface of the sensor device 12a was disposed at an inclination angle% with respect to a plane orthogonal to the central axis of the disk-like magnet.
- FIG. 13 (b) is a side view of the front view shown in FIG. 13 (a) viewed from the direction orthogonal to the central axis, in which the sensor device 12b is located behind the disk-like magnet. Because it is indicated by a dotted line.
- 13 (c) is a side view seen from a direction different from that of FIG. 13 (b) by 90 degrees.
- the sensor device 12a is shown behind by the disk-like magnet 11 and is shown by dotted lines.
- the arrow X01 indicates the fixed layer magnetization direction of one sensor bridge in the sensor device 12b
- the arrow Y01 indicates the fixed layer magnetic field direction of the other sensor bridge in the sensor device 12b.
- Arrow X02 indicates the fixed layer magnetization direction of one sensor bridge in sensor device 12a
- arrow Y02 indicates the fixed layer magnetic field direction of the other sensor bridge in sensor device 12a.
- the disc-shaped magnet 11 (NdFeB-based bonded magnet magnetized in two poles in the radial direction of the disc) has no through hole for passing the rotation shaft, a support member for fixing the disc-shaped magnet 11 is used.
- a rotation angle detection device By separately providing at the end of the rotating shaft, it was used as a rotation angle detection device. In the case of Fig.13, it is easy to generate shaft shake because it does not penetrate the shaft. By providing it, it was possible to suppress the angle error due to the shaft shake. Furthermore, by inclining the sensor devices 12a and 12b by%, the error of the detection angle can be further reduced.
- the sensor device 12a shown in FIGS. 9 (a) to 9 (c) is the same as that used in the second embodiment.
- the fixed layer magnetization direction of the sensor bridge Y01 was set along the rotation direction of the magnet rotor.
- the sensor bridge X01 was installed at an angle of 60 degrees with the fixed layer magnetization direction of the sensor bridge Y01 as the rotation axis.
- the fixed layer magnetization direction of the sensor bridge Y02 was set along the rotation direction of the magnet rotor.
- the center of the substrate surface of the sensor device was placed on a plane passing through the thickness center point of the magnet rotor and perpendicular to the rotation axis.
- FIG. 14 schematically shows a rotation angle detection device in which only the magnet rotor 21 and the sensor devices 12a and 12b are shown.
- the fundamental wave output from the arrow near the character of the sensor bridge X0KX01 embedded in the sensor device 12a, 12b indicates the direction parallel to the fixed layer magnetization direction in the sensor bridge X01 is as shown in the equation (10). Is expressed as cos S using an electrical angle ⁇
- the fundamental wave outputs from the other outputs that is, Y 01, X 02 and Y 02 are expressed by equations (11-1) to (11-3) according to the electric angle ⁇ .
- the magnetic flux density from the magnet rotor necessarily includes harmonics that are not limited only to the fundamental wave component.
- the output signal further includes harmonics. That is, when the output of the sensor device is measured in the vicinity of the magnet rotor, when the rotation angle of the magnet rotor is taken on the horizontal axis and the output of the sensor device is taken on the vertical axis, the fixed layer magnetization direction is in the radial direction.
- the output of the sensor bridge is trapezoidal (waveform in which the sin curve is trapezoidally distorted), and the output of the sensor bridge whose magnetization direction is oriented in the rotational direction is triangular (sin Distorted waveform). Therefore, the fundamental wave component is increased by adding the outputs of the X02 and Y02 sensor bridges, and the harmonic components are canceled and reduced. It becomes possible. Such signal processing can further reduce the error of the angle signal.
- equation (9) the sensor device is effectively subjected to magnetic fields of equal amplitude, which are different by 90 degrees in phase.
- the output from each sensor bridge is expressed by equation (14-1) and equation (14-2).
- V xm ⁇ ⁇ ⁇ m- V dc ⁇ ⁇ -(14-1)
- V Ym ⁇ 9 m- V dc ⁇ ⁇ -(14-2)
- the present invention it is possible to accurately detect the angle of the magnet rotor by equalizing the magnetic field components detected by the two orthogonal axes of the sensor device.
- the force with the rotating magnet as the magnetic moment m As a magnet actually used, a disk magnet having a thin flat shape in the rotation axis direction is often used. In such a case, IH ⁇ I / I Hr I becomes smaller as it becomes flatter. This ratio is expressed as a function of a number called demagnetizing factor. This ratio also depends on the distance.
- FIG. 15 (a). is a front view
- (a2) and (a3) are side views.
- the second sensor device 12a was placed under the same conditions at different positions of 90 degrees in phase with respect to the first sensor device 12b.
- the center of the magnet rotor 11 was taken as the origin, and the axis of rotation was represented by a cylindrical coordinate system with the Z axis.
- Magnet rotor 11 has a diameter 2r of 26 mm, a thickness t of 8 mm (thickness in the direction of the rotational axis)
- the distance r + r to the center of the screen was 23 mm.
- the output of the sensor bridge Y01 was inverted and synthesized ( ⁇ ′).
- the output of each sensor bridge is shown in Fig. 15 (b) to Fig. 15 (d).
- the output of the sensor bridge X01 is a substantially trapezoidal wave
- the output of the sensor bridge Y01 is a substantially triangular wave, as shown in FIGS. 15 (c) and 15 (d).
- the waveform is almost a sine wave from the waveform before synthesis, and distortion of the magnet rotor and variation of the mounting position
- Fig. 16 (c) and Fig. 16 (d) it was possible to suppress the angular error to ⁇ 3 deg.
- angular error reduction is possible, and the magnet rotor and sensor By slightly changing the positional relationship of the vise, we confirmed that the angular error was further reduced.
- the first method is to reverse the voltage applied to Y02 as shown in the circuit diagram of FIG. Sensor bridge Y02 only By connecting Gnd to the Vcc terminal and Vcc to the Gnd terminal, the Y02 output is inverted and input to the operational amplifier 26d
- FIGS. 18 (a) to 18 (c) schematically show other sensor device arrangements used in the rotation angle detection device of the present invention.
- the first sensor device 12e is attached to the surface of the circuit board 12s with printed wiring on both sides.
- the second sensor device 123 By attaching the second sensor device 123 to the back surface of the substrate, “inversion” is achieved such that the output of the sensor bridge Y 02 and the output of the sensor bridge X 01 are in anti-phase relation.
- the same effect as inverting by wire connection is obtained.
- FIG. 18 (b) When using the circuit board 12t having the wiring only on one side, as shown in FIG. 18 (b) ⁇ a front view is shown in (bl) and a side view is shown in (b2) ⁇ , the circuit board 12t is used.
- the same effect can be obtained by mounting the first sensor device 12g on the surface and mounting the sensor device 12h in the reverse direction in the through holes 12u formed by boring the substrate 12t.
- terminals 24 can be mounted on the side so that both front and back sides can be mounted on the substrate.
- the same effect can be obtained by configuring the provided sensor device 12i. That is, the through hole is not formed in the substrate of FIG.
- the sensor device 12g is replaced by the sensor device 12i, and the inverted sensor device 12i is replaced with the through hole and the sensor device 12h (the above 12i and the substrate Place on the same side).
- the circuit diagram shown in FIG. 19 is a method of applying voltage to the element to the sensor bridge X01, ⁇ 1, ⁇ 02 and ⁇ 02, and the input polarity of the differential amplifier is the same as the circuit of FIG.
- digital inversion processing is performed only on the input signal from the Y02 output (output of the operational amplifier 26d).
- This circuit directly performs the necessary calculations without analog inversion as in the previously described embodiment.
- the addition process may be performed with the output as it is It is possible (the symbol of the resistance between the op amp and the AD converter is the electrical resistance for the summing process).
