US10187997B2 - Method for making contact with a component embedded in a printed circuit board - Google Patents

Method for making contact with a component embedded in a printed circuit board Download PDF

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Publication number
US10187997B2
US10187997B2 US15/122,114 US201515122114A US10187997B2 US 10187997 B2 US10187997 B2 US 10187997B2 US 201515122114 A US201515122114 A US 201515122114A US 10187997 B2 US10187997 B2 US 10187997B2
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Prior art keywords
component
layer
conductor
contacts
core
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US15/122,114
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US20170048984A1 (en
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Gerald Weidinger
Andreas Zluc
Johannes Stahr
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AT&S Austria Technologie und Systemtechnik AG
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AT&S Austria Technologie und Systemtechnik AG
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • H05K1/188Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or attaching to a structure having a conductive layer, e.g. a metal foil, such that the terminals of the component are connected to or adjacent to the conductive layer before embedding, and by using the conductive layer, which is patterned after embedding, at least partially for connecting the component
    • HELECTRICITY
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
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    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/13Mountings, e.g. non-detachable insulating substrates characterised by the shape
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    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
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    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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    • H01L24/96Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/064Photoresists
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
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    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04105Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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    • H01L2224/23Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
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    • H01L2224/241Disposition
    • H01L2224/24151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/24221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/24225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/24227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the HDI interconnect not connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the semiconductor or solid-state body being mounted in a cavity or on a protrusion of the item
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    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
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    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
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    • H01L2924/181Encapsulation
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    • H01L2924/18162Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor

Definitions

  • the invention pertains to a method for the bonding of a component embedded in a printed circuit board.
  • the invention furthermore pertains to a printed circuit board with at least one insulated layer and at least one structured conductor layer with conductor paths, with at least one component, which, by means of an adhesive layer, is embedded into a recess of the printed circuit board, with its contacts essentially being situated in the plane of an outer surface of the printed circuit board exhibiting the at least one conductor layer, and with conductive connections between the contacts of the components and the conductor paths of the conductor layer.
  • DE 10 2006 009 723 A1 describes a method of embedding a component in a circuit board and of its contacts, in which a first insulating layer with a conductor pattern is applied to a metallic substrate. This is followed by the creation of a window or cut-out for the chip in the first layer, into which the chip—while leaving a gap—is inserted and, using an adhesive, is fixated to the substrate. In doing so, the contacts of the chip are situated on a bonding side facing away from the substrate.
  • One objective of this invention is to establish a method with the use of which a conductor pattern in the plane of the contacts, including the respective bondings, can be produced easily and cost-efficiently without the risk of detaching layers.
  • embedded components can be “wired” in the same position or plane as the embedding, such that the printed circuit boards can be designed to be thinner and the aforementioned problems of the risk of detachment do not arise.
  • step f) it is recommended for the removal of the sections of the conductor layer in step f) is carried out by flash-etching.
  • the photoimageable lacquer used in step c) is advantageous for the photoimageable lacquer used in step c) to be epoxy-based lacquer.
  • step b) the component is embedded into an recess of the core using an adhesive layer, wherein the adhesive layer fully envelops all surfaces of the component—with the exception of those with the contacts—and essentially extends to the plane of the surface of the printed circuit board in which the end faces of the contacts are situated.
  • the recess of the core extends through the conductor layer into the insulating layer.
  • connection and the conductor paths of the conductor layer are situated in one plane, where the adhesive layer completely envelops all surfaces of the component, except those with the contacts, where the spaces between the contacts of the component are filled with a cured, photoimageable lacquer, and an additional conductor layer is applied to the end faces of the contacts as well as to a conductor layer of the printed circuit board in the area of the conductor paths.
  • the cured, photoimageable lacquer covers the cleared end faces of the adhesive layer between the outer wall of the component and the inner wall of the recess of the printed circuit board.
  • the printed circuit board again comprises a core exhibiting at least one insulating layer and at least one conductor layer having been applied to the insulating layer, wherein one outer surface of the core having been provided with at least one conductor layer exhibits a recess which extends through the conductor layer into the insulating layer, whereby the component is embedded into the recess of the core by means of an adhesive layer, and wherein the contacts of the component are essentially situated in the plane of the outer surface exhibiting the at least one conductor layer and the recess.
  • FIG. 1 in a section through a partial section a core made in the first steps of the method with an embedded component
  • FIG. 2 the structure of FIG. 1 after application of a photoimageable lacquer
  • FIG. 3 the structure after exposure and development of the photoimageable lacquer
  • FIG. 4 the structure after deposition of additional conductive material by application of a semi-additive process
  • FIG. 5 the structure of the finished printed circuit board after part of the conductive coatings have been etched away.
  • core used in the following in the context of the representational description shall be understood to mean a cured prepreg with a conductor layer (copper layer) on at least one surface.
  • FIG. 1 shows a section of a core 1 consisting of an insulating layer 2 , for example consisting of a prepreg material commonly used in the printed circuit board industry, like FR 4, and an upper conductor layer 3 as well as a lower conductor layer 4 .
  • an insulating layer 2 for example consisting of a prepreg material commonly used in the printed circuit board industry, like FR 4, and an upper conductor layer 3 as well as a lower conductor layer 4 .
  • Layer thicknesses are 100 microns for the insulating layer 2 and 1 to 5 microns, typically 2 microns, for upper and lower conductor layer 3 and 4 respectively.
  • a recess 5 is formed, into which—using an adhesive layer 7 —a component 6 is embedded, whereby the layer thickness of this adhesive layer, for example, is 20 to 200 microns.
  • the component 6 a semiconductor chip, for example, carries on an outer surface contacts 8 , e.g. copper pads, whereby the adhesive layer 7 envelops all surfaces of the component 6 with the exception of those with the contacts 8 , and essentially extends to the plane of the surface of the core 1 , in which the end faces of the contacts 8 are situated, in this case, therefore the bottom surface.
  • One possible adhesive for example, is a solvent-free or low-solvent epoxy resin adhesive with a glass softening point of typically between 120° and 150° C., which will be pressed, filled or injected into the recess 5 . After placement of the component 6 , this adhesive will be hardened at temperatures of 110° to 150° C.
  • an epoxy-based photoimageable resist 9 is applied at least to the outer surface of the core 1 with the end faces of the contacts 8 , with reference being made to FIG. 2 .
  • examples of products and materials suitable for this purpose are the XB7081 lacquer with the trade name Probelec® of the Huntsman Co. or the photoresist SU-8 from Microchem® Corp known from lithographic galvanoplasty (LIGA).
  • the resist 9 is filling all spaces between the contacts 8 of the component 6 , and also extends across the lower conductor layer 4 .
  • a photolithographic process commonly used in printed circuit board manufacturing can be used to create the pattern (structuring), starting with exposure using film masking or LDI (Laser Direct Imaging). This is followed by development, obtainment of the patterns after washing-off with suitable chemicals, and the complete curing of the material. Curing is performed by means of conventional curing methods like thermal curing, UV- or IR-curing, application of laser radiation etc. The structuring and the exposure is performed in such manner that the contacts 8 , more specifically their end faces, will be cleared, for which purpose reference is made to FIG. 3 .
  • This structuring/imaging process is performed such that the cured, photoimageable resist 9 covers the clear end faces of the adhesive layer 7 between the outer wall of the component 6 and the inner wall of the recess 5 of the core 1 , and that the lower conductor layer 4 is cleared again.
  • a layer 10 of conductor material is applied in the desired areas, in particular for conductor paths, which is deposited also under formation of interconnecting paths 11 starting at the end faces 8 to the desired conductor pattern.
  • the lower conductor layer 4 is amplified in the area of the desired conductor paths or conductor pattern. This result is shown in FIG. 4 .
  • bridges 4 b continue to exist between the thickened sections of the lower conductor layer 4 through layer 10 , which are to form the conductor paths, these bridges 4 b and any other undesirable conductor material is removed in an additional step.
  • This is preferably done using so-called “flash etching”, meaning the etching-off of the base copper foil and low-grade removal of the galvanically deposited copper layers.
  • This etching process is performed, for example, with an acidic medium, e.g. HCl with the addition of H 2 O 2 and of stabilizers, wherein the small crystallites of the base film are dissolved significantly faster than the electro-deposited layers, and selective etching is achieved.
  • FIG. 5 shows the finished printed circuit board 13 with the embedded and bonded component 6 .
  • the upper conductor layer 3 may also be patterned in the same way. Also possible is the formation of vias (conductive feed-throughs) between the two conductor layers, just as additional insulating and conductor layers may be formed.
  • FIGS. 1 to 5 generally only show detail sections of a larger printed circuit board pattern, and that in practice, a plurality of components may be embedded and connected to conductor patterns at different locations on a printed circuit board.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)
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US20190082543A1 (en) * 2014-02-27 2019-03-14 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Method for Making Contact with a Component Embedded in a Printed Circuit Board
US11172576B2 (en) 2013-11-27 2021-11-09 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Method for producing a printed circuit board structure

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AT515101B1 (de) 2013-12-12 2015-06-15 Austria Tech & System Tech Verfahren zum Einbetten einer Komponente in eine Leiterplatte
AT515447B1 (de) 2014-02-27 2019-10-15 At & S Austria Tech & Systemtechnik Ag Verfahren zum Kontaktieren eines in eine Leiterplatte eingebetteten Bauelements sowie Leiterplatte
US11178772B2 (en) 2018-03-29 2021-11-16 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Component carrier connected with a separate tilted component carrier for short electric connection
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US11172576B2 (en) 2013-11-27 2021-11-09 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Method for producing a printed circuit board structure
US20190082543A1 (en) * 2014-02-27 2019-03-14 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Method for Making Contact with a Component Embedded in a Printed Circuit Board
US11523520B2 (en) * 2014-02-27 2022-12-06 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Method for making contact with a component embedded in a printed circuit board

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