WO1998043295A1 - Plaquette de circuit et son procede de production - Google Patents

Plaquette de circuit et son procede de production Download PDF

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Publication number
WO1998043295A1
WO1998043295A1 PCT/JP1998/001209 JP9801209W WO9843295A1 WO 1998043295 A1 WO1998043295 A1 WO 1998043295A1 JP 9801209 W JP9801209 W JP 9801209W WO 9843295 A1 WO9843295 A1 WO 9843295A1
Authority
WO
WIPO (PCT)
Prior art keywords
insulating base
circuit board
polyimide
electrode
melting point
Prior art date
Application number
PCT/JP1998/001209
Other languages
English (en)
French (fr)
Inventor
Hideyuki Kurita
Satoshi Takahashi
Akira Tsutusmi
Masahiro Fujimoto
Original Assignee
Sony Chemicals Corp.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Chemicals Corp. filed Critical Sony Chemicals Corp.
Priority to AU64205/98A priority Critical patent/AU6420598A/en
Priority to US09/194,161 priority patent/US6323434B1/en
Publication of WO1998043295A1 publication Critical patent/WO1998043295A1/ja

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
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    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/4985—Flexible insulating substrates
    • H—ELECTRICITY
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
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    • H01L2224/05573—Single external layer
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16237—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area disposed in a recess of the surface of the item
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
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    • H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
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    • H01L2924/15174—Fan-out arrangement of the internal vias in different layers of the multilayer substrate
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    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0154—Polyimide
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0364—Conductor shape
    • H05K2201/0367—Metallic bump or raised conductor not used as solder bump
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
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    • H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
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    • H05K2201/09372—Pads and lands
    • H05K2201/09481—Via in pad; Pad over filled via
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    • H05K2201/09563—Metal filled via
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10378—Interposers
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    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0756—Uses of liquids, e.g. rinsing, coating, dissolving
    • H05K2203/0759—Forming a polymer layer by liquid coating, e.g. a non-metallic protective coating or an organic bonding layer
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    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
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    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
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    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method

Definitions

  • the present invention relates to a circuit board for mounting a semiconductor element, and more particularly to a circuit board for mounting a semiconductor element.
  • Harada can respond to finer pitch and higher density mounting of device wiring
  • the present invention relates to a circuit board and a method of manufacturing the same.
  • circuit board for example, a circuit board having a configuration described in Japanese Patent Application Laid-Open No. 6-727293 has been known.
  • the semiconductor device 101 is embedded so that the conductive circuit 105 is not exposed from both sides of the insulator layers 103 and 104.
  • the conductive paths 106 and 107 are formed in pairs on both sides of the conductive circuit 105 so as to deviate in the surface direction of the conductive circuit 105.
  • the conductive paths 106 and 107 are connected to the bumps 108 and 109, respectively, so that the conductive circuit 105 and the bumps 108 and 109 are connected to the conductive paths 110 and 109, respectively. Conducted through 6, 107.
  • the bumps 108 formed on one of the conductive paths 106 of the film carrier 102 come into contact with the electrodes 112 formed on the substrate 111 of the semiconductor element 110 by contact with the bumps 108. They are electrically connected, so that the film carrier 102 has the semiconductor element 110 mounted thereon.
  • an insulating resin layer 113 is formed so as to cover the semiconductor element 110 so as to be in contact with the upper surface of the insulator layer 103.
  • the conductive circuit 105 is sandwiched from both sides by the film-like insulator layers 103 and 104, these are bonded using an adhesive or the like. Therefore, there is a problem that the manufacturing process is complicated.
  • the bumps 109 projecting below the insulating layer 104 are formed by reflow soldering. Soldering to the lead pattern 1 16 of the semiconductor device, but at this time, even the bumps 109 for connection of the semiconductor device 110 are melted, and the mounting position of the semiconductor device 110 is shifted. In some cases, inconvenience occurred.
  • the present invention has been made in view of the above-mentioned problems, and a circuit board in which an electrode for IC connection and an electrode for mother board connection are provided on a circuit board on which a conductor circuit is provided on an insulating base material.
  • An object of the present invention is to provide a circuit board and a method for manufacturing the same, which can simplify the manufacturing process without the need for a bonding process between the insulating substrate and the conductive circuit.