- the fundamental wave component phases of the sensor bridge Y01 and the sensor bridge X02 are opposite in phase, the fundamental wave component is canceled in simple addition processing.
- the output from the sensor bridge X02 is inverted (The connection of inputting the output of the sensor bridge X02 to the op amp 26c is reversed in positive / negative from the connection of the other sensor bridge-operational amplifier), and then from the sensor bridge Y01 It is necessary to perform output and addition processing of The output inversion from the sensor bridge X02 described above can also be performed by reversing the DC voltage application to the sensor bridge X02 as in the example shown in FIG. Such a circuit diagram is shown in FIG.
- FIGS. 22 (a) and 22 (b) show a rotation angle detection device configured using the multipolar magnet rotor 21 and the first sensor device 12b and the second sensor device 12a.
- Figures 22 (c) to 22 (f) show graphs showing the output etc. of the results of evaluation of rotational angle characteristics using this device.
- the magnet rotor 21 is 12-pole magnetized, so It also produced an output of 6 cycles when it was rotated 360 degrees in mechanical angle. In this case, the mechanical angle is 60 de-.
- the second sensor device 12a was placed under the same conditions at a position different in phase by 90 degrees in electrical angle with respect to the first sensor device 12b.
- the output of the sensor bridge Y01 was inverted and synthesized ( ⁇ ').
- the radial components (X01, X02) of the magnet rotor are almost trapezoidal waves, and the rotational direction components ( ⁇ 01, ⁇ 02 ') are almost triangular waves. Waveform distortion was confirmed even after waveform synthesis
- FIG. 23 (a) shows the results of simulation of the distance dependency of the magnetic flux density of a magnet rotor magnetized in 12 poles with an inner diameter of 45 mm, an outer diameter of 50 mm and a thickness of 4 mm.
- Figure 23 (b) is obtained from Figure 23 (a)
- the amplitude of the magnetic flux density B in the radial direction is larger than the amplitude r ⁇ width of the magnetic flux density B in the rotational direction.
- the results shown in FIG. 22 (c) and FIG. 22 (d) show differences in the amplitude of the magnetic flux density in the radial direction and in the rotational direction (I B
- ⁇ I indicates experimentally.
- the angular error was ⁇ 2 deg. In electrical angle.
- FIGS. 22 (a) and 22 (b) the rotational angle detection device having a configuration in which the sensor devices 12a and 12b are shifted in the Z axis direction by z is shown in FIGS. 24 (a) and 24 (b). Show. Since the amplitudes of the magnetic flux density received by the sensor devices 12a and 12b are equalized, as shown in FIGS. 24 (c) and 24 (d), any of the outputs of ⁇ 01, ⁇ 02, ⁇ 01, and ⁇ 02 'is obtained. The output after waveform synthesis with less distortion was also nearly sinusoidal and nearly cosine. As a result, as shown in FIG. 24 (e) and FIG. 24 (f), the angle error was ⁇ 1 deg. Or less in electrical angle, and it was possible to measure the rotation angle with great accuracy.
- the first sensor device and the second sensor device were installed at positions having a phase difference of 90 degrees in electrical angle.
- the first sensor device and the second sensor device do not necessarily have to be placed at an electrical angle of 90 degrees adjacent to each other.
- the second sensor device 12b is 90 deg. + 180 deg.
- the fundamental wave of each sensor bridge output is expressed by the equations (16-1) to (16-4) based on the output of the sensor bridge X01.
- the electrical angle is not limited to 90 deg. And the electrical angle 90 ⁇ 360 deg., But the relative position is 90 ⁇ 180 n. It is possible to take an arbitrary angle of deg. (n is an integer).
- the distance between the sensor devices is thus increased, the detection accuracy of the rotation angle is restricted by the influence of the assembly accuracy when the rotation angle detection device is attached to the rotation shaft of the motor or the processing device. Sometimes. Therefore, as shown in FIG. 14, it is more preferable to reduce the distance between the sensor devices.
- a signal of the sensor bridge built in the sensor device 12a and a signal of the sensor bridge built in the sensor device 12b are combined to form a pair of sine waves.
- the degree to which the fluctuation of the rotation axis of the magnet rotor la affects the rotation angle signal is reduced, which is more than in the case where the sensor devices are concentrated on one side of the rotation axis. It is highly resistant to rotational axis position fluctuation (a deviation from the center of rotation is permitted to some extent, which is larger than that allowed by the motor).
- a plurality of sensor devices used in this manner are referred to as a sensor device group.
- FIG. 27 (a) and 27 (b) show the magnet rotor according to the distance characteristics between the sensor and the magnet rotor measured using the sensor device constituted by the spin valve type giant magnetoresistance effect element. The relationship between mechanical angle and output is shown.
- FIG. 27 (a) shows the measurement results when the distance in the radial direction is changed
- FIG. 27 (b) shows the measurement results when the distance in the rotational direction is changed.
- the numbers (2 mm and 20 mm) added by thick arrows in the figure indicate the distance between the sensor and the magnet rotor.
- FIGS. 27 (c) and 27 (d) show the distance between the sensor and the magnet rotor when a Hall IC is used instead of the sensor device using the spin valve giant magnetoresistance effect element.
- the relationship between the mechanical angle and the output of the magnet rotor is shown according to the characteristics.
- Figure 27 (c) shows the measurement results when the radial distance is varied
- Figure 27 (d) shows the measurement results when the rotational distance is varied. Since Hall IC can detect only the magnetic field strength in one direction only, after measuring the data shown in Fig.
- FIG. 27 (c) with the magnetic sensitive direction of Hall IC oriented in the radial direction of the magnet rotor, The magnetic sensing direction of the Hall IC was directed toward the rotation method (circumferential direction) of the magnet rotor, and the second measurement was performed to obtain the data shown in Fig. 27 (d).
- the distance between the sensor and the magnet rotor is increased from 2 mm to 20 mm, the change is large when the Hall IC shown in FIGS. 27 (c) and 27 (d) is used, but FIG. 27 (a) The change in the case of using the sensor device shown in FIG. 27 (b) was relatively small.
- FIG. 27 (e) when the distance from the rotor surface (spacing: unit mm) is taken on the horizontal axis, It shows the output voltage characteristics by sensor device and Hall IC.
- Figure 27 (f) shows the sensor bridge output characteristics of the sensor device against the magnetic flux density.
- An 8-pole magnetized magnet rotor with a diameter of 32 mm was used. In the case of a sensor device, an almost constant output can be obtained even if the distance from the surface of the magnet rotor to the sensor device exceeds 10 mm, while when using a hole, the output is saturated near the rotor. Distortion occurs in the output waveform.
- the rotation angle detecting device of the present invention using this sensor bridge, the fluctuation of the output voltage and the fluctuation of the output waveform with respect to the applied magnetic field of the output waveform are small as described above. Therefore, it can be said from this measurement result that the resistance against resistance deviation of the sensor, etc. due to the characteristic fluctuation of the magnet rotor, the temperature fluctuation of the magnet rotor, etc. is strong.
- the rotation angle detection device of the present invention can stably detect the angle signal.
- a rotation angle detection device In order to enhance the resistance to center fluctuation of the rotation axis, it is preferable to construct a rotation angle detection device by using a plurality of device groups shown in FIG.
- the resistance to center fluctuation means that the rotation angle is accurately detected even if the distance between the magnet rotor and the sensor device is shifted due to the center of rotation axis being shifted.
- An example is shown in Figure 28. It has a structure in which two sensor device groups of the first sensor device group (sensor devices 12a and 12b) and the second sensor device group (sensor devices 12o and 12p) are shifted by 90 deg. In mechanical angle. .
- FIG. 29 An embodiment in which a disconnection detection function is added to the circuit shown in FIG. 10 is shown in FIG. 29 (the part on the right side of the calculation part is not shown).
