TW530096B - Substrate erecting device and vacuum processing apparatus - Google Patents

Substrate erecting device and vacuum processing apparatus Download PDF

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Publication number
TW530096B
TW530096B TW088123151A TW88123151A TW530096B TW 530096 B TW530096 B TW 530096B TW 088123151 A TW088123151 A TW 088123151A TW 88123151 A TW88123151 A TW 88123151A TW 530096 B TW530096 B TW 530096B
Authority
TW
Taiwan
Prior art keywords
substrate
mounting portion
vacuum
substrate mounting
aforementioned
Prior art date
Application number
TW088123151A
Other languages
English (en)
Chinese (zh)
Inventor
Seisuke Sueshiro
Shigemitsu Sato
Hiroki Ozora
Original Assignee
Ulvac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Corp filed Critical Ulvac Corp
Application granted granted Critical
Publication of TW530096B publication Critical patent/TW530096B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G13/00—Protecting plants
    • A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
    • A01G13/0237—Devices for protecting a specific part of a plant, e.g. roots, trunk or fruits
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G13/00—Protecting plants
    • A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
    • A01G13/04—Cloches, i.e. protective full coverings for individual plants
    • A01G13/043—Cloches, i.e. protective full coverings for individual plants with flexible coverings
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G13/00—Protecting plants
    • A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
    • A01G13/04—Cloches, i.e. protective full coverings for individual plants
    • A01G2013/046—Cloches, i.e. protective full coverings for individual plants foldable

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW088123151A 1999-01-29 1999-12-28 Substrate erecting device and vacuum processing apparatus TW530096B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2145999 1999-01-29
JP09541799A JP3827881B2 (ja) 1999-01-29 1999-04-01 真空処理装置及び基板起立装置

Publications (1)

Publication Number Publication Date
TW530096B true TW530096B (en) 2003-05-01

Family

ID=26358522

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088123151A TW530096B (en) 1999-01-29 1999-12-28 Substrate erecting device and vacuum processing apparatus

Country Status (3)

Country Link
JP (1) JP3827881B2 (ja)
KR (1) KR100670620B1 (ja)
TW (1) TW530096B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3822481B2 (ja) * 2001-10-26 2006-09-20 株式会社アルバック スパッタリング方法
US20100279021A1 (en) 2009-05-04 2010-11-04 Samsung Mobile Display Co., Ltd. Apparatus for depositing organic material and depositing method thereof
JP6240678B2 (ja) 2012-11-23 2017-11-29 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Ａｌｄ反応炉における基板の装填
KR101914771B1 (ko) 2016-11-24 2018-11-02 한국알박(주) 막 증착 방법
JP6820900B2 (ja) * 2018-11-29 2021-01-27 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Ａｌｄ反応炉における基板の装填

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03158461A (ja) * 1989-11-16 1991-07-08 Fujitsu Ltd ターゲット移動式スパッタ装置
KR960015928B1 (ko) * 1992-09-25 1996-11-23 다이닛뽕스크린세이조오 가부시키가이샤 기판처리장치
JPH08107076A (ja) * 1994-10-06 1996-04-23 Sony Corp バッチ式減圧ｃｖｄ装置
JP3619314B2 (ja) * 1996-03-11 2005-02-09 サンエー技研株式会社 露光装置
JPH09316642A (ja) * 1996-05-23 1997-12-09 Hitachi Cable Ltd マルチチャンバー型プロセス装置及び光部品の製造方法
JP3548373B2 (ja) * 1997-03-24 2004-07-28 大日本スクリーン製造株式会社 基板処理装置
JPH1179391A (ja) * 1997-09-12 1999-03-23 Mecs:Kk 薄型ワークの立直装置

Also Published As

Publication number Publication date
JP2000286321A (ja) 2000-10-13
JP3827881B2 (ja) 2006-09-27
KR100670620B1 (ko) 2007-01-17
KR20000053571A (ko) 2000-08-25

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