  • the present invention provides a circuit board having an electrode for IC connection and an electrode for mother board connection on a circuit board having a conductor circuit provided on an insulating base material. It is an object of the present invention to provide a circuit board which can be securely mounted by melting only a surface layer portion of a metal projection for connecting a mother board when soldering to a board, and a method of manufacturing the same. Disclosure of the invention
  • the circuit board of the present invention is a circuit board for mounting an IC element on a motherboard board, and is obtained by terminating the imidization reaction of a polyamic acid that is a precursor of the polyimide.
  • a first insulating base made of: a conductive circuit provided on the first insulating base; and a conductor circuit provided on the first insulating base.
  • a second insulating base made of polyimide obtained by terminating the imidization reaction of polyamic acid, which is a precursor of polyimide, provided on the first insulating base provided with the path.
  • a circuit board of the present invention is a circuit board for mounting an IC element on a motherboard board, wherein the first insulating base material and a conductor provided on the first insulating base material are provided.
  • the melting point of the surface layer of the metal projection of the electrode for connecting the IC should be at least 50 Ā° C. higher than the melting point of the metal projection of the electrode for connecting the mother board. Can also.
  • a polyimide obtained by terminating an imidization reaction of a polyamic acid, which is a precursor of the polyimide is used. Can also.
  • a method of manufacturing a circuit board of the present invention is a method of manufacturing a circuit board for mounting an IC element on a motherboard board, and comprises dissolving a polyimide precursor solution on a metal foil. Coating and terminating the imidization reaction to form a first insulating base layer made of polyimide. Providing a conductor circuit on the first insulating base material by processing the metal foil; and providing a precursor of polyimide on the first insulating base material layer provided with the conductive circuit. Forming a second insulating base layer made of polyimide by applying a polyamic acid solution and terminating the imidization reaction; and forming a mother-board board connected to the conductor circuit. Forming an electrode protruding from the first insulating base material; and forming an Ic connection electrode connected to the conductor circuit from the second insulating base material. I do.
  • the method further includes forming a through hole for forming an electrode by photolithography after applying a polyamic acid solution to the first and second insulating base layers. You can also have one.
  • the step of forming a metal protrusion on the surface of the mother board substrate connecting electrode includes the steps of: Forming a metal protrusion higher than the melting point of the metal protrusion of the electrode for one board substrate.
  • the first and second insulating base layers are coated with a polyamic acid solution and then formed through holes for electrode formation by photolithography, which makes it easier than in the prior art.
  • a through hole for forming an electrode can be provided on the substrate.
  • plating or the like is performed on the surface of the metal protrusion for IC connection.
  • a metal layer such as solder
  • the melting point of the surface layer of the metal projection can be made higher than the melting point of the metal projection for mother-board board connection, especially the surface layer.
  • the circuit board is formed by soldering.
  • the circuit board is formed by soldering.
  • the melting point of the surface portion of the metal protrusion for connecting the IC is at least 50 Ā° C. higher than the melting point of the metal protrusion for connecting the mother board, Only the solder layer formed on the surface layer of the metal projection for connection can be reliably melted.
  • FIG. 1a to 1j are process diagrams sequentially showing a method of manufacturing a circuit board according to an embodiment of the present invention
  • FIG. 2 is a diagram showing conductors formed on the circuit board according to the embodiment. It is a top view showing an example of a circuit pattern.
  • FIGS. 3a to 3d are process diagrams showing a method of mounting an IC chip using the circuit board of the embodiment, and FIG. 4 is a cross-sectional view for explaining a conventional technology. is there. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIGS. 1a to 1 are process diagrams sequentially showing a method of manufacturing a circuit board according to the present embodiment.
  • the circuit board according to the present embodiment is applied to a film carrier for a CSP (Chip Size / Scale Package).
  • a CSP Chip Size / Scale Package
  • a copper foil 1 having an area slightly larger than the IC chip is prepared, and a polyamic acid mixed solution, which is a precursor of polyimide, is applied to the entire upper surface of the copper foil 1.
  • a polyamic acid layer 2a is formed.
  • the thickness of the copper foil 1 is not particularly limited, it is preferably about 1 to 50 ā‡ , more preferably 8 to 18 ā‡ m.
  • the thickness of the polyamic acid layer 2a is not particularly limited, but is preferably about 5 to 75 ā‡ m, and more preferably 5 to 25 ā‡ ā‡ .
  • through holes 3 for forming bumps are formed in predetermined portions of the polyimide acid layer 2a by a known photolithography process. That is, a photo resist is applied on the polyamide acid layer 2a, dried, exposed and developed to form a predetermined resist pattern (not shown). Then, the portion corresponding to the through hole 3 is etched to remove the resist pattern, thereby obtaining the substrate 4 having the through hole 3 for forming a bump.
  • the diameter of the through hole 3 is preferably from 50 to 300 ā‡ m, and more preferably from 100 to 200 ā‡ m.
  • the imidization reaction of the polyamic acid is terminated and cured.
  • a polyimide layer 2 having a through hole 3 at a bump formation portion is formed on the upper surface of the copper foil 1.
  • the conductor circuit 5 formed on the polyimide layer 2 includes a land 5a for forming a bump 9 for connecting a mother board and a board, and a land 5a for connecting an IC chip. It has lands 5 b for forming bumps 8.
  • the land 5a preferably has a diameter of 100 to 500 ā‡ m, and more preferably 200 to 300 ā‡ m.
  • the dimension of the land 5b is preferably (100 to 200) ā‡ m X (200 to 500) ā‡ m, and more preferably (100 to 150) ā‡ m. ā‡ m X (300 to 400) ā‡ ā‡ .
  • the mixed solution of the above-mentioned polyamic acid is applied to the entire back surface of the copper foil 1 to form a polyamic acid layer 6a.
  • the thickness of the polyamide acid layer 6a is not particularly limited, but is preferably 5 to 75 ā‡ m, and more preferably 5 to 10 ā‡ m.
  • through holes 7 for forming bumps are formed in predetermined portions of the polyamic acid layer 6a by the photolithography process described above, and further, the substrate 4A is formed.
  • heating at a temperature of about 280 to 400 Ā° C. for about 5 minutes terminates the polyamidic acid imidization reaction and cures.
  • a polyimide layer 6 having a through hole 7 in the bump formation portion is formed on the lower surface of the copper foil 1 as shown in FIG. 1g.
  • the dimensions of the through holes 7 are preferably about (100 to 200) mx (200 to 500) ā‡ m.
  • the height of the bump 8 is not particularly limited, but is 10 to
  • the thickness is preferably 150 ā‡ m, more preferably 15 to 30 ā‡ m.
  • the height of the bump 9 is not particularly limited, but is preferably from 100 to 500 ā‡ m, and more preferably from 100 to 300 ā‡ .
  • high melting point solder layers 10 and 11 are formed on the surfaces of the bumps 8 and 9 using a high melting point solder.
  • the melting point of the high melting point solder is not particularly limited, but is preferably about 220 to 400 Ā° C.
  • high melting point solder examples include Au / Sn solder and PbZSn solder having a high melting point (melting point of about 260 Ā° C).
  • the thickness of the high melting point solder layers 10 and 11 is not particularly limited, but is preferably 0.1 to 10 m, and more preferably 0.5 to 5 ā‡ .
  • the high melting point solder layer 10 of the bump 8 of the polyimide layer 6 on the lower surface is shielded with a tape or the like (not shown), as shown in FIG.
  • a low-melting-point solder layer 12 of low-melting-point solder having a melting point of about 180 Ā° C. (for example, PbZSn solder) is formed on only the surface of No. 1 and the circuit board 13 of obtain.
  • the difference between the melting point of the high melting point solder used for the high melting point solder layers 10 and 11 and the melting point of the low melting point solder used for the low melting point solder layer 12 is preferably 50 Ā° C. or more.
  • the polyimide layers 2 and 6 are formed on both sides of the copper foil 1 by imidizing the polyamide acid. This eliminates the need for a bonding step between the film-shaped insulating base and the conductor circuit, which was conventionally required. As a result, it is possible to simplify the manufacturing process, improve production efficiency, and reduce costs.
  • 3a to 3d are process diagrams showing a method for mounting an IC chip using the circuit board of the present embodiment.