- Two sensor devices with two sensor bridges In the rotation angle detection device provided, when the outputs from the four spin valve type giant magnetoresistance elements are arranged by sine signals, four signals of 90 degrees different in phase from one another can be obtained. The average value of these four signals is always constant between the normalized maximum and minimum values. Therefore, the output signals of the sensor bridges X01, Y01, X02 and Y02 'may be branched via resistors (electrical resistance) and averaged (using the operational amplifier 26g) to obtain a constant average signal value at all times. It is possible.
- the average signal value becomes different from the average value Vavg in the normal state.
- This signal Vin is compared with the average value Vavg under normal conditions by the window comparator 29, and an error signal (Error) is generated at Vout to indicate abnormality detection.
- Error error signal
- a rotation angle detection device configured in the same manner as in FIGS. 22 (a) and 22 (b) except that the magnet rotor is replaced with an 8-pole magnet rotor 31 and that the sensor device is inclined by%. Are shown in FIG. 30 (a) and FIG. 30 (b). The effect of suppressing the electrical angle error of the rotation angle characteristics can be obtained by the inclination angle%.
- the magnet rotor 1 includes a ring-shaped permanent magnet la, a soft magnetic ring lb integrally formed on the inner peripheral side of the ring-shaped permanent magnet, and a non-magnetic ring-shaped pad magnet supporting the soft magnetic ring. It has a tar lc.
- the magnetic sensor unit 2 has a plate-like turn whose peripheral side faces the magnet rotor 1.
- the ring-shaped permanent magnet la is magnetized in two poles, and the direction of the magnetization is arranged to be orthogonal to the rotation axis of the magnet rotor.
- the housing 3 has a U-shaped angle 3a and a bolt 3c for fixing the circuit board 2c so that the sensor device 12a faces the magnet rotor 1 at a predetermined interval. Is provided.
- the plane of the circuit board 2c on which the sensor device is fixed is inclined with respect to the rotation axis of the magnet rotor. The details of the sensor device and the like will be described later.
- 31 (a) and 31 (b) have a housing in which the magnetic sensor unit 2 is installed.
- driving is performed so that the shaft of the machine tool rotates with the magnet rotor 1 and the magnetic sensor unit 2 facing each other.
- the magnet rotor 1 has a ring-shaped permanent magnet la made of NdFeB-based bonded magnet, a soft magnetic ring lb formed by molding soft iron powder and a binder, and the soft magnetic ring attached to a shaft (rotational shaft) For the S45C made of adapter lc.
- a full bridge circuit is formed by eight spin-valve giant magnetoresistance effect elements, and ten terminals 23 are formed using a nonmagnetic lead frame, and a resin is formed. The one molded with the base material was used.
- the sensor device 12a fixes the circuit board 2c to the housing 3 and configures and functions the circuit of FIG. 32 through the cable 2dl connected to the connector 2e.
- the housing 3 and the U-shaped angle 3a were made of nonmagnetic SUS316. The shape of the U-shaped angle depends on the press shape.
- the radius r of the magnet rotor 1 is 40 mm.
- the distance r to the center of the magnet is 3.5 mm, the magnet thickness t of the magnet rotor 1 is 25 mm, the housing 3
- the thickness T was 2 mm (a plate of 2 mm thickness was punched out and formed by drawing). Distance r 10 m
- the thickness t of the magnet rotor 1 It could be used without any problem in the case of 5 mm as well.
- the sensor device 12a used was the same as that used in Example 2.
- the spin-valve giant magnetoresistance effect elements shown in FIG. 9 (a), which are not shown, are formed on the nonmagnetic substrate by an underlayer (Cr) / fixed layer (Co / Ru / Co) / Cu layer / free layer (Co / MFe) / cap layer (Ta) / laminated in this order, patterned, provided with an electrode film for current conduction, and provided with an insulation coating.
