US20090263310A1 - Method for making carbon nanotubes - Google Patents

Method for making carbon nanotubes Download PDF

Info

Publication number
US20090263310A1
US20090263310A1 US12/384,979 US38497909A US2009263310A1 US 20090263310 A1 US20090263310 A1 US 20090263310A1 US 38497909 A US38497909 A US 38497909A US 2009263310 A1 US2009263310 A1 US 2009263310A1
Authority
US
United States
Prior art keywords
metal substrate
carbon nanotubes
gas
along
minutes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/384,979
Inventor
Feng-Wei Dai
Yuan Yao
Chang-Shen Chang
Hsien-Sheng Pei
Kai-Li Jiang
Shou-Shan Fan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Hon Hai Precision Industry Co Ltd
Original Assignee
Tsinghua University
Hon Hai Precision Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Hon Hai Precision Industry Co Ltd filed Critical Tsinghua University
Assigned to HON HAI PRECISION INDUSTRY CO., LTD, TSINGHUA UNIVERSITY reassignment HON HAI PRECISION INDUSTRY CO., LTD ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHANG, CHANG-SHEN, DAI, FENG-WEI, FAN, SHOU-SHAN, JIANG, KAI-LI, PEI, HSIEN-SHENG, YAO, YUAN
Publication of US20090263310A1 publication Critical patent/US20090263310A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Definitions

  • the present disclosure relates to methods for making carbon nanotubes and, particularly, to a method for making carbon nanotubes on a metal substrate.
  • Carbon nanotubes are a novel carbonaceous material discovered by Iijima, a researcher of NEC Corporation, in 1991.
  • carbon nanotubes have tube-shaped structures with small diameters (less than 100 nanometers) and large aspect ratios (length/diameter). They have excellent electrical properties as well as excellent mechanical properties.
  • the electronic conductance of carbon nanotubes is related to their structures. Because the carbon nanotubes can transmit extremely high electrical current and emit electrons easily, at less than 100 volts, they are considered to be promising for use in a variety of electrical devices.
  • a number of electronic devices such as field emission devices, traveling-wave tubes or electron guns, employ the carbon nanotubes as electron emitters.
  • a substrate for supporting carbon nanotubes should have an ability to endure large amounts of electrical current to pass through. Therefore, it is understood that a substrate made of metal with high conductivity is considered to be a good option for use.
  • CVD chemical vapor deposition
  • metal catalysts such as transition metal or transition metal complex
  • a carbon source gas is thermally decomposed at a predetermined temperature in the presence of the metal catalyst, thereby forming the carbon nanotubes.
  • transition metal is used as a catalyst and coated on the metal substrate, it is easy for the transition metal reacting on the metal of the metal substrate to form an alloy. Thus, the transition metal has become an inactive catalyst, and the catalytic reaction for growing carbon nanotubes will be affected. What is needed, therefore, is to provide a method for making carbon nanotubes, which is able to be performed easily on a metal substrate and is suitable to be employed in mass production.
  • FIG. 1 is a flowchart of a method for making carbon nanotubes, in accordance with a present embodiment.
  • FIG. 2 is a scanning electron microscope (SEM) image of carbon nanotubes formed using the method in accordance with the present embodiment.
  • FIG. 3 is a transmission electron microscopy (TEM) image of carbon nanotubes formed using the method in accordance with the present embodiment.
  • TEM transmission electron microscopy
  • a method for making carbon nanotubes includes the following steps:
  • the metal substrate is a copper substrate.
  • the metal substrate can vary in shape and thickness according to practical requirements.
  • the metal substrate can be a solid rectangular piece.
  • a thickness of the metal substrate can be in a range of about 0.5 centimeters (cm) to about 5 centimeters.
  • An area of the metal substrate can be in a range of about 4 cm 2 to 100 cm 2 .
  • Step 2 polishing a surface of the metal substrate, S 2 , is detailed below.
  • the surface of the metal substrate is rubbed along a first direction with an abrasive paper for about 3-5 minutes.
  • the abrasive paper is about 600-800 grit.
  • powder generated by the sanding during the polishing process is removed by an application of air flow, e.g. blowing.
  • the treated surface of the metal substrate is then rubbed along a second direction with an abrasive paper for about 5-8 minutes.
  • the abrasive paper employed in such step is about 1000-1300 grit. The powder generated due to sanding in this step is also removed.
  • the surface of the metal substrate is rubbed along the first direction with an abrasive paper for about 10-15 minutes.
  • the abrasive paper is about 1500-2000 grit.
  • powder generated by this is removed.
  • An angle ⁇ between the first direction and the second direction is in a range of 0° ⁇ 90°. Particularly, in the present embodiment, the angle ⁇ is about 90°.
  • the surface of the metal substrate is substantially flat and smooth by way of the polishing in step 2 that will facilitate the growth of the carbon nanotubes on the metal substrate.
  • the notches or fine grooves are formed on a nanometer scale and in a net-like pattern due to repeatedly rubbing steps.
  • Step 3 putting the polished metal substrate into a reaction device, S 3 .
  • the reaction device is a furnace, e.g. a box furnace or a tube furnace.
  • the polished metal substrate is put into a quartz boat, which is subsequently inserted into the center of the tube furnace.
  • Step 4 introducing a first protecting gas while heating the environment inside of the reaction device, S 4 .
  • the first protecting gas can be nitrogen.
  • the environment inside of the reaction device is heated to about 400-800 degrees (C).
  • the environment inside of the reaction device is heated to about 700 C.
  • a plurality of metal particles e.g. copper particles, forms around the notches or fine grooves formed on the surface of the metal substrate, and can serve as seeds for facilitating the growth of carbon nanotubes.
  • diameters of the metal particles range from about 1-10 nanometers (nm).
  • the density of the metal particles is closely related to the number of times of rubbing and the angle of the rubbing directions between different rubbing steps. It is understood that the higher density of metal particles is obtained by the greater number of times of rubbing and the smaller angle of rubbing directions between different rubbing steps.
  • Step 5 introducing a mixture of a carbon source gas and a second protecting gas, S 5 .
  • the carbon source gas can be hydrocarbon, such as acetylene or ethylene while the protecting gas can be inert gas or nitrogen.
  • acetylene is chosen as the carbon source gas by virtue of its low decomposition temperature and nitrogen is used as the second protecting gas.
  • the first protecting gas and the second protecting gas can be the same gas.
  • S 5 once the mixture of carbon source gas and second protecting gas is introduced into the reaction device, the carbon nanotubes are grown in a temperature range from about 400-800 C for about 5-30 minutes. The reaction device is then cooled down and the metal substrate is taken out from the reaction device.
  • the carbon nanotubes fabricated by the method, in accordance with the present embodiment are disorderly arranged on the metal substrate.
  • One end of each carbon nanotube is connected with the surface of the metal substrate.
  • a diameter of each carbon nanotube is in a range from about 5 nm to 20 nm.
  • the carbon nanotubes fabricated by the method of the present embodiment can be directly formed on the metal substrate. There is no need to coat a catalyst layer on the metal substrate in advance for growth of the carbon nanotubes. Therefore, the manufacturing procedure is simplified and the manufacturing cost is decreased that is suitable for mass production.

Abstract

A method for making carbon nanotubes that includes the following steps. A metal substrate is provided. The surface of the metal substrate is polished. The polished metal substrate is put into a reaction device. A protecting gas is introduced to the reaction device while the environment inside of the reaction device is heated to about 400 to 800 degrees. A mixture of carbon source gas and protecting gas is introduced to the reaction device, whereby the carbon nanotubes are grown on the metal substrate on the polished metal substrate.

