TWI465359B - Transport system - Google Patents
Transport system Download PDFInfo
- Publication number
- TWI465359B TWI465359B TW100102076A TW100102076A TWI465359B TW I465359 B TWI465359 B TW I465359B TW 100102076 A TW100102076 A TW 100102076A TW 100102076 A TW100102076 A TW 100102076A TW I465359 B TWI465359 B TW I465359B
- Authority
- TW
- Taiwan
- Prior art keywords
- transport vehicle
- loop
- article
- mounting table
- mounting
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
本發明係關於一種搬送車系統,尤其係關於一種包括在複數個處理裝置之間沿著軌道行駛之搬送車之搬送車系統。The present invention relates to a transport vehicle system, and more particularly to a transport vehicle system including a transport vehicle that travels along a track between a plurality of processing devices.
眾所周知有一種用以搬送經大型化之玻璃基板或收納有複數片該玻璃基板之匣盒的搬送車。搬送車於工廠內之無塵室內自動行駛而於處理裝置之間搬送物品。There is a known transfer vehicle for transporting a large-sized glass substrate or a cassette containing a plurality of the glass substrates. The transport vehicle automatically travels in a clean room in the factory and transports items between the processing devices.
供搬送車行駛之軌道為例如自頂棚垂下來之軌道或地面上所設置之軌道。於該情形時,軌道及搬送車行駛之空間成為與外部遮斷之無塵室。The track for transporting the vehicle is, for example, a track that is suspended from the ceiling or a track that is placed on the ground. In this case, the space in which the rails and the transport vehicle travel is a clean room that is blocked from the outside.
於平台設置有採用選擇順應性裝配機器手臂(SCARA arm,Selective Compliance Assembly Robot Arm)之移載裝置。採用選擇順應性裝配機器手臂之移載裝置係將玻璃基板或匣盒自搬送車移載至平台之載置地點,與此相反,將玻璃基板或匣盒自平台之載置地點移載至搬送車(例如,參照專利文獻1)。又,亦眾所周知有一種在搬送車設置有採用選擇順應性裝配機器手臂之移載裝置之型態。A transfer device using a Selective Compliance Assembly Robot Arm (SCARA arm) is provided on the platform. The transfer device that selects the compliant assembly robot arm transfers the glass substrate or the cassette to the loading place of the platform. On the contrary, the glass substrate or the cassette is transferred from the loading place of the platform to the transfer place. A car (for example, refer to Patent Document 1). Further, it is also known that there is a type in which a transfer device equipped with a compliant mounting robot is provided in the transport vehicle.
[先前技術文獻][Previous Technical Literature]
[專利文獻][Patent Literature]
[專利文獻1]日本專利特開2001-294302號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-294302
另一方面,考慮於搬送重量物之搬送車系統中,於處理裝置之附近配置側緩衝區(side buffer)。然而,若於用以保管重量物之側緩衝區使用採用選擇順應性裝配機器手臂之移載裝置,則會存在有側緩衝區之成本上升、或者搬送車之重量變得過大之問題。On the other hand, in the transport vehicle system in which the weight is transferred, a side buffer is disposed in the vicinity of the processing device. However, if the transfer device for selecting the compliant mounting robot is used in the side buffer for storing the weight, there is a problem that the cost of the side buffer increases, or the weight of the transport vehicle becomes excessive.
本發明之課題在於降低搬送車系統中與重量物相對應之側緩衝區之成本。An object of the present invention is to reduce the cost of a side buffer corresponding to a weight in a transport vehicle system.
本發明之搬送車系統係用以於複數個處理裝置之間搬送物品者;其包括軌道、搬送車及載置台。軌道沿著複數個處理裝置而設置。搬送車於軌道上行駛而搬送物品。載置台被配置於軌道之側方,並具有載置面。搬送車包含支持台及推挽(push pull)裝置。支持台具有與載置台之載置面呈相同高度之支持面。推挽移載裝置藉由推拉物品而使物品於載置台與支持台之間移動。The transport vehicle system of the present invention is for transporting articles between a plurality of processing devices; it includes a track, a transport vehicle, and a mounting table. The track is placed along a plurality of processing devices. The transport vehicle travels on the track and transports the items. The mounting table is disposed on the side of the rail and has a mounting surface. The transport vehicle includes a support station and a push pull device. The support table has a support surface of the same height as the mounting surface of the mounting table. The push-pull transfer device moves the article between the mounting table and the support table by pushing and pulling the article.
於該系統中,搬送車於載置台之側方停止,藉由推挽移載裝置而使物品於支持台與載置台之間移動。當力自推挽移載裝置作用於物品時,物品將於載置面及支持面上移動。如此,可利用簡單構造移載重量物。其結果,可於搬送車系統中,降低與重量物相對應之側緩衝區之成本。進而,由於設置於搬送車之移載裝置為推挽移載裝置,因此搬送車之重量將減小。In this system, the transport vehicle is stopped on the side of the mounting table, and the article is moved between the support table and the mounting table by the push-pull transfer device. When the force is applied to the article from the push-pull transfer device, the article moves on the mounting surface and the support surface. In this way, the weight can be transferred using a simple construction. As a result, the cost of the side buffer corresponding to the weight can be reduced in the transport system. Further, since the transfer device installed in the transport vehicle is a push-pull transfer device, the weight of the transport vehicle is reduced.
再者,支持台之支持面與載置台之載置面之高度於移載物品時相同即可。亦即,任一面或兩個面均可變更高度,搬送車之行駛中或停止中兩個面之高度亦可不同。Furthermore, the height of the support surface of the support table and the mounting surface of the mounting table may be the same as when the article is transferred. That is, the height can be changed on either or both sides, and the heights of the two sides of the moving or stopping of the transport vehicle can be different.
載置台亦可更包括罩蓋及用以提高載置於罩蓋內物品之周圍清潔度之清潔裝置。The mounting table may further include a cover and a cleaning device for improving the cleanliness of the items placed in the cover.
於該系統中,載置台上物品之周圍清潔度將增高。再者,罩蓋例如可僅配置於物品之上方,亦可僅配置於物品之上方及左右,亦可配置於物品之上方、左右及內面。In this system, the cleanliness of the surrounding items on the mounting table will increase. Further, the cover may be disposed only above the article, or may be disposed only above and to the left and right of the article, or may be disposed above, to the left and right, and to the inner surface of the article.
載置台之載置面亦可為可滾動自如之輸送帶,搬送車之支持面亦可為可滾動自如之輸送帶。The mounting surface of the mounting table can also be a rollable conveyor belt, and the support surface of the transporting vehicle can also be a rolling conveyor belt.
於該系統中,由於輸送帶可滾動自如,因此於移載物品時可抑制磨耗粉產生。In this system, since the conveyor belt can be rolled freely, the generation of the abrasion powder can be suppressed when the article is transferred.
軌道亦可包含與複數個處理裝置相鄰接之環路。搬送車亦可於環路上以單向通行地行駛。載置台亦可包含於至少一個環路之內側與環路之兩側部分相接近配置、且於環路之長度方向排成一行而配置之第1載置台及第2載置台。第1載置台及第2載置台亦可分別包含朝著環路之兩側部分之單側開放之第1開口部及朝著環路之兩側部分之相反側開放之第2開口部。The track may also include a loop adjacent to a plurality of processing devices. The transporter can also travel in one direction on the loop. The mounting table may include a first mounting table and a second mounting table disposed on the inner side of at least one of the loops and disposed adjacent to both side portions of the loop, and arranged in a row in the longitudinal direction of the loop. Each of the first stage and the second stage may include a first opening that is open to one side of the both side portions of the loop and a second opening that opens toward the opposite side of the both side portions of the loop.
於該系統中,載置台係包含在環路內朝著環路之兩側部分而分別開放之第1開口部及第2開口部。因此,於臨時放置物品時,可選擇位於目的地處理裝置附近之載置台。以上之結果,可提高物品之搬送效率。In this system, the mounting table includes a first opening and a second opening that are respectively opened in the loop toward both side portions of the loop. Therefore, when the article is temporarily placed, the mounting table located near the destination processing device can be selected. As a result of the above, the conveying efficiency of the articles can be improved.
載置台包含沿著上下方向通過載置面而可支持物品之支持構件、及驅動支持構件之驅動機構,若於載置面載置有物品之狀態下經由驅動機構來驅動支持構件,則支持構件亦可通過載置面使物品上升,由此可確保於載置面上用以放置物品之空間。The mounting table includes a supporting member that supports the article through the mounting surface in the vertical direction, and a driving mechanism that drives the supporting member. When the supporting member is driven via the driving mechanism while the article is placed on the mounting surface, the supporting member It is also possible to raise the article by the mounting surface, thereby securing a space for placing the article on the mounting surface.
於該系統中,若將物品放置於載置面,則經由驅動機構驅動支持構件使其上升,由此可使物品移動至較載置面更高之位置處。於該狀態下,可將物品自搬送車搬送至載置面。以上之結果,可提高載置台上之物品收容能力。In this system, when the article is placed on the placement surface, the support member is driven to rise by the drive mechanism, whereby the article can be moved to a position higher than the placement surface. In this state, the articles can be transported from the transport vehicle to the mounting surface. As a result of the above, the article accommodating ability on the mounting table can be improved.
