TW200541396A - Flat panel display and manufacturing method thereof, and device for shaving outer part - Google Patents

Flat panel display and manufacturing method thereof, and device for shaving outer part Download PDF

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Publication number
TW200541396A
TW200541396A TW094118342A TW94118342A TW200541396A TW 200541396 A TW200541396 A TW 200541396A TW 094118342 A TW094118342 A TW 094118342A TW 94118342 A TW94118342 A TW 94118342A TW 200541396 A TW200541396 A TW 200541396A
Authority
TW
Taiwan
Prior art keywords
outside
nozzle
solution
glass substrate
external
Prior art date
Application number
TW094118342A
Other languages
English (en)
Chinese (zh)
Other versions
TWI296897B (ko
Inventor
Shintaro Yanagisawa
Original Assignee
Song Gi Hun
Shintaro Yanagisawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Song Gi Hun, Shintaro Yanagisawa filed Critical Song Gi Hun
Publication of TW200541396A publication Critical patent/TW200541396A/zh
Application granted granted Critical
Publication of TWI296897B publication Critical patent/TWI296897B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electroluminescent Light Sources (AREA)
  • Surface Treatment Of Glass (AREA)
TW094118342A 2004-06-03 2005-06-03 Flat panel display and manufacturing method thereof, and device for shaving outer part TW200541396A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004166256 2004-06-03

Publications (2)

Publication Number Publication Date
TW200541396A true TW200541396A (en) 2005-12-16
TWI296897B TWI296897B (ko) 2008-05-11

Family

ID=37289255

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118342A TW200541396A (en) 2004-06-03 2005-06-03 Flat panel display and manufacturing method thereof, and device for shaving outer part

Country Status (2)

Country Link
KR (2) KR100630809B1 (ko)
TW (1) TW200541396A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110231725A (zh) * 2019-05-20 2019-09-13 深圳市华星光电半导体显示技术有限公司 一种微影玻璃薄化的方法及其控制***

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100824544B1 (ko) * 2006-09-18 2008-04-23 (주)에스티아이 식각 장치 및 식각방법
KR101300524B1 (ko) * 2006-09-19 2013-09-02 (주)에스티아이 식각장치 및 식각방법
KR101387711B1 (ko) * 2007-04-10 2014-04-23 에프엔에스테크 주식회사 평판디스플레이 유리기판 에칭장치
KR101240959B1 (ko) * 2011-06-22 2013-03-11 주식회사 이코니 에칭액 분사를 위한 노즐을 포함하는 에칭액 공급장치 및 유리기판 에칭 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63249306A (ja) * 1987-04-04 1988-10-17 Sumitomo Electric Ind Ltd 超電導マグネツト
JPH0297688A (ja) * 1988-10-03 1990-04-10 Matsushita Electric Works Ltd エッチング方法
KR0180850B1 (ko) * 1996-06-26 1999-03-20 구자홍 유리기판 에칭장치
KR100237207B1 (ko) 1997-06-19 2000-01-15 구자홍 Pdp용 식각 시스템 및 식각 방법
KR100314225B1 (ko) 1999-10-14 2001-11-15 박용석 유리기판 또는 웨이퍼 처리용 분사장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110231725A (zh) * 2019-05-20 2019-09-13 深圳市华星光电半导体显示技术有限公司 一种微影玻璃薄化的方法及其控制***
CN110231725B (zh) * 2019-05-20 2022-03-08 深圳市华星光电半导体显示技术有限公司 一种微影玻璃薄化的方法及其控制***

Also Published As

Publication number Publication date
TWI296897B (ko) 2008-05-11
KR20050115194A (ko) 2005-12-07
KR100630809B1 (ko) 2006-10-02
KR100695576B1 (ko) 2007-03-14
KR20060092174A (ko) 2006-08-22

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