  • the electrode section 22 formed on the semiconductor substrate 21 of the IC chip 20 is placed on the upper surface of the bump 8 on the upper side of the circuit board 13. Then, in this state, the bump 8 is heated to melt the high melting point solder layer 10, and as shown in FIG. 3b, the electrode portion of the IC chip 20 is formed by the melted high melting point solder 10a. 22 and the bump 8 are joined.
  • the circuit board 13 is placed in a reflow furnace (not shown), and reflow is performed at a temperature higher than the melting point of the low melting point solder layer 12 and lower than the melting point of the high melting point solder layer 10.
  • the low melting point solder 12 on the bumps 9 on the mother board 30 is melted, and as shown in FIG.
  • the bumps 9 on the motherboard 30 are bonded to the conductor patterns 32 on the motherboard 30.
  • the high melting point solder 10a of the bump 8 on the IC chip 20 side and the high melting point solder layer 11 of the mother board 30 do not melt.
  • the melting point of the solder applied to the bump 8 for connecting the IC becomes higher than the melting point of the solder applied to the bump 9 for connecting the mother board.
  • Circuit board 1 When soldering 3 to the mother board 30, the high melting point solder 10a for IC connection on the top surface 8 does not melt, only the low melting point solder layer 12 for mother board connection Melts, which is extremely convenient for implementation work.
  • the present invention is not limited to the above-described embodiment, and various changes can be made.
  • the conductor circuit and the electrodes are not limited to copper, and aluminum or the like may be used.
  • the shape of the through hole formed in the polyimide layer is not limited to a circle, but may be various shapes such as a square, a rectangle, and an ellipse.
  • the high melting point solder layer 11 is formed on the mother-board board connecting bump 9 and the low melting point solder layer 12 is formed.