於本發明之搬送車系統中,可降低移載裝置之成本。In the transport vehicle system of the present invention, the cost of the transfer device can be reduced.
(1)搬送車系統(1) Transportation system
使用圖1,對本發明之搬送車系統1進行說明。圖1係採用本發明一實施形態之搬送車系統之模式平面圖。於該實施形態中,搬送車系統1被採用於製造大型液晶之液晶製造工廠。於液晶製造工廠,配置有複數個處理裝置2及檢查裝置4。The transport vehicle system 1 of the present invention will be described with reference to Fig. 1 . Fig. 1 is a schematic plan view showing a transport vehicle system according to an embodiment of the present invention. In this embodiment, the transport vehicle system 1 is used in a liquid crystal manufacturing factory that manufactures large liquid crystals. In the liquid crystal manufacturing plant, a plurality of processing apparatuses 2 and inspection apparatuses 4 are disposed.
搬送車系統1為於複數個處理裝置2之間搬送物品(例如,收容有複數個基板之匣盒)之系統,其包括有軌道3、搬送車5、自動倉庫7及複數個緩衝區9。於搬送車系統1中,軌道3包含複數個環路(環繞路),搬送車5可於各環路上單向通行地行駛。The transport vehicle system 1 is a system for transporting articles (for example, cassettes containing a plurality of substrates) between a plurality of processing apparatuses 2, and includes a rail 3, a transport vehicle 5, an automatic warehouse 7, and a plurality of buffers 9. In the transport vehicle system 1, the track 3 includes a plurality of loops (surrounding roads), and the transport vehicle 5 can travel in one direction on each loop.
軌道3包含第1~第4環路11、13、15、17。第1~第3環路11、13、15沿著一個方向較長地延伸,因此包含有直線狀之兩側部分及位於兩端之曲線。第1~第3環路11、13、15相互平行地並列延伸。第4環路17以沿第1~第3環路11、13、15之單側端間延長之方式進行配置。於該實施形態中,未於第1~第3環路11、13、15中與第4環路17相反側,設置有軌道。因此,可容易將裝置搬入至第1~第4環路11、13、15、17之間,或者容易自該等之間搬出裝置。The track 3 includes first to fourth loops 11, 13, 15, and 17. Since the first to third loops 11, 13, and 15 extend in a long direction in one direction, they include a linear portion on both sides and a curved line at both ends. The first to third loops 11, 13, and 15 extend in parallel with each other in parallel. The fourth loop 17 is disposed to extend between the one ends of the first to third loops 11, 13, and 15. In this embodiment, a track is not provided on the side opposite to the fourth loop 17 in the first to third loops 11, 13, and 15. Therefore, it is possible to easily carry the device between the first to fourth loops 11, 13, 15, and 17, or to easily carry out the device from between.
第1環路11係藉由設置複數個第1捷徑用連結部19而實現第1小環路11a、第2小環路11b、第3小環路11c。第2環路13係藉由設置複數個第2捷徑用連結部21而實現第4小環路13a、第5小環路13b、第6小環路13c。第3環路15係藉由設置複數個第3捷徑用連結部23而實現第7小環路15a、第8小環路15b、第9小環路15c。In the first loop 11, the first small loop 11a, the second small loop 11b, and the third small loop 11c are realized by providing a plurality of first shortcut connecting portions 19. In the second loop 13, the fourth small loop 13a, the fifth small loop 13b, and the sixth small loop 13c are realized by providing a plurality of second shortcut connecting portions 21. In the third loop 15, the seventh small loop 15a, the eighth small loop 15b, and the ninth small loop 15c are realized by providing a plurality of third shortcut connecting portions 23.
第4環路17係藉由設置第4捷徑用連結部25而實現第10小環路17a、第11小環路17b。第10小環路17a藉由複數個連結部27而連結於第1環路11及第2環路13。第11小環路17b藉由連結部28而連結於第3環路15。The fourth loop 17 is configured to realize the tenth small loop 17a and the eleventh small loop 17b by providing the fourth shortcut connecting portion 25. The tenth small loop 17a is connected to the first loop 11 and the second loop 13 by a plurality of connecting portions 27. The eleventh small loop 17b is connected to the third loop 15 by the connecting portion 28.
複數個處理裝置2係多個並列地而配置於第1~第4環路11、13、15、17之外側。由於處理裝置2之構成及種類已為人所知,故而此處省略詳細說明。A plurality of processing apparatuses 2 are arranged side by side on the outer sides of the first to fourth loops 11, 13, 15, and 17. Since the configuration and type of the processing device 2 are known, detailed descriptions thereof are omitted here.
作為複數個處理裝置2之一種,設置有在各環路之間連續配置之連續處理裝置29。連續處理裝置29被配置於第1環路11與第2環路13之間、以及第2環路13與第3環路15之間。連續處理裝置29包含以可直接移動物品之方式而連結配置之第1處理裝置29a及第2處理裝置29b。例如,第1處理裝置29a為蝕刻裝置,第2處理裝置29b為剝離裝置。因此,物品自位於第1環路11之搬送車5搬入至第1處理裝置29a之入口平台36而進行處理,接著搬入至第2處理裝置29b而進行處理,最後搬出至位於第2環路13之出口平台38之搬送車5。如上所述,因未於複數個處理裝置2之間設置有搬送軌道,故搬送車系統1整體之搬送步驟數將減少。As one of the plurality of processing devices 2, a continuous processing device 29 that is continuously disposed between the respective loops is provided. The continuous processing device 29 is disposed between the first loop 11 and the second loop 13 and between the second loop 13 and the third loop 15. The continuous processing device 29 includes a first processing device 29a and a second processing device 29b that are connected to each other so that the articles can be directly moved. For example, the first processing device 29a is an etching device, and the second processing device 29b is a peeling device. Therefore, the article is transported from the transport vehicle 5 located in the first loop 11 to the entrance platform 36 of the first processing device 29a, and then processed, and then moved to the second processing device 29b for processing, and finally carried out to the second loop 13 The transport platform 5 of the exit platform 38. As described above, since the transport rail is not provided between the plurality of processing apparatuses 2, the number of transport steps of the entire transport vehicle system 1 is reduced.
自動倉庫7被配置於第1環路11與第2環路13之間。自動倉庫7包含有可載置物品之複數個支架及起重機。由於自動倉庫7之構成已為人所知,故而此處省略說明。自動倉庫7包含沿著第1環路11及第2環路13延伸之方向較長地延伸且向第1環路11側延伸之第1平台31及向第2環路13側延伸之第2平台33。藉此,自動倉庫7可於與在第1環路11或第2環路13上行駛之搬送車5之間搬入搬出物品。The automatic warehouse 7 is disposed between the first loop 11 and the second loop 13. The automated warehouse 7 includes a plurality of brackets and cranes on which items can be placed. Since the configuration of the automatic warehouse 7 is known, the description is omitted here. The automatic warehouse 7 includes a first platform 31 that extends in a direction in which the first loop 11 and the second loop 13 extend, and that extends toward the first loop 11 side and a second platform that extends toward the second loop 13 side. Platform 33. Thereby, the automatic warehouse 7 can carry in and out articles between the transport vehicle 5 that travels on the first loop 11 or the second loop 13.
再者,於該實施形態中,複數個檢查裝置4以連接於自動倉庫7之形態而配置於自動倉庫7之周圍。但是,檢查裝置之位置並不特別受限。Furthermore, in this embodiment, a plurality of inspection apparatuses 4 are disposed around the automatic warehouse 7 in a form of being connected to the automatic warehouse 7. However, the position of the inspection device is not particularly limited.
複數個緩衝區9係具有於處理裝置2之間搬送物品時之臨時放置地點作用之載置台。複數個緩衝區9係配置於第1~第4環路11~17內,更具體而言係配置於各小環路內。緩衝區9沿著環路之長度方向而較長地形成,如下所述包含設置有開口部之複數個收納部。於第1~第9小環路11a、11b、11c、13a、13b、13c、15a、15b、15c內,分別配置有4個緩衝區9。於第10小環路17a內配置有6個緩衝區9。於第11小環路17b內,則配置有成一行且直線狀4個緩衝區9。The plurality of buffers 9 are mounting stations that function as temporary placement points when the articles are transported between the processing devices 2. The plurality of buffers 9 are arranged in the first to fourth loops 11 to 17, and more specifically, are arranged in the respective small loops. The buffer region 9 is formed long along the longitudinal direction of the loop, and includes a plurality of housing portions provided with openings as will be described later. Four buffers 9 are disposed in the first to ninth small loops 11a, 11b, 11c, 13a, 13b, 13c, 15a, 15b, and 15c, respectively. Six buffers 9 are arranged in the 10th small loop 17a. In the 11th small loop 17b, four buffers 9 are arranged in a line and linearly.
