TWI475595B - 基板運送裝置 - Google Patents
基板運送裝置 Download PDFInfo
- Publication number
- TWI475595B TWI475595B TW100106051A TW100106051A TWI475595B TW I475595 B TWI475595 B TW I475595B TW 100106051 A TW100106051 A TW 100106051A TW 100106051 A TW100106051 A TW 100106051A TW I475595 B TWI475595 B TW I475595B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- floating
- suction port
- air supply
- suction
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Fluid Mechanics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010038481A JP5081261B2 (ja) | 2010-02-24 | 2010-02-24 | 塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201202115A TW201202115A (en) | 2012-01-16 |
TWI475595B true TWI475595B (zh) | 2015-03-01 |
Family
ID=44462637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100106051A TWI475595B (zh) | 2010-02-24 | 2011-02-23 | 基板運送裝置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5081261B2 (ja) |
KR (1) | KR101790787B1 (ja) |
CN (1) | CN102161026A (ja) |
TW (1) | TWI475595B (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9623423B2 (en) | 2012-01-26 | 2017-04-18 | Kohler Co. | Spray head |
JP5486030B2 (ja) * | 2012-02-15 | 2014-05-07 | 東京エレクトロン株式会社 | 塗布装置 |
JP5959914B2 (ja) * | 2012-04-18 | 2016-08-02 | 東京エレクトロン株式会社 | 基板処理システム、基板搬送方法および記憶媒体 |
JP6033593B2 (ja) * | 2012-07-18 | 2016-11-30 | 東レエンジニアリング株式会社 | 基板搬送装置 |
JP6043123B2 (ja) * | 2012-08-22 | 2016-12-14 | オイレス工業株式会社 | 非接触支持装置及び塗布装置 |
KR101450713B1 (ko) * | 2012-12-05 | 2014-10-16 | 세메스 주식회사 | 기판 처리 장치 |
JP2014114085A (ja) * | 2012-12-06 | 2014-06-26 | Toray Eng Co Ltd | 基板浮上装置および基板浮上装置の洗浄方法 |
JP6086476B2 (ja) * | 2012-12-13 | 2017-03-01 | 東レエンジニアリング株式会社 | 基板浮上装置 |
KR102109947B1 (ko) * | 2013-01-11 | 2020-05-11 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
EP2991939B1 (en) | 2013-05-03 | 2017-04-12 | Corning Incorporated | Method and apparatus for conveying a glass ribbon |
CN105564989B (zh) * | 2016-01-27 | 2018-02-23 | 上海集成电路研发中心有限公司 | 一种气垫运输装置及方法 |
CN106304830B (zh) * | 2016-10-19 | 2021-12-24 | 深圳市路远智能装备有限公司 | 一种贴装头汇流结构以及智能贴片机 |
KR101839345B1 (ko) * | 2016-10-27 | 2018-03-16 | 세메스 주식회사 | 기판 플로팅 장치 및 기판 플로팅 방법 |
CN106444110B (zh) * | 2016-11-17 | 2023-08-29 | 合肥京东方光电科技有限公司 | 基板支撑杆以及涂覆防静电液的方法 |
JP2018113327A (ja) * | 2017-01-11 | 2018-07-19 | 株式会社Screenホールディングス | 基板処理装置 |
JP6860379B2 (ja) * | 2017-03-03 | 2021-04-14 | 株式会社Screenホールディングス | 塗布装置および塗布方法 |
US9889995B1 (en) * | 2017-03-15 | 2018-02-13 | Core Flow Ltd. | Noncontact support platform with blockage detection |
US10513011B2 (en) * | 2017-11-08 | 2019-12-24 | Core Flow Ltd. | Layered noncontact support platform |
KR102134161B1 (ko) * | 2018-08-23 | 2020-07-21 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
CN109323988B (zh) * | 2018-11-06 | 2021-01-19 | 合肥工业大学 | 一种适于气浮***的玻璃基板检测方法 |
TWI839413B (zh) * | 2018-12-21 | 2024-04-21 | 美商凱特伊夫公司 | 用於控制基材之漂浮的裝置、系統及方法 |
JP7263802B2 (ja) * | 2019-02-01 | 2023-04-25 | 株式会社リコー | 搬送装置、画像処理装置、及び画像形成装置 |
KR20220053760A (ko) | 2020-10-22 | 2022-05-02 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
CN113291825A (zh) * | 2021-05-20 | 2021-08-24 | 哈尔滨工业大学 | 一种精密气浮平台 |
CN114405762A (zh) * | 2022-01-28 | 2022-04-29 | 连云港苏运新能源科技有限公司 | 一种风力发电机叶片生产的立体打胶设备及方法 |
CN118268208A (zh) * | 2024-05-30 | 2024-07-02 | 季华实验室 | 面板涂胶装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053139A (ja) * | 1991-06-21 | 1993-01-08 | Sharp Corp | 投影露光装置のステージのクリーニング方法 |
JPH1187458A (ja) * | 1997-09-16 | 1999-03-30 | Hitachi Ltd | 異物除去機能付き半導体製造装置 |
JP2009059823A (ja) * | 2007-08-30 | 2009-03-19 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
TW200934713A (en) * | 2007-12-21 | 2009-08-16 | Maricap Oy | Method in pneumatic material conveying system and a pneumatic material conveying system |
TW200938468A (en) * | 2007-10-24 | 2009-09-16 | Maricap Oy | Method and apparatus in a vacuum conveying system of material |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4429943B2 (ja) * | 2005-03-17 | 2010-03-10 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP4646730B2 (ja) * | 2005-08-05 | 2011-03-09 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置の表面異物検出装置および検出方法 |
JP4562190B2 (ja) * | 2005-09-26 | 2010-10-13 | 東京エレクトロン株式会社 | 光学式異物検出装置およびこれを搭載した処理液塗布装置 |
JP4312805B2 (ja) * | 2007-03-27 | 2009-08-12 | Okiセミコンダクタ株式会社 | 半導体製造装置とそれを用いた半導体ウェハの製造方法およびそのプログラムを記録した記録媒体 |
JP5150949B2 (ja) * | 2007-06-18 | 2013-02-27 | Nskテクノロジー株式会社 | 近接スキャン露光装置及びその制御方法 |
JP2008260591A (ja) * | 2007-04-10 | 2008-10-30 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送装置及び方法 |
JP4880521B2 (ja) * | 2007-05-29 | 2012-02-22 | 株式会社オーク製作所 | 描画装置 |
JP2008300426A (ja) * | 2007-05-29 | 2008-12-11 | Shimadzu Corp | 真空チャック |
JP2009043829A (ja) * | 2007-08-07 | 2009-02-26 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
-
2010
- 2010-02-24 JP JP2010038481A patent/JP5081261B2/ja active Active
-
2011
- 2011-01-14 KR KR1020110003790A patent/KR101790787B1/ko active IP Right Grant
- 2011-02-23 TW TW100106051A patent/TWI475595B/zh active
- 2011-02-24 CN CN2011100448870A patent/CN102161026A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053139A (ja) * | 1991-06-21 | 1993-01-08 | Sharp Corp | 投影露光装置のステージのクリーニング方法 |
JPH1187458A (ja) * | 1997-09-16 | 1999-03-30 | Hitachi Ltd | 異物除去機能付き半導体製造装置 |
JP2009059823A (ja) * | 2007-08-30 | 2009-03-19 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
TW200938468A (en) * | 2007-10-24 | 2009-09-16 | Maricap Oy | Method and apparatus in a vacuum conveying system of material |
TW200934713A (en) * | 2007-12-21 | 2009-08-16 | Maricap Oy | Method in pneumatic material conveying system and a pneumatic material conveying system |
Also Published As
Publication number | Publication date |
---|---|
CN102161026A (zh) | 2011-08-24 |
JP2011176086A (ja) | 2011-09-08 |
KR101790787B1 (ko) | 2017-11-20 |
JP5081261B2 (ja) | 2012-11-28 |
KR20110097615A (ko) | 2011-08-31 |
TW201202115A (en) | 2012-01-16 |
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