KR101833611B1 - 측정 장치 - Google Patents

측정 장치 Download PDF

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Publication number
KR101833611B1
KR101833611B1 KR1020160037693A KR20160037693A KR101833611B1 KR 101833611 B1 KR101833611 B1 KR 101833611B1 KR 1020160037693 A KR1020160037693 A KR 1020160037693A KR 20160037693 A KR20160037693 A KR 20160037693A KR 101833611 B1 KR101833611 B1 KR 101833611B1
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KR
South Korea
Prior art keywords
measurement
measurement object
corner cube
objective lens
microscope
Prior art date
Application number
KR1020160037693A
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English (en)
Korean (ko)
Other versions
KR20160125884A (ko
Inventor
가즈노리 다나카
신이치로 츠루노
Original Assignee
신토 에스 프레시젼 가부시키가이샤
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Publication of KR20160125884A publication Critical patent/KR20160125884A/ko
Application granted granted Critical
Publication of KR101833611B1 publication Critical patent/KR101833611B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
KR1020160037693A 2015-04-22 2016-03-29 측정 장치 KR101833611B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015087388A JP6464021B2 (ja) 2015-04-22 2015-04-22 測定装置
JPJP-P-2015-087388 2015-04-22

Publications (2)

Publication Number Publication Date
KR20160125884A KR20160125884A (ko) 2016-11-01
KR101833611B1 true KR101833611B1 (ko) 2018-02-28

Family

ID=57419015

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160037693A KR101833611B1 (ko) 2015-04-22 2016-03-29 측정 장치

Country Status (4)

Country Link
JP (1) JP6464021B2 (ja)
KR (1) KR101833611B1 (ja)
CN (1) CN106066158B (ja)
TW (1) TWI597474B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108050934B (zh) * 2017-12-25 2020-07-14 武汉比天科技有限责任公司 一种带倒角工件的视觉垂直定位方法
CN108195319B (zh) * 2017-12-25 2020-07-14 武汉比天科技有限责任公司 一种带倒角工件的视觉倾斜定位方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001241921A (ja) * 2000-03-01 2001-09-07 Nippon Electric Glass Co Ltd 板ガラスの寸法測定方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633142U (ja) * 1992-09-25 1994-04-28 安藤電気株式会社 ２カメラ撮像機構
US6404544B1 (en) * 1999-06-01 2002-06-11 Optical Perspectives Group, Llc Wavelength multiplexed quantitative differential interference contrast microscopy
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal
DE10223107A1 (de) * 2002-05-22 2003-12-04 Zeiss Carl Jena Gmbh Vorrichtung zur Abbildung von Gegenständen
JP2007240503A (ja) * 2005-04-08 2007-09-20 Hitachi Kokusai Electric Inc 顕微鏡撮像装置及び寸法測定装置
JP4652883B2 (ja) * 2005-04-28 2011-03-16 日本発條株式会社 測定装置及び測定方法
CN101339144B (zh) * 2008-08-14 2010-12-29 中国印钞造币总公司 硬币双面自动检测装置
JP2010267665A (ja) * 2009-05-12 2010-11-25 Sumitomo Electric Ind Ltd 光送信モジュール
JP2014085296A (ja) * 2012-10-26 2014-05-12 Tokyo Seimitsu Co Ltd ウェーハ形状測定装置
JP2016085034A (ja) * 2013-02-19 2016-05-19 旭硝子株式会社 透明板状体表面検査用撮像システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001241921A (ja) * 2000-03-01 2001-09-07 Nippon Electric Glass Co Ltd 板ガラスの寸法測定方法

Also Published As

Publication number Publication date
KR20160125884A (ko) 2016-11-01
JP2016205985A (ja) 2016-12-08
CN106066158B (zh) 2018-11-02
TW201638554A (zh) 2016-11-01
JP6464021B2 (ja) 2019-02-06
CN106066158A (zh) 2016-11-02
TWI597474B (zh) 2017-09-01

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E701 Decision to grant or registration of patent right
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