使用圖4,對第1緩衝區9A與第2緩衝區9B之配置及構造進行詳細說明。圖4係圖1之部分放大圖。於各小環路內,交替配置有第1緩衝區9A與第2緩衝區9B。第1緩衝區9A與第2緩衝區9B基本構造相同,但開口部之朝向相反。如圖4所示,於第1小環路11a內,第1緩衝區9A包含3台第1單位緩衝區85。第1單位緩衝區85包含朝向相鄰接之軌道、具體而言朝向第1小環路11a一邊之直線部分之第1開口部85a。第2緩衝區9B包含3台第2單位緩衝區86。第2單位緩衝區86包含朝向相鄰接之軌道、具體而言朝向第1小環路11a另一邊之直線部分之第2開口部86a。綜上所述,第1緩衝區9A之第1開口部85a與第2緩衝區9B之第2開口部86a於第1小環路11a內朝向相反側。以上之結果,可相對於第1緩衝區9A自第1小環路11a之第1側進行存取,且可相對於第2緩衝區9B自第1小環路11a之第2側進行存取。如此於一個小環路內能確保可自小環路之任一側進行存取之緩衝區,因此可短時間內執行搬送車5與緩衝區9間之移載。The arrangement and structure of the first buffer 9A and the second buffer 9B will be described in detail with reference to Fig. 4 . Figure 4 is a partial enlarged view of Figure 1. The first buffer 9A and the second buffer 9B are alternately arranged in each small loop. The first buffer area 9A and the second buffer area 9B have the same basic structure, but the orientation of the openings is opposite. As shown in FIG. 4, in the first small loop 11a, the first buffer area 9A includes three first unit buffers 85. The first unit buffer 85 includes a first opening 85a that faces the adjacent track, specifically, the straight portion toward the first small loop 11a. The second buffer 9B includes three second unit buffers 86. The second unit buffer 86 includes a second opening 86a that faces the adjacent track, specifically, the straight portion that faces the other side of the first small loop 11a. As described above, the first opening 85a of the first buffer zone 9A and the second opening 86a of the second buffer zone 9B face the opposite sides of the first small loop 11a. As a result, the first buffer 9A can be accessed from the first side of the first small loop 11a, and can be accessed from the second side of the first small loop 11a with respect to the second buffer 9B. . In this way, a buffer that can be accessed from either side of the small loop can be secured in a small loop, so that the transfer between the transport vehicle 5 and the buffer 9 can be performed in a short time.
藉由以上構成,於與各處理裝置2相鄰接之環路內存在緩衝區9,尤其存在包含朝著環路之兩側部分分別開口之開口部的緩衝區9。因此,於2個處理裝置2之間搬送物品時,通常可藉由2個命令實現搬送。具體而言,藉由第1命令,搬送車5自作為出發地之處理裝置2搬出物品,並將其搬送至目的地處理裝置2附近之緩衝區9。藉由第2命令,搬送車5將物品自緩衝區9搬送至目的地處理裝置2。如此藉由搬送車5之2次移動而可結束物品之搬送,因而搬送車系統1中之物品之搬送處理量將提高。According to the above configuration, the buffer area 9 is present in the loop adjacent to each of the processing apparatuses 2, and in particular, the buffer area 9 including the opening portions respectively opening toward the both side portions of the loop. Therefore, when an article is transported between two processing apparatuses 2, it is usually possible to carry out the transfer by two commands. Specifically, by the first command, the transport vehicle 5 carries out the articles from the processing device 2 as the departure place, and transports the articles to the buffer zone 9 near the destination processing device 2. By the second command, the transport vehicle 5 transports the articles from the buffer zone 9 to the destination processing device 2. As a result, the conveyance of the articles can be terminated by the two movements of the transport vehicle 5, and the amount of conveyance processing of the articles in the transport vehicle system 1 is improved.
使用圖5,作為搬送車系統1之變形例,對確保停止地點之佈局進行說明。圖5係表示軌道之變形例之搬送車系統之部分模式平面圖。The layout of the stop position will be described as a modification of the transport vehicle system 1 with reference to Fig. 5 . Fig. 5 is a partial schematic plan view showing a transport vehicle system in a modified example of a rail.
於圖5中,卸除處理裝置2之一部分,並於此部位配置有自第7小環路15a延伸之旁路線89。旁路線89兩端係連接於第7小環路15a,且其中間部成為既定長度之直線狀而與第7小環路15a之直線部分平行。於旁路線89可佇停有複數台之搬送車5。再者,旁路線89之配置位置及形狀並不受限於該實施形態。又,旁路線89之可停車台數亦可為一台。In Fig. 5, a part of the processing apparatus 2 is removed, and a bypass line 89 extending from the seventh small loop 15a is disposed at this portion. Both ends of the bypass line 89 are connected to the seventh small loop 15a, and the intermediate portion thereof has a linear shape of a predetermined length and is parallel to the straight portion of the seventh small loop 15a. A plurality of transport vehicles 5 can be stopped at the bypass line 89. Further, the arrangement position and shape of the bypass line 89 are not limited to this embodiment. Moreover, the number of parking spaces of the bypass line 89 may also be one.
需要檢測或維護之搬送車5將進入旁路線89而於直線部分停止。於該狀態下,操作者可檢測或維護搬送車5。綜上所述,不會因檢測或維護操作,而停止在處理裝置2之間進行搬送之搬送車5之操作。亦即,可降低或消除搬送車系統1之停工時間。The transport vehicle 5 that needs to be detected or maintained will enter the bypass line 89 and stop at the straight line. In this state, the operator can detect or maintain the transport vehicle 5. As described above, the operation of the transport vehicle 5 that transports between the processing devices 2 is not stopped due to the detection or maintenance operation. That is, the downtime of the transport vehicle system 1 can be reduced or eliminated.
(2)搬送車(2) Transport truck
使用圖2及圖3,對搬送車5之構造進行說明。圖2係作為本發明一實施形態之搬送車系統之部分剖視圖。圖3係搬送車之模式平面圖。於圖2中,與紙面正交之方向為搬送車5之搬送方向,紙面之左右方向為物品之移載方向。於圖3中,紙面之上下方向為搬送車5之搬送方向,紙面之左右方向為物品之移載方向。The structure of the transport vehicle 5 will be described with reference to Figs. 2 and 3 . Fig. 2 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention. Figure 3 is a schematic plan view of the transport vehicle. In FIG. 2, the direction orthogonal to the paper surface is the conveyance direction of the conveyance vehicle 5, and the left-right direction of the paper surface is the conveyance direction of an article. In FIG. 3, the upper and lower directions of the paper surface are the transport directions of the transport vehicle 5, and the left and right direction of the paper surface is the transport direction of the articles.
於圖2中,表示出底面32及頂棚面34,並進而表示出搬送車5、緩衝區9及處理裝置2之平台2a。搬送車5、緩衝區9、處理裝置2之平台2a之上表面之高度大致相同,均靠近頂棚面34。In Fig. 2, the bottom surface 32 and the ceiling surface 34 are shown, and the transport vehicle 5, the buffer zone 9, and the platform 2a of the processing apparatus 2 are further shown. The height of the upper surface of the platform 5a of the transport vehicle 5, the buffer zone 9, and the processing apparatus 2 is substantially the same, and both are close to the ceiling surface 34.
搬送車5為用以於處理裝置2之平台之間搬送玻璃基板或匣盒等物品之搬送手段。搬送車5包含本體35、行駛部37、輥式輸送機39、推挽移載裝置41及微環境機構43。The transport vehicle 5 is a transport means for transporting an object such as a glass substrate or a cassette between the platforms of the processing device 2. The transport vehicle 5 includes a main body 35, a traveling portion 37, a roller conveyor 39, a push-pull transfer device 41, and a micro-environment mechanism 43.
本體35係具有大致呈箱形之形狀。The body 35 has a substantially box shape.
行駛部37包含設置於本體35之左右前後之車輪45、連接於車輪45之行駛馬達131(圖7)、及設置於行駛馬達131之編碼器139(圖7)。供車輪45行駛之軌道47係如圖2所明示,被配置於底面32所形成之凹部32a內,且被配置於較底面32更靠下方處。The traveling portion 37 includes wheels 45 disposed on the left and right sides of the main body 35, a travel motor 131 (FIG. 7) connected to the wheels 45, and an encoder 139 (FIG. 7) provided in the travel motor 131. As shown in FIG. 2, the rail 47 for traveling on the wheel 45 is disposed in the recess 32a formed by the bottom surface 32, and is disposed below the bottom surface 32.
再者,如圖14所示,可於搬送車5不行駛部位之軌道47上放置保護蓋70。保護蓋70係覆蓋軌道47而與底面32平行地進行配置。藉由保護蓋70而可使底面32平坦,因此將不存在因操作者越過軌道47移動時而損壞軌道47之虞。Further, as shown in FIG. 14, the protective cover 70 can be placed on the rail 47 of the non-driving portion of the transport vehicle 5. The protective cover 70 covers the rail 47 and is disposed in parallel with the bottom surface 32. The bottom surface 32 can be made flat by the protective cover 70, so there will be no damage to the rail 47 as the operator moves over the track 47.