- one sensor device has two bridge circuits, and a DC voltage is applied between Vcc and Gnd, By placing the sensor device in the magnetic field of the magnet rotor, differential outputs can be obtained between Vxl and Vx2 and between Vyl and Vy2, respectively.
- the differential outputs outputted from the sensor bridges A01 and B01 are amplified by the differential amplifiers (op amps 26a and 26b) shown in FIG. 32, and are digitally converted by the AD converter 27.
- the digital signal is angle-computed in the angle computing unit 28 and finally a signal (angle signal) corresponding to the electrical angle is output.
- the phase difference between the output signal of sensor bridge A01 and the output signal of sensor bridge B01 is 90 degrees, and when the output signal of A01 is regarded as a cosine signal, the output signal of B01 may be regarded as a sine signal. It is possible to obtain an angle signal indicating the rotation angle (absolute angle) of the magnet rotor corresponding to 0 deg. To 360 deg. By performing arctangent operation (arctan) from these signals.
- the effective magnetic flux density amplitude ratio K between ⁇ and B is 1.0. At this time, the outputs of the sensor bridges ⁇ , ⁇ in the sensor device become sine waves, and no angular error occurs even if the arc tangent operation is performed.
- FIGS. 34 (a) and 34 (b) show a rotation angle detection device in which the sensor device 12b is disposed on the outer periphery of the magnet rotor 11 magnetized in two poles.
- the sensor device 12b is disposed on the outer periphery of the magnet rotor 11 magnetized in two poles.
- Disc-shaped permanent magnet 11 has a diameter 2 r of 26 mm, a thickness t of 8 mm (thickness in the direction of the rotation axis), from the Z axis to the center of the sensor device 12 b The distance r + r was 23 mm.
- Example 5 shows an example of the sensor arrangement angle ⁇ force deg.
- the present invention is not limited to this point.
- Fig. 36 (a) shows the spatial magnetic flux density amplitude ratio and the optimum sensor tilt angle X at each sensor arrangement angle ⁇ .
- the optimum% force at the same ⁇ is at the ⁇ plane
- the inclination of the magnetic sensitive surface of the sensor bridge can be both positive and negative.
- the value of 1 and 2 can be obtained for any ⁇ , but not less than 1 and the effective flux density can not be reduced.
- the line XX (line connecting two X marks) does not correspond to the embodiment of the present invention, and the area of Point 6 in FIGS. 36 (b), 36 (c) and 37 described later. It becomes the range excluded from.
- the sensor device can not be placed in a double-ended type in the area overlapping the rotation axis that penetrates the magnet rotor.
- FIG. 36 (a) shows the relationship between the sensor arrangement angle ⁇ and the optimum sensor inclination angle ⁇ .
- Angle error 1 deg.
- the range of the sensor arrangement angle ⁇ and the sensor inclination angle% that fall within the range is shown by the dark area in Fig. 36 (b).
- an allowable range of at least 2 to 5 deg. Can be obtained at each point of the sensor inclination angle%.
- the sensor arrangement The angle ⁇ has an acceptable range of at least about 1 to 3 deg.
- the range of the sensor arrangement angle ⁇ and the optimum sensor tilt angle X that fall within the angle error 2 ° is shown by the dark areas in Fig. 36 (c). The tolerance range further expanded in a band.
- the rotation angle characteristics of this rotation angle detection device are shown in FIGS. 38 (c) and 38 (d).
- the distance (r + r) projected on the XY plane to the center of the disk-like permanent magnet 11 and the center of the sensor device 12b (center of the magnetosensitive surface) was also 23 mm.
- the disc magnet 11 was supported by a shaft l id.
- the optimum sensor placement angle ⁇ force, etc. are deviated by 2 deg. Or more, so a slight angular error occurs.
- the rotation angle could be detected with high accuracy by applying this rotation angle detection device to the motor.
- Figures 39 (a) and 39 (b) show a rotation angle detection device in which a sensor device 12b is provided in the vicinity of the end face of a cylindrical permanent magnet lib magnetized in two poles.
- a cylindrical coordinate system was used with the center of the cylindrical permanent magnet l ib as the origin and the rotation axis as the Z axis.
- a magnet rotor equivalent to the shaft l id shown in Fig. 38 (a) was provided on the end face of the circular columnar permanent magnet l ib. This rotation angle detection device was applied to a motor, and the rotation angle was detected with high accuracy by force S.
- FIG. 40 (a) and FIG. 40 (b) The positional relationship between the magnetic flux of the two-pole magnet and the sensor device in the present invention is shown in FIG. 40 (a) and FIG. 40 (b).
- FIG. 40 (a) magnetic lines of force generated from the magnetic pole surface of the two-pole disc-shaped magnet 11 of the magnet rotor are represented by curved arrows.
- the magnetization direction of the magnet is the X axis direction, and
- the center of the magnetosensitive surface of the vice is on the X axis r away from the magnet surface.
- Chair 32d is receiving bribes.
- ⁇ corresponds to the rotation angle of the magnet rotor.
- the Z axis is an axis passing through the center 0 of the central disk-like magnet 11 and orthogonal to the rotation plane of the magnet, and corresponds to the rotation axis of the magnet rotor.
- Fig. 40 (b) shows the arrangement of three sensor devices.
- the sensor device 32d ' is located at the sensor arrangement angle ⁇ ' and is inclined X 'with respect to the XY plane.
- the center of the sensor device 32 d ′ is h ′ away from the plane passing through the thickness center point of the disc-like magnet 11 and perpendicular to the rotation axis in the Z-axis direction.
- the direction of the magnetic flux is inclined ⁇ ′ from the X axis.
- the thickness t of the magnet is the dimension in the Z-axis direction.
- the thickness center point of the magnet is a point where the center of the magnet in the X-Y cross section intersects with the center of the Z-axis cross section and corresponds to the origin of the XYZ axes.
- disk-shaped magnet 11 is replaced by a cylindrical magnet with a large thickness t, a ring-shaped magnet with a through hole formed at the center, or a rectangular plate-shaped magnet, the above-mentioned angle etc.
- the definition of is valid as well.
- FIGS. 41 (a) and 41 (b) The positional relationship between the magnetic flux of the magnet rotor (four or more poles) and the sensor device in the present invention is shown in FIGS. 41 (a) and 41 (b).
- FIG. 41 (a) the direction of magnetization in each magnetic pole of the ring-shaped permanent magnet 31 of the magnet rotor is represented by a large thick arrow, and the magnetic flux generated from the surface of the magnetic pole is represented by a large curved arrow.
- the sensor device 32f receives magnetic flux in the direction of the X axis.
- ⁇ corresponds to one wavelength (360 ° in electrical angle) of the sine signal when the surface magnetic flux density distribution is measured, and corresponds to the circumferential length of the magnetic pole surface of the ring-shaped permanent magnet 31.
- r is a ring permanent magnet
- the sensor device 32f receives a magnetic flux in the direction of the Y-axis.
- the Z axis is an axis passing through the center 0 of the hole of the ring-shaped permanent magnet 31 and orthogonal to the rotation plane of the magnet, which corresponds to the rotation axis of the magnet rotor.
- ⁇ is a mechanical angle that represents mechanical rotation of the magnet rotor.
- FIG. 41 (b) shows the arrangement of two sensor devices 32f and sensor devices 32f.
- Sensor tilt angle The sensor arrangement angle ⁇ ′, the sensor tilt angles ′, h ′ and ⁇ ′ are the same as in FIG. 40 (b).
- the thickness center point of the magnet is the point where the center of the ⁇ - ⁇ cross section of the magnet intersects with the center of the ⁇ axis cross section and corresponds to the origin of the ⁇ axis. In the hole of this ring magnet, it is possible to fix the shaft as the rotation axis force S.
- Magnetic flux density B and B when using a magnet rotor magnetized in 12 poles and having a shape with an inner diameter of 45 mm, an outer diameter of 50 mm, and a dimension of 4 mm in the rotational axis direction
- FIG. 42 (a) The dependence of the distance between the 0 0 magnet and the sensor device is shown in FIG. 42 (a).
- Space magnetic flux density amplitude ratio K determined from FIG. 42 (a) and preferred sensor inclination angle% of the sensor device for which the force was also calculated are shown in FIG. 42 (a).
- the component force is that the effective magnetic flux density amplitude ratio K can be set to 1 if the sensor inclination angle is about 45 60 deg.
- FIGS. 44 (a) and 44 (b) Still another rotation angle detection device configured using the multipolar magnet rotor 21 and one sensor device 12b is shown in FIGS. 44 (a) and 44 (b).
- FIGS. 46 (a) and 46 (b) Another rotation angle detection device configured by using the multipole magnet rotor 21 and one sensor device 12b is shown in FIGS. 46 (a) and 46 (b).
- FIG. 46 (b) is a cross-sectional view taken along the line AA of FIG. 46 (a).
- a ring-shaped soft magnetic yoke is provided on the inner circumferential surface side of the magnet rotor 21 as shown in FIG. 33 (a), and it is fixed by a shaft fixed to the through hole, but illustration is omitted.
- This rotation angle detector was applied to a motor, and the rotation angle could be detected with high accuracy.
- Example 12 show still another rotation angle detection device configured using the multipole magnet rotor 21 and one sensor device 12b.
- This rotation angle detection device can be applied to a motor to detect the rotation angle with high accuracy.
- Table 1 exemplifies the optimum combination of the number and shape of the magnet rotor pole, the distance from the magnet surface to the sensor device, the inclination angle X, the axis shift amount z, and the arrangement angle ⁇ calculated from z. .
- These configurations are combinations that minimize the angular error. From these arrangements, even if the value of the inclination angle X was changed by ⁇ 3 deg., The angle error maintained high accuracy of 1 deg. Or less. In addition, even if the value of the placement angle ⁇ was changed by ⁇ 3 deg., The angular error maintained high accuracy of 1 deg. Or less.
- FIG. 1 A rotating machine to which the rotation angle detecting device of the present invention is applied is schematically shown in FIG.
- the sensor device 72a is disposed offset in the Z-axis direction.
- This rotating machine is a motor, and it is in the frame 73c.
- the rotor 71a of a permanent magnet of 12 poles having a shaft 71b as a central axis, and a stator 73a with a stator coil 73b fixed on the inner peripheral surface of a frame 73c are installed.
- the shaft 71b is rotatably fixed to the frame 73c via a bearing (not shown).
- a magnet rotor 71c is provided coaxially with the shaft 71b so as to be adjacent to the rotor 71a.
- the sensor device 72a was placed on the frame 73c via the support 72d.
- the direction of the magnetic flux applied from the magnet rotor 71c was detected by the sensor device 72a, the output thereof was processed by an arithmetic circuit 72c, and the rotation angle of the magnet rotor 71c was output.
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- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
Claims
Priority Applications (2)
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US12/302,232 US8115479B2 (en) | 2006-11-21 | 2007-11-20 | Rotation-angle-detecting apparatus, rotating machine, and rotation-angle-detecting method |
JP2008524884A JP4273363B2 (ja) | 2006-11-21 | 2007-11-20 | 回転角度検出装置、回転機、及び回転角度検出法 |
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JP2007-038317 | 2007-02-19 | ||
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Also Published As
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US20090206827A1 (en) | 2009-08-20 |
JP2009025319A (ja) | 2009-02-05 |
JPWO2008062778A1 (ja) | 2010-03-04 |
JP4324813B2 (ja) | 2009-09-02 |
US8115479B2 (en) | 2012-02-14 |
JP4273363B2 (ja) | 2009-06-03 |
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