  • the high melting point solder layer 10 is formed on the bumps 8 for the mother board, the low melting point solder layer 1 2 Can also be formed.
  • circuit board of the present invention can adopt a multilayer board structure by a build-up method or the like.
  • the present invention is not limited to a mounting board for CSP, but is most effective when used as a mounting board for CSP.
  • the circuit board according to the present invention is useful as a circuit board for mounting a semiconductor device, and is particularly suitable for fine pitch and high-density mounting of semiconductor device wiring.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Wire Bonding (AREA)
  • Laminated Bodies (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

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恕悉恫态 äøŠčæ°ć®å®Ÿę–½ć®å½¢ę…‹ć«ćŠć„恦ćÆ态 ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø恮惐 ćƒ³ćƒ— 9ć«é«˜čžē‚¹ćÆć‚“ć å±¤ 1 1ć‚’å½¢ęˆć—ćŸäøŠć«ä½Žčžē‚¹ćÆć‚“ć å±¤ 1 2ć‚’å½¢ęˆ ć™ć‚‹ć‚ˆć†ć«ć—ćŸćŒć€ ä¾‹ćˆć°ć€ I Cꎄē¶šē”Øć®ćƒćƒ³ćƒ— 8ć«é«˜čžē‚¹ćÆć‚“ć å±¤ 1 0ć‚’å½¢ęˆć™ć‚‹éš›ć«ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Øć®ćƒćƒ³ćƒ— 9ć«ćƒ†ćƒ¼ćƒ—ć‚’č²¼ä»˜ć™ 悋ćŖć©ć—ć¦é®č”½ć™ć‚‹ć“ćØć«ć‚ˆć‚Šć€ ćƒćƒ³ćƒ— 9äøŠć«ē›“ęŽ„ä½Žčžē‚¹ćÆć‚“ć å±¤ 1 2 ć‚’å½¢ęˆć™ć‚‹ć“ćØ悂恧恍悋怂
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仄äøŠčŖ¬ę˜Žć—ćŸć‚ˆć†ć«ć€ ęœ¬ē™ŗę˜Žć«ć‚ˆć‚‹å›žč·ÆåŸŗęæćÆ态 半導体ē“ å­ć‚’å®Ÿč£…ć™ ć‚‹ćŸć‚ć®å›žč·ÆåŸŗęæćØć—ć¦ęœ‰ē”Ø恧恂悊态 ē‰¹ć«åŠå°Žä½“ē“ å­é…ē·šć®ćƒ•ć‚”ć‚¤ćƒ³ćƒ” ćƒ„ćƒåŒ–ć‚„é«˜åƆåŗ¦å®Ÿč£…åŒ–ć«é©ć—ćŸć‚‚ć®ć§ć‚ć‚‹ć€‚

Claims

č«‹ 걂 恮 ēƄ 囲
1 . I cē“ å­ć‚’ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæäøŠć«å®Ÿč£…ć™ć‚‹ćŸć‚ć®å›žč·ÆåŸŗęæć§ć‚ć£ć¦ć€ 惝ćƒŖ悤惟 ćƒ‰ć®å‰é§†ä½“ć§ć‚ć‚‹ćƒćƒŖć‚¢ćƒŸ 惉é…øć®ć‚¤ćƒŸ ćƒ‰åŒ–ååæœć‚’ēµ‚ēµć•ć› 悋恓ćØć«ć‚ˆć£ć¦å¾—ć‚‰ć‚Œć‚‹ćƒćƒŖ悤惟 惉恋悉ćŖ悋ē¬¬ 1恮ēµ¶ēøåŸŗꝐćØ态
äøŠčؘē¬¬ 1恮ēµ¶ēøåŸŗꝐäøŠć«čØ­ć‘ć‚‰ć‚ŒćŸå°Žä½“å›žč·ÆćØ态
äøŠčؘ導体回č·Æ恌čØ­ć‘ć‚‰ć‚ŒćŸäøŠčؘē¬¬ 1 恮ēµ¶ēøåŸŗꝐäøŠć«čØ­ć‘ć‚‰ć‚Œć€ 惝ćƒŖć‚£ 惟 ćƒ‰ć®å‰é§†ä½“ć§ć‚ć‚‹ćƒćƒŖć‚¢ćƒŸ 惉é…øć®ć‚¤ćƒŸ ćƒ‰åŒ–ååæœć‚’ēµ‚ēµć•ć›ć‚‹ć“ćØć«ć‚ˆ ć¤ć¦å¾—ć‚‰ć‚Œć‚‹ćƒćƒŖ悤惟 惉恋悉ćŖ悋ē¬¬ 2恮ēµ¶ēøåŸŗꝐćØ态
äøŠčؘ導体回č·Æ恫ꎄē¶šć•ć‚Œć‚‹ćØćØ悂恫äøŠčؘē¬¬ 1恮ēµ¶ēøåŸŗꝐ恋悉ēŖå‡ŗ恗恦 čØ­ć‘ć‚‰ć‚ŒćŸćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø恮電ꄵćØ态
äøŠčؘ導体回č·Æ恫ꎄē¶šć•ć‚Œć‚‹ćØćØ悂恫äøŠčؘē¬¬ 2恮ēµ¶ēøåŸŗꝐ恋悉ēŖå‡ŗ恗恦 čØ­ć‘ć‚‰ć‚ŒćŸ I Cꎄē¶šē”Ø恮電ꄵćØ悒꜉恙悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæ怂
2 . I Cē“ å­ć‚’ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæäøŠć«å®Ÿč£…ć™ć‚‹ćŸć‚ć®å›žč·ÆåŸŗęæć§ć‚ć£ć¦ć€ ē¬¬ 1恮ēµ¶ēøåŸŗꝐćØ态
äøŠčؘē¬¬ 1 恮ēµ¶ēøåŸŗꝐäøŠć«čØ­ć‘ć‚‰ć‚ŒćŸå°Žä½“å›žč·ÆćØ态
äøŠčؘ導体回č·Æ恌čØ­ć‘ć‚‰ć‚ŒćŸäøŠčؘē¬¬ 1恮ēµ¶ēøåŸŗꝐäøŠć«čØ­ć‘ć‚‰ć‚ŒćŸē¬¬ 2恮 ēµ¶ēøåŸŗꝐćØ态
äøŠčؘ導体回č·Æ恫ꎄē¶šć•ć‚Œć‚‹ćØćØ悂恫äøŠčؘē¬¬ 1恮ēµ¶ēøåŸŗꝐ恋悉ēŖå‡ŗ恗恦 čØ­ć‘ć‚‰ć‚Œć€ ćć®č”Øé¢ć«é‡‘å±žēŖå‡ŗē‰©ćŒå½¢ęˆć•ć‚ŒćŸćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø 恮電ꄵćØ态
äøŠčؘ導体回č·Æ恫ꎄē¶šć•ć‚Œć‚‹ćØćØ悂恫äøŠčؘē¬¬ 2恮ēµ¶ēøåŸŗꝐ恋悉ēŖå‡ŗ恗恦 čØ­ć‘ć‚‰ć‚Œć€ ćć®č”Øé¢ć«ć€ č”Ø層éƒØåˆ†ć®čžē‚¹ćŒäøŠčØ˜ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæē”Ø恮電 ę„µć®é‡‘å±žēŖå‡ŗē‰©ć®čžē‚¹ć‚ˆć‚Šé«˜ć„金属ēŖå‡ŗē‰©ćŒå½¢ęˆć•ć‚ŒćŸ I Cꎄē¶šē”Ø恮電 ꄵćØ悒꜉恙悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæ怂
3 . 請걂恮ēƄ囲ē¬¬ 2項čØ˜č¼‰ć®å›žč·ÆåŸŗęæ恫恊恄恦态 äøŠčؘ I Cꎄē¶šē”Ø恮電ꄵ ć®é‡‘å±žēŖå‡ŗē‰©ć®č”Ø層éƒØåˆ†ć®čžē‚¹ćŒć€ äøŠčØ˜ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø恮電ꄵ ć®é‡‘å±žēŖå‡ŗē‰©ć®čžē‚¹ć‚ˆć‚Šć‚‚å°‘ćŖ恏 ćØ悂 5 0 Ā°C仄äøŠé«˜ć„恓ćØ悒ē‰¹å¾“ćØ恙悋 回č·ÆåŸŗęæ怂
4 . 請걂恮ēƄ囲ē¬¬ 2項čØ˜č¼‰ć®å›žč·ÆåŸŗęæ恫恊恄恦态 äøŠčؘē¬¬ 1åŠć³ē¬¬ 2恮ēµ¶ ēøåŸŗꝐ恌态 惝ćƒŖ悤惟 ćƒ‰ć®å‰é§†ä½“ć§ć‚ć‚‹ćƒćƒŖć‚¢ćƒŸ 惉é…øć®ć‚¤ćƒŸ ćƒ‰åŒ–ååæœć‚’ēµ‚ ēµć•ć›ć‚‹ć“ćØć«ć‚ˆć£ć¦å¾—ć‚‰ć‚Œć‚‹ćƒćƒŖ悤惟 惉恋悉ćŖ悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›ž č·ÆåŸŗęæ怂
5 . 請걂恮ēƄ囲ē¬¬ 3項čØ˜č¼‰ć®å›žč·ÆåŸŗęæ恫恊恄恦态 äøŠčؘē¬¬ 1åŠć³ē¬¬ 2恮ēµ¶ ēøåŸŗꝐ恌态 惝ćƒŖ悤惟 ćƒ‰ć®å‰é§†ä½“ć§ć‚ć‚‹ćƒćƒŖć‚¢ćƒŸ 惉é…øć®ć‚£ćƒŸ ćƒ‰åŒ–ååæœć‚’ēµ‚ ēµć•ć›ć‚‹ć“ćØć«ć‚ˆć£ć¦å¾—ć‚‰ć‚Œć‚‹ćƒćƒŖ悤惟 惉恋悉ćŖ悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›ž č·ÆåŸŗęæ怂
6 . I Cē“ å­ć‚’ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæäøŠć«å®Ÿč£…ć™ć‚‹ćŸć‚ć®å›žč·ÆåŸŗęæć®č£½é€ ę–¹ ę³•ć§ć‚ć£ć¦ć€
金属ē®”äøŠć«ćƒćƒŖ悤惟 ćƒ‰ć®å‰é§†ä½“ć§ć‚ć‚‹ćƒćƒŖć‚¢ćƒŸ 惉é…øęŗ¶ę¶²ć‚’å”—åøƒć—态 ćć®ć‚¤ćƒŸ ćƒ‰åŒ–ååæœć‚’ēµ‚ēµć•ć›ć‚‹ć“ćØć«ć‚ˆć£ć¦ćƒćƒŖ悤惟 惉恋悉ćŖ悋ē¬¬ 1恮 ēµ¶ēøåŸŗęå±¤ć‚’å½¢ęˆć™ć‚‹å·„ē؋ćØ态
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äøŠčؘ導体回č·Æ恫ꎄē¶šć•ć‚Œć‚‹ I Cꎄē¶šē”Ø恮電ꄵ悒äøŠčؘē¬¬ 2恮ēµ¶ēøåŸŗꝐ恋 悉ēŖå‡ŗå½¢ęˆć™ć‚‹å·„ē؋ćØ悒꜉恙悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć€‚
7 . 請걂恮ēƄ囲ē¬¬ 6項čØ˜č¼‰ć®å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć«ćŠć„ć¦ć€ äøŠčؘē¬¬ 1及 ć³ē¬¬ 2恮ēµ¶ēøåŸŗęå±¤ć«ć¤ć„ć¦ć€ äøŠčØ˜ćƒćƒŖć‚¢ćƒŸ 惉é…øęŗ¶ę¶²ć‚’å”—åøƒć—ćŸå¾Œć«ć€ ćƒ•ć‚© 惈ćƒŖć‚½ć‚°ćƒ©ćƒ•ć‚£ć«ć‚ˆć£ć¦é›»ę„µå½¢ęˆē”Øć®ć‚¹ćƒ«ćƒ¼ćƒ›ćƒ¼ćƒ«ć‚’å½¢ęˆć™ć‚‹å·„ē؋ ć‚’ę›“ć«ęœ‰ć™ć‚‹ć“ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć€‚
8 . 請걂恮ēƄ囲ē¬¬ 6項čØ˜č¼‰ć®å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć«ćŠć„ć¦ć€ äøŠčØ˜ćƒžć‚¶äø€ ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø恮電ꄵ恮č”Øé¢ć«é‡‘å±žēŖå‡ŗē‰©ć‚’å½¢ęˆć™ć‚‹å·„ē؋ćØ态 äøŠčؘ I Cꎄē¶šē”Ø恮電ꄵ恮č”Øé¢ć«ć€ č”Ø層éƒØåˆ†ć®čžē‚¹ćŒäøŠčØ˜ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæē”Ø恮 é›»ę„µć®é‡‘å±žēŖå‡ŗē‰©ć®čžē‚¹ć‚ˆć‚Šé«˜ć„金属ēŖå‡ŗē‰©ć‚’å½¢ęˆć™ć‚‹å·„ē؋ćØć‚’ę›“ć«ęœ‰ 恙悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć€‚
9 . 請걂恮ēƄ囲ē¬¬ 7項čØ˜č¼‰ć®å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć«ćŠć„ć¦ć€ äøŠčØ˜ćƒžć‚¶äø€ ćƒœćƒ¼ćƒ‰åŸŗęæꎄē¶šē”Ø恮電ꄵ恮č”Øé¢ć«é‡‘å±žēŖå‡ŗē‰©ć‚’å½¢ęˆć™ć‚‹å·„ē؋ćØ态 äøŠčؘ I Cꎄē¶šē”Ø恮電ꄵ恮č”Øé¢ć«ć€ č”Ø層éƒØåˆ†ć®čžē‚¹ćŒäøŠčØ˜ćƒžć‚¶äø€ćƒœćƒ¼ćƒ‰åŸŗęæē”Ø恮 é›»ę„µć®é‡‘å±žēŖå‡ŗē‰©ć®čžē‚¹ć‚ˆć‚Šé«˜ć„金属ēŖå‡ŗē‰©ć‚’å½¢ęˆć™ć‚‹å·„ē؋ćØć‚’ę›“ć«ęœ‰ 恙悋恓ćØ悒ē‰¹å¾“ćØć™ć‚‹å›žč·ÆåŸŗęæć®č£½é€ ę–¹ę³•ć€‚
PCT/JP1998/001209 1997-03-21 1998-03-20 Plaquette de circuit et son procede de production WO1998043295A1 (fr)

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AU64205/98A AU6420598A (en) 1997-03-21 1998-03-20 Circuit board and production method thereof
US09/194,161 US6323434B1 (en) 1997-03-21 1998-03-20 Circuit board and production method thereof

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JP2002111185A (ja) * 2000-10-03 2002-04-12 Sony Chem Corp ćƒćƒ³ćƒ—ä»˜ćé…ē·šå›žč·ÆåŸŗęæåŠć³ćć®č£½é€ ę–¹ę³•
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US6323434B1 (en) 2001-11-27
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