WO2003101678A1 - Dispositif d'attraction par pression negative et capteur de confirmation d'attraction - Google Patents
Dispositif d'attraction par pression negative et capteur de confirmation d'attraction Download PDFInfo
- Publication number
- WO2003101678A1 WO2003101678A1 PCT/JP2003/007083 JP0307083W WO03101678A1 WO 2003101678 A1 WO2003101678 A1 WO 2003101678A1 JP 0307083 W JP0307083 W JP 0307083W WO 03101678 A1 WO03101678 A1 WO 03101678A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- suction
- air
- negative pressure
- sensor
- nozzle
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/0409—Sucking devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/041—Incorporating a pick-up tool having multiple pick-up tools
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/082—Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S294/00—Handling: hand and hoist-line implements
- Y10S294/907—Sensor controlled device
Definitions
- the present invention relates to a negative pressure suction device and a suction confirmation sensor, and relates to a method of sucking air from an air suction port of a suction nozzle using a negative pressure to suck a component to a suction portion having an open air suction port.
- the present invention relates to a negative pressure suction device and a suction confirmation sensor for detecting the presence or absence of a component suction at the suction portion.
- a negative pressure suction device that sucks the component to a suction nozzle using a negative pressure
- a suction portion with an open air suction port is formed in the suction nozzle, and the negative pressure generated by a negative pressure generator such as an ejector or a vacuum pump causes the air to flow through the air suction port.
- a negative pressure generator such as an ejector or a vacuum pump
- a negative pressure suction device In such a negative pressure suction device, whether a desired component can be suctioned from a component supply unit such as a tape feeder, or a component falls while transporting the component from the component suction to the component mounting position on the printed wiring board. It is necessary to check the presence or absence of parts suction, such as whether or not the parts are not picked up. If the parts are not picked up, it is necessary to immediately execute the corresponding processing, for example, error processing such as re-sucking of the same parts or an alarm.
- error processing such as re-sucking of the same parts or an alarm.
- a reference pressure indicating the internal pressure of the air suction passage when the air suction port is open is set in advance, and the measured pressure value in the air suction passage is measured by the pressure sensor during the suction operation. Determines the presence or absence of suction based on whether or not the reference pressure value has been reached.
- the cross-sectional area of the air suction port of the suction nozzle tends to decrease as the components are downsized.
- the present invention has been made to solve such a problem, and provides a negative pressure suction device and a suction confirmation sensor that can reliably detect the presence or absence of component suction even when the air suction port of the suction nozzle has a small flow path cross-sectional area. It is intended to provide.
- a negative pressure suction device includes a suction nozzle having a suction portion having an open air suction port, generating a negative pressure, and using the negative pressure to form a suction nozzle.
- a negative pressure generator that sucks parts into the suction part by sucking air from the air suction port, and whether or not parts are sucked into the suction part based on changes in the flow rate of air sucked from the air suction port of the suction nozzle.
- a suction confirmation sensor that outputs an electrical signal indicating the pressure, a valve that controls suction of air from the suction nozzle using negative pressure, and an air suction passage that connects the suction nozzle, the suction confirmation sensor, the valve, and the negative pressure generator. It is equipped with.
- a base placed in the gas flow path a heater with a thin film formed on the surface of the base, a plurality of temperature sensors formed with a thin film on the surface of the base, and measurement with a temperature sensor Detecting means for measuring the gas flow rate based on the temperature distribution near the heater May be used.
- the suction confirmation sensor detects a change in the air flow rate measured in the air suction passage between the valve and the suction nozzle. And a detection means for outputting an electric signal indicating the change in the flow rate of air measured in the air suction passage near the suction nozzle among the air suction passages. Good.
- a plurality of suction nozzles for sucking air from the air suction port using a common negative pressure to suction individual components, and a suction confirmation sensor for each suction nozzle may be used.
- a nozzle provided at one open end and having an air suction port for sucking air may be used.
- a nozzle having an air suction hole in which the flow rate of air sucked from the air suction port by a negative pressure becomes a sound speed may be used.
- the air suction port has a flow passage cross-sectional area of a size such that the flow velocity of the air sucked from the air suction port by the negative pressure becomes a sonic speed, and the air suction port of the air suction port depends on the suction state of the component to the suction section.
- a device having an air suction hole whose opening area changes may be used.
- the suction nozzle further includes an air suction hole that opens to the air suction port and guides the air sucked from the air suction port to a nozzle inner chamber of the suction nozzle connected to the negative pressure generating device.
- the device may generate a negative pressure such that the pressure at the upstream end of the air inlet is more than twice as high as the pressure at the downstream end.
- the adsorption confirmation sensor includes a flow sensor for detecting a change in the flow rate of air, and detection means for outputting an electric signal based on an output from the flow sensor.
- the flow sensor includes a base arranged in the gas flow path, a heater formed on the surface of the base as a thin film, and a temperature sensor formed on the surface of the base as a thin film.
- the gas flow rate may be measured based on the temperature distribution near the heater measured by the temperature sensor.
- the detecting means is configured to control a suction of air from the suction nozzle of the negative pressure suction device based on a change in the flow rate of air measured in an air suction passage between the valve and the suction nozzle. It is also possible to output an electric signal indicating the presence / absence of component suction on the suction portion of the suction nozzle.
- the detection means may output an electric signal indicating whether or not the part is sucked to the suction part, based on a change in the flow rate of air measured in the air suction passage near the suction nozzle in the air suction passage.
- the detecting means has the air suction port of the suction nozzle of the negative pressure suction device as one opening end, and the air sucked through the air suction hole at which the flow rate of the air sucked from the air suction port is sonic. Based on the change in the flow rate, an electric signal indicating whether or not the component is sucked into the air suction port may be output.
- the detection means has an air suction port of the suction nozzle of the negative pressure suction device as one of the open ends, and has a flow passage area of a size such that the flow rate of air sucked from the air suction port is sonic.
- the opening area of the air suction port changes according to the state of component suction to the suction part of the suction nozzle, the presence or absence of the component suction to the air suction port is determined.
- the electric signal shown may be output.
- a connector for connecting to the air suction passage is provided.
- the temperature sensors include an upstream temperature sensor arranged on the upstream side in the gas flow direction, a downstream temperature sensor arranged on the downstream side, and an ambient temperature sensor arranged on the upstream peripheral portion of the base.
- the base has a cavity at the center thereof, and a diaphragm for thermally insulating the temperature sensor from the base is provided on the cavity.
- FIG. 1A and 1B are external views showing a negative pressure adsorption device according to one embodiment of the present invention.
- FIG. 2 is a sectional view showing the suction nozzle.
- FIG. 3A and FIG. 3B are configuration diagrams showing an adsorption confirmation sensor.
- 4A and 4B are configuration diagrams showing a flow sensor.
- 5A and 5B are output waveform diagrams showing the output of the suction confirmation sensor.
- FIG. 6 is an explanatory diagram showing operating characteristics of the suction nozzle. Detailed description of the embodiment
- FIG. 1A and 1B are external views of a negative pressure adsorption device according to one embodiment of the present invention.
- FIG. 1A is a front view
- FIG. 1B is a side view.
- FIG. 2 is a configuration diagram of the suction nozzle.
- FIG. 1A and 1B show an example of a negative pressure suction device used in a mounting device for mounting chip components on a printed wiring board.
- a description will be given of an example of a negative pressure suction device used in a modular set (XY type) mounting device in which a plurality of suction nozzles are arranged on a straight line, but a plurality of suction nozzles are arranged on a circumference.
- the present invention is similarly applicable to a single-tray type mounting device.
- the negative pressure suction device of the present invention is provided with a suction confirmation sensor 1, a suction nozzle 2, air suction passages 4A to 4C, a valve 5, a pipe 6, a negative pressure generator 7, and a head unit 9.
- a plurality of suction nozzles 2 are detachably mounted at equal intervals, and the nozzle unit 3 provided at the tip of the suction nozzle 2 can be moved up and down and in the vertical direction. Controls the rotation of the shaft.
- the head unit 9 With respect to the plane (XY) position of the suction nozzle 2, for example, the head unit 9 itself is carried to a desired position by an XY moving mechanism (not shown) of the mounter device.
- Each suction nozzle 2 is commonly connected to the pipe 6 via the air suction passage 4A, the suction confirmation sensor 1, the air suction passage 4B, the valve 5, and the air suction passage 4C, respectively. Part suction is performed using the negative pressure generated in step 7.
- the valve 5 controls the supply of the negative pressure / atmospheric pressure to the suction nozzle 2 to control the suction release of the component.
- the suction confirmation sensor 1 comprises a gas flow meter, and detects the presence or absence of a component suction by the suction nozzle 2 based on the flow rate of air sucked from the suction nozzle 2.
- the suction nozzle 2 mainly includes a cylindrical nozzle body 26 having an inner chamber 24, and a lower end having a hole 22 connected to the inner chamber 24.
- the holder 21 is integrally formed with the nozzle body 26.
- the nozzle portion 3 has a cylindrical shape having a nozzle inner chamber 36, and is fitted into the hole 22 of the holder portion 21 to be held up and down freely.
- a cylindrical tip portion 32 are integrally formed.
- the distal end portion 32 has a suction portion 34 at a lower end thereof for sucking a component having the air suction opening 33 opened therein.
- the inside has the air suction opening 33 as one opening end and the other end.
- An air suction hole 35 is formed in the nozzle inner chamber 36 which is connected to the negative pressure generator 7.
- FIGS. 3A, 3B, 4A, and 4B are configuration diagrams of a suction confirmation sensor, FIG. 3A is an external view, and FIG. 3B is a front sectional view.
- 4A and 4B are configuration diagrams of a flow sensor used in an adsorption confirmation sensor, FIG. 4A is a perspective view, and FIG. 4B) is a cross-sectional view along AA.
- the suction confirmation sensor 1 has a rectangular parallelepiped shape as a whole.
- a flow passage 12 through which air flows is formed in a case 10 made of a molded product made of plastic resin, and a flow rate of the air flowing through the flow passage 12 is determined.
- the flow sensor 14 to be measured is arranged in the flow path 12.
- an inlet and an outlet of the flow path 12 are opened, and connectors for connecting the air suction passages 4 A and 4 B, respectively. 11 A and 11 B are provided.
- the flow sensor 14 is mounted and held on the flow path 12 side of the substrate 13, and the flow sensor 14 is controlled by the flow sensor 14 on the back side of the substrate 13, that is, on the side where the flow sensor is not mounted.
- a detection circuit 15 detection unit that measures the air flow rate in the path 12 and outputs an electric signal 1 A indicating whether or not the component is suctioned by the suction nozzle 2 from the wiring 16 is mounted. That is, the substrate 13 forms a wall of the flow path.
- the flow sensor 14 has a heater 61, an upstream temperature sensor 62, and a downstream temperature sensor on the surface of a base 50 made of a base material such as a silicon chip.
- a base material such as a silicon chip.
- an ambient temperature sensor 64 and an electrode 60 are formed as a thin film using a pattern of platinum or the like and covered with an insulating film layer 52.
- the heater 61 is located at the center of the base 50, the upstream temperature sensor 62 is located upstream in the gas flow direction, and the downstream temperature sensor 63 is located downstream on the opposite side. . Further, the ambient temperature sensor 64 is disposed in a peripheral portion on the upstream side of the base 50. You.
- a part of the base material is removed by a process such as anisotropic etching to form a cavity (recess space) 54.
- the downstream temperature sensor 63 is formed on a diaphragm 51 that is thermally isolated from the base 50. Further, the diaphragm 51 has a large number of ventilation holes 53 penetrating in the thickness direction thereof so that air can flow through the cavity 54.
- the principle of operation of the flow sensor 14 is that the heater 61 heats the air so that it becomes higher than the air temperature measured by the ambient temperature sensor 64 by a certain temperature, and the temperature distribution is changed to the upstream temperature sensor 62 and the downstream side.
- the air flow rate is measured by measuring with the temperature sensor 63.
- the size of the sensor itself can be reduced, and the temperature sensor and the base are thermally insulated by the diaphragm structure, so that high sensitivity is obtained without being affected by the ambient temperature. High response can be obtained and power consumption can be reduced.
- 5A and 5B are output waveform diagrams (actually measured values) showing the output from the suction confirmation sensor 1 of the negative pressure suction device.
- FIG. 6 is an explanatory diagram showing the operating characteristics of the suction nozzle.
- the negative pressure generated from the negative pressure generator 7 causes air to be sucked in from the air suction port 3 3 of the nozzle section 3, and the air suction holes 35 and the nozzle inner chamber It is led to the inner room 24 through 36. After that, it goes to the air suction passage 4A through the hole 25 provided in the side wall of the nozzle body 26 and enters the suction confirmation sensor 1. Then, the flow rate of the air is measured by the suction confirmation sensor 1 and reaches the negative pressure generator 7 via the air suction passage 4B, the valve 5, the air suction passage 4C, and the pipe 6. As a result, the component located directly below the air suction port 33 of the suction nozzle 2 is sucked by the suction section 34.
- the opening area of the air suction port 33 is reduced by the components, so that the amount of air sucked from the air suction port 33 decreases, and the output of the suction confirmation sensor 1 shows a low output voltage. .
- atmospheric pressure fluctuates due to weather, temperature or altitude.
- the negative pressure generated by the negative pressure generating device 7 has a vertical fluctuation range according to the structural factors of the device. Further, as shown in FIG. 1A, when the same negative pressure is shared by a plurality of suction nozzles, the negative pressure fluctuates due to the operation of another suction nozzle.
- the present invention focuses on the characteristics of the suction nozzle 2 described above, and The system measures the mass flow rate of air sucked from the device to detect the presence or absence of component suction.
- a negative pressure suction device used in a mounting device for mounting chip components on a printed wiring board has a small flow passage cross-sectional area of an air suction hole 35 (an air suction port 33) of a suction nozzle 2 and a desired component suction.
- the air is suctioned by the negative pressure generator 7 with a negative pressure having a sufficient pressure difference from the atmospheric pressure.
- the air velocity is constant, that is, the sound velocity (at 344 m / s: at a temperature of 20 ° C).
- the air suction hole 35 is extremely thin and has a sufficient pressure ratio due to a sufficient negative pressure required for sucking the components. As described above, it is used in the saturation section where the air velocity is the sound velocity. That is, in the state where the above-mentioned pressure ratio is maintained, even when the negative pressure fluctuates, the air flow velocity in the air suction hole 35 becomes constant.
- a high SN ratio can be obtained as a flow rate signal without being affected by disturbance, that is, pressure fluctuation caused by the operation of the negative pressure generator and the suction nozzles arranged in parallel.
- the mass flow rate is obtained by the product of the opening area and the sound velocity, the mass flow rate depends on the opening area.
- the opening area changes in accordance with the presence / absence of parts suction, if this mass flow rate is detected, it is possible to accurately determine the increase / decrease of the opening area, that is, the presence / absence of parts suction, depending on the magnitude of the mass flow rate.
- This makes it possible to accurately determine the open state, so it is not significantly affected by the suction position of the parts, and the suction part has a three-dimensional configuration, and it is possible to make a good determination even if the suction head has a part that is sucked diagonally. it can.
- the suction nozzle for sucking small parts such as electronic parts has been described as an example. However, in the case where another article is sucked by a negative pressure, the suction nozzle is used.
- An air suction hole having a flow path cross-sectional area where the air flow velocity is constant (sound velocity) in the open state or a flow path cross-sectional area where the above pressure ratio is obtained may be used.
