DE3891280T1 - Turbomolekular-vakuumpumpe - Google Patents

Turbomolekular-vakuumpumpe

Info

Publication number
DE3891280T1
DE3891280T1 DE883891280T DE3891280T DE3891280T1 DE 3891280 T1 DE3891280 T1 DE 3891280T1 DE 883891280 T DE883891280 T DE 883891280T DE 3891280 T DE3891280 T DE 3891280T DE 3891280 T1 DE3891280 T1 DE 3891280T1
Authority
DE
Germany
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE883891280T
Other languages
English (en)
Inventor
Vladimir Pavlovic Sergeev
Valerij Borisovic Solochov
Vladimir Iliic Vichrev
Sergej Nikolaevic Sarsin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE3891280T1 publication Critical patent/DE3891280T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Junction Field-Effect Transistors (AREA)
DE883891280T 1988-03-30 1988-03-30 Turbomolekular-vakuumpumpe Withdrawn DE3891280T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (en) 1988-03-30 1988-03-30 Turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
DE3891280T1 true DE3891280T1 (de) 1990-04-05

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
DE883891280T Withdrawn DE3891280T1 (de) 1988-03-30 1988-03-30 Turbomolekular-vakuumpumpe

Country Status (7)

Country Link
JP (1) JPH02503703A (de)
CH (1) CH676378A5 (de)
DE (1) DE3891280T1 (de)
FI (1) FI895719A0 (de)
FR (1) FR2632361B1 (de)
GB (1) GB2230562B (de)
WO (1) WO1989009341A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1043505A2 (de) 1999-04-09 2000-10-11 Pfeiffer Vacuum GmbH Vakuumpumpe mit Gaslagerung

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (de) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1043505A2 (de) 1999-04-09 2000-10-11 Pfeiffer Vacuum GmbH Vakuumpumpe mit Gaslagerung

Also Published As

Publication number Publication date
GB8926400D0 (en) 1990-08-01
FR2632361A1 (fr) 1989-12-08
JPH02503703A (ja) 1990-11-01
FI895719A0 (fi) 1989-11-29
GB2230562B (en) 1991-09-11
FR2632361B1 (fr) 1992-05-07
WO1989009341A1 (en) 1989-10-05
GB2230562A (en) 1990-10-24
CH676378A5 (de) 1991-01-15

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee