TW200411512A

TW200411512A - System for managing worker, device for managing worker, and method for managing worker

Info

Publication number: TW200411512A
Application number: TW092130246A
Authority: TW
Inventors: Kenya Iwasaki; Hiroshi Nishikawa
Original assignee: Tokyo Electron Ltd
Priority date: 2002-10-29
Filing date: 2003-10-29
Publication date: 2004-07-01
Also published as: WO2004040388A1; TWI311288B; CN1708738A; AU2003280595A1; JPWO2004040388A1; CN100440088C

Abstract

A system for managing workers comprises: a factory (100) divided into a plurality of work areas depending on the content of a work, a data base (220) for storing work-specific information associating each work area (112), or the like, with the content of a work being done thereat, and worker sensors (130) provided in respective work areas. A work area where a worker is present is specified based on the output from the worker detecting means, and the work being done currently by that worker is specified from the work area of the specified worker based on the work-specific information in the work specific information database. Based on the current work thus specified, a decision is made for that worker whether to continue the current work or to do a new work, and execution of work is designated for that worker depending on the decision results. Specification of a work being done currently by the worker, allocation of a new work, re-allocation of a work, and the like, are thereby facilitated and the work efficiency of each worker can be enhanced by posting the right worker in the right place.

Description

200411512 (1) 玖、發明說明【發明所屬之技術領域】本發明係有關於作業者管理系統，作業者管理裝置及作業者管理方法。【先前技術】200411512 (1) (ii) Description of the invention [Technical field to which the invention belongs] The present invention relates to an operator management system, an operator management device, and an operator management method. [Prior art]

在例如在半導體製造工廠等作業場中，包含設置有半導體製造裝置等之無塵室之裝置室，且各式各樣的區域發生各式各樣的作業。例如在無塵室中在裝置室外發生之用以生產半導體裝置的輸入作業、在裝置室內發生之半導體製造裝置的障礙對應作業、而在無塵室外仍會發生例如保管庫之零件管理作業等。隨著這些作業不同，進行該作業所需的技能亦有所不同，故經常需要具有各種技能的作業者。For example, in a work place such as a semiconductor manufacturing plant, an equipment room including a clean room such as a semiconductor manufacturing device is installed, and various operations are performed in various areas. For example, an input operation for producing a semiconductor device takes place outside the device in a clean room, an obstacle response operation of a semiconductor manufacturing device occurs inside the device room, and a part management operation such as a maintenance warehouse still occurs outside the clean room. As these tasks are different, the skills required to perform the tasks are also different, so operators with various skills are often required.

但是，要管理這些具有各種技能之作業者並不容易，一旦作業的分配效率不佳則每位作業者的作業效率亦會降低。因此，如何將作業者適才適用地配置來提高各作業者的作業效率是一課題。因此，雖然在必要的時機、選擇最適合該項作業的作業者並發出指示是最爲理想，但實際上卻有困難。例如，當作業者正在進行作業之期間卻發生新的作業時，就無法項該作業者發出進行新作業之指示。此時，若無法掌握作業者現在正在進行之作業’則亦無法判斷是否令其中斷現在之作業來進行新的作業。又’亦可考慮找其 -5- (2) (2)200411512 他替代作業者來進行新的作業，可是，這只限於具有新作業進行所需之技能的作業者目前手上有空才行。因此，必須要先將作業者現在正在進行之作業加以特定。但在此同時，半導體製造工廠等中發生的上述作業的種類繁多，要特定各作業者正在進行之作業是極爲困難的事。爲了進行作業之特定，例如日本特開平8 - 1 07096中所示，若能事先決定能夠以密碼按照作業種類分別輸入至操作面板的畫面之人，則可藉由密碼而可在某種程度上特定出哪個作業者正在進行什麼作業。又亦可爲操作員只能進行操作用畫面的輸入，工程師則可藉由密碼而進行工程師用畫面的輸入。但是，此種技術中，只能了解這些叫做操作員、工程師的作業者的種類（作業者分類），而無法針對特定作業者正在進行哪個作業而偵測。這一點，若是事先按作業者別來決定好ID，而令其先輸入作業者ID再操作操作面板之畫面’就可偵測到擁有該作業者ID的作業者正在進行 •哪個作業，這亦是可被思及。但是，此種作業者ID的輸入中’對於不進行畫面輸入等之操作的作業，就無法特定該作業，是爲其問題點。另一方面，每當作業者進行作業時，若要求其將作業內容輸入操作面板之畫面等以留下記錄，則可特定各作業者之作業。但是，要求所有作業者在每當進行作業時都輸入作業內容是很煩瑣的，甚至亦可能反而降低作業效率。尤其是當火災或障礙等緊急時，作業者必須要儘可能地快 -6 - (3) (3)200411512 速採取障礙對應作業等，因此爲了作業者管理而強制其輸入作業內容並不適切。但是，在半導體製造工廠等中，有無塵室內外、裝置室內外等爲數眾多之作業區域，因此可以思及的是，可藉由該作業區域來做某種程度作業特定。因此，本案發明人想出只要能特定作業者所身處的區域，就能特定該作業者的作業。本發明，係有鑑於此種根據半導體製造工廠等的作業區域而能某種程度地特定其作業之領域的性質而提出之發明。於是，本發明係有鑑於以上問題，其目的在於，提供一種作業者管理系統、作業者管理裝置及作業者管理方法，使得作業者現在正在進行之作業的特定、新作業的分配、作業之再分配等能更容易，而可適才適用地指示作業者，並提高各作業者的作業效率。【發明內容】爲了解決上記課題，根據本發明的第1觀點，則可提供一種作業者管理系統’其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特疋貝日?1加以日3彳思的作業特疋資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特 (4) 200411512 定資訊’由則記作業者位置彳寸足手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段；及根據則冗現在作業特定手段所特定出之現在作業·判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段；及按照前記判斷手段的判斷結果，對該作業者發出作業實行指示的指示手段。若根據此種本發明之作業者管理系統，則可偵測作業者的所在區域（場所），並由該區域所被賦予關連之作業而能輕易偵測該作業者現在正在進行之作業。爲此，例如當新作業發生時，可使該新作業的分配、作業之再分配等更容易，可使作業者才適才適所地進行作業，而可提高各作業者的作業效率。又，因爲也節省了作業者輸入作業內容的時間和手續，故提升作業者之作業效率。爲了解決上記課題，若根據本發明的其他觀點，則可提供一種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段；及將前記各作業者和該各作業者可進行之 -8- (5) 1200411512However, it is not easy to manage these operators with various skills, and once the efficiency of assignment is not good, the efficiency of each operator will decrease. Therefore, it is a problem how to appropriately arrange the workers to improve the work efficiency of each worker. Therefore, although it is ideal to select the operator who is most suitable for the job at the right time and give instructions, it is actually difficult. For example, when a new operation occurs while the operator is working, the operator cannot issue an instruction to perform a new operation. At this time, if the operator is unable to grasp the work currently being performed by the operator ', it is also impossible to determine whether to interrupt the current work to perform a new operation. You can also consider finding him-5- (2) (2) 200411512 He replaces the operator to perform new operations, but this is only limited to those who have the skills required to perform the new operations. . Therefore, it is necessary to specify what the operator is currently doing. However, at the same time, there are many types of the above-mentioned operations occurring in semiconductor manufacturing plants and the like, and it is extremely difficult to specify the operations being performed by each operator. In order to specify the work, for example, as shown in Japanese Patent Application Laid-Open No. 8-1 07096, if a person who can input the password to the screen of the operation panel according to the type of work can be determined in advance, the password can be used to some extent. Identify which operator is doing what. It is also possible that the operator can only input the screen for operation, and the engineer can input the screen for the engineer through the password. However, in this technique, only the types of operators (operator classification) called operators and engineers can be understood, and it is impossible to detect which operation a particular operator is performing. In this regard, if the ID is determined according to the operator's type in advance, and the operator enters the operator ID first and then operates the screen of the operation panel, then it can be detected which operator has the operator ID and which operation it is. Can be thought of. However, in the case of inputting the operator ID ', it is impossible to specify the operation for operations that do not perform screen input or the like, which is a problem. On the other hand, each time an operator performs an operation, if it is required to input the operation content into the screen of the operation panel or the like to leave a record, the operation of each operator can be specified. However, it is cumbersome to require all operators to input the content of the work whenever they perform the work, and it may even reduce the work efficiency. Especially when there is an emergency such as a fire or an obstacle, the operator must take obstacle response work as quickly as possible. (6) (3) 200411512 It is not appropriate to force the operator to enter the operation content for the sake of operator management. However, in semiconductor manufacturing plants and the like, there are a large number of work areas such as clean indoors and indoors, and indoors and outdoor installations. Therefore, it is conceivable that the work area can be used to perform a certain degree of work specificity. Therefore, the inventors of the present invention have come up with the idea that the operator's work can be specified as long as the area where the operator is located can be specified. The present invention has been made in view of the nature of the field in which a semiconductor manufacturing plant or the like can be operated to a certain degree. Therefore, the present invention has been made in view of the above problems, and an object thereof is to provide an operator management system, an operator management device, and an operator management method, so that the operator is currently specifying a job, assigning a new job, and re-running the job. Distribution and the like can be made easier, and operators can be appropriately and appropriately instructed, and the work efficiency of each operator can be improved. [Summary of the Invention] In order to solve the above-mentioned problem, according to the first aspect of the present invention, a worker management system may be provided, including: a work field divided into a plurality of work areas according to the work content; and each work of the previous work field Area and the work performed in each work area to give the relevant work special day to day, 1 day to 3 days of special work information storage means; and operator detection means set in each work area in the previous note; and based on Output of preamble operator detection means, specific operator position specific means in which work area the preamble operator is located in; and operating characteristics based on the specific information memorization means of the preparatory work (4) 200411512 Defining information 'by the operator position The working area of the operator specified by the sufficient means, the current operation specific means of the operation that the operator is currently performing; and the current operation specified by the redundant current operation specific means. The method of judging whether the operation is continuing or making it perform a new operation; and Note determination result of the determination means, the means instructs the job execution instruction of the operator. According to the operator management system of the present invention, the area (place) where the operator is located can be detected, and the related operations assigned to the area can be used to easily detect the operation that the operator is currently performing. For this reason, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, etc. can be made easier, the operator can perform the job appropriately, and the work efficiency of each operator can be improved. In addition, it also saves the time and procedures for the operator to input the work content, thereby improving the work efficiency of the operator. In order to solve the above-mentioned problem, according to another aspect of the present invention, an operator management system may be provided, including: a work area divided into a plurality of work areas according to work contents; and each work area of the pre-work area and the work area. Operation-specific information storage means for storing operation-specific information related to the operation content performed in the operation area; and operator detection means provided in each operation area of the preamble; and specific preamble operations based on the output of the pre-operator detection means The operator's location-specific means in which work area the operator is located; and the work-specific information of the previous work-specific information storage means, and the work area of the operator specified by the previous-worker's location-specific means, identifying the operator who is currently working Specific means of current operation of the work; and -8- (5) 1200411512 which will be written by each operator and each operator

作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及將作業之優先資訊加以記憶之作業優先資訊記憶手段；及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則根據前記作業者技能資訊記憶手段的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出手段；及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定手段；及對被前記作業者特定手段所特定出之作業者，發出指示請其進行前記新作業之作業的指示手段。Means for memorizing operator skill information by assigning skills information to related operators; and means for memorizing priority information for memorizing priority information for assignments; and means for detecting new operations to detect the occurrence of new assignments; and if previously noted The new operation detection method detects a new operation, and then extracts the operator extraction method of the operator who can perform the new operation of the previous operation according to the operator's skill information of the previous operation skill information memory means; The current operation of the operator extracted by the pre-extracting operator extraction method is specified, and the prior order of the pre-existing current operation and the prior order of the pre-existing new operation are obtained and compared according to the prior information of the pre-existing operation priority information storage means. The priority of the previous work is higher than the current work of the previous work, and the specific operation of the new work is specified by the operator-specific processing. ”And the operator specified by the specific operation of the previous work, Instructions to issue instructions to perform previous assignments示 Means.

若根據此種本發明之作業者管理系統，則可將偵測到的現在作業與新作業之優先度進行比較，若新作業的優先度高則向該作業者發出指示。如此，即使當新作業發生時 ’因爲可與按照現在作業的優先度而判斷是否要令作業者去進行新作業，故可讓優先度高的作業，亦即重要的作業能越早被處理。藉此，可適才適所地指示作業者，達到作業分配的最佳化。此外，亦可爲前記作業者技能資訊記憶手段，係將作業者分類按照各作業者別加以記憶；且設置··將各作業和具有能夠進行該各作業之技能的作業者分類賦予關連之作 -9- (6) 200411512According to the operator management system of the present invention, the priority of the detected current job and the new job can be compared, and if the priority of the new job is high, an instruction is given to the operator. In this way, even when a new job occurs, it is possible to determine whether or not the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. In addition, it can also be a means of memorizing the skill information of the previous operator, which is to memorize the operator classification according to each operator; and to set up ... to assign related tasks to each task and the operator classification that has the skills to perform the task. -9- (6) 200411512

業技能資訊加以記憶之作業技能資訊記憶手段；及取得關於前記作業者抽出手段所抽出的各作業者之前記作業者技能資訊記憶手段所得之作業者分類，同時根據前記作業技能記憶手段之作業技能資訊來取得前記新作業之作業者分類，並使得分別取得之作業者分類爲相同之作業者之優先順位設定爲高，而對作業者賦予優先順位的優先順位賦予手段；前記作業者特定手段，係作業者抽出手段所抽出的作業者當中，從被前記優先順位賦予手段賦予之作業者優先順位爲高之作業者，依序進行作業者特定處理。藉此，對於被視爲能夠進行新作業之人而被抽出的作業者，可再賦予優先順位使得最適合該新作業的作業者分類（例如工程師、操作員、定期作業者等）之優先度提高，亦從優先順位高的作業者起——比較現在作業與新作業之優先度，來決定進行新作業的作業者。藉此，可更快找出最適合新作業的作業者，而適才適所地對作業者發出指Occupational skill information memorization means for memorizing professional skill information; and obtaining the classification of the operators obtained from the previous memorization of the operator's skill information memorization means for each operator extracted by the pre-exposure operator extraction means, and at the same time according to the operation skills of the pre-exposure operation skill memorization means Information to obtain the operator classification of the previous new operation, and set the priority order of the obtained operators to the same operator as the high priority, and give priority to the priority order giving means to the operator; specific means of the previous operator, Among the operators extracted by the operator extraction means, the operator has a higher priority order from the operators assigned by the pre-priority order giving means, and performs the operator specific processing in order. In this way, for workers who are regarded as being able to carry out new work, they can be given priority, so that the workers who are most suitable for the new work (such as engineers, operators, regular workers, etc.) can be given priority. The improvement also starts from the operator with a higher priority-comparing the priority of the current operation with the new operation to determine the operator who performs the new operation. In this way, the operator who is most suitable for the new job can be found faster, and the operator can be pointed at the appropriate place.

示。爲了解決上記課題，若根據板發明的其他觀點，則可提供一種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業 -10- (7) 200411512 特定資訊，由前記作業者位置的作業區域，特定出該作業者作業特定手段；及將作業之優資訊記憶手段；及偵測新作業及若前記新作業偵測手段偵測業特定手段來特定全作業者的對於已經含有新作業的全作業手段之作業優先資訊賦予作業作業起再次進行全作業分配之作業再分配手段所分配的作業〇若根據此種本發明之作業生時，因爲偵測出全作業者的作業與新作業的全作業重新再全作業可更適切地分配作業者作業者，而可達成作業分配的又，上記作業再分配手段的作業起認定爲新作業；且設作業者可進行之作業賦予關連之作業者技能資訊記憶手段；記憶手段的作業者技能資訊，業者的作業者抽出手段；及進段將前記作業者抽出手段所抽特定，並根據前記作業優先資特定手段所特定出之作業者現在正在進行之作業的現在先資訊加以記憶之作業優先之發生的新作業偵測手段；到新作業，則以前記現在作現在作業，這些現在作業中，以前記作業優先資訊記憶的優先順位，從優先度高的作業再分配手段；及將前記對全作業者指示之指示手段者管理系統，則當新作業發現在作業，而將含有該現在分配，故對於含有新作業的。藉此，可適才適所地指示效率化、作業之效率化。，係亦可從作業優先順位高置：將前記各作業者和該各之作業者技能資訊加以記憶及根據前記作業者技能資訊抽出可進行前記新作業之作行「以前記現在作業特定手出之作業者之現在作業加以訊記憶手段之作業優先資訊 -11 - (8) 200411512 ，將前記現在作業之優先順位以取得並比較，將前記新作業爲高的作業者特定爲前記新作理」的作業者特定手段。藉此，當進行含有新作業是按照作業優先度高的順序而的作業可越早決定作業者。又作業之再分配時，亦可將偵測先度加以比較，若新作業的優令其進行新作業之指示。藉此要作業越選擇越適合的作業者者，達到作業分配的最佳化，爲了解決上記課題，若根提供一種作業者管理系統，其而區分成複數作業區域的作業業區域和該各作業區域所進行特定資訊加以記憶的作業特定記各作業區域的作業者偵測手手段的輸出，特定前記作業者位置特定手段；及根據前記作特定資訊，由前記作業者位置的作業區域，特定出該作業者作業特定手段；及每到所定時手段特定全作業者之現在作業與前記新作業的優先順位加之優先順位較前記現在作業業之作業者的作業者特定處之全作業的再分配時，因爲逐一決定作業者，故越重要，即使進行含有新作業之全到之現在作業與新作業之優先度較高則對該作業者發出，因爲可使優先度越高的重，故可適才適所地指示作業作業之效率化。據本發明之其他觀點，則可特徵爲具備：按照作業內容場；及將前記作業場之各作之作業內容賦予關連之作業資訊記憶手段；及設置在前段；及根據前記作業者偵測位於哪個作業區域的作業者業特定資訊記憶手段的作業特定手段所特定出之作業者現在正在進行之作業的現在間，就以前記現在作業特定，並將現在作業按全作業者 -12- (9) (9)200411512 分別記憶之作業資訊記憶手段；及根據作業資訊記憶手段之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生手段。若根據此種本發明之作業者管理系統，則作業日報、作業月報等之作業報告書可輕易產生。而且因爲可自動地偵測作業者的作業而產生做爲作業報告書之基礎的作業資訊，故可節省作業者每次進行作業時要從攜帶型資訊終端等輸入之手續，而可提升作業效率。又，由於不須要委託作業者自己報告，故可經常地正確地產生作業報告。又，亦可爲前記作業資訊記憶手段，係對於各作業亦記憶著該各作業進行時的作業單價；且前記作業報告書產生手段，係產生含有作業之作業單價及該作業單價之合計額的作業報告書。又，前記作業場，亦可爲半導體製造工廠，而該情況下’前記作業者，亦可爲由異於擁有前記作業場也就是半導體製造工廠之企業的企業所派遣過來的作業者。藉此，例如當對派遣對象企業針對派遣作業者已經進行過之作業的費用請款時，可在作業報告書中亦列印各作業的作業單價、合計額，亦可根據該合計額來請款符合作業內容之費用。爲了解決上記課題，若根據本發明之第2觀點，則可提供一種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲具備：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊 -13- (10) (10)200411512 加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段；及根據前記現在作業特定手段所特定出之現在作業，判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段 ;及按照前記判斷手段的判斷結果，對該作業者發出作業實行指示的指示手段。若根據此種本發明之作業者管理裝置，則可偵測作業者所在區域（場所），由該區域所關連之作業來輕易地偵測出該作業者現在正在進行之作業。因此例如當新作業發生時，該新作業的分配、作業的再分配等變爲容易，可使作業者適才適所地進行作業，提高各作業者的作業效率。爲了解決上記課題，若根據本發明之其他觀點，則可提供一種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲具備：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定 -14- (11) 200411512Show. In order to solve the above-mentioned problems, according to another aspect of the board invention, an operator management system may be provided, including: a work area divided into a plurality of work areas according to the work content; and each work area of the pre-work area and the work area. Operation-specific information storage means for storing operation-specific information related to the operation content performed in the operation area; and operator detection means provided in each operation area of the preamble; and specific preamble operations based on the output of the pre-operator detection means The operator's location-specific means in which work area the operator is located; and the operation of the specific information-memory means based on the previous work -10- (7) 200411512 specific information, from the work area of the previous operator's position, to identify the specific work method for the operator; And the method of memorizing the best information of the operation; and detecting new operations and if the new operation detection method is described in advance, the industry-specific methods are used to specify the full operator's priority information for the operation that already includes the new operation's all operation methods. Redistributing hands Assigned work. If the work according to the present invention is born, it is possible to more appropriately allocate the worker and operator, because the work of the full worker and the new work and the rework of the new work are detected, and the work allocation can be achieved. In addition, the operation of the above-mentioned operation redistribution means is recognized as a new operation; and the operation that the operator can perform is assigned to the related operator skill information memory means; the operator skill information of the memory means, and the operator's operator extraction means; and In the paragraph, the new operation detection method that takes the previous operation information specified by the pre-extraction operator extraction method and memorizes the current information of the current operation of the operator specified by the pre-operation priority investment specific method; to For new assignments, the previous assignments are now the current assignments. Among these current assignments, the priority assignments of the previous assignments' priority information memory are used to redistribute means from higher-priority assignments; and the instruction means management system that assigns the previous assignments to all operators. , When a new job is found in the job and it will contain the current assignment, A new job. In this way, the efficiency can be indicated and the efficiency of operations can be indicated. The department can also set the priority from the job priority: memorizing the previous operator and the skill information of each operator and extracting the new operator ’s skill based on the previous operator ’s skill information. "11-(8) 200411512 of the current work of the operator and the means of memorizing and remembering the prior order of the current work in the preamble to obtain and compare it, and the high priority of the new work in the previous work is specified as the new work in the previous work" Operator-specific means. With this, the operator can be determined sooner when a job including a new job is performed in the order of high job priority. When the operation is redistributed, the detection can also be compared first. If the new operation is preferred, it will be instructed to perform the new operation. In this way, the more suitable the operator is, the more suitable the operator is to achieve the optimization of the assignment. In order to solve the problem described above, if a root management system is provided, it is divided into a business area and a plurality of work areas. The operation of memorizing specific information in the area is specified to output the manual detection means of the operator in each operation area, to specify the specific means of the previous operator position; and to specify the specific information of the previous operator, the operation area of the previous operator position is used to specify the output. The specific operation method of the operator; and the priority order of the current operation and the previous new operation specified by the specified operator at the specified time plus the priority order that is higher than the redistribution of the entire operation in the specific place of the operator of the current operator Because the operators are determined one by one, the more important it is, even if the priority of the current operation and the new operation that includes all new operations is high, it will be issued to the operator, because the higher the priority, the more suitable it is. Indicate the efficiency of work operations where appropriate. According to other aspects of the present invention, it may be characterized as having: a field according to the content of the work; and a means for storing related work information for the content of each work in the previous work field; and provided in the preceding paragraph; and which one is located according to the work of the previous operator The operator in the work area is identified by the operation-specific information storage means. The operator is currently working on the current work, and the current work is previously specified, and the current work is based on the full operator-12- (9) (9) 200411512 The memorizing means of operation information memorized separately; and the means of generating an operation report based on the operation information of the operation information memorization means, generating an operation report containing the content of the operation performed by the desired operator at each predetermined time. According to the operator management system of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. In addition, it can also be a means of memorizing pre-work information, which also stores the unit price of each job at the time of each operation; and a means of generating a pre-work report, which generates a total of the unit price of the job and the total amount of the unit price. Homework report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the preamble operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. The fees are in accordance with the content of the operation. In order to solve the above problem, according to the second aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the work content. It is characterized by having the following: (10) (10) 200411512 memorizing means for storing job-specific information, and assigning job-specific information to each job area of the previous work field and the content of the work performed by each job area; and The output of the operator detection means in each work area of the preamble, the operator location-specific means that specifies the work area in which the preamble operator is located; and the job-specific information based on the pre-job specific information storage means, specified by the pre-operator position-specific means The working area of the operator specifies the current operation specific means of the operation that the operator is currently performing; and whether or not the operator is allowed to continue the current operation based on the current operation specified by the previous current operation specific means. Or the judge who made it work Paragraph; and the instruction means to issue instructions to the operator in accordance with the judgment results of the preceding judgment means. According to such an operator management device of the present invention, the area (place) where the operator is located can be detected, and the work currently being performed by the operator can be easily detected by the work associated with the area. Therefore, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, and the like become easy, so that the operator can perform the job appropriately and appropriately, and the work efficiency of each operator is improved. In order to solve the above problem, according to another aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. It is provided with: operation-specific information storage means for memorizing each operation area of the preparatory work field and the operation content performed by each operation area with specific information related to the operation; Output, the specific location of the operator in which work area the preamble operator is located; and the work specific information based on the predecessor work specific information storage means, which is specified by the preamble operator's location -14- (11) 200411512

手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段；及將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及將作業之優先資訊加以記憶之作業優先資訊記憶手段；及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則根據前記作業者技能資訊記憶手段的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出手段；The operation area of the operator specified by the means, and the current operation specific means of the operation that the operator is currently performing; and assigning the skill information of the related operators to the previous operators and the operations that the operators can perform. Memorized operator skill information memorization means; and job priority information memorization means that memorizes priority information of the job; and new job detection means to detect the occurrence of a new job; and if the previous new job detection means detects a new For the assignment, the operator extraction means of the operator who can perform the previous assignment of the new operation is extracted according to the operator's skill information of the previous operator ’s skill information memorizing means;

及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定手段；及對被前記作業者特定手段所特定出之作業者，發出指示請其進行前記新作業之作業的指示手段。若根據此種本發明之作業者管理裝置，則可將偵測到的現在作業與新作業之優先度進行比較，若新作業的優先度高則向該作業者發出指示。如此，即使當新作業發生時，因爲可與按照現在作業的優先度而判斷是否要令作業者去進行新作業’故可讓優先度高的作業，亦即重要的作業能越早被處理。藉此，可適才適所地指示作業者，達到作業分配的最佳化。又’亦可爲前記作業者技能資訊記憶手段，係將作業 -15- (12) 200411512 者分類按照各作業者別加以有能夠進行該各作業之技能技能資訊加以記憶之作業技前記作業者抽出手段所抽出資訊記憶手段所得之作業者記憶手段之作業技能資訊來，並使得分別取得之作業者位設定爲高，而對作業者賦段；前記作業者特定手段，業者當中》從被則記優先順順位爲高之作業者，依序進更能及早發現最適合新作業示作業者。爲了解決上記課題，若提供一種作業者管理裝置，區分成複數作業區域的作業管理裝置，其特徵爲具備：該各作業區域所進行之作業加以記憶的作業特定資訊記作業區域的作業者偵測手段哪個作業區域的作業者位置定資訊記憶手段的作業特定手段所特定出之作業者的作正在進行之作業的現在作業記憶；且設置：將各作業和具的作業者分類賦予關連之作業能資訊記憶手段；及取得關於的各作業者之前記作業者技能 &類’同時根據前記作業技能取得前記新作業之作業者分類分類爲相同之作業者之優先順予優先順位的優先順位賦予手係作業者抽出手段所抽出的作位賦予手段賦予之作業者優先行作業者特定處理。藉此，可的作業者，而可適才適所地指根據本發明之其他觀點，則可係屬於管理在按照作業內容而場進行作業之作業者之作業者將前記作業場之各作業區域和內容賦予關連之作業特定資訊憶手段；及根據設置在前記各的輸出，特定前記作業者位於特定手段；及根據前記作業特資訊，由前記作業者位置特定業區域，特定出該作業者現在特定手段；及將作業之優先資 -16- (13) 1200411512 訊加以記憶之作業優先資訊記憶手段；生的新作業偵測手段；及若前記新作業作業，則以前記現在作業特定手段來特作業，這些現在作業中對於已經含有新前記作業優先資訊記憶手段之作業優先先順位，從優先度高的作業起再次進行再分配手段；及將前記作業再分配手段作業者指示之指示手段。若根據此種本發明之作業者管理裝生時，因爲偵測出全作業者的現在作業作業與新作業的全作業重新再分配，故全作業可更適切地分配作業者。藉此，作業者，而可達成作業分配的效率化、又，亦可爲作業再分配手段，係從作業起認定爲新作業；且設置：將前記業者可進行之作業賦予關連之作業者技作業者技能資訊記憶手段；及根據前記憶手段的作業者技能資訊，抽出可進行者的作業者抽出手段；及進行「以前記將前記作業者抽出手段所抽出之作業者定’並根據前記作業優先資訊記憶手段將前記現在作業之優先順位與前記新作取得並比較’將前記新作業之優先順位高的作業者特定爲前記新作業之作業者及偵測新作業之發偵測手段偵測到新定全作業者的現在作業的全作業，以資訊賦予作業的優全作業分配之作業所分配的作業對全置，則當新作業發 ’而將含有該現在對於含有新作業的可適才適所地指示作業之效率化。作業優先順位高的各作業者和該各作能資訊加以記憶之作業者技能資訊記前記新作業之作業現在作業特定手段之現在作業加以特之作業優先資訊，業的優先順位加以較前記現在作業爲的作業者特定處理 -17- (14) (14)200411512 」的作業者特定手段。藉此，因爲可使優先度越高的重要作業越選擇越適合的作業者，故可適才適所地指示作業者，達到作業分配的最佳化，作業之效率化。爲了解決上記課題，若根據本發明之其他觀點，則可提供一種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲設置：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段；及每到所定時間，就以則日S現在作業特疋手段特定全作業者之現在作業，並將現在作業按全作業者分別記憶之作業資訊記憶手段；及根據作業資訊記憶手段之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生手段。若根據此種本發明之作業者管理裝置，則作業日報、作業月報等之作業報告書可輕易產生。而且因爲可自動地偵測作業者的作業而產生做爲作業報告書之基礎的作業資訊，故可節省作業者每次進行作業時要從攜帶型資訊終端等輸入之手續，而可提升作業效率。又，由於不須要委託 -18- (15) (15)200411512 作業者自己報告，故可經常地正確地產生作業報告。又，亦可爲前記作業資訊記憶手段，係對於各作業亦記憶著該各作業進行時的作業單價；且前記作業報告書產生手段，係產生含有作業之作業單價及該作業單價之合計額的作業報告書。又，前記作業場，亦可爲半導體製造工廠，而該情況下，前記作業者，亦可爲由異於擁有前記作業場也就是半導體製造工廠之企業的企業所派遣過來的作業者。藉此，例如當對派遣對象企業針對派遣作業者已經進行過之作業的費用請款時，可在作業報告書中亦列印各作業的作業單價、合計額，亦可根據該合計額來請款符合作業內容之費用。爲了解決上記課題，若根據本發明之第3觀點，則可提供一種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊’由前記作業者位置特定工程所特定出之作業者的作業區域’特定出該作業者現在正在進行之作業的現在作業特定工程；及根據前記現在作業特定工程所特定出之現在作業’判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段；及按照前記判斷手段的判斷 •19- (16) (16)200411512 結果，對該作業者發出作業實行指示的指示工程。若根據此種本發明之作業者管理方法，則可偵測作業者的所在區域（場所），並由該區域所被賦予關連之作業而能輕易偵測該作業者現在正在進行之作業。爲此，例如當新作業發生時，可使該新作業的分配、作業之再分配等更容易，可使作業者才適才適所地進行作業，而可提高各作業者的作業效率。爲了解決上記課題，若根據本發明之其他觀點，則可提供一種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊’由前記作業者位置特定工程所特定出之作業者的作業區域’特定出該作業者現在正在進行之作業的現在作業特定工程；及偵測新作業之發生的新作業偵測工程；及若前記新作業偵測手段偵測到新作業，則根據將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段之作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出工程；及進行「以前記現在作業特定工程將前記作業者抽出工程所抽出之作業者之現在作業加以特定，並根據將作業之優先資訊 -20- (17) (17)200411512 加以記憶之作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定工程；及對被前記作業者特定工程所特定出之作業者，發出指示請其進行前記新作業之作業的指示工程〇若根據此種本發明之作業者管理方法，則可將偵測到的現在作業與新作業之優先度進行比較，若新作業的優先度高則向該作業者發出指示。如此，即使當新作業發生時，因爲可與按照現在作業的優先度而判斷是否要令作業者去進行新作業，故可讓優先度高的作業，亦即重要的作業能越早被處理。藉此，可適才適所地指示作業者，達到作業分配的最佳化。此外，亦可爲前記作業者技能資訊記憶手段，係將作業者分類按照各作業者別加以記憶；且設置：將各作業和具有能夠進行該各作業之技能的作業者分類賦予關連之作業技能資訊加以記憶之作業技能資訊記憶手段；及取得關於前記作業者抽出手段所抽出的各作業者之前記作業者技能資訊記憶手段所得之作業者分類，同時根據前記作業技能記憶手段之作業技能資訊來取得前記新作業之作業者分類’並使得分別取得之作業者分類爲相同之作業者之優先順位設定爲高，而對作業者賦予優先順位的優先順位賦予手段；前記作業者特定手段，係作業者抽出手段所抽出的 -21 - (18) (18)200411512 作業者當中，從被前記優先順位賦予手段賦予之作業者優先順位爲局之作業者’依序進行作業者特定處理。藉此，可更快找出最適合新作業的作業者，而適才適所地對作業者發出指示。爲了解決上記課題，若根據本發明之其他觀點，則可提供一種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊’由前記作業者位置特定工程所特定出之作業者的作業區域’特定出該作業者現在正在進行之作業的現在作業特定工程；及偵測新作業之發生的新作業偵測工程；及若前記新作業偵測手段偵測到新作業，則以前記現在作業特定工程來特定全作業者的現在作業，這些現在作業中對於已經含有新作業的全作業，根據將作業之優先資訊加以記憶之作業優先資訊記憶手段之作業優先資訊賦予作業的優先順位，從優先度高的作業起再次進行全作業分配之作業再分配工程；及將前記作業再分配手段所分配的作業對全作業者指示之指示工程。若根據此種本發明之作業者管理方法，則當新作業發生時，因爲偵測出全作業者的現在作業，而將含有該現在 •22- (19) (19)200411512 作業與新作業的全作業重新再分配’故對於含有新作業的全作業可更適切地分配作業者。藉此，可適才適所地指示作業者，而可達成作業分配的效率化、作業之效率化。又，亦可爲前記作業再分配工程，係從作業優先順位高的作業起認定爲新作業；且具有：根據將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段中的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出工程；及進行「以前記現在作業特定工程將前記作業者抽出工程所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定工程。藉此，因爲可使優先度越高的重要作業越選擇越適合的作業者，故可適才適所地指示作業者，達到作業分配的最佳化，作業之效率化。爲了解決上記課題，若根據本發明之其他觀點，則、可提供一種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出’特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業 -23· (20) (20)200411512 區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊，由前記作業者位置特定工程所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定工程；及每到所定時間，就以前記現在作業特定工程特定全作業者之現在作業，並將現在作業按全作業者分別記憶之作業資訊記億工程；及根據作業資訊記憶工程所記憶之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生工程。若根據此種本發明之作業者管理方法，則作業日報、作業月報等之作業報告書可輕易產生。而且因爲可自動地偵測作業者的作業而產生做爲作業報告書之基礎的作業資訊，故可節省作業者每次進行作業時要從攜帶型資訊終端等輸入之手續，而可提升作業效率。又，由於不須要委託作業者自己報告，故可經常地正確地產生作業報告。又’亦可爲前記作業資訊記憶工程，係對於各作業亦記憶著該各作業進行時的作業單價·，且前記作業報告書產生工程’係產生含有作業之作業單價及該作業單價之合計額的作業報告書。又，前記作業場，亦可爲半導體製造工廠，而該情況下，前記作業者，亦可爲由異於擁有前記作業場也就是半導體製造工廠之企業的企業所派遣過來的作業者。藉此，例如當對派遣對象企業針對派遣作業者已經進行過之作業的費用請款時，可在作業報告書中亦列印各作業的作業單價、合計額，亦可根據該合計額來請款符合 -24 - (21) 200411512 作業內容之費用。此外，亦可爲上記作業者管理系統、業者方法中的作業者偵測手段，係設置用所持之發信機傳來的電磁波的收信機；前定成每一作業者發送不同頻率的電磁波；特定手段，係將接收到視爲作業區域偵測率電磁波的前記作業者偵測手段找出，將段被設置之作業區域特定爲該作業者所存藉此，可輕易偵測出特定之作業者位於哪可由該作業區域資訊輕易偵測出作業者現業。又，亦可爲上記作業者管理系統、作者方法中的作業者偵測手段，係設置用來持之發信機傳來的電磁波的收信機；前記成送出載有按照各作業者別而識別作業者磁波；前記作業者位置特定手段，係取得手段傳來的識別資訊，將接收到身爲作業作業者之識別資訊的前記作業者偵測手段者偵測手段被設置之作業區域特定爲該作業區域。藉此，也是可輕易偵測出特定之作業區域，且可由該作業區域資訊輕易偵正在進行的作業。又，亦可爲上記作業者管理系統、作者方法中的作業場內，設置從被設置於前作業者裝置、作來接收各作業者記發信機，係設前記作業者位置對象之作業者頻該作業者偵測手在之作業區域。個作業區域，且在正在進行的作業者裝置、作業接收各作業者所發信機，係設定之識別資訊的電前記作業者偵測區域偵測對象之找出，將該作業業者所存在之作作業者位於哪個測出作業者現在業者裝置、作業記作業區域的作 -25- (22) (22)200411512 業裝置取得作業者之作業資訊的作業資訊取得手段；前記現在作業特定手段，係除了取得前記特定爲作業者所在之作業區域之作業區域資訊，還從前記作業資訊取得手段取得從該作業者正在進行作業之作業裝置傳來的作業資訊（係屬於針對裝置的作業資訊，本說明書中亦稱爲「裝置資訊」），並根據這些區域資訊及作業資訊以特定該作業者的現在作業。藉此，可從作業者身處的作業區域資訊做某種程度地偵測其作業內容（例如障礙對應處理、一般操作作業等之作業分類），而可從作業資訊偵測出更詳細的作業內容（例如障礙對應處理中，還細分電氣系障礙對應處理、機械系障礙對應處理）。【實施方式】以下將參照添附圖面，詳細說明本發明之理想實施形態。此外，本說明書及圖面中，對於實質上具有相同機能的構成要素，係以同一符號標示並省略其重複說明。 (第1實施形態）首先’兹佐以圖面說明將本發明適用於半導體製造工廠時的作業者管理系統的第1實施形態。圖1係作業場之 1例爲半導體製造工廠之作業者管理系統之整體構成的方塊圖’ 100係半導體製造工廠，係表示工廠1〇〇內的配置之1例。2 0 0係作業者管理裝置。半導體製造工廠100係如圖1所示，例如主要區分爲 • 26 - (23) (23)200411512 工廠內的無塵室區域110與無塵室以外的區域12〇(以下，稱作「無塵室外區域」）。更進一步地，無塵室區域1 1 0，例如係被區分爲裝置室區域1〗2與裝置室以外的區域1 1 4 (以下稱作「裝置外區域」）。裝置室區域1 1 2內，配設有製程裝置、計測裝置等半導體製造裝置1 4 0。製程裝置，例如有餘刻裝置、CVD ( Chemical Vapor Deposition :化學氣相成長法）裝置、光阻塗佈機、洗淨裝置、CMP ( Chemical Mechanical Polishing :化學機械硏磨）裝置、pvD ( Physical Vapor Deposition :物理氣相成長法）裝置、曝光裝置、離子佈植機等。計測裝置則例如有膜厚裝置、 ODP ( Optical Digital Profiler) 、FTIR 等。此外，亦可在§^:置室區域112中各裝置室區域112設置不同種類的半導體製造裝置140，或可在同裝置室區域112內配置複數種類的半導體製造裝置140。上記裝置室區域1 12中，設有當進行維護或定期點檢等作業時，從室內控制裝置室區域i丨2內之各半導體製造裝置1 40等之室內控制部〗〗6，藉由該室內控制部丨丨6控制該裝置室內的半導體製造裝置14〇。亦可設置從裝置室的外側進行半導體製造裝置i 4〇之控制等的室外控制部 1 1 8 °又半導體製造裝置1 40的控制部亦可設在半導體製造裝置140本身，從該控制部控制半導體製造裝置。上記室內控制部1 1 6、室外控制部1 1 8、其他控制部，係例如以操作面板構成。這些各室內控制部1 1 6、U 8及半 -27- (24) (24)200411512 導體製造裝置140，係和作業者管理裝置200之輸出入部 2 0 8以通信線路等電氣連接’而呈可收發存取資訊、裝置狀態資訊等裝置資訊（針對裝置的作業資訊）之狀態。當以上記各控制部控制半導體製造裝置時，按照該作業而從控制部輸入作業者的ID、密碼後再存取。藉此可特定哪個作業者正在控制。裝置室外區域U 4，這裡係表示設置上記室外控制部 1 1 8的區域。此外，裝置室外區域1 1 4並不一定限定爲室外控制部1 1 8的設置區域，亦可包含再裝置室區域1 1 2間形成的通路。無塵室外區域1 2 0，係表示無塵室以外的工廠內區域。例如中央監察室區域1 22、淸潔室區域1 24、保管庫區域1 2 6、辦公區域 1 2 8、休憩室區域1 2 9 (亦可包含廁所 )等。上記無塵室區域110內中的裝置室區域112、裝置室外區域114，無塵室外區域120中的中央監察室區域122 、淸潔室區域1 2 4、保管庫區域1 2 6、辦公區域1 2 8、休憩室區域1 29之各區域內，設有作業者偵測感應器1 3 0做爲作業者偵測手段。作業者偵測感應器1 3 0係與作業者管理裝置2 0 0的輸出入部2 0 8以通信纜線做電氣連接，而可收發來自作業者偵測感應器1 3 0的感測資訊。上記作業者偵測感應器1 3 0，係例如以接收各作業者所攜帶的發信機的電磁波（或電波）之感測器所構成。作業者偵測感應器1 3 0，係例如裝設在各區域的天花板或牆 -28- (25) (25)200411512 壁等。圖2係將作業者偵測感應器1 3 0之例的收信機1 3 4設置在無麈室區域i i 〇之裝置室區域1 1 2內的例子。收信機 1 3 4係被裝設在裝置室區域1 1 2之劃分的裝置室1 3 2的天花板上。另一方面，作業者1 3 6係常時攜帶著發信機]3 8 ’同時進行半導體製造裝置14〇等之作業。作業者136 — 旦必須要進行半導體製造裝置1 40例如維護作業，而進入裝置室1 3 2時，則設於天花板的收信機1 3 4就會收到從作業者攜帶之發信機1 3 8傳來的電磁波。藉此，可偵測出作業者136正身處裝置室區域112之事件。此時，亦可使上記發信機1 3 8，爲不同作業者發送不同頻率（無線頻率）的電磁波。然後，將各作業者與各作業者之頻率賦予關連之頻率資訊係被做爲頻率資訊記憶手段之一例的頻率資訊資料庫所記憶。該頻率資訊資料庫，亦可如圖3所示是被包含在各種資料庫2 1 0中。根據該頻率資訊資料庫的頻率資訊，可藉由接收來自作業者偵測感應器1 3 0的電磁波的頻率來將身處該作業者偵測感應器 1 3 0設置之作業區域的作業者加以特定。作業者管理裝置 2 00，係由來自個作業者偵測感應器130之感測器資訊中找出接收到視爲作業區域偵測之對象的作業者頻率電磁波的作業者偵測感應器1 3 0，並將該作業者偵測感應器1 3 0 被設置作業區域特定爲該作業者所身處之作業區域。又，上記發信機1 3 8，亦可將識別各作業者的識別資訊的I D資料予以編碼化並調變等轉換成電磁波，收信機 -29- (26) 200411512 1 3 4係將接收自發信機1 3 8的電磁波加以解調並解得到ID資料，將其當作感測器資訊送出至作業者置2 00。該ID係如圖8所示被記錄在作業者技能料庫2 5 0。根據該作業者技能資訊資料庫2 5 0的ID 資訊），藉由收到來自作業者偵測感應器1 3 0的別資訊）可將身處該作業者偵測感應器1 3 0的設置域的作業者加以特定。藉此，作業者管理裝置2 0 0 來自各作業者偵測感應器1 3 0的感測器資訊中找出視爲作業區域偵測對象的作業者ID (識別資訊）者偵測感應器1 3 0，並將該作業者偵測感應器1 3 0 之區域特定爲該作業者所身處的作業區域。此外， 1 3 8亦可爲行動電話、後述之攜帶型資訊終端等來又，收信機1 3 4、發信機1 3 8亦可都爲收發信機。的具體例將於後述。又，作業者ID (識別資訊），可事先記憶在者所持發信機1 3 8的記憶手段（未圖示）內，或亦經過條碼化的ID而記憶在發信機1 3 8的記憶手段體而言，可爲例如在行動電話或攜帶型資訊終端等的發信機1 3 8上，設置紅外線讀取手段等之條碼讀，藉由該條碼讀取手段將條碼化的ID讀取後記憶機1 3 8的記憶手段中。 (作業者管理裝置）作業者管理裝置200，例如從上記作業者偵測碼化後管理裝資訊資 (識別 ID (識作業區，可由接收到的作業被設置發信機構成。此情況該作業可讀取中。具所構成取手段在發信感應器 (27) 200411512And carry out "Previous current work specific means to specify the current work of the operator extracted by the previous operator extraction means, and according to the priority information of the previous work priority information memory means, prioritize the current order of the previous work and the new work in the previous To obtain and compare the priority order of the previous job, and to assign a higher priority order to the previous job than the current job in the previous job, to specify the operator-specific treatment of the new job operator in the previous job, and the operator-specific means; Operators identified by specific means issue instruction means instructing them to perform pre-recorded new operations. According to the operator management device of the present invention, the priority of the detected current job and the new job can be compared, and if the priority of the new job is high, an instruction is given to the operator. In this way, even when a new job occurs, it is possible to determine whether or not the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. It can also be a means of memorizing the skill information of pre-workers, which is to classify the work -15- (12) 200411512 according to each operator. The pre-worker can extract the skills and information that can perform the work. The method of extracting information from the information memory means of the operator's memorization means of the operation skill information, and set the obtained operator position to high, and assign a segment to the operator; the former operator specific means, among the operators " Priority is given to high-ranking operators, and sequential advancement will enable early discovery of the most suitable operators for new assignments. In order to solve the above-mentioned problem, if a worker management device is provided, the work management device divided into a plurality of work areas is characterized by having: work-specific information for memorizing work performed in each work area, and recording a worker detection in the work area Means the location of the operator in which work area determines the current work memory of the worker specified by the work-specific means of the work-specific information storage means; and settings: assign the work classification of each work and the operator to the related work capabilities Means of information memorization; and obtaining the previous operator's skills & class of each operator, and at the same time, according to the previous operator's skills, the new operator's classification of the previous operator is classified into the same operator. It is the operator-specific processing given priority to the operator given by the position-imparting means extracted by the operator extraction means. In this way, the operator who can be used, and where appropriate, refers to other viewpoints according to the present invention, and the operator who belongs to the operator who manages the work performed on the field according to the content of the work will be given the various work areas and contents of the previous work field Relevant job-specific information recall means; and specific preamble operators are located in specific means based on the output set in each preface; and preface operator specific information, the predecessor operator is located in a specific business area to specify the specific means of the operator now; And the prioritized information memorization means for memorizing the priority information of the work -16- (13) 1200411512 information; the new means for detecting new work; and if the new work is recorded in advance, the specific means currently recorded in the current work are used for special operations. In the current assignment, priority is given to the assignments that already contain the new prior assignment priority information memorizing means, and redistribution means are re-assigned from the higher priority assignments; and the instruction means of the pre-assignment assignment means operator instructions. If the operator manages the installation according to the present invention, the redistribution of the current operation of the full operator and the full operation of the new operation is detected, so that the operator can be more appropriately assigned to the entire operation. In this way, the operator can achieve the efficiency of the assignment of the work, and can also be a means of redistributing the work, which is recognized as a new work from the work; and the setting: the work that the former operator can perform is given to the related operator Operator skill information memorization means; and operator skill extraction means based on operator skill information of previous memorization means; and "predecessor operator extraction by means of the former operator extraction means", and Priority information memory means obtains and compares the priority of the current job in the previous note with the new work in the previous note. 'Identifies the operator with the higher priority of the new job in the previous record as the operator of the new job in the previous record and the detection means that detects the new job is detected. The newly assigned full operator ’s current assignment is assigned to all the assignments assigned to the superior assignment assigned to the assignment by the information. When a new assignment is issued, it will contain the current assignment for the applicable new assignment. The efficiency of the local instruction work is memorized. Each operator with high work priority and the information of each work can be memorized. Operator skill information Pre-record new assignments, current assignments, current assignments, and special job priority information, and job priorities are prioritized over operator-specific treatments for previous assignments. 17- (14) (14) 200411512 " Operator-specific means. Thereby, because the more important work can be selected with the higher priority, the more suitable operator can be selected, so that the operator can be instructed appropriately and appropriately, so that the assignment of the work can be optimized and the work can be made more efficient. In order to solve the above problem, according to another aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. For setting: operation-specific information memorization means that memorizes each operation area of the pre-job site and the operation content performed by each operation area with specific information related to the operation; and according to the operator detection means set in each pre-work area Output, specific operator location specific means in which work area the preamble operator is located; and the work specific information of the predecessor work specific information storage means, and the work area of the operator specified by the predecessor operator position specific means, The specific means of current operations that the operator is currently working on; and every time a predetermined time is reached, the current operations of all the operators are specified by the current operation special means, and the current operations are stored according to the operation information of all the operators. Means of memory; and Job information memory means, the operator generates jobs report containing the expectations of the PRC job report in job content of each book to generate the report given time means. According to the operator management device of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself (18) (15) (15) 200411512, the operation report can be generated frequently and correctly. In addition, it can also be a means of memorizing pre-work information, which also stores the unit price of each job at the time of each operation; and a means of generating a pre-work report, which generates a total of the unit price of the job and the total amount of the unit price. Homework report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the predecessor operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. The fees are in accordance with the content of the operation. In order to solve the above problem, according to the third aspect of the present invention, a worker management method can be provided, which belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. It is characterized in that: according to the output of the operator detection means provided in each work area of the preamble, the specific location of the work area where the preamble worker is located and the specific project; and according to each work area of the preface work area and the work area. The content of the work performed is given to the specific information of the related work. The specific information of the work is memorized. The specific information of the work is "the work area of the operator specified by the predecessor operator's position specific project". The current work specific project of the operation; and the current work specified by the previous current work specific project to determine whether to make the operator continue the current operation or to make a new operation; and according to the previous judgment method Judgment19- (16) (16) 2004 11512 As a result, the worker is instructed to issue a job execution instruction. According to the operator management method of the present invention, the area (place) where the operator is located can be detected, and the related work assigned to the area can be used to easily detect the work currently being performed by the operator. For this reason, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, etc. can be made easier, the operator can perform the job appropriately, and the work efficiency of each operator can be improved. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. In order to have: the operator's position and specific work to specify which work area the preamble operator is located according to the output of the operator detection means provided in each work area of the preamble; The work content gives related work-specific information to memorize the work-specific information. The work-specific information in the means for memorizing the work is 'the work area of the operator specified by the predecessor operator's location-specific project'. Current job-specific projects; and new job detection projects that detect the occurrence of new jobs; and if a new job is detected by the pre-recorded new job detection means, the pre-recorded operators and the jobs that each operator can perform Assigning skills to related operators to memorize them Operator ’s skill information memorization means to extract the operator ’s skill information from the operator who can perform the previous work; and perform the “previous current work specific project to add the current work of the operator extracted from the previous work extraction work Specific, and based on the job priority information of the job priority information -20- (17) (17) 200411512 which is memorized, the prioritization order of the previous job and the prioritization of the new job are obtained and compared. ", The priority of the previous new work is higher than that of the previous work, and the specific work of the new work of the operator is specified by the operator-specific process"; and the work specified by the specific work of the previous operator In addition, according to the operator management method of the present invention, the detected current operation can be compared with the priority of the new operation. High priority gives instructions to the operator. In this way, even when a new job occurs, it is possible to determine whether the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. In addition, it can also be a means for memorizing the skill information of the previous operator, which is to memorize the operator's classification according to each operator's classification; and to set up: assign each operation and an operator's classification that has the skills capable of performing the operation to the related operation skills Means for memorizing work skill information by memorizing information; and obtaining operator classifications obtained by means of memorizing work skill information for each operator previously extracted by means of the previous work operator extraction means, and at the same time based on the work skill information of the work skill memory means for the previous work Obtaining the operator classification of the previous new work, and setting the priority of the obtained operators to the same operator as the high priority, and giving priority to the priority giving means to the operator; the specific means of the previous operator is the work Among the -21-(18) (18) 200411512 extracted by the operator extraction method, the operator's specific processing is performed in order from the operator who has been given priority by the pre-priority priority assignment means. In this way, the operator who is most suitable for the new operation can be found more quickly, and the operator can be instructed where appropriate. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. In order to have: the operator's position and specific work to specify which work area the preamble operator is located according to the output of the operator detection means provided in each work area of the preamble; The work content gives related work-specific information to memorize the work-specific information. The work-specific information in the means for memorizing the work is 'the work area of the operator specified by the predecessor operator's location-specific project'. A new job detection project that detects the occurrence of a new job; and a new job detection project that detects the occurrence of a new job; and if a new job is detected by the previous new job detection means, the previous job specific project is previously recorded to specify the current job of the full operator, These new assignments are for new assignments Full assignment of jobs, according to the job priority information memorizing the job priority information memorizing means of the job priority information to give priority to the job order, starting from the higher priority job to reassign the entire job assignment job redistribution project; and the predecessor job The instructions assigned by the redistribution means to all operators. According to the operator management method of the present invention, when a new job occurs, because the current job of all the workers is detected, it will contain the current • 22- (19) (19) 200411512 job and the new job. All-job redistribution ', so the operator can be more appropriately assigned to the whole job containing the new job. Thereby, the operator can be instructed appropriately and appropriately, and the efficiency of the assignment and the efficiency of the operation can be achieved. In addition, reassignment works for preparatory work can be recognized as new work from the work with the highest priority of work; and it has the skill information of related operators according to the preparatory work and the work that each operator can perform. The memorized operator skill information memorization means of the operator skill information, extracting the operator extracting work of the operator who can perform the new work in the previous record; and performing the work of "the previous record of the current work specific project extracting the previous work operator in the project. The current assignment of the former is specified, and the priority order of the previous assignment and the new assignment of the previous assignment are obtained and compared according to the operation priority information of the previous assignment priority information storage means, and the priority of the previous assignment is higher than the previous assignment. The operator-specific process for which the high-level operator specifies the operator-specific processing of the previous new operator. Thereby, since an important job with a higher priority can be selected, a more suitable operator can be selected. Therefore, the operator can be instructed appropriately and appropriately, so that the assignment of the job can be optimized and the operation can be made more efficient. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. It is characterized in that: according to the output of the operator detection means provided in each work area of the preamble, the specific position of the work area where the preamble worker is located, and the specific work of the predecessor work area; 23 · (20) ( 20) 200411512 The area and the work performed by each work area give the work-specific information to memorize the work-specific information. The work-specific information in the means of memorizing the work is the work area of the operator specified by the predecessor's position specific project. , Specifying the current operation specific project of the current operation of the operator; and every time a predetermined time is reached, the current operation of the specific operation of the specific project is previously recorded, and the current operation is recorded as the operation of the entire operator. Information recording project; and memory project based on operation information The memorized operation information generates an operation report generation process including an operation report containing the operation content of the desired operator at each predetermined time. According to the operator management method of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. Also, it can also be a pre-recorded job information memory project. For each job, the unit price of the job at the time of each job is also memorized, and the pre-paid job report generation project is to generate the unit price of the job containing the job and the total amount of the unit price of the job. Job report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the predecessor operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. This paragraph is in accordance with the cost of -24-(21) 200411512 operation content. In addition, it can also be the operator detection method in the operator management system and operator method described above. It is set to receive the electromagnetic waves from the transmitter. The receiver is set to send electromagnetic waves of different frequencies to each operator. ; The specific means is to find the pre-operator detection means that receives the electromagnetic waves that are regarded as the detection rate of the work area, and specify the work area where the segment is set to be stored by the operator, so that specific work can be easily detected. Where the operator is located, the operator's current business can be easily detected by the information of the operation area. In addition, it can also be the operator detection method in the operator management system and the author's method described above. It is a receiver that is set to hold the electromagnetic waves from the transmitter. Identifying the operator ’s magnetic wave; The specific means of pre-position operator position is the identification information transmitted by the means, and the operation area set by the pre-position operator detection means and the detection means is set as The work area. In this way, it is also possible to easily detect a specific operation area, and it is easy to detect an ongoing operation from the information of the operation area. It is also possible for the operator in the above-mentioned operator management system and the author's method to set a transmitter for receiving each operator's recorder from a device installed on the former operator's device, and the operator who sets the position of the operator of the previous operator should be The operator detects the working area where the hand is. Each operation area, and in the current operator ’s device and the receiver ’s transmitter, the identification information of the pre-recorded operator detection area is set to identify the detection objects, and -25- (22) (22) 200411512 The operation information acquisition means of the operator to obtain the operation information of the operator; which is the specific means of pre-existing current operation. In addition to obtaining the work area information specified in the work area where the operator is located, the work information transmitted from the work device in which the operator is currently working is also obtained from the work information acquisition means in the previous work. (Also known as "device information"), and based on these area information and operation information to identify the current operation of the operator. In this way, the operation content of the operator can be detected to some extent (such as operation classification of obstacle correspondence processing, general operation operations, etc.), and more detailed operations can be detected from the operation information. Contents (for example, breakdown processing for electrical systems, breakdown processing for mechanical systems) [Embodiment] The preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. In this specification and the drawings, the constituent elements having substantially the same functions are denoted by the same reference numerals, and repeated descriptions thereof are omitted. (First Embodiment) First, a first embodiment of a worker management system when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. Fig. 1 is a block diagram of an example of the overall structure of a worker management system in a semiconductor manufacturing plant. 100 is a semiconductor manufacturing plant, and is an example showing a layout within the plant 100. 2 0 0 is an operator management device. The semiconductor manufacturing plant 100 is shown in Figure 1. For example, it is mainly divided into: • 26-(23) (23) 200411512 clean room area 110 in the factory and area 12 outside the clean room (hereinafter referred to as "clean room" Outdoor area "). Furthermore, the clean room area 1 10 is divided into, for example, the device room area 1 2 and the area outside the device room 1 1 4 (hereinafter referred to as "out-of-device area"). In the device room area 1 12, semiconductor manufacturing devices such as a process device and a measurement device 1 40 are arranged. The process equipment includes, for example, an engraving device, a CVD (Chemical Vapor Deposition) device, a photoresist coating machine, a cleaning device, a CMP (Chemical Mechanical Polishing) device, and a pvD (Physical Vapor Deposition) : Physical vapor growth method) device, exposure device, ion implanter, etc. Examples of the measurement device include a film thickness device, an ODP (Optical Digital Profiler), and FTIR. In addition, different types of semiconductor manufacturing devices 140 may be provided in each of the device room areas 112 in the housing area 112, or a plurality of types of semiconductor manufacturing devices 140 may be arranged in the same device room area 112. The above-mentioned device room area 1 12 is provided with an indoor control unit for each semiconductor manufacturing device 1 40 etc. in the indoor control device room area i 丨 2 when performing operations such as maintenance or periodic inspection. The indoor control section 6 controls the semiconductor manufacturing apparatus 14 in the apparatus room. An outdoor control unit 18 for controlling the semiconductor manufacturing apparatus i 40 and the like from the outside of the device room may also be provided. The control unit of the semiconductor manufacturing apparatus 140 may also be provided in the semiconductor manufacturing apparatus 140 itself, and may be controlled from the control unit. Semiconductor manufacturing equipment. The above-mentioned indoor control unit 1 1 6, outdoor control unit 1 1 8, and other control units are constituted by, for example, an operation panel. Each of these indoor control units 1 1 6 and U 8 and half -27- (24) (24) 200411512 conductor manufacturing device 140 is electrically connected to the input / output unit 2 08 of the operator management device 200 through a communication line or the like. Can send and receive device information (device-specific operation information) such as access information and device status information. When each of the control sections described above controls the semiconductor manufacturing apparatus, the operator's ID and password are input from the control section in accordance with the operation, and then accessed. This allows you to specify which operator is controlling. The outdoor area U 4 of the device is an area where the outdoor control unit 1 1 8 is installed. In addition, the device outdoor area 1 1 4 is not necessarily limited to the installation area of the outdoor control unit 1 1 8, and may include a passage formed between the device room area 1 12. The clean outdoor area 1 2 0 indicates the area inside the factory other than the clean room. For example, the central monitoring room area 1 22, the clean room area 1 24, the storage area 1 126, the office area 1 2 8 and the rest room area 1 2 9 (may also include toilets). Device room area 112, device outdoor area 114 in clean room area 110 above, central monitoring room area 122 in clean room area 120, clean room area 1 2 4, storage area 1 2 6, office area 1 28. In each of the rest room areas 1 to 29, an operator detection sensor 130 is provided as an operator detection means. The operator detection sensor 130 is electrically connected to the input / output section 208 of the operator management device 2000 by a communication cable, and can send and receive sensing information from the operator detection sensor 130. The above-mentioned operator detection sensor 130 is constituted by, for example, a sensor that receives electromagnetic waves (or radio waves) of a transmitter carried by each operator. The operator's detection sensor 130 is, for example, a ceiling or wall installed in each area -28- (25) (25) 200411512 wall. Fig. 2 is an example in which a receiver 1 34, which is an example of the operator detection sensor 130, is disposed in the device room area 1 1 2 of the non-chamber room area i i 0. The receiver 1 3 4 is installed on the ceiling of the device room 1 2 2 divided by the device room area 1 1 2. On the other hand, the operator 1 3 6 always carries the transmitter] 3 8 ′ and simultaneously performs operations such as the semiconductor manufacturing apparatus 14 0. Operator 136 — Once the semiconductor manufacturing device 1 40 has to be maintained, for example, when entering the device room 1 2 2, the ceiling-mounted receiver 1 3 4 will receive the transmitter 1 carried by the operator. 3 8 electromagnetic waves coming. By this, the event that the operator 136 was in the device room area 112 can be detected. At this time, the above-mentioned transmitter 1 3 8 can also be used to send electromagnetic waves of different frequencies (radio frequencies) for different operators. Then, the frequency information associated with the frequency given to each operator and each operator is stored in the frequency information database as an example of the frequency information storage means. The frequency information database may also be included in various databases 2 10 as shown in FIG. 3. According to the frequency information of the frequency information database, the operator who is located in the operation area set by the operator detection sensor 130 can be received by receiving the frequency of the electromagnetic wave from the operator detection sensor 130. specific. The operator management device 2 00 is a sensor for detecting the operator frequency electromagnetic wave of the operator who has received the object frequency detected as the object of the detection from the sensor information of the operator detection sensor 130 1 3 0, and the operator detection sensor 1 3 0 is set to a specific work area as the work area in which the worker is located. In addition, the above-mentioned transmitter 1 3 8 can also encode the ID data identifying the identification information of each operator and convert it into electromagnetic waves. The receiver -29- (26) 200411512 1 3 4 series will receive The electromagnetic wave of the self-transmitting machine 1 3 8 is demodulated and decoded to obtain ID data, and it is sent to the operator as 2000 as sensor information. This ID is recorded in the operator skill library 2 50 as shown in FIG. 8. According to the ID information of the operator's skill information database (2 50 0), by receiving additional information from the operator detection sensor 1 3 0), the setting of the operator detection sensor 1 3 0 can be set. The operator of the domain is specified. In this way, the operator management device 2 0 0 finds the operator ID (identification information) as the detection object of the operation area from the sensor information of each operator detection sensor 1 3 0. The operator detection sensor 1 3 0, and the area of the operator detection sensor 1 3 0 is specified as the working area where the operator is located. In addition, 1 3 8 may be a mobile phone, a portable information terminal described later, and the like, and the receiver 1 3 4 and the transmitter 1 3 8 may both be transceivers. Specific examples will be described later. In addition, the operator ID (identification information) can be stored in advance in the memory means (not shown) of the transmitter 1 3 8 held by the user, or it can be stored in the memory of the transmitter 1 3 8 through the barcoded ID. In terms of means, for example, a bar code reading device such as an infrared reading means may be installed on a transmitter 1 3 8 of a mobile phone or a portable information terminal, and the barcoded ID may be read by the bar code reading means. After the memory device 1 3 8 memory means. (Operator Management Device) The operator management device 200, for example, manages the installation information (identification ID (identification operation area) from the above-mentioned operator detection and encoding, and can be composed of a received job by setting up a transmitter. Can be read. The means of taking is in the sending sensor (27) 200411512

1 3 0將資料輸入，根據該來自作業者偵測感應器1 3 0的資料來偵測各作業者所在區域。作業者管理裝置200，係如圖3所示，具備：含有CPU (中央處理裝置）、R〇M (唯讀記憶體）、RAM (隨機存取記憶體）等之記憶體的控制部202、顯不各種資訊的螢幕等之顯示部2〇4、用來輸入各種資料的輸入部206，上記來自作業者偵測感應器1 3 〇之資料進行輸入的輸出入部2 0 8、各種資料庫2 1 0，及記憶著其他未圖示的程式等之硬碟裝置等記憶手段。上記控制部202的記憶體，係存放著CPU存取用之程式或資料之物，例如可因應需要而將被記憶在上記硬碟裝置等之記錄媒體中的程式讀取出來而存放在其中。上記各種資料庫2 1 0，例如圖4所示，包含作業特定資訊資料庫220、作業優先度資訊資料庫2 3 0、作業技能資訊資料庫240、作業者技能資訊資料庫2 5 0、障礙資訊 (異常資訊）資料庫260等。1 3 0 Input data, and detect each operator's area based on the data from the operator detection sensor 1 3 0. The operator management device 200, as shown in FIG. 3, includes a control unit 202 including a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and the like. Display section 204 for screens and the like displaying various information, input section 206 for inputting various data, input / output section 2 for inputting data from operator detection sensor 1 3 0, and various database 2 10, and other storage methods such as hard disk devices that store other programs not shown. The memory of the above-mentioned control unit 202 stores programs or data for CPU access, for example, programs stored in a recording medium such as the above-mentioned hard disk device can be read out and stored therein as required. The above-mentioned various databases 2 1 0, for example, as shown in FIG. 4, include a job-specific information database 220, a job priority information database 2 3 0, a job skill information database 240, a worker skill information database 2 50, and obstacles. Information (abnormal information) database 260, etc.