- the air suction hole 35 formed inside the distal end portion 34 of the suction nozzle 2 is formed to be substantially constant from the upstream end to the downstream end in the flow path cross-sectional area as described above.
- the air suction hole 35 has the above-described cross-sectional area at the air suction port 33, and the cross-sectional area of the passage at the air suction port 33 is equal to the air suction port. 3 It is only necessary that the air passage from 3 to the pipe 6 be the narrowest. In addition, when expressed from the negative pressure side, a negative pressure at which the ratio of the pressures at both ends of the air suction holes 35 of the suction nozzle 2 becomes twice or more may be used.
- the pressure at the downstream end of the air suction hole 35 may be measured, but the pressure measured at the nozzle inner chamber 36, the inner chamber 24 or the air suction passage 4A, and the pressure measurement position It may be estimated from the pressure gradient from the air suction hole 35 to the downstream end of the air suction hole 35.
- 5A and 5B described above show the output voltage when the air suction port 33 (the air suction hole 35) uses the suction nozzle 2 having a flow path cross-sectional area of ⁇ 0.2. For comparison, the output voltage when using a pressure sensor is shown.
- This pressure sensor is a general one having a measurement span corresponding to the negative pressure output (absolute pressure of about 30 kPa) of the negative pressure generator 7 widely used in the mounter device.
- both output voltages in the open state are described together, and the output characteristic of the pressure sensor 72 compared to the output characteristic 71 of the air flow sensor is the output difference between before and after the component adsorption. Is small.
- the output characteristics fluctuate due to the above-mentioned disturbance, and the SN ratio is low.Therefore, a margin with the reference pressure value of 74 cannot be maintained, and the pressure sensor is used. It is difficult to judge the presence / absence of sucked components.
- any position on the air suction passages 4A and 4B connecting between the suction nozzle 2 and the valve 5 can be used. Even if it is located at the position, the flow rate of the air sucked from the suction nozzle 2 can be measured. Since the air flow takes a little time, it is better to arrange the suction confirmation sensor 1 near the suction nozzle 2 in the air suction passages 4 A and 4 B, and the delay time of component suction detection Can be reduced.
- the suction nozzle having the suction portion having the air suction port opened is provided, and the component is suctioned to the suction portion by suctioning air from the air suction port of the suction nozzle using negative pressure.
- the suction confirmation sensor is used to output an electric signal indicating the presence or absence of component suction to the suction section based on the change in the flow rate of the air sucked from the air suction port of the suction nozzle.
- the negative pressure suction device and the suction confirmation sensor according to the present invention are suitable for transporting small components such as electronic components, and particularly suitable for detecting the presence or absence of component suction at the suction portion. I have.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Operations Research (AREA)
- Manipulator (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Measuring Volume Flow (AREA)
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE60331430T DE60331430D1 (de) | 2002-06-04 | 2003-06-04 | Unterdruckanziehungsvorrichtung und anziehungsbestätigungssensor |
CNB038147122A CN100469539C (zh) | 2002-06-04 | 2003-06-04 | 真空拾取和放置装置以及拾取和放置确认传感器 |
US10/517,363 US7261350B2 (en) | 2002-06-04 | 2003-06-04 | Negative pressure attraction device and attraction confirming sensor |
KR1020047019693A KR100599373B1 (ko) | 2002-06-04 | 2003-06-04 | 진공흡착장치 및 흡착확인센서 |
EP03736029A EP1514651B1 (en) | 2002-06-04 | 2003-06-04 | Negative pressure attraction device and attraction confirming sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002162870A JP3905793B2 (ja) | 2002-06-04 | 2002-06-04 | 吸着確認センサ |
JP2002-162870 | 2002-06-04 |
Publications (1)
Publication Number | Publication Date |
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WO2003101678A1 true WO2003101678A1 (fr) | 2003-12-11 |
Family
ID=29706618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2003/007083 WO2003101678A1 (fr) | 2002-06-04 | 2003-06-04 | Dispositif d'attraction par pression negative et capteur de confirmation d'attraction |
Country Status (7)
Country | Link |
---|---|
US (1) | US7261350B2 (ja) |
EP (1) | EP1514651B1 (ja) |
JP (1) | JP3905793B2 (ja) |
KR (1) | KR100599373B1 (ja) |
CN (1) | CN100469539C (ja) |
DE (1) | DE60331430D1 (ja) |
WO (1) | WO2003101678A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005090011A1 (ja) * | 2004-03-17 | 2005-09-29 | Koganei Corporation | 真空吸着ユニット |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006281635A (ja) * | 2005-03-31 | 2006-10-19 | Yushin Precision Equipment Co Ltd | 成形品吸引取出し捕捉装置 |
US8290624B2 (en) | 2007-04-26 | 2012-10-16 | Adept Technology, Inc. | Uniform lighting and gripper positioning system for robotic picking operations |
TWI463580B (zh) | 2007-06-19 | 2014-12-01 | Renesas Electronics Corp | Manufacturing method of semiconductor integrated circuit device |
US8550523B2 (en) * | 2007-06-22 | 2013-10-08 | Data I/O Corporation | Pick and place system |
US20090142169A1 (en) * | 2007-11-30 | 2009-06-04 | Teradyne, Inc. | Vacuum Assisted Manipulation of Objects |
WO2009073503A2 (en) * | 2007-11-30 | 2009-06-11 | Teradyne, Inc. | Vacuum assisted manipulation of objects |
CN101664931B (zh) * | 2009-09-23 | 2011-06-22 | 清华大学 | 可调压力并带有力传感器的机械臂 |
US20110209320A1 (en) * | 2010-02-26 | 2011-09-01 | Abb Inc. | Vision Guided Robotic Grommet Installation |
JP5478321B2 (ja) * | 2010-03-26 | 2014-04-23 | アズビル株式会社 | 熱式流量センサおよび負圧吸着装置 |
JP5492635B2 (ja) * | 2010-03-30 | 2014-05-14 | アズビル株式会社 | 熱式流量センサおよび負圧吸着装置 |
JP5085749B2 (ja) * | 2011-02-21 | 2012-11-28 | ファナック株式会社 | 棒状部材の搬送装置 |
CN102294692B (zh) * | 2011-07-27 | 2014-02-26 | 苏州大学 | 一种机械手 |
JP5129371B1 (ja) * | 2011-07-27 | 2013-01-30 | ファナック株式会社 | 重量計測機能付き吸着式ロボットハンド |
JP5337226B2 (ja) * | 2011-11-09 | 2013-11-06 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
JP2012121136A (ja) * | 2012-02-09 | 2012-06-28 | Seiko Epson Corp | 搬送装置 |
WO2013145228A1 (ja) * | 2012-03-29 | 2013-10-03 | 富士機械製造株式会社 | 部品実装機 |
US8777286B2 (en) * | 2012-04-27 | 2014-07-15 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Unpacking device for glass substrate |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0572067A (ja) * | 1991-09-10 | 1993-03-23 | Smc Corp | 圧力値設定方法 |
EP0603396A1 (en) | 1991-09-09 | 1994-06-29 | Smc Kabushiki Kaisha | Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method |
JPH07314371A (ja) * | 1994-05-27 | 1995-12-05 | Advantest Corp | デバイスの空気式吸着搬送装置 |
JPH11333774A (ja) * | 1998-05-22 | 1999-12-07 | Ricoh Co Ltd | シート状ワーク吸着・移載ハンド |
JP2000259255A (ja) * | 1999-03-11 | 2000-09-22 | Ckd Corp | ガス供給制御装置 |
JP2002071416A (ja) * | 2000-08-31 | 2002-03-08 | Hitachi Ltd | 熱式空気流量センサ及び内燃機関制御装置 |
JP2003194608A (ja) * | 2001-12-26 | 2003-07-09 | Ckd Corp | 熱式流量計 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6042332U (ja) | 1983-08-29 | 1985-03-25 | 東邦瓦斯株式会社 | 除湿機 |
US4653741A (en) * | 1986-02-10 | 1987-03-31 | Brantjen & Kluge, Inc. | Vacuum flow sensor |
EP0784200A3 (de) * | 1996-01-12 | 1998-02-11 | Landis & Gyr Technology Innovation AG | Anordnung zur Durchflussmessung eines gasförmigen Stoffes |
JP4171847B2 (ja) * | 1998-01-30 | 2008-10-29 | 澁谷工業株式会社 | 半田ボールマウント装置 |
JP2000100913A (ja) * | 1998-09-21 | 2000-04-07 | Canon Inc | 板状体の吸着装置及びその制御方法 |
JP3269041B2 (ja) * | 1999-02-23 | 2002-03-25 | 三洋電機株式会社 | ノズル詰まり検出装置 |
EP1124114A4 (en) | 1999-06-14 | 2007-01-03 | Yamatake Corp | FLOW SPEED DETECTOR |
JP4598240B2 (ja) | 1999-06-24 | 2010-12-15 | アスリートFa株式会社 | ボール搭載装置及びボール搭載方法 |
DE10140248B4 (de) * | 2001-08-09 | 2006-09-28 | J. Schmalz Gmbh | Unterdruckhandhabungseinrichtung |
-
2002
- 2002-06-04 JP JP2002162870A patent/JP3905793B2/ja not_active Expired - Fee Related
-
2003
- 2003-06-04 KR KR1020047019693A patent/KR100599373B1/ko active IP Right Grant
- 2003-06-04 US US10/517,363 patent/US7261350B2/en not_active Expired - Lifetime
- 2003-06-04 EP EP03736029A patent/EP1514651B1/en not_active Expired - Lifetime
- 2003-06-04 WO PCT/JP2003/007083 patent/WO2003101678A1/ja active Application Filing
- 2003-06-04 CN CNB038147122A patent/CN100469539C/zh not_active Expired - Fee Related
- 2003-06-04 DE DE60331430T patent/DE60331430D1/de not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0603396A1 (en) | 1991-09-09 | 1994-06-29 | Smc Kabushiki Kaisha | Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method |
JPH0572067A (ja) * | 1991-09-10 | 1993-03-23 | Smc Corp | 圧力値設定方法 |
JPH07314371A (ja) * | 1994-05-27 | 1995-12-05 | Advantest Corp | デバイスの空気式吸着搬送装置 |
JPH11333774A (ja) * | 1998-05-22 | 1999-12-07 | Ricoh Co Ltd | シート状ワーク吸着・移載ハンド |
JP2000259255A (ja) * | 1999-03-11 | 2000-09-22 | Ckd Corp | ガス供給制御装置 |
JP2002071416A (ja) * | 2000-08-31 | 2002-03-08 | Hitachi Ltd | 熱式空気流量センサ及び内燃機関制御装置 |
JP2003194608A (ja) * | 2001-12-26 | 2003-07-09 | Ckd Corp | 熱式流量計 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1514651A4 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005090011A1 (ja) * | 2004-03-17 | 2005-09-29 | Koganei Corporation | 真空吸着ユニット |
Also Published As
Publication number | Publication date |
---|---|
US7261350B2 (en) | 2007-08-28 |
KR20050019114A (ko) | 2005-02-28 |
EP1514651A4 (en) | 2008-09-10 |
US20050200142A1 (en) | 2005-09-15 |
EP1514651B1 (en) | 2010-02-24 |
CN1662348A (zh) | 2005-08-31 |
KR100599373B1 (ko) | 2006-07-12 |
EP1514651A1 (en) | 2005-03-16 |
JP2004009166A (ja) | 2004-01-15 |
CN100469539C (zh) | 2009-03-18 |
JP3905793B2 (ja) | 2007-04-18 |
DE60331430D1 (de) | 2010-04-08 |
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