輥式輸送機39可滾動地設置於本體35之上表面,構成搬送車5之支持面。如圖2及圖3所示,輥式輸送機39之輥39a沿著與行駛方向成直角之方向進行排列,藉此可使物品容易沿著左右方向移動。再者,輥式輸送機39由在行駛方向上間離之一對輥列構成。輥式輸送機39之輥39a均為自由輥(無法獨立驅動之輥),且輥列僅構成物品之導向構件。因此,可減輕移載物品時之阻力,故而可適合於移載有重量之物品之情況。如此搬送車5之支持面為由可滾動自如之輥構成之輥式輸送機39,因此於移載物品時可抑制磨耗粉之產生。The roller conveyor 39 is rollably provided on the upper surface of the body 35 to constitute a support surface of the transport vehicle 5. As shown in FIGS. 2 and 3, the rollers 39a of the roller conveyor 39 are arranged in a direction at right angles to the traveling direction, whereby the articles can be easily moved in the left-right direction. Further, the roller conveyor 39 is constituted by a pair of roller rows which are separated from each other in the traveling direction. The rollers 39a of the roller conveyor 39 are all free rollers (rollers that cannot be independently driven), and the roller rows constitute only the guide members of the articles. Therefore, the resistance at the time of transferring the articles can be alleviated, and thus it is suitable for the case where the articles having the weight are transferred. In this way, the support surface of the transport vehicle 5 is a roller conveyor 39 composed of a roll that can be rolled freely, so that generation of abrasion powder can be suppressed when the article is transferred.
推挽移載裝置41為推拉輥式輸送機39之輥列上物品而使其移動之進退裝置。推挽移載裝置41包含可於左右方向伸縮之臂機構51、設置於臂機構51之掛鉤構件53、及使臂機構51上下‧左右‧進退之推挽驅動機構133(圖7)。於圖2所示之狀態下,推挽移載裝置41被配置於較輥式輸送機39而更靠下方處。再者,推挽移載裝置41無需要支持物品之載重,因此構成簡單。因此,可實現搬送車5之輕量化。The push-pull transfer device 41 is an advance/retract device that pushes and moves the articles on the roller row of the roller conveyor 39. The push-pull transfer device 41 includes an arm mechanism 51 that is expandable and contractible in the left-right direction, a hook member 53 that is provided to the arm mechanism 51, and a push-pull drive mechanism 133 (FIG. 7) that moves the arm mechanism 51 up and down. In the state shown in FIG. 2, the push-pull transfer device 41 is disposed below the roller conveyor 39. Moreover, the push-pull transfer device 41 does not need to support the load of the article, and thus the configuration is simple. Therefore, the weight of the transport vehicle 5 can be reduced.
掛鉤構件53包含有自臂機構51之最上段臂進而向左右方向兩側延伸之第1部分53a、及自第1部分53b之端部向上方延伸之第2部分53b。第2部分53b彼此間之左右方向距離係稍長於物品之左右方向長度。The hook member 53 includes a first portion 53a extending from the uppermost arm of the arm mechanism 51 and extending to both sides in the left-right direction, and a second portion 53b extending upward from the end of the first portion 53b. The distance between the second portions 53b in the left-right direction is slightly longer than the length in the left-right direction of the article.
微環境機構43係包含有框體55、一對擋板57及FFU(Fan Filter Unit;風扇過濾單元)59。微環境機構43為用以提高搬送車5中物品之周圍環境之清潔度之機構。框體55設置於本體35之上部及前後而遮蔽既定空間。於框體55之左右兩側形成有開口部,於開口部設置有一對擋板57。擋板57可藉由擋板驅動馬達135(圖7)而進行開閉動作。於圖2所示之狀態下,一對擋板57為自外部遮蔽框體55內之空間。FFU59為用以向框體55內供給清潔空氣之裝置,其藉由FFU驅動馬達137(圖7)而進行驅動。The micro-environment mechanism 43 includes a frame 55, a pair of baffles 57, and an FFU (Fan Filter Unit) 59. The micro-environment mechanism 43 is a mechanism for improving the cleanliness of the surroundings of the articles in the transport vehicle 5. The frame body 55 is disposed on the upper portion and the front and rear of the body 35 to shield the predetermined space. Openings are formed on the left and right sides of the frame 55, and a pair of baffles 57 are provided in the opening. The shutter 57 can be opened and closed by the shutter drive motor 135 (FIG. 7). In the state shown in FIG. 2, the pair of baffles 57 are spaces in the inside of the frame 55 from the outside. The FFU 59 is a device for supplying clean air into the casing 55, and is driven by the FFU drive motor 137 (Fig. 7).
(3)緩衝區(3) Buffer
使用圖2,對緩衝區9(相當於圖4之第1單位緩衝區85、第2單位緩衝區86)之構造進行說明。The structure of the buffer 9 (corresponding to the first unit buffer 85 and the second unit buffer 86 of Fig. 4) will be described with reference to Fig. 2 .
緩衝區9例如於第1小環路11a之內側與兩側部分接近而進行配置。緩衝區9包含有載置台61、輥式輸送機63及微環境機構65。The buffer zone 9 is disposed, for example, on the inner side of the first small loop 11a and on both side portions. The buffer zone 9 includes a mounting table 61, a roller conveyor 63, and a micro-environment mechanism 65.
載置台61具有大致箱形形狀。輥式輸送機63係可滾動地設置於載置台61之上表面,構成緩衝區9之載置面。輥式輸送機63之高度與搬送車5之輥式輸送機39相同。輥式輸送機63之輥沿著與行駛方向成直角之方向進行排列,藉此可使物品容易沿著左右方向移動。再者,輥式輸送機63由在行駛方向間離之一對輥列構成。輥式輸送機63之輥均為自由輥。如此,緩衝區9之載置面為由可滾動自如之輥所構成之輥式輸送機63,因此於移載物品時可抑制磨耗粉產生。The mounting table 61 has a substantially box shape. The roller conveyor 63 is rotatably provided on the upper surface of the mounting table 61 to constitute a mounting surface of the buffer zone 9. The height of the roller conveyor 63 is the same as that of the roller conveyor 39 of the transport vehicle 5. The rollers of the roller conveyor 63 are arranged in a direction at right angles to the traveling direction, whereby the articles are easily moved in the left-right direction. Further, the roller conveyor 63 is constituted by a pair of roller rows in the traveling direction. The rolls of the roller conveyor 63 are all free rolls. In this way, the loading surface of the buffer zone 9 is a roller conveyor 63 composed of a roll that can be rolled freely, so that generation of abrasion powder can be suppressed when the article is transferred.
微環境機構65包含罩蓋67及FFU69。微環境機構65為於緩衝區9中用以提高罩蓋67內、亦即提高物品周圍環境之清潔度之機構。罩蓋67設置於載置台61之上部而遮蔽既定空間。於罩蓋67之軌道側形成有開口部67a(相當於圖4之第1開口部85a、第2開口部86a)。於該實施形態中,罩蓋係僅配置於物品之上方,但罩蓋可僅配置於物品之上方及左右,亦可配置於物品之上方、左右及內面。於該實施形態中,於開口部未設置有擋板,但亦可視需要設置有擋板。FFU69為向框體55內供給清潔空氣以提高所載置物品之周圍清潔度之裝置。FFU69係藉由FFU驅動馬達137(圖7)而進行驅動。The microenvironment mechanism 65 includes a cover 67 and an FFU 69. The microenvironment mechanism 65 is a mechanism for increasing the cleanliness of the environment around the article in the buffer zone 9 in the buffer zone 9. The cover 67 is provided on the upper portion of the mounting table 61 to shield a predetermined space. An opening 67a (corresponding to the first opening 85a and the second opening 86a of FIG. 4) is formed on the rail side of the cover 67. In this embodiment, the cover is disposed only above the article, but the cover may be disposed only above and to the left and right of the article, or may be disposed above, to the left and right, and to the inner surface of the article. In this embodiment, the baffle is not provided in the opening, but a baffle may be provided as needed. The FFU 69 is a device that supplies clean air to the frame 55 to improve the cleanliness of the surrounding articles. The FFU 69 is driven by the FFU drive motor 137 (Fig. 7).
(4)平台(4) Platform
使用圖2,對處理裝置2之平台2a進行說明。平台2a包含載置台71及輥式輸送機73。The platform 2a of the processing device 2 will be described with reference to Fig. 2 . The platform 2a includes a mounting table 71 and a roller conveyor 73.
載置台71具有大致箱形形狀。輥式輸送機73可滾動地設置於載置台71之上表面。輥式輸送機73之輥沿著與行駛方向成直角之方向進行排列,藉此可使物品容易沿著左右方向移動。再者,輥式輸送機73由行駛方向上間離之一對輥列構成。輥式輸送機73之輥均為自由輥。The mounting table 71 has a substantially box shape. The roller conveyor 73 is rollably disposed on the upper surface of the mounting table 71. The rollers of the roller conveyor 73 are arranged in a direction at right angles to the traveling direction, whereby the articles are easily moved in the left-right direction. Further, the roller conveyor 73 is constituted by a pair of roller rows in the traveling direction. The rolls of the roller conveyor 73 are all free rolls.
(5)控制構成(5) Control composition
使用圖6,對搬送車系統1之控制系統120進行說明。圖6係表示搬送車系統之控制系統之方塊圖。The control system 120 of the transport vehicle system 1 will be described with reference to Fig. 6 . Fig. 6 is a block diagram showing a control system of the transport vehicle system.
控制系統120包含製造控制器121、物流控制器123、自動倉庫控制器125及搬送車控制器127。The control system 120 includes a manufacturing controller 121, a logistics controller 123, an automated warehouse controller 125, and a transport vehicle controller 127.
物流控制器123為自動倉庫控制器125及搬送車控制器127之上位控制器。搬送車控制器127係具有管理複數個搬送車5且分配該等搬送指令之分配功能。再者,「搬送指令」包括與行駛有關之指令、及與裝載位置及卸載位置有關之指令。The logistics controller 123 is an upper warehouse controller 125 and a transport vehicle controller 127 upper controller. The transport vehicle controller 127 has a distribution function of managing a plurality of transport vehicles 5 and allocating the transport commands. Further, the "transport command" includes instructions related to driving, and instructions related to the loading position and the unloading position.
製造控制器121可與處理裝置2之間進行通信。處理裝置2將已結束處理之物品之搬送要求(裝載要求‧卸載要求)發送至製造控制器121。Manufacturing controller 121 can communicate with processing device 2. The processing device 2 transmits the transport request (loading request, unloading request) of the processed article to the manufacturing controller 121.
製造控制器121將來自處理裝置2之搬送要求發送至物流控制器123,物流控制器123則將報告發送至製造控制器121。The manufacturing controller 121 transmits the transfer request from the processing device 2 to the logistics controller 123, and the logistics controller 123 transmits the report to the manufacturing controller 121.
物流控制器123當自製造控制器121接收到搬送要求時,在伴隨於自動倉庫7中之入庫或出庫之情形時,以既定之時序將入庫或出庫指令發送至自動倉庫控制器125。而且,自動倉庫控制器125與此相應地將入庫或出庫指令發送至自動倉庫7。物流控制器123當進而自製造控制器121接收搬送要求時,則將其轉換為搬送指令,並對搬送車5進行搬送指令之分配動作。When receiving the transfer request from the manufacturing controller 121, the logistic controller 123 transmits the inbound or outbound command to the automatic warehouse controller 125 at a predetermined timing in the case of the inbound or outbound in the automatic warehouse 7. Moreover, the automated warehouse controller 125 sends the inbound or outbound instructions to the automated warehouse 7 accordingly. When the logistics controller 123 receives the transportation request from the manufacturing controller 121, it converts it into a transportation command, and performs a distribution operation of the transportation command to the transportation vehicle 5.
搬送車控制器127為了作成搬送指令而連續地與各搬送車5進行通信,根據自各搬送車5發送之位置資料獲得其位置資訊。The transport vehicle controller 127 continuously communicates with each transport vehicle 5 in order to create a transport command, and obtains position information based on the position data transmitted from each transport vehicle 5.
使用圖7,對搬送車5之搬送車內控制器129進行說明。圖7係表示搬送車內之控制器之構成之方塊圖。The transport in-vehicle controller 129 of the transport vehicle 5 will be described with reference to Fig. 7 . Fig. 7 is a block diagram showing the configuration of a controller in a transport vehicle.
搬送車內控制器129為由中央處理單元(CPU,Central Processing Unit)、隨機存取記憶體(RAM,Random Access Memory)、唯讀記憶體(ROM,Read Only Memory)等構成而執行程式之電腦。搬送車內控制器129之記憶體中保存有路線圖。搬送車5一面將記載於路線圖之座標及本機之內部座標(藉由編碼器139(下述)所求出之座標)加以比較,一面持續行駛。The in-vehicle controller 129 is a computer that executes programs by a central processing unit (CPU), a random access memory (RAM), a read only memory (ROM), and the like. . A road map is stored in the memory of the in-vehicle controller 129. The transport vehicle 5 continues to travel while comparing the coordinates of the road map and the internal coordinates of the unit (the coordinates obtained by the encoder 139 (described below)).
於搬送車內控制器129連接有行駛馬達131、推挽驅動機構133、擋板驅動馬達135、FFU驅動馬達137及編碼器139。A travel motor 131, a push-pull drive mechanism 133, a shutter drive motor 135, an FFU drive motor 137, and an encoder 139 are connected to the transport in-vehicle controller 129.
(6)搬送車系統之動作(6) Movement of the transport system
使用圖2及圖8~圖13,對搬送車系統1之動作進行說明。圖8~圖13係作為本發明之一實施形態之搬送車系統之部分剖視圖。於圖2之狀態下,搬送車5以載置有物品C1之狀態停止於緩衝區9與處理裝置2之平台2a之間。於平台2a載置有物品C2。自該狀態下,搬送車5將物品C1下降至緩衝區9,而且自平台2a裝載物品C2。以下,對該動作進行詳細說明。The operation of the transport vehicle system 1 will be described with reference to Figs. 2 and 8 to 13 . 8 to 13 are partial cross-sectional views of a transport vehicle system according to an embodiment of the present invention. In the state shown in FIG. 2, the transport vehicle 5 is stopped between the buffer zone 9 and the platform 2a of the processing apparatus 2 in a state in which the article C1 is placed. The article C2 is placed on the platform 2a. From this state, the transport vehicle 5 lowers the article C1 to the buffer zone 9, and loads the article C2 from the platform 2a. Hereinafter, this operation will be described in detail.
自圖2之狀態下,於搬送車5中,驅動擋板驅動馬達135,藉此打開緩衝區9側之擋板57。進而,驅動推挽驅動機構133之升降機構(未圖示)而使臂機構51上升。其結果,掛鉤構件53之第2部分53b被配置於物品C1之左右方向兩側。臂機構51上升後之狀態係於圖8所示。In the state of Fig. 2, in the transport vehicle 5, the shutter driving motor 135 is driven, thereby opening the shutter 57 on the buffer side 9. Further, the lift mechanism (not shown) of the push-pull drive mechanism 133 is driven to raise the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on both sides in the left-right direction of the article C1. The state in which the arm mechanism 51 is raised is as shown in FIG.
自圖8之狀態下,於搬送車5中,驅動推挽驅動機構133之滑動機構(未圖示)而使臂機構51向緩衝區9側滑動。藉此,物品C1被推至掛鉤構件53之第2部分53b而自搬送車5搬送至緩衝區9內。具體而言,物品C1於輥式輸送機39及輥式輸送機63上滑動而移動。物品C1移動後之狀態係於圖9所示。In the state of FIG. 8, in the transport vehicle 5, a slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the buffer area 9. Thereby, the article C1 is pushed to the second portion 53b of the hook member 53, and is transported from the transport vehicle 5 into the buffer zone 9. Specifically, the article C1 slides on the roller conveyor 39 and the roller conveyor 63 and moves. The state after the movement of the article C1 is as shown in FIG.
自圖9之狀態下,於搬送車5中,驅動推挽驅動機構133之升降機構(未圖示)而使臂機構51下降。其結果,掛鉤構件53之第2部分53b被配置於較物品C1之左右方向兩側更靠下方處。其次,驅動推挽驅動機構133之滑動機構(未圖示)而可使臂機構51向搬送車5側滑動。藉此,臂機構51將返回搬送車5內。最後,驅動擋板驅動馬達135,而關閉緩衝區9側之擋板57。關閉擋板57後之狀態係於圖10所示。In the state of Fig. 9, in the transport vehicle 5, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed below the both sides in the left-right direction of the article C1. Next, the slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the transport vehicle 5 side. Thereby, the arm mechanism 51 will return to the inside of the transport vehicle 5. Finally, the shutter drive motor 135 is driven to close the shutter 57 on the buffer side 9. The state after the shutter 57 is closed is shown in FIG.
如上說明般,搬送車5於緩衝區9之側方停止,藉由推挽移載裝置41而使物品於本體35與緩衝區9之間移動。當力自推挽移載裝置41作用於物品時,該物品會於輥式輸送機39及輥式輸送機63上移動。如此,可藉由簡單之構造而移載重量物。As described above, the transport vehicle 5 is stopped on the side of the buffer zone 9, and the article is moved between the main body 35 and the buffer zone 9 by the push-pull transfer device 41. When the force is applied to the article from the push-pull transfer device 41, the article moves on the roller conveyor 39 and the roller conveyor 63. Thus, the weight can be transferred by a simple configuration.
自圖10之狀態下,於搬送車5中,藉由驅動擋板驅動馬達135而打開平台2a側之擋板57。進而,驅動推挽驅動機構133之滑動機構(未圖示)而使臂機構51向緩衝區9側滑動。臂機構51滑動後之狀態係於圖11所示。In the state of Fig. 10, in the transport vehicle 5, the shutter 57 on the side of the platform 2a is opened by driving the shutter drive motor 135. Further, the slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the buffer area 9. The state in which the arm mechanism 51 is slid is shown in FIG.
自圖11之狀態下,於搬送車5中,驅動推挽驅動機構133之升降機構(未圖示)而使臂機構51上升。其結果,掛鉤構件53之第2部分53b被配置於物品C2之左右方向兩側。臂機構51上升後之狀態係於圖12所示。In the state shown in Fig. 11, in the transport vehicle 5, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to raise the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on both sides in the left-right direction of the article C2. The state in which the arm mechanism 51 is raised is as shown in FIG.
自圖12之狀態下,驅動推挽驅動機構133之滑動機構而使臂機構51向搬送車5側滑動。藉此,臂機構51將返回至搬送車5內。又,物品C2會被推至掛鉤構件53之第2部分53b而自平台2a搬送至搬送車5內。具體而言,物品C2將於輥式輸送機73及輥式輸送機39上進行滑動移動。進而,驅動推挽驅動機構133之升降機構(未圖示)而使臂機構51下降。其結果,掛鉤構件53之第2部分53b被配置於較物品C2之左右方向兩側更靠下方處。最後,驅動擋板驅動馬達135而關閉平台2a側之擋板57。關閉擋板57後之狀態係於圖13所示。In the state shown in Fig. 12, the slide mechanism of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the transport vehicle 5 side. Thereby, the arm mechanism 51 returns to the inside of the transport vehicle 5. Further, the article C2 is pushed to the second portion 53b of the hook member 53 and transported from the platform 2a to the transport vehicle 5. Specifically, the article C2 is slidably moved on the roller conveyor 73 and the roller conveyor 39. Further, the lift mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed below the both sides in the left-right direction of the article C2. Finally, the shutter drive motor 135 is driven to close the shutter 57 on the side of the platform 2a. The state after the shutter 57 is closed is shown in FIG.
藉由以上處理,可結束一連串移載動作。By the above processing, a series of transfer actions can be ended.
(7)其他實施形態(7) Other embodiments
以上,已對本發明之一實施形態進行說明,但本發明並不受限於上述實施形態,可於不脫離發明主旨之範圍內進行各種變更。The embodiment of the present invention has been described above, but the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the spirit and scope of the invention.
尤其,本說明書所記載之複數個實施形態及變形例可視需要任意組合。In particular, the plurality of embodiments and modifications described in the present specification may be arbitrarily combined as needed.
(A)於上述實施形態中,係每次各一個地交替設置有分別包含複數個朝向不同側之開口部之第1緩衝區9A與第2緩衝區9B,但本發明並不受限於此種實施形態。(A) In the above embodiment, the first buffer area 9A and the second buffer area 9B each including a plurality of openings facing different sides are alternately provided one at a time, but the present invention is not limited thereto. An embodiment.
緩衝區只要包含在環路內分別朝著環路之兩側部分開放之第1開口部及第2開口部,則可為任何構造。例如,亦可連續配置有一種緩衝區。進而,亦可使用僅包含有一個開口部之緩衝區。亦即,關於緩衝區之形狀及各個緩衝區之連續數量,並不受特別限定。The buffer may have any configuration as long as it includes the first opening and the second opening that are open to the both sides of the loop in the loop. For example, a buffer can be continuously configured. Further, a buffer buffer including only one opening portion may be used. That is, the shape of the buffer zone and the number of consecutive buffers are not particularly limited.
藉由以上構造,緩衝區包含在環路內分別朝著環路之兩側部分開放之第1開口部及第2開口部。因此,於將物品搬入至緩衝區9時,可選擇位於目的地處理裝置2附近並且包含朝著該處理裝置2開放之開口部的緩衝區。以上之結果,可提高物品之搬送效率。According to the above configuration, the buffer includes the first opening and the second opening that are open to the both sides of the loop in the loop. Therefore, when the article is carried into the buffer zone 9, a buffer located near the destination processing device 2 and including the opening portion opened to the processing device 2 can be selected. As a result of the above, the conveying efficiency of the articles can be improved.
(B)於環路內,複數個緩衝區9亦可不配置成直線狀。但是,為了使環路之寬度不會極端過大,較佳為將複數個緩衝區9配置成一行。再者,於將緩衝區9配置成直線狀之情形時,可最小限度地設定環路之寬度。(B) In the loop, the plurality of buffers 9 may not be arranged in a straight line. However, in order to make the width of the loop not extremely excessive, it is preferable to arrange a plurality of buffers 9 in a row. Furthermore, when the buffer zone 9 is arranged in a straight line, the width of the loop can be minimized.
(C)於圖15所示之搬送車系統中,軌道3係除上述實施形態之構造以外,更於第1~第3環路11、13、15中與第4環路17相反側包含第5環路77。(C) In the transport vehicle system shown in FIG. 15, the track 3 includes the structure of the first to third loops 11, 13, and 15 opposite to the fourth loop 17 in addition to the structure of the above-described embodiment. 5 loop 77.
第5環路77係藉由設置第5捷徑連結部79而實現第12小環路77a、第13小環路77b。第12小環路77a藉由複數個連結部81而連結於第1環路11及第2環路13。第13小環路77b藉由連結部83而連結於第3環路15。The fifth loop 77 realizes the twelfth small loop 77a and the thirteenth small loop 77b by providing the fifth shortcut connecting portion 79. The 12th small loop 77a is connected to the first loop 11 and the second loop 13 by a plurality of connecting portions 81. The 13th small loop 77b is connected to the third loop 15 by the connecting portion 83.
第1~第5環路11、13、15、17、77之軌道如上述實施形態中說明般,係收納於底面32之凹部32a內。於該實施形態中,例如平常時,預先於第5環路77之軌道上蓋上保護蓋。藉由配置保護蓋而可使底面32平坦,因此可容易將裝置搬入至第1~第4環路11、13、15、17之間,或者容易自該等之間搬出裝置。又,亦無當操作者越過第5環路77移動時會損壞軌道之虞。而且,例如緊急時,可卸除保護蓋而使搬送車5於第5環路77上行駛。The rails of the first to fifth loops 11, 13, 15, 17, and 77 are housed in the recess 32a of the bottom surface 32 as described in the above embodiment. In this embodiment, for example, a protective cover is attached to the track of the fifth loop 77 in advance. Since the bottom surface 32 can be flattened by arranging the protective cover, the apparatus can be easily carried between the first to fourth loops 11, 13, 15, and 17, or the apparatus can be easily carried out from between. Moreover, there is no possibility that the operator will damage the track when moving over the fifth loop 77. Further, for example, in an emergency, the protective cover can be removed and the transport vehicle 5 can be driven on the fifth loop 77.
於該實施形態中,於第5環路77內未設置有緩衝器。但是,亦可視需要配置有緩衝器。In this embodiment, a buffer is not provided in the fifth loop 77. However, a buffer can also be configured as needed.
(D)使用圖16~圖19,對提高緩衝器之物品收容能力之其他實施形態進行說明。圖16係採用本發明之進而其他實施形態之搬送車系統之部分剖視圖。圖17係載置台之模式平面圖。圖18係載置台之部分側視圖。圖19係搬送車系統之部分剖視圖。(D) Another embodiment for improving the article accommodating ability of the damper will be described with reference to Figs. 16 to 19 . Fig. 16 is a partial cross-sectional view showing a transport vehicle system according to still another embodiment of the present invention. Figure 17 is a schematic plan view of the mounting table. Figure 18 is a partial side view of the mounting table. Figure 19 is a partial cross-sectional view of the transport vehicle system.
如圖16及圖17所示,緩衝器91包含輥式輸送機93及支持機構95。As shown in FIGS. 16 and 17, the damper 91 includes a roller conveyor 93 and a support mechanism 95.
輥式輸送機93與上述實施形態相同,但於各輥93a之間係確保既定空隙。輥式輸送機93更包括對輥93a進行支持之支持部93b、支柱93c及支持棒93d。支持部93b為直接對輥93a進行支持之部分,沿著輥93a所經排列之方向延伸。支持部93b可旋轉自如地對輥93a中與其他輥列相對向之側之端部進行支持。支柱93c係將支持部93b維持為既定高度。支持棒93d係自支柱93c傾斜地延伸而可旋轉自如地對輥93a中與其他輥列相反側之端部進行支持。亦即,於輥93a中與其他輥列相反側並未設置有支柱。The roller conveyor 93 is the same as that of the above embodiment, but a predetermined gap is secured between the rollers 93a. The roller conveyor 93 further includes a support portion 93b that supports the roller 93a, a support post 93c, and a support rod 93d. The support portion 93b is a portion that directly supports the roller 93a and extends in the direction in which the rollers 93a are arranged. The support portion 93b rotatably supports the end portion of the roller 93a on the side opposite to the other roller row. The pillar 93c maintains the support portion 93b at a predetermined height. The support rod 93d is slidably extended from the support post 93c, and rotatably supports the end portion of the roller 93a opposite to the other roller row. That is, no pillars are provided on the opposite side of the roller 93a from the other roller rows.
支持機構95為用以使輥式輸送機93上之物品向較輥式輸送機93更靠上方處移動之機構,其包含支持構件97及驅動機構。支持構件97為沿著上下方向分別通過一對輥式輸送機93而可支持物品之一對構件,如圖17所示,其包含底框 101及自底框101延伸之複數個較細之支持部103。各底框101被配置於各輥式輸送機93之前後方向外側,沿著輥式輸送機93之各輥93a所經排列之方向延伸。如圖16及圖17所示,複數個支持部103於輥式輸送機93之輥93a之間延伸。支持部103之上表面為平坦面,其被配置於較輥93a之上表面更靠下方處。驅動機構為用以驅動支持構件97之機構,包含支柱105、升降馬達(未圖示)及鏈條(未圖示)。支柱105例如設置於四角而沿著上下方向延伸,如圖18所示,可上下移動地對支持構件97之底框101之兩端進行支持。升降馬達(未圖示)可經由鏈條(未圖示)而使支持構件97上下移動。The support mechanism 95 is a mechanism for moving the articles on the roller conveyor 93 to a position higher than the roller conveyor 93, and includes a support member 97 and a drive mechanism. The support member 97 is a member capable of supporting one of the articles by a pair of roller conveyors 93 in the up and down direction, as shown in FIG. 17, which includes the bottom frame. 101 and a plurality of thinner support portions 103 extending from the bottom frame 101. Each of the bottom frames 101 is disposed on the outer side in the front-rear direction of each of the roller conveyors 93, and extends in the direction in which the rollers 93a of the roller conveyor 93 are arranged. As shown in FIGS. 16 and 17, a plurality of support portions 103 extend between the rollers 93a of the roller conveyor 93. The upper surface of the support portion 103 is a flat surface which is disposed below the upper surface of the roller 93a. The drive mechanism is a mechanism for driving the support member 97, and includes a support 105, a lift motor (not shown), and a chain (not shown). The pillars 105 are provided at four corners and extend in the vertical direction, for example, and support both ends of the bottom frame 101 of the support member 97 so as to be movable up and down as shown in FIG. The lift motor (not shown) can move the support member 97 up and down via a chain (not shown).
於該實施形態中,支柱105可較高地延伸,伴隨於此,緩衝器91之罩蓋67之頂棚部亦會增高,進而頂棚面34中與緩衝器91相對應之部分亦將增高。In this embodiment, the support post 105 can be extended relatively high, and as a result, the ceiling portion of the cover 67 of the damper 91 is also increased, and the portion of the ceiling surface 34 corresponding to the damper 91 is also increased.
於該搬送車系統中,於將物品放置於輥式輸送機93上後,升降馬達(未圖示)捲起鏈條(未圖示),藉此使支持構件97上升。如此,則複數個支持部103將通過輥式輸送機93之輥93a之間而向上方移動。藉此,如圖18所示,支持構件97之支持部103將提拉物品C,由此使物品C間離輥式輸送機93之輥93a。最終,如圖19所示,物品C藉由複數個支持部103而受支持於緩衝器91內之最高位置。於該狀態下,於輥式輸送機93上確保可搬入下一物品之空間。如此方式,可將2個物品搬入至緩衝區91內。亦即,緩衝區91之物品收容能力將提高。In the transport vehicle system, after the article is placed on the roller conveyor 93, a lifting motor (not shown) winds up a chain (not shown), thereby raising the support member 97. In this manner, the plurality of support portions 103 move upward between the rollers 93a of the roller conveyor 93. Thereby, as shown in FIG. 18, the support portion 103 of the support member 97 pulls the article C, thereby moving the article C away from the roller 93a of the roller conveyor 93. Finally, as shown in FIG. 19, the article C is supported by the plurality of support portions 103 at the highest position in the buffer 91. In this state, the space on which the next article can be carried is secured on the roller conveyor 93. In this way, two items can be carried into the buffer zone 91. That is, the capacity of the contents of the buffer zone 91 will increase.
再者,用以提拉物品之支持構件之形狀並不受限於上述實施形態。支持構件亦可例如為梯子形狀。Further, the shape of the supporting member for pulling the article is not limited to the above embodiment. The support member can also be, for example, a ladder shape.
(E)本體35之輥式輸送機39與緩衝區9之輥式輸送機63之高度於移載物品C時相同即可。亦即,任一面或兩個面均可變更高度,搬送車5之行駛中或停止中兩個面之高度亦可不同。(E) The roller conveyor 39 of the main body 35 and the roller conveyor 63 of the buffer zone 9 may be the same as when the article C is transferred. That is, the height can be changed on either or both sides, and the heights of the two faces of the transporting vehicle 5 during traveling or stopping can be different.
(F)於上述實施形態中,將環路內之緩衝區配置成一行,但本發明並不限定於此種實施形態。例如,亦可於環路內配置有兩行緩衝區。(F) In the above embodiment, the buffers in the loop are arranged in a row, but the present invention is not limited to such an embodiment. For example, a two-line buffer can also be configured in the loop.
本發明係可廣泛應用於包含可於複數個處理裝置之間沿著軌道行駛之搬送車之搬送車系統。The present invention is widely applicable to a transport vehicle system including a transport vehicle that can travel along a track between a plurality of processing devices.
1...搬送車系統1. . . Transport system
2...處理裝置2. . . Processing device
2a...平台2a. . . platform
3...軌道3. . . track
4...檢查裝置4. . . Inspection device
5...搬送車5. . . Transport car
7...自動倉庫7. . . Automatic warehouse
9...緩衝區9. . . Buffer
9A...第1緩衝區9A. . . 1st buffer
9B...第2緩衝區9B. . . 2nd buffer
11...第1環路11. . . First ring
11a...第1小環路11a. . . First small loop
11b...第2小環路11b. . . Second small loop
11c...第3小環路11c. . . Third small loop
13...第2環路13. . . Second loop
13a...第4小環路13a. . . 4th small loop
13b...第5小環路13b. . . Fifth small loop
13c...第6小環路13c. . . 6th small loop
15...第3環路15. . . Third loop
15a...第7小環路15a. . . 7th small loop
15b...第8小環路15b. . . 8th small loop
15c...第9小環路15c. . . 9th small loop
17...第4環路17. . . 4th ring road
17a...第10小環路17a. . . 10th small loop
17b...第11小環路17b. . . 11th small loop
19...第1捷徑用連結部19. . . The first shortcut connection part
21...第2捷徑用連結部twenty one. . . The second shortcut link
23...第3捷徑用連結部twenty three. . . The third shortcut link
25...第4捷徑用連結部25. . . The fourth shortcut link
27...連結部27. . . Linkage
28...連結部28. . . Linkage
29...連續處理裝置29. . . Continuous processing device
29a...第1處理裝置29a. . . First processing device
29b...第2處理裝置29b. . . Second processing device
31...第1平台31. . . First platform
32...底面32. . . Bottom
32a...凹部32a. . . Concave
33...第2平台33. . . Second platform
34...頂棚面34. . . Ceiling surface
35...本體(支持台)35. . . Ontology (support desk)
36...入口平台36. . . Entrance platform
37‧‧‧行駛部37‧‧‧Driving Department
38‧‧‧出口平台38‧‧‧Export platform
39‧‧‧輥式輸送機(支持面)39‧‧‧Roller conveyor (support surface)
39a‧‧‧輥39a‧‧‧ Roll
41‧‧‧推挽移載裝置41‧‧‧Push-pull transfer device
43‧‧‧微環境機構43‧‧‧Micro-environmental institutions
45‧‧‧車輪45‧‧‧ Wheels
47‧‧‧軌道47‧‧‧ Track
51‧‧‧臂機構51‧‧‧ Arm mechanism
53‧‧‧掛鉤構件53‧‧‧ hook components
53a‧‧‧第1部分53a‧‧‧Part 1
53b‧‧‧第2部分53b‧‧‧Part 2
55‧‧‧框體55‧‧‧ frame
57‧‧‧擋板57‧‧‧Baffle
59‧‧‧FFU(清潔裝置)59‧‧‧FFU (cleaning device)
61‧‧‧載置台61‧‧‧ mounting table
63‧‧‧輥式輸送機(載置面)63‧‧‧Roller conveyor (mounting surface)
65‧‧‧微環境機構65‧‧‧Micro-environmental institutions
67‧‧‧罩蓋67‧‧‧ Cover
67a‧‧‧開口部67a‧‧‧ Opening
69‧‧‧FFU69‧‧‧FFU
70‧‧‧保護蓋70‧‧‧ protective cover
71‧‧‧載置台71‧‧‧ mounting table
73‧‧‧輥式輸送機73‧‧‧Roller conveyor
77‧‧‧第5環路77‧‧‧5th Ring Road
77a‧‧‧第12小環路77a‧‧12th small loop
77b‧‧‧第13小環路77b‧‧‧13th small loop
79‧‧‧第5捷徑用連結部79‧‧‧5th shortcut link
81‧‧‧連結部81‧‧‧Link Department
83‧‧‧連結部83‧‧‧Connecting Department
85‧‧‧第1單位緩衝器85‧‧‧1st unit buffer
85a‧‧‧第1開口部85a‧‧‧1st opening
86‧‧‧第2單位緩衝器86‧‧‧2nd unit buffer
86a‧‧‧第2開口部86a‧‧‧2nd opening
89‧‧‧旁路線89‧‧‧ Bypass line
91‧‧‧緩衝器91‧‧‧buffer
93‧‧‧輥式輸送機93‧‧‧Roller conveyor
93a‧‧‧輥93a‧‧‧roll
93b‧‧‧支持部93b‧‧‧Support Department
93c‧‧‧支柱93c‧‧‧ pillar
93d‧‧‧支持棒93d‧‧‧Support bar
95‧‧‧支持機構95‧‧‧Support institutions
97‧‧‧支持構件97‧‧‧Support components
101‧‧‧底框101‧‧‧ bottom frame
103‧‧‧支持部103‧‧‧Support Department
105‧‧‧支柱105‧‧‧ pillar
120‧‧‧控制系統120‧‧‧Control system
121‧‧‧製造控制器121‧‧‧Manufacture controller
123‧‧‧物流控制器123‧‧‧Logistics controller
125‧‧‧自動倉庫控制器125‧‧‧Automatic Warehouse Controller
127‧‧‧搬送車控制器127‧‧‧Transporter controller
129‧‧‧搬送車內控制器129‧‧‧Transporting in-vehicle controller
131‧‧‧行駛馬達131‧‧‧Travel motor
133‧‧‧推挽驅動機構133‧‧‧Push-pull drive mechanism
135‧‧‧擋板驅動馬達135‧‧‧Baffle drive motor
137‧‧‧FFU驅動馬達137‧‧‧FFU drive motor
139‧‧‧編碼器139‧‧‧Encoder
C、C1、C2‧‧‧物品C, C1, C2‧‧‧ items
圖1係採用本發明一實施形態之搬送車系統之模式平面圖。Fig. 1 is a schematic plan view showing a transport vehicle system according to an embodiment of the present invention.
圖2係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 2 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖3係搬送車之模式平面圖。Figure 3 is a schematic plan view of the transport vehicle.
圖4係圖1之部分放大圖。Figure 4 is a partial enlarged view of Figure 1.
圖5係表示軌道之變形例之搬送車系統之部分模式平面圖。Fig. 5 is a partial schematic plan view showing a transport vehicle system in a modified example of a rail.
圖6係表示搬送車系統之控制系統之方塊圖。Fig. 6 is a block diagram showing a control system of the transport vehicle system.
圖7係表示搬送車內控制器之構成之方塊圖。Fig. 7 is a block diagram showing the configuration of a controller for transporting a vehicle.
圖8係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 8 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖9係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 9 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖10係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 10 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖11係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 11 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖12係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 12 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖13係作為本發明一實施形態之搬送車系統之部分剖視圖。Fig. 13 is a partial cross-sectional view showing a transport vehicle system according to an embodiment of the present invention.
圖14係用以說明在軌道上放置有保護蓋之狀態之搬送車系統之部分剖視圖。Fig. 14 is a partial cross-sectional view showing the transport vehicle system in a state in which a protective cover is placed on a rail.
圖15係採用本發明其他實施形態之搬送車系統之模式平面圖。Fig. 15 is a schematic plan view showing a transport vehicle system according to another embodiment of the present invention.
圖16係採用本發明進而其他實施形態之搬送車系統之部分剖視圖。Fig. 16 is a partial cross-sectional view showing a transport vehicle system according to another embodiment of the present invention.
圖17係載置台之模式平面圖。Figure 17 is a schematic plan view of the mounting table.
圖18係載置台之部分側視圖。Figure 18 is a partial side view of the mounting table.
圖19係搬送車系統之部分剖視圖。Figure 19 is a partial cross-sectional view of the transport vehicle system.
2a...平台2a. . . platform
3...軌道3. . . track
5...搬送車5. . . Transport car
9...緩衝區9. . . Buffer
32...底面32. . . Bottom
32a...凹部32a. . . Concave
34...頂棚面34. . . Ceiling surface
35...本體(支持台)35. . . Ontology (support desk)
37...行駛部37. . . Driving department
39...輥式輸送機(支持面)39. . . Roller conveyor (support surface)
41...推挽移載裝置41. . . Push-pull transfer device
43...微環境機構43. . . Microenvironment agency
45...車輪45. . . wheel
47...軌道47. . . track
51...臂機構51. . . Arm mechanism
53...掛鉤構件53. . . Hook member
53a...第1部分53a. . . part 1
53b...第2部分53b. . . part 2
55...框體55. . . framework
57...擋板57. . . Baffle
59...FFU(清潔裝置)59. . . FFU (cleaning device)
61...載置台61. . . Mounting table
63...輥式輸送機(載置面)63. . . Roller conveyor (mounting surface)
65...微環境機構65. . . Microenvironment agency
67...罩蓋67. . . Cover
67a...開口部67a. . . Opening
69...FFU69. . . FFU
71...載置台71. . . Mounting table
73...輥式輸送機73. . . Roller conveyor
C1、C2...物品C1, C2. . . article
Claims (3)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010038081A JP2011173478A (en) | 2010-02-24 | 2010-02-24 | Carrier system |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201139239A TW201139239A (en) | 2011-11-16 |
TWI465359B true TWI465359B (en) | 2014-12-21 |
Family
ID=44462949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100102076A TWI465359B (en) | 2010-02-24 | 2011-01-20 | Transport system |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2011173478A (en) |
KR (1) | KR101398929B1 (en) |
CN (1) | CN102161434A (en) |
TW (1) | TWI465359B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9365347B2 (en) | 2012-09-06 | 2016-06-14 | Murata Machinery, Ltd. | Transfer device |
CN104960835B (en) * | 2015-06-25 | 2017-05-17 | 渤海现代物流股份有限公司 | storage monitoring platform |
CN114132676A (en) * | 2017-03-20 | 2022-03-04 | 伯克希尔格雷股份有限公司 | System and method for processing objects including an automated shuttle system |
WO2019230046A1 (en) * | 2018-05-31 | 2019-12-05 | 村田機械株式会社 | Conveyance system |
CN109677931B (en) * | 2019-02-21 | 2024-03-26 | 安徽银锐智能科技股份有限公司 | Automatic change buffer memory system of glass production line |
CN113200066B (en) * | 2021-05-08 | 2023-01-24 | 中铁四局集团电气化工程有限公司 | Intelligent cargo transportation device based on subway rail transit |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6612797B1 (en) * | 1999-05-18 | 2003-09-02 | Asyst Technologies, Inc. | Cassette buffering within a minienvironment |
JP2003300604A (en) * | 2002-04-09 | 2003-10-21 | Murata Mach Ltd | Automated warehouse |
US20040109746A1 (en) * | 2002-12-09 | 2004-06-10 | Murata Kikai Kabushiki Kaisha | Overhead travelling carriage system |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149713A (en) * | 1984-08-17 | 1986-03-11 | Kawasaki Steel Corp | Method for grinding work roll in rolling mill |
JPH0237763Y2 (en) * | 1984-09-04 | 1990-10-12 | ||
JP2000316206A (en) * | 1999-04-28 | 2000-11-14 | Shinko Electric Co Ltd | Track inspection bogie |
KR20040055790A (en) * | 2001-10-22 | 2004-06-26 | 케스케이드 엔지니어링 인코퍼레이티드 | Individual transport control and communication system |
CN100353270C (en) * | 2003-08-29 | 2007-12-05 | 神钢电机株式会社 | Conveying system |
JP4513019B2 (en) * | 2005-12-09 | 2010-07-28 | 村田機械株式会社 | Transport system |
JP2008265543A (en) * | 2007-04-20 | 2008-11-06 | Hitachi Plant Technologies Ltd | Automated guided vehicle |
JP2009053937A (en) * | 2007-08-27 | 2009-03-12 | Asyst Technologies Japan Inc | Conveyance system and method for controlling conveyance system |
-
2010
- 2010-02-24 JP JP2010038081A patent/JP2011173478A/en active Pending
- 2010-11-12 CN CN2010105475795A patent/CN102161434A/en active Pending
- 2010-11-12 KR KR1020100112580A patent/KR101398929B1/en not_active IP Right Cessation
-
2011
- 2011-01-20 TW TW100102076A patent/TWI465359B/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6612797B1 (en) * | 1999-05-18 | 2003-09-02 | Asyst Technologies, Inc. | Cassette buffering within a minienvironment |
JP2003300604A (en) * | 2002-04-09 | 2003-10-21 | Murata Mach Ltd | Automated warehouse |
US20040109746A1 (en) * | 2002-12-09 | 2004-06-10 | Murata Kikai Kabushiki Kaisha | Overhead travelling carriage system |
Also Published As
Publication number | Publication date |
---|---|
KR101398929B1 (en) | 2014-05-30 |
KR20110097598A (en) | 2011-08-31 |
JP2011173478A (en) | 2011-09-08 |
TW201139239A (en) | 2011-11-16 |
CN102161434A (en) | 2011-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI466809B (en) | Transport system | |
TWI468328B (en) | Automatic warehouse | |
TWI546238B (en) | Article transport facility | |
US11390461B2 (en) | Automated storage and retrieval system, a method of operating the system and a multi trolley vehicle | |
CN112218806B (en) | Storage system | |
TWI465359B (en) | Transport system | |
JP4967318B2 (en) | Stocker | |
TWI531514B (en) | Conveyance systems and transport systems | |
TWI525026B (en) | Handling system and handling method | |
EP3863949A1 (en) | Access station for picking storage containers | |
US20070013642A1 (en) | System for transferring flat panel display substrates during manufacture | |
TW201619027A (en) | Temporary storage system, conveyance system using same, and temporary storage method | |
TWI763871B (en) | Transport system and transport method | |
CN112272643B (en) | Container access station with lifting device | |
KR20090026099A (en) | Storage, transporting system and storage set | |
KR102620121B1 (en) | Article transport apparatus and article transport facility | |
TW201940396A (en) | Stocker system | |
CN108290687B (en) | Storage device and transport system | |
TW200904728A (en) | Article storage device | |
TW202233466A (en) | Overhead storage system | |
JP2003309163A (en) | Unmanned carrier system | |
US12049360B2 (en) | Automated storage and retrieval system, a method of operating the system and a multi trolley vehicle | |
TW202417353A (en) | Article transport facility | |
JP3295066B2 (en) | Multi-stage multilevel parking device | |
JP2008162795A (en) | Automated warehouse system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |