TWI534410B - Linear shape measurement method and linear shape measuring device - Google Patents
Linear shape measurement method and linear shape measuring device Download PDFInfo
- Publication number
- TWI534410B TWI534410B TW104106310A TW104106310A TWI534410B TW I534410 B TWI534410 B TW I534410B TW 104106310 A TW104106310 A TW 104106310A TW 104106310 A TW104106310 A TW 104106310A TW I534410 B TWI534410 B TW I534410B
- Authority
- TW
- Taiwan
- Prior art keywords
- measured
- linear shape
- curvature
- sampling
- height data
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014042251A JP6199205B2 (ja) | 2014-03-05 | 2014-03-05 | 真直形状測定方法及び真直形状測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201534864A TW201534864A (zh) | 2015-09-16 |
TWI534410B true TWI534410B (zh) | 2016-05-21 |
Family
ID=54029918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104106310A TWI534410B (zh) | 2014-03-05 | 2015-02-26 | Linear shape measurement method and linear shape measuring device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6199205B2 (ja) |
KR (1) | KR20150104538A (ja) |
CN (1) | CN104897105B (ja) |
TW (1) | TWI534410B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108844497A (zh) * | 2018-06-07 | 2018-11-20 | 东北大学 | 一种数控机床导轨安装面直线度检测装置及方法 |
CN109855590B (zh) * | 2019-01-12 | 2021-03-23 | 吉林大学 | 一种圆柱类零件弯曲变形轴线杠杆式连续测量方法 |
CN109596075A (zh) * | 2019-01-28 | 2019-04-09 | 天津市兆瑞测控技术有限公司 | 一种直线度或弯曲度在线测量装置及方法 |
JP7296334B2 (ja) * | 2020-03-26 | 2023-06-22 | 住友重機械工業株式会社 | 真直度計測システム、変位センサ校正方法、及び真直度計測方法 |
CN111644901B (zh) * | 2020-04-09 | 2022-05-13 | 武汉船用机械有限责任公司 | 工件加工轴线的校正方法和装置 |
CN115235376B (zh) * | 2022-09-23 | 2023-01-17 | 国网天津市电力公司电力科学研究院 | 一种非接触式电缆敷设质量检测方法及检测装置 |
CN115854949B (zh) * | 2023-03-02 | 2023-05-16 | 泗水县金佳工贸有限公司 | 一种卷纸用弧形辊的弧形自动检测装置及控制方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2617707C2 (de) * | 1975-04-23 | 1986-02-20 | The Rank Organisation Ltd., London | Vorrichtung zum Vermessen einer Oberfläche |
FR2727198A1 (fr) * | 1994-11-18 | 1996-05-24 | Otis Elevator Co | Capteur de distance et notamment du positionnement des cabines d'ascenseur |
JPH09210668A (ja) * | 1996-02-07 | 1997-08-12 | Mitsubishi Heavy Ind Ltd | 真直形状測定方法 |
JP2003254747A (ja) * | 2002-02-28 | 2003-09-10 | Mitsutoyo Corp | 真直度測定法 |
JP2005062016A (ja) * | 2003-08-13 | 2005-03-10 | Fuji Photo Film Co Ltd | 放射線像変換体およびその製造方法 |
JP4400331B2 (ja) * | 2004-06-17 | 2010-01-20 | 信越半導体株式会社 | ウエーハの形状評価方法及び管理方法 |
JP4197339B2 (ja) * | 2006-01-16 | 2008-12-17 | アンリツ株式会社 | 三次元形状測定装置 |
JP2007333556A (ja) * | 2006-06-15 | 2007-12-27 | Micro Engineering Inc | 逐次多点式真直度測定法および測定装置 |
JP5100612B2 (ja) * | 2008-10-29 | 2012-12-19 | 住友重機械工業株式会社 | 真直度測定方法及び真直度測定装置 |
JP5263126B2 (ja) * | 2009-11-09 | 2013-08-14 | 新日鐵住金株式会社 | 板材の光学式形状測定方法及び測定装置 |
CN102221354B (zh) * | 2011-04-02 | 2013-01-09 | 中南大学 | 一种多测点浮动定位表面不平顺测量方法 |
CN104359413B (zh) * | 2014-10-15 | 2017-02-15 | 武汉中科创新技术股份有限公司 | 一种利用激光位移传感器测量钢管直径的装置及方法 |
-
2014
- 2014-03-05 JP JP2014042251A patent/JP6199205B2/ja active Active
-
2015
- 2015-02-26 TW TW104106310A patent/TWI534410B/zh active
- 2015-03-04 CN CN201510096787.0A patent/CN104897105B/zh active Active
- 2015-03-05 KR KR1020150031106A patent/KR20150104538A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
KR20150104538A (ko) | 2015-09-15 |
JP6199205B2 (ja) | 2017-09-20 |
CN104897105A (zh) | 2015-09-09 |
JP2015169451A (ja) | 2015-09-28 |
CN104897105B (zh) | 2018-08-07 |
TW201534864A (zh) | 2015-09-16 |
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