JP5757649B2 - Holding jig - Google Patents

Holding jig Download PDF

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JP5757649B2
JP5757649B2 JP2011028356A JP2011028356A JP5757649B2 JP 5757649 B2 JP5757649 B2 JP 5757649B2 JP 2011028356 A JP2011028356 A JP 2011028356A JP 2011028356 A JP2011028356 A JP 2011028356A JP 5757649 B2 JP5757649 B2 JP 5757649B2
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adhesive
thin plate
internal
holding jig
adhesive sheet
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JP2012169405A (en
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博 春野
博 春野
裕亮 横山
裕亮 横山
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Shin Etsu Polymer Co Ltd
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この発明は、保持治具に関し、さらに詳しくは、粘着保持された薄板状物を容易に取り外すことのできる保持治具に関する。   The present invention relates to a holding jig, and more particularly, to a holding jig that can easily remove a thin plate-like object that is adhesively held.

従来、シリコンウェハ、フレキシブルプリント基板、大画面表示装置用のガラス板等の薄板状物等は、特に大判であると、また、より一層薄肉化されていると、破損しやすいので、一般に、これらの薄板状物等を保持治具等に固定して、例えば、研磨工程、パターン形成工程、ダイシング工程、表面に各種の機能性物品を実装する実装工程、薄板状物同士の貼り合わせ工程等の製造工程、製造工程間の搬送及び保存等が行われている。   Conventionally, since thin plates such as silicon wafers, flexible printed boards, glass plates for large-screen display devices, etc. are particularly large, and are further thinned, generally they are easily damaged. For example, a polishing process, a pattern formation process, a dicing process, a mounting process for mounting various functional articles on the surface, a bonding process between thin sheet objects, etc. Manufacturing processes, transportation and storage between manufacturing processes, and the like are performed.

そして、薄板状物等は、製造工程中、製造工程間の搬送中、及び／又は、保存中等には保持治具に保持される一方で、製造工程終了後、搬送後、及び／又は、保存後等には保持治具から取り外される。したがって、保持治具には、薄板状物等を確実に保持する特性と、必要時には薄板状物等を容易に取り外すことができる特性とが要求される。   And a thin plate-like object etc. are hold | maintained at a holding jig during a manufacturing process, the conveyance between manufacturing processes, and / or a preservation | save etc. On the other hand, after completion | finish of a manufacturing process, after a conveyance, and / or preservation | save. Later, it is removed from the holding jig. Therefore, the holding jig is required to have a characteristic of securely holding a thin plate-like object and the like and a characteristic of easily removing the thin plate-like object or the like when necessary.

このような保持治具として、例えば、特許文献１には、「物品（１４）を保持するための保持用治具であって、治具ベース基板（１２）と、この治具ベース基板の片面に設けられ、前記物品が着脱自在に粘着される粘着剤層（１３）とを具備し、前記治具ベース基板の前記粘着剤層が設けられた面である粘着剤設置面（１２ａ）の複数箇所には、前記治具ベース基板に形成された貫通孔（１２ｃ）の開口部（１２ｄ）が開口され、前記粘着剤層は、前記治具ベース基板の粘着剤設置面に沿って延在し、前記治具ベース基板の前記粘着剤設置面における前記貫通孔の前記開口部を覆うシート状に形成され、前記治具ベース基板の前記貫通孔が、前記粘着剤層における前記治具ベース基板の前記貫通孔の前記開口部を覆う部分を変形させるための通気路部として機能することを特徴とする保持用治具（１１）」が記載されている。特許文献１において、「治具ベース基板１２は平坦な粘着剤設置面１２ａを有し、粘着剤層１３は平坦な物品粘着面１３ａを有」しており（００２３、図１等）、「粘着剤層に付着されている物品と粘着剤層との接着面積を縮小して、治具からの物品の剥離に要する力を低下させる」こと（０００６欄等）によって、保持用治具から物品を取り外すことができると、記載されている。   As such a holding jig, for example, in Patent Document 1, “a holding jig for holding an article (14), which is a jig base substrate (12) and one surface of the jig base substrate,” A plurality of pressure-sensitive adhesive installation surfaces (12a), which are surfaces on which the pressure-sensitive adhesive layer of the jig base substrate is provided. An opening (12d) of a through hole (12c) formed in the jig base substrate is opened at a location, and the adhesive layer extends along the adhesive installation surface of the jig base substrate. The jig base substrate is formed in a sheet shape covering the opening of the through hole in the adhesive installation surface, and the through hole of the jig base substrate is formed on the adhesive base layer. For deforming a portion covering the opening of the through hole Holding jig, characterized in that the functions as a gas passage portion (11) "is described. In Patent Document 1, “the jig base substrate 12 has a flat adhesive mounting surface 12a and the adhesive layer 13 has a flat article adhesive surface 13a” (0023, FIG. 1 etc.). By reducing the adhesive area between the article adhered to the adhesive layer and the pressure-sensitive adhesive layer and reducing the force required to peel the article from the jig (column 0006, etc.), the article is removed from the holding jig. It is stated that it can be removed.

特許文献１の保持用治具は、特許文献１の全記載を考慮すると、粘着剤層１３は平坦でかつ全面が物品粘着面１３ａである粘着剤層１３を備えていると理解されるから、「粘着剤層に付着されている物品と粘着剤層との接着面積を縮小」しても、物品を破損させることなく容易に取り外すことができない場合がある。この問題点は、物品が大判化され、又は、より一層薄肉化されているときに特に顕著に発生する。   In consideration of the entire description of Patent Document 1, the holding jig of Patent Document 1 is understood to include the pressure-sensitive adhesive layer 13 that is flat and the entire surface is the article adhesive surface 13a. Even if “reducing the bonding area between the article attached to the pressure-sensitive adhesive layer and the pressure-sensitive adhesive layer” may not be easily removed without damaging the article. This problem is particularly prominent when the article is made larger or thinner.

別の保持治具として、例えば、特許文献２には、「上面に少なくとも一つの凸状体を有するベース部と、前記凸状体と隔ててその外側を囲う周壁部と、前記凸状体の頂部及び前記周壁部の頂部と下面で密着固定し、かつ上面に粘着部を有する粘着シート部材と、該粘着シート部材と前記ベース部及び前記周壁部によって形成される空隙部に連通する通気孔を備えた部品保持具であって、前記凸状体の頂部と対応させた前記粘着シート部材の上面部位には、前記粘着部よりも弱い粘着力を有する弱粘着部又は非粘着部を形成されており、前記空隙部内の気体を前記通気孔を介して外部から吸引することで、前記粘着シート部材の前記空隙部に対応する部位が前記ベース部の下面側に弾性変形するようにしたことを特徴とする部品保持具」が記載されている。   As another holding jig, for example, in Patent Document 2, “a base portion having at least one convex body on the upper surface, a peripheral wall portion that surrounds the outer periphery of the convex body, and the convex body is provided. A pressure-sensitive adhesive sheet member having a pressure-sensitive adhesive portion on the top surface and a top surface and a top surface of the peripheral wall portion, and a vent hole communicating with the gap formed by the pressure-sensitive adhesive sheet member, the base portion, and the peripheral wall portion. In the upper part of the adhesive sheet member corresponding to the top of the convex body, a weak adhesive part or a non-adhesive part having an adhesive force weaker than that of the adhesive part is formed. The portion of the pressure-sensitive adhesive sheet member elastically deforms to the lower surface side of the base portion by sucking the gas in the gap portion from the outside through the vent hole. "Parts holder" It has been.

この部品保持具は、粘着部と弱粘着部又は非粘着部とを有する粘着シート部材を用いて、前記粘着シート部材の前記空隙部に対応する部位を前記ベース部の下面側に弾性変形させることで部品を取り外すことができるので、特許文献１の保持用治具に比べれば、大判化され、又は、より一層薄肉化された部品であっても部品を損傷させることなく容易に取り外すことができる。   The component holder uses an adhesive sheet member having an adhesive part and a weak adhesive part or a non-adhesive part, and elastically deforms a portion corresponding to the gap of the adhesive sheet member to the lower surface side of the base part. Since the parts can be removed with this, even if the parts are made larger or thinner than the holding jig of Patent Document 1, they can be easily removed without damaging the parts. .

特開２００９−１０５２２６号公報JP 2009-105226 A 特開２００５−３２７７５８号公報JP 2005-327758 A

これまで、薄板状物の製造工程、製造工程間の搬送及び保存等において、薄板状物の損傷等を防止するため、薄板状物は自身の寸法よりも大きな寸法を有する粘着性シートすなわち保持治具で保持されることが一般的であった。   Until now, in order to prevent damage to the thin plate in the manufacturing process of the thin plate, transportation and storage between the manufacturing processes, etc., the thin plate is an adhesive sheet having a size larger than its own size, that is, holding treatment. It was common to be held with tools.

ところが、近年、薄板状物とほぼ同寸又は薄板状物よりも小さな寸法の粘着性シートすなわち保持治具で薄板状物を保持する場合がある。このような薄板状物の保持は、例えば、取扱性を向上させるために保持治具が小型軽量化されるとき、また、薄板状物、特により一層薄肉化された薄板状物を例えば周壁部で支持してより一層安定な保持状態を確保するとき、さらに、製造効率等を改善するために薄板状物が大判化されるとき等に、採用される。   However, in recent years, a thin plate-like object may be held by an adhesive sheet having a size substantially the same as that of the thin plate-like object or smaller than that of the thin plate-like object, that is, a holding jig. Such a thin plate-like object can be held, for example, when the holding jig is reduced in size and weight in order to improve the handleability, and the thin plate-like material, particularly a thin plate-like material further thinned, for example, a peripheral wall portion. This is employed when a more stable holding state is ensured by supporting, and when the thin plate is enlarged to improve the manufacturing efficiency and the like.

このように、小型の保持治具で薄板状物を保持すると、保持した薄板状物を容易に取り外せないことがあった。特に、特許文献１の保持用治具では薄板状物を破損させることなく取り外すことができない場合がある。なお、特許文献２の部品保持具であっても、薄板状物が破損しない程度ではあるがある程度の力を薄板状物に作用させないと、粘着シート部材を容易に取り外せないことがあり、より一層容易に薄板状物を保持治具から取り外すことが望まれていた。   Thus, when a thin plate-like object is held by a small holding jig, the held thin plate-like object may not be easily removed. In particular, the holding jig of Patent Document 1 may not be able to be removed without damaging the thin plate. Even in the component holder of Patent Document 2, the adhesive sheet member may not be easily removed unless a certain amount of force is applied to the thin plate, although the thin plate is not damaged. It has been desired to easily remove the thin plate from the holding jig.

この発明は、粘着保持された薄板状物を容易に取り外すことのできる保持治具を提供することを目的とする。   It is an object of the present invention to provide a holding jig that can easily remove a thin plate-like object that is adhesively held.

この発明の発明者は、粘着部を有する粘着性シートと粘着部が没入する空隙部を有する基体とを備え、粘着部を空隙部に没入させることで粘着性シートに粘着保持された薄板状物を取り外す保持治具において、特に、粘着保持する薄板状物が粘着性シートすなわち保持治具とほぼ同寸又は大きな寸法を有している場合において、粘着部を空隙部に没入させて薄板状物から引き離しているにもかかわらず薄板状物が粘着性シートに保持されて、薄板状物を容易に取り外せないという課題があることを、新たに見出した。   The inventor of the present invention includes a pressure-sensitive adhesive sheet having a pressure-sensitive adhesive portion and a base having a void portion into which the pressure-sensitive adhesive portion is immersed, and a thin plate-like material that is adhesively held in the pressure-sensitive adhesive sheet by immersing the pressure-sensitive adhesive portion into the void portion. In particular, when the thin plate-like material to be adhesively held has the same or larger dimension as the adhesive sheet, that is, the holding jig, the adhesive portion is immersed in the gap portion and the thin plate-like material is removed. The present inventors have newly found out that there is a problem that the thin plate-like material is held on the pressure-sensitive adhesive sheet despite being separated from the sheet, and the thin plate-like material cannot be easily removed.

この発明の発明者は、このような新たな課題について種々検討したところ、粘着部を空隙部に没入させたときに薄板状物と没入した粘着部との間に周辺圧力よりも低圧の空間が新たに創成されることに前記課題の原因があるのではないかと推測し、この推測に基づいて、薄板状物と没入した粘着部との間に形成される空間を開放空間にすることで前記新たな課題を解決できることを、見出した。   The inventor of the present invention has made various studies on such a new problem, and as a result, when the adhesive portion is immersed in the gap portion, a space having a pressure lower than the surrounding pressure is present between the thin plate-like object and the immersed adhesive portion. Presuming that there is a cause of the problem in newly created, based on this guess, the space formed between the thin plate-like object and the immersed adhesive part is an open space, I found that I could solve a new problem.

すなわち、前記課題を解決するための手段として、
請求項１は、粘着部及び内部粘着不能部を含む粘着領域、並びに、前記粘着領域を囲繞する周縁粘着不能部を有する粘着性シートと、前記粘着性シートを載置すると共に前記粘着部が没入する空隙部及び前記内部粘着不能部を支持する支持体を有する基体とを備え、前記粘着領域及び前記周縁粘着不能部の上に薄板状物が載置されたときに前記薄板状物と前記空隙部に没入した前記粘着部とで形成される創成空間が開放空間になり、前記基体は、前記支持体を囲繞すると共に前記周縁粘着不能部を支持する囲繞部を有し、前記支持体の少なくとも１つは、前記囲繞部の高さよりも高く形成されていることを特徴とする保持治具であり、
請求項２は、前記粘着領域は、互いに離間して配置された複数の内部粘着不能部と、前記内部粘着不能部の間に配置された前記粘着部とを含んでいることを特徴とする請求項１に記載の保持治具であり、
請求項３は、前記囲繞部の高さよりも高く形成されている前記支持体は、複数の前記内部粘着不能部のうち前記周縁粘着不能部側に配置された前記内部粘着不能部を支持する支持体を含むことを特徴とする請求項１又は２に記載の保持治具であり、
請求項４は、前記囲繞部の高さよりも高く形成されている前記支持体は、前記内部粘着不能部を支持するすべての支持体であることを特徴とする請求項１〜３のいずれか１項に記載の保持治具であり、
請求項５は、前記囲繞部よりも高く形成されている前記支持体は、前記囲繞部の高さとの差が２ｍｍ以下であることを特徴とする請求項１〜４のいずれか１項に記載の保持治具であり、
請求項６は、前記基体は、前記空隙部に連通する通気孔を有していることを特徴とする請求項１〜５のいずれか１項に記載の保持治具である。


That is, as means for solving the above-mentioned problem,
Claim 1 is a pressure-sensitive adhesive sheet including a pressure-sensitive adhesive portion and an internal non-stickable portion, a pressure-sensitive adhesive sheet having a peripheral-edge non-stickable portion surrounding the pressure-sensitive adhesive region, and the pressure-sensitive adhesive sheet placed therein while the pressure-sensitive adhesive sheet is placed. And a base having a support for supporting the internal non-adhesive part, and the thin plate-like object and the gap when the thin plate-like object is placed on the adhesive region and the peripheral non-adhesive part. The creation space formed by the adhesive part immersed in the part becomes an open space, the base has an surrounding part that surrounds the support and supports the peripheral non-adhesive part, and at least of the support One is a holding jig characterized by being formed higher than the height of the surrounding portion,
Claim 2, wherein the adhesive region is characterized by comprising a plurality of internal adhesive non section disposed in between away from each other, and said adhesive portion disposed between the inner adhesive incapable portion The holding jig according to claim 1,
According to a third aspect of the present invention, the support formed higher than the height of the surrounding portion supports the internal non-adhesive portion disposed on the peripheral non-adhesive portion of the plurality of internal non-adhesive portions. The holding jig according to claim 1, wherein the holding jig includes a body,
According to a fourth aspect of the present invention, in any one of the first to third aspects, the support body formed higher than the height of the surrounding portion is any support body that supports the internal non-adhesive portion. The holding jig according to the item,
The fifth aspect of the present invention is the support according to any one of the first to fourth aspects, wherein the support formed higher than the surrounding portion has a difference of 2 mm or less from the height of the surrounding portion. Holding jig,
According to a sixth aspect of the present invention, in the holding jig according to any one of the first to fifth aspects, the base has a vent hole communicating with the gap.


この発明に係る保持治具は、粘着部を含む粘着領域及びこの粘着領域を囲繞する周縁粘着不能部を有する粘着性シートと前記粘着部が没入する空隙部を有する基体とを備え、粘着性シート上に載置されたときの薄板状物と空隙部に没入した粘着部とで形成される創成空間が開放空間になるように形成されているから、薄板状物を取り外すときに、薄板状物は開放された創成空間によって粘着性シートに吸引されることなく単に粘着性シート上に載置された状態になっている。したがって、この発明によれば、粘着保持された薄板状物を容易に取り外すことのできる保持治具を提供できる。   A holding jig according to the present invention includes an adhesive sheet including an adhesive portion, an adhesive sheet having a peripheral edge non-adhesive portion surrounding the adhesive region, and a base having a void portion into which the adhesive portion is immersed, and an adhesive sheet. Since the creation space formed by the thin plate-like object when placed on it and the adhesive part immersed in the gap is formed as an open space, when removing the thin plate-like object, the thin plate-like object is formed. Is simply placed on the adhesive sheet without being sucked into the adhesive sheet by the open creation space. Therefore, according to the present invention, it is possible to provide a holding jig capable of easily removing a thin plate-like object that is held by adhesion.

図１は、この発明に係る保持治具の一例である保持治具における粘着性シートを示す平面図である。FIG. 1 is a plan view showing an adhesive sheet in a holding jig which is an example of a holding jig according to the present invention. 図２は、この発明に係る保持治具の一例である保持治具における基体を示す平面図である。FIG. 2 is a plan view showing a base body in a holding jig which is an example of the holding jig according to the present invention. 図３は、この発明に係る保持治具の一例である保持治具に薄板状物を粘着保持した状態の縦断面を示す概略断面図であり、図３（ａ）はこの発明に係る保持治具の一例である保持治具に薄板状物を粘着保持した状態を示す縦断面図であり、図３（ｂ）はこの発明に係る保持治具の一例である保持治具において粘着部を没入させた状態を示す縦断面図であり、図３（ｃ）はこの発明に係る保持治具の一例である保持治具において粘着部を没入させた状態を示す一部拡大縦断面図である。FIG. 3 is a schematic cross-sectional view showing a longitudinal section in a state in which a thin plate-like object is adhered and held to a holding jig which is an example of the holding jig according to the present invention, and FIG. 3 (a) is a holding jig according to the present invention. FIG. 3B is a longitudinal cross-sectional view showing a state in which a thin plate-like object is adhesively held on a holding jig that is an example of a tool, and FIG. FIG. 3C is a partially enlarged longitudinal sectional view showing a state in which the adhesive portion is immersed in a holding jig which is an example of the holding jig according to the present invention. 図４は、この発明に係る保持治具の別の一例である保持治具を示す平面図である。FIG. 4 is a plan view showing a holding jig which is another example of the holding jig according to the present invention.

この発明に係る保持治具について説明する。この発明に係る保持治具は、粘着性シートの表面に被粘着物を粘着保持して、被粘着物を製造し、搬送し、及び／又は、保存する際等に使用される。保持治具に保持される被粘着物は、薄板状物等の破損又は損傷しやすいもの等であるのが有利である。薄板状物としては、例えば、シリコンウェハ、フレキシブルプリント基板、大画面表示装置用のガラス板等が挙げられる。なお、この発明において、被粘着物には半完成品及び完成品等も含まれる。   The holding jig according to the present invention will be described. The holding jig according to the present invention is used when an object to be adhered is adhesively held on the surface of an adhesive sheet to manufacture, convey and / or store the object to be adhered. It is advantageous that the adherend to be held by the holding jig is a material that is easily damaged or damaged, such as a thin plate-like object. Examples of the thin plate-like material include a silicon wafer, a flexible printed board, a glass plate for a large screen display device, and the like. In the present invention, the adherend includes semi-finished products and finished products.

この発明に係る保持治具は、粘着保持する薄板状物が粘着性シートすなわち保持治具とほぼ同寸又は大きな寸法を有している場合であっても、換言すると、薄板状物が粘着性シートの少なくとも粘着領域全面、特に粘着性シートの周縁部近傍までの領域を覆うほどの寸法を有していても、粘着保持された薄板状物を容易に取り外すことができるから、この発明において、被粘着物は、粘着性シートの粘着領域よりも大きな寸法を有しているのがよく、さらに粘着性シートすなわち保持治具とほぼ同寸であってもよく粘着性シートの寸法よりも大きな寸法を有していてもよい。このように、この発明によれば、従来取り外しにくかった、保持治具と同寸以上の薄板状物を好適に用いることができる。したがって、被粘着物は１つの保持治具で粘着保持されることもできるし、複数の保持治具で粘着保持されることもできる。   In the holding jig according to the present invention, even if the thin plate-like object to be adhesively held has the same or larger dimension as the adhesive sheet, that is, the holding jig, in other words, the thin plate-like object is adhesive. Even if it has a size that covers at least the entire adhesive area of the sheet, particularly the area up to the vicinity of the peripheral edge of the adhesive sheet, it is possible to easily remove the thin plate-like material that has been adhesively held. The adherend should have a larger dimension than the adhesive area of the adhesive sheet, and may be substantially the same size as the adhesive sheet, that is, the holding jig. You may have. Thus, according to the present invention, it is possible to suitably use a thin plate-like material having a size equal to or larger than that of the holding jig, which has been difficult to remove conventionally. Therefore, the adherend can be adhesively held by one holding jig, or can be adhesively held by a plurality of holding jigs.

この発明に係る保持治具は、粘着性シートと基体とを備え、粘着領域及び周縁粘着不能部上に薄板状物が載置されたときにこの薄板状物と空隙部に没入した粘着部とで形成される創成空間が開放空間になるように構成されている。   The holding jig according to the present invention includes an adhesive sheet and a base, and when the thin plate-like object is placed on the adhesive region and the peripheral-edge non-adhesive portion, the thin plate-like object and the adhesive portion immersed in the gap portion, and The creation space formed by is configured to be an open space.

粘着性シートは、粘着部を含む粘着領域と、この粘着領域を囲繞する周縁粘着不能部とを有している。   The pressure-sensitive adhesive sheet has a pressure-sensitive adhesive region including a pressure-sensitive adhesive portion, and a peripheral edge non-stickable portion surrounding the pressure-sensitive adhesive region.

粘着領域は、少なくとも表面が粘着性である粘着部（以下、内部粘着部と称することがある。）を含んでおり、内部粘着部は薄板状物の質量及び粘着部の粘着力等を考慮して後述する基体すなわち支持体及び空隙部に適合するように配置すなわち形成される。通常、内部粘着部は基体の空隙部と同一の配置態様となるように配置される。   The adhesive region includes an adhesive part (hereinafter, sometimes referred to as an internal adhesive part) whose surface is adhesive at least, and the internal adhesive part takes into account the mass of the thin plate, the adhesive strength of the adhesive part, and the like. Then, they are arranged or formed so as to be compatible with a base body, that is, a support body and a void portion described later. Usually, the internal adhesive portion is arranged so as to have the same arrangement manner as the void portion of the base.

この発明おいて、粘着領域は、内部粘着部に加えて、少なくとも表面が実質的に非粘着性である内部粘着不能部を好ましくは含んでいる。このとき、内部粘着部及び内部粘着不能部は薄板状物の質量及び粘着部の粘着力等を考慮して基体すなわち支持体及び空隙部に適合するように配置すなわち形成される。すなわち、この粘着領域における内部粘着部及び内部粘着不能部は基体の空隙部及び支持体と同一の配置態様となるように配置される。   In this invention, the adhesive region preferably includes an internal non-adhesive portion having at least a substantially non-adhesive surface in addition to the internal adhesive portion. At this time, the internal adhesive part and the internal non-adhesive part are arranged or formed so as to fit the base body, that is, the support and the gap part in consideration of the mass of the thin plate-like material and the adhesive force of the adhesive part. That is, the internal adhesive portion and the internal non-adhesive portion in the adhesive region are arranged so as to have the same arrangement form as the void portion of the base and the support.

この発明において、粘着性シート、例えば粘着領域及び周縁粘着不能部上に配置された薄板状物と後述する基体の空隙部に没入した内部粘着部とで形成される創成空間が開放空間になるためには、粘着性シートは、粘着領域の輪郭線の少なくとも１つに内部粘着部が接しているすなわち一致しているのが好ましく、換言すると、粘着領域の輪郭線全体に内部粘着不能部が接していないのが好ましい。このように粘着性シートが形成されていると、粘着領域の輪郭線に接する内部粘着層が没入して創成空間の開口が粘着領域の輪郭線近傍に形成される。この発明において、薄板状物を早期にかつ容易に取り外すことができる点で、粘着領域の複数の輪郭線に内部粘着部が接しているのがより一層好ましく、粘着領域のすべての輪郭線に内部粘着部が接しているのが特に好ましい。   In the present invention, the creation space formed by the adhesive sheet, for example, the thin plate-like material disposed on the adhesive region and the peripheral non-adhesive portion and the internal adhesive portion immersed in the void portion of the base described later becomes an open space. In the adhesive sheet, it is preferable that at least one of the contour lines of the adhesive region is in contact with the inner adhesive portion, that is, coincides with it. In other words, the inner adhesive impossible portion is in contact with the entire contour line of the adhesive region. Preferably not. When the adhesive sheet is formed in this way, the internal adhesive layer in contact with the contour line of the adhesive region is immersed and an opening of the creation space is formed in the vicinity of the contour line of the adhesive region. In the present invention, it is more preferable that the internal adhesive portion is in contact with the plurality of contour lines of the adhesive region, in that the thin plate-like object can be easily removed at an early stage, and all the contour lines of the adhesive region are internally connected. It is particularly preferable that the adhesive portion is in contact.

このような粘着性シートにおける粘着領域は、好ましくは、例えば、互いに離間して所定のパターンで配置された複数の内部粘着不能部と、隣接配置された内部粘着不能部の間に配置された内部粘着部とを含んでいる。このような内部粘着部及び内部粘着不能部の配置は、内部粘着部を海とし、海の中に独立に散在する複数の内部粘着不能部を島とする海島構造の配列パターンと称することができる。複数の内部粘着不能部が内部粘着部に配置される好ましいパターンとして、例えば、複数の内部粘着不能部が縦横に配列された格子状又は碁盤目状パターン、複数の内部粘着不能部が放射状又は同心円状に配列されたパターン、複数の内部粘着不能部が略並行に線状に配置された並行線状パターン等が挙げられる。   The pressure-sensitive adhesive region in such a pressure-sensitive adhesive sheet is preferably, for example, an interior disposed between a plurality of internal non-adhesive portions arranged in a predetermined pattern apart from each other and an internal non-adhesive portion arranged adjacent to each other. Includes an adhesive part. Such an arrangement of the internal adhesive portion and the internal non-adhesive portion can be referred to as an array pattern of a sea-island structure in which the internal adhesive portion is the sea and a plurality of internal non-adhesive portions scattered independently in the sea are islands. . As a preferred pattern in which a plurality of internal non-adhesive parts are arranged in the internal adhesive part, for example, a lattice-like or grid pattern in which a plurality of internal non-adhesive parts are arranged vertically and horizontally, a plurality of internal non-adhesive parts are radial or concentric And a parallel linear pattern in which a plurality of internal non-adhesive portions are linearly arranged substantially in parallel.

この粘着性シートにおいて、内部粘着部は、隣接配置された内部粘着不能部の間に配置されており、複数の内部粘着不能部を互いに独立に分離させる。内部粘着部は、粘着領域に複数が独立して配置されていてもよいが、通常、内部粘着不能部の間に一体的に配置される。隣接配置された内部粘着不能部の距離すなわち内部粘着部の幅は粘着保持する薄板状物の質量等に応じて適宜に設定される。この粘着性シートにおいて、内部粘着不能部の輪郭は基体における支持体の頂面と略同一形状に形成されるのが好ましく、その輪郭形状は、例えば、正方形、長方形、五角形、六角形、十字形等の多角形、円形、リング状、楕円、不定形、又は、これらを組み合わせた形状等が挙げられる。   In this pressure-sensitive adhesive sheet, the internal adhesive portions are disposed between the adjacent internal adhesive impossible portions, and separate the plurality of internal adhesive impossible portions from each other independently. Although a plurality of internal adhesive portions may be independently arranged in the adhesive region, they are usually integrally arranged between the internal adhesive-incapable portions. The distance between the adjacent non-adhesive portions arranged adjacently, that is, the width of the internal adhesive portion is appropriately set according to the mass of the thin plate-like object to be adhesively held. In this pressure-sensitive adhesive sheet, it is preferable that the contour of the internal non-adhesive portion is formed in substantially the same shape as the top surface of the support in the base, and the contour shape is, for example, square, rectangular, pentagonal, hexagonal, cross-shaped And the like, a polygon, a circle, a ring, an ellipse, an indeterminate shape, or a combination of these.

この発明において、周縁粘着不能部は、後述する基体の囲繞部に適合するように、配置すなわち形成される。具体的には、周縁粘着不能部は、粘着領域に連続して、又は、粘着領域から離れて、粘着領域を囲繞するように配置される。この周縁粘着不能部の輪郭は基体における囲繞部の頂面と略同一形状に形成されるのが好ましい。   In the present invention, the peripheral edge non-adhesive portion is arranged, that is, formed so as to be compatible with a surrounding portion of the base to be described later. Specifically, the peripheral edge non-adhesive portion is arranged so as to surround the adhesive region continuously from the adhesive region or away from the adhesive region. The contour of the peripheral edge non-adhesive portion is preferably formed in substantially the same shape as the top surface of the surrounding portion in the base body.

周縁粘着不能部が粘着領域から離れて配置される場合には、粘着領域と周縁粘着不能部との間は少なくとも表面が粘着性である粘着部（以下、中間粘着部と称することがある。）であっても、少なくとも表面が実質的に非粘着性である中間粘着不能部であってもよい。周縁粘着不能部と粘着領域との間に配置される中間粘着部は、粘着領域の内部粘着部が前記したように粘着領域の輪郭線の少なくとも１つに接しているから、粘着領域の少なくとも１つの輪郭線で内部粘着部と接している。換言すると、中間粘着部は粘着領域の外側に配置された内部粘着部に接した状態に粘着領域を囲繞するように配置されている。   When the peripheral non-adhesive part is disposed away from the adhesive area, the adhesive part whose surface is adhesive at least between the adhesive area and the peripheral non-adhesive part (hereinafter sometimes referred to as an intermediate adhesive part). Even at least the surface may be an intermediate non-adhesive part that is substantially non-adhesive. The intermediate adhesive portion disposed between the peripheral edge non-adhesive portion and the adhesive region has at least one of the adhesive regions because the internal adhesive portion of the adhesive region is in contact with at least one of the contour lines of the adhesive region as described above. Two contour lines are in contact with the internal adhesive part. In other words, the intermediate adhesive portion is disposed so as to surround the adhesive region in contact with the internal adhesive portion disposed outside the adhesive region.

内部粘着部及び中間粘着部における粘着性は、被粘着物を粘着保持するのに十分な粘着力を有していればよく、粘着性シートに粘着保持される被粘着物の自重等に応じて適宜に決定されるが、例えば、１〜６０（ｇ／ｍｍ２）の粘着力であるのが好ましく、２〜４０（ｇ／ｍｍ２）の粘着力であるのがさらに好ましく、４〜２０（ｇ／ｍｍ２）の粘着力であるのが特に好ましい。粘着不能部は、内部粘着部及び中間粘着部よりも弱い粘着力を有していればよく、好ましくは被粘着物を粘着できない程度の粘着性を有し、又は、粘着性を実質的に有していない。例えば、粘着不能部は、好ましくは０（ｇ／ｍｍ２）を超え１（ｇ／ｍｍ２）未満の弱粘着力を有し、又は、０（ｇ／ｍｍ２）の非粘着力を有している。前記粘着力は次のようにして求める。まず、粘着性シートを水平に固定する吸着固定装置（例えば、商品名：電磁チャック、ＫＥＴ−１５３０Ｂ、カネテック（株）製）又は真空吸引チャックプレート等と、測定部先端に、直径１０ｍｍの円柱をなしたステンレス鋼（ＳＵＳ３０４）製の接触子を取り付けたデジタルフォースゲージ（商品名：ＺＰ−５０Ｎ、（株）イマダ製）とを備えた荷重測定装置を用意する。この試験台上に粘着性シートを固定し、測定環境を２１±１℃、湿度５０±５％に設定する。次いで、２０ｍｍ／ｍｉｎの速度で粘着性シート、内部粘着部、中間粘着部又は粘着保持不能部の被測定部位に接触するまで前記荷重測定装置に取り付けられた前記接触子を下降させ、次いで、この接触子を被測定部位に所定の荷重で被測定部位に対して垂直に３秒間押圧する。ここで、前記所定の荷重を２５ｇ／ｍｍ２に設定する。次いで、１８０ｍｍ／ｍｉｎの速度で前記接触子を被測定部位から引き離し、このときに前記デジタルフォースゲージにより測定される引き離し荷重を読み取る。この操作を、被測定部位の複数箇所で行い、得られる複数の引き離し荷重を算術平均し、得られる平均値を内部粘着部、中間粘着部又は粘着保持不能部の粘着力とする。なお、この測定方法は、手動で行ってもよいが、例えば、テストスタンド（例えば、商品名：ＶＥＲＴＩＣＡｌ ＭＯＤＥＬ ＭＯＴＯＲＩＺＥＤ ＳＴＡＮＤ シリーズ、（株）イマダ製）等の機器を用いて、自動で行ってもよい。 The adhesiveness in the internal adhesive part and the intermediate adhesive part only needs to have sufficient adhesive force to hold the object to be adhesively adhered, depending on the weight of the object to be adhesively held on the adhesive sheet, etc. For example, it is preferably 1 to 60 (g / mm 2 ), more preferably 2 to 40 (g / mm 2 ), and more preferably 4 to 20 (g / mm 2 ). It is particularly preferred that the adhesive strength be g / mm 2 ). The non-adhesive part only needs to have a weaker adhesive force than the internal adhesive part and the intermediate adhesive part, and preferably has such an adhesiveness that it cannot adhere the adherend, or substantially has adhesiveness. Not done. For example, the non-adhesive part preferably has a weak adhesive force of more than 0 (g / mm 2 ) and less than 1 (g / mm 2 ), or a non-adhesive force of 0 (g / mm 2 ). ing. The adhesive strength is determined as follows. First, a suction fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate for horizontally fixing the adhesive sheet, and a cylinder with a diameter of 10 mm at the tip of the measurement unit. A load measuring device provided with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) with a contact made of stainless steel (SUS304) made is prepared. An adhesive sheet is fixed on this test stand, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Subsequently, the contactor attached to the load measuring device is lowered until it comes into contact with the measurement site of the adhesive sheet, the internal adhesive part, the intermediate adhesive part, or the adhesive-unholdable part at a speed of 20 mm / min. The contactor is pressed against the measurement site for 3 seconds perpendicularly to the measurement site with a predetermined load. Here, the predetermined load is set to 25 g / mm 2 . Next, the contact is pulled away from the site to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, and a plurality of separation loads obtained are arithmetically averaged, and the obtained average value is defined as the adhesive strength of the internal adhesive portion, the intermediate adhesive portion, or the adhesive-holding portion. This measurement method may be performed manually, for example, using a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.) or the like. .

この発明に係る保持治具の基体は、その上に粘着性シートが載置されると共に、載置された粘着性シートの少なくとも内部粘着部、所望により中間粘着部が没入する空隙部を有している。基体における空隙部は、粘着性シートの少なくとも内部粘着部、粘着性シートが中間粘着部を有する場合には内部粘着部及び中間粘着部に適合するように形成されており、空隙部の形成パターンは少なくとも内部粘着部の配置パターン、粘着性シートが中間粘着部を有する場合には内部粘着部及び中間粘着部の配置パターンと同様である。   The substrate of the holding jig according to the present invention has an adhesive sheet placed thereon, and at least an internal adhesive portion of the placed adhesive sheet, and optionally a void portion into which the intermediate adhesive portion is immersed. ing. The void portion in the substrate is formed so as to be compatible with at least the internal adhesive portion of the adhesive sheet, and when the adhesive sheet has an intermediate adhesive portion, the internal adhesive portion and the intermediate adhesive portion are formed. The arrangement pattern of at least the internal pressure-sensitive adhesive portion is the same as the arrangement pattern of the internal pressure-sensitive adhesive portion and the intermediate pressure-sensitive adhesive portion when the adhesive sheet has an intermediate pressure-sensitive adhesive portion.

この発明において、基体は、空隙部に加えて、粘着性シートの周縁粘着不能部を載置して支持する囲繞部を有しているのが好ましい。この囲繞部は周縁粘着不能部に適合するように形成され、空隙部を囲繞している。このように基体が囲繞部を有していると、周縁粘着不能部を支持して粘着性シートを強固に基体に接着又は密着した状態に載置でき、薄板状物の粘着保持及び脱離をより一層安定して実施できる。さらに、前記したように通常薄板状物を取り外しにくくなりやすい囲繞部を基体に設けても創成空間が開放空間となるこの発明によれば薄板状物を容易に取り外すことができる。この囲繞部は通常空隙部を囲繞する枠状の壁状体とされ、その頂面は粘着性シートを載置できるように平面であるのが好ましい。   In this invention, it is preferable that the base body has an surrounding portion for mounting and supporting the peripheral edge non-adhesive portion of the adhesive sheet in addition to the gap portion. The surrounding portion is formed so as to fit the peripheral edge non-adhesive portion, and surrounds the gap portion. As described above, when the base has the surrounding portion, it is possible to place the pressure-sensitive adhesive sheet firmly on the base while supporting the peripheral non-stickable portion, and to hold and release the thin plate-like material. It can be implemented more stably. Furthermore, as described above, according to the present invention in which the creation space becomes an open space even if the surrounding portion which is usually difficult to remove the thin plate is provided on the base body, the thin plate can be easily removed. The surrounding portion is usually a frame-like wall-like body that surrounds the gap portion, and the top surface is preferably flat so that the adhesive sheet can be placed thereon.

この発明において、基体は、囲繞部で囲繞される領域内であって空隙部の間に粘着性シートの内部粘着不能部を支持する支持体を有しているのが好ましい。すなわち、好ましい基体は、粘着性シートの内部粘着不能部を支持する支持体と、支持体から間隔をあけて支持体を囲繞すると共に粘着性シートの周縁粘着不能部を支持する囲繞部と、支持体同士の間及び支持体と囲繞部との間に形成された空隙部とを有している。この支持体は内部粘着不能部への損傷を小さくできる点で平坦な頂面を有しているのが好ましく、その形状は特に限定されない。   In this invention, it is preferable that the base body has a support body that supports the internal non-adhesive portion of the adhesive sheet in the region surrounded by the surrounding portion and between the gap portions. That is, a preferable substrate includes a support that supports the internal non-adhesive part of the adhesive sheet, an enclosure that surrounds the support at a distance from the support and supports the peripheral non-adhesive part of the adhesive sheet, and a support. It has the space | gap part formed between the bodies and between the support body and the surrounding part. This support preferably has a flat top surface in that damage to the internal non-adhesive portion can be reduced, and the shape is not particularly limited.

この発明において、粘着領域及び周縁粘着不能部上に配置された薄板状物と基体の空隙部に没入した内部粘着部とで形成される創成空間が開放空間になるように、例えば、基体は支持体の少なくとも１つが囲繞部の高さよりも高く形成されている。このように基体が形成されていると創成空間の開口が高く形成された支持体に隣接する空隙部近傍に形成される。この発明において、薄板状物を早期にかつ容易に取り外すことができる点で、囲繞部の高さよりも高く形成されている支持体は、複数の内部粘着不能部のうち周縁粘着不能部側に配置された内部粘着不能部を支持する支持体を含んでいるのが好ましく、換言すると複数の支持体のうち囲繞部に最も近接して配置された支持体を含んでいるのが好ましく、内部粘着不能部を支持するすべての支持体であるのが特に好ましい。   In this invention, for example, the substrate is supported so that the creation space formed by the thin plate-like object disposed on the adhesive region and the peripheral non-adhesive portion and the internal adhesive portion immersed in the gap of the substrate becomes an open space. At least one of the bodies is formed higher than the height of the surrounding portion. When the base is formed in this way, it is formed in the vicinity of the gap adjacent to the support in which the opening of the creation space is formed high. In the present invention, the support formed higher than the height of the surrounding portion is arranged on the peripheral non-adhesive portion side among the plurality of internal non-adhesive portions in that the thin plate-like object can be removed quickly and easily. It is preferable to include a support that supports the internal non-adhesive portion, and in other words, it is preferable to include a support that is disposed closest to the surrounding portion among the plurality of support, Particular preference is given to all supports that support the part.

囲繞部の高さよりも高く形成された支持体を有する基体において、囲繞部の高さよりも高く形成されている支持体の高さは、特に限定されず、粘着性シートが囲繞部と支持体との高さの差を吸収して薄板状物の平坦に粘着保持できると共に創成空間に十分な大きさの開口が形成できる高さであればよく、粘着性シートの弾性力及び厚さ、薄板状物の厚さ及び粘着性シートへの押付圧等を考慮して、適宜に決定される。例えば、囲繞部の高さよりも高く形成されている支持体の高さは、囲繞部の高さとの差が２ｍｍ以下であるのが好ましく、０．０５〜１ｍｍであるのがより一層好ましく、０．１〜０．５ｍｍであるのが特に好ましい。   In the substrate having the support formed higher than the height of the surrounding portion, the height of the support formed higher than the height of the surrounding portion is not particularly limited, and the adhesive sheet is formed of the surrounding portion and the support. The height of the adhesive sheet is sufficient as long as it absorbs the difference in height and can hold the flat plate-like object flatly and can form a sufficiently large opening in the creation space. It is determined appropriately in consideration of the thickness of the object and the pressing pressure on the adhesive sheet. For example, the height of the support formed higher than the height of the surrounding portion is preferably 2 mm or less, more preferably 0.05 to 1 mm, more preferably 0 to 0 mm. It is particularly preferable that the thickness is 1 to 0.5 mm.

特に、支持体が囲繞部の高さに対してより一層好ましくは０．０５〜１ｍｍ、特に好ましくは０．１〜０．５ｍｍ高く形成されていると、保持治具とほぼ同寸の薄板状物を用いたときに、薄板状物を粘着性シートに押圧すると例えば図３（ａ）に示されるように粘着性シート特に内部粘着不能部の変形によって前記高さの差を吸収して粘着性シートの全面で薄板状物を粘着保持できるうえ、例えば粘着部を没入させる等して押圧力が解放されると図３（ｂ）に示されるように粘着性シート特に内部粘着不能部の変形が復元して周縁粘着不能部と内部粘着不能部との厚さがほぼ一定になり、その結果、前記高さの差に起因して周縁粘着不能部が薄板状物から離間して創成空間が開放空間になると共に内部粘着不能部で薄板状物を保持するから、保持治具とほぼ同寸の薄板状物を用いた場合であってもこの薄板状物を容易に取り外すことができる。   In particular, when the support is formed more preferably 0.05 to 1 mm, particularly preferably 0.1 to 0.5 mm higher than the height of the surrounding portion, it is a thin plate having the same size as the holding jig. When an object is used, when the thin plate is pressed against the adhesive sheet, for example, as shown in FIG. When the pressing force is released by, for example, immersing the adhesive part, the adhesive sheet, particularly the internal adhesive impossible part, is deformed as shown in FIG. 3B. The thickness of the peripheral non-adhesive part and the internal non-adhesive part becomes almost constant by restoration, and as a result, the peripheral non-adhesive part is separated from the thin plate-like material due to the difference in height, and the creation space is opened. Because it becomes a space and holds the thin plate-like object in the internal non-adhesive part, Even when using approximately the same dimensions of the thin plate material and lifting jig can be removed this lamellar material easily.

このように、この発明に係る保持治具は、前記粘着性シートと前記基体とを備えており、この基体を平面視すると囲繞部、支持体及び空隙部の配置が粘着シートの周辺粘着不能部、内部粘着不能部、並びに、内部粘着部、粘着性シートが中間粘着部を有する場合には内部粘着部及び中間粘着部の配置と一致している。そして、この発明に係る保持治具は、粘着性シートの粘着領域及び周縁粘着不能部上に配置された薄板状物と空隙部に没入した粘着部とで形成される創成空間が開放空間になる。したがって、この発明に係る保持治具は粘着保持した薄板状物を容易に脱離させる。なお、この発明において、粘着性シートの粘着領域及び周縁粘着不能部上に配置された薄板状物は、粘着性シートの内部粘着部、所望により中間粘着部が空隙部に没入したときに、少なくともその一部が粘着性シートの周縁粘着不能部上に間隙を空けて位置しており、好ましくはその端縁全体が周縁粘着不能部上に間隙を空けて位置している。このように粘着性シートの一部が周縁粘着不能部上に間隙を空けて位置するには、粘着性シートの厚さ及び弾性力、基体の囲繞部と支持体との高さ比、薄板状物の厚さ及び可撓性等が考慮され、特に、前記高さの差を前記範囲に設定するのがよい。   As described above, the holding jig according to the present invention includes the pressure-sensitive adhesive sheet and the base, and when the base is viewed in plan, the arrangement of the surrounding portion, the support, and the gap portion is the portion around the pressure-sensitive adhesive sheet that cannot be adhered. When the internal pressure-sensitive adhesive portion, the internal pressure-sensitive adhesive portion, and the adhesive sheet have an intermediate pressure-sensitive adhesive portion, they coincide with the arrangement of the internal pressure-sensitive adhesive portion and the intermediate pressure-sensitive adhesive portion. In the holding jig according to the present invention, the creation space formed by the thin plate-like object disposed on the adhesive region and the peripheral edge non-adhesive portion of the adhesive sheet and the adhesive portion immersed in the gap portion becomes an open space. . Therefore, the holding jig according to the present invention easily detaches the thin plate-like object held by adhesion. In the present invention, the thin plate-like material disposed on the adhesive region and the peripheral non-adhesive part of the adhesive sheet is at least when the internal adhesive part of the adhesive sheet, if desired, the intermediate adhesive part is immersed in the gap part. A part of the adhesive sheet is positioned with a gap on the peripheral edge non-adhesive part of the adhesive sheet, and preferably the entire edge thereof is positioned with a gap on the peripheral non-adhesive part. Thus, in order for a part of the adhesive sheet to be positioned with a gap on the peripheral non-adhesive part, the thickness and elastic force of the adhesive sheet, the height ratio of the surrounding part of the substrate and the support, the thin plate shape The thickness and flexibility of the object are taken into consideration, and in particular, the difference in height is preferably set in the range.

この発明に係る保持治具の一例である保持治具１を、図１〜図３を参照して、説明する。保持治具１は、図３に示されるように、粘着性シート５と基体６とを備えている。   A holding jig 1 as an example of the holding jig according to the present invention will be described with reference to FIGS. As shown in FIG. 3, the holding jig 1 includes an adhesive sheet 5 and a base 6.

粘着性シート５は、図１に示されるように、正方形のシート状に形成され、内部粘着部１４及び内部粘着不能部１５を含む粘着領域１１と、粘着領域１１を囲繞する周縁粘着不能部１２と、粘着領域１１及び周縁粘着不能部１２の間に形成された中間粘着部１３とを有している。なお、理解を容易にするために、粘着性シート５における粘着領域１１、周縁粘着不能部１２、中間粘着部１３、内部粘着部１４及び内部粘着不能部１５の境界を図１において破線で示した。   As shown in FIG. 1, the adhesive sheet 5 is formed in a square sheet shape, and includes an adhesive region 11 including an internal adhesive portion 14 and an internal non-adhesive portion 15, and a peripheral non-adhesive portion 12 surrounding the adhesive region 11. And an intermediate adhesive portion 13 formed between the adhesive region 11 and the peripheral edge non-adhesive portion 12. In addition, in order to make an understanding easy, the boundary of the adhesion area | region 11, the periphery adhesion impossible part 12, the intermediate | middle adhesion part 13, the internal adhesion part 14, and the internal adhesion impossible part 15 in the adhesive sheet 5 was shown with the broken line in FIG. .

この粘着性シート５の粘着領域１１は、図１に示されるように、互いに離間して縦横方向に格子状又は碁盤目状に配置された４つの正方形の内部粘着不能部１５と、縦横方向に隣接配置された内部粘着不能部１５の間に十字形状に配置された１つの内部粘着部１４とを含んで、形成されている。したがって、粘着領域１１の４つ輪郭線すべてに内部粘着部１４が接している。換言すると、内部粘着部１４の輪郭線が粘着領域１１の輪郭線と一致しており、さらにいうと、粘着領域１１は、その四隅に内部粘着不能部１５が配置されると共に、粘着領域１１の縦横両方向の略中央に十字形状の内部粘着部１５が配置されて、略正方形の領域を形成している。このように、４つの内部粘着不能部１５は内部粘着部１４でそれぞれ独立にすなわち互いに接することなく配置されている。   As shown in FIG. 1, the adhesive region 11 of the adhesive sheet 5 includes four square internal non-adhesive portions 15 that are spaced apart from each other and arranged in a grid or grid pattern in the vertical and horizontal directions, and in the vertical and horizontal directions. It is formed including one internal adhesive part 14 arranged in a cross shape between adjacent internal adhesive impossible parts 15. Therefore, the internal adhesive portion 14 is in contact with all four contour lines of the adhesive region 11. In other words, the contour line of the internal adhesive portion 14 coincides with the contour line of the adhesive region 11, and more specifically, the adhesive region 11 has the internal non-adhesive portions 15 disposed at the four corners thereof, and the adhesive region 11 A cross-shaped internal adhesive portion 15 is disposed at substantially the center in both the vertical and horizontal directions to form a substantially square region. As described above, the four internal non-adhesive portions 15 are arranged independently by the internal adhesive portions 14, that is, without being in contact with each other.

中間粘着部１３は、粘着領域１１を一巡する枠状をなしており、粘着領域１１に連続して粘着領域１１を囲繞している。また、周縁粘着不能部１２は、中間粘着部１３を一巡する枠状をなしており、中間粘着部１３を挟んで粘着領域１１から離れて粘着領域１１を囲繞している。   The intermediate adhesive portion 13 has a frame shape that goes around the adhesive region 11, and continuously surrounds the adhesive region 11 and surrounds the adhesive region 11. Further, the peripheral-adhesion impossible portion 12 has a frame shape that goes around the intermediate adhesive portion 13, and surrounds the adhesive region 11 away from the adhesive region 11 with the intermediate adhesive portion 13 interposed therebetween.

この粘着性シート５における粘着領域１１、周縁粘着不能部１２及び中間粘着部１３は、後述する基体６と適合するように、配置されている。   The adhesive region 11, the peripheral edge non-adhesive portion 12, and the intermediate adhesive portion 13 in the adhesive sheet 5 are arranged so as to be compatible with the base 6 described later.

粘着性シート５において、内部粘着部１４及び中間粘着部１３は、前記測定方法における粘着力が１〜５０ｇ／ｍｍ２の範囲にあり、周縁粘着不能部１２及び内部粘着不能部１５は前記測定方法における粘着力が０ｇ／ｍｍ２になっている。 In the adhesive sheet 5, the internal adhesive portion 14 and the intermediate adhesive portion 13 have an adhesive strength in the measurement method in the range of 1 to 50 g / mm 2 , and the peripheral adhesive impossible portion 12 and the internal adhesive impossible portion 15 are the measurement method. The adhesive strength at is 0 g / mm 2 .

粘着性シート５は、適宜の厚さに調整されるが、例えば、０．１〜２ｍｍの厚さを有しているのが好ましい。粘着性シート５の厚さが、０．１ｍｍ未満であると機械的強度が低下して粘着性シート５の耐久性が劣ることがあり、また、後述する囲繞部と支持体との高さの差を効果的に吸収できないことがある。一方、粘着性シート５の厚さが、２ｍｍを越えると、粘着性シート５が弾性変形しにくくなり、被粘着物を容易に取り外せなくなることがある。この粘着性シート５は、その表面が平滑であるのが好ましく、具体的には、０．８μｍ以下の中心線平均粗さＲａ（ＪＩＳ Ｂ ０６０１−１９８２）を有しているのが好ましい。   The adhesive sheet 5 is adjusted to an appropriate thickness, but preferably has a thickness of 0.1 to 2 mm, for example. If the thickness of the pressure-sensitive adhesive sheet 5 is less than 0.1 mm, the mechanical strength may be lowered and the durability of the pressure-sensitive adhesive sheet 5 may be inferior. The difference may not be absorbed effectively. On the other hand, when the thickness of the pressure-sensitive adhesive sheet 5 exceeds 2 mm, the pressure-sensitive adhesive sheet 5 becomes difficult to elastically deform, and the object to be adhered may not be easily removed. The adhesive sheet 5 preferably has a smooth surface, and specifically has a center line average roughness Ra (JIS B 0601-1982) of 0.8 μm or less.

粘着性シート５は、粘着性材料、例えば、シリコーンゴム、フッ素系ゴム、ウレタン系エラストマー、天然ゴム、スチレン−ブタジエン共重合エラストマー等の各種エラストマーによって形成することができ、強度、耐候性に優れたシリコーンゴム、フッ素系ゴムが好ましい。これらの内でも、ゴム硬度（ＪＩＳ Ｋ６２５３［デュロメータＥ］）が５〜６０であるのがとくに好ましい。粘着性シート５のゴム硬度が前記範囲内にあると、後述する囲繞部と支持体との高さの差を効果的に吸収できて粘着性シート５の表面が平坦になることがあり、さらに、薄板状物を所望のように粘着保持できるにかかわらず粘着保持した薄板状物を容易に取り外すことができる。   The adhesive sheet 5 can be formed of an adhesive material, for example, various elastomers such as silicone rubber, fluorine rubber, urethane elastomer, natural rubber, and styrene-butadiene copolymer elastomer, and has excellent strength and weather resistance. Silicone rubber and fluorine rubber are preferred. Among these, the rubber hardness (JIS K6253 [durometer E]) is particularly preferably 5 to 60. If the rubber hardness of the pressure-sensitive adhesive sheet 5 is within the above range, the surface of the pressure-sensitive adhesive sheet 5 may be flattened by effectively absorbing the difference in height between the surrounding portion and the support, which will be described later. Although the thin plate-like material can be adhesively held as desired, the thin plate-like material that has been adhesively held can be easily removed.

粘着性シート５は、例えば、粘着性材料を用いて公知の方法によってシート状に形成される。粘着性シート５の表面に周縁粘着不能部１２及び内部粘着不能部１５を形成するには、例えば、粘着性材料をシート状に成形した後に、その表面に周縁粘着不能部１２及び内部粘着不能部１５に対応する穴部を有するマスキング用部材を載置して、マスキング用部材上から紫外線を照射すればよい。このようにして、紫外線を照射すると、その照射量によって所望の粘着力に調整された周縁粘着不能部１２及び内部粘着不能部１５が形成される。   The adhesive sheet 5 is formed into a sheet shape by a known method using, for example, an adhesive material. In order to form the peripheral non-adhesive part 12 and the internal non-adhesive part 15 on the surface of the adhesive sheet 5, for example, after the adhesive material is formed into a sheet shape, the peripheral non-adhesive part 12 and the internal non-adhesive part are formed on the surface. A masking member having a hole corresponding to 15 may be placed, and ultraviolet rays may be irradiated from above the masking member. In this way, when the ultraviolet ray is irradiated, the peripheral non-adhesive portion 12 and the internal non-adhesive portion 15 which are adjusted to a desired adhesive force depending on the irradiation amount are formed.

また、紫外線照射方法以外に、（１）周縁粘着不能部１２及び内部粘着不能部１５を形成する部分に粘着性の弱い粘着材（例えば、シリコーン樹脂、フッ素樹脂、ウレタン樹脂等）又は粘着性のない非粘着材をコーティングする方法、（２）周縁粘着不能部１２及び内部粘着不能部１５の表面粗さを大きくする方法、（３）粘着性シート５の代わりに全体を弱粘着性シート又は非粘着性シートとし、その表面に粘着材をコーティングして、中間粘着部１３及び内部粘着部１４を形成する方法等が挙げられる。   In addition to the ultraviolet irradiation method, (1) a weak adhesive material (for example, a silicone resin, a fluororesin, a urethane resin, etc.) or an adhesive A method of coating a non-adhesive material, (2) a method of increasing the surface roughness of the peripheral non-adhesive portion 12 and the internal non-adhesive portion 15, and (3) a weak adhesive sheet or non Examples thereof include a method for forming an intermediate adhesive portion 13 and an internal adhesive portion 14 by forming an adhesive sheet and coating an adhesive material on the surface thereof.

基体６は、粘着性シート５の内部粘着部１４が没入する空隙部２３を有すると共に、前記したように囲繞部２２の高さよりも高く形成された支持体２１を有する基体である。この基体６は、図２に示されるように、一方が開口した開口凹部を有する、正方形の底面を持つ扁平な長方体に形成され、その寸法は薄板状物の寸法と同じ、又は小さくなっている。基体６は、図３に示されるように粘着性シート５が載置されたときに、粘着性シート５の内部粘着不能部１５及び周縁粘着不能部１２に対応するように、支持体２１及び囲繞部２２を有している。   The base body 6 is a base body having a gap portion 23 into which the internal pressure-sensitive adhesive portion 14 of the pressure-sensitive adhesive sheet 5 is immersed and a support body 21 formed higher than the height of the surrounding portion 22 as described above. As shown in FIG. 2, the base 6 is formed in a flat rectangular body having a square bottom surface and having an open concave portion on one side, and the size thereof is the same as or smaller than that of the thin plate-like object. ing. When the adhesive sheet 5 is placed as shown in FIG. 3, the base 6 has a support 21 and an enclosure so as to correspond to the internal non-adhesive portion 15 and the peripheral adhesive non-adhesive portion 12 of the adhesive sheet 5. A portion 22 is provided.

具体的には、基体６は、図２及び図３に示されるように、内部粘着不能部１５を支持する支持体２１と、支持体２１を囲繞すると共に周縁粘着不能部１２を支持する囲繞部２２と、内部粘着部１４及び中間粘着部１３が没入する空隙部２３と、空隙部２３に連通する通気孔２４とを有している。換言すると、基体６は、底面の各端縁から略垂直に突出する枠状の囲繞部２２と、囲繞部２２で囲繞された空間すなわち前記開口凹部に、前記底面から略垂直に互いに縦横方向に離間して突出する筒状体の支持体２１とで形成され、囲繞部２２及び支持体２１の間隙に空隙部２３が画成され、空隙部２３に開口する通気孔２４が基体６の底部に形成されている。   Specifically, as shown in FIGS. 2 and 3, the base 6 includes a support 21 that supports the internal non-adhesive portion 15, and an enclosure that surrounds the support 21 and supports the peripheral non-adhesive portion 12. 22, a void portion 23 into which the internal adhesive portion 14 and the intermediate adhesive portion 13 are immersed, and a vent hole 24 communicating with the void portion 23. In other words, the base 6 has a frame-shaped surrounding portion 22 projecting substantially vertically from each edge of the bottom surface, and the space surrounded by the surrounding portion 22, that is, the opening recess, in the vertical and horizontal directions substantially perpendicular to the bottom surface. It is formed with a cylindrical support body 21 protruding in a spaced manner, a gap portion 23 is defined in the gap between the surrounding portion 22 and the support body 21, and a vent hole 24 opening to the gap portion 23 is formed at the bottom portion of the base body 6. Is formed.

支持体２１は、略正方形の平坦な頂面を有し、囲繞部２２は枠状の平坦な頂面を有している。そして、基体６において、支持体２１及び囲繞部２２は粘着性シート５の内部粘着不能部１５及び周縁粘着不能部１２に対応するように、その寸法、形状及び形成位置が調整されている。したがって、基体６は、その上に粘着性シート５が載置されたときに、支持体２１及び囲繞部２２の頂面が粘着性シート５の内部粘着不能部１５及び周縁粘着不能部１２をそれぞれ支持する。保持治具１において、粘着性シート５は、その裏面が支持体２１及び囲繞部２２の頂面に接着固定又は密着固定されている。   The support 21 has a substantially square flat top surface, and the surrounding portion 22 has a frame-shaped flat top surface. And in the base | substrate 6, the dimension, a shape, and a formation position are adjusted so that the support body 21 and the surrounding part 22 may respond | correspond to the internal adhesion impossible part 15 and the periphery adhesion impossible part 12 of the adhesive sheet 5. FIG. Accordingly, when the adhesive sheet 5 is placed thereon, the top surface of the support 21 and the surrounding portion 22 causes the inner non-adhesive portion 15 and the peripheral non-adhesive portion 12 of the adhesive sheet 5 respectively. To support. In the holding jig 1, the back surface of the adhesive sheet 5 is adhesively fixed or closely fixed to the top surfaces of the support 21 and the surrounding portion 22.

囲繞部２２は、その内側寸法が粘着保持する薄板状物の寸法よりも小さく、かつ、粘着性シート５と共に前記開口凹部すなわち空隙部２３を気密に閉塞できるように形成されている。保持治具１において囲繞部２２は薄板状物の寸法よりも小さな内側寸法と一定の高さとを有する枠体として形成されている。   The surrounding portion 22 is formed so that the inner dimension thereof is smaller than the dimension of the thin plate-like object to be adhesively held, and the opening concave portion, that is, the gap portion 23 can be hermetically closed together with the adhesive sheet 5. In the holding jig 1, the surrounding portion 22 is formed as a frame having an inner dimension smaller than the dimension of the thin plate and a certain height.

支持体２１は、図３に示されるように、そのすべてが囲繞部２２に最も近接して配置されており、これら支持体２１、すなわち、すべての支持体２１が囲繞部２２の高さよりも高い同一の高さになっている。このときの支持体２１の高さは前記範囲内にある。この支持体２１は、突出方向に垂直な断面が正方形である扁平な直方体に形成されている。支持体２１の断面の寸法は粘着性シート５の粘着力等を考慮して薄板状物を粘着保持できる範囲で適宜に設定される。   As shown in FIG. 3, all of the supports 21 are arranged closest to the surrounding portion 22, and these supports 21, that is, all the supports 21 are higher than the height of the surrounding portion 22. It is the same height. The height of the support 21 at this time is within the above range. The support 21 is formed in a flat rectangular parallelepiped having a square cross section perpendicular to the protruding direction. The dimension of the cross section of the support 21 is appropriately set within a range in which the thin plate-like object can be held in an adhesive state in consideration of the adhesive strength of the adhesive sheet 5 and the like.

空隙部２３は前記開口凹部のうち支持体２１を除く空間である。通気孔２４は、その一方が空隙部２３に開口し、他方が囲繞部２２の側壁に開口し、外部に設置された吸引装置例えば真空ポンプ等（図示しない。）に接続される。通気孔２４の孔径、配置位置、開口部形状等は適宜に設定されればよい。通気孔２４は、図３（ｂ）及び図３（ｃ）に示されるように、前記吸引装置によって空隙部２３内に存在する気体を吸引して空隙部２３を減圧状態又は真空状態にし、空隙部２３の上部に位置する粘着性シート５の内部粘着部１４及び中間粘着部１３を弾性変形させて空隙部２３内に没入させる。   The gap 23 is a space excluding the support 21 in the opening recess. One of the vent holes 24 opens in the gap 23 and the other opens in the side wall of the surrounding portion 22, and is connected to a suction device such as a vacuum pump (not shown) installed outside. What is necessary is just to set the hole diameter of the ventilation hole 24, an arrangement position, an opening shape, etc. suitably. As shown in FIG. 3B and FIG. 3C, the air hole 24 sucks the gas present in the gap 23 by the suction device to make the gap 23 in a reduced pressure state or a vacuum state. The internal adhesive part 14 and the intermediate adhesive part 13 of the adhesive sheet 5 located on the upper part of the part 23 are elastically deformed and immersed in the gap part 23.

基体６は、減圧下又は真空下においても変形等しない程度の強度を有する材料で形成されており、このような材料として、炭素鋼、ステンレス鋼、アルミニウム合金、ニッケル合金等の金属、多孔質セラミック等の多孔性物質、樹脂、ガラス又はこれらの複合体等が挙げられる。基体６は、加工性、操作性の観点から、ステンレス鋼又はアルミニウム合金で形成されている。基体６は、これらの材料で、例えば、真空成形、射出成形、金型成形、切削加工、放電加工等により形成される。基体６の厚さ（支持体２１及び囲繞部２２を除く。）は、用途により適宜決定すればよく、例えば、５０μｍ以上数ｃｍ以下に設定される。   The substrate 6 is made of a material having a strength that does not deform even under reduced pressure or vacuum, and examples of such a material include metals such as carbon steel, stainless steel, aluminum alloy, nickel alloy, and porous ceramics. And a porous material such as resin, glass, or a composite thereof. The base 6 is made of stainless steel or aluminum alloy from the viewpoint of workability and operability. The base 6 is formed of these materials by, for example, vacuum forming, injection molding, mold forming, cutting, electric discharge machining, or the like. The thickness of the substrate 6 (excluding the support 21 and the surrounding portion 22) may be determined as appropriate depending on the application, and is set to, for example, 50 μm or more and several cm or less.

保持治具１は、基体６と粘着性シート５とを備え、基体６の囲繞部２２及び支持体２１の上に粘着性シート５が支持され、接着固定又は密着固定される。この保持治具１は、基体６に載置された粘着性シート５の表面、特に粘着領域１１及び中間粘着部１３で薄板状物を粘着保持すると共に、空隙部２３内の気体を排気して空隙部２３上に位置する中間粘着部１３及び内部粘着部１４を空隙部２３に没入させて薄板状物９から引き離すことで薄板状物９を取り外せるようになっている。   The holding jig 1 includes a base 6 and an adhesive sheet 5, and the adhesive sheet 5 is supported on the surrounding portion 22 and the support 21 of the base 6, and is adhesively fixed or closely fixed. The holding jig 1 adheres and holds a thin plate with the surface of the adhesive sheet 5 placed on the base 6, particularly the adhesive region 11 and the intermediate adhesive portion 13, and exhausts the gas in the gap portion 23. The thin plate-like object 9 can be removed by immersing the intermediate adhesive portion 13 and the internal adhesive portion 14 positioned on the gap portion 23 into the gap portion 23 and pulling them away from the thin plate-like object 9.

保持治具１の作用について説明する。保持治具１の初期状態として、図３（ａ）に示されるように、基体６の上に粘着性シート５が接着又は固定され、空隙部２３が閉塞されている。この粘着性シート５の表面に薄板状物９が置かれる。この薄板状物９は、粘着性シート５の粘着領域１１よりも大きな寸法を有する略正方形の枚葉体であり、図３（ａ）に示されるように、その端部近傍が囲繞部２２上に配置された周縁粘着不能部１２にまで及んでいる。そうすると、粘着領域１１は薄板状物９の底面９ａに接するから、薄板状物９は粘着性シート５に、具体的には粘着領域１１に接し、場合によっては中間粘着部１３に接し、周縁粘着不能部１２に接し又は非接触となって、粘着保持される。このとき、薄板状物９をより強固に粘着保持させるために粘着性シートに圧接すなわち押圧すると、図３（ａ）に示されるように、粘着性シートの内部粘着不能部１５が変形すなわち圧縮して薄板状物９の底面９ａの全面が粘着性シートに接して粘着保持される。   The operation of the holding jig 1 will be described. As an initial state of the holding jig 1, as shown in FIG. 3A, the adhesive sheet 5 is bonded or fixed on the base 6 and the gap 23 is closed. A thin plate 9 is placed on the surface of the adhesive sheet 5. The thin plate-like object 9 is a substantially square sheet having a size larger than that of the adhesive region 11 of the adhesive sheet 5, and as shown in FIG. Extends to the peripheral edge non-adhesive portion 12 disposed in the area. Then, since the adhesive region 11 is in contact with the bottom surface 9a of the thin plate-like object 9, the thin plate-like material 9 is in contact with the adhesive sheet 5, specifically, the adhesive region 11, and in some cases, is in contact with the intermediate adhesive portion 13, and the peripheral adhesive It is brought into contact or non-contact with the impossible portion 12 and is adhered and held. At this time, when the thin plate-like object 9 is pressed against or pressed against the pressure-sensitive adhesive sheet in order to hold it firmly, the internal non-adhesive portion 15 of the pressure-sensitive adhesive sheet is deformed or compressed as shown in FIG. Thus, the entire bottom surface 9a of the thin plate-like material 9 is in contact with the pressure-sensitive adhesive sheet and is held in an adhesive state.

このようにして粘着性シート５に粘着保持された薄板状物９は、図３（ａ）に示されるように、空隙部２３の全体を覆うように配置されており、別言すると、空隙部２３はその全体が粘着性シート５を挟んで薄板状物９で覆われている。このようにして薄板状物９は保持治具１に粘着保持される。なお、薄板状物９を粘着性シート５に粘着保持させるには薄板状物９を粘着性シート５の表面に載置するだけでもよく、より強固に薄板状物９を粘着性シート５に粘着保持させるには粘着性シート５の表面に載置した薄板状物９を粘着性シート５に押圧することもできる。   In this way, the thin plate-like object 9 held and adhered to the adhesive sheet 5 is disposed so as to cover the entire gap 23 as shown in FIG. 3A, in other words, the gap 23 is entirely covered with a thin plate 9 with the adhesive sheet 5 in between. In this way, the thin plate-like object 9 is adhesively held by the holding jig 1. In order to stick the thin plate-like material 9 to the adhesive sheet 5, the thin plate-like material 9 may be simply placed on the surface of the adhesive sheet 5, and the thin plate-like material 9 is more firmly adhered to the adhesive sheet 5. In order to hold, the thin plate-like object 9 placed on the surface of the adhesive sheet 5 can be pressed against the adhesive sheet 5.

薄板状物９を粘着性シート５上に載置するには通常粘着性シート５の表面に略平行に配置した薄板状物９を粘着性シート５に近接させるから、薄板状物９を粘着性シート５に載置する直前まで両者の間に空気が存在する。ところが、保持治具１は、前記のように支持体２１が囲繞部２２よりも高く形成されているから、薄板状物９の近接によって両者の間に存在する空気が高さの低い囲繞部２３近傍から排出される。したがって、薄板状物９を粘着性シート５上に載置する際に薄板状物９が空気によって横滑りしにくくなり、薄板状物９を粘着性シート５の所定の位置に載置して粘着保持できる。したがって、保持治具１によれば薄板状物９を所定の位置に正確に粘着保持できるという目的を達成できる。   In order to place the thin plate-like material 9 on the adhesive sheet 5, the thin plate-like material 9 is usually placed in parallel with the surface of the adhesive sheet 5 so as to be close to the adhesive sheet 5. Air exists between the two until just before placing on the sheet 5. However, in the holding jig 1, since the support 21 is formed higher than the surrounding portion 22 as described above, the surrounding portion 23 in which the air present between the two due to the proximity of the thin plate-like object 9 is low. It is discharged from the vicinity. Therefore, when the thin plate-like object 9 is placed on the adhesive sheet 5, the thin plate-like object 9 is less likely to skid due to air, and the thin plate-like object 9 is placed at a predetermined position on the adhesive sheet 5 to hold the adhesive. it can. Therefore, according to the holding jig 1, it is possible to achieve the object of accurately sticking and holding the thin plate-like object 9 at a predetermined position.

粘着保持された薄板状物９を保持治具１から取り外す場合には、保持治具１の外部に設置された吸引装置等（図示しない。）を通気孔２４に接続し、空隙部２３内の気体を吸引する。そうすると、空隙部２３内は減圧又は真空になり、図３（ｂ）及び図３（ｃ）に示されるように、弾性を有する粘着性シート５が弾性変形して空隙部２３内に没入又は陥没する。この吸引状態において、粘着性シート５の中間粘着部１３及び内部粘着部１４は薄板状物９の底面９ａから引き離されているから薄板状物９の底面９ａは内部粘着不能部１５に接しており、また、内部粘着不能部１５の変形が復元して周縁粘着不能部と内部粘着不能部との厚さがほぼ一定となるから薄板状物９の底面９ａの少なくとも一部は周縁粘着不能部１２に非接触となる。この吸引状態において、それまで薄板状物９の底面９ａに接していた中間粘着部１３及び内部粘着部１４が空隙部２３に没入すると、図３（ｂ）及び図３（ｃ）に示されるように、粘着領域１１及び周縁粘着不能部１２上に配置されている薄板状物９の底面９ａと空隙部２３に没入した中間粘着部１３及び内部粘着部１４とで薄板状物９の底面９ａと中間粘着部１３及び内部粘着部１４との間に新たな創成空間２５が形成される。この創成空間２５は中間粘着部１３及び内部粘着部１４が薄板状物９の底面９ａから引き離されて形成されるので離脱空間と称することもできる。この創成空間２５は中間粘着部１３及び内部粘着部１４が強制的に空隙部２３に没入されることで形成されるので、薄板状物９が前記のように粘着性シート５に粘着保持されている場合には、通常、空隙部２３の圧力ほどではないが保持治具１の周辺圧力よりも圧力が小さく低圧になって創成空間２５が薄板状物９を吸引保持する。ここで、保持治具１においては、前記したように支持体２１が囲繞部２２よりも高く形成されているから、図３（ｂ）及び図３（ｃ）に示されるように、粘着領域１１の輪郭線近傍に創成空間２５が開口し、また、中間粘着部１３が空隙部２３に没入して粘着領域１１を囲繞する環状の間隙が生じ、さらに、前記したように囲繞部２２上に位置する周縁粘着不能部１２の表面と薄板状物９の底面９ａとの間に僅かな間隙が生じる。そして、これらの、創成空間２５の開口、環状の間隙及び僅かな間隙は図３（ｂ）及び図３（ｃ）に示されるようにそれぞれ連通しており、保持治具１及び薄板状物９の外部に創成空間２５が連通すなわち開口する。   In order to remove the thin plate-like object 9 that is adhesively held from the holding jig 1, a suction device or the like (not shown) installed outside the holding jig 1 is connected to the vent hole 24, and Aspirate the gas. If it does so, the inside of the space | gap part 23 will be pressure-reduced or a vacuum, and as shown in FIG.3 (b) and FIG.3 (c), the adhesive sheet 5 which has elasticity will be elastically deformed, and it will immerse or sink into the space | gap part 23. To do. In this suction state, the intermediate adhesive portion 13 and the internal adhesive portion 14 of the adhesive sheet 5 are separated from the bottom surface 9 a of the thin plate 9, so the bottom surface 9 a of the thin plate 9 is in contact with the internal non-adhesive portion 15. In addition, since the deformation of the internal non-adhesive portion 15 is restored and the thickness of the peripheral non-adhesive portion and the internal non-adhesive portion becomes substantially constant, at least a part of the bottom surface 9a of the thin plate-like object 9 is the peripheral non-adhesive portion 12. No contact. In this suction state, when the intermediate adhesive portion 13 and the internal adhesive portion 14 that have been in contact with the bottom surface 9a of the thin plate-like object 9 are immersed in the gap portion 23, as shown in FIGS. 3 (b) and 3 (c). In addition, the bottom surface 9a of the thin plate-like object 9 is composed of the bottom surface 9a of the thin plate-like object 9 disposed on the adhesive region 11 and the peripheral edge non-adhesive portion 12, and the intermediate adhesive portion 13 and the internal adhesive portion 14 that are immersed in the gap 23. A new creation space 25 is formed between the intermediate adhesive portion 13 and the internal adhesive portion 14. The creation space 25 can be referred to as a separation space because the intermediate adhesive portion 13 and the internal adhesive portion 14 are formed by being separated from the bottom surface 9 a of the thin plate-like object 9. Since the creation space 25 is formed by forcibly immersing the intermediate adhesive portion 13 and the internal adhesive portion 14 in the gap portion 23, the thin plate-like object 9 is adhered and held on the adhesive sheet 5 as described above. If it is, the pressure is usually lower than the pressure around the holding jig 1 but lower than the pressure in the gap 23, and the creation space 25 sucks and holds the thin plate-like object 9. Here, in the holding jig 1, since the support body 21 is formed higher than the surrounding portion 22 as described above, as shown in FIG. 3B and FIG. The creation space 25 is opened in the vicinity of the contour line, and the intermediate adhesive portion 13 is immersed in the gap portion 23 to form an annular gap surrounding the adhesive region 11, and is positioned on the surrounding portion 22 as described above. A slight gap is generated between the surface of the peripheral non-adhesive portion 12 and the bottom surface 9 a of the thin plate-like object 9. The opening of the creation space 25, the annular gap, and the slight gap are communicated as shown in FIGS. 3B and 3C, respectively, and the holding jig 1 and the thin plate-like object 9 are connected. The creation space 25 communicates, that is, opens to the outside.

このように、保持治具１において空隙部２３の気体を排気すると、新たに一体的に形成される創成空間２５が開放空間になっており、創成空間２５内の圧力が保持治具１の周辺圧力とほぼ同等となる。したがって、粘着保持されている薄板状物９は、創成空間２５によって薄板状物９が吸引保持されず、内部粘着不能部１５に接しているに過ぎないから、わずかな力で、又は、保持治具１を傾けるだけで、薄板状物９を保持治具１すなわち粘着性シート５から容易に取り外すことができる。   Thus, when the gas in the gap portion 23 is exhausted in the holding jig 1, the newly created creation space 25 is an open space, and the pressure in the creation space 25 is increased around the holding jig 1. It is almost equivalent to pressure. Therefore, the thin plate-like object 9 that is adhesively held is not sucked and held by the creation space 25 and is merely in contact with the internal non-adhesive portion 15. The thin plate 9 can be easily detached from the holding jig 1, that is, the adhesive sheet 5 simply by tilting the tool 1.

このように前記初期状態及び前記吸引状態を繰り返すことによって薄板状物９の粘着保持及び取り外しが容易に行われる。したがって、保持治具１は、粘着保持する薄板状物９が粘着性シート５すなわち保持治具１とほぼ同寸又は大きな寸法を有していても、薄板状物９を十分な粘着保持力で粘着保持できるにもかかわらず、粘着保持された薄板状物９を容易に取り外すことができる。   In this way, by repeating the initial state and the suction state, the sticking and holding of the thin plate-like object 9 can be easily performed. Therefore, the holding jig 1 is capable of holding the thin plate 9 with sufficient adhesive holding force even if the thin plate-like object 9 to be adhesively held has the same or larger dimension as the adhesive sheet 5, that is, the holding jig 1. Despite being able to hold the adhesive, the thin plate-like object 9 that has been held to the adhesive can be easily removed.

すなわち、保持治具１に薄板状物９を粘着保持させるには、粘着性シート５の少なくとも粘着領域１１に、好ましくは粘着領域１１全面と周縁非粘着部１２との上に薄板状物９を配置して粘着領域１１に接触又は押圧する。そして、このようにして粘着領域１１及び周縁粘着不能部１２上に配置された薄板状物９を保持治具１から取り外すには、粘着性シート５の内部粘着部１４を基体６内すなわち空隙部２３内に没入させ、新たに形成された創成空間２５を開放すなわち保持治具１及び薄板状物９の外部に開口させる。このようにして保持治具１に粘着保持された、保持治具１とほぼ同寸又は大きな寸法を有する薄板状物９を損傷させることなく容易に取り外せる。   That is, in order to cause the holding jig 1 to hold the thin plate-like material 9 in an adhesive state, the thin plate-like material 9 is preferably placed on at least the adhesive region 11 of the adhesive sheet 5, preferably on the entire surface of the adhesive region 11 and the peripheral non-adhesive portion 12. Arrange and touch or press the adhesive area 11. And in order to remove the thin plate-like object 9 arranged on the adhesive region 11 and the peripheral non-adhesive portion 12 in this way from the holding jig 1, the internal adhesive portion 14 of the adhesive sheet 5 is placed in the base 6, that is, the void portion. The newly created creation space 25 is opened, that is, opened to the outside of the holding jig 1 and the thin plate-like object 9. In this way, the thin plate-like object 9 having the same or larger dimension as that of the holding jig 1 that is adhesively held by the holding jig 1 can be easily removed without being damaged.

この発明に係る保持治具の別の一例である保持治具２を、図４を参照して、説明する。保持治具２は、図４に示されるように、粘着性シート５’と基体６’とを備えている。保持治具２は、粘着性シート５’の粘着領域３１及び周縁粘着不能部３２の形状、寸法及び配置、並びに、基体６’の支持体４１の形状、寸法及び配置が異なること以外は保持治具１と基本的に同様である。   A holding jig 2 which is another example of the holding jig according to the present invention will be described with reference to FIG. As shown in FIG. 4, the holding jig 2 includes an adhesive sheet 5 'and a base 6'. The holding jig 2 is a holding jig except that the shape, size and arrangement of the adhesive region 31 and the peripheral edge non-adhesive portion 32 of the adhesive sheet 5 ′ and the shape, size and arrangement of the support body 41 of the base body 6 ′ are different. Basically the same as tool 1.

粘着性シート５’は、図４に示されるように、正方形のシート状に形成され、内部粘着部３４及び内部粘着不能部３５を含む粘着領域３１と、粘着領域３１を囲繞する周縁粘着不能部３２とを有している。   As shown in FIG. 4, the adhesive sheet 5 ′ is formed in a square sheet shape, and includes an adhesive region 31 including the internal adhesive portion 34 and the internal adhesive impossible portion 35, and a peripheral adhesive impossible portion surrounding the adhesive region 31. 32.

この粘着性シート５’の粘着領域３１は、図４に示されるように、３つの線状の内部粘着不能部３５が略並行に配置された並行線状パターンになり、残部が内部粘着部３４になっている正方形の領域である。そして、内部粘着不能部３５それぞれはその延在方向の一方の端部が、延在方向の延長上に位置する一方の周縁粘着不能部３２に互いに交互に接している。したがって、粘着領域３１の４つ輪郭線すべてに内部粘着部３４が接している。周縁粘着不能部３２は粘着領域３１に接して粘着領域１１を囲繞する枠状に形成されている。   As shown in FIG. 4, the adhesive region 31 of the adhesive sheet 5 ′ has a parallel linear pattern in which three linear internal non-adhesive portions 35 are arranged substantially in parallel, and the remaining portion is the internal adhesive portion 34. This is a square area. Each of the internal non-adhesive portions 35 has one end in the extending direction alternately contacting one peripheral non-adhesive portion 32 located on the extension in the extending direction. Therefore, the internal adhesive portion 34 is in contact with all four contour lines of the adhesive region 31. The peripheral non-adhesive portion 32 is formed in a frame shape that contacts the adhesive region 31 and surrounds the adhesive region 11.

基体６’は、図４に明確に図示されていないが、粘着性シート５’が載置されたときに、粘着性シート５’の内部粘着不能部３５及び周縁粘着不能部３２に対応するように、３つの壁状の支持体４１及び囲繞部４２を有している。具体的には、基体６’は、内部粘着不能部３５を支持する支持体４１と、支持体４１を囲繞すると共に周縁粘着不能部３２を支持する囲繞部４２と、内部粘着部３４が没入する空隙部４３と、空隙部４３に連通する通気孔４４とを有している。支持体４１は、そのすべてが囲繞部４２に接して配置されており、これらすべての支持体４１が囲繞部４２の高さよりも高い同一の高さになっている。このときの支持体２１の高さは前記範囲内にある。このように、保持治具２は、粘着性シート５’の粘着領域３１及び周縁粘着不能部３２に適合するように、支持体４１、囲繞部４２、空隙部４３が形成されている。   Although not clearly shown in FIG. 4, the base 6 ′ corresponds to the inner non-adhesive portion 35 and the peripheral non-adhesive portion 32 of the adhesive sheet 5 ′ when the adhesive sheet 5 ′ is placed. In addition, it has three wall-like supports 41 and a surrounding portion 42. Specifically, the base body 6 ′ includes a support 41 that supports the internal non-adhesive portion 35, an enclosure 42 that surrounds the support 41 and supports the peripheral non-adhesive portion 32, and the internal adhesive portion 34. It has a gap portion 43 and a vent hole 44 communicating with the gap portion 43. All of the support bodies 41 are arranged in contact with the surrounding portion 42, and all these supporting bodies 41 have the same height that is higher than the height of the surrounding portion 42. The height of the support 21 at this time is within the above range. As described above, the support jig 41, the surrounding portion 42, and the gap portion 43 are formed in the holding jig 2 so as to be adapted to the adhesive region 31 and the peripheral edge non-adhesive portion 32 of the adhesive sheet 5 ′.

保持治具２は、基体６’と粘着性シート５’とを備え、基体６’の囲繞部４２及び支持体４１の上に粘着性シート５’が支持され、接着固定又は密着固定される。この保持治具２は、基体６’に載置された粘着性シート５’の表面特に粘着領域３１で薄板状物を粘着保持すると共に、空隙部４３内の気体を排気して空隙部４３上に位置する内部粘着部３４を空隙部４３に没入させて薄板状物から引き離すことで薄板状物を取り外せるようになっている。   The holding jig 2 includes a base 6 ′ and an adhesive sheet 5 ′. The adhesive sheet 5 ′ is supported on the surrounding portion 42 and the support body 41 of the base 6 ′, and is adhesively fixed or closely fixed. The holding jig 2 sticks and holds the thin plate-like material on the surface of the adhesive sheet 5 ′ placed on the base body 6 ′, particularly on the adhesive region 31, and exhausts the gas in the gap portion 43 to remove the gas on the gap portion 43. The thin plate-like object can be removed by immersing the internal adhesive portion 34 located in the space 43 and pulling it away from the thin plate-like object.

保持治具２に薄板状物を粘着保持させる際の方法並びに作用及び機能は保持治具１と基本的に同様である。   The method, action, and function for sticking and holding a thin plate on the holding jig 2 are basically the same as those of the holding jig 1.

薄板状物を保持治具１から取り外す場合も保持治具１と基本的に同様である。すなわち、通気孔４４から空隙部４３内の気体を吸引して、内部粘着部３４を空隙部４３内に没入させる。このとき、粘着領域３１及び周縁粘着不能部３２上に配置されている薄板状物の底面と空隙部４３に没入した内部粘着部３４とで創成空間が新たに形成される。ここで、保持治具２においては、前記したように支持体４１が囲繞部４２よりも高く形成されているから、粘着領域３１の輪郭線近傍すなわち周縁粘着不能部３２の内側近傍に創成空間の開口が生じて創成空間が開放空間になる。したがって、粘着保持されている薄板状物は、わずかな力で、又は、保持治具２を傾けるだけで、保持治具２すなわち粘着性シート５’から容易に取り外すことができる。   The removal of the thin plate from the holding jig 1 is basically the same as the holding jig 1. That is, the gas in the gap portion 43 is sucked from the vent hole 44 so that the internal adhesive portion 34 is immersed in the gap portion 43. At this time, a creation space is newly formed by the bottom surface of the thin plate-like object disposed on the adhesive region 31 and the peripheral edge non-adhesive portion 32 and the internal adhesive portion 34 immersed in the gap portion 43. Here, in the holding jig 2, since the support body 41 is formed higher than the surrounding portion 42 as described above, the generating space is formed in the vicinity of the outline of the adhesive region 31, that is, in the vicinity of the inner side of the peripheral non-adhesive portion 32. An opening is created and the creation space becomes an open space. Therefore, the thin plate-like object that is adhesively held can be easily removed from the holding jig 2, that is, the adhesive sheet 5 ′ with a slight force or by tilting the holding jig 2.

このように保持治具２は、粘着保持する薄板状物が粘着性シート５’すなわち保持治具２とほぼ同寸又は大きな寸法を有していても、薄板状物を十分な粘着保持力で粘着保持できるにもかかわらず、粘着保持された薄板状物を容易に取り外すことができる。   Thus, even if the thin plate-like object to be adhesively held has the same or larger dimension as that of the adhesive sheet 5 ′, that is, the holding jig 2, the holding jig 2 has a sufficient adhesive holding force. Despite being able to hold the adhesive, the thin plate-like object having the adhesive held can be easily removed.

この発明に係る保持治具は、前記した実施例に限定されることはなく、本願発明の目的を達成することができる範囲において、種々の変更が可能である。   The holding jig according to the present invention is not limited to the above-described embodiments, and various modifications can be made within a range in which the object of the present invention can be achieved.

例えば、保持治具１は４つの支持体が形成され、保持治具２は３つの支持体が形成されているが、この発明において、支持体は粘着性シートの粘着領域に含まれる内部粘着不能部に対応するように形成されていればよく、例えば、１つ又は２つが形成されてもよく、また、５つ以上すなわち多数が形成されてもよい。   For example, the holding jig 1 is formed with four supports and the holding jig 2 is formed with three supports. In this invention, the support cannot be internally adhered within the adhesive region of the adhesive sheet. For example, one or two may be formed, and five or more, that is, many may be formed.

前記薄板状物９は、図３に示されるように、その端部が周辺粘着不能部１２の幅方向略中央に到達する程度の寸法を有しているが、この発明の効果を有効に奏するためには、薄板状物は、例えば、図３（ａ）に破線で示されるように、その端部が周辺粘着不能部１２の端縁まで到達する程度の寸法を有していてもよく、また、その端部が周辺粘着不能部１２を超える寸法を有していてもよい。このような薄板状物として、例えば、大型のシリコンウェハ、大画面表示装置用のガラス板等が挙げられる。   As shown in FIG. 3, the thin plate-like object 9 has such a dimension that its end reaches the substantially center in the width direction of the peripheral adhesive impossible part 12, but the effect of the present invention is effectively exhibited. For this purpose, for example, the thin plate-like object may have a dimension such that its end reaches the edge of the peripheral non-adhesive portion 12, as indicated by a broken line in FIG. Moreover, the edge part may have a dimension exceeding the periphery non-adhesive part 12. Examples of such a thin plate include a large silicon wafer, a glass plate for a large screen display device, and the like.

保持治具１及び２において、薄板状物９は１つの保持治具で粘着保持されているが、この発明の効果を有効に奏するためには、薄板状物は保持治具の粘着領域及び周縁粘着不能部上に配置されていればよく、例えば、１つ以上の保持治具で粘着保持されてもよい。   In the holding jigs 1 and 2, the thin plate-like object 9 is adhesively held by one holding jig. However, in order to effectively achieve the effects of the present invention, the thin plate-like object is formed in the adhesive region and the periphery of the holding jig. It may be disposed on the non-adhesive part, and may be adhesively held by one or more holding jigs, for example.

保持治具１及び２はいずれも平面視略正方形に形成されているが、この発明において、保持治具は、被粘着物の形状、製造工程、作業性等に応じて任意の形状に形成されてもよい。例えば、平面視、長方形、五角形、六角形等の多角形、円形、楕円形、不定形、又は、これらを組み合わせた形状等が挙げられる。   The holding jigs 1 and 2 are both formed in a substantially square shape in plan view, but in this invention, the holding jig is formed in an arbitrary shape according to the shape of the adherend, the manufacturing process, workability, etc. May be. For example, a plan view, a polygon such as a rectangle, a pentagon, and a hexagon, a circle, an ellipse, an indeterminate shape, or a combination of these may be used.

保持治具１おいて、粘着性シート５は中間粘着部１３を有し、基体６は支持体２１を囲繞する空隙部２３を有しているが、この発明において、粘着性シートは中間粘着部を有していなくてもよく、この場合には周辺非粘着部は粘着領域の少なくとも１つの輪郭線で内部粘着部に接するように周辺非粘着部及び粘着領域が配置され、基体は内部粘着部に対応する空隙部が形成される。   In the holding jig 1, the pressure-sensitive adhesive sheet 5 has an intermediate pressure-sensitive adhesive portion 13, and the base 6 has a gap portion 23 surrounding the support 21. In this invention, the pressure-sensitive adhesive sheet is an intermediate pressure-sensitive adhesive portion. In this case, the peripheral non-adhesive portion and the adhesive region are arranged so that the peripheral non-adhesive portion is in contact with the internal adhesive portion at at least one contour line of the adhesive region, and the base is the internal adhesive portion. A gap corresponding to is formed.

基体６及び６’はいずれもステンレス鋼又はアルミニウム合金で形成されているが、この発明において、基体は多孔質セラミック等の多孔性物質等で形成されてもよい。この場合には、通気孔を特段形成する必要はないが、空隙部が気密になるように基体の側面及び底面を密閉する必要がある。   The substrates 6 and 6 'are both made of stainless steel or aluminum alloy, but in the present invention, the substrate may be made of a porous material such as porous ceramic. In this case, it is not necessary to form a vent hole in particular, but it is necessary to seal the side and bottom surfaces of the base so that the gap is airtight.

１、２ 保持治具
５、５’ 粘着性シート
６、６’ 基体
９ 薄板状物
９ａ 底面
１１、３１ 粘着領域
１２、３２ 周縁粘着不能部
１３ 中間粘着部
１４、３４ 粘着部（内部粘着部）
１５、３５ 内部粘着不能部
２１、４１ 支持体
２２、４２ 囲繞部
２３、４３ 空隙部
２４、４４ 通気孔
２５ 創成空間 DESCRIPTION OF SYMBOLS 1, 2, Holding jig | tool 5, 5 'Adhesive sheet | seat 6, 6' Base | substrate 9 Thin plate-like object 9a Bottom surface 11,31 Adhesive area | region 12,32 Peripheral adhesion impossible part 13 Intermediate | middle adhesive part 14,34
15, 35 Internal non-adhesive parts 21, 41 Support bodies 22, 42 Enclosure parts 23, 43 Cavities 24, 44 Vent hole 25 Creation space

Claims (6)

粘着部及び内部粘着不能部を含む粘着領域、並びに、前記粘着領域を囲繞する周縁粘着不能部を有する粘着性シートと、前記粘着性シートを載置すると共に前記粘着部が没入する空隙部及び前記内部粘着不能部を支持する支持体を有する基体とを備え、
前記粘着領域及び前記周縁粘着不能部の上に薄板状物が載置されたときに前記薄板状物と前記空隙部に没入した前記粘着部とで形成される創成空間が開放空間になり、
前記基体は、前記支持体を囲繞すると共に前記周縁粘着不能部を支持する囲繞部を有し、
前記支持体の少なくとも１つは、前記囲繞部の高さよりも高く形成されていることを特徴とする保持治具。 An adhesive region including an adhesive portion and an internal non-adhesive portion, an adhesive sheet having a peripheral non-adhesive portion surrounding the adhesive region, a void portion in which the adhesive sheet is placed and the adhesive portion is immersed A substrate having a support for supporting the internal non-adhesive portion;
When the thin plate-like object is placed on the adhesive region and the peripheral non-adhesive part, the creation space formed by the thin plate-like object and the adhesive part immersed in the gap becomes an open space,
The base body has a surrounding portion that surrounds the support and supports the peripheral-adhesion impossible portion,
At least one of the supports is formed to be higher than the height of the surrounding portion. 前記粘着領域は、互いに離間して配置された複数の内部粘着不能部と、前記内部粘着不能部の間に配置された前記粘着部とを含んでいることを特徴とする請求項１に記載の保持治具。 The adhesive region is defined in claim 1, characterized in that it includes a plurality of internal adhesive non section disposed in between away from each other, and said adhesive portion disposed between the inner adhesive incapable portion Holding jig. 前記囲繞部の高さよりも高く形成されている前記支持体は、複数の前記内部粘着不能部のうち前記周縁粘着不能部側に配置された前記内部粘着不能部を支持する支持体を含むことを特徴とする請求項１又は２に記載の保持治具。   The said support body currently formed higher than the height of the said surrounding part contains the support body which supports the said internal non-adhesive part arrange | positioned among the said internal non-adhesive parts in the said peripheral adhesive non-adhesive part side. The holding jig according to claim 1 or 2, characterized in that 前記囲繞部の高さよりも高く形成されている前記支持体は、前記内部粘着不能部を支持するすべての支持体であることを特徴とする請求項１〜３のいずれか１項に記載の保持治具。   The said support body currently formed higher than the height of the said surrounding part is all the support bodies which support the said internal adhesion impossible part, The holding | maintenance of any one of Claims 1-3 characterized by the above-mentioned. jig. 前記囲繞部よりも高く形成されている前記支持体は、前記囲繞部の高さとの差が２ｍｍ以下であることを特徴とする請求項１〜４のいずれか１項に記載の保持治具。   The holding jig according to any one of claims 1 to 4, wherein the support formed higher than the surrounding portion has a difference from the height of the surrounding portion of 2 mm or less. 前記基体は、前記空隙部に連通する通気孔を有していることを特徴とする請求項１〜５のいずれか１項に記載の保持治具。   The holding jig according to any one of claims 1 to 5, wherein the base has a vent hole communicating with the gap.
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