TW530096B - Substrate erecting device and vacuum processing apparatus - Google Patents
Substrate erecting device and vacuum processing apparatus Download PDFInfo
- Publication number
- TW530096B TW530096B TW088123151A TW88123151A TW530096B TW 530096 B TW530096 B TW 530096B TW 088123151 A TW088123151 A TW 088123151A TW 88123151 A TW88123151 A TW 88123151A TW 530096 B TW530096 B TW 530096B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- mounting portion
- vacuum
- substrate mounting
- aforementioned
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G13/00—Protecting plants
- A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
- A01G13/0237—Devices for protecting a specific part of a plant, e.g. roots, trunk or fruits
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G13/00—Protecting plants
- A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
- A01G13/04—Cloches, i.e. protective full coverings for individual plants
- A01G13/043—Cloches, i.e. protective full coverings for individual plants with flexible coverings
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G13/00—Protecting plants
- A01G13/02—Protective coverings for plants; Coverings for the ground; Devices for laying-out or removing coverings
- A01G13/04—Cloches, i.e. protective full coverings for individual plants
- A01G2013/046—Cloches, i.e. protective full coverings for individual plants foldable
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2145999 | 1999-01-29 | ||
JP09541799A JP3827881B2 (ja) | 1999-01-29 | 1999-04-01 | 真空処理装置及び基板起立装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW530096B true TW530096B (en) | 2003-05-01 |
Family
ID=26358522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW088123151A TW530096B (en) | 1999-01-29 | 1999-12-28 | Substrate erecting device and vacuum processing apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3827881B2 (ja) |
KR (1) | KR100670620B1 (ja) |
TW (1) | TW530096B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3822481B2 (ja) * | 2001-10-26 | 2006-09-20 | 株式会社アルバック | スパッタリング方法 |
US20100279021A1 (en) | 2009-05-04 | 2010-11-04 | Samsung Mobile Display Co., Ltd. | Apparatus for depositing organic material and depositing method thereof |
JP6240678B2 (ja) | 2012-11-23 | 2017-11-29 | ピコサン オーワイPicosun Oy | Ald反応炉における基板の装填 |
KR101914771B1 (ko) | 2016-11-24 | 2018-11-02 | 한국알박(주) | 막 증착 방법 |
JP6820900B2 (ja) * | 2018-11-29 | 2021-01-27 | ピコサン オーワイPicosun Oy | Ald反応炉における基板の装填 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03158461A (ja) * | 1989-11-16 | 1991-07-08 | Fujitsu Ltd | ターゲット移動式スパッタ装置 |
KR960015928B1 (ko) * | 1992-09-25 | 1996-11-23 | 다이닛뽕스크린세이조오 가부시키가이샤 | 기판처리장치 |
JPH08107076A (ja) * | 1994-10-06 | 1996-04-23 | Sony Corp | バッチ式減圧cvd装置 |
JP3619314B2 (ja) * | 1996-03-11 | 2005-02-09 | サンエー技研株式会社 | 露光装置 |
JPH09316642A (ja) * | 1996-05-23 | 1997-12-09 | Hitachi Cable Ltd | マルチチャンバー型プロセス装置及び光部品の製造方法 |
JP3548373B2 (ja) * | 1997-03-24 | 2004-07-28 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JPH1179391A (ja) * | 1997-09-12 | 1999-03-23 | Mecs:Kk | 薄型ワークの立直装置 |
-
1999
- 1999-04-01 JP JP09541799A patent/JP3827881B2/ja not_active Expired - Lifetime
- 1999-12-28 TW TW088123151A patent/TW530096B/zh not_active IP Right Cessation
-
2000
- 2000-01-21 KR KR1020000002849A patent/KR100670620B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2000286321A (ja) | 2000-10-13 |
JP3827881B2 (ja) | 2006-09-27 |
KR100670620B1 (ko) | 2007-01-17 |
KR20000053571A (ko) | 2000-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MK4A | Expiration of patent term of an invention patent |