WO1989009341A1 - Pompe a vide turbomoleculaire - Google Patents

Pompe a vide turbomoleculaire Download PDF

Info

Publication number
WO1989009341A1
WO1989009341A1 PCT/SU1988/000076 SU8800076W WO8909341A1 WO 1989009341 A1 WO1989009341 A1 WO 1989009341A1 SU 8800076 W SU8800076 W SU 8800076W WO 8909341 A1 WO8909341 A1 WO 8909341A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
gash
ροτορa
additional
οτκachκi
Prior art date
Application number
PCT/SU1988/000076
Other languages
English (en)
Russian (ru)
Inventor
Vladimir Pavlovich Sergeev
Valery Borisovich Sholokhov
Vladimir Iliich Vikhrev
Sergei Nikolaevich Sharshin
Original Assignee
Sergeev Vladimir P
Sholokhov Valery B
Vikhrev Vladimir I
Sharshin Sergei N
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sergeev Vladimir P, Sholokhov Valery B, Vikhrev Vladimir I, Sharshin Sergei N filed Critical Sergeev Vladimir P
Priority to DE883891280T priority Critical patent/DE3891280T1/de
Priority to CH4341/89A priority patent/CH676378A5/de
Priority to PCT/SU1988/000076 priority patent/WO1989009341A1/fr
Priority to JP63507664A priority patent/JPH02503703A/ja
Priority to FR888807570A priority patent/FR2632361B1/fr
Publication of WO1989009341A1 publication Critical patent/WO1989009341A1/fr
Priority to GB8926400A priority patent/GB2230562B/en
Priority to FI895719A priority patent/FI895719A0/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Definitions

  • the large vacuum reservoir contains a total of 15 seconds, in the absence of waste, there is a separate connection with the shaft.
  • friends and consummate friends turn on the other hand and turn on the other hand and go through the process of transportation of blood and blood.
  • the newly installed zadacha was resolved by the fact that in a large cooler, it is empty, the inside is warm, it is installed inside the tank.
  • the vacuum chamber is equipped with a standby unit I / fig. 1 / * inside, a large open 2 was installed; on the other hand, there were 3 channels installed; The state of the I source of gas is 5 and the gas source is 6 and the gas source is in danger of an interconnection between the two.
  • the gas pump is set to step 7 with the shoulder blades.
  • the personal laptop wheels of 9 and the corresponding portable disks 8 are different, both in the case of other commercial vehicles.
  • the chambers of the accelerated gas outlet of the gas are processed by the internal cylinder of the 10th compartment of the 6th unit of the 6th stage of the motorized vehicle - 6 - na ⁇ uzhn ⁇ y tsiliyad ⁇ iches ⁇ y ⁇ ve ⁇ ya ⁇ s ⁇ yu 12 ⁇ a 2.
  • ⁇ 2 us ⁇ aya ⁇ vleya XDR w 14 and w za ⁇ e ⁇ len yaem with ⁇ m ⁇ schyu viya ⁇ a 15.
  • ⁇ al 14 us ⁇ aya ⁇ vlen in dvu ⁇ ae ⁇ s ⁇ a- ⁇ iches ⁇ i ⁇ ⁇ dshi ⁇ yai ⁇ a ⁇ 16 and T7, imeyuschi ⁇ s ⁇ ve ⁇ s ⁇ venya ⁇ ⁇ ltsevye ⁇ ch ⁇ i 18 and 19, with s ⁇ bschenyaye ⁇ ashshmi / w che ⁇ ezhe Re ⁇ azayay / sis ⁇ emy ⁇ dachi and ⁇ as ⁇ edele- Air Force Aircraft 16 and 1.
  • a width of 49 in between the adjacent grooves 48 is equally wide in 48.
  • Additional kayals 36 are designed to accommodate 50 (Fig. 2) or 51 (Fig. 3),
  • the depth of the - - groove 51 gradually decreases at a rate of gas suction at a gas injection rate of 0.1 to 0.2 mm.
  • the width of the groove 51 and the width of the rib 53 are equal to 2 mm, the same as in the variant shown in figure 2.
  • the length of the section 35 of the external part of the shaft 14 is 0.5 to 0.8, the diameter of the shaft is 14, and the length of the section 37 of the inside of the shaft 2 is 2 times 2 of 2 -g.
  • the vacuum vacuum pump operates the following way.
  • unit 5 ( ⁇ ) of the unit I is connected to a live camera (not shown on the drawing) with a compliant process.
  • Unit 33 connects to the pipe (not shown) with a gas pumped off.
  • Yulos 47, zazory 46 and 45 fall into the optional channels 36 dynamic compaction. Then, after a gap of 38 - to the main channels 34 dynamic compaction, the exhaust gas pressure rises to exhaust pressure until the exhaust gas rises. Further pumped gas through channels 39.40
  • extension 16 gap 41 and section 43 of bus 42 and channel 44 of channel 20 will exit into the atmosphere.
  • the dynamic compaction takes the role of a vacuum pump, ensuring an increase in the pressure for the automatic, and this is not impermeable.
  • the pressure of the pumped gas flow through the pressure through additional channels 36 is dynamically accelerated is less than 5 times, it is less

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

Une pompe à vide turbomoléculaire comporte un stator creux (1) dans lequel est monté un rotor creux (3) et entre lesquels sont situés des canaux (3, 4) des étages turbomoléculaires et moléculaires de pompage de gaz reliés à l'atmosphère par l'intermédiaire de canaux principal et auxiliaire (34, 36) d'étanchéité dynamique formés par de gorges pratiquées sur des régions (35, 37) de la surface interne du rotor (2) et par la surface externe de l'arbre (14) du rotor (2) configurée comme un filetage multiple présentant un profil rectangulaire, ainsi que par les surfaces du rotor (2) et d'un coussinet (16), lesquelles sont situées respectivement en regard des régions (37, 35), le coussinet (16) étant situé à l'intérieur du rotor creux (2) dans lequel est montée une extrémité de l'arbre (14) du rotor (2).
PCT/SU1988/000076 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire WO1989009341A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE883891280T DE3891280T1 (de) 1988-03-30 1988-03-30 Turbomolekular-vakuumpumpe
CH4341/89A CH676378A5 (fr) 1988-03-30 1988-03-30
PCT/SU1988/000076 WO1989009341A1 (fr) 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire
JP63507664A JPH02503703A (ja) 1988-03-30 1988-03-30 ターボ分子真空ポンプ
FR888807570A FR2632361B1 (fr) 1988-03-30 1988-06-07 Pompe turbomoleculaire a vide
GB8926400A GB2230562B (en) 1988-03-30 1989-11-16 Turbomolecular vacuum pump
FI895719A FI895719A0 (fi) 1988-03-30 1989-11-29 Turbomolekylaer vakuumpump.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (fr) 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire

Publications (1)

Publication Number Publication Date
WO1989009341A1 true WO1989009341A1 (fr) 1989-10-05

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SU1988/000076 WO1989009341A1 (fr) 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire

Country Status (7)

Country Link
JP (1) JPH02503703A (fr)
CH (1) CH676378A5 (fr)
DE (1) DE3891280T1 (fr)
FI (1) FI895719A0 (fr)
FR (1) FR2632361B1 (fr)
GB (1) GB2230562B (fr)
WO (1) WO1989009341A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2244370A5 (fr) * 1973-09-14 1975-04-11 Cit Alcatel
DE2255618C2 (de) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molekular-Vakuumpumpe
EP0081890B1 (fr) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618C2 (de) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molekular-Vakuumpumpe
FR2244370A5 (fr) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (fr) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
CH676378A5 (fr) 1991-01-15
GB2230562A (en) 1990-10-24
FR2632361A1 (fr) 1989-12-08
FI895719A0 (fi) 1989-11-29
DE3891280T1 (de) 1990-04-05
JPH02503703A (ja) 1990-11-01
GB2230562B (en) 1991-09-11
GB8926400D0 (en) 1990-08-01
FR2632361B1 (fr) 1992-05-07

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