Description

    BACKGROUND
  • 1. Technical Field
  • The present disclosure relates to methods for making carbon nanotubes and, particularly, to a method for making carbon nanotubes on a metal substrate.
  • 2. Discussion of Related Art
  • Carbon nanotubes (CNTs) are a novel carbonaceous material discovered by Iijima, a researcher of NEC Corporation, in 1991. Typically, carbon nanotubes have tube-shaped structures with small diameters (less than 100 nanometers) and large aspect ratios (length/diameter). They have excellent electrical properties as well as excellent mechanical properties. The electronic conductance of carbon nanotubes is related to their structures. Because the carbon nanotubes can transmit extremely high electrical current and emit electrons easily, at less than 100 volts, they are considered to be promising for use in a variety of electrical devices.
  • Generally, a number of electronic devices, such as field emission devices, traveling-wave tubes or electron guns, employ the carbon nanotubes as electron emitters. In order to achieve high power requirements, a substrate for supporting carbon nanotubes should have an ability to endure large amounts of electrical current to pass through. Therefore, it is understood that a substrate made of metal with high conductivity is considered to be a good option for use.
  • Currently, a method of chemical vapor deposition (CVD) is mainly adopted for forming the carbon nanotubes on the substrate. CVD is performed by coating metal catalysts, such as transition metal or transition metal complex, on the substrate and directly synthesizing the carbon nanotubes on the substrate. In principle, a carbon source gas is thermally decomposed at a predetermined temperature in the presence of the metal catalyst, thereby forming the carbon nanotubes.
  • However, once the transition metal is used as a catalyst and coated on the metal substrate, it is easy for the transition metal reacting on the metal of the metal substrate to form an alloy. Thus, the transition metal has become an inactive catalyst, and the catalytic reaction for growing carbon nanotubes will be affected. What is needed, therefore, is to provide a method for making carbon nanotubes, which is able to be performed easily on a metal substrate and is suitable to be employed in mass production.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • Many aspects of the present method for making carbon nanotubes can be better understood with reference to the following drawings. The components in the drawings are not necessarily to scale, the emphasis instead being placed upon clearly illustrating the principles of the present method for making carbon nanotubes.
  • FIG. 1 is a flowchart of a method for making carbon nanotubes, in accordance with a present embodiment.
  • FIG. 2 is a scanning electron microscope (SEM) image of carbon nanotubes formed using the method in accordance with the present embodiment.
  • FIG. 3 is a transmission electron microscopy (TEM) image of carbon nanotubes formed using the method in accordance with the present embodiment.
  • Corresponding reference characters indicate corresponding parts throughout the several views. The exemplifications set out herein illustrate at least one embodiment of the present method for making carbon nanotubes, in at least one form, and such exemplifications are not to be construed as limiting the scope of the disclosure in any manner.
  • DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
  • Reference will now be made to the drawings to describe, in detail, embodiments of the present method for making carbon nanotubes. Referring to FIG. 1, a method for making carbon nanotubes, according to a present embodiment, includes the following steps:
  • Step 1, providing a metal substrate, S1. In the present embodiment, the metal substrate is a copper substrate. The metal substrate can vary in shape and thickness according to practical requirements. For example, the metal substrate can be a solid rectangular piece. A thickness of the metal substrate can be in a range of about 0.5 centimeters (cm) to about 5 centimeters. An area of the metal substrate can be in a range of about 4 cm2 to 100 cm2.
  • Step 2, polishing a surface of the metal substrate, S2, is detailed below. In the present embodiment, the surface of the metal substrate is rubbed along a first direction with an abrasive paper for about 3-5 minutes. The abrasive paper is about 600-800 grit. After that, powder generated by the sanding during the polishing process is removed by an application of air flow, e.g. blowing. The treated surface of the metal substrate is then rubbed along a second direction with an abrasive paper for about 5-8 minutes. The abrasive paper employed in such step is about 1000-1300 grit. The powder generated due to sanding in this step is also removed. After rubbing the surface of the metal substrate along the second direction, the surface of the metal substrate is rubbed along the first direction with an abrasive paper for about 10-15 minutes. In this case, the abrasive paper is about 1500-2000 grit. Finally, powder generated by this is removed. An angle α between the first direction and the second direction is in a range of 0°<α≦90°. Particularly, in the present embodiment, the angle α is about 90°.
  • As a result, the surface of the metal substrate is substantially flat and smooth by way of the polishing in step 2 that will facilitate the growth of the carbon nanotubes on the metal substrate. However, it is understood that there are micro variations in the form of notches or fine grooves that can be observed on the surface of the metal substrate. Particularly, such the notches or fine grooves are formed on a nanometer scale and in a net-like pattern due to repeatedly rubbing steps.
  • Step 3, putting the polished metal substrate into a reaction device, S3. In the present embodiment, the reaction device is a furnace, e.g. a box furnace or a tube furnace. Particularly, the polished metal substrate is put into a quartz boat, which is subsequently inserted into the center of the tube furnace.
  • Step 4, introducing a first protecting gas while heating the environment inside of the reaction device, S4. The first protecting gas can be nitrogen. In the present embodiment, the environment inside of the reaction device is heated to about 400-800 degrees (C). For example, the environment inside of the reaction device is heated to about 700 C. In step 4, during the heating process, a plurality of metal particles, e.g. copper particles, forms around the notches or fine grooves formed on the surface of the metal substrate, and can serve as seeds for facilitating the growth of carbon nanotubes. In the present embodiment, diameters of the metal particles range from about 1-10 nanometers (nm). In addition, the density of the metal particles is closely related to the number of times of rubbing and the angle of the rubbing directions between different rubbing steps. It is understood that the higher density of metal particles is obtained by the greater number of times of rubbing and the smaller angle of rubbing directions between different rubbing steps.
  • Step 5, introducing a mixture of a carbon source gas and a second protecting gas, S5. In the present embodiment, the carbon source gas can be hydrocarbon, such as acetylene or ethylene while the protecting gas can be inert gas or nitrogen. Particularly, acetylene is chosen as the carbon source gas by virtue of its low decomposition temperature and nitrogen is used as the second protecting gas. In addition, the first protecting gas and the second protecting gas can be the same gas. In step 5, S5, once the mixture of carbon source gas and second protecting gas is introduced into the reaction device, the carbon nanotubes are grown in a temperature range from about 400-800 C for about 5-30 minutes. The reaction device is then cooled down and the metal substrate is taken out from the reaction device.
  • Referring to FIG. 2 and FIG. 3, the carbon nanotubes fabricated by the method, in accordance with the present embodiment, are disorderly arranged on the metal substrate. One end of each carbon nanotube is connected with the surface of the metal substrate. In addition, a diameter of each carbon nanotube is in a range from about 5 nm to 20 nm.
  • In conclusion, the carbon nanotubes fabricated by the method of the present embodiment can be directly formed on the metal substrate. There is no need to coat a catalyst layer on the metal substrate in advance for growth of the carbon nanotubes. Therefore, the manufacturing procedure is simplified and the manufacturing cost is decreased that is suitable for mass production.
  • Finally, it is to be understood that the above-described embodiments are intended to illustrate rather than limit the invention. Variations may be made to the embodiments without departing from the spirit of the invention as claimed. The above-described embodiments illustrate the scope of the invention but do not restrict the scope of the invention.
  • It is also to be understood that above description and the claims drawn to a method may include some indication in reference to certain steps. However, the indication used is only to be viewed for identification purposes and not as a suggestion as to an order for the steps.

Claims (15)

1. A method for making carbon nanotubes, the method comprising the following steps:
providing a metal substrate;
polishing a surface of the metal substrate;
putting the polished metal substrate into a reaction device;
introducing a first protecting gas while heating the environment inside of the reaction device to about 400 to 800 degrees; and
introducing a mixture of a carbon source gas and a second protecting gas, whereby the carbon nanotubes are grown directly on the polished metal substrate.
2. The method as claimed in claim 1, wherein the step of polishing the surface of the metal substrate comprising the following steps:
rubbing the surface of the metal substrate along a first direction; then
rubbing the surface of the metal substrate along a second direction; and then
repeatedly rubbing the surface of the metal substrate along the first direction.
3. The method as claimed in claim 2, wherein the surface of the metal substrate is first rubbed along the first direction for about 3 to 5 minutes, then is rubbed along the second direction for about 5 to 8 minutes, and then is rubbed along the first direction for about 10 to 15 minutes.
4. The method as claimed in claim 2, wherein the surface of the metal substrate is first rubbed along the first direction with an abrasive paper of about 600 to 800 grit, then is rubbed along the second direction with an abrasive paper of about 1000 to 1300 grit, and then is rubbed along the first direction with an abrasive paper of about 1500 to 2000 grit.
5. The method as claimed in claim 2, wherein an angle between the first direction and the second direction is larger than 0 degrees and less than or equal to 90 degrees.
6. The method as claimed in claim 1, further comprising a step of removing powder generated from polishing the surface of the metal substrate.
7. The method as claimed in claim 6, wherein the powder is removed by the application of air flow.
8. The method as claimed in claim 1, wherein the metal substrate comprises of copper.
9. The method as claimed in claim 1, wherein the metal substrate is a rectangular.
10. The method as claimed in claim 1, wherein a thickness of the metal substrate is in a range from about 0.5 centimeters to about 5 centimeters.
11. The method as claimed in claim 1, wherein the reaction device is a box furnace or a tube furnace.
12. The method as claimed in claim 1, wherein the first or second protecting gas is inert gas or nitrogen.
13. The method as claimed in claim 1, wherein the carbon source gas is acetylene or ethylene.
14. The method as claimed in claim 1, wherein a growth time for the carbon nanotubes is in a range from about 5 minutes to 30 minutes.
15. The method as claimed in claim 1, wherein the first protecting gas and the second protecting gas comprise of the same gas.
US12/384,979 2008-04-18 2009-04-09 Method for making carbon nanotubes Abandoned US20090263310A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN200810066744.8 2008-04-18
CN2008100667448A CN101559939B (en) 2008-04-18 2008-04-18 Preparation method of carbon nano tube

Publications (1)

Publication Number Publication Date
US20090263310A1 true US20090263310A1 (en) 2009-10-22

Family

ID=41201267

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/384,979 Abandoned US20090263310A1 (en) 2008-04-18 2009-04-09 Method for making carbon nanotubes

Country Status (3)

Country Link
US (1) US20090263310A1 (en)
JP (1) JP5038349B2 (en)
CN (1) CN101559939B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110189394A1 (en) * 2008-10-29 2011-08-04 Suguru Noda Method for forming carbon nanotube
US20130234025A1 (en) * 2010-09-17 2013-09-12 Centre National De La Recherche Scientifique (Cnrs) Electron gun emitting under high voltage, in particular for electron microscopy
US20150068001A1 (en) * 2009-12-21 2015-03-12 4Wind Science And Engineering, Llc High performance carbon nanotube energy storage device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5374354B2 (en) * 2009-12-25 2013-12-25 日東電工株式会社 Carbon nanotube composite structure and adhesive member
CN102324335B (en) * 2011-06-07 2013-10-23 天津工业大学 Method for preparing compound electrical contact material
CN104637758B (en) * 2014-12-11 2017-08-29 温州大学 The method of direct growth carbon nanotube field emission cathode in nickeliferous metallic substrates
CN110240145B (en) * 2019-07-03 2021-05-28 西安交通大学 Transition layer-support-free metal-based array carbon nanotube electrode material and preparation method and application thereof
CN110697686B (en) * 2019-09-17 2021-06-22 北京化工大学 Method for preparing carbon nano tube by heating powder

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060234056A1 (en) * 2005-04-14 2006-10-19 Tsinghua University Thermal interface material and method for making the same
US7288321B2 (en) * 2002-11-21 2007-10-30 Tsinghua University Carbon nanotube array and method for forming same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010074667A (en) * 1998-06-19 2001-08-08 추후보정 Free-standing and aligned carbon nanotubes and synthesis thereof
JP2001048512A (en) * 1999-08-04 2001-02-20 Ulvac Japan Ltd Preparation of perpendicularly oriented carbon nanotube
CN1174918C (en) * 2001-09-05 2004-11-10 武汉大学 Nanometer carbon pipe preparing process
JP2005001936A (en) * 2003-06-11 2005-01-06 Fujikura Ltd Method of manufacturing carbon nanotube
JP5049474B2 (en) * 2005-08-22 2012-10-17 株式会社アルバック Method for producing graphite nanofiber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7288321B2 (en) * 2002-11-21 2007-10-30 Tsinghua University Carbon nanotube array and method for forming same
US20060234056A1 (en) * 2005-04-14 2006-10-19 Tsinghua University Thermal interface material and method for making the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110189394A1 (en) * 2008-10-29 2011-08-04 Suguru Noda Method for forming carbon nanotube
US8435601B2 (en) * 2008-10-29 2013-05-07 University Of Tokyo Method for forming carbon nanotube
US20150068001A1 (en) * 2009-12-21 2015-03-12 4Wind Science And Engineering, Llc High performance carbon nanotube energy storage device
US20130234025A1 (en) * 2010-09-17 2013-09-12 Centre National De La Recherche Scientifique (Cnrs) Electron gun emitting under high voltage, in particular for electron microscopy
US9048057B2 (en) * 2010-09-17 2015-06-02 Centre National De La Recherche Scientifique (Cnrs) Electron gun emitting under high voltage, in particular for electron microscopy

Also Published As

Publication number Publication date
JP5038349B2 (en) 2012-10-03
CN101559939B (en) 2011-05-04
JP2009256204A (en) 2009-11-05
CN101559939A (en) 2009-10-21

Similar Documents

Publication Publication Date Title
US20090263310A1 (en) Method for making carbon nanotubes
EP1948562B1 (en) Carbon nanotubes functionalized with fullerenes
US8236389B2 (en) Method for making carbon nanotube films
US7824649B2 (en) Apparatus and method for synthesizing a single-wall carbon nanotube array
US20070020167A1 (en) Method of preparing catalyst for manufacturing carbon nanotubes
US7713589B2 (en) Method for making carbon nanotube array
US7147831B2 (en) Carbon nanotube-based device and method for making the same
US7700048B2 (en) Apparatus for making carbon nanotube array
Lim et al. Plasma-assisted synthesis of carbon nanotubes
WO2003011755A1 (en) Production of carbon nanotubes
Wang et al. Nucleation and growth of well-aligned, uniform-sized carbon nanotubes by microwave plasma chemical vapor depositon
JP5358045B2 (en) Method for producing carbon nanotube
US9828253B2 (en) Nanotube film structure
US9963347B2 (en) Method for making nanotube film
US20070071895A1 (en) Method for making carbon nanotube-based device
US20060115409A1 (en) Method for producing carbon nanotube
US11365123B2 (en) Method for producing graphene nanospheres
Zhao et al. Growth of single-walled carbon nanotubes on substrates using carbon monoxide as carbon source
US8206624B2 (en) Method for producing carbon nanotube
KR101679693B1 (en) Method for preparing carbon nanotube and hybrid carbon nanotube composite
TWI385269B (en) Method of making carbon nanotube
Bistamam et al. An overview of selected catalytic chemical vapor deposition parameter for aligned carbon nanotube growth
KR100707199B1 (en) Low temperature growth method of single-walled carbon nanotubes by H2O plasma
Ge et al. Study on the controllable scale-up growth of vertically-aligned carbon nanotube arrays
Cheng et al. The Field Emission Properties of Multi-Wall Carbon Nanotubes on Flexible Carbon Cloth Substrate with Different Interlayers

Legal Events

Date Code Title Description
AS Assignment

Owner name: TSINGHUA UNIVERSITY, CHINA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DAI, FENG-WEI;YAO, YUAN;CHANG, CHANG-SHEN;AND OTHERS;REEL/FRAME:022589/0604

Effective date: 20090331

Owner name: HON HAI PRECISION INDUSTRY CO., LTD, TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DAI, FENG-WEI;YAO, YUAN;CHANG, CHANG-SHEN;AND OTHERS;REEL/FRAME:022589/0604

Effective date: 20090331

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION