TWI580586B - Printing device and printing method - Google Patents
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Description
本發明係關於一種印刷裝置及印刷方法。 The present invention relates to a printing apparatus and a printing method.
於液晶顯示裝置、佈線電路基板等之製造步驟中，為了於各種基板形成電極及佈線等之圖案，使用光微影技術。利用光微影技術能以較高之精度形成微細之圖案。 In the manufacturing steps of a liquid crystal display device, a wired circuit board, or the like, a photolithography technique is used in order to form patterns such as electrodes and wirings on various substrates. The use of photolithography enables the formation of fine patterns with high precision.
近年來，提出有藉由使用導電性墨水之印刷技術代替光微影技術而於基板上形成電極及佈線等之圖案之方法。藉由使用印刷技術而減少圖案之形成所必需之步驟數。 In recent years, there has been proposed a method of forming a pattern of an electrode or a wiring on a substrate by using a printing technique using a conductive ink instead of a photolithography technique. The number of steps necessary to reduce the formation of a pattern is reduced by using printing techniques.
作為使用印刷技術之圖案之形成方法存在平版印刷。於平版印刷中，將墨水自經上墨之版轉印至毯覆式滾筒。其後，經轉印之墨水自毯覆式滾筒被再次轉印至基板等對象物。關於平版印刷，為了提高印刷之墨水圖案之尺寸精度，提出有各種方法(例如參照日本專利特開2010-280085號公報)。 There is a lithography as a method of forming a pattern using a printing technique. In lithographic printing, the ink is transferred from the inked version to the blanket cylinder. Thereafter, the transferred ink is again transferred from the blanket cylinder to an object such as a substrate. Regarding lithographic printing, various methods have been proposed in order to improve the dimensional accuracy of the printed ink pattern (for example, refer to Japanese Laid-Open Patent Publication No. 2010-280085).
近年來，伴隨著元件之高密度化及高積體化，於基板上形成之圖案之微細化成為重要之課題。因此，對於利用平版印刷形成於基板上之墨水圖案亦要求更高之尺寸精度。 In recent years, with the increase in density and high integration of components, miniaturization of patterns formed on substrates has become an important issue. Therefore, higher dimensional accuracy is required for the ink pattern formed on the substrate by lithography.
本發明之目的在於提供一種能以較高之精度將所需之墨水圖案印刷至對象物之印刷裝置及印刷方法。 SUMMARY OF THE INVENTION An object of the present invention is to provide a printing apparatus and a printing method capable of printing a desired ink pattern onto an object with high precision.
根據本發明之一態樣之印刷裝置係對片狀之對象物進行印刷者，且包括：平台，其具有載置對象物之載置面；移動驅動部，其使平台向與載置面平行之一方向移動；轉印滾筒，其具有可保持墨水之外周面；旋轉驅動部，其使轉印滾筒旋轉；及控制部，其以於轉印滾筒之外周面與對象物接觸之狀態下將保持於轉印滾筒之墨水作為墨水圖案轉印至平台上之對象物之方式，控制移動驅動部及旋轉驅動部；且控制部構成為可調整轉印滾筒之周速與平台之移動速度之差。 A printing apparatus according to an aspect of the present invention is characterized in that a sheet-shaped object is printed, and includes: a platform having a mounting surface on which the object is placed; and a moving driving portion that causes the platform to be parallel to the mounting surface Moving in one direction; a transfer roller having a peripheral surface capable of holding the ink; a rotation driving portion that rotates the transfer roller; and a control portion that is in contact with the object outside the transfer roller The ink held in the transfer roller is controlled as an object of the ink pattern to be transferred onto the platform, and controls the movement driving portion and the rotation driving portion; and the control portion is configured to adjust the difference between the peripheral speed of the transfer roller and the moving speed of the platform .
於該印刷裝置中，於平台之載置面上載置對象物，於轉印滾筒之外周面保持墨水。於轉印滾筒之外周面與對象物接觸之狀態下將保持於轉印滾筒之墨水作為墨水圖案轉印至平台上之對象物。 In the printing apparatus, an object is placed on a mounting surface of the stage, and ink is held on the outer surface of the transfer cylinder. The ink held by the transfer roller is transferred to the object on the stage as an ink pattern in a state where the outer peripheral surface of the transfer roller is in contact with the object.
根據上述構成，可調整轉印滾筒之周速與平台之移動速度之差。藉此，可使印刷至對象物之墨水圖案之尺寸與設計尺寸等目標值一致或接近目標值。因此，可將所需之墨水圖案以較高之精度印刷至對象物。 According to the above configuration, the difference between the peripheral speed of the transfer roller and the moving speed of the stage can be adjusted. Thereby, the size of the ink pattern printed on the object can be made to coincide with or be close to the target value such as the design size. Therefore, the desired ink pattern can be printed to the object with high precision.
控制部亦可構成為可分別獨立地控制移動驅動部及旋轉驅動部。 The control unit may be configured to independently control the movement drive unit and the rotation drive unit.
於此情形時，可個別地調整轉印滾筒之周速及平台之移動速度。因此，印刷速度等印刷條件之調整之自由度提高。 In this case, the peripheral speed of the transfer roller and the moving speed of the stage can be individually adjusted. Therefore, the degree of freedom in adjustment of printing conditions such as printing speed is improved.
亦可為印刷裝置進而具備測定轉印至對象物之墨水圖案之一方向之長度之圖案測定部，控制部構成為可執行：第1控制，其於向作為對象物之第1對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第1速度差；第2控制，其以測定轉印至第1對象物之墨水圖案之長度之方式控制圖案測定部；及第3控制，其於向作為對象物之第2對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第2速度差；且第2速度差係基於藉由第2控制而測定之長度與預先規定之目標值之誤差，以向第2對象物轉印之墨水圖案之長度與目標值之誤差為0或接近0之方式決定。 Further, the printing device may further include a pattern measuring unit that measures the length of one of the ink patterns transferred to the object, and the control unit may be configured to perform a first control to transfer the first object to the object. In the ink pattern, the difference between the peripheral speed of the transfer roller and the moving speed of the stage is controlled to be the first speed difference, and the second control is to control the pattern measuring unit so as to measure the length of the ink pattern transferred to the first object. And a third control for controlling the difference between the peripheral speed of the transfer roller and the moving speed of the platform as the second speed difference when transferring the ink pattern to the second object as the object; and the second speed difference is The error between the length measured by the second control and the predetermined target value is determined such that the error between the length of the ink pattern transferred to the second object and the target value is 0 or close to zero.
於此情形時，於向第1對象物轉印墨水圖案時，轉印滾筒之周速與平台之移動速度之差被控制為第1速度差。又，轉印至第1對象物之墨水圖案之一方向之長度係由圖案測定部測定。基於所測定之長度與目標值之誤差決定第2速度差。 In this case, when the ink pattern is transferred to the first object, the difference between the peripheral speed of the transfer roller and the moving speed of the stage is controlled to be the first speed difference. Further, the length of one direction of the ink pattern transferred to the first object is measured by the pattern measuring unit. The second speed difference is determined based on the error between the measured length and the target value.
於向第2對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第2速度差。藉此，自轉印滾筒向第2對象物轉印之墨水圖案之長度與目標值之誤差為0或接近0。 When the ink pattern is transferred to the second object, the difference between the peripheral speed of the transfer roller and the moving speed of the stage is controlled to be the second speed difference. Thereby, the error between the length of the ink pattern transferred from the transfer roller to the second object and the target value is 0 or close to zero.
因此，與轉印至第1對象物之墨水圖案相比，轉印至第2對象物之墨水圖案之精度變高。因此，藉由重複第1、第2及第3控制，轉印至對象物之墨水圖案之精度提高。 Therefore, the accuracy of the ink pattern transferred to the second object is higher than that of the ink pattern transferred to the first object. Therefore, by repeating the first, second, and third controls, the accuracy of the ink pattern transferred to the object is improved.
亦可為控制部於藉由第2控制測定之長度小於目標值之情形時，以轉印滾筒之周速小於平台之移動速度之方式決定第2速度差，於藉由第2控制而測定之長度大於目標值之情形時，以轉印滾筒之周速大於平台之移動速度之方式決定第2速度差。 Alternatively, when the length of the control unit measured by the second control is smaller than the target value, the second speed difference may be determined such that the peripheral speed of the transfer roller is smaller than the moving speed of the platform, and the second speed difference is measured by the second control. When the length is larger than the target value, the second speed difference is determined such that the peripheral speed of the transfer roller is greater than the moving speed of the platform.
藉此，自轉印滾筒向第2對象物轉印之墨水圖案之長度與目標值之誤差為0或接近0。因此，轉印至第2對象物之墨水圖案之精度提高。 Thereby, the error between the length of the ink pattern transferred from the transfer roller to the second object and the target value is 0 or close to zero. Therefore, the accuracy of the ink pattern transferred to the second object is improved.
亦可為印刷裝置進而具備用以檢測一方向上之平台之位置之平台位置檢測部，平台位置檢測部包括：複數個線性光學尺，其等以於一方向排列且於一方向延伸之方式配置；第1及第2檢測部，其等構成為與平台一併移動並且可檢測各線性光學尺；及位置運算部，其基於利用第1及第2檢測部之至少一者進行之複數個線性光學尺之任一者之檢測算出平台之位置；且第1及第2檢測部係以於一方向上相隔之方式配置，以使第1及第2檢測部之至少一者能夠檢測複數個線性光學尺之任一者。 The printing device may further include a platform position detecting unit for detecting the position of the platform in one direction, and the platform position detecting unit includes: a plurality of linear optical scales arranged in one direction and extending in one direction; The first and second detecting units are configured to move together with the platform and detect the linear optical scales, and the position calculating unit is based on a plurality of linear opticals performed by at least one of the first and second detecting units The detection of the ruler calculates the position of the platform; and the first and second detection units are arranged to be spaced apart in one direction, so that at least one of the first and second detection units can detect a plurality of linear optical scales Either.
於此情形時，藉由第1及第2檢測部之至少一者檢測複數個線性光學尺之任一者。因此，藉由增加線性光學尺之數量，可不增大各線性 光學尺之長度而擴大平台位置之可檢測範圍。因此，能以較高之精度將墨水圖案轉印至較大之對象物。 In this case, any one of the plurality of linear optical scales is detected by at least one of the first and second detecting units. Therefore, by increasing the number of linear optical scales, it is possible to increase the linearity. The length of the optical scale increases the detectable range of the position of the platform. Therefore, the ink pattern can be transferred to a larger object with higher precision.
亦可為轉印至對象物之墨水圖案包含於一方向排列之第1及第2基準圖案，圖案測定部包含：基準圖案檢測部，其檢測第1及第2基準圖案；及距離運算部，其算出第1及第2基準圖案間之距離作為墨水圖案之一方向之長度；基準圖案檢測部於藉由使平台向一方向移動而使第1及第2基準圖案通過之軌道上之固定位置具有檢測區域，距離運算部基於當檢測第1基準圖案時由平台位置檢測部檢測出之平台之第1位置及當檢測第2基準圖案時由平台位置檢測部檢測出之平台之第2位置，算出第1及第2基準圖案間之距離。 The ink pattern transferred to the object may include first and second reference patterns arranged in one direction, and the pattern measuring unit includes a reference pattern detecting unit that detects the first and second reference patterns, and a distance calculating unit. The distance between the first and second reference patterns is calculated as the length in one direction of the ink pattern, and the reference pattern detecting portion is moved at a fixed position on the track through which the first and second reference patterns pass by moving the stage in one direction. The detection area is based on the first position of the platform detected by the platform position detecting unit when detecting the first reference pattern and the second position of the platform detected by the platform position detecting unit when the second reference pattern is detected. The distance between the first and second reference patterns is calculated.
於此情形時，於檢測第1基準圖案時利用平台位置檢測部檢測第1位置。又，於檢測第2基準圖案時利用平台位置檢測部檢測第2位置。 In this case, the first position is detected by the stage position detecting unit when the first reference pattern is detected. Further, when the second reference pattern is detected, the second position is detected by the stage position detecting unit.
如上所述，平台位置檢測部具有較高之檢測精度。藉此，基於利用平台位置檢測部檢測之第1及第2位置而以較高之精度算出第1及第2基準圖案間之距離。因此，可更準確地求出自轉印滾筒向第1對象物轉印之墨水圖案之長度與目標值之誤差。其結果，可適當地決定第2速度差。 As described above, the platform position detecting portion has a high detection accuracy. Thereby, the distance between the first and second reference patterns is calculated with high accuracy based on the first and second positions detected by the stage position detecting unit. Therefore, the error between the length of the ink pattern transferred from the transfer roller to the first object and the target value can be more accurately obtained. As a result, the second speed difference can be appropriately determined.
根據本發明之另一態樣之印刷方法，係對片狀之對象物進行印刷者，且包括如下步驟：使載置有對象物之平台向一方向移動；使具有保持墨水之外周面之轉印滾筒旋轉；藉由使旋轉之轉印滾筒之外周面與向一方向移動之對象物接觸而將保持於轉印滾筒之外周面之墨水作為墨水圖案轉印至對象物；及調整轉印步驟中之轉印滾筒之周速與平台之移動速度之差。 According to another aspect of the present invention, in a printing method, a sheet-shaped object is printed, and the method includes the steps of: moving a platform on which the object is placed in one direction; and having a rotation of the outer surface of the ink. The printing cylinder rotates; the ink held on the outer circumferential surface of the transfer roller is transferred to the object as an ink pattern by contacting the outer peripheral surface of the rotating transfer roller with the object moving in one direction; and adjusting the transfer step The difference between the peripheral speed of the transfer roller and the moving speed of the platform.
於該印刷方法中，藉由使旋轉之轉印滾筒之外周面與向一方向移動之對象物接觸而將保持於轉印滾筒之外周面之墨水作為墨水圖案轉印至對象物。 In the printing method, the ink held on the outer peripheral surface of the transfer roller is transferred to the object as an ink pattern by bringing the outer peripheral surface of the rotating transfer roller into contact with the object moving in one direction.
根據上述構成，可調整轉印滾筒之周速與平台之移動速度之差。藉此，可使印刷至對象物之墨水圖案之尺寸與設計尺寸等目標值一致或接近目標值。因此，能將所需之墨水圖案以較高之精度印刷至對象物。 According to the above configuration, the difference between the peripheral speed of the transfer roller and the moving speed of the stage can be adjusted. Thereby, the size of the ink pattern printed on the object can be made to coincide with or be close to the target value such as the design size. Therefore, the desired ink pattern can be printed to the object with high precision.
亦可為調整步驟包括：第1步驟，其於向作為對象物之第1對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第1速度差；第2步驟，其測定轉印至第1對象物之墨水圖案之一方向之長度；及第3步驟，其於第2步驟之後，於向作為對象物之第2對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第2速度差；第2速度差係基於藉由第2步驟測定之長度與預先規定之目標值之誤差，以向第2對象物轉印之墨水圖案之長度與目標值之誤差為0或接近0之方式決定。 The adjustment step may include: in the first step, when the ink pattern is transferred to the first object as the object, the difference between the peripheral speed of the transfer roller and the moving speed of the platform is controlled to be the first speed difference; In the second step, the length of one of the ink patterns transferred to the first object is measured; and the third step, after the second step, when the ink pattern is transferred to the second object as the object, The difference between the peripheral speed of the transfer roller and the moving speed of the platform is controlled to be the second speed difference; the second speed difference is based on the error between the length measured by the second step and a predetermined target value, to the second object The error between the length of the printed ink pattern and the target value is determined to be 0 or close to zero.
於此情形時，於向第1對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第1速度差。又，測定轉印至第1對象物之墨水圖案之一方向之長度。基於所測定之長度與目標值之誤差決定第2速度差。 In this case, when the ink pattern is transferred to the first object, the difference between the peripheral speed of the transfer roller and the moving speed of the stage is controlled to be the first speed difference. Further, the length of one direction of the ink pattern transferred to the first object was measured. The second speed difference is determined based on the error between the measured length and the target value.
於向第2對象物轉印墨水圖案時，將轉印滾筒之周速與平台之移動速度之差控制為第2速度差。藉此，自轉印滾筒向第2對象物轉印之墨水圖案之長度與目標值之誤差為0或接近0。 When the ink pattern is transferred to the second object, the difference between the peripheral speed of the transfer roller and the moving speed of the stage is controlled to be the second speed difference. Thereby, the error between the length of the ink pattern transferred from the transfer roller to the second object and the target value is 0 or close to zero.
因此，與轉印至第1對象物之墨水圖案相比，轉印至第2對象物之墨水圖案之精度變高。因此，藉由重複第1、第2及第3控制，轉印至對象物之墨水圖案之精度提高。 Therefore, the accuracy of the ink pattern transferred to the second object is higher than that of the ink pattern transferred to the first object. Therefore, by repeating the first, second, and third controls, the accuracy of the ink pattern transferred to the object is improved.
亦可為使平台向一方向移動之步驟包括檢測向一方向移動之平台之位置之步驟、及基於所檢測到之平台之位置調整平台之移動距離之步驟，且檢測平台之位置之步驟包括如下步驟：藉由以於一方向上相隔之方式配置之第1及第2檢測部之至少一者，檢測以於一方向排列 且於一方向延伸之方式配置之複數個線性光學尺之任一者；及基於利用第1及第2檢測部之至少一者進行之複數個線性光學尺之任一者之檢測算出平台之位置。 The step of moving the platform in one direction includes the steps of detecting the position of the platform moving in one direction, and the step of adjusting the moving distance of the platform based on the detected position of the platform, and the steps of detecting the position of the platform include the following Step: the detection is arranged in one direction by at least one of the first and second detecting portions arranged to be spaced apart in one direction And any one of a plurality of linear optical scales arranged to extend in one direction; and calculating a position of the platform based on detection by any one of a plurality of linear optical scales performed by at least one of the first and second detecting portions .
於此情形時，利用第1及第2檢測部之至少一者檢測複數個線性光學尺之任一者。因此，藉由增加線性光學尺之數量，可不增大各線性光學尺之長度而擴大平台之位置之可檢測範圍。因此，能以較高之精度將墨水圖案轉印至較大之對象物。 In this case, at least one of the first and second detecting units detects any one of the plurality of linear optical scales. Therefore, by increasing the number of linear optical scales, the detectable range of the position of the platform can be increased without increasing the length of each linear optical scale. Therefore, the ink pattern can be transferred to a larger object with higher precision.
1‧‧‧台座部 1‧‧‧Deputy Department
2‧‧‧本體基座 2‧‧‧ body base
3‧‧‧軌道 3‧‧‧ Track
4‧‧‧平台 4‧‧‧ platform
4S‧‧‧載置面 4S‧‧‧Loading surface
5‧‧‧平台驅動部(移動驅動部) 5‧‧‧ Platform drive unit (mobile drive unit)
6‧‧‧線性編碼器 6‧‧‧Linear encoder
7A‧‧‧滾筒升降驅動部 7A‧‧‧Drum Lifting Drive
7B‧‧‧滾筒支持台 7B‧‧‧Roll support desk
8‧‧‧支持板 8‧‧‧Support board
9‧‧‧噴嘴支持構件 9‧‧‧Nozzle support member
10‧‧‧主滾筒(轉印滾筒) 10‧‧‧Main roller (transfer roller)
11‧‧‧主滾筒旋轉驅動部(旋轉驅動部) 11‧‧‧Main drum rotation drive unit (rotary drive unit)
12‧‧‧滾筒本體部 12‧‧‧Roll body
13‧‧‧橡皮布 13‧‧‧ blanket
19‧‧‧旋轉編碼器 19‧‧‧Rotary encoder
20‧‧‧副滾筒 20‧‧‧Second roller
21‧‧‧副滾筒旋轉驅動部 21‧‧‧Sub-roller rotary drive
22‧‧‧副滾筒水平驅動部 22‧‧‧Sub-roller horizontal drive
29‧‧‧旋轉編碼器 29‧‧‧Rotary encoder
30‧‧‧噴嘴 30‧‧‧Nozzles
31‧‧‧噴嘴升降驅動部 31‧‧‧Nozzle lift drive
41‧‧‧雷射位移計 41‧‧‧ Laser Displacement Meter
61‧‧‧第1掃描頭(第1檢測部) 61‧‧‧1st scanning head (1st detecting part)
61a‧‧‧投光部 61a‧‧‧Projecting Department
61b‧‧‧受光部 61b‧‧‧Receiving Department
62‧‧‧第2掃描頭(第2檢測部) 62‧‧‧2nd scanning head (2nd detection part)
62a‧‧‧投光部 62a‧‧‧Projecting Department
62b‧‧‧受光部 62b‧‧‧Receiving Department
63‧‧‧線性光學尺 63‧‧‧Linear optical ruler
63a‧‧‧有效檢測區域 63a‧‧‧ Effective detection area
63b‧‧‧無效檢測區域 63b‧‧‧Invalid detection area
81‧‧‧相機(基準圖案檢測部) 81‧‧‧ Camera (reference pattern detection unit)
81r‧‧‧拍攝區域 81r‧‧‧Photographing area
81x‧‧‧原點 81x‧‧‧ origin
82‧‧‧帶狀板 82‧‧‧Strip plate
90‧‧‧控制裝置 90‧‧‧Control device
100‧‧‧印刷裝置 100‧‧‧Printing device
A1‧‧‧箭頭 A1‧‧‧ arrow
A2‧‧‧粗箭頭 A2‧‧‧ thick arrow
A3‧‧‧粗虛線箭頭 A3‧‧‧Dough dotted arrow
A4‧‧‧粗虛線箭頭 A4‧‧‧Dough dotted arrow
D‧‧‧距離 D‧‧‧Distance
D1‧‧‧距離 D1‧‧‧ distance
D11‧‧‧偏移 D11‧‧‧Offset
D12‧‧‧偏移 D12‧‧‧Offset
DR‧‧‧壓入量 DR‧‧‧Indentation
HD‧‧‧高度差量值 HD‧‧‧ height difference
L1‧‧‧長度 L1‧‧‧ length
L2‧‧‧長度 L2‧‧‧ length
P‧‧‧位置 P‧‧‧ position
P1‧‧‧位置 P1‧‧‧ position
P2‧‧‧位置 P2‧‧‧ position
R‧‧‧半徑 R‧‧‧ Radius
RA‧‧‧旋轉軸 RA‧‧‧Rotary axis
RP1‧‧‧基準圖案 RP1‧‧‧ reference pattern
RP2‧‧‧基準圖案 RP2‧‧‧ reference pattern
SD‧‧‧距離 SD‧‧‧ distance
VA‧‧‧鉛直軸 VA‧‧‧Lead straight shaft
W‧‧‧工件 W‧‧‧Workpiece
α‧‧‧中心角 ‧‧‧‧Center corner
圖1係本發明之一實施形態之印刷裝置之模式側視圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic side view of a printing apparatus according to an embodiment of the present invention.
圖2係圖1之印刷裝置之模式前視圖。 Figure 2 is a schematic front elevational view of the printing apparatus of Figure 1.
圖3係表示自主滾筒將墨水轉印至工件上時之主滾筒與工件之接觸狀態之一部分放大側視圖。 Fig. 3 is a partially enlarged side elevational view showing a state in which the main roller and the workpiece are in contact with each other when the ink is transferred onto the workpiece by the autonomous roller.
圖4(a)~(c)係用以說明測定兩個基準點圖案間之距離之方法之圖。 4(a) to (c) are diagrams for explaining a method of measuring the distance between two reference dot patterns.
圖5(a)~(c)係用以說明圖1之線性編碼器之基本構成及動作之模式側視圖。 5(a) to 5(c) are schematic side views showing the basic configuration and operation of the linear encoder of Fig. 1.
圖6係表示基於印刷程式之處理之內容之流程圖。 Figure 6 is a flow chart showing the content of the processing based on the printing program.
以下，一面參照圖式一面對本發明之一實施形態之印刷裝置及印刷方法進行說明。 Hereinafter, a printing apparatus and a printing method according to an embodiment of the present invention will be described with reference to the drawings.
圖1係本發明之一實施形態之印刷裝置之模式側視圖，圖2係圖1之印刷裝置100之模式前視圖。如圖1及圖2所示，印刷裝置100具有以沿一方向延伸之方式形成之台座部1。於台座部1之一端設置有控制裝置90。 1 is a schematic side view of a printing apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic front view of the printing apparatus 100 of FIG. 1. As shown in FIGS. 1 and 2, the printing apparatus 100 has a pedestal portion 1 formed to extend in one direction. A control device 90 is provided at one end of the pedestal portion 1.
於台座部1上設置具有長方體形狀之兩個本體基座2。兩個本體基 座2以隔著固定間隔平行地排列之方式配置。作為本體基座2例如使用包含花崗岩之石壓盤。 Two body bases 2 having a rectangular parallelepiped shape are provided on the pedestal portion 1. Two ontology bases The seats 2 are arranged in parallel so as to be arranged in parallel at regular intervals. As the body base 2, for example, a stone platen containing granite is used.
於兩個本體基座2上分別安裝兩條軌道3。兩條軌道3以相同高度平行地排列之方式水平地固定。於兩條軌道3上設置平台4。平台4構成為可於軌道3延伸之方向上移動。又，平台4具有朝向上方之載置面4S。於載置面4S載置片狀之印刷對象物或平板狀之版。作為片狀之印刷對象物，使用半導體基板、玻璃基板或具有可撓性之樹脂基材等。 Two rails 3 are respectively mounted on the two body bases 2. The two rails 3 are horizontally fixed in such a manner that the same height is arranged in parallel. A platform 4 is provided on the two tracks 3. The platform 4 is configured to be movable in a direction in which the rail 3 extends. Further, the stage 4 has a mounting surface 4S that faces upward. A sheet-shaped printing object or a flat plate is placed on the mounting surface 4S. As the sheet-like printing object, a semiconductor substrate, a glass substrate, or a flexible resin substrate or the like is used.
於以下說明中，將片狀之印刷對象物稱為工件W。又，將與載置面4S平行且與軌道3平行之方向稱為印刷方向。又，將於與載置面4S平行之面上與印刷方向正交之方向稱為寬度方向。 In the following description, a sheet-shaped printing object is referred to as a workpiece W. Further, a direction parallel to the placement surface 4S and parallel to the track 3 is referred to as a printing direction. Moreover, the direction orthogonal to the printing direction on the surface parallel to the mounting surface 4S is called a width direction.
於台座部1上之兩個本體基座2之間設置平台驅動部5。如圖1中粗箭頭A1所示，平台驅動部5使平台4於印刷方向移動。於平台4設置有兩個雷射位移計41及對準機構(未圖示)。對準機構例如構成為可調整載置面4S之高度及載置面4S之水平方向之位置。 A platform driving portion 5 is provided between the two body bases 2 on the pedestal portion 1. As shown by the thick arrow A1 in Fig. 1, the platform driving portion 5 moves the stage 4 in the printing direction. Two laser displacement meters 41 and an alignment mechanism (not shown) are provided on the platform 4. The alignment mechanism is configured, for example, to adjust the height of the mounting surface 4S and the position of the mounting surface 4S in the horizontal direction.
如圖2所示，兩個雷射位移計41以於較載置面4S更靠下方之位置於寬度方向排列之方式安裝於平台4之正面。各雷射位移計41為反射型之雷射位移計，具有出射部及受光部。出射部朝向上方出射雷射光。受光部接收自上方朝向下方反射之雷射光，將表示反射雷射光之位置(高度)之信號賦予至控制裝置90。 As shown in FIG. 2, the two laser displacement meters 41 are attached to the front surface of the stage 4 so as to be aligned in the width direction at a position lower than the mounting surface 4S. Each of the laser displacement meters 41 is a reflection type laser displacement meter, and has an emitting portion and a light receiving portion. The exit portion emits laser light upward. The light receiving unit receives the laser light reflected downward from the upper side, and supplies a signal indicating the position (height) of the reflected laser light to the control device 90.
例如，以覆蓋雷射位移計41之上方之方式於載置面4S上載置平板。於此情形時，雷射位移計41之受光部接收自平板之下表面朝向下方反射之雷射光，並將表示平板之下表面即載置面4S之上表面之高度之信號賦予至控制裝置90。藉此，於控制裝置90中檢測出載置面4S之高度。 For example, a flat plate is placed on the mounting surface 4S so as to cover the upper side of the laser displacement meter 41. In this case, the light receiving portion of the laser displacement meter 41 receives the laser light reflected downward from the lower surface of the flat plate, and gives a signal indicating the height of the lower surface of the flat surface, that is, the upper surface of the mounting surface 4S, to the control device 90. . Thereby, the height of the mounting surface 4S is detected in the control device 90.
於兩個本體基座2中之其中一個本體基座2上設置有線性編碼器6。線性編碼器6包含第1掃描頭61、第2掃描頭62、及複數個線性光學 尺63。 A linear encoder 6 is disposed on one of the two body bases 2 on the body base 2. The linear encoder 6 includes a first scanning head 61, a second scanning head 62, and a plurality of linear optics Ruler 63.
第1掃描頭61及第2掃描頭62構成為可檢測複數個線性光學尺63之任一者。更具體而言，第1掃描頭61及第2掃描頭62構成為可檢測線性光學尺63之下述狹縫，將表示狹縫之信號賦予至控制裝置90。藉此，於控制裝置90中，檢測出印刷方向上之平台4之位置。線性編碼器6之詳情將於下文進行敍述。 The first scanning head 61 and the second scanning head 62 are configured to detect any one of the plurality of linear optical scales 63. More specifically, the first scanning head 61 and the second scanning head 62 are configured to detect the following slit of the linear optical scale 63 and to provide a signal indicating the slit to the control device 90. Thereby, in the control device 90, the position of the stage 4 in the printing direction is detected. Details of the linear encoder 6 will be described below.
以於寬度方向上夾著台座部1之方式將兩個滾筒升降驅動部7A分別安裝於台座部1之兩側面。又，於兩個滾筒升降驅動部7A上分別設置兩個滾筒支持台7B。進而，於兩個滾筒支持台7B上分別設置兩個支持板8。如圖1及圖2中粗箭頭A2所示，各滾筒升降驅動部7A使對應之滾筒支持台7B沿鉛直方向移動。 The two drum lifting/lowering driving portions 7A are attached to both side faces of the pedestal portion 1 so as to sandwich the pedestal portion 1 in the width direction. Further, two roller support tables 7B are provided on the two drum lift driving portions 7A, respectively. Further, two support plates 8 are provided on the two roller support tables 7B, respectively. As shown by the thick arrow A2 in Fig. 1 and Fig. 2, each of the drum raising/lowering driving portions 7A moves the corresponding drum supporting table 7B in the vertical direction.
以於兩個支持板8之間沿寬度方向延伸之方式設置主滾筒10及副滾筒20。主滾筒10及副滾筒20具有可保持墨水之外周面。 The main drum 10 and the sub-roller 20 are disposed in such a manner that the two support plates 8 extend in the width direction. The main roller 10 and the sub-roller 20 have a peripheral surface that can hold ink.
如圖1所示，於自一側觀察印刷裝置100之情形時，主滾筒10位於軌道3之中央部上方。副滾筒20位於主滾筒10之斜上方。又，副滾筒20可向印刷方向移動地由兩個支持板8支持。 As shown in FIG. 1, when the printing apparatus 100 is viewed from one side, the main drum 10 is positioned above the center portion of the rail 3. The sub-roller 20 is located obliquely above the main drum 10. Further, the sub-roller 20 is supported by the two support plates 8 so as to be movable in the printing direction.
於兩個支持板8中之其中一個支持板8設置主滾筒旋轉驅動部11、副滾筒旋轉驅動部21及副滾筒水平驅動部22(圖1)。主滾筒旋轉驅動部11使主滾筒10旋轉。副滾筒旋轉驅動部21使副滾筒20旋轉。如圖1中粗虛線箭頭A3所示，副滾筒水平驅動部22使副滾筒20沿印刷方向移動。 One of the two support plates 8 is provided with a main drum rotation driving portion 11, a sub-roller rotation driving portion 21, and a sub-roller horizontal driving portion 22 (FIG. 1). The main drum rotation driving portion 11 rotates the main drum 10. The sub-trum rotation driving unit 21 rotates the sub-tray 20. As shown by the thick broken line arrow A3 in Fig. 1, the sub-roller horizontal drive unit 22 moves the sub-roller 20 in the printing direction.
如圖2所示，於兩個支持板8中之另一個支持板8設置兩個旋轉編碼器19、29。其中一個旋轉編碼器19安裝於主滾筒10之旋轉軸，將表示主滾筒10之旋轉角度之信號賦予至控制裝置90。另一個旋轉編碼器29安裝於副滾筒20之旋轉軸，將表示副滾筒20之旋轉角度之信號賦予至控制裝置90。 As shown in FIG. 2, two other rotary encoders 19, 29 are provided on the other of the two support plates 8. One of the rotary encoders 19 is attached to the rotating shaft of the main drum 10, and a signal indicating the rotation angle of the main drum 10 is given to the control device 90. The other rotary encoder 29 is attached to the rotary shaft of the sub-roller 20, and gives a signal indicating the rotation angle of the sub-roller 20 to the control device 90.
以連接兩個支持板8之上端部之方式設置噴嘴支持構件9。於噴嘴 支持構件9之中央部設置噴嘴升降驅動部31。於噴嘴升降驅動部31設置沿寬度方向延伸之噴嘴30。自未圖示之供給裝置對噴嘴30供給墨水。如圖1及圖2中粗虛線箭頭A4所示，噴嘴升降驅動部31使噴嘴30沿鉛直方向移動。 The nozzle support member 9 is provided in such a manner as to connect the upper ends of the two support plates 8. At the nozzle A nozzle lift driving portion 31 is provided at a central portion of the support member 9. A nozzle 30 extending in the width direction is provided in the nozzle lifting and lowering driving portion 31. The nozzle 30 is supplied with ink from a supply device (not shown). As shown by the thick broken line arrow A4 in FIGS. 1 and 2, the nozzle elevation drive unit 31 moves the nozzle 30 in the vertical direction.
噴嘴支持構件9構成為可於印刷方向上之複數個位置安裝於兩個支持板8上。藉此，可將噴嘴30定位於印刷方向上之複數個位置。例如，於對主滾筒10供給墨水之情形時，可將噴嘴30定位於主滾筒10上。又，於對副滾筒20供給墨水之情形時，可將噴嘴30定位於副滾筒20上。 The nozzle supporting member 9 is configured to be attachable to the two support plates 8 at a plurality of positions in the printing direction. Thereby, the nozzles 30 can be positioned at a plurality of positions in the printing direction. For example, in the case where ink is supplied to the main drum 10, the nozzle 30 can be positioned on the main drum 10. Further, when the ink is supplied to the sub-roller 20, the nozzle 30 can be positioned on the sub-roller 20.
以連接兩個支持板8之一部分之方式設置帶狀板82(圖2)。於帶狀板82安裝相機81。作為相機81例如使用CCD(電荷藕合元件)相機。相機81配置為可拍攝於印刷方向移動之平台4之一部分，並將藉由拍攝而獲得之信號賦予至控制裝置90。 The strip plate 82 (Fig. 2) is provided in such a manner as to connect one of the two support plates 8. The camera 81 is mounted on the strip plate 82. As the camera 81, for example, a CCD (Charge Coupled Element) camera is used. The camera 81 is configured to capture a portion of the stage 4 that moves in the printing direction, and imparts a signal obtained by shooting to the control device 90.
控制裝置90例如包含CPU(中央運算處理裝置)及記憶體。於記憶體中記憶系統程式及下述印刷程式，並且記憶印刷條件等各種資料。CPU執行記憶於記憶體之系統程式及下述印刷程式，且控制印刷裝置100之各構成要素之動作。 The control device 90 includes, for example, a CPU (Central Processing Unit) and a memory. Memory system programs and the following printing programs are stored in the memory, and various materials such as printing conditions are memorized. The CPU executes a system program stored in the memory and a print program described below, and controls the operation of each component of the printing apparatus 100.
於本實施形態中，控制裝置90構成為可分別獨立地控制上述平台驅動部5及主滾筒旋轉驅動部11。例如，控制裝置90可藉由基於旋轉編碼器19之輸出對主滾筒旋轉驅動部11進行反饋控制，而獨立地調整主滾筒10之旋轉量及周速。又，控制裝置90可藉由基於線性編碼器6之輸出對平台驅動部5進行反饋控制，而獨立地調整平台4之移動距離及移動速度。藉此，印刷速度等印刷條件之調整之自由度提高。再者，控制裝置90亦可代替CPU及記憶體而由微電腦構成。 In the present embodiment, the control device 90 is configured to independently control the platform driving unit 5 and the main drum rotation driving unit 11. For example, the control device 90 can independently adjust the amount of rotation of the main drum 10 and the peripheral speed by performing feedback control of the main drum rotation driving portion 11 based on the output of the rotary encoder 19. Further, the control device 90 can independently adjust the moving distance and the moving speed of the platform 4 by performing feedback control on the platform driving portion 5 based on the output of the linear encoder 6. Thereby, the degree of freedom in adjustment of printing conditions such as printing speed is improved. Further, the control device 90 may be constituted by a microcomputer instead of the CPU and the memory.
於利用印刷裝置100進行之工件W之印刷時，首先，於主滾筒10之外周面上塗佈應向工件W印刷之圖案之墨水。可於向主滾筒10之墨 水之塗佈方法中使用各種方法。 In the printing of the workpiece W by the printing apparatus 100, first, the ink to be printed on the workpiece W is applied to the outer peripheral surface of the main drum 10. Can be inked to the main roller 10 Various methods are used in the method of coating water.
例如，於進行軟版印刷之情形時，於主滾筒10之外周面上安裝具有彈性之凸版。於該狀態下，於自噴嘴30將墨水塗佈於副滾筒20之外周面上之後，將保持於副滾筒20之外周面之墨水轉印至主滾筒10之外周面上之凸版。藉此，將應向工件W印刷之圖案之墨水保持於凸版之凸部上。具有彈性之凸版例如由樹脂形成。 For example, in the case of performing flexographic printing, a relief having elasticity is attached to the outer peripheral surface of the main drum 10. In this state, after the ink is applied from the nozzle 30 to the outer peripheral surface of the sub-roller 20, the ink held on the outer peripheral surface of the sub-roller 20 is transferred to the relief on the outer peripheral surface of the main drum 10. Thereby, the ink to be printed on the workpiece W is held on the convex portion of the relief. The elastic relief is formed, for example, of a resin.
又，於進行凹版膠印方法之情形時，於副滾筒20之外周面上安裝具有彈性之凹版，並且於主滾筒10之外周面上安裝具有彈性之平版。於此狀態下，於自噴嘴30對副滾筒20上之凹版供給墨水之後，使保持於凹版之凹部內之墨水轉印至主滾筒10上之平版。藉此，將應向工件W印刷之圖案之墨水保持於平版上。具有彈性之凹版及平版例如由樹脂形成。 Further, in the case of performing the gravure offset printing method, a concave plate having elasticity is attached to the outer peripheral surface of the sub-roller 20, and a screed having elasticity is attached to the outer peripheral surface of the main drum 10. In this state, after the ink is supplied from the nozzle 30 to the intaglio on the sub-roller 20, the ink held in the concave portion of the intaglio plate is transferred to the lithographic plate on the main drum 10. Thereby, the ink to be printed on the workpiece W is held on the lithographic plate. The intaglio plate and the lithographic plate having elasticity are formed of, for example, a resin.
除上述之例以外，亦可使用平板狀之凹版或具有彈性之凹版進行平版印刷。該等凹版例如由包含納玻璃、石英、藍寶石及矽中之至少一者作為基材之材料形成。 In addition to the above examples, lithographic printing may also be carried out using a flat gravure or a gravure with elasticity. The intaglio plates are formed, for example, of a material including at least one of nano glass, quartz, sapphire, and enamel as a substrate.
於本實施形態中，版之凸部中之平坦度較佳為20μm以下。又，版之凹部之深度即凹部之底部與凸部之上表面之間之距離較佳為10μm以下。於該等情形時，印刷至工件W之墨水圖案之尺寸精度提高。 In the present embodiment, the flatness in the convex portion of the plate is preferably 20 μm or less. Further, the depth of the concave portion of the plate, that is, the distance between the bottom of the concave portion and the upper surface of the convex portion is preferably 10 μm or less. In such cases, the dimensional accuracy of the ink pattern printed onto the workpiece W is improved.
此處，如圖1所示，於印刷方向上將自主滾筒10朝向副滾筒20之相反側之方向稱為前方，將自主滾筒10朝向副滾筒20之方向稱為後方。 Here, as shown in FIG. 1, the direction in which the autonomous drum 10 faces the opposite side of the sub-roller 20 in the printing direction is referred to as the front, and the direction in which the autonomous drum 10 faces the sub-roller 20 is referred to as the rear.
當將墨水保持於主滾筒10之外周面時，以寬度方向上之主滾筒10與載置面4S之間隔為下述高度差量值HD(圖3)且成為固定之方式分別調整主滾筒10之兩端部之高度。該調整例如藉由將圖2之雷射位移計41配置於主滾筒10之下方，且檢測主滾筒10之下端部之高度並且分別控制兩個滾筒升降驅動部7A而進行。再者，主滾筒10之高度調整亦可於將墨水塗佈於主滾筒10之外周面之前進行。 When the ink is held on the outer peripheral surface of the main drum 10, the main drum 10 is adjusted so that the distance between the main drum 10 and the mounting surface 4S in the width direction is the following height difference magnitude HD (Fig. 3) and is fixed. The height of the two ends. This adjustment is performed, for example, by arranging the laser displacement gauge 41 of FIG. 2 below the main drum 10, and detecting the height of the lower end portion of the main drum 10 and controlling the two drum elevation driving portions 7A, respectively. Further, the height adjustment of the main drum 10 can also be performed before the ink is applied to the outer peripheral surface of the main drum 10.
其後，以將平台4配置於主滾筒10之後方之狀態於載置面4S上載置工件W。繼而，藉由平台驅動部5使平台4自主滾筒10之後方向前方移動，並且藉由主滾筒旋轉驅動部11使主滾筒10旋轉。此時，主滾筒10之外周面之一部分與工件W之上表面接觸，藉此，將保持於主滾筒10之外周面之墨水作為墨水圖案轉印至工件W。 Thereafter, the workpiece W is placed on the mounting surface 4S in a state in which the stage 4 is placed behind the main drum 10. Then, the platform drive unit 5 moves the platform 4 in the rear direction of the autonomous drum 10, and the main drum 10 is rotated by the main drum rotation driving unit 11. At this time, one portion of the outer peripheral surface of the main drum 10 is in contact with the upper surface of the workpiece W, whereby the ink held on the outer peripheral surface of the main drum 10 is transferred to the workpiece W as an ink pattern.
圖3係表示自主滾筒10將墨水轉印至工件W上時之主滾筒10與工件W之接觸狀態之一部分放大側視圖。如圖3所示，主滾筒10包含滾筒本體部12及橡皮布13。橡皮布13具有彈性且以覆蓋滾筒本體部12之外周面之方式設置。 Fig. 3 is a partially enlarged side elevational view showing a state in which the main drum 10 and the workpiece W are in contact with each other when the autonomous drum 10 transfers ink onto the workpiece W. As shown in FIG. 3, the main drum 10 includes a drum body portion 12 and a blanket 13. The blanket 13 has elasticity and is provided to cover the outer peripheral surface of the drum body portion 12.
為了將保持於橡皮布13之外周面之墨水向工件W上轉印，必須將橡皮布13之表面以固定之壓力抵壓於工件W之上表面。於此情形時，橡皮布13於橡皮布13與工件W之接觸部變形。藉此，於通過主滾筒10之旋轉軸RA之鉛直軸VA上，旋轉軸RA與工件W之上表面之位置P之間之距離D較主滾筒10之半徑R短固定距離。將該固定距離稱為壓入量DR。 In order to transfer the ink held on the outer peripheral surface of the blanket 13 onto the workpiece W, the surface of the blanket 13 must be pressed against the upper surface of the workpiece W with a constant pressure. In this case, the blanket 13 is deformed at the contact portion of the blanket 13 and the workpiece W. Thereby, the distance D between the rotational axis RA and the position P of the upper surface of the workpiece W on the vertical axis VA passing through the rotational axis RA of the main drum 10 is shorter than the radius R of the main drum 10 by a fixed distance. This fixed distance is referred to as a press-in amount DR.
壓入量DR作為印刷條件而被預先設定。考慮工件W之厚度與壓入量DR，墨水之轉印時之主滾筒10與平台4之間隔被設定為高度差量值HD。 The press-in amount DR is set in advance as a printing condition. Considering the thickness of the workpiece W and the amount of pressing DR, the interval between the main drum 10 and the stage 4 at the time of transfer of the ink is set to the height difference value HD.
此處，將於與旋轉軸RA正交之面內主滾筒10之與工件W接觸之部分之長度設為L1。又，將連接於與旋轉軸RA正交之面內主滾筒10之與工件W接觸之部分之兩端與旋轉軸RA之兩條直線間之角度設為α。進而，於假定主滾筒10未與工件W接觸之情形時，將中心角設為α之主滾筒10之外周面上之圓弧之長度設為L2(參照圖3之虛線部)。又，於以下之說明中，將長度L1與長度L2之差量稱為周長差。 Here, the length of the portion of the main drum 10 that is in contact with the workpiece W in the plane orthogonal to the rotation axis RA is set to L1. Further, the angle between the two ends of the portion of the in-plane main drum 10 that is in contact with the workpiece W and the two axes of the rotation axis RA that are connected to the surface perpendicular to the rotation axis RA is α. Further, when the main drum 10 is not in contact with the workpiece W, the length of the arc on the outer peripheral surface of the main drum 10 whose center angle is α is set to L2 (see a broken line portion in Fig. 3). Further, in the following description, the difference between the length L1 and the length L2 is referred to as a circumferential length difference.
根據壓入量DR之大小，周長差可能會顯著變大。例如，於自直徑為300mm之主滾筒10將墨水轉印至工件W之情形時，長度L1為2.0mm 時之壓入量DR變為3.33μm，周長差為0.016μm。相對於此，長度L1為5.0mm時之壓入量DR變為20.83μm，周長差為0.237μm。如此，周長差隨著長度L1及壓入量DR變大而變大。即，周長差隨著與工件W接觸之主滾筒10之外周面之面積變大而變大。 Depending on the amount of press-in DR, the difference in circumference may become significantly larger. For example, when the ink is transferred to the workpiece W from the main drum 10 having a diameter of 300 mm, the length L1 is 2.0 mm. At this time, the amount of press-in DR became 3.33 μm, and the difference in circumference was 0.016 μm. On the other hand, when the length L1 was 5.0 mm, the press-in amount DR was 20.83 μm, and the circumferential length difference was 0.237 μm. As a result, the circumferential length difference becomes larger as the length L1 and the press-in amount DR become larger. That is, the circumferential length difference becomes larger as the area of the outer circumferential surface of the main drum 10 that is in contact with the workpiece W becomes larger.
為了將塗佈於主滾筒10之外周面之墨水轉印至工件W，例如，考慮使位置P中之主滾筒10之周速與平台4之移動速度相等。然而，於此情形時，隨著上述周長差變大，自主滾筒10轉印至工件W之墨水圖案之尺寸會大幅地偏離設計尺寸。因此，印刷至工件W之墨水圖案之尺寸精度降低。 In order to transfer the ink applied to the outer peripheral surface of the main drum 10 to the workpiece W, for example, it is considered that the peripheral speed of the main drum 10 in the position P is made equal to the moving speed of the stage 4. However, in this case, as the circumferential length difference becomes larger, the size of the ink pattern transferred from the autonomous roller 10 to the workpiece W largely deviates from the design size. Therefore, the dimensional accuracy of the ink pattern printed to the workpiece W is lowered.
為了抑制此種墨水圖案之尺寸精度之降低，於本實施形態之印刷裝置100中，墨水圖案中至少包含兩個基準圖案。兩個基準圖案以位於印刷方向上之工件W之兩端部附近之方式設定。 In order to suppress the decrease in dimensional accuracy of such an ink pattern, in the printing apparatus 100 of the present embodiment, at least two reference patterns are included in the ink pattern. The two reference patterns are set in such a manner as to be located near both end portions of the workpiece W in the printing direction.
當包含兩個基準圖案之墨水圖案被印刷至一工件W時，測定於一工件W上印刷方向上之兩個基準圖案間之距離。對於兩個基準圖案間之距離之測定方法，於下文中進行敍述。 When the ink pattern containing the two reference patterns is printed onto a workpiece W, the distance between the two reference patterns in the printing direction on a workpiece W is measured. The method of measuring the distance between two reference patterns is described below.
於此情形時，所測定之兩個基準圖案間之距離與設計尺寸上之兩個基準圖案間之距離(以下稱為設計值)之差量值表示實際上印刷之墨水圖案之尺寸與設計尺寸之印刷方向之誤差。 In this case, the difference between the distance between the two reference patterns measured and the distance between the two reference patterns on the design size (hereinafter referred to as the design value) indicates the size and design size of the actually printed ink pattern. The error in the direction of printing.
因此，基於所算出之差量值，以向另一工件W轉印之墨水圖案之尺寸與設計尺寸之誤差為0或接近0之方式決定主滾筒10之周速與平台4之移動速度之速度差。例如，於所測定之距離小於設計值之情形時，以主滾筒10之周速小於平台4之移動速度之方式，決定速度差。另一方面，於所測定之距離大於設計值之情形時，以主滾筒10之周速大於平台4之移動速度之方式決定速度差。 Therefore, based on the calculated difference value, the speed of the peripheral speed of the main drum 10 and the moving speed of the platform 4 is determined in such a manner that the error of the size and the design size of the ink pattern transferred to the other workpiece W is 0 or close to zero. difference. For example, when the measured distance is smaller than the design value, the speed difference is determined such that the peripheral speed of the main drum 10 is smaller than the moving speed of the stage 4. On the other hand, when the measured distance is larger than the design value, the speed difference is determined such that the peripheral speed of the main drum 10 is larger than the moving speed of the stage 4.
更具體而言，於所測定之距離為90mm且設計值為100mm之情形時，以成為平台4之移動速度之0.9倍之方式設定位置P中之主滾筒10之 周速。又，於所測定之距離為110mm且設計值為100mm之情形時，以成為平台4之移動速度之1.1倍之方式設定位置P中之主滾筒10之周速。 More specifically, when the measured distance is 90 mm and the design value is 100 mm, the main drum 10 in the position P is set so as to be 0.9 times the moving speed of the stage 4. Weekly speed. Further, when the measured distance is 110 mm and the design value is 100 mm, the peripheral speed of the main drum 10 in the position P is set so as to be 1.1 times the moving speed of the stage 4.
其後，以基於所決定之速度差之主滾筒10之周速及平台4之移動速度對另一工件W進行墨水圖案之印刷。藉此，印刷至另一工件W之圖案之尺寸精度提高。 Thereafter, the other workpiece W is printed with the ink pattern based on the peripheral speed of the main drum 10 and the moving speed of the stage 4 based on the determined speed difference. Thereby, the dimensional accuracy of the pattern printed to the other workpiece W is improved.
對測定兩個基準圖案間之距離之方法進行說明。兩個基準圖案間之距離係使用圖1之相機81而測定。此處，相機81於藉由使平台4於印刷方向移動而印刷至工件W上之兩個基準圖案通過之軌道上之固定位置具有拍攝區域。又，於相機81之拍攝區域設定有相機81固有之原點位置。 A method of measuring the distance between two reference patterns will be described. The distance between the two reference patterns was measured using the camera 81 of Fig. 1. Here, the camera 81 has an imaging area at a fixed position on the track through which the two reference patterns printed on the workpiece W are moved by moving the stage 4 in the printing direction. Further, an origin position unique to the camera 81 is set in the imaging area of the camera 81.
圖4係用以說明測定兩個基準點圖案間之距離之方法之圖。於圖4(a)、(b)表示相機81、平台4及軌道3之側視圖。於圖4(c)表示工件W之一部分放大俯視圖。 Fig. 4 is a view for explaining a method of measuring the distance between two reference point patterns. 4(a) and 4(b) are side views of the camera 81, the stage 4, and the rail 3. Fig. 4(c) shows an enlarged plan view of a portion of the workpiece W.
首先，如圖4(a)所示，以工件W上之其中一個基準圖案RP1位於相機81之拍攝區域81r內之方式使平台4於印刷方向移動。又，利用相機81拍攝其中一個基準圖案RP1。進而，基於藉由拍攝而獲取之圖像算出印刷方向上之基準圖案RP1自原點81X之偏移D11。於圖4(c)中，拍攝基準圖案RP1時之相機81之拍攝區域81r以單點鏈線表示，相機81之原點81X以黑圓點表示。 First, as shown in FIG. 4(a), the stage 4 is moved in the printing direction in such a manner that one of the reference patterns RP1 on the workpiece W is positioned in the imaging region 81r of the camera 81. Also, one of the reference patterns RP1 is taken by the camera 81. Further, the offset D11 of the reference pattern RP1 in the printing direction from the origin 81X is calculated based on the image acquired by the photographing. In FIG. 4(c), the photographing area 81r of the camera 81 when the reference pattern RP1 is photographed is indicated by a single-dot chain line, and the origin 81X of the camera 81 is indicated by a black dot.
繼而，如圖4(b)所示，以工件W上之另一個基準圖案RP2位於相機81之拍攝區域81r內之方式使平台4於印刷方向移動。又，利用相機81拍攝另一個基準圖案RP2。進而，基於藉由拍攝而獲取之圖像算出印刷方向上之基準圖案RP2自原點81X之偏移D12。於圖4(c)中，拍攝基準圖案RP2時之相機81之拍攝區域81r以虛線表示，相機81之原點81X以黑三角表示。 Then, as shown in FIG. 4(b), the stage 4 is moved in the printing direction such that the other reference pattern RP2 on the workpiece W is positioned in the imaging region 81r of the camera 81. Also, another reference pattern RP2 is taken by the camera 81. Further, the offset D12 of the reference pattern RP2 in the printing direction from the origin 81X is calculated based on the image acquired by the photographing. In FIG. 4(c), the photographing area 81r of the camera 81 when the reference pattern RP2 is photographed is indicated by a broken line, and the origin 81X of the camera 81 is indicated by a black triangle.
拍攝基準圖案RP1時之平台4之印刷方向之位置P1、及拍攝基準圖 案RP1時之平台4之印刷方向之位置P2可基於自線性編碼器6之輸出而檢測。藉此，可基於位置P1、P2之檢測算出位置P1、P2間之距離D1。於此情形時，如圖4(c)所示，可基於所算出之距離D1及上述偏移D11、D12算出兩個基準圖案RP1、RP2間之距離。 The position P1 of the printing direction of the stage 4 when the reference pattern RP1 is taken, and the shooting reference map The position P2 of the printing direction of the stage 4 at the time of the RP1 can be detected based on the output from the linear encoder 6. Thereby, the distance D1 between the positions P1 and P2 can be calculated based on the detection of the positions P1 and P2. In this case, as shown in FIG. 4(c), the distance between the two reference patterns RP1 and RP2 can be calculated based on the calculated distance D1 and the above-described offsets D11 and D12.
圖5係用以說明圖1之線性編碼器6之基本構成及動作之模式側視圖。如上所述，線性編碼器6包含第1掃描頭61、第2掃描頭62及複數個線性光學尺63。第1掃描頭61及第2掃描頭62以於印刷方向排列之方式安裝於平台4，並且電性連接於圖1之控制裝置90。 Fig. 5 is a schematic side view showing the basic configuration and operation of the linear encoder 6 of Fig. 1. As described above, the linear encoder 6 includes the first scanning head 61, the second scanning head 62, and the plurality of linear optical scales 63. The first scanning head 61 and the second scanning head 62 are attached to the stage 4 so as to be aligned in the printing direction, and are electrically connected to the control device 90 of FIG.
作為第1掃描頭61及第2掃描頭62，例如使用透射型之光學式頭。於此情形時，第1掃描頭61具有投光部61a及受光部61b，第2掃描頭62具有投光部62a及受光部62b。 As the first scanning head 61 and the second scanning head 62, for example, a transmissive optical head is used. In this case, the first scanning head 61 has the light projecting portion 61a and the light receiving portion 61b, and the second scanning head 62 has the light projecting portion 62a and the light receiving portion 62b.
以通過投光部61a、62a與受光部61b、62b之間而於印刷方向排列之方式以固定間隔配置複數(本例中為3條)個線性光學尺63。各線性光學尺63例如固定於圖1之本體基座2。 A plurality of (three in this example) linear optical scales 63 are arranged at regular intervals so as to be arranged in the printing direction between the light projecting portions 61a and 62a and the light receiving portions 61b and 62b. Each linear optical scale 63 is fixed, for example, to the body base 2 of FIG.
線性光學尺63例如由玻璃形成，具有有效檢測區域63a及無效檢測區域63b。無效檢測區域63b自線性光學尺63之兩端部朝向中心設定於固定距離之範圍內。有效檢測區域63a設定於無效檢測區域63b以外之範圍。於有效檢測區域63a中，以於長度方向上以微小間距排列之方式形成有複數個狹縫作為格子刻度。 The linear optical scale 63 is formed of, for example, glass, and has an effective detection area 63a and an invalid detection area 63b. The invalid detection region 63b is set within a range of a fixed distance from both end portions of the linear optical scale 63 toward the center. The effective detection area 63a is set in a range other than the invalid detection area 63b. In the effective detection region 63a, a plurality of slits are formed as lattice scales so as to be arranged at a fine pitch in the longitudinal direction.
於第1掃描頭61中，藉由將印刷裝置100之電源接通而自投光部61a朝向受光部61b出射雷射光。於第1掃描頭61處於線性光學尺63之位置之情形時，受光部61b接收自投光部61a出射且透過線性光學尺63之雷射光。另一方面，於第1掃描頭61未處於線性光學尺63之位置之情形時，受光部61b直接接收自投光部61a出射之雷射光。又，受光部61b將與受光量相應之信號賦予至控制裝置90。於第2掃描頭62中，亦藉由 將印刷裝置100之電源接通而進行與第1掃描頭61同樣之動作。 In the first scanning head 61, the laser light is emitted from the light projecting portion 61a toward the light receiving portion 61b by turning on the power of the printing apparatus 100. When the first scanning head 61 is at the position of the linear optical scale 63, the light receiving unit 61b receives the laser light that is emitted from the light projecting portion 61a and transmitted through the linear optical scale 63. On the other hand, when the first scanning head 61 is not at the position of the linear optical scale 63, the light receiving portion 61b directly receives the laser light emitted from the light projecting portion 61a. Further, the light receiving unit 61b gives a signal corresponding to the amount of received light to the control device 90. In the second scanning head 62, also by The power of the printing apparatus 100 is turned on to perform the same operation as the first scanning head 61.
於第1掃描頭61及第2掃描頭62於線性光學尺63之有效檢測區域63a上以固定速度移動之情形時，自第1掃描頭61及第2掃描頭62分別以固定週期輸出表示狹縫之脈衝。另一方面，於第1掃描頭61及第2掃描頭62通過無效檢測區域63b之情形及通過相鄰之線性光學尺63間之間隙之情形時，不自第1掃描頭61及第2掃描頭62輸出脈衝。 When the first scanning head 61 and the second scanning head 62 are moved at a fixed speed on the effective detection area 63a of the linear optical scale 63, the first scanning head 61 and the second scanning head 62 are outputted at a fixed cycle. The pulse of the seam. On the other hand, when the first scanning head 61 and the second scanning head 62 pass the invalid detection area 63b and the gap between the adjacent linear optical scales 63, the first scanning head 61 and the second scanning are not performed. Head 62 outputs a pulse.
因此，控制裝置90於平台4沿印刷方向移動時，可基於自第1掃描頭61及第2掃描頭62輸出之信號判定第1掃描頭61及第2掃描頭62是否分別處於有效檢測區域63a。 Therefore, when the platform 4 moves in the printing direction, the control device 90 can determine whether the first scanning head 61 and the second scanning head 62 are respectively in the effective detection area 63a based on the signals output from the first scanning head 61 and the second scanning head 62. .
此處，印刷方向上之第1掃描頭61與第2掃描頭62之間之距離SD、及相鄰之線性光學尺63間之距離係以第1掃描頭61及第2掃描頭62之至少一者檢測複數個線性光學尺63之任一者之狹縫之方式設定。例如，第1掃描頭61與第2掃描頭62之間之距離SD係以大於相鄰之線性光學尺63之有效檢測區域63a間之距離之方式設定。 Here, the distance SD between the first scanning head 61 and the second scanning head 62 in the printing direction and the distance between the adjacent linear optical scales 63 are at least the first scanning head 61 and the second scanning head 62. One method is to detect the slit of any one of the plurality of linear optical scales 63. For example, the distance SD between the first scanning head 61 and the second scanning head 62 is set to be larger than the distance between the effective detection areas 63a of the adjacent linear optical scales 63.
於控制裝置90中，對自第1掃描頭61及第2掃描頭62中之一者輸出之脈衝進行計數。基於平台之移動方向及計數數量檢測印刷方向上之平台4之位置。 The control device 90 counts pulses output from one of the first scanning head 61 and the second scanning head 62. The position of the platform 4 in the printing direction is detected based on the moving direction of the platform and the number of counts.
於圖5(a)之例中，第1掃描頭61及第2掃描頭62處於一線性光學尺63之有效檢測區域63a之位置。當平台4朝向前方以固定速度開始移動時，如圖5(a)中影線所示，控制裝置90例如對自第2掃描頭62輸出之脈衝進行計數。又，控制裝置90基於計數數量檢測平台4之目前位置。 In the example of Fig. 5(a), the first scanning head 61 and the second scanning head 62 are at the position of the effective detection area 63a of a linear optical scale 63. When the stage 4 starts moving at a fixed speed toward the front, as shown by the hatching in FIG. 5(a), the control device 90 counts, for example, the pulse output from the second scanning head 62. Also, the control device 90 detects the current position of the platform 4 based on the number of counts.
當平台4進而向前方移動時，以第2掃描頭62處於一線性光學尺63之有效檢測區域63a之位置之狀態，第1掃描頭61通過一線性光學尺63與下一線性光學尺63之間。其後，第1掃描頭61通過下一線性光學尺63之無效檢測區域63b而移動至有效檢測區域63a之位置。 When the stage 4 is further moved forward, the first scanning head 61 passes through a linear optical scale 63 and the next linear optical scale 63 in a state where the second scanning head 62 is at the position of the effective detection area 63a of the linear optical scale 63. between. Thereafter, the first scanning head 61 is moved to the position of the effective detection area 63a by the invalid detection area 63b of the next linear optical scale 63.
藉由使第1掃描頭61於下一線性光學尺63之有效檢測區域63a之位 置移動，而自第1掃描頭61對控制裝置90賦予固定週期之脈衝。藉此，控制裝置90判定第1掃描頭61處於有效檢測區域63a之位置。因此，如圖5(b)中影線所示，控制裝置90對自第1掃描頭61代替自第2掃描頭62而輸出之脈衝進行計數。又，控制裝置90基於計數數量檢測平台4之目前位置。 By placing the first scanning head 61 at the position of the effective detection area 63a of the next linear optical scale 63 The movement is performed, and a pulse of a fixed period is given to the control device 90 from the first scanning head 61. Thereby, the control device 90 determines that the first scanning head 61 is at the position of the effective detection area 63a. Therefore, as shown by the hatching in FIG. 5(b), the control device 90 counts the pulses output from the first scanning head 61 instead of the second scanning head 62. Also, the control device 90 detects the current position of the platform 4 based on the number of counts.
當平台4進而向前方移動時，以第1掃描頭61處於下一線性光學尺63之有效檢測區域63a之位置之狀態，使第2掃描頭62通過一線性光學尺63與下一線性光學尺63之間。其後，第2掃描頭62通過下一線性光學尺63之無效檢測區域63b而移動至有效檢測區域63a之位置。 When the stage 4 is further moved forward, the second scanning head 62 passes through a linear optical scale 63 and the next linear optical scale in a state where the first scanning head 61 is at the position of the effective detection area 63a of the next linear optical scale 63. Between 63. Thereafter, the second scanning head 62 is moved to the position of the effective detection area 63a by the invalid detection area 63b of the next linear optical scale 63.
藉由使第2掃描頭62於下一線性光學尺63之有效檢測區域63a之位置移動，而自第2掃描頭62對控制裝置90賦予固定週期之脈衝。藉此，控制裝置90判定第2掃描頭62處於有效檢測區域63a之位置。因此，如圖5(c)中影線所示，控制裝置90對自第2掃描頭62代替自第1掃描頭61輸出之脈衝進行計數。又，控制裝置90基於計數數量檢測平台4之目前位置。 By moving the second scanning head 62 to the position of the effective detection area 63a of the next linear optical scale 63, the control unit 90 is given a pulse of a fixed period from the second scanning head 62. Thereby, the control device 90 determines that the second scanning head 62 is at the position of the effective detection area 63a. Therefore, as shown by the hatching in FIG. 5(c), the control device 90 counts the pulses output from the second scanning head 62 instead of the first scanning head 61. Also, the control device 90 detects the current position of the platform 4 based on the number of counts.
為了以1.0μm以下之精度檢測平台4之位置，必須使用具有較高之尺寸精度之線性光學尺。當線性光學尺之長度變大時，因線膨脹係數等物性而產生之尺寸誤差變大。因此，可一體地製作具有較高之尺寸精度之線性光學尺之長度存在極限。又，當藉由焊接等而將複數個線性光學尺相互連接時，於連接部產生變形。因此，增大線性光學尺之長度並且獲得較高之檢測精度存在極限。 In order to detect the position of the stage 4 with an accuracy of 1.0 μm or less, it is necessary to use a linear optical scale having a high dimensional accuracy. When the length of the linear optical scale becomes large, the dimensional error due to physical properties such as the linear expansion coefficient becomes large. Therefore, there is a limit to the length of the linear optical scale that can be integrally produced with high dimensional accuracy. Further, when a plurality of linear optical scales are connected to each other by welding or the like, deformation occurs at the joint portion. Therefore, there is a limit to increasing the length of the linear optical scale and obtaining a higher detection accuracy.
相對於此，根據上述線性編碼器6，藉由第1掃描頭61及第2掃描頭62之至少一者檢測複數個線性光學尺63之任一者之狹縫。因此，藉由增大線性光學尺63之數量，可不增大各線性光學尺63之長度而擴大平台4之位置之可檢測範圍。因此，能以較高之精度將墨水圖案轉印至較大之工件W。 On the other hand, according to the linear encoder 6, at least one of the first scanning head 61 and the second scanning head 62 detects a slit of any one of the plurality of linear optical scales 63. Therefore, by increasing the number of linear optical scales 63, the detectable range of the position of the stage 4 can be enlarged without increasing the length of each linear optical scale 63. Therefore, the ink pattern can be transferred to the larger workpiece W with higher precision.
於本實施形態中，如上所述，印刷至工件W之兩個基準圖案RP1、RP2(圖4(c))間之距離係基於利用線性編碼器6之平台4之位置P1、P2(圖4(a)、(b))之檢測而算出。於此情形時，位置P1、P2以較高之精度被檢測，因此，可準確地測定基準圖案RP1、RP2間之距離。因此，可更準確地求出所測定之兩個基準圖案RP1、RP2間之距離與設計值之差量值。 In the present embodiment, as described above, the distance between the two reference patterns RP1, RP2 (Fig. 4(c)) printed on the workpiece W is based on the positions P1, P2 of the stage 4 using the linear encoder 6 (Fig. 4). Calculated by the tests of (a) and (b)). In this case, the positions P1 and P2 are detected with high accuracy, and therefore, the distance between the reference patterns RP1 and RP2 can be accurately measured. Therefore, the difference between the distance between the measured two reference patterns RP1 and RP2 and the design value can be obtained more accurately.
圖6係表示基於印刷程式之處理之內容之流程圖。於初始狀態下，根據工件W之形狀等預先將各種印刷條件記憶於控制裝置90之記憶體。又，鉛直方向上之主滾筒10與平台4之載置面4S之間之距離被調整為作為印刷條件而預先被設定之高度差量值HD。進而，於較主滾筒10更靠後方之位置，於平台4之載置面4S上載置有一工件W。於以下之說明中，將圖3之位置P上之主滾筒10之周速稱為「周速」，將印刷方向上之平台4之移動速度稱為「移動速度」。 Figure 6 is a flow chart showing the content of the processing based on the printing program. In the initial state, various printing conditions are previously stored in the memory of the control device 90 in accordance with the shape of the workpiece W or the like. Moreover, the distance between the main drum 10 in the vertical direction and the mounting surface 4S of the stage 4 is adjusted to the height difference value HD which is set in advance as a printing condition. Further, a workpiece W is placed on the mounting surface 4S of the stage 4 at a position further rearward than the main drum 10. In the following description, the peripheral speed of the main drum 10 at the position P in FIG. 3 is referred to as "peripheral speed", and the moving speed of the stage 4 in the printing direction is referred to as "moving speed".
當開始印刷處理時，控制裝置90為了取得主滾筒10之旋轉動作與平台4之移動動作之同步，將周速與移動速度設定為相等之值(步驟S11)。又，控制裝置90以所設定之周速及移動速度將墨水圖案印刷至一工件W(步驟S12)。即，控制裝置90將周速與移動速度之速度差控制為0。 When the printing process is started, the control device 90 sets the peripheral speed and the moving speed to be equal in order to obtain the synchronization between the rotation operation of the main drum 10 and the movement operation of the stage 4 (step S11). Further, the control device 90 prints the ink pattern to a workpiece W at the set peripheral speed and moving speed (step S12). That is, the control device 90 controls the speed difference between the peripheral speed and the moving speed to be zero.
如上所述，印刷至工件W之墨水圖案中包含印刷至工件W之兩端部附近之兩個基準圖案。因此，控制裝置90測定印刷方向上之兩個基準圖案間之距離(步驟S13)。又，控制裝置90算出所測定之兩個基準圖案間之距離與設計值之差量(步驟S14)。 As described above, the ink pattern printed on the workpiece W includes two reference patterns printed near the both end portions of the workpiece W. Therefore, the control device 90 measures the distance between the two reference patterns in the printing direction (step S13). Moreover, the control device 90 calculates the difference between the distance between the measured two reference patterns and the design value (step S14).
進而，控制裝置90判定差量值是否大於預先規定之臨限值(步驟S15)。臨限值作為印刷條件係考慮墨水圖案之公差等而設定。再者，亦可不進行本步驟S15之處理。 Further, the control device 90 determines whether or not the difference value is larger than a predetermined threshold value (step S15). The threshold value is set as the printing condition in consideration of the tolerance of the ink pattern or the like. Furthermore, the processing of this step S15 may not be performed.
控制裝置90於差量值大於臨限值之情形時，基於所算出之差量值決定主滾筒10之周速與平台4之移動速度之速度差，並基於所決定之速度差重新設定周速及移動速度(步驟S16)。如上所述，該速度差係以向另一工件W轉印之兩個基準圖案間之距離與設計值之差量值為0或接近0之方式決定。 When the difference value is greater than the threshold value, the control device 90 determines the speed difference between the peripheral speed of the main drum 10 and the moving speed of the platform 4 based on the calculated difference value, and resets the peripheral speed based on the determined speed difference. And the moving speed (step S16). As described above, the speed difference is determined such that the difference between the distance between the two reference patterns transferred to the other workpiece W and the design value is 0 or close to zero.
其次，控制裝置90藉由使平台4返回初始狀態之位置並且控制未圖示之工件W之載置裝置而將載置面4S上之工件W更換為另一工件W(步驟S17)。於上述步驟S15中，控制裝置90於差量值為臨限值以下之情形時，不變更已經設定之周速及移動速度而執行步驟S17之處理。 Next, the control device 90 replaces the workpiece W on the mounting surface 4S with another workpiece W by returning the stage 4 to the initial state and controlling the mounting device of the workpiece W (not shown) (step S17). In the above-described step S15, when the difference value is equal to or less than the threshold value, the control device 90 performs the process of step S17 without changing the already set peripheral speed and moving speed.
於步驟S17之處理後，控制裝置90以設定之.周速及移動速度於另一工件W印刷墨水圖案(步驟S18)。 After the process of step S17, the control device 90 prints the ink pattern on the other workpiece W at the set peripheral speed and the moving speed (step S18).
其次，控制裝置90判定是否應結束印刷處理(步驟S19)。例如，於工件W之數量被預先規定之情形時，控制裝置90藉由對印刷處理開始後印刷之工件W之數量進行計數而基於計數數量來判定是否應結束印刷處理。又，控制裝置90於由使用者進行之未圖示之輸入裝置之操作指令印刷處理之結束之情形時，亦可判定為應結束印刷處理。 Next, the control device 90 determines whether or not the printing process should be ended (step S19). For example, when the number of workpieces W is predetermined, the control device 90 determines whether or not the printing process should be ended based on the number of counts by counting the number of workpieces W printed after the start of the printing process. Further, when the control device 90 ends the operation command printing process of the input device (not shown) by the user, it can be determined that the printing process should be ended.
於控制裝置90判定不應結束印刷處理之情形時，執行上述步驟S13之處理。再者，於控制裝置90判定不應結束印刷處理之情形時，亦可執行上述步驟S17之處理。於此情形時，並非每當將墨水圖案轉印至工件W時重複步驟S13~S16之處理。藉此，當於複數個工件W轉印墨水圖案時處理時間被縮短。 When the control device 90 determines that the printing process should not be ended, the processing of the above step S13 is performed. Furthermore, when the control device 90 determines that the printing process should not be ended, the process of the above step S17 can also be performed. In this case, the processing of steps S13 to S16 is not repeated every time the ink pattern is transferred to the workpiece W. Thereby, the processing time is shortened when the ink pattern is transferred to the plurality of workpieces W.
於上述印刷處理中，控制裝置90亦可於步驟S18之處理後進行是否印刷有特定數之工件W之判定，並且僅於印刷有特定數之工件W之情形時執行步驟S13之處理。於此情形時，例如，於作為印刷條件設定特定數「1、2、3、4、5」之情形時，僅於第1至5個工件W之印刷時重複步驟S13~S16之處理。 In the above printing process, the control device 90 may perform the determination as to whether or not a specific number of workpieces W are printed after the processing of step S18, and perform the processing of step S13 only when a specific number of workpieces W are printed. In this case, for example, when the specific number "1, 2, 3, 4, 5" is set as the printing condition, the processing of steps S13 to S16 is repeated only for the printing of the first to fifth workpieces W.
於本實施形態之印刷裝置100中，首先將主滾筒10之周速與平台4之移動速度設定為相等之值。藉此，以周速與移動速度之速度差為0之方式控制主滾筒旋轉驅動部11及平台驅動部5，並且將墨水圖案自主滾筒10轉印至一工件W。 In the printing apparatus 100 of the present embodiment, first, the peripheral speed of the main drum 10 and the moving speed of the stage 4 are set to be equal values. Thereby, the main drum rotation driving portion 11 and the stage driving portion 5 are controlled such that the speed difference between the peripheral speed and the moving speed is zero, and the ink pattern autonomous drum 10 is transferred to a workpiece W.
其後，測定轉印至一工件W之墨水圖案之兩個基準圖案RP1、RP2間之距離。算出所測定之兩個基準圖案RP1、RP2間之距離與設計值之差量。基於所算出之差量值，以向另一工件W轉印之兩個基準圖案RP1、RP2間之距離與設計值之差量值為0或接近0之方式決定周速與移動速度之速度差，基於所決定之速度差重新設定周速及移動速度。 Thereafter, the distance between the two reference patterns RP1, RP2 transferred to the ink pattern of a workpiece W is measured. The difference between the measured distance between the two reference patterns RP1 and RP2 and the design value is calculated. Based on the calculated difference value, the speed difference between the peripheral speed and the moving speed is determined such that the difference between the distance between the two reference patterns RP1 and RP2 transferred to the other workpiece W and the design value is 0 or close to 0. , reset the peripheral speed and moving speed based on the determined speed difference.
藉由基於所決定之速度差控制主滾筒旋轉驅動部11及平台驅動部5，以重新設定之周速及移動速度於另一工件W轉印墨水圖案。藉此，自主滾筒10向另一工件W轉印之兩個基準圖案RP1、RP2間之距離與設計值之誤差為0或接近0。即，與轉印至一工件W之墨水圖案相比，轉印至另一工件W之墨水圖案之精度提高。藉此，能以較高之精度將所需之墨水圖案印刷至工件W。 The main drum rotation driving unit 11 and the stage driving unit 5 are controlled based on the determined speed difference, and the ink pattern is transferred to the other workpiece W at the reset peripheral speed and moving speed. Thereby, the error between the distance between the two reference patterns RP1, RP2 transferred from the autonomous roller 10 to the other workpiece W and the design value is 0 or close to zero. That is, the accuracy of the ink pattern transferred to the other workpiece W is improved as compared with the ink pattern transferred to one workpiece W. Thereby, the desired ink pattern can be printed to the workpiece W with high precision.
(1)於上述實施形態中，作為第1掃描頭61及第2掃描頭62使用透射型之光學式頭，但本發明並不限定於此。作為第1掃描頭61及第2掃描頭62亦可使用反射型之光學式頭代替透射型之光學式頭。 (1) In the above embodiment, a transmissive optical head is used as the first scanning head 61 and the second scanning head 62. However, the present invention is not limited thereto. As the first scanning head 61 and the second scanning head 62, a reflective optical head may be used instead of the transmissive optical head.
又，作為第1掃描頭61及第2掃描頭62亦可使用磁頭代替透射型之光學式頭。於此情形時，於第1掃描頭61及第2掃描頭62分別設置磁極檢測部。又，作為線性光學尺63例如使用包含磁性材料之長條狀之磁柵尺。於磁柵尺中，例如於長度方向以固定間距交替地磁化N極及S極。分別被磁化為N極及S極之部分作為磁刻度而發揮功能。複數個磁柵尺之任一者由第1掃描頭61及第2掃描頭62中之至少一者之磁極檢測 部檢測。 Further, as the first scanning head 61 and the second scanning head 62, a magnetic head may be used instead of the transmissive optical head. In this case, the magnetic pole detecting portion is provided in each of the first scanning head 61 and the second scanning head 62. Further, as the linear optical scale 63, for example, a long magnetic scale including a magnetic material is used. In the magnetic scale, for example, the N pole and the S pole are alternately magnetized at a fixed pitch in the longitudinal direction. The portions magnetized to the N-pole and the S-pole respectively function as magnetic scales. Any one of the plurality of magnetic scales is detected by magnetic poles of at least one of the first scanning head 61 and the second scanning head 62 Ministry detection.
進而，於使用磁頭作為第1掃描頭61及第2掃描頭62之情形時，作為線性光學尺63亦可使用電磁感應式柵尺。於電磁感應式柵尺中，例如，於長度方向以固定間距配置複數個線圈。各線圈作為刻度而發揮功能。複數個電磁感應式柵尺之任一者由第1掃描頭61及第2掃描頭62中之至少一者之磁極檢測部檢測。 Further, when a magnetic head is used as the first scanning head 61 and the second scanning head 62, an electromagnetic induction scale can be used as the linear optical scale 63. In the electromagnetic induction type scale, for example, a plurality of coils are arranged at a fixed pitch in the longitudinal direction. Each coil functions as a scale. Any one of the plurality of electromagnetic induction scales is detected by a magnetic pole detecting portion of at least one of the first scanning head 61 and the second scanning head 62.
於該等構成中，亦藉由與圖5之例同樣地配置第1掃描頭61及第2掃描頭62，而利用第1掃描頭61及第2掃描頭62之至少一者檢測複數個線性光學尺63中之任一者。因此，可不增大各線性光學尺63之長度而擴大平台4之位置之可檢測範圍。 In the above configuration, the first scanning head 61 and the second scanning head 62 are arranged in the same manner as in the example of FIG. 5, and at least one of the first scanning head 61 and the second scanning head 62 detects a plurality of linearities. Any of the optical scales 63. Therefore, the detectable range of the position of the stage 4 can be enlarged without increasing the length of each linear optical scale 63.
(2)於上述實施形態中，使用包含第1掃描頭61、第2掃描頭62及複數個線性光學尺63之線性編碼器6，但本發明並不限定於此。作為線性編碼器6，亦可使用線式之線性編碼器代替包含第1掃描頭61、第2掃描頭62及複數個線性光學尺63之構成。 (2) In the above embodiment, the linear encoder 6 including the first scanning head 61, the second scanning head 62, and the plurality of linear optical scales 63 is used, but the present invention is not limited thereto. As the linear encoder 6, a linear linear encoder may be used instead of the first scanning head 61, the second scanning head 62, and the plurality of linear optical scales 63.
(3)於上述實施形態中，噴嘴支持構件9構成為可於印刷方向上之複數個位置安裝於兩個支持板8上。噴嘴支持構件9並不限於上述之例，亦可構成為可於兩個支持板8上於印刷方向移動。於此情形時，亦可於兩個支持板8中之至少一者設置使噴嘴支持構件9於印刷方向移動之驅動部。藉此，可根據向主滾筒10之墨水之塗佈方法之種類容易地變更噴嘴30之位置。 (3) In the above embodiment, the nozzle supporting member 9 is configured to be attachable to the two support plates 8 at a plurality of positions in the printing direction. The nozzle supporting member 9 is not limited to the above example, and may be configured to be movable in the printing direction on the two support plates 8. In this case, a driving portion that moves the nozzle supporting member 9 in the printing direction may be provided in at least one of the two supporting plates 8. Thereby, the position of the nozzle 30 can be easily changed according to the type of the method of applying the ink to the main drum 10.
(4)於上述實施形態中，印刷裝置100具有副滾筒20，但本發明並不限定於此。亦可不於印刷裝置100設置副滾筒20。 (4) In the above embodiment, the printing apparatus 100 has the sub-tray 20. However, the present invention is not limited thereto. The sub-roller 20 may not be provided in the printing apparatus 100.
(5)於上述實施形態中，於平台4設置兩個雷射位移計41，但本發明並不限定於此。只要將主滾筒10之下端部及平台4之載置面4S維持為水平，亦可於平台4僅設置一個雷射位移計41。 (5) In the above embodiment, the two laser displacement meters 41 are provided on the stage 4, but the present invention is not limited thereto. As long as the lower end portion of the main drum 10 and the mounting surface 4S of the stage 4 are maintained horizontal, only one laser displacement meter 41 may be provided on the platform 4.
以下，對技術方案之各構成要素與實施形態之各構成要素之對應之例進行說明，但本發明並不限定於下述之例。 Hereinafter, an example in which each component of the technical means corresponds to each component of the embodiment will be described, but the present invention is not limited to the following examples.
於上述實施形態中，工件W為對象物之例，印刷裝置100為印刷裝置之例，載置面4S為載置面之例，平台4為平台之例，印刷方向為一方向之例，平台驅動部5為移動驅動部之例，主滾筒10為轉印滾筒之例，主滾筒旋轉驅動部11為旋轉驅動部之例，控制裝置90為控制部之例。 In the above embodiment, the workpiece W is an example of the object, the printing apparatus 100 is an example of a printing apparatus, the mounting surface 4S is an example of a mounting surface, the stage 4 is an example of a platform, and the printing direction is an example of a direction. The drive unit 5 is an example of a movement drive unit, the main drum 10 is an example of a transfer cylinder, the main drum rotation drive unit 11 is an example of a rotation drive unit, and the control unit 90 is an example of a control unit.
又，線性編碼器6、相機81及控制裝置90為圖案測定部之例，一工件W為第1對象物之例，另一工件W為第2對象物之例，設計值為目標值之例，步驟S11、S12之處理為第1控制之例，步驟S13之處理為第2控制之例，步驟S16、S18之處理為第2控制之例。 Further, the linear encoder 6, the camera 81, and the control device 90 are examples of the pattern measuring unit, and an example in which the workpiece W is the first object and the other workpiece W is the second object, and the design value is the target value. The processing of steps S11 and S12 is an example of the first control, the processing of step S13 is an example of the second control, and the processing of steps S16 and S18 is an example of the second control.
又，線性編碼器6及控制裝置90為平台位置檢測部之例，複數個線性光學尺63為複數個線性光學尺之例，第1掃描頭61為第1檢測部之例，第2掃描頭62為第2檢測部之例，控制裝置90為位置運算部之例，基準圖案RP1為第1基準圖案之例，基準圖案RP2為第2基準圖案之例。 Further, the linear encoder 6 and the control device 90 are examples of the stage position detecting unit, and the plurality of linear optical scales 63 are examples of a plurality of linear optical scales, and the first scanning head 61 is an example of the first detecting unit, and the second scanning head is used. 62 is an example of the second detecting unit, the control device 90 is an example of a position calculating unit, the reference pattern RP1 is an example of a first reference pattern, and the reference pattern RP2 is an example of a second reference pattern.
又，相機81為基準圖案檢測部之例，控制裝置90為距離運算部之例，拍攝區域81r為檢測區域之例，位置P1為第1位置之例，位置P2為第2位置之例。 Further, the camera 81 is an example of a reference pattern detecting unit, the control device 90 is an example of a distance calculating unit, the imaging area 81r is an example of a detection area, the position P1 is an example of a first position, and the position P2 is an example of a second position.
作為技術方案之各構成要素，可使用具有技術方案中記載之構成或功能之其他各種構成要素。 As each component of the technical means, various other components having the configuration or function described in the claims can be used.
本發明可於印刷中有效地利用。 The present invention can be effectively utilized in printing.
Claims (9)
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| JPS5434434B2 (en) * | 1976-12-02 | 1979-10-26 | ||
| JP2012086532A (en) * | 2010-10-22 | 2012-05-10 | Sakamoto Jun | Printer and printing method |
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| JP4885670B2 (en) * | 2005-09-29 | 2012-02-29 | 株式会社ミツトヨ | Absolute type linear encoder |
| JP2009063437A (en) * | 2007-09-06 | 2009-03-26 | Yamaha Motor Co Ltd | Linear encoder device, linear motor device, and uniaxial robot |
| JP5463737B2 (en) * | 2009-06-02 | 2014-04-09 | 株式会社Ｉｈｉ | Offset printing method and apparatus |
| KR101733585B1 (en) * | 2009-07-28 | 2017-05-11 | 삼성디스플레이 주식회사 | Method for fabricating ink pattern and printing apparatus of ink pattern |
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