TWI263648B - Organic polymer for anti-reflective coating layer and preparation thereof - Google Patents

Organic polymer for anti-reflective coating layer and preparation thereof

Info

Publication number
TWI263648B
TWI263648B TW089127533A TW89127533A TWI263648B TW I263648 B TWI263648 B TW I263648B TW 089127533 A TW089127533 A TW 089127533A TW 89127533 A TW89127533 A TW 89127533A TW I263648 B TWI263648 B TW I263648B
Authority
TW
Taiwan
Prior art keywords
present
polymer
arc
same
light
Prior art date
Application number
TW089127533A
Other languages
English (en)
Inventor
Min-Ho Jung
Sung-Eun Hong
Ki-Ho Baik
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Application granted granted Critical
Publication of TWI263648B publication Critical patent/TWI263648B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/017—Esters of hydroxy compounds having the esterified hydroxy group bound to a carbon atom of a six-membered aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/52—Esters of acyclic unsaturated carboxylic acids having the esterified carboxyl group bound to an acyclic carbon atom
    • C07C69/533—Monocarboxylic acid esters having only one carbon-to-carbon double bond
    • C07C69/54—Acrylic acid esters; Methacrylic acid esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/14—Methyl esters, e.g. methyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C08F220/281—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing only one oxygen, e.g. furfuryl (meth)acrylate or 2-methoxyethyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2603/00—Systems containing at least three condensed rings
    • C07C2603/02—Ortho- or ortho- and peri-condensed systems
    • C07C2603/04—Ortho- or ortho- and peri-condensed systems containing three rings
    • C07C2603/22—Ortho- or ortho- and peri-condensed systems containing three rings containing only six-membered rings
    • C07C2603/24—Anthracenes; Hydrogenated anthracenes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C08F220/1818—C13or longer chain (meth)acrylate, e.g. stearyl (meth)acrylate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Polymerisation Methods In General (AREA)
  • Paints Or Removers (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
TW089127533A 1999-12-30 2000-12-21 Organic polymer for anti-reflective coating layer and preparation thereof TWI263648B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019990065675A KR100549574B1 (ko) 1999-12-30 1999-12-30 유기 반사 방지막용 중합체 및 그의 제조방법

Publications (1)

Publication Number Publication Date
TWI263648B true TWI263648B (en) 2006-10-11

Family

ID=19632858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089127533A TWI263648B (en) 1999-12-30 2000-12-21 Organic polymer for anti-reflective coating layer and preparation thereof

Country Status (7)

Country Link
US (2) US20010043992A1 (zh)
JP (1) JP4463417B2 (zh)
KR (1) KR100549574B1 (zh)
CN (1) CN1266237C (zh)
FR (2) FR2803293B1 (zh)
GB (1) GB2358018A (zh)
TW (1) TWI263648B (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4840554B2 (ja) * 2001-09-13 2011-12-21 日産化学工業株式会社 反射防止膜の表面エネルギーの調整方法
KR20030059970A (ko) * 2002-01-04 2003-07-12 주식회사 몰커스 패턴 무너짐 현상을 극복하기 위한 유기 난반사 방지막조성물 및 이를 이용한 패턴 형성방법
US7070914B2 (en) * 2002-01-09 2006-07-04 Az Electronic Materials Usa Corp. Process for producing an image using a first minimum bottom antireflective coating composition
US7265431B2 (en) * 2002-05-17 2007-09-04 Intel Corporation Imageable bottom anti-reflective coating for high resolution lithography
KR100832247B1 (ko) * 2002-11-27 2008-05-28 주식회사 동진쎄미켐 유기 난반사 방지막 조성물 및 이를 이용한 패턴 형성방법
JP3759526B2 (ja) 2003-10-30 2006-03-29 丸善石油化学株式会社 半導体リソグラフィー用共重合体の製造方法
TWI380354B (en) * 2004-01-29 2012-12-21 Rohm & Haas Elect Mat T-gate formation
JP2007197344A (ja) * 2006-01-25 2007-08-09 Toagosei Co Ltd （メタ）アクリレートの洗浄方法および製造方法
US7666575B2 (en) * 2006-10-18 2010-02-23 Az Electronic Materials Usa Corp Antireflective coating compositions
JP5588095B2 (ja) 2006-12-06 2014-09-10 丸善石油化学株式会社 半導体リソグラフィー用共重合体とその製造方法
US8030419B2 (en) * 2006-12-22 2011-10-04 Maruzen Petrochemical Co., Ltd. Process for producing polymer for semiconductor lithography
WO2008080201A1 (en) * 2007-01-05 2008-07-10 Francisco Mathieu Copolymer of methyl methacrylate and anthracenyl methacrylate
JP5282385B2 (ja) * 2007-09-18 2013-09-04 川崎化成工業株式会社 ラジカル重合性組成物
JP5591465B2 (ja) * 2008-10-30 2014-09-17 丸善石油化学株式会社 濃度が均一な半導体リソグラフィー用共重合体溶液の製造方法
KR101111647B1 (ko) * 2009-08-27 2012-02-14 영창케미칼 주식회사 반도체 패턴 형성을 위한 ｉ-선용 네가티브형 포토레지스트 조성물
JP5652616B2 (ja) * 2011-04-16 2015-01-14 川崎化成工業株式会社 １０−ヒドロキシ−１，２，３，４−テトラヒドロ−１，４−メタノアントラセン−９−イル−（メタ）アクリレート化合物、その製造法及びその重合物。
JP5582424B2 (ja) * 2012-07-04 2014-09-03 川崎化成工業株式会社 ラジカル重合性組成物の重合方法及びその重合物
JP7377848B2 (ja) 2020-12-31 2023-11-10 ローム アンド ハース エレクトロニック マテリアルズ エルエルシー フォトレジスト組成物及びパターン形成方法
CN117210138B (zh) * 2023-10-10 2024-04-19 广东光固新材料有限公司 一种可重复使用的丙烯酸酯胶粘剂

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3000862A (en) * 1958-01-13 1961-09-19 Du Pont Polymethacrolein derivatives
US3449272A (en) * 1961-09-29 1969-06-10 Ppg Industries Inc Thermosetting composition containing an acetalized polymer and a polyol
DE3100077A1 (de) 1981-01-03 1982-08-05 Hoechst Ag, 6000 Frankfurt Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters
US4507405A (en) 1982-06-17 1985-03-26 The Coca-Cola Company Synthetic articles having a cork-like appearance
US4822718A (en) 1982-09-30 1989-04-18 Brewer Science, Inc. Light absorbing coating
US5674648A (en) 1984-08-06 1997-10-07 Brewer Science, Inc. Anti-reflective coating
PH23983A (en) 1986-12-23 1990-02-09 Biopolymers Ltd Biostatic and biocidal composition
JP2740837B2 (ja) 1987-01-30 1998-04-15 コニカ株式会社 多色転写画像形成方法
US5229229A (en) * 1990-04-27 1993-07-20 Tosoh Corporation Pellicle having reflection-preventing function
US5412041A (en) * 1994-07-11 1995-05-02 Rohm And Haas Company Method for forming (meth)acrolein-containing polymers
US5525457A (en) 1994-12-09 1996-06-11 Japan Synthetic Rubber Co., Ltd. Reflection preventing film and process for forming resist pattern using the same
DE19500386A1 (de) * 1995-01-09 1996-07-11 Degussa Verfahren zur Herstellung von seitenständige Aldehydgruppen tragenden Copolymeren
US5886102A (en) 1996-06-11 1999-03-23 Shipley Company, L.L.C. Antireflective coating compositions
TW406215B (en) 1996-08-07 2000-09-21 Fuji Photo Film Co Ltd Composition for anti-reflective coating material in lithographic process, and process for forming resist pattern
US7147983B1 (en) 1996-10-07 2006-12-12 Shipley Company, L.L.C. Dyed photoresists and methods and articles of manufacture comprising same
US5939236A (en) 1997-02-07 1999-08-17 Shipley Company, L.L.C. Antireflective coating compositions comprising photoacid generators
US6190839B1 (en) 1998-01-15 2001-02-20 Shipley Company, L.L.C. High conformality antireflective coating compositions
TW457403B (en) * 1998-07-03 2001-10-01 Clariant Int Ltd Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom
KR100465864B1 (ko) * 1999-03-15 2005-01-24 주식회사 하이닉스반도체 유기 난반사방지 중합체 및 그의 제조방법
KR100395904B1 (ko) * 1999-04-23 2003-08-27 주식회사 하이닉스반도체 유기 반사방지 중합체 및 그의 제조방법
KR100359862B1 (ko) * 1999-12-23 2002-11-09 주식회사 하이닉스반도체 난반사 방지막용 중합체와 그 제조방법

Also Published As

Publication number Publication date
JP2001226324A (ja) 2001-08-21
KR20010065739A (ko) 2001-07-11
FR2803293A1 (fr) 2001-07-06
CN1301797A (zh) 2001-07-04
FR2803293B1 (fr) 2003-04-04
FR2808023B1 (fr) 2005-06-03
US6780953B2 (en) 2004-08-24
FR2808023A1 (fr) 2001-10-26
US20030118736A1 (en) 2003-06-26
US20010043992A1 (en) 2001-11-22
KR100549574B1 (ko) 2006-02-08
GB0031422D0 (en) 2001-02-07
JP4463417B2 (ja) 2010-05-19
CN1266237C (zh) 2006-07-26
GB2358018A (en) 2001-07-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees