TWI597474B - Measuring device - Google Patents

Measuring device Download PDF

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Publication number
TWI597474B
TWI597474B TW105109599A TW105109599A TWI597474B TW I597474 B TWI597474 B TW I597474B TW 105109599 A TW105109599 A TW 105109599A TW 105109599 A TW105109599 A TW 105109599A TW I597474 B TWI597474 B TW I597474B
Authority
TW
Taiwan
Prior art keywords
corner
measurement
objective lens
measured
microscope
Prior art date
Application number
TW105109599A
Other languages
English (en)
Chinese (zh)
Other versions
TW201638554A (zh
Inventor
Kazunori Tanaka
Shinichiro Tsuruno
Original Assignee
Sinto S-Precision Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sinto S-Precision Ltd filed Critical Sinto S-Precision Ltd
Publication of TW201638554A publication Critical patent/TW201638554A/zh
Application granted granted Critical
Publication of TWI597474B publication Critical patent/TWI597474B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
TW105109599A 2015-04-22 2016-03-28 Measuring device TWI597474B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015087388A JP6464021B2 (ja) 2015-04-22 2015-04-22 測定装置

Publications (2)

Publication Number Publication Date
TW201638554A TW201638554A (zh) 2016-11-01
TWI597474B true TWI597474B (zh) 2017-09-01

Family

ID=57419015

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105109599A TWI597474B (zh) 2015-04-22 2016-03-28 Measuring device

Country Status (4)

Country Link
JP (1) JP6464021B2 (ja)
KR (1) KR101833611B1 (ja)
CN (1) CN106066158B (ja)
TW (1) TWI597474B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108050934B (zh) * 2017-12-25 2020-07-14 武汉比天科技有限责任公司 一种带倒角工件的视觉垂直定位方法
CN108195319B (zh) * 2017-12-25 2020-07-14 武汉比天科技有限责任公司 一种带倒角工件的视觉倾斜定位方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633142U (ja) * 1992-09-25 1994-04-28 安藤電気株式会社 ２カメラ撮像機構
US6404544B1 (en) * 1999-06-01 2002-06-11 Optical Perspectives Group, Llc Wavelength multiplexed quantitative differential interference contrast microscopy
JP2001241921A (ja) * 2000-03-01 2001-09-07 Nippon Electric Glass Co Ltd 板ガラスの寸法測定方法
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal
DE10223107A1 (de) * 2002-05-22 2003-12-04 Zeiss Carl Jena Gmbh Vorrichtung zur Abbildung von Gegenständen
JP2007240503A (ja) * 2005-04-08 2007-09-20 Hitachi Kokusai Electric Inc 顕微鏡撮像装置及び寸法測定装置
JP4652883B2 (ja) * 2005-04-28 2011-03-16 日本発條株式会社 測定装置及び測定方法
CN101339144B (zh) * 2008-08-14 2010-12-29 中国印钞造币总公司 硬币双面自动检测装置
JP2010267665A (ja) * 2009-05-12 2010-11-25 Sumitomo Electric Ind Ltd 光送信モジュール
JP2014085296A (ja) * 2012-10-26 2014-05-12 Tokyo Seimitsu Co Ltd ウェーハ形状測定装置
JP2016085034A (ja) * 2013-02-19 2016-05-19 旭硝子株式会社 透明板状体表面検査用撮像システム

Also Published As

Publication number Publication date
KR20160125884A (ko) 2016-11-01
JP2016205985A (ja) 2016-12-08
CN106066158B (zh) 2018-11-02
TW201638554A (zh) 2016-11-01
KR101833611B1 (ko) 2018-02-28
JP6464021B2 (ja) 2019-02-06
CN106066158A (zh) 2016-11-02

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