TW201926521A

TW201926521A - Transportation device, large-sized conveyor, transportation method and unit wherein the transportation device includes a pedestal and a plurality of columnar projections disposed on a surface of the pedestal

Info

Publication number: TW201926521A
Application number: TW107127964A
Authority: TW
Inventors: 植村豪彦; 小野寺有治; 宮原崇之
Original assignee: 日商Ｕｍｉ股份有限公司
Priority date: 2017-11-29
Filing date: 2018-08-10
Publication date: 2019-07-01
Also published as: JP6353969B1; KR20190063370A; JP2019102509A; CN109835714A; TWI666722B; KR102170518B1; CN109835714B

Abstract

The invention provides a transportation device having a strong adhesion and a transportation method. The transportation device includes a pedestal and a plurality of columnar projections disposed on a surface of the pedestal. Each of the plurality of columnar projections has one recess at its top. A large-sized conveyor is configured in a manner that a plurality of the transportation devices are not superposed on a flat plate, but on the protrusions used as a surface. The transportation method conveys an object to be manufactured by using the large-sized conveyor which is configured in a manner that the plurality of the transportation devices are not superposed on a flat plate, but on the protrusions used as a surface.

Description

搬送具與大型搬送具與搬送方法與搬送具單元Transfer tool and large transfer tool and transfer method and transport unit

本發明係關於一種搬送具與搬送方法與搬送單元。尤其關於一種用以於生產線等中暫時搬送對象物之搬送具與搬送方法與搬送單元。The present invention relates to a conveyor, a conveying method, and a conveying unit. In particular, the present invention relates to a transporting device, a transporting method, and a transporting unit for temporarily transporting an object in a production line or the like.

生產線中，習知使用有搬送基板或玻璃等之搬送具（專利文獻1）。該搬送具中，於金屬板上設置有橡膠。而對象物暫時地黏著於橡膠上而搬送，於目的地將對象物從搬送具上取下。 [現有技術文獻]In the production line, a transfer tool such as a transfer substrate or glass is conventionally used (Patent Document 1). In the conveyor, rubber is provided on the metal plate. The object is temporarily adhered to the rubber and transported, and the object is removed from the transfer tool at the destination. [Prior Art Literature]

[專利文獻] [專利文獻1]日本特開2006-186398號公報[Patent Document 1] [Patent Document 1] JP-A-2006-186398

[發明所欲解決之問題][The problem that the invention wants to solve]

但是，該搬送具中，因吸附力弱而無法適當地保持對象物。因此，本申請案之課題為提供一種黏著力強之搬送具與搬送方法。 [解決問題之手段]However, in this conveyor, the object is not properly held due to the weak adsorption force. Therefore, the object of the present application is to provide a conveyor and a conveying method with strong adhesion. [Means for solving problems]

為解決上述現有課題，而使用如下搬送具，其包含台座、以及配置於上述台座之表面之複數個柱狀突起，並且上述複數個柱狀突起分別於頂部具有1個凹部。另外，使用如下大型搬送具，其將複數個上述搬送具不重疊於平板上，而將上述突起作為表面來配置。進一步地，使用如下搬送方法，其使用將複數個上述搬送具不重疊於平板上，而將上述突起作為表面來配置之大型搬送具，搬送製造之對象物。使用將複數個上述搬送具，與1個上述台座設為1個搬送具之搬送具單元。 [發明之效果]In order to solve the above conventional problems, a conveyor including a pedestal and a plurality of columnar projections disposed on a surface of the pedestal is provided, and each of the plurality of columnar projections has one recess at the top. Further, a large-sized conveyer is used in which a plurality of the above-described conveyers are not superposed on a flat plate, and the projections are arranged as a surface. Further, a transport method in which a plurality of the transporting devices are not superimposed on the flat plate and the projections are disposed as a surface is used, and the object to be manufactured is transported. A conveyor unit that uses a plurality of the above-described conveyors and one of the above-described pedestals is used as one conveyor. [Effects of the Invention]

本發明之搬送具中，充分保持對象物，可確實地搬送至目標場所。In the conveyor of the present invention, the object is sufficiently held and can be reliably transported to the target location.

以下，參照圖式，對本發明之實施方式進行說明。此外，本發明不受該實施方式所限定。Hereinafter, embodiments of the present invention will be described with reference to the drawings. Further, the invention is not limited by the embodiment.

（實施方式1）使用圖1（a）～圖1（d），對實施方式1之搬送具10進行說明。圖1（a）係搬送具10之俯視圖。圖1（b）係保持有對象物16之搬送具10之側面圖。圖1（c）係搬送具10之放大俯視圖。圖1（d）係於在搬送具10上保持有對象物16之狀態下，搬送具10之保持有對象物16之部分之放大俯視圖。此外，圖1（d）中，將對象物16除外而表示。(Embodiment 1) A conveyor 10 of Embodiment 1 will be described with reference to Figs. 1(a) to 1(d). Fig. 1(a) is a plan view of the conveyor 10. Fig. 1(b) is a side view of the conveyor 10 holding the object 16. Fig. 1(c) is an enlarged plan view of the conveyor 10. FIG. 1(d) is an enlarged plan view showing a portion of the conveyor 10 in which the object 16 is held in a state where the object 16 is held on the conveyor 10. In addition, in FIG. 1(d), the object 16 is excluded.

＜結構＞搬送具10包含台座15、突起11、凹部13及間隙14。台座15為平板狀，且於其中一面具有突起11。台座15係1邊為約30 mm見方之正方形形狀。作為1邊，可製作1 cm～100 cm範圍的長度。突起11為圓柱狀突起11。突起11之圓之直徑為約0.5 mm～2 mm。突起11之高度亦為約0.5 mm～2 mm。突起11之高度相對於圓之直徑的比（外觀比，Aspect ratio）較佳為0.5至1.5。並不限定於圓柱，只要為柱狀即可。<Structure> The conveyor 10 includes a pedestal 15 , a projection 11 , a recess 13 , and a gap 14 . The pedestal 15 has a flat shape and has a projection 11 on one side thereof. One side of the pedestal 15 is a square shape of about 30 mm square. As one side, a length in the range of 1 cm to 100 cm can be produced. The protrusions 11 are cylindrical protrusions 11. The diameter of the circle of the protrusion 11 is about 0.5 mm to 2 mm. The height of the projections 11 is also about 0.5 mm to 2 mm. The ratio of the height of the projections 11 to the diameter of the circle (appearance ratio, aspect ratio) is preferably from 0.5 to 1.5. It is not limited to a cylinder, and may be a columnar shape.

突起11之頂部之面積之比例（佔有面積，於突起11所存在之整個區域中之每單位面積之突起11部分所占之面積密度）宜為50%以上。較佳為60%以上。為保持對象物16，越多越佳。但，突起11由於需要變形，故而設為分別獨立之複數個突起11。為增加突起11之頂部之面積之比例，突起11設為交錯排列。另外，突起11為了於變形時均等地向至少4個方向擴散，較佳為圓柱形狀。因此，突起11之頂部之面積之比例宜為95%以下。較佳為90%以下。凹部13係由突起11及台座15所包圍之空間。The ratio of the area of the top of the protrusions 11 (the area occupied, the area density of the portion of the protrusions 11 per unit area in the entire region where the protrusions 11 exist) is preferably 50% or more. It is preferably 60% or more. In order to keep the object 16, the more the better. However, since the projections 11 need to be deformed, they are provided as a plurality of independent projections 11 respectively. In order to increase the ratio of the area of the top of the protrusions 11, the protrusions 11 are arranged in a staggered arrangement. Further, the projections 11 are preferably uniformly formed in a cylindrical shape in order to be uniformly diffused in at least four directions during deformation. Therefore, the ratio of the area of the top of the protrusions 11 is preferably 95% or less. It is preferably 90% or less. The recess 13 is a space surrounded by the protrusion 11 and the pedestal 15.

間隙14為突起11間之間隙。為了於突起11保持對象物16時可變形，而需要間隙14。間隙14為0.1 mm以下。搬送具10之材質較佳為化學性質穩定之氟橡膠，藉由擠壓成型或澆鑄模成型而製作。The gap 14 is a gap between the protrusions 11. In order to deform the protrusion 16 while holding the object 16, a gap 14 is required. The gap 14 is 0.1 mm or less. The material of the conveyor 10 is preferably a chemically stable fluororubber which is produced by extrusion molding or cast molding.

氟橡膠亦可利用具有以源自偏二氟乙烯之構成單元、六氟丙烯之構成單元、以及源自四氟乙烯之構成單元為主之構成的氟橡膠組成物。此外，可適合於所有氟橡膠。亦可利用含有以源自四氟乙烯之構成單元、或者源自全氟(烷基乙烯酯)或全氟(烷氧基烷基乙烯酯)之構成單元為主之構成的全氟彈性體。另外，作為橡膠，亦可使用上述以外之氟橡膠。亦可使用矽橡膠、彈性體。只要為可於室溫下藉由加壓而變形者，則即可使用。The fluororubber may be a fluororubber composition having a structure mainly composed of a constituent unit derived from vinylidene fluoride, a constituent unit of hexafluoropropylene, and a constituent unit derived from tetrafluoroethylene. In addition, it is suitable for all fluororubbers. A perfluoroelastomer containing a constituent unit derived from tetrafluoroethylene or a constituent unit derived from perfluoro(alkyl vinyl ester) or perfluoro(alkoxyalkyl vinyl ester) may also be used. Further, as the rubber, a fluororubber other than the above may be used. You can also use silicone rubber or elastomer. It can be used as long as it can be deformed by pressurization at room temperature.

＜製造方法＞製成實施有與搬送具10之形狀對應之凹部之上模，於壓力機上設置模具。將模具加熱至180℃，為了於橡膠成型後容易剝落橡膠而塗佈脫模劑（氟系、矽系等）。將橡膠片切割為適當之尺寸，放置於下模具上，利用上模進行擠壓。擠壓設定為180℃、240秒。根據橡膠之材質而改變溫度・時間之設定。若小於適當之尺寸，則成為未硫化狀態，橡膠無法成型。<Manufacturing Method> A mold having a concave portion corresponding to the shape of the conveyor 10 is formed, and a mold is placed on the press. The mold was heated to 180 ° C, and a release agent (fluorine, lanthanum, etc.) was applied in order to easily peel off the rubber after the rubber molding. The rubber sheet was cut to an appropriate size, placed on the lower mold, and extruded using the upper mold. The extrusion was set to 180 ° C for 240 seconds. Change the temperature/time setting according to the material of the rubber. If it is smaller than the appropriate size, it becomes unvulcanized and the rubber cannot be molded.

擠壓後，為了使橡膠不破碎而謹慎地從模具（上下模具）上剝離橡膠。剝離結束後，進行外觀確認，若無問題，則將橡膠製品放入烘箱中，於232℃下加熱10小時。若溫度・時間不足的話，則存在橡膠之物理性質不出現之顧慮。根據橡膠之材質而改變溫度・時間之設定。於烘箱中之作業後，進行外觀確認，若無問題，則製品完成。After extrusion, the rubber was carefully peeled off from the mold (upper and lower molds) in order to prevent the rubber from breaking. After the completion of the peeling, the appearance was confirmed, and if there was no problem, the rubber product was placed in an oven and heated at 232 ° C for 10 hours. If the temperature and time are insufficient, there is a concern that the physical properties of the rubber do not occur. Change the temperature/time setting according to the material of the rubber. After the operation in the oven, the appearance is confirmed, and if there is no problem, the product is completed.

此外，亦可不進行橡膠片之成形。亦可為通常之成形加工。台座15與突起11較佳為以一體來製作。其原因在於，突起11受到對象物16之擠壓而變形，故而容易破損。因此，台座15與突起11由1種材料而一體地形成的話，可保持良好的強度。Further, the formation of the rubber sheet may not be performed. It can also be a usual forming process. The pedestal 15 and the projections 11 are preferably made in one piece. This is because the projection 11 is deformed by being pressed by the object 16, and is easily broken. Therefore, when the pedestal 15 and the projection 11 are integrally formed of one type of material, good strength can be maintained.

＜保持狀態＞圖1（b）表示以搬送具10來保持對象物16之狀態。搬送具10中，以突起11之頂部與對象物16接觸，來保持對象物16。突起11之頂部具有黏著性，將對象物16黏著保持。<Holding State> FIG. 1( b ) shows a state in which the object 16 is held by the conveyor 10 . In the transfer tool 10, the object 16 is held by the top of the protrusion 11 being in contact with the object 16. The top of the protrusion 11 has adhesiveness, and the object 16 is adhered and held.

圖1（c）係未保持對象物16時之搬送具10之放大俯視圖，圖1（d）係保持對象物16時之搬送具10之放大俯視圖。突起11之頂部因對象物16之重量而變形、擴散，來保持對象物16。因此，於突起11間設有間隙14。藉由進一步增加突起11之頂部之面積而更容易保持對象物16。因此，將突起11密集地配置於平面內。此外，突起11由於因對象物16而壓縮變形、擴散，故而較佳為設置複數個非接觸之突起11。1(c) is an enlarged plan view of the conveyor 10 when the object 16 is not held, and FIG. 1(d) is an enlarged plan view of the conveyor 10 when the object 16 is held. The top of the protrusion 11 is deformed and diffused by the weight of the object 16 to hold the object 16 . Therefore, a gap 14 is provided between the protrusions 11. The object 16 is more easily held by further increasing the area of the top of the protrusion 11. Therefore, the projections 11 are densely arranged in a plane. Further, since the projections 11 are compressively deformed and diffused by the object 16, it is preferable to provide a plurality of non-contact projections 11.

搬送具10之硬度宜為20～90。較佳為60～80。此處，硬度為硬度計Type A之值。搬送具10之硬度根據突起11之變形之容易度、保持性而成為上述範圍。實施方式1之搬送具10中，突起11雖密集地配置，但可變形。可以突起11之頂部之廣泛面積牢固地保持對象物16。The hardness of the conveyor 10 is preferably 20 to 90. It is preferably 60 to 80. Here, the hardness is the value of the hardness meter Type A. The hardness of the conveyer 10 is in the above range in accordance with the ease of deformation of the projections 11 and the retentivity. In the conveyor 10 of the first embodiment, the projections 11 are densely arranged, but are deformable. The object 16 can be firmly held by a wide area of the top of the protrusion 11.

（實施方式2）使用圖2（a）～圖2（c），對實施方式2之搬送具20進行說明。圖2（a）係搬送具20之俯視圖。圖2（b）係搬送具20之側面圖。圖2（c）係於搬送具20上保持有對象物16之側面圖。未記載之事項係與實施方式1相同。(Second Embodiment) A conveyor 20 according to a second embodiment will be described with reference to Figs. 2(a) to 2(c). Fig. 2(a) is a plan view of the conveyor 20. 2(b) is a side view of the conveyor 20. 2(c) is a side view of the object 16 held on the conveyor 20. The items not described are the same as those in the first embodiment.

＜結構＞搬送具20包含：台座15、第1突起11a、第2突起11b、凹部13及間隙14。台座15為平板狀，且於其中一面具有第1突起11a及第2突起11b。第1突起11a為圓柱狀突起。與實施方式1之突起11相同。第2突起11b為圓柱狀突起。第2突起11b較第1突起11a而言，剖面積更小，且為與第1突起11a相同之高度。第1突起11a為主要突起。<Structure> The conveyor 20 includes a pedestal 15 , a first projection 11 a , a second projection 11 b , a recess 13 , and a gap 14 . The pedestal 15 has a flat shape and has a first projection 11a and a second projection 11b on one surface thereof. The first protrusion 11a is a columnar protrusion. The same as the protrusion 11 of the first embodiment. The second protrusion 11b is a columnar protrusion. The second projection 11b has a smaller cross-sectional area than the first projection 11a and has the same height as the first projection 11a. The first projection 11a is a main projection.

凹部13係由第1突起11a、第2突起11b及台座15所包圍之空間。間隙14為第1突起11a與第2突起11b之間之間隙。第1突起11a之直徑大於第2突起11b。若為了增加突起之佔有面積而密集排列，則第1突起11a之直徑為第2突起11b之2.3倍為止。此外，第1突起11a之外觀比係與實施方式1之突起11同樣，為1左右。因此，第2突起11b成為細長之突起。第1突起11a承受對象物16，第2突起11b係輔助地承受。第2突起11b係為了黏著性之提昇、真空吸附性而存在。The recessed portion 13 is a space surrounded by the first projection 11a, the second projection 11b, and the pedestal 15. The gap 14 is a gap between the first protrusion 11a and the second protrusion 11b. The diameter of the first projection 11a is larger than that of the second projection 11b. When the arrangement is dense in order to increase the area occupied by the projections, the diameter of the first projections 11a is 2.3 times that of the second projections 11b. Further, the appearance of the first projection 11a is about 1 as in the case of the projection 11 of the first embodiment. Therefore, the second projections 11b become elongated projections. The first projection 11a receives the object 16, and the second projection 11b is received by the auxiliary projection. The second projections 11b are present for the purpose of improving adhesion and vacuum adsorption.

＜保持狀態＞圖3（a）係保持對象物16之前之搬送具20之放大俯視圖。圖3（b）係保持對象物16中時之搬送具20之放大俯視圖。將對象物16省略而表示。<Holding State> FIG. 3( a ) is an enlarged plan view of the conveyor 20 before the object 16 is held. FIG. 3(b) is an enlarged plan view of the conveyor 20 when the object 16 is held. The object 16 is omitted and shown.

當對象物16載置於第1突起11a與第2突起11b上時，第1突起11a與第2突起11b被壓縮，間隙14消失，第1突起11a與第2突起11b接觸。於該狀態下，凹部13成為由第1突起11a、第2突起11b、台座15及對象物16所密閉之空間。此時，該空間稍微成為真空狀態，將對象物16由搬送具10來吸附、保持。即，可藉由第1突起11a與第2突起11b之頂部之黏性及凹部13之真空，來保持對象物16。When the object 16 is placed on the first projection 11a and the second projection 11b, the first projection 11a and the second projection 11b are compressed, and the gap 14 disappears, and the first projection 11a comes into contact with the second projection 11b. In this state, the recessed portion 13 is a space in which the first projection 11a, the second projection 11b, the pedestal 15, and the object 16 are sealed. At this time, the space is slightly in a vacuum state, and the object 16 is sucked and held by the conveyor 10. That is, the object 16 can be held by the viscosity of the top of the first projection 11a and the second projection 11b and the vacuum of the recess 13.

於取下對象物16時，若稍微提起端部，則形成間隙14，使真空狀態解除，而容易取出。即，複數個凹部13從端部起緩緩地解除其真空，容易取出對象物16。實施方式2之搬送具20較實施方式1之搬送具10而言，可更牢固地保持對象物16。When the object 16 is removed, if the end portion is slightly lifted, the gap 14 is formed, and the vacuum state is released, and the liquid is easily taken out. In other words, the plurality of concave portions 13 gradually release the vacuum from the end portion, and the object 16 can be easily taken out. The conveyor 20 of the second embodiment can hold the object 16 more firmly than the conveyor 10 of the first embodiment.

（實施方式3）使用圖4（a）～圖4（c），對實施方式3進行說明。未說明之事項係與實施方式1、2相同。圖4（a）係實施方式3之突起11c之放大側面圖。圖4（c）係突起11c之放大俯視圖。圖4（b）係於突起11c上保持有對象物16之情形之放大側面圖。突起11c係實施方式1或2之搬送具之突起。(Embodiment 3) Embodiment 3 will be described with reference to Figs. 4(a) to 4(c). The items that are not described are the same as those in the first and second embodiments. Fig. 4 (a) is an enlarged side view showing the projection 11c of the third embodiment. Fig. 4(c) is an enlarged plan view of the projection 11c. Fig. 4 (b) is an enlarged side view showing a state in which the object 16 is held on the projection 11c. The projection 11c is a projection of the conveyor of Embodiment 1 or 2.

突起11c為圓柱形狀，且於頂部具有1個凹部41。凹部41之周圍係由突起凸部11d所包圍。亦可不為圓柱形狀，只要為柱狀即可。凹部41之深度為數微米，為1～5 μm。突起11d之直徑為約0.5 mm～1.5 mm。若凹部41之深度較深，則空氣將殘留於凹部41與對象物16間，導致吸附性不良。若於突起11c上保持對象物16，則突起11c之頂部之突起凸部11d變形，突起11c之側面膨脹，形成突起側部11e。此時，突起11c之頂部作為更寬廣之面，可保持對象物16。亦可不為圓柱，而為稜柱。突起11c可作為實施方式1、2之突起而使用。進一步，亦可與實施方式1、2無關而單獨使用。若對實施方式1、2之突起使用實施方式3之突起，則更能夠保持對象物16，故而較佳。The projection 11c has a cylindrical shape and has one recess 41 at the top. The periphery of the recess 41 is surrounded by the protrusion convex portion 11d. It may not be a cylindrical shape as long as it is a columnar shape. The depth of the recess 41 is several micrometers and is 1 to 5 μm. The diameter of the projection 11d is about 0.5 mm to 1.5 mm. When the depth of the concave portion 41 is deep, air will remain between the concave portion 41 and the object 16, resulting in poor adsorptivity. When the object 16 is held on the projection 11c, the projection convex portion 11d at the top of the projection 11c is deformed, and the side surface of the projection 11c is expanded to form the projection side portion 11e. At this time, the top of the projection 11c serves as a wider surface, and the object 16 can be held. It may not be a cylinder but a prism. The projections 11c can be used as the projections of the first and second embodiments. Further, it can be used alone regardless of the first and second embodiments. When the projections of the third embodiment are used for the projections of the first and second embodiments, the object 16 can be held more, which is preferable.

（實施方式4）藉由圖5（a）及圖5（b）來對實施方式4進行說明。未記載之事項係與上述實施方式相同。圖5（a）係大型搬送具50之保持對象物16之狀態之側面圖。圖5（b）係大型搬送具50之俯視圖。若對象物16變大，則亦可增大上述實施方式之搬送具10、20，但就製作上之問題、成本方面而言欠佳。(Embodiment 4) Embodiment 4 will be described with reference to Figs. 5(a) and 5(b). The items not described are the same as those of the above embodiment. Fig. 5 (a) is a side view showing a state in which the object 16 of the large-sized conveyor 50 is held. Fig. 5(b) is a plan view of the large conveyor 50. When the object 16 is made larger, the conveyors 10 and 20 of the above-described embodiment can be increased, but it is not preferable in terms of production and cost.

因此，該實施方式中，使用複數個搬送具30。搬送具30為上述實施方式之搬送具之任一者。亦可使用複數種搬送具。搬送具30之大小為10 mm見方～50 mm見方之面積，為正方形、長方形、菱形、梯形亦可。大型搬送具50包含搬送台17及搬送具30。搬送台17係如金屬板等用於搬運之台座。搬送具30為上述實施方式之搬送具之任一種或者複數種。大型搬送具50於其表面配置有複數個搬送具30。於複數個搬送具30上載置對象物16，對象物16得以保持。Therefore, in this embodiment, a plurality of conveyors 30 are used. The conveyor 30 is any one of the conveyors of the above embodiment. A variety of conveyors can also be used. The size of the conveyor 30 is 10 mm square to 50 mm square, and is square, rectangular, diamond, or trapezoidal. The large transfer tool 50 includes a transfer table 17 and a transfer device 30. The transfer table 17 is a pedestal for transporting such as a metal plate. The conveyor 30 is any one or a plurality of the conveyors of the above embodiment. The large conveyor 50 has a plurality of conveyors 30 disposed on its surface. The object 16 is placed on the plurality of conveyors 30, and the object 16 is held.

搬送具30較佳為相對於對象物16而均等地配置。但，亦可將搬送具30僅配置於周邊部，或者僅配置於端部。作為整體而保持對象物16。搬送具30黏接固定於搬送台17上。The conveyance tool 30 is preferably disposed uniformly with respect to the object 16 . However, the conveyor 30 may be disposed only in the peripheral portion or only at the end portion. The object 16 is held as a whole. The transfer tool 30 is adhesively fixed to the transfer table 17.

結果，即便不增大搬送具30，亦可實現大型搬送具50。另外，可使用圖5（c）之俯視圖、圖5（d）之側面圖中所示之搬送具單元51。搬送具單元51具有複數個搬送具30。其係於製作搬送具30時，使台座15共用而製作複數個搬送具30者。由搬送具單元51所供給，沿著標記52而切割，作為複數個搬送具30來利用。標記52可於搬送具單元51之製造時利用模具來設置。標記52亦可不存在。搬送具單元51中，搬送具30間為無突起之僅有台座15之平面。As a result, the large-sized conveyor 50 can be realized without increasing the conveyor 30. Further, the conveyor unit 51 shown in the plan view of Fig. 5(c) and the side view of Fig. 5(d) can be used. The transport unit 51 has a plurality of transporters 30. When the conveyor 30 is produced, the pedestal 15 is shared and a plurality of conveyors 30 are produced. It is supplied by the conveyance unit 51, cut along the mark 52, and used as a plurality of conveyers 30. The mark 52 can be set by a mold at the time of manufacture of the conveyer unit 51. The mark 52 may also not be present. In the transport unit 51, the conveyor 30 is a flat surface of only the pedestal 15 having no protrusion.

搬送具30可直接由黏接材等固定於搬送台17上。但是，較佳為將搬送具30之一端，以黏接材貼附於中間體上，且將該中間體以螺釘等物理性方式固定於搬送台17上。搬送具30定期地消耗而更換，但搬送台17係長期使用，故而為了能夠長期使用，較佳為不對搬送台17直接使用黏接材等。The transfer tool 30 can be directly fixed to the transfer table 17 by an adhesive or the like. However, it is preferable that one end of the transfer tool 30 is attached to the intermediate body with an adhesive material, and the intermediate body is physically fixed to the transfer table 17 by screws or the like. The conveyance tool 30 is periodically consumed and replaced, but the conveyance table 17 is used for a long period of time. Therefore, in order to be able to be used for a long period of time, it is preferable not to directly use the adhesive material or the like for the conveyance table 17.

（作為整體）上述實施方式1～4可組合。對象物16為玻璃面板、半導體晶片、透鏡、晶圓等，並未限定。 [產業上之可利用性](As a whole) Embodiments 1 to 4 described above can be combined. The object 16 is a glass panel, a semiconductor wafer, a lens, a wafer, etc., and is not limited. [Industrial availability]

本發明之搬送具與大型搬送具可於半導體、顯示器等裝置之製造中，於搬送對象物時利用。於其他製品之製造中亦可利用。The conveyer and the large-sized conveyer of the present invention can be used in the manufacture of a device such as a semiconductor or a display when the object is transported. It can also be used in the manufacture of other products.

10、20、30‧‧‧搬送具10, 20, 30‧‧‧Transport

11、11c‧‧‧突起11, 11c‧‧ ‧ prominence

11a‧‧‧第1突起11a‧‧‧1st protrusion

11b‧‧‧第2突起11b‧‧‧2nd protrusion

11d‧‧‧突起凸部11d‧‧‧Protrusion

11e‧‧‧突起側部11e‧‧‧ protruding side

13、41‧‧‧凹部13, 41‧‧ ‧ recess

14‧‧‧間隙14‧‧‧ gap

15‧‧‧台座15‧‧‧ pedestal

16‧‧‧對象物16‧‧‧ objects

17‧‧‧搬送台17‧‧‧Transportation station

30‧‧‧搬送具30‧‧‧Transporting equipment

50‧‧‧大型搬送具50‧‧‧ Large transporting equipment

51‧‧‧搬送具單元51‧‧‧Transporting unit

52‧‧‧標記52‧‧‧ mark

圖1（a）係實施方式1之搬送具之俯視圖，（b）係保持對象物之實施方式1之搬送具之側面圖，（c）係實施方式1之搬送具之放大俯視圖，（d）係於實施方式1之搬送具上保持有對象物之狀態下之實施方式1之搬送具之放大俯視圖。圖2係實施方式2之搬送具之俯視圖，（b）係實施方式2之搬送具之側面圖，（c）係於實施方式2之搬送具上保持有對象物之側面圖。圖3（a）係保持對象物之前之實施方式2之搬送具之放大俯視圖，（b）係保持對象物中時之實施方式2之搬送具之放大俯視圖。圖4（a）係實施方式3之搬送具之突起之放大側面圖，（b）係於實施方式3之搬送具之突起上保持有對象物之情形之放大側面圖，（c）係實施方式3之搬送具之突起之放大俯視圖。圖5（a）係實施方式4之大型搬送具保持有對象物之狀態之側面圖，（b）係實施方式4之大型搬送具之俯視圖，（c）係實施方式4之搬送具單元之俯視圖，（d）係實施方式4之搬送具單元之側面圖。Fig. 1(a) is a plan view of the conveyor of the first embodiment, (b) is a side view of the conveyor of the first embodiment in which the object is held, and (c) is an enlarged plan view of the conveyor of the first embodiment, (d) An enlarged plan view of the conveyor of the first embodiment in a state in which an object is held on the conveyor of the first embodiment. 2 is a plan view of the conveyor of the second embodiment, (b) is a side view of the conveyor of the second embodiment, and (c) is a side view of the object held by the conveyor of the second embodiment. Fig. 3 (a) is an enlarged plan view of the conveyor of the second embodiment before the object is held, and (b) is an enlarged plan view of the conveyor of the second embodiment when the object is held. 4(a) is an enlarged side view showing a projection of the conveyor of the third embodiment, and (b) is an enlarged side view showing a state in which an object is held by the projection of the conveyor of the third embodiment, and (c) is an embodiment. 3 magnified top view of the protrusion of the conveyor. Fig. 5 (a) is a side view showing a state in which a large-sized conveyor of the fourth embodiment holds an object, (b) is a plan view of the large-sized conveyor of the fourth embodiment, and (c) is a plan view of the conveyor unit of the fourth embodiment; (d) is a side view of the conveyor unit of the fourth embodiment.

Claims

一種搬送具，其包含：台座、以及配置於上述台座之表面之複數個柱狀突起，上述複數個柱狀突起分別於頂部具有1個凹部，因來自各自之頂部之加壓而變形，向側面方向均等地擴散，上述凹部為吸附用途，並且上述複數個柱狀突起係藉由來自其頂部之加壓而變形，與不同之4個方向之上述柱狀突起分別接觸。A conveyor comprising: a pedestal; and a plurality of columnar protrusions disposed on a surface of the pedestal, wherein the plurality of columnar protrusions respectively have one recess at the top, and are deformed by pressurization from the tops of the pedestals, and are laterally deformed The direction is uniformly diffused, and the concave portion is used for adsorption, and the plurality of columnar protrusions are deformed by pressurization from the top thereof, and are in contact with the columnar protrusions in four different directions.

一種搬送具，其包含：台座、以及配置於上述台座之表面之複數個柱狀突起，上述複數個柱狀突起分別於頂部具有1個凹部，上述複數個柱狀突起因來自其頂部之加壓而變形，於上述複數個柱狀突起間接觸，並且藉由上述加壓，形成由上述複數個柱狀突起包圍周圍之用以吸附之凹部。A conveyor comprising: a pedestal; and a plurality of columnar protrusions disposed on a surface of the pedestal, wherein the plurality of columnar protrusions respectively have one recess at the top, and the plurality of columnar protrusions are pressurized by a top thereof And deforming, contacting between the plurality of columnar protrusions, and by the pressing, forming a recess for surrounding the periphery surrounded by the plurality of columnar protrusions.

一種搬送具，其包含：台座、以及配置於上述台座之表面之複數個柱狀突起，上述複數個柱狀突起分別於頂部具有1個凹部，上述複數個柱狀突起包含高度相同、且剖面積不同之複數個第1突起及第2突起，並且上述複數個第1突起及第2突起分別因來自其頂部之加壓而變形，上述第1突起與4個上述第2突起接觸，上述第2突起與4個上述第1突起接觸。A conveyor comprising: a pedestal; and a plurality of columnar protrusions disposed on a surface of the pedestal, wherein the plurality of columnar protrusions each have a concave portion at a top portion, and the plurality of columnar protrusions comprise the same height and a sectional area a plurality of the first protrusions and the second protrusions are different, and the plurality of first protrusions and the second protrusions are respectively deformed by pressurization from the top thereof, and the first protrusions are in contact with the four second protrusions, and the second protrusion The protrusion is in contact with the four first protrusions.

如申請專利範圍第3項之搬送具，其中具有上述第1突起之行及上述第2突起之行，且上述複數個柱狀突起為交錯排列。The carrier of claim 3, wherein the first protrusion line and the second protrusion line are arranged, and the plurality of columnar protrusions are staggered.

如申請專利範圍第1項之搬送具，其中上述複數個柱狀突起為圓柱形狀。The transfer tool of claim 1, wherein the plurality of columnar protrusions have a cylindrical shape.

一種對象物之搬送方法，其於如上述申請專利範圍第1至5項中任一項所述之搬送具上保持上述對象物，且搬送上述對象物。A method of transporting an object, wherein the object is held by the transporter according to any one of the first to fifth aspects of the invention, and the object is transported.

一種大型搬送具，其將複數個如上述申請專利範圍第1至5項中任一項所述之搬送具，不重疊於搬送台上，而以上述突起作為表面來配置。A large-sized conveyer which is disposed on the surface of the above-mentioned projections without overlapping the transfer table, as described in any one of the above-mentioned claims.

如申請專利範圍第7項之大型搬送具，其中將上述搬送具黏接於中間體上，物理性地保持於上述中間體上。For example, in the large-sized conveyor of claim 7, wherein the transfer tool is adhered to the intermediate body and physically held on the intermediate body.

一種搬送方法，其使用將複數個如上述申請專利範圍第1至5項中任一項所述之搬送具，不重疊於搬送台上，而以上述突起作為表面來配置之大型搬送具，搬送製造之對象物。A transport method using a plurality of transporters according to any one of the above-mentioned first to fifth aspects of the present invention, which is not superimposed on the transport table, and is transported by a large transporter having the projections as a surface. The object of manufacture.

一種搬送具單元，其將複數個如上述申請專利範圍第1至5項中任一項所述之搬送具，以共用1個上述台座之方式設為1個搬送具。A transporting unit that is a single transporting device that shares one of the pedestals in a plurality of the transporting apparatus according to any one of the above-mentioned claims.