FI895719A0 - Turbomolekylaer vakuumpump. - Google Patents

Turbomolekylaer vakuumpump.

Info

Publication number: FI895719A0
Authority: FI; Finland
Prior art keywords: turbomolekylaer; vacuum pump; vacuum; pump; turbomolekylaer vacuum
Prior art date: 1988-03-30

Application number

FI895719A

Other languages

English (en)

Inventor

Ilm.

Original Assignee

Sergeev Vladimir P

Sholokhov Valery B

Vikhrev Vladimir I

Sharshin Sergei N

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-03-30

Filing date

1989-11-29

Publication date

1989-11-29

1989-11-29 Application filed by Sergeev Vladimir P, Sholokhov Valery B, Vikhrev Vladimir I, Sharshin Sergei N filed Critical Sergeev Vladimir P

1989-11-29 Publication of FI895719A0 publication Critical patent/FI895719A0/fi

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Non-Positive Displacement Air Blowers (AREA)
Junction Field-Effect Transistors (AREA)

FI895719A 1988-03-30 1989-11-29 Turbomolekylaer vakuumpump. FI895719A0 (fi)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SU1988/000076 WO1989009341A1 (en)	1988-03-30	1988-03-30	Turbomolecular vacuum pump

Publications (1)

Publication Number	Publication Date
FI895719A0 true FI895719A0 (fi)	1989-11-29

Family

ID=21617228

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI895719A FI895719A0 (fi)	1988-03-30	1989-11-29	Turbomolekylaer vakuumpump.

Country Status (7)

Country	Link
JP (1)	JPH02503703A (fi)
CH (1)	CH676378A5 (fi)
DE (1)	DE3891280T1 (fi)
FI (1)	FI895719A0 (fi)
FR (1)	FR2632361B1 (fi)
GB (1)	GB2230562B (fi)
WO (1)	WO1989009341A1 (fi)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2928615B2 (ja) *	1990-09-28	1999-08-03	株式会社日立製作所	ターボ真空ポンプ
DE19915983A1 (de)	1999-04-09	2000-10-12	Pfeiffer Vacuum Gmbh	Vakuumpumpe mit Gaslagerung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1978239A (en) *	1930-04-21	1934-10-23	Elizabeth Wheeler	Multistage impact packing
US2390332A (en) *	1943-10-14	1945-12-04	Westinghouse Electric Corp	Blower apparatus
US3131940A (en) *	1957-02-12	1964-05-05	Alsacienne Constr Meca	Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) *	1971-11-16	1973-05-07	Cit Alcatel	Pivot pour pompes moleculaires rotatives
FR2224009A5 (fi) *	1973-03-30	1974-10-25	Cit Alcatel
FR2244370A5 (fi) *	1973-09-14	1975-04-11	Cit Alcatel
NL8105614A (nl) *	1981-12-14	1983-07-01	Ultra Centrifuge Nederland Nv	Hoog-vacuum moleculair pomp.
DE3613344A1 (de) *	1986-04-19	1987-10-22	Pfeiffer Vakuumtechnik	Turbomolekular-vakuumpumpe fuer hoeheren druck

1988
- 1988-03-30 DE DE883891280T patent/DE3891280T1/de not_active Withdrawn
- 1988-03-30 WO PCT/SU1988/000076 patent/WO1989009341A1/ru active Application Filing
- 1988-03-30 JP JP63507664A patent/JPH02503703A/ja active Pending
- 1988-03-30 CH CH4341/89A patent/CH676378A5/de not_active IP Right Cessation
- 1988-06-07 FR FR888807570A patent/FR2632361B1/fr not_active Expired - Fee Related
1989
- 1989-11-16 GB GB8926400A patent/GB2230562B/en not_active Expired - Lifetime
- 1989-11-29 FI FI895719A patent/FI895719A0/fi not_active Application Discontinuation

Also Published As

Publication number	Publication date
CH676378A5 (fi)	1991-01-15
GB2230562B (en)	1991-09-11
DE3891280T1 (de)	1990-04-05
FR2632361A1 (fr)	1989-12-08
JPH02503703A (ja)	1990-11-01
GB2230562A (en)	1990-10-24
GB8926400D0 (en)	1990-08-01
FR2632361B1 (fr)	1992-05-07
WO1989009341A1 (en)	1989-10-05

Legal Events

Date

Code

Title

Description

2004-08-31

FA

Application withdrawn

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SHOLOKHOV, VALERY BORISOVICH

Owner name: VIKHREV, VLADIMIR ILIICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH

Publication	Publication Date	Title
DE68914320T2 (de)	1994-07-21	Zusammengestellte Vakuumpumpe.
DE59007218D1 (de)	1994-10-27	Magnetgelagerte Vakuumpumpe.
DE58905147D1 (de)	1993-09-09	Saugbagger.
DE58904077D1 (de)	1993-05-19	Infusionspumpe.
DE68920690T2 (de)	1995-08-24	Sauggerät.
DE68924072D1 (de)	1995-10-05	Saugnapfzusammenbau.
DE3669356D1 (de)	1990-04-12	Vakuumpumpe.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE68903355T2 (de)	1993-03-18	Vakuumpumpen.
DE69004566D1 (de)	1993-12-16	Vakuumpumpeneinheit.
DE68900798D1 (de)	1992-03-12	Luftpumpe.
DE58901989D1 (de)	1992-09-10	Membranpumpe.
DE3770367D1 (de)	1991-07-04	Turbomolekularpumpe.
DE68903862T2 (de)	1993-04-22	Vakuumpumpenanlagen.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
DE68906929T2 (de)	1993-09-23	Turbomolekularpumpe.
DE68916654T2 (de)	1995-03-02	Sauganordnung.
DE68907576D1 (de)	1993-08-19	Verdraengerpumpe.
DE59201550D1 (de)	1995-04-06	Trockenlaufende vakuumpumpe.
DE68903822T2 (de)	1993-04-08	Vakuumpumpe mit mehreren abschnitten.
IT1228846B (it)	1991-07-05	Pompa rotariva.
DE69008574T2 (de)	1994-11-24	Saugpumpe.
DE3891201T1 (de)	1990-01-11	Vakuum-molekularpumpe
FI895719A0 (fi)	1989-11-29	Turbomolekylaer vakuumpump.
DE3865009D1 (de)	1991-10-24	Mehrstufige vakuumpumpe.