(作業特定資訊資料庫）作業特定資訊資料庫220，係如圖5所示，係記憶著將區域資訊222和裝置資訊（針對裝置的作業資訊）224 和作業內容226賦予關連而呈的作業特定資訊。該作業特定資訊，係例如當需要特定作業者正在進行之作業時所使用。具體而言，藉由被作業者偵測感應器1 3 0偵測到的作業者之所在區域資訊和半導體製造裝置1 40的存取資訊等之作業特定資訊，以特定該作業者現在正在進行之作業（ -31 - (28) (28)200411512 現在作業）。區域資訊2 2 2，係如圖1所示之工廠各區域之資訊。本實施形態中，是將無塵室區域Π 〇內的裝置室區域Π 2 、裝置室外區域114，無塵室外區域.120中的中央監察室區域122、淸潔室區域124、保管庫區域126、辦公區域 1 2 8、休憩室區域1 2 9視爲各區域。裝置資訊2 2 4，係例如爲送往上記半導體製造裝震 1 4 0的室內控制部1 1 6、室外控制部1 1 8等之控制部的存取資訊，或發生異常時的半導體製造裝置1 40之警報音、警示燈等之異常報知資訊，需要維護時所發生的半導體製造裝置1 40之警報音' 警示燈等之維護報知資訊等。送往控制室之存取資訊例如是否有爲了進行半導體製造裝置 1 4 0的維護等之各作業之存取的資訊。作業內容2 2 6，係各區域內所進行之作業的種類。此處，茲佐以圖5說明各區域分別判斷作業內容2 2 6 之一例。首先，無塵室區域110之裝置室區域112中的作業，舉例爲障礙對應作業（障礙對應維護）、定期作業。上記裝置室區域1 1 2的作業內容中的障礙對應作業，係裝置室區域112內之半導體製造裝置14〇上發生障礙時爲了解除該障礙而進行之作業。該障礙對應作業中又分爲裝置電氣系統異常時的電氣系障礙對應作業，裝置機械系統異常時的機械系障礙對應作業，蝕刻處理等製造過程異常時的製程系障礙對應作業等。半導體製造裝置i 4()的障礙’係藉由該裝置的報知手段而藉由警報音等來報知，或 -32· (29) (29)200411512 以燈光手段使得警示燈閃爍等，來讓人知曉障礙發生之有無或障礙的種類。因此，當作業者被判斷是位於裝置室區域1 1 2內，且由作業特定資訊得知障礙正在發生時，則可判斷該作業者正在進行障礙對應作業。此時，可藉由作業特定資訊的障礙種類（例如電氣系 '機械系、製程系等）來判斷更詳細的障礙對應作業。此外，當有半導體製造裝置1 4 0的報知 (警報）時，一般作業者會從室內控制部1 1 6等存取該當半導體製造裝置1 4 0而切換至維護模式，並進彳了檢修動作等作業，因此亦可由此時作業者的存取資訊來判斷障礙對應作業。上記裝置室區域1 1 2之作業內容中的定期作業，例如對半導體製造裝置140進行之零件更換或溼式淸洗等作業。溼式淸洗，係作業者在裝置室區域112中將半導體製造裝置1 40的處理室打開而用藥水洗淨之作業。這裡雖然爲了舉例裝置室區域1 1 2的作業而以溼式洗淨做爲洗淨之例子，但並不一定要侷限於此。此外，當進行零件更換或溼式洗淨時亦會以報知（警報）或燈光閃爍等維護報知或從室內控制部1 1 6等進行切換至維護模式之作業而要存取該當半導體製造裝置1 4 0。因此，當作業者被判斷是位於裝置室區域1 1 2內時，若根據這些存取資訊或維護報知資訊等作業特定資訊，就可判斷該作業者正在進行定期作業。接著，無塵室區域1 1 0之裝置室外區域1 1 4的作業，可列舉如通常操作作業、定期作業 '其他作業。通常操作 -33- (30) (30)200411512 作業，係例如用以從室外控制部1 1 8進行半導體裝置之生產指示的製程條件等之輸入，或將收納有半導體晶圓的載體（FOUP，（Front Opening Unified Pod))設置、使其移動等作業。此外，設置、移動載體（F 0 U P )的作業，雖然是在裝置室區域1 1 2內進行，但因爲之後是從室外控制部118進行半導體裝置的生產指示，因此是包含在裝置室外區域Π 4的作業中。但是，將這些作業在裝置室區域 1 1 2中進行時亦可視爲裝置室區域1 1 2的作業。如此，通常操作作業，因爲通常是從室外控制部！ i 8 往半導體製造裝置1 4 0存取，故當作業者是被判斷位於裝置室區域1 1 2時，若根據存取資訊，就可判斷該作業者正在進行通常操作作業。裝置室外區域1 1 4中的定期作業，係例如對半導體製造裝置14〇之乾式洗淨或乾燥（ s e a s ο n i n g )等。乾式洗淨，係從室外控制部〗i 8等存取半導體製造裝置140’藉由輸入必要資訊而進行半導體製造裝置1 4 0的處理室等之洗淨。此處雖然以乾式洗淨或乾燥做爲裝置室外區域1 1 4之作業的例子，但並非一定侷限於此。裝置室外區域114中的其他裝置室外作業（圖6中含有後述之作業分類之中的其他作業），係半導體製造裝置 1 40之監視或周圍之淸掃等。這些係當作業者被判斷爲位於裝釐室外區域1 1 4時，而無存取資訊、維護報知資訊等作業特定資訊之情況·，就可判斷爲正在進行其他作業。若要使這些作業能更詳細的判斷，亦可例如從作業者的攜帶 -34- (31) (31)200411512 型資訊終端輸入監視、淸掃等作業內容。亦可將這些被輸入的作_內容資訊當作作業特定資訊來判斷作業。接著，無塵室外區域120的作業，例如有中央監察室區域122、淸潔室區域124、保管庫區域126、辦公區域 128之作業。這些作業全部包含在圖6中之後述作業分類中之其他作業內。又，休憩室區域1 2 9的休憩或廁所的使用亦可納入考量。上記中央監察室區域1 2 2、淸潔室區域 124、保管庫區域126、辦公區域128之作業，例如有生產準備作業（亦可爲工程管理作業）。生產準備作業，在中央監察室區域1 22例如進行半導體裝置的生產全程監視或生產行程排定（生產工程計畫）之作業的變更等，在保管庫區域1 2 6中進行商品的管理作業等，在辦公區域i 2 8 中進行零件的訂購其他雜物。淸潔室區域1 2 4中會進行無塵室內之空氣淸靜機等之故障等的障礙對應作業或空氣淸 f#機寺之疋期維護寺之疋期作業％。如上述，可根據作業者身處哪個區域來判斷正在進行之作業。此外，上述的例子中，雖然說明了關於位於工廠內的區域的作業，但即使工廠外，亦會進行收容著洗淨等所使用的藥品的藥品槽之納入作業等之工廠外作業。因此，，當偵測到作業者位於工廠外區域時就可判斷其正在進行工廠外作業。作業者是否位於工廠外區域的方法，例如可爲當配設在工廠內的作業者偵測感應器1 3 0都無法偵測到作業者的所在場所時，若該作業者有出勤就判斷其位於工廠外區域。 -35- (32) 200411512 如此，在本實施形態中，藉由做爲作業域資訊2 2 2及裝置資訊2 2 4來特定作業者的乃藉由作業者位於哪個區域的區域資訊222 該作業者正在進行之現在作業，而大致作業作業可再由存取資訊等之裝置資訊224判斷一定侷限於此，亦可僅藉由作爲作業特定資 2 2 2來特定現在作業。例如將工廠內之區域藉由區域資訊2 22亦可某種程度地詳細特定，亦可僅藉由作爲作業特定資訊的存取資訊 224來特定現在作業。 (作業優先度資料庫）作業優先度資訊資料庫2 3 0，係記憶著業分類與該作業分類所屬之作業優先度（優之作業優先度資訊。例如圖6所示最高優先起至最低優先度5的優先度2 3 2與作業分類優先度最高的優先度1的作業分類，係。該緊急作業，可列舉例如發生火災之際的據氣體偵測器的報知來應對氣體洩漏之氣體等。這些作業的特定，係例如由設在各裝置火災報知器等之災害用感測器來判斷。優先度2的作業分類，係對應設在裝置半導體製造裝置140的障礙的障礙對應作業作業中，包含如圖5所示的無塵室區域1 1 〇特定資訊的區現在作業。此而可大致判斷中之更詳細的。但是，並不訊的區域資訊再細分，而僅現在作業。又等之裝置資訊大致區分的作先順位）資訊度的優先度1 23 4 ° 屬於緊急作業滅火作業、根洩漏對應作業室區域1 1 2的室區域1 1 2之。此障礙對應之裝置室區域 -36- (33) (33)00411512 1 1 2中的障礙對應作業。該障礙對應作業，係對應如上述之電氣系障礙、機械系障礙、製程系障礙等之障礙的維護。又障礙對應作業中，亦包含淸潔室區域1 2 4中之空氣淸靜機等之電氣系障礙、機械系障礙。這些作業係會阻礙半導體裝置的生產、品質，導致效率低落。因此障礙的對應作業，是在非緊急時的一般時候之作業中最爲優先的。優先度3的作業分類，係通常操作作業。此通常操作作業，係包含圖5所示無塵室區域1 1 0的裝置室外區域 1 1 4中之通常操作作業。該通常操作作業，係例如用以進行上述之半導體製裝置的生產指示之製程條件等的輸入等，或將收納有半導體晶圓的載體（FOUP )設置、移動之作業。一般時候下原則上只要沒有任何障礙就以通常操作作業爲優先。這是因爲通常操作作業係爲了生產半導體裝置的作業。優先度4的作業分類，係定期作業。此定期作業，含有圖5所示之無塵室區域110之裝置室區域112中的定期作業，及裝置室外區域1 1 4中的定期作業兩者。該定期作業，可列舉有如上述之溼式洗淨、乾式洗淨、零件更換等之維護。甚至亦包含淸潔室區域1 24之空氣淸靜機等之定期作業。由於這些原則上是半導體裝置之生產中止爲止都無法進行之作業，故在本實施形態中設定爲較通常操作作業的優先度爲低。但是，並非一定侷限於此，亦可不拘泥於優先度而例如在半導體裝置之生產過程中判斷整體或前後之生產時程而認爲最合宜之時候來進行作業。此情況， -37- (34) (34)200411512 在哪個時間點切入定期作業，亦可爲由具有工程管理技能的作業者來判斷整體或前後之生產時程而決定，並按照時間點將上記優先度做適宜的變更。優先度5的作業分類，係屬於其他作業。此處所謂其他作業，除了包含圖5所示無塵室區域11〇之裝置室外區域1 1 4中的其他裝置室外作業，還包含無塵室外區域〗2 〇之中央監察室區域122的作業、保管庫區域126的作業、辦公區域1 2 8的作業、休憩室區域1 2 9的作業、以及工廠外區域之作業。因此’此處所謂其他作業，包含例如零件訂購作業、半導體裝置之生產時程作業之調整、半導體製造裝置140的監視、淸掃等。此外，本實施形態中的作業優先度雖然分爲5等，但並非一定侷限於此，可爲6等以上，亦可爲4等以下。此外作業的區分方式亦不侷限於此。 (作業技能資訊資料庫）作業技能資訊資料庫2 4 0，係記憶著作業本身所需的技能資訊（作業技能資訊），和後述之記憶作業者所具有之技能資訊（作業者技能資訊資）的作業者技能資訊資料庫2 5 0不同。作業技能資訊資料庫2 4 〇，具體而言係如圖 7所示係記憶著將作業242與大致區分的作業者分類244 賦予關連之作業技能資訊。上|5作業242’可在細分爲作業分類246與該作業分類246所含的作業內容248。此處的作業分類246係對應 •38- (35)200411512 於如圖6所每一該作業行該作業之首先，和作業者分對應作業，對應作業之機械系障礙作業係由製業者爲工程具有相應專並不是意味是有能夠對師，也可讓通常操導體裝置的以身爲操作著通常操作師通常都具通常操作。定期作此，定期作如上述一樣、操作員，示之作業分類234。每一該作業分類246 分類中所屬的作業內容2 4 8係被賦予關連最佳作業者分類244。針對火災之滅火作業等之緊急時對應作業類244無關地 > 以全體人貝進f了爲最佳。係以工程師來進行爲最佳。更進一步地，中的電氣系障礙對應作業係由電氣系工程對應作業係由機械系工程師、製程系障礙程系工程師來分別進行爲最佳。這是因爲師時各個作業者都有其專門領域，因此考業的工程師去進行作業爲最佳。換句話說著一定要讓專門的工程師去進行才可，而應該障礙的工程師存在，即使專門以外的該作業者進行作業。作作業，係爲了使半導體製造裝置140進生產而操作上記控制部1 1 6等之作業，因員的作業者來進行爲最佳。此外，這並非作業一定要由操作員來進行。例如，因爲有作爲操作員的技能，故亦可由工程師來業，例如係洗淨、零件更換等之維護作業業者來進行爲最佳。此外，關於該定期作並非一定要由定期作業者來進行。例如工因爲遇常都具有作爲疋期作業者的技能，或其著進，係障礙障礙師、對應當作量讓，這是若工程行半此，意味工程進行，因業亦程師故亦 -39- (36) 00411512 可由工程師來進行定期作業。其他作業，係例如半導體裝置的生產時程排。因此，其他作業，係由具有能夠對應該作業之者來進行爲最佳。 (作業者技能資訊資料庫）作業者技能資訊資料庫2 5 0，係如圖8所示作業者所具有的作業者技能資訊。該作業者技能以例如作業者整理編號2 5 1、姓名2 5 2、I D 2 5 3、、所屬2 5 5、作業者分類2 5 6、作業2 5 7等之項著。此外，這些項目之其他例子亦可記億了作業 (shift )、半導體製造裝置的運轉時程表等。又每一作業分類中記憶著進行該作業之際的單價。價係可被利用在例如當由別家公司派遣作業者到時根據作業不同而決定費用之情況下。整理編號2 5 1係作業者的流水碼，姓名2 5 2 係用來特定作業者。上記所屬2 5 5係記憶著該名作業者所屬之工業所名、公司名等。例如作業者爲具備本發明所系統之工廠的作業者時，所屬2 5 5內就會記憶著。又，當所屬爲其他工廠之作業者是被派遣到具所論之作業者管理系統的工廠時，所屬25 5中就所屬之其他工廠名。·甚至如後述之分爲販賣半導置140的公司（販賣公司）與購入該半導體製造定等作業其他作業 ’記憶了資訊，是密碼2 5 4 目而記憶者的時間，亦可在該作業單某家工廠及 ID253 廠名、事論作業者該工廠名備本發明記憶著其體製造裝裝置140 -40- (37) 200411512 之顧客的公司（購入公司）存在時，販賣公司的從業人員以作業者的身份被派遣到購入公司的工廠時’所屬2 5 5中就記憶著該販賣公司名。(Operation Specific Information Database) As shown in FIG. 5, the operation specific information database 220 stores the operation specific information that is associated with the area information 222, the device information (operation information for the device) 224, and the operation content 226. Information. The job-specific information is used, for example, when a job that a particular operator is performing is required. Specifically, with the operation specific information such as the area information of the operator detected by the operator detection sensor 130 and the access information of the semiconductor manufacturing device 140, it is specified that the operator is currently in progress Work (-31-(28) (28) 200411512 work now). Area information 2 2 2 is the information of each area of the factory as shown in Figure 1. In this embodiment, the device room area Π 2, the device outdoor area 114, and the clean room area .120 in the clean room area Π 〇 are the central monitoring room area 122, the clean room area 124, and the storage area 126 in the clean room area 120. Office area 1 2 8 and rest room area 1 2 9 are regarded as each area. The device information 2 2 4 is, for example, the access information sent to the control unit of the indoor control unit 1 1 6 and the outdoor control unit 1 1 8 of the semiconductor manufacturing device 1 0 0 described above, or the semiconductor manufacturing device when an abnormality occurs. 1 40 alarm sounds, warning lights, and other abnormal notification information, the semiconductor manufacturing device 1 40 alarm sounds' warning lights and other maintenance notification information that occurs when maintenance is required. The access information sent to the control room is, for example, whether there is access information for each operation such as maintenance of the semiconductor manufacturing apparatus 140. The work content 2 2 6 is the type of work performed in each area. Here, an example of determining the work content 2 2 6 in each area will be described with reference to FIG. 5. First, the operations in the equipment room area 112 of the clean room area 110 are, for example, obstacle corresponding operations (obstacle corresponding maintenance) and periodic operations. The obstacle corresponding operation in the operation contents of the device room area 1 12 above is the operation performed when the obstacle occurs in the semiconductor manufacturing device 14 in the device room area 112 to remove the obstacle. This obstacle correspondence operation is further divided into an electrical system obstacle response operation when the electrical system of the device is abnormal, a mechanical system obstacle response operation when the device mechanical system is abnormal, and a process system obstacle response operation when the manufacturing process is abnormal such as etching. The obstacle of the semiconductor manufacturing device i 4 () is reported by an alarm sound or the like by means of the notification means of the device, or -32 · (29) (29) 200411512 makes the warning light blink by means of light, etc. Know the existence or type of obstacle. Therefore, when the operator is judged to be located in the equipment room area 1 12 and the obstacle-specific operation is known from the operation-specific information, it can be determined that the operator is performing the obstacle-response operation. In this case, you can determine more detailed obstacle-response operations based on the types of obstacles (such as electrical system, mechanical system, and process system) that are specific to the operation. In addition, when there is a notification (alarm) of the semiconductor manufacturing apparatus 140, the general operator will access the semiconductor manufacturing apparatus 140 from the indoor control section 1 16 and the like to switch to the maintenance mode, and perform inspection operations, etc. Therefore, the operator's access information can also be used to determine the obstacle corresponding operation. The above-mentioned periodic operations in the operation contents of the device room area 1 12 include, for example, operations such as replacement of parts or wet cleaning of the semiconductor manufacturing device 140. The wet rinsing is an operation in which the operator opens the processing chamber of the semiconductor manufacturing apparatus 1 40 in the apparatus room region 112 and cleans it with a chemical solution. Although the wet cleaning is taken as an example for the operation of the equipment room area 1 12 here, it is not necessarily limited to this. In addition, when parts are replaced or wet-cleaned, maintenance notifications such as notifications (alarms) or flashing lights, or switching to maintenance mode from the indoor control unit 1 1 6 etc. are required to access the semiconductor manufacturing equipment 1 4 0. Therefore, when the operator is judged to be located in the equipment room area 1 12, if the operator is performing regular operations based on the job-specific information such as the access information or maintenance report information. Next, the operations of the outdoor area 1 1 4 of the device in the clean room area 1 10 include normal operation, regular operation, and other operations. Normal operation -33- (30) (30) 200411512 operations, such as inputting process conditions for manufacturing instructions for semiconductor devices from the outdoor control unit 1 1 8 or a carrier (FOUP, (Front Opening Unified Pod)) setting, moving, etc. In addition, the operation of setting and moving the carrier (F 0 UP) is performed in the device room area 1 12, but since the semiconductor device production instruction is subsequently issued from the outdoor control unit 118, it is included in the device outdoor area Π 4 in operation. However, when these operations are performed in the device room area 1 12, the operations in the device room area 1 12 may also be considered. In this way, the operation is usually operated because it is usually from the outdoor control department! i 8 accesses the semiconductor manufacturing device 140, so when the operator is judged to be located in the device room area 1 12, if the access information is used, it can be determined that the operator is performing normal operation. The periodic operation in the outdoor area 1 1 4 of the device is, for example, dry cleaning or drying (s e a s n n n g) of the semiconductor manufacturing device 14. The dry cleaning is performed by accessing the semiconductor manufacturing apparatus 140 'from the outdoor control unit [i8], etc., and entering necessary information to clean the processing chamber of the semiconductor manufacturing apparatus 140. Here, although dry washing or drying is taken as an example of the operation in the outdoor area 1 1 4 of the device, it is not necessarily limited to this. The outdoor operation of other devices in the device outdoor area 114 (including other operations in the operation classification described later in FIG. 6) is the monitoring of the semiconductor manufacturing device 1 40 or the sweeping of the surroundings. When the operator is judged to be located in the outdoor area 1 1 4 and there is no operation-specific information such as access information or maintenance information, it can be determined that other operations are in progress. If you want to make more detailed judgments about these tasks, you can also input tasks such as monitoring and sweeping from the operator's carry-34- (31) (31) 200411512 type information terminal. It is also possible to use these input work_content information as job-specific information to judge a job. Next, operations in the clean outdoor area 120 include operations in the central inspection room area 122, the clean room area 124, the storage area 126, and the office area 128, for example. These jobs are all included in other jobs in the job classification described later in FIG. 6. In addition, the use of rest or toilets in the rest room area 1 2 9 can also be considered. The central monitoring room area 1 2 2 above, clean room area 124, storage area 126, and office area 128 operations, such as production preparation operations (also engineering management operations). Production preparation operations, for example, in the central inspection room area 1 22, such as the monitoring of the entire production process of semiconductor devices or changes in production schedules (production engineering plans), etc., and the management of goods in the storage area 1 2 6 , Ordering other sundries in the office area i 2 8. In the clean room area 1 2 4, obstacles such as malfunctions of air purifiers in the clean room, etc., or air operations are performed. As described above, the work in progress can be judged according to which area the operator is in. In addition, although the above-mentioned example explained the operation in the area inside the factory, even outside the factory, the out-of-factory operation such as the loading operation of the medicine tank containing the medicines used for washing and the like is performed. Therefore, when an operator is detected in an area outside the factory, it can be judged that the operator is working outside the factory. A method for determining whether an operator is located outside the factory. For example, when the operator detection sensor 1 3 0 installed in the factory cannot detect the operator's location, if the operator is present, the operator is judged. Located outside the factory. -35- (32) 200411512 In this way, in this embodiment, the area information specifying the operator by using the operation area information 2 2 2 and the device information 2 2 4 222 is the operation. The current work being performed by the user can be determined by the device information 224 such as access information and so on, and the current work can also be specified only as the work specific resource 2 2 2. For example, the area in the factory can be specified in a certain degree of detail by the area information 2 22, or the current operation can be specified only by the access information 224 as the operation specific information. (Operation Priority Database) The operation priority information database 2 3 0 stores the job classification and the operation priority to which the operation classification belongs (excellent operation priority information. For example, as shown in FIG. 6, the highest priority starts from the lowest priority. Priority 2 of degree 5 is the job classification of priority 1 with the highest job classification priority 1. This emergency operation includes, for example, the response to a gas leak in response to a gas leak in the event of a fire, etc. The specificity of these operations is judged, for example, by a disaster sensor installed in each device's fire alarm, etc. The operation classification of priority 2 corresponds to the obstacle corresponding operation operation of the obstacle provided in the device semiconductor manufacturing apparatus 140. The area containing the specific information of the clean room area 1 1 0 shown in Figure 5 is now operating. This can be roughly judged in more detail. However, the area information is not subdivided, and it is only operating now. The information of the device is roughly prioritized.) The priority of the information degree is 1 23 4 ° It belongs to the emergency operation fire extinguishing operation and the root leakage corresponds to the operating room area 1 1 2 The field 112. Correspondence to the obstacle in the device room area -36- (33) (33) 00411512 1 1 2 This obstacle corresponding operation is maintenance corresponding to the above-mentioned obstacles such as electrical obstacles, mechanical obstacles, and process obstacles. In addition, the obstacle-related operations also include electrical obstacles and mechanical obstacles such as air and static machines in the clean room area 1 2 4. These operations impede the production and quality of semiconductor devices and lead to inefficiency. Therefore, the corresponding work of obstacles is the highest priority in the non-emergency work. A job classification with a priority of 3 is a normal operation job. This normal operation is the normal operation in the outdoor area 1 1 4 of the apparatus including the clean room area 1 10 shown in FIG. 5. This normal operation is performed by, for example, inputting process conditions and the like of the production instruction of the semiconductor device described above, or setting up and moving a carrier (FOUP) containing a semiconductor wafer. In general, as long as there are no obstacles, normal operations are given priority. This is because the operation is generally performed to produce a semiconductor device. The job classification of priority 4 is a regular job. This periodic operation includes both the periodic operation in the equipment room area 112 of the clean room area 110 shown in FIG. 5 and the periodic operation in the equipment outdoor area 1 1 4. The regular operations include maintenance such as wet cleaning, dry cleaning, and replacement of parts as described above. Even regular operations of air purifiers in clean room area 1 24 are included. Since these operations are in principle impossible until the production of a semiconductor device is suspended, in this embodiment, the priority is set to be lower than that of a normal operation operation. However, it is not necessarily limited to this, and the operation may be performed when it is deemed most appropriate not to be limited to priorities, for example, to judge the whole or the previous production schedule in the production process of the semiconductor device. In this case, at what point in time -37- (34) (34) 200411512 can be cut into regular operations, it can also be determined by an operator with engineering management skills to judge the overall or before and after production schedule, and the above will be prioritized according to the time point Make appropriate changes. The job classification of priority 5 belongs to other jobs. The so-called other operations here include, in addition to the other outdoor operations in the device outdoor area 1 1 4 of the clean room area 11 0 shown in FIG. 5, the operations of the central monitoring room area 122 in the clean outdoor area 2, Work in the storage area 126, work in the office area 128, work in the rest room area 129, and work in the area outside the factory. Therefore, "other operations" here include, for example, ordering of parts, adjustment of production schedules of semiconductor devices, monitoring and cleaning of semiconductor manufacturing devices 140, and the like. In addition, although the work priority in this embodiment is divided into five, it is not necessarily limited to this, and may be six or more or four or less. The way of distinguishing other tasks is not limited to this. (Working skill information database) The working skill information database 2 40 is for memorizing the skill information (job skill information) required by the writing industry itself, and the skill information (operator skill information resource) of the memorizing operators described later. Of the operator skill information database 2 5 0 is different. The work skill information database 2 40, specifically, as shown in FIG. 7, memorizes work skill information associated with work 242 and roughly classified worker classification 244. 5 jobs 242 'can be subdivided into job categories 246 and job contents 248 included in the job categories 246. The job classification 246 here corresponds to • 38- (35) 200411512 In each of the jobs shown in Figure 6, the job is performed first, and the job is assigned to the operator. The mechanical operation of the corresponding job is performed by the manufacturer. Having the corresponding expertise does not mean that there is an ability to be instructed. It is also possible for ordinary conductors to operate as conductors. Ordinary operators usually have ordinary operations. Do this on a regular basis, as described above, by the operator, as shown in the job classification 234. Each of the job categories 246 belonging to this job category 246 is assigned a related best operator category 244. The emergency response to the fire extinguishing operation, etc. 244 is irrelevant > It is best if all people are involved. It is best performed by engineers. Furthermore, it is best that the corresponding electrical system obstacle handling operations in the electrical system engineering are performed by the mechanical department engineer and the process system obstacle engineer respectively. This is because each operator in the teacher's class has his / her special field, so it is best for the engineer who has passed the examination to do the work. In other words, it is necessary to have a dedicated engineer to do it, but there should be an engineer with obstacles, even if the operator does not perform the job. The operation is to perform operations such as the above-mentioned control unit 1 16 in order to bring the semiconductor manufacturing apparatus 140 into production, and it is preferably performed by an operator. In addition, this does not necessarily have to be performed by the operator. For example, since it has the skills as an operator, it can also be performed by an engineer, such as a maintenance operator such as cleaning or replacement of parts. In addition, it is not necessary for the regular operator to perform the regular operation. For example, because workers often have the skills of being late-stage operators, or their work, they are teachers of obstacles and obstacles, and they should be treated as concessions. This is if the project is done in half, which means that the project is carried out. -39- (36) 00411512 Regular operations can be performed by engineers. Other operations are, for example, the production schedule of semiconductor devices. Therefore, it is best to perform other tasks by those who can handle the tasks. (Operator skill information database) The operator skill information database 2 50 is shown in Fig. 8 about the operator skill information possessed by the operator. The skills of the operator are, for example, items such as number 2 5 1, name 2 5 2, ID 2 5 3, 2 5 5, operator classification 2 5 6, assignment 2 5 7, and the like. In addition, other examples of these items may also include shifts, operation schedules of semiconductor manufacturing equipment, and the like. The unit price at the time of performing the operation is memorized in each operation classification. The price system can be used, for example, in a case where the cost is determined depending on the operation when an operator is dispatched by another company. The organization number 2 5 1 is the serial number of the operator, and the name 2 5 2 is used to identify the operator. The above-mentioned department 2 5 5 memorizes the name of the factory and company to which the operator belongs. For example, when the operator is an operator of a factory equipped with the system of the present invention, the operator will be remembered within 25.5. In addition, when an operator belonging to another factory is dispatched to a factory having the operator management system in question, the name of the other factory to which the factory belongs belongs to 25. · Even if it is divided into the sales of semi-conductive 140 companies (selling companies) and other operations such as purchasing semiconductor manufacturing, as described later, the information is memorized. It is a password of 2 5 4 items and the time of the memorizer can also be used in this operation. The name of a certain factory and ID253 factory, and the operator. The name of the factory. The present invention memorizes the body manufacturing equipment 140 -40- (37) 200411512. The customer (purchasing company) of the company, the employees of the sales company When dispatched to the factory where the company was purchased as an operator, the name of the sales company was remembered in the affiliate 2 5 5.

作業者分類2 5 6中，記憶著該作業者之圖7所示的作業者分類。當該作業者爲具有操作員之技能時則爲記憶著「操作員」，而當該作業者爲具有可進行定期作業之技能時則記憶著「定期作業員」。又若作業者爲工程師則最好能記憶如「機械系工程師」而詳細記憶至其專門領域。上記作業2 5 7，記憶著該作業者所具有之技能的作業。上記作業2 5 7，係對應於圖7所示的作業2 4 2。具體而言作業2 5 7係分爲「作業分類」與「作業內容」。作業者是否可進行該作業，例如是以〇、△、X來表示。〇是該作業者可進行該作業，△是該作業者進行該項作業是有困難但非不能進行之作業，X則是該作業者無法進行之作業此外，作業242中，並非只記憶作業者本身專門的作業，亦可記憶著實際可以進行之作業。例如該作業者分類若爲機械系工程師，則雖屬於其本身專門的機械系障礙對應作業爲〇，但因爲一般身爲工程師都可進行通常操作作業，故通常操作作業亦爲◦。又，即使該作業者爲電氣系工程師，有時亦可進行非本身專門的機械系障礙對應作業。此時則不只電氣系障礙對應作業爲〇，機械系障礙對應作業亦可爲〇。 -41 - (38) 200411512 (障礙資訊資料庫） _礙資訊（異常資訊）資料庫2 6 0，係半導體製造裝置1 4 0之錯誤代碼所代表之障代碼資訊資料庫2 6 2，及記憶著半導體裝置代表之障礙資訊之檢查結果資訊資料庫2 64 錯誤代碼資訊資料庫262，如圖9所示製造裝置1 4 0有障礙（異常）時的錯誤代碼的內容、具有能夠對應該錯誤之技能的作業連而成的錯誤代碼資訊加以記憶。例$[ AABB01」，以半導體製造裝置140爲例則力使處理室內產生之電漿來進行蝕刻處理之的處理室內的高頻反射波超過上限値時的錯誤對象部爲設於電漿蝕刻裝置的高頻產生 M acher)等。因此具有能夠進行該錯誤障礙能的作業者分類爲電氣系工程師。相對於此 CCDD0 1」係代表泵浦之冷卻水流量下降的錯誤對象部則爲泵浦單元等。因此，具有能障礙對應作業之技能的作業者分類爲機械系檢查結果資訊資料庫2 6 4，係如圖1 〇著將電漿蝕刻裝置等之半導體製造裝置140 體裝置發生檢查異常時的檢查結果，與具有查結果所代表之異常之技能的作業者分類，之檢查結果資訊。例如半導體製造裝置1 40 等，會經過檢查裝置進行各種檢查。這些檢具有：記憶著礙資訊之錯誤之檢查結果所〇，是將半導體、該錯誤代碼者分類賦予關 ]錯誤代碼「是施加高頻電電漿蝕刻裝置誤。此時的錯器或整合器（對應作業之技，錯誤代碼「錯誤。此時的夠進行該錯誤工程師。所示，係記憶所製造的半導能夠對應該檢賦予關連而成所製造的晶圓查結果所致的 -42- (39) 200411512 障礙，主要是由製程系工程師進行障礙對應作業。若利用此種障礙資訊資料庫260，則可因應障礙種類而決定進行該障礙對應作業之最佳作業者分類。 (作業者管理裝置所進行的處理）In the worker classification 2 5 6, the worker classification shown in FIG. 7 for the worker is memorized. "Operator" is memorized when the operator has the skills of an operator, and "regular operator" is memorized when the operator is the ability to perform regular operations. And if the operator is an engineer, it is better to memorize it as "mechanical engineer" and to memorize it to its special field in detail. Assignment 2 5 7 mentioned above, the assignment that memorizes the skills of the operator. The assignment 2 5 7 described above corresponds to the assignment 2 4 2 shown in FIG. 7. Specifically, homework 2 5 7 is divided into "work class" and "work content". Whether or not the operator can perform the operation is represented by, for example, 0, △, and X. 〇 indicates that the operator can perform the operation, △ indicates that the operator has difficulty but cannot perform the operation, and X indicates that the operator cannot perform the operation. In addition, in operation 242, not only the operator The specialized work itself can also remember the work that can actually be performed. For example, if the operator is classified as a mechanical engineer, although the corresponding mechanical system obstacle is 0, but as an engineer can perform normal operations, the normal operation is also ◦. In addition, even if the operator is an electrical engineer, it may be possible to perform a non-exclusive mechanical obstacle response operation. In this case, not only the corresponding operation of the electrical system obstacle is 0, but also the corresponding operation of the mechanical system obstacle may be zero. -41-(38) 200411512 (obstacle information database) _obstruction information (abnormal information) database 2 60, which is the fault code information database 2 6 2 represented by the error code of the semiconductor manufacturing device 1 40, and the memory The inspection result information database 2 64 containing the obstacle information represented by the semiconductor device is shown in FIG. 9. The error code information database 262 is shown in FIG. 9. Memorize the error code information associated with the skill operation. For example $ [AABB01 ”, taking the semiconductor manufacturing device 140 as an example, the plasma generated in the processing chamber is used to etch and the high-frequency reflected wave in the processing chamber exceeds the upper limit. The error target part is set in the plasma etching apparatus. High-frequency generation (Macher) and so on. Therefore, workers who have the ability to perform this error are classified as electrical engineers. In contrast to this, CCDD0 1 ”means that the cooling water flow rate of the pump is reduced. The error target is the pump unit. Therefore, operators with the ability to handle the corresponding tasks are classified into the mechanical department inspection result information database 2 64, as shown in Fig. 10. The inspection when an abnormality occurs in a semiconductor manufacturing device 140 such as a plasma etching device, etc. As a result, the results are classified with operators who have abnormal skills represented by the results. For example, the semiconductor manufacturing apparatus 1 40 etc. undergo various inspections through an inspection apparatus. These inspections have: the results of inspections that memorize errors that hinder information, and assign the classification of semiconductors and the error codes to them.] The error code "is an error in applying a high-frequency plasma etching device. This time, the wrong device or integrator ( Corresponding to the operation technique, the error code is "Error. It is enough for the engineer to perform the error at this time. As shown, the semiconductor manufactured by the memory can be related to the inspection result of the wafer produced -42- (39) 200411512 Obstacles are mainly handled by process engineers. If such an obstacle information database 260 is used, the best operator classification for the corresponding obstacles can be determined according to the type of obstacle. (Operator management Device processing)

接著，兹佐以圖1 1〜圖1 4來說明作業者管理裝置 2 00所進行之新作業分配處理的具體例。此外，本實施形態中之處理係可藉由被記錄在典型的硬碟裝置等記錄媒體的程式而加以實施。Next, a specific example of a new job allocation process performed by the operator management device 200 will be described with reference to FIGS. 11 to 14. The processing in this embodiment can be implemented by a program recorded on a recording medium such as a typical hard disk device.

本實施形態中的新作業分配處理，係當新作業發生時，根據作業者的現在作業而對該作業者判斷是否令其繼續進行現在作業還是令其進行新作業（判斷手段），並根據前記判斷手段的判斷結果而對該作業者發出作業實行指令 (指示手段）。會陸續考量新作業的作業內容及作業者的技巧、現在正在進行之作業與新作業的優先度等，而選擇最佳作業者並給予指示之處理。新作業分配處理，具體而言如圖11所示首先在步驟 S 1 1 0中判斷是否有新作業發生。例如從半導體製造裝置 1 40中的錯誤資訊以外，還有報知（警報）資訊等來判斷，並特定出新作業。例如當半導體製造裝置14 0中發生障礙時，作業者管理裝置200係收到來自半導體製造裝置140的警報並同時收到含有錯誤代碼的錯誤資訊。若利用障礙資訊資料庫 260中的錯誤代碼資訊資料庫262 ’則根據上記錯誤資訊 -43- (40) 200411512 的錯誤代碼就可特定出該新作業是針對哪個障礙的作電氣系障礙對應作業、機械系障礙對應作業）。又’當收到來自半導體製造裝置〗4〇中的檢查裝該檢查結果有異常時’若是利用障礙資訊資料庫260 檢查結果資訊資料庫2 6 4，則可特定爲製程系障礙對業，並亦可進一步取得該障礙的詳細。又’當半導體製造裝置140的批次（l〇t )結束會有批次結束之通知。藉此可以判斷新作業是F 0 U P 動等，而進行可針對下個批次的準備作業等之定期作通常操作作業等。當有來自半導體製造裝置1 4,0的洗之通知時，就可將新作業特定爲定期作業。接著於步驟S 1 2 0中抽出能夠進行該新作業的作 (作業者抽出手段之例子）。例如，藉由作業技能資料庫240搜尋最適合進行該新作業的作業者分類，並作業者技能資訊資料庫2 5 0將具有該作業者分類之作予以抽出。又，即使不是屬於最適合進行該新作業之者分類的作業者，作業者技能資訊資料庫2 5 0的作業欄位內爲〇和△之作業者都可進行新作業。因此這些者亦爲抽出之對象。此外，作業者技能資訊資料庫2 5 0之作業2 5 7欄，是例如電氣系工程師則電氣系障礙對應作業內必定，使得作業者分類之專門作業必定爲〇。又，作業者是專門以外的作業也會有打〇之情形，也有即使非專業但也不是不能進行之作業而被打上△之情形。因此業（置，中之應作時，之移業，淨等業者訊資根據業者作業 257 作業位中打〇即使門作，不 -44- (41) (41)200411512 依據作業者分類，而是根據作業者技能資訊資料庫2 5 0之作業2 5 7欄位只要是〇和△之作業者，都可抽出。接著，於步驟S 1 3 0中賦予作業者優先順位（優先順位賦予手段）。根據作業技能及作業者技能而從最佳作業者起賦予優先順位。例如作業者技能資訊資料庫2 5 0的作業欄位內打〇之作業者的優先順位爲高。這是因爲該作業爲將專門的作業者優先分配作業之故。此外，對作業者賦予優先順位之處理的詳細將於後述。接著於步驟S 1 4 0中，決定進行作業的作業者。作業者之決定，係例如從優先順位高的作業者起，根據該作業者現在正在進行之作業與新作業的優先度而進行。此外，決定該作業者之詳細處理將於後述。接著於步驟S 1 5 0中對步驟S 1 4 0所決定的作業者發出實行新作業的指示（指示手段）。此時亦可藉由例如對該作業者所持有的攜帶型資訊終端發出使其實行新作業之指示0 接著於步驟S 1 60中判斷該作業者是否有現在作業。因爲步驟S 1 4 0的作業者決定處理中偵測了現在作業（圖 13所示步驟S 3 20 )，故利用該結果而進行判斷。如此，則當指示新作業之作業者有現在作業時，關於該現在作業就必須要選擇替代的作業者而發出指示。步驟S 1 6 0中若判斷該作業者有現在作業時，則於步驟S 1 70將現在作業設爲新作業而回到步驟S 1 2 0，並決定該作業的替代人。又若於步驟S1 60中判斷該作業者沒有現在作業時，則結 -45- (42) 200411512 束該處理。此處’以圖1 2的子常式來說明上記步驟！業者之優先順位賦予處理（作業者優先順位賦一例。步驟S2 I 0中對於被認定爲新作業的作業者技目t：資δίΐ資料庫250之作業257欄中打〇搜尋鍵’以令此種作業者的優先順位爲高而排步驟S220中，以新作業的作業者分類爲第二使和該作業者分類一致的作業者分類之作業者爲最高而排序。如此，作業者技能資訊資料庫2 5 〇之作業，且和新作業之作業者分類一致的作業者會變順位。例如若具有該新作業之作業技能的作業分類爲電氣系工程師時，被抽出的作業者中即系工程師，電氣系工程師的優先順位仍爲高。 S 1 4 0中決定作業者之際，可從最適切的作業斷是否適合勝任新作業。藉此，可儘早發現最業的作業者。接著，參照圖1 3的子常式來說明步驟S 1 者決定處理之一例。首先步驟S 3 1 0中如圖] S 1 40所獲得之作業者的優先順位假設爲k=1，高者依序進行作業者決定處理。接著，在步驟測出作業者現在正在進行之作業（現在作業）特定手段之例）。作業者之現在作業之偵測，該作業者正位於哪個區域而行之。 5 1 3 0中的作予手段）之業，係以作者作爲第一序。接著於搜尋鍵，以的優先順位欄位中爲〇成最局優先者之作業者使含有機械藉此，步驟者中依序判合適於新作 5 0中的作業 ^所示步驟而優先順位 S 3 2 0中偵 (現在作業係例如根據 -46- (43) (43)200411512 關於該作業者之作業偵測處理係例如圖1 4所示的子常式般地進行（現在作業特定手段之例）。藉此可某種程度地偵測作業（作業分類）。具體而言，係根據作業者偵測感應器1 3 0傳來的感測器資訊而偵測出作業者正位於無塵室區域1 1 0內的裝置室區域1 1 2等之上記區域中的哪個區域。例如偵測到該作業者之頻率的作業者偵測感應器 1 3 0之設置區域就視爲該作業者所在區域。該作業者之頻率，若被設置在無塵室區域內之裝置室區域112的作業者偵測感應器1 3 0所偵測，則判斷該作業者位於裝置室區域1 1 2內；若被設置在裝置室外區域1 1 4的作業者偵測感應器1 3 0所偵測，則判斷爲該作業者位於裝置室外區域 114° 接著，步驟S42 0中偵測出往半導體製造裝置140的存取資訊等之裝置資訊。藉此，可更詳細地偵測出作業。來自半導體製造裝置1 40和控制部1 1 6、1 1 8等之存取的裝置資訊，被作業者管理裝置200所收信。藉由來自該存取資訊中的ID與密碼來特定出作業者，並判斷該作業者正在進行什麼作業。又，半導體製造裝置1 40的報知（警報）資訊等之裝置資訊亦被作業者管理裝置200所收信。從該報知資訊亦可偵測出作業。接著於步驟S4 3 0中藉由上記區域資訊及上記裝置資訊’根據圖5所示作業特定資訊資料庫220之作業特定資訊’特定出該作業者的現在作業。例如當判斷出區域資訊爲作業者身處無塵室區域110中的裝置室區域112，且由 -47- (44) (44)200411512 裝置資訊有報知資訊、有障礙對應存取時，就將現在作業之作業內容判斷爲正在進行障礙對應作業。接著，如圖13所示步驟S 3 3 0中判斷該作業者是否有現在作業。若步驟S 3 2 0有特定出作業時就判斷爲有現在作業，若步驟S 3 2 0沒有特定出作業時則判斷爲沒有現在作業。當步驟S 3 3 0判斷爲沒有現在作業時，則步驟S 4 0 0 會將該作業者決定爲進行新作業的作業者（作業者特定手The new job allocation process in this embodiment is based on the operator's current job to determine whether to continue the current job or to perform a new job (judgment means) based on the current job of the operator when a new job occurs, and according to the preface As a result of the judgment by the judgment means, a job execution instruction (instruction means) is issued to the worker. The content of new work and the skills of the operator, the priority of the current work and the new work will be considered successively, and the best operator will be selected and given instructions. The new job allocation process, specifically, as shown in FIG. 11, first determines whether a new job has occurred in step S 1 10. For example, in addition to the error information in the semiconductor manufacturing apparatus 1 40, there is also a report (alarm) information to determine and specify a new operation. For example, when an obstacle occurs in the semiconductor manufacturing apparatus 140, the operator management apparatus 200 receives an alarm from the semiconductor manufacturing apparatus 140 and simultaneously receives error information including an error code. If the error code information database 262 'in the obstacle information database 260 is used, then according to the error code of the above error information -43- (40) 200411512, it is possible to specify which obstacle the new operation is for the electrical system obstacle corresponding operation, Corresponding to mechanical obstacles). If the inspection result from the semiconductor manufacturing equipment [40] is received and the inspection result is abnormal ', if the obstacle information database 260 inspection result information database 2 6 4 is used, it may be specified as a process obstacle countermeasure, and Further details of this obstacle can also be obtained. Also, when the batch (10t) of the semiconductor manufacturing apparatus 140 is ended, a notification of the end of the batch is issued. This makes it possible to determine whether the new operation is F 0 U P or the like, and to perform regular operations such as preparation operations for the next batch. When a notification is received from the semiconductor manufacturing apparatus 14.0, a new job can be specified as a regular job. Next, in step S 120, an operation capable of performing the new operation is extracted (an example of an operator extraction means). For example, the operator skill database 240 is searched for the operator classification most suitable for the new operation, and the operator skill information database 250 extracts the work having the operator classification. In addition, even if the operator is not the operator who is most suitable for the classification of the new operation, the operator who has 0 and △ in the operation field of the operator skill information database 250 can perform the new operation. Therefore, these are also the targets of extraction. In addition, the column 257 of the operation of the operator's skill information database 270 is, for example, an electrical engineer must be in the corresponding operation of the electrical system obstacle, so that the special operation classified by the operator must be 0. In addition, if the operator is not specialized, it may be marked as 0, and even if it is not professional, it is not impossible to be performed and may be marked with △. Therefore, when the job is set, when the job is due, when the job is moved, the net operator ’s information is based on the operator ’s job 257. Even if the job is done, no -44- (41) (41) 200411512 is classified according to the operator, and It is based on the operator ’s skill information database 2 ’s 5 ’s 2’7 ’s in the field. As long as the operators are 0 and △, they can be extracted. Next, in step S 1 3 0, priority is given to the operators (priority ordering means) ). Priority is given from the best operator according to the job skills and the skills of the operator. For example, the priority of the operator who hits 0 in the job field of the operator skill information database 2 50 is high. This is because The operation is to assign priority to a specific operator. In addition, the details of the process of giving priority to the operator will be described later. Next, in step S 1 40, the operator who performs the operation is determined. The operator's decision, For example, starting from a worker with a high priority, it is performed according to the priority of the worker's current work and new work. In addition, detailed processing for determining the worker will be described later. In step S 1 50, an instruction (instruction means) for performing a new operation is issued to the operator determined in step S 1 40. At this time, for example, it can also be issued by a portable information terminal held by the operator Instruction 0 to perform a new job. Then, in step S 1 60, it is determined whether the worker has a current job. Because the worker in step S 1 40 determines that the current job is detected during processing (step S 3 20 shown in FIG. 13). ), So use this result to make a judgment. In this way, when the operator instructing a new job has a current job, an alternative operator must be selected and issued an instruction regarding the current job. If it is judged in step S 1 60 If the operator has a current job, the current job is set as a new job in step S 1 70 and the process returns to step S 1 2 0 and a substitute for the job is determined. If it is determined in step S 1 60 that the operator is not present At the time of the assignment, the process ends at -45- (42) 200411512. Here, the steps described above are described with the subroutine of Fig. 12! Priority assignment processing of the operator (an example of priority assignment by the operator. Step S2 I 0 Medium was identified as The operator's skill t of the assignment: Enter the search key 'in the column 257 of the assignment in the database 250 to make the priority of such an operator higher. In step S220, the operator of the new assignment is classified as second The operators whose operator classification is consistent with the operator classification are ranked highest. In this way, the operations of the operator's skill information database 2 5 0 and the operators consistent with the operator classification of the new operation will be ranked. For example If the job with the new job's work skills is classified as an electrical engineer, the extracted operator is an engineer, and the priority of the electrical engineer is still high. In S 1 40, when determining the operator, it is possible to determine from the most appropriate task whether it is suitable for the new task. With this, the most professional operators can be found early. Next, an example of the determination process in step S 1 will be described with reference to a subroutine of FIG. 13. First, as shown in step S 3 10], the priority order of the operator obtained in S 1 40 is assumed to be k = 1, and the higher one performs the operator decision processing in order. Next, at the step, an example of a specific means by which the worker is currently working (current work) is detected. The detection of the operator's current operation is performed in which area the operator is located. The authors in the 5 1 3 0) job are based on the author as the first order. Then in the search key, the operator with the priority order field of 0% is the operator with the highest priority, so that the mechanics are included, and the stepper sequentially judges the steps suitable for the new work in 50 ^ and the priority order is S. 3 2 0 The detection (now the operation is based on, for example, -46- (43) (43) 200411512) The operation detection processing of the operator is performed as a subroutine shown in Figure 14 (now the specific method of operation Example). This can detect the work to a certain degree (job classification). Specifically, it is detected that the worker is located in a dust-free environment based on the sensor information from the operator detection sensor 130. Device in the room area 1 1 0 Which of the areas described above is the room area 1 1 2 etc. For example, the setting area of the operator detection sensor 1 3 0 that detects the frequency of the operator is regarded as the operator Area. If the frequency of the operator is detected by the operator detection sensor 1 30 in the device room area 112 of the clean room area, it is determined that the operator is located in the device room area 1 1 2 ; If it is set by the operator in the outdoor area of the device 1 1 4 Detected by the sensor 130, it is determined that the operator is located at 114 ° in the outdoor area of the device. Next, in step S42 0, device information such as access information to the semiconductor manufacturing device 140 is detected. By this, more detailed information can be obtained. The operation is detected by the device. The device information accessed from the semiconductor manufacturing device 1 40 and the control unit 1 6 and 1 18 is received by the operator management device 200. The ID from the access information is used. The operator and the password are used to identify the operator and determine what the operator is doing. In addition, device information such as notification (alarm) information of the semiconductor manufacturing device 140 is also received by the operator management device 200. Information from this report The operation can also be detected. Then in step S4 30, the current operation of the operator is specified by the above-mentioned area information and the above-mentioned device information according to the operation-specific information of the operation-specific information database 220 shown in FIG. When it is determined that the area information is the device room area 112 in the clean room area 110 of the operator, and the information is reported by -47- (44) (44) 200411512, and the access is blocked, it will be It is determined that the obstacle corresponding operation is being performed in the operation content of the operation. Next, it is determined whether the operator has a current operation in step S 3 30 shown in FIG. 13. If there is a specific operation in step S 3 2 0, it is determined that there is an operation. If there is no current job in step S 3 2 0, it is judged that there is no current job. When it is judged in step S 3 3 0 that there is no current job, step S 4 0 0 will determine the worker to perform a new job. Operator (operator-specific hand

相對於此，若步驟S 3 3 0判斷爲有現在作業時，則步驟S3 4 0中根據作業優先度資訊資料庫2 3 0的作業優先度資訊來取得現在作業的優先度，並在步驟S 3 5 0中取得新作業的優先度。接著於步驟S 3 60中判斷現在作業的優先度（U1)是否較現在優先度（U2)爲高或者相同。於步驟S 3 5 0若當現在作業的優先度是較現在優先度爲高或者相同時，則將步驟 S 3 70的優先順位進行增加（k = k+l ) 。接著，步驟S 3 8 0中對於所有已經賦予優先順位的作業 _ 者，判斷是否已經進行處理。例如先將被抽出之已賦予優先順位的作業者數設爲N，就判斷優先順位是否已經成爲 k = N + l。當步驟S3 8 0中判斷爲對於所有未賦予優先順位的使用者沒有正在進行處理時，例如判斷爲優先順位沒有變成k = N+l時，則返回步驟S 3 20，對下一個優先順位的作業者進行處理。上記步驟S 3 5 0中若判斷爲該作業者的現在作業優先度較現在優先度爲低時，則步驟S400中就將該作業者決 -48- (45) (45)200411512 定爲進行新作業的作業者。被如此決定之作業者會被圖 1 1所示的步驟S 1 5 0給予進行新作業的指示。如此將偵測出的現在作業與新作業之優先度進行比較，新作業的優先度爲高則對該作業者發出出指示。藉此，即使有新作業發生時，因爲可按照現在作業的優先度判斷是否讓該作業者進行新作業，故優先度越高的作業，亦即越重要的作業可越盡快處理。藉此，可達到作業分配的最佳化。又，上記步驟S 3 8 0中若判斷爲所有已經賦予優先順位的作業者都已經進行處理時，例如優先順位已經成爲 k = N+l時，則於步驟S 3 90進行錯誤處理。錯誤處理可爲例如將「並未找到該當作業者」之訊息顯示在顯示部2〇4 。此情況下亦可將該訊息通知給可能可以進行該作業的作業者。若根據上記此種處理，則由於優先度越高的處理，找到作業者的機會越多，故找不到作業者的處理爲優先度低之處理的可能性爲高。因此，例如亦可錯開時間而使上記處理再度進行。此外’步驟S 3 9 0的錯誤處理中，亦可從根據作業技能資訊資料庫240的作業技能資訊找不到作業者的作業中搜尋具有該作業所需技能之作業者的作業者分類，並將上記作業、作業者分類、時間日期等以日誌檔（1〇g file ) 記憶起來。例如當找不到作業者的作業是機械系障礙對應作業時’因爲可將具有該作業所需技能之作業者的作業者分類搜尋爲機械系工程師，故在日誌檔中記憶下機械系障 -49 - (46) (46)200411512 礙對應作業、機械系工程師等。藉此，可了解該工廠中機械系工程師正在短缺的可能性。如此，上記日誌檔，係可作爲判斷是否需要增減該工廠內的作業者之判斷材料。例如，錯誤處理頻繁發生時則作業者不足，且可推測哪個作業者分類的作業者爲不足。此外，亦可藉由削減作業者達到不會引發錯誤處理之程度，來削減多餘的作業者。藉此，由於可在該工廠內配置真正所需數量作業者分類之作業者，故不只可提升每一位作業者單人的作業效率，還可達成作業者數量的效率化。若根據此種處理，例如發生了新作業爲機械系障礙對應作業，而可進行該新作業的作業者若抽出來的是電氣系工程師A氏、機械系工程師B氏、操作員C氏，則這些作業者的優先順位爲，機械系工程師B氏、電氣系工程師 A氏、操作員C氏之順位，並依照該順序而被處理。此時，若B氏沒有現在作業，則新作業的作業者就決定爲B 氏。又即使當B氏有現在作業時，該現在作業例如爲通常操作作業時，若根據如圖6所示的作業優先度資訊資料庫 230，則因爲B氏的新作業之機械系障礙對應作業的優先度，是較現在作業之通常操作作業的優先度爲高，故此時亦會決定B氏爲新作業的作業者。此時，B氏的現在作業的通常操作作業，會被當作新作業而重新處理。此時作業者的優先順位，會以操作員C 氏、電氣系工程師A氏、機械系工程師B氏的順序來處 -50- (47) (47)200411512 理。此時，若操作員C氏沒有現在作業，則決定C氏爲新作業的作業者。又即使當c氏有現在作業時’該現在作業例如爲定期作業時，若根據如圖6所不的作業優先度資訊資料庫2 3 0 ，則因爲C氏的新作業之通常操作作業的優先度，是較現在作業之定期作業的優先度爲高，故此時亦會決定C氏爲新作業的作業者。此外，當C氏的現在作業是在別的區域進行通常操作作業時，則因爲根據圖6所示的作業優先度資訊資料庫 2 3 0，現在作業與新作業沒有優先度上的優劣’故讓C氏繼續進行現在作業。若電氣系工程師 A氏沒有現在作業，則決定A氏爲新作業的作業者。 (第2實施形態）接著，將參照圖面來說明將本發明適用於半導體製造工廠時的作業者管理裝置之第2實施形態。此外’第2實施形態中，由於圖1〜圖1 〇的構成都相同’故省略其詳細說明。又，和第1實施形態相同的部份則賦予相同符號並省略其詳細說明。茲佐以圖1 5、圖1 6來說明第2實施形態中作業者管理裝置2 00所進行之新作業分配處理的其他具體例子。此外，本實施形態中之處理係可藉由被記錄在典型的硬碟裝置等記錄媒體的程式而加以實施。第2實施形態的新作業分配處理中，和第1實施形態、 -51 - (48) (48)200411512 之圖1 1所示情形的不同點，在於可進行一種作業再分配，若有新作業發生，則對於包含有該新作業與所有作業者之現在作業的全作業，陸續考慮各作業的優先度 '作業技能、作業者技能等，而使最合適的作業者進行作業。具體而言，如圖1 5所示首先在步驟s 5 1 0判斷是否有新作業發生。相同於上記步驟S 3 1 0例如是由半導體製造裝置1 4 〇中發生障礙時的錯誤資訊、報知資訊來進行判斷。接著於步驟S 5 2 0中偵測出所有作業者的現在作業。該作業者的現在作業之偵測處理，係例如圖1 4所示之子常式對每一位作業者重複進行直到全作業者都進行完畢。接著步驟S 5 3 0中對於含新作業及現在作業之全作業進行再分配（作業再分配手段）。如此，當有新作業發生時，由於是偵測出全作業者的現在作業，而將含有該新作業與現在作業的全作業重新進行再分配，故對含有新作業的全作業可分配更適切的作業者。藉此，可達成作業再分配的效率化、提升作業效率。此外，作業的再分配處理將詳述於後。接著於步驟S540中對各作業者發出令該作業者進行所被分配到的作業之指示。例如亦可藉由例如對該作業者所持有的攜帶型資訊終端發出使其實行新作業之指示。接著於步驟S 5 5 0中判斷是否有未分配的作業殘留。若步驟S 5 5 0判斷爲有未分配的作業殘留，則於步驟s 5 60 中對於可對應該作業·的作業者通知「尙有未分配之作業，請對應」然後結束處理。若步驟S 5 5 0中判斷沒有未分配 -52- (49) (49)200411512 的作業殘留則直接結束處理。此處，參照圖1 6所示的子常式來說明步驟S 5 3 〇中的作業再分配處理（作業再分配手段）之一例。首先，步驟 S 6 1 0中關於含有新作業及現在作業的全部作業，根據作業優先度資訊資料庫230的作業優先度資訊而從優先度高者依序進行排序。此時之作業的優先順位假設爲W。接著於步驟S 6 2 0中，從優先順位W = 1起，從優先度最高的作業開始，藉由以下的處理來決定最適合的作業者。接著於步驟S 63 0抽出可進行該作業之作業者。接著於步驟S640中將優先順位賦予作業者。該優先順位賦予處理，係藉由例如圖1 2所示子常式而進行。接著，步驟 S 6 5 0中決定作業者。該作業者決定處理，係例如藉由圖 13所示之子常式而進行。接著，步驟 S 6 6 0中將作業的優先順位 W增加（ W = W+】），並於步驟S670中判斷該當之全部作業是否已經處理。如此，原則上要讓全部的作業都決定作業者。但是，亦有可能隨著作業不同而有找不到作業者之情形。此時，藉由如圖15所示步驟S 5 5 0、5 60，將未分配作業通知給可能作業的作業者。若根據此種處理，則例如若有新作業發生，則將全作業者的現在作業予以偵測，而對包含新作業的所有作業，根據作業優先度資訊資料庫2 3 0來賦予優先順位。例如全部的作業之優先順位維障礙對應作業、通常操作作業，則會先從機械系障礙對應作業來決定作業者。 -53- (50) (50)200411512 關於最優先作業之機械系障礙對應作業，若被抽出來當作進行該作業的作業者爲電氣系工程師A氏、機械系工程師B氏、操作員c氏，則這些作業者的優先順位會是機械系工程師B氏、電氣系工程師A氏、操作員C氏，而按照此順序處理。此時，若B氏沒有現在作業，機械系障礙對應作業的對應作業之作業者就決定維；B氏。接著’決定通常操作作業的作業者。此時作業者的優先順位，會是操作員C氏、電氣系工程師A氏、機械系工程師Β氏，而按照此順序處理。此時，若操作員c氏沒有現在作業，則新作業的作業者就決定爲C氏。如此’當新作業發生時，進行含有新作業的全作業之再分配，且此時是由作業之優先度爲高的順序決定作業者，故可讓優先度高的作業，亦即重要的作業能越早被處理。又，即使當進行包含新作業的全作業之再分配的情況下 ’也可比較偵測到的現在作業與新作業的優先度，若新作業的優先度較高則對該作業者發出指示令其進行新作業。藉此，優先度高的重要作業可及早選擇最適合作業者。 (第3實施形態）接著，將參照圖面來說明將本發明適用於半導體製造工廠時的作業者管理裝置之第3實施形態。第3實施形態中，由於圖1〜圖1 0的構成都相同，故省略其詳細說明。又，和第1實施形態相同的部份則賦予相同符號並省略其詳細說明。此外’本實施形態中之處理係可藉由被記錄 •54- (51) (51)200411512 在典型的硬碟裝置等記錄媒體的程式而加以實施。茲佐以圖1 6來說明第3實施形態中作業者管理裝置 2 00所進行之作業資訊記憶手段之一例的作業資料庫的產生處理。作業資料庫，係用以產生後述各作業者之作業曰報所根據的資料庫。因此，作業資料庫內記憶著每個作業者再每個所定時間所進行過的作業。因此，該作業資料庫的產生處理，係按照作業日報裡所記載的時間而每到所定時間便進行。例如若爲每1小時產生作業日報，則令上記作業資料庫的產生處理爲每1小時執行；若爲每3 0分鐘產生作業日報，則令上記作業資料庫的產生處理爲每3 0 分鐘執行。作業資料庫的產生處理爲，首先步驟S 7 1 0中偵測出所有作業者的現在正在進行之作業（現在作業）。各作業者的現在作業之偵測處理，係例如圖1 4所示之子常式對每一位作業者反覆進行直到全作業者都進行完畢。如此，只要每到所定時間就偵測出作業者的現在作業並予以記億，則可產生各作業者別的作業資料庫。該作業資料庫，亦可如圖3所示含有各種資料庫2 1 0。接著，參照圖18來說明作業者管理裝置200所進行之作業報告產生手段之一例的作業日報產生處理。作業曰報產生處理，係將每位作業者的作業日報自動產生之處理〇首先步驟S810中進行作業者之特定’以特定出要產生作業日報的作業者。此處亦可在操作畫面上允許作業者 -55- (52) (52)200411512 的輸入，來對特定之作業者產生作業日報。此外亦可自動地——特定出各作業者，而對所有的作業者產生作業日報〇接著步驟S 8 2 0中根據如圖1 7所示的處理所產生的作業資料庫，產生該作業者的作業日報資料。作業日報資料係將該作業者之該當日中的作業抽出而產生。接著於步驟S 8 3 0中列印作業日報。例如藉由連接在作業者管理裝置200的印表機，來將作業日報列印輸出而結束該處理。如此所產生的作業日報之一例示於圖19。該作業日報，係將所定時間設定爲每1小時進行圖1 7所示作業資料庫產生處理而偵測作業者之現在作業之情形的例子。此外，該作業日報，係例如由別家公司派遣作業者到某家工廠時根據作業不同而決定費用之情況下亦可利用。而在作業者技能資訊資料庫2 5 0中有記憶著作業單價時，亦可搜尋各作業的作業單價而列印，根據其合計額來請求費用。又，若從作業資料庫取出每月份的資料，就可產生作業月報而列印。如此，若根據本實施形態，則作業日報、作業月報等作業報告書都可容易產生。而且因爲可自動地偵測作業者的作業而產生做爲作業報告書之基礎的作業資訊’故可節省作業者每次進行作業時要從攜帶型資訊終端等輸入之手續，而可提升作業效率。又，由於不須要委託作業者自己報告，故可經常地正確地產生作業報告。 -56- (53) (53)200411512 若根據此種本發明，則可容易地特定出作業者現在正在進行之作業，故即使例如發生新作業時，也能陸續判斷現在作業與新作業之優先度，選擇最適合作業者來進行作業。如此可適才適所地配置作業者，提高各作業者的作業效率。此外，上述實施形態中，圖1所示的作業者偵測感應器1 3 0，雖然是以設置在各區域1 1 〇、1 2 〇的例如收信機 1 3 4，藉由通信纜線連接至作業者管理裝置2 0 0，但並不一定侷限於此，亦可以網路取代通信纜線來連接。又，圖 2所示收信機1 34，亦可爲具有收發信機能的收發信機，發信機1 3 8亦可爲具有收發信機能的收發信機。此時，亦可在攜帶型資訊終端內設置臭氣感測器等各種感測器，根據這些感測器之偵測値來進行異常判斷。具體而言’如圖2 0所示，例如裝置室區域丨】2配設有具備網路連線機能例如路由機能的附帶網路連線機能之收信機3 2 0。附帶網路連線機能之收信機3 2 〇係透過網路 3 0 0連接至作業者管理裝置2〇〇。作業者管理裝置200係透過具備網路連接機能例如路由機能的網路連線裝置3 4 〇連接至網路3 00。作業者攜帶如圖2所示的發信機〗3 8，亦可用具有收發信機能的攜帶型資訊終端3 60來構成。此外，此種攜帶型資訊終端3 6 0例如可爲p 〇 A (個人數位助理）、筆記型電腦、筆輸入可能之電腦（例如平板電腦）等。攜帶型資訊終端3 60，係除了具備用來偵測異常而偵 -57- (54) (54)200411512 測聲音或臭味的臭氣感測器、高頻感測器、低頻感測器等各種感測器362以外，還具備控制部3 64、調變解調部 3 66、通信介面3 6 8等。調變解調部3 66，係將透過通信介面3 6 8發送之資料例如調變成無線信號，或將透過通信介面3 6 8收到的信號解調成資料。網路3 00，可爲網際網路等公眾線路網，或是WAN ( 廣域網路）、LAN (區域網路）、IP-VPN (網際網路協定-虛擬私人網路）等封閉線路網。又，連接媒體可爲 F D D 1 (光纖傳搬資料界面）等所用的光纖纜線、E t h e r n e t (乙太網路）所用的同軸電纜或雙絞纜線、或是IEEE 8 02‘llb等無線等，不論有線無線，就算衛星網路也是可以使用。亦可藉由令上記附帶網路連線機能之收信機3 2 0，爲例如具備無線路由機能而構成，且令攜帶型資訊終端3 6 0 的通信介面3 6 8，爲無線網路卡等所構成，使得附帶網路連線機能之收信機3 2 0與攜帶型資訊終端3 6 0間是以無線網路來進行資料的收發信。攜帶型資訊終端3 60的各種感測器362，關於聲音的例如亦可爲偵測人類所無法感知的頻率、週期等。又各種胃_器3 62若是設置臭氣感測器時，例如亦可爲藉由感測 _表面附著了臭味成份而偵測之。臭氣感測器例如亦可以瓦斯探知器來構成，用來偵測一體化碳、氯氣等鹵素氣體等對人體有害之氣體。又，例如亦可從半導體製造裝置的處理室排氣的排氣泵浦之油蒸汽來偵測出油的摩擦度、黏 -58- (55) (55)200411512In contrast, if it is determined in step S 3 3 0 that there is a current job, step S 3 4 0 obtains the priority of the current job according to the job priority information of the job priority information database 2 3 0, and in step S Get the priority of the new job in 3 50. Next, it is determined in step S360 whether the priority (U1) of the current job is higher than or equal to the current priority (U2). In step S 3 50, if the priority of the current job is higher or the same as the current priority, the priority of step S 3 70 is increased (k = k + 1). Next, in step S380, it is determined whether or not processing has been performed for all jobs _ that have been given priority. For example, if the number of workers who have been given priority has been drawn as N, it is determined whether the priority has become k = N + l. When it is determined in step S3 8 0 that all users who have not been assigned priority are not being processed, for example, if it is determined that the priority order has not changed to k = N + 1, then return to step S 3 20 to the next priority order. The operator performs processing. If it is determined in the above step S 3 50 that the current priority of the worker is lower than the current priority, then in step S400, the worker is determined to perform a new job -48- (45) (45) 200411512 The operator of the job. The operator thus determined is given an instruction to perform a new operation by step S 1 50 shown in FIG. 11. In this way, the priority of the detected current job and the new job are compared, and if the priority of the new job is high, an instruction is given to the operator. With this, even if a new job occurs, it can be determined whether the operator is allowed to perform a new job according to the priority of the current job, so the higher priority job, that is, the more important job can be processed as soon as possible. In this way, the optimization of job allocation can be achieved. If it is determined in step S380 above that all the workers who have been given priority have been processed, for example, if the priority has been set to k = N + 1, then error processing is performed in step S390. The error processing may be, for example, displaying a message that "the operator should not be found" on the display section 204. In this case, the operator may also be notified of this message. According to the processing described above, the higher the priority processing, the greater the chances of finding the operator. Therefore, there is a high possibility that the processing where the operator cannot be found is the processing with a lower priority. Therefore, for example, the above processing can be performed again by shifting the time. In addition, in the error processing of 'Step S 390, you can also search for the operator classification of the operator who has the skills required for the operation from the operations where the operator cannot be found based on the operation skill information of the operation skill information database 240, and The above-mentioned homework, operator classification, time and date, etc. are memorized in a log file (10g file). For example, when the operation where the operator cannot be found is a corresponding operation of a mechanical obstacle, because the operator of the operator with the skills required for the operation can be classified and searched as a mechanical engineer, the mechanical obstacle is memorized in the log file- 49-(46) (46) 200411512 Obstructed corresponding operations, engineers in the mechanical department, etc. In this way, you can understand the possibility of a shortage of mechanical engineers in the plant. In this way, the above log file can be used as the judgment material for judging whether it is necessary to increase or decrease the operators in the factory. For example, when error processing frequently occurs, the number of workers is insufficient, and it can be estimated which worker is classified as insufficient. In addition, redundant operators can be reduced by reducing the number of operators to the extent that they will not cause erroneous processing. As a result, the number of operators classified by the number of operators can be arranged in the factory, so that not only the efficiency of each operator can be improved, but also the efficiency of the number of operators can be achieved. According to this processing, for example, if a new operation is a mechanical obstacle-related operation, and an operator who can perform the new operation is an electrical engineer A, a mechanical engineer B, and an operator C, The priority order of these operators is the order of the mechanical engineer B, the electrical engineer A, and the operator C, and they are processed in this order. At this time, if B does not have a current job, the operator of the new job is determined to be B. Even if there is a current operation in the B group, for example, when the current operation is a normal operation operation, if the work priority information database 230 shown in FIG. 6 is used, the mechanical system obstacle of the new operation of the B group corresponds to the operation. The priority is higher than the normal operation of the current operation, so at this time, it is also determined that B is the operator of the new operation. In this case, the normal operation of B's current operation will be re-processed as a new operation. At this time, the operator's priority will be given in the order of operator C, engineer A in electrical department, and engineer B in mechanical department -50- (47) (47) 200411512. At this time, if the operator C is not currently working, it is determined that C is the operator of the new work. And even when c's has a current job, 'this current job is, for example, a regular job, if the job priority information database 2 3 0 shown in FIG. 6 is not given, then the normal operation of the new job of C's has priority. The degree of priority is higher than the regular operation of the current operation, so C will be determined as the operator of the new operation at this time. In addition, when the current operation of C is performed in a normal operation in another area, according to the operation priority information database 2 3 0 shown in FIG. 6, the current operation and the new operation have no priority in terms of priority. Let C's continue with his current job. If the electrical engineer A does not work now, he decides that A is the new operator. (Second Embodiment) Next, a second embodiment of the operator management device when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. In the "second embodiment", since the configurations shown in Figs. 1 to 10 are the same, detailed descriptions thereof are omitted. The same parts as those in the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted. Herein, FIG. 15 and FIG. 16 are used to describe other specific examples of the new job allocation process performed by the operator management device 200 in the second embodiment. In addition, the processing in this embodiment can be implemented by a program recorded on a recording medium such as a typical hard disk device. The new job allocation process in the second embodiment differs from the situation shown in Fig. 11 in the first embodiment, -51-(48) (48) 200411512, in that one job can be redistributed, and if there is a new job If it occurs, for all the jobs including the new job and the current jobs of all the operators, the priority of each job, such as job skills, operator skills, etc., will be taken into consideration, so that the most suitable operator can perform the job. Specifically, as shown in FIG. 15, it is first determined at step s 5 1 0 whether a new job has occurred. The step S 3 1 0 is the same as the step S 3 1 0 described above, for example, based on error information and notification information when a failure occurs in the semiconductor manufacturing device 14 0. Then, the current operation of all operators is detected in step S 520. The detection process of the operator's current operation is, for example, the child routine shown in FIG. 14 repeated for each operator until all the operators have completed. In step S 530, redistribution is performed on all jobs including new jobs and current jobs (job redistribution means). In this way, when a new job occurs, the current job of all the workers is detected, and the whole job including the new job and the current job is redistributed, so it is more appropriate to allocate the whole job containing the new job. Operator. In this way, the efficiency of operation redistribution can be achieved and the operation efficiency can be improved. The redistribution process of the job will be described in detail later. Next, in step S540, each worker is instructed to instruct the worker to perform the assigned work. For example, the portable information terminal held by the operator may be instructed to perform a new operation, for example. Next, it is determined in step S 5 50 whether there is an unassigned job remaining. If it is determined in step S 5 50 that there is an unassigned job remaining, in step s 5 60, the operator who can cope with the job is notified of "there is an unassigned job, please respond", and then the process ends. If it is determined in step S 5 50 that there is no unallocated job remaining -52- (49) (49) 200411512, the process is directly terminated. Here, an example of the job redistribution processing (job redistribution means) in step S 530 will be described with reference to the subroutine shown in FIG. 16. First, all operations including the new operation and the current operation in step S 6 10 are sorted in order from the highest priority according to the operation priority information of the operation priority information database 230. The priority of the work at this time is assumed to be W. Next, in step S620, starting from the priority order W = 1, starting with the job with the highest priority, the most suitable operator is determined by the following processing. Then, the workers who can perform the operation are extracted at step S630. Next, the operator is given priority in step S640. This priority ordering process is performed by, for example, a subroutine shown in Fig. 12. Next, the worker is determined in step S650. This operator decides the processing, for example, by a subroutine shown in FIG. 13. Next, in step S 660, the priority W of the job is increased (W = W +]), and it is determined in step S670 whether all the jobs that should be processed have been processed. In this way, in principle, all operations must be determined by the operator. However, there may be cases where operators cannot be found depending on the writing industry. At this time, the unassigned work is notified to the worker who may perform the work by steps S 5 50 and 5 60 shown in FIG. 15. According to this processing, for example, if a new job occurs, the current job of all the workers will be detected, and all jobs including the new job will be given a priority according to the job priority information database 230. For example, the priority order for all obstacles, and the normal operation tasks, the operator will be determined from the mechanical obstacle countermeasures. -53- (50) (50) 200411512 Regarding the mechanical obstacle corresponding to the highest priority operation, if it is extracted as the operator who performs the operation, the electrical engineer A, mechanical engineer B, and operator c , The priority order of these operators will be mechanical engineer B, electrical engineer A, and operator C, and they will be processed in this order. At this time, if B does not have the current operation, the operator of the corresponding operation of the mechanical obstacle corresponding operation determines the dimension; B's. Next, the operator who determines the normal operation is determined. At this time, the priority of the operator will be the operator C, the electrical engineer A, and the mechanical engineer B, and follow this order. At this time, if the operator c is not currently working, the operator of the new work is determined to be C. In this way, when a new job occurs, the redistribution of the entire job including the new job is performed, and at this time, the operator is determined by the order of the higher priority of the job, so the higher priority job, that is, the important job The sooner it can be processed. In addition, even in the case of redistributing a full job including a new job, the priority of the detected current job and the new job can be compared. If the priority of the new job is high, an instruction order is issued to the operator. It performs a new job. This allows important tasks with high priority to be selected early for the most suitable operator. (Third Embodiment) Next, a third embodiment of the operator management device when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. In the third embodiment, since the configurations of FIGS. 1 to 10 are the same, detailed descriptions thereof are omitted. The same parts as those in the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted. In addition, the processing in this embodiment can be implemented by a program recorded in a recording medium such as a typical hard disk device, such as 54- (51) (51) 200411512. Herein, FIG. 16 is used to describe the generation process of the operation database, which is an example of the operation information storage means performed by the operator management device 200 in the third embodiment. The operation database is used to generate the operation report of each operator described later. Therefore, the homework database stores work performed by each operator and at a predetermined time. Therefore, the generation process of the operation database is performed every predetermined time according to the time recorded in the operation daily report. For example, if an operation daily report is generated every 1 hour, the generation processing of the above-mentioned operation database is executed every 1 hour; if an operation daily report is generated every 30 minutes, the generation processing of the above-mentioned operation database is executed every 30 minutes . The process of generating the work database is as follows: First, the current work (current work) of all the workers is detected in step S 7 10. The detection processing of each operator's current operation is, for example, the child routine shown in Fig. 14 for each operator repeatedly until all the operators have completed. In this way, as long as the current operation of the operator is detected and recorded in 100 million yuan every predetermined time, an operation database for each operator can be generated. The operation database may also include various databases 2 1 0 as shown in FIG. 3. Next, referring to Fig. 18, a description will be given of a work report generation process as an example of a work report generation means performed by the worker management device 200. The job report generation process is a process that automatically generates a job daily report for each operator. First, in step S810, the operator is specified 'to identify the operator who is to produce a job daily report. Here, the operator can also allow input of -55- (52) (52) 200411512 on the operation screen to generate an operation daily report for a specific operator. In addition, it is also possible to automatically identify each operator and generate an operation daily report for all the operators. Then, in step S 8 20, an operator database is generated according to the processing shown in FIG. 17 to generate the operator. Information on the daily report. The daily report data is generated by extracting the operator's work during that day. Then, the operation daily report is printed in step S830. For example, a printer connected to the operator management device 200 prints out the work daily report and ends the process. An example of the daily work report generated in this manner is shown in FIG. 19. The daily work report is an example in which the predetermined time is set to perform the work database generation processing shown in FIG. 17 every hour to detect the current work situation of the operator. In addition, the operation daily report can be used when, for example, another company dispatches an operator to a factory to determine the cost according to the operation. When the unit price of the writing industry is stored in the operator skill information database 250, the unit price of each operation can be searched and printed, and the fee can be requested based on the total amount. In addition, if the data of each month is taken from the operation database, a monthly job report can be generated and printed. As described above, according to the present embodiment, work reports such as a work daily report and a work monthly report can be easily generated. In addition, because the operator's work can be automatically detected and the work information is used as the basis of the work report, it can save the operator from entering procedures from a portable information terminal, etc., and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. -56- (53) (53) 200411512 According to the present invention, it is possible to easily identify the work currently being performed by the operator, so even when a new work occurs, for example, it is possible to successively determine the priority of the current work and the new work. Degree, select the most suitable operator for the job. In this way, the operator can be appropriately arranged in an appropriate place, and the operation efficiency of each operator can be improved. In addition, in the above-mentioned embodiment, although the worker detection sensor 130 shown in FIG. 1 is, for example, a receiver 1 34, which is installed in each area 110, 120, for example, a communication cable is used. It is connected to the operator management device 2000, but it is not necessarily limited to this, and it can be connected by a network instead of a communication cable. The receiver 1 34 shown in FIG. 2 may also be a transceiver having a transceiver function, and the transmitter 1 3 8 may also be a transceiver having a transceiver function. At this time, various sensors such as an odor sensor can also be installed in the portable information terminal, and the abnormality can be judged based on the detection of these sensors. Specifically, as shown in FIG. 20, for example, a device room area 丨] 2 is provided with a receiver 3 2 0 having a network connection function such as a routing function and a network connection function. The receiver 3 2 0 with a network connection function is connected to the operator management device 200 through the network 3 0. The operator management device 200 is connected to the network 300 through a network connection device 3 4 0 having a network connection function such as a routing function. The operator carries a transmitter 380 as shown in Fig. 2 or a portable information terminal 3 60 having a receiver function. In addition, such a portable information terminal 360 can be, for example, a POA (Personal Digital Assistant), a notebook computer, a computer with a pen input (such as a tablet computer), and the like. The portable information terminal 3 60 is equipped with an odor sensor, a high-frequency sensor, a low-frequency sensor, and the like for detecting abnormalities and detecting -57- (54) (54) 200411512 In addition to the various sensors 362, a control section 3 64, a modulation and demodulation section 3 66, and a communication interface 3 6 8 are provided. The modulation and demodulation section 3 66 is configured to modulate data sent through the communication interface 3 6 8 into a wireless signal, or demodulate signals received through the communication interface 3 6 8 into data. Network 3 00 can be a public line network such as the Internet, or a closed line network such as WAN (Wide Area Network), LAN (Local Area Network), IP-VPN (Internet Protocol-Virtual Private Network). In addition, the connection medium can be an optical fiber cable used in FDD 1 (Fiber Optic Data Transfer Interface), a coaxial cable or a twisted pair cable used in Ethernet, or wireless such as IEEE 8 02'llb. , Regardless of wired and wireless, even satellite networks can be used. It is also possible to make the receiver 3 2 0 with a network connection function described above to have a wireless routing function, for example, and to make the communication interface 3 6 8 of the portable information terminal 3 6 0 a wireless network card. It is constituted by the wireless network between the receiver 320 and the portable information terminal 360 with a network connection function. The various sensors 362 of the portable information terminal 3 60 can also detect, for example, frequencies and periods that cannot be perceived by humans. In addition, when various kinds of gastric odor sensors 3 62 are provided, for example, odor components can be detected by detecting odor components attached to the surface. The odor sensor can also be constituted by a gas detector, for example, and can be used to detect gases harmful to the human body such as integrated carbon, chlorine and other halogen gases. In addition, for example, the friction and viscosity of the oil can be detected from the oil vapor of the exhaust pump exhausted from the processing chamber of the semiconductor manufacturing device. -58- (55) (55) 200411512

具體而言各種感測器3 6 2，有示波鏡、光譜分丨r ^了儀、快速富立葉變換頻譜儀（FFT )、震動分析器、一」爾搀子感測器、半導體感測器、光感測器等、攜帶型 " 3 6 0亦可具備各種感測器3 6 2的切換開關（未圖，m 、一），作業者可藉由切換開關而選擇所望之感測器來使_。此外，亦可從攜帶型資訊終端3 6 0所設的輸入、子段，將作業者所輸入的資料（外部環境資訊）做爲感 ^ 外部環境資訊例如係將作業者使用計測器計測到 ^ 藉由操作面板所顯示之資料等各種資料輸入，以做叹爲感測資料。輸入手段則爲鍵盤輸入、觸控面板輸入等，—知的_ 入手段即可。攜帶型資訊終端3 6 0的控制部3 6 4，例如係根據來自各種感測器3 6 2的偵測値來進行半導體製造裝置等> 、異常判斷。例如若偵測到聲音或臭味則判斷爲異常，或將是$ 爲異常的閥値記憶在記憶部（未圖示）中，若偵測出超過該閥値的聲音或臭味，則判斷爲異常。藉此，例如_ 9所示，可在錯誤發生前就判斷出異常。然後，若判斷爲異常發生時，攜帶型資訊終端3 6〇會將來自各種感測器3 6 2中之該當的感測器的資料，透過網! 路300發送至作業者管理裝置2〇〇。作業者管理裝置2〇() 中，根據接收自攜帶型資訊終端3 6 0的感測器資訊，而進行例如圖Π所示的步驟S 1 1 0、圖〗5所示的步驟S 5 I 〇之新作業是否發生的判斷。 -59- (56) 200411512 具體而言如圖9所示，例如在各種資料庫2 1 0 置將錯誤發生前的徵兆以事情資訊的方式記憶在例事前資訊資料庫（未圖示），根據錯誤事前資訊資所記憶的徵兆來綜合地特定出作業，並判斷爲有新生。此時，作業者管理裝置2 00會存取被判斷爲異導體製造裝置1 40，藉由報知手段的警報等報知，藉由燈光手段等使燈光閃爍。錯誤事前資訊資料庫內所記憶之具體例子如下事前資訊資料庫內，記憶著例如真空側錯誤之事前爲’漏热速率增大（徵兆1)、基礎壓力上升（徵，大氣側錯誤事前資訊可爲異音（徵兆3 )、振動徵兆4 )。漏氣速率增大（徵兆i )係例如設在半造裝置之處理室內的〇形環劣化，導致大氣流入時的徵兆。基礎壓力上升（徵兆2 )則爲例如將處抽真空的真空泵浦之疲勞或異物端機導致真空吸引足之徵兆。異音（徵兆3 )則例如真空泵浦劣化加發生劣化造成半導體製造裝置的平衡不良時的徵兆增大（徵兆4 )係例如異物堆積、真空泵浦劣化加發生劣化造成半導體製造裝置的平衡不良時的徵兆 1、2，係例如可根據作業者所輸入攜帶型資訊終端外部環境資訊來判斷。徵兆3、4則可根據各種 3 62傳來的感測器資料而判斷。如此將徵兆記憶在錯誤事前資訊資料庫之情況根據作業者所輸入攜帶型資訊終端3 6 〇的外部環境中，設如錯誤料庫內作業發常的半或亦可。錯誤資訊可兆2 ) 增大（導體製處理室理室內能力不上軸承。振動上軸承。徵兆 3 60的感測器，例如資訊， -60- (57) (57)200411512 判斷只有徵兆1、而無徵兆3 ' 4時，則因爲真空泵浦爲正常的可能性高、密封滲漏（處理室內發生滲漏）的可能性爲高，故可根據密封滲漏之發生而判斷要進行維護作業之新作業。因此，圖1 1、圖1 5所示，對已被特定之作業者發出指示令其進行該新作業。具體而言作業者管理裝置 2 00是透過網路300向該作業者的攜帶型資訊終端3 60發送指示。此外，圖2 0所示攜帶型資訊終端3 6 0所偵測、輸入之感測器資料，亦可在此機會送往作業者管理裝置2 0 0 ’ 或亦可如圖1 4所示步驟s 4 1 0中偵測出區域資訊之際’連同作業者的識別資訊一起送信至作業者管理裝置200。然後，作業者管理裝置200會進行是否異常之判斷，而判斷有新作業發生。又，上記附帶網路連線機能之收信機3 2 0、攜帶型資訊終端3 60的收發信機能，並不限定於無線的收發信機能，使用紅外線的收發信機能等各種收發信機能都可適用。甚至，攜帶型資訊終端3 60內亦可設置GPS (全球定位系統），根據GP S來偵測出作業者的位置。以上，雖然佐以添附圖麵說明了本發明所論之理想實施形態，但本發明並非侷限於所論之例子，當業者在申請專利範圍所記載的範疇內，當然可以有更種變更例或修飾例，而這些亦都屬於本發明的技術範圍內。例如，本發明可適用於半導體製造工廠的擁有企業的作業者管理之作業者管理系統，或亦可爲從異於擁有半導 -61 - (58) 200411512Specifically, various sensors 3, 6 and 2 include oscilloscopes, spectral analyzers, fast Fourier transform spectrum analyzers (FFTs), vibration analyzers, infrared sensors, and semiconductor sensors. Sensors, light sensors, etc., portable type "3 6 0 can also be equipped with a variety of sensors 3 6 2 switch (not shown, m, a), the operator can choose the desired sensing by the switch To make _. In addition, from the input and sub-segments provided by the portable information terminal 360, the data (external environment information) input by the operator can be used as the sensor. ^ The external environment information is measured by the operator using a measuring device, for example ^ Input various data such as the data displayed on the operation panel to make sighs as sensing data. The input means are keyboard input, touch panel input, etc., the known _ input means is sufficient. The control unit 3 64 of the portable information terminal 360, for example, performs semiconductor manufacturing devices based on the detection signals from various sensors 3 62, etc., and judges abnormality. For example, if a sound or an odor is detected, it is determined to be abnormal, or the valve 値 that is $ is abnormal is stored in a memory section (not shown). If a sound or odor that exceeds the valve is detected, it is determined Is abnormal. By this means, as shown in _9, an abnormality can be determined before an error occurs. Then, if it is determined that an abnormality has occurred, the portable information terminal 36 will send the data from the appropriate sensor among the various sensors 3 62 to the operator management device 200 through the network 300. . In the operator management device 20 (), based on the sensor information received from the portable information terminal 3 60, for example, step S 1 1 0 shown in FIG. 2 and step S 5 I shown in FIG. 5 are performed. 〇 Judgment whether a new operation has occurred. -59- (56) 200411512 Specifically, as shown in FIG. 9, for example, the symptoms before the error occurred are stored in the various databases 2 1 0 in the case information database (not shown), according to Symptoms memorized beforehand by the wrong information to comprehensively specify the work, and judge that there is a freshman. At this time, the operator management device 2000 accesses the device 40 judged to be a different conductor, reports it by an alarm such as a notification means, and blinks the light by a light means or the like. The specific examples memorized in the error pre-information database are as follows. In the pre-information database, for example, the error on the vacuum side is: 'the heat leakage rate increases (symptom 1), and the base pressure rises (sign, the atmospheric side error prior information may They are abnormal sounds (symptom 3), vibration signs 4). An increase in the leakage rate (symptom i) is, for example, a sign of deterioration of the O-ring provided in the processing chamber of a semi-finished device, resulting in atmospheric inflow. The increase of the base pressure (symptom 2) is, for example, the fatigue of a vacuum pump to be evacuated or the suction of a vacuum caused by a foreign object end machine. The abnormal sound (symptom 3) is, for example, an increase in symptoms when the vacuum pump is degraded and degraded, resulting in poor balance of the semiconductor manufacturing device (symptom 4) is, for example, foreign matter is accumulated, the vacuum pump is degraded and degraded and the semiconductor manufacturing device is out of balance Symptoms 1 and 2 can be determined based on, for example, external environment information of the portable information terminal input by the operator. Symptoms 3 and 4 can be judged based on various sensor data from 3 62. In this way, the symptoms are memorized in the pre-error information database. According to the external environment of the portable information terminal 36, which is input by the operator, it is possible to set the normal or half of the operation in the error database. Error information can be a sign 2) increase (conductor processing room can not be equipped with bearings in the room. Vibration on bearings. Symptom 3 60 sensors, such as information, -60- (57) (57) 200411512 judge only signs 1, When there is no sign of 3'4, because the possibility of normal vacuum pumping is high, and the possibility of leakage of the seal (leakage in the processing room) is high, the maintenance work can be judged based on the occurrence of the leakage of the seal. New work. Therefore, as shown in Figure 11 and Figure 15, a specific operator is instructed to perform the new work. Specifically, the operator management device 200 is sent to the operator through the network 300. The portable information terminal 3 60 sends instructions. In addition, the sensor data detected and input by the portable information terminal 3 600 shown in FIG. 20 can also be sent to the operator management device 2 0 0 'at this opportunity or When the area information is detected in step s 4 10 shown in FIG. 14, a letter is sent to the operator management device 200 together with the identification information of the operator. Then, the operator management device 200 determines whether it is abnormal. , And judged that there is a new work In addition, the transceiver functions of the receiver 3 2 0 and the portable information terminal 3 60 described above with a network connection function are not limited to the functions of wireless transceivers, and the use of infrared transceivers, etc. It can be used for all functions of the telephone. Even GPS (Global Positioning System) can be set in the portable information terminal 3 60 to detect the position of the operator based on GPS. The present invention is an ideal embodiment, but the present invention is not limited to the example in question. Of course, those skilled in the art may have more variations or modifications within the scope described in the scope of patent application, and these also belong to the technical scope of the present invention. For example, the present invention can be applied to an operator management system for operator management of an owned enterprise in a semiconductor manufacturing plant, or it can be different from a semiconductor that has a semiconductor -61-(58) 200411512

體製造工廠之公司的其他公司，派遣作業者到廠時管理作業者而適用的作業者管理系統。尤其是，製造或販賣半導體製造裝置的公司的從業人員以作業者的身分，被派遣到購入或使用該半導體製造裝置的公司，進行半導體製造裝置的維護或半導體製造等作業時，亦可適用該作業者系統。藉此，可使被派遣的作業者之每人份的作業效率提高至最大極限，且可按照該派遣工廠的特質，決定作業者分類、作業者數量。如此，對半導體製造裝置之製造或販賣商的公司而言，對於半導體製造裝置的購入或使用客戶的派遣作業者可收斂在必要之最小限度。另一方面，對半導體製造裝置的購入或使用客戶而言，支付給從半導體製造裝置之製造或販賣商的公司派遣來之作業者的人事費用可抑制在必要之最小限度。Operator management systems applicable to other companies in a manufacturing company that manage operators when dispatched to the factory. In particular, when an employee of a company that manufactures or sells a semiconductor manufacturing device is dispatched as an operator to a company that purchases or uses the semiconductor manufacturing device to perform maintenance or semiconductor manufacturing operations on the semiconductor manufacturing device, the same applies. Operator system. By this, the operating efficiency of each dispatched operator can be increased to the maximum limit, and the classification of the operator and the number of operators can be determined according to the characteristics of the dispatched factory. In this way, for a company that manufactures or sells semiconductor manufacturing equipment, the dispatch operator who purchases or uses the semiconductor manufacturing equipment can converge to the minimum necessary. On the other hand, for customers who purchase or use semiconductor manufacturing equipment, personnel expenses paid to operators dispatched from companies that manufacture or sell semiconductor manufacturing equipment can be kept to the minimum necessary.

產業上利用之可能性本發明係可適用於作業者管理系統、作業者管理裝置及作業者管理方法。【圖式簡單說明】 [圖1 ]本發明之第1實施形態所論作業者管理系統之整體構成的方塊圖。 [圖2]同實施形態中無塵室之裝置室內的作用之說明圖。 -62- (59) (59)200411512 [圖3 ]同實施形態所論作業者管理裝置之構成的方塊圖。 [圖4 ]圖3所示各種資料庫之例子的方塊圖。 [圖5]同實施形態所論作業特定資料庫之1例圖。 [圖6]同實施形態所論作業優先度資料庫之1例圖。 [圖7]同實施形態所論作業技能資料庫之1例圖。 [圖8]同實施形態所論作業者技能資料庫之1例圖。 [圖9]同實施形態所論錯誤代碼資訊資料庫之1例圖〇 [圖1 0]同實施形態所論檢查結果資訊資料庫之1例圖〇 [圖1 1 ]同實施形態所論新作業分配處理主常式的流程圖。 [圖1 2]同實施形態所論作業者優先順位賦予處理次常式的流程圖。 [圖1 3 ]同實施形態所論作業者決定處理次常式的流程圖。 [圖1 4]同實施形態所論作業者之作業偵測處理次常式的流程圖。 [圖1 5 ]本發明之第2實施形態所論新作業分配處理主常式的流程圖。 [圖16]同實施形態所論全作業之再分配處理次常式的流程圖。 [圖17]本發明之第3實施形態所論作業資料庫產生處 -63- (60) 200411512 理的流程圖。 [圖1 8 ]同實施形態所論作業日報產生處理的流程圖。 [圖I ?]以同實施形態所產生之作業日報之1例圖。 [圖2 0 ]作業者管理系統之變形例的方塊圖。【主要元件對照表】 100 半導體製造工廠 110 Μ j \ \\ 塵室域 112 裝置室域 114 裝置室外域 116 控制部 118 室外控制部 120 並 ✓ 1 \\ 塵室外區域 122 ，中央監察室 Ipp 域 124 淸潔室區域 126 保管庫區域 128 辦公區域 129 休憩室區域 130 作業者偵測感應器 132 裝置室 134 收信機 136 作業者 138 發信機 140 半導體製造裝置Industrial Applicability The present invention is applicable to an operator management system, an operator management device, and an operator management method. [Brief description of the drawings] [Fig. 1] A block diagram of the overall configuration of the operator management system according to the first embodiment of the present invention. [Fig. 2] An explanatory view of the function of the equipment room of the clean room in the same embodiment. -62- (59) (59) 200411512 [Fig. 3] A block diagram showing the structure of the operator management device according to the embodiment. [Figure 4] A block diagram of an example of various databases shown in Figure 3. [Fig. 5] An example of a work-specific database discussed in the same embodiment. [Fig. 6] An example of an operation priority database discussed in the same embodiment. [Fig. 7] An example of an operational skill database discussed in the same embodiment. [Fig. 8] An example of the skill database of the operator discussed in the same embodiment. [Fig. 9] An example of the error code information database discussed in the same embodiment. [Fig. 10] An example of the inspection result information database discussed in the same embodiment. Main routine flow chart. [Fig. 12] A flowchart of a subroutine for assigning priority to a worker according to the same embodiment. [Fig. 13] A flow chart of the operator's decision to process a subnormal equation in the same manner as described in the embodiment. [Fig. 1 4] A flowchart of the subroutine of the operation detection process of the operator discussed in the same embodiment. [Fig. 15] A flowchart of a main routine of a new job allocation process according to the second embodiment of the present invention. [Fig. 16] A flowchart of a subroutine of redistribution processing for all operations in the same embodiment. [Fig. 17] A flowchart of the operation database generation place according to the third embodiment of the present invention. -63- (60) 200411512. [Fig. 18] A flowchart of a work daily report generation process according to the embodiment. [Figure I?] An example of an operation daily report generated in the same embodiment. [Fig. 20] A block diagram of a modification of the operator management system. [Comparison table of main components] 100 Semiconductor manufacturing plant 110 Μ j \ \\ Dust room area 112 Device room area 114 Device outdoor area 116 Control unit 118 Outdoor control unit 120 and ✓ 1 \\ Dust outdoor area 122, Central monitoring room Ipp area 124 Clean room area 126 Storage area 128 Office area 129 Lounge area 130 Operator detection sensor 132 Device room 134 Receiver 136 Operator 138 Transmitter 140 Semiconductor manufacturing equipment

-64- (61) 作業者管理裝置控制部顯示部輸入部輸出入部各種資料庫作業特定資訊資料庫-64- (61) Operator management device Control section Display section Input section Input / output section Various databases Operation-specific information database

區域資訊裝置資訊作業內容作業優先度資訊資料庫優先度作業分類作業技能資訊資料庫作業Area information Device information Operation content Operation priority information database Priority Operation classification Operation skill information database Operation

作業者分類作業分類作業內容作業者技能資訊資料庫姓名 ID 密碼所屬作業者分類 -65- (62)200411512 257 作業 2 60 障礙資訊資料庫 262 錯誤代碼資訊資料庫 264 檢查結果資訊資料庫 300 網路 320 附帶網路連線機能之收信機 340 網路連線裝置 360 攜帶型資訊終端 362 各種感測器 364 控制部 366 調變解三田 δ周部 368 通信介面 -66 -Operator classification operation classification operation content operator skill information database name ID password operator classification -65- (62) 200411512 257 assignment 2 60 obstacle information database 262 error code information database 264 inspection result information database 300 network 320 Receiver with network connection function 340 Network connection device 360 Portable information terminal 362 Various sensors 364 Control unit 366 Tuning Mita delta cycle 368 Communication interface -66-

Claims

(1) (1)200411512 拾、申請專利範圍 1·一種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由則§5作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 •，及根據前記現在作業特定手段所特定出之現在作業，判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段；及按照前記判斷手段的判斷結果，對該作業者發出作業實行指不的指不手段。 2.如申請專利範圍第1項記載的作業者管理系統，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機； .. 前記發信機，係設定成每一作業者發送不同頻率的電磁波； -67- (2) (2)200411512 前記作業者位置特定手段，係將接收到視爲作業區域偵測對象之作業者頻率電磁波的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 3 ·如申請專利範圍第1項記載的作業者管理系統，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成送出載有按照各作業者別而識別作業者之識別資訊的電磁波；前記作業者位置特定手段，係取得前記作業者偵測手段傳來的識別資訊，將接收到身爲作業區域偵測對象之作業者之識別資訊的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 4 .如申請專利範圍第1項記載的作業者管理系統，其中設置從被設置於前記作業區域的作業裝置取得作業者之作業資訊的作業資訊取得手段；前記現在作業特定手段，係除了取得前記特定爲作業者所在之作業區域之作業區域資訊，還從前記作業資訊取得手段取得從該作業者正在進行作業之作業裝置傳來的作業資訊，並根據這些區域資訊及作業資訊以特定該作業者的現在作業。 -68- (3) (3)200411512 5.—種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及將作業之優先資訊加以記憶之作業優先資訊記憶手段 ;及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則根據前記作業者技能資訊記憶手段的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出手段；及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優 -69- (4) 200411512 先順位與前記新作業的優先順位加以取得並比較，將前新作業之優先順位較前記現在作業爲高的作業者特定爲記新作業之作業者的作業者特定處理」的作業者特定手 ;及對被前記作業者特定手段所特定出之作業者，發出示請其進行前記新作業之作業的指示手段。 6·如申請專利範圍第5項之作業者管理系統，其中前記作業者技能資訊記憶手段，係將作業者分類按各作業者別加以記憶；且設置：將各作業和具有能夠進行該各作業之技能作業者分類賦予關連之作業技能資訊加以記憶之作業技資訊記憶手段；及取得關於前記作業者抽出手段所抽出各作業者之前記作業者技能資訊記憶手段所得之作業者類，同時根據前記作業技能記憶手段之作業技能資訊來得前記新作業之作業者分類，並使得分別取得之作業者類爲相同之作業者之優先順位設定爲高，而對作業者賦優先順位的優先順位賦予手段；前記作業者特定手段，係作業者抽出手段所抽出的業者當中，從被前記優先順位賦予手段賦予之作業者優順位爲高之作業者，依序進行作業者特定處理。 7 .如申請專利範圍第5項記載的作業者管理系統，中前記作業者偵測手段，係設置用來接收各作業者所之發信機傳來的電磁波的收信機；記前段指眧的能的分取分予作先其持 -70- (5) (5)200411512 前記發信機，係設定成每一作業者發送不同頻率的電磁波；前記作業者位置特定手段’係將接收到視爲作業區域偵測對象之作業者頻率電磁波的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 8 .如申請專利範圍第5項記載的作業者管理系統，其中前記作業者偵測手段’係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成送出載有按照各作業者別而識別作業者之識別資訊的電磁波；前記作業者位置特定手段，係取得前記作業者偵測手段傳來的識別資訊，將接收到身爲作業區域偵測對象之作業者之識別資訊的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 9 ·如申請專利範圍第5項記載的作業者管理系統，其中設置從被設置於前記作業區域的作業裝置取得作業者之作業資訊的作業資訊取得手段；前記現在作業特定手段，係除了取得前記特定爲作業者所在之作業區域之作業區域資訊，還從前記作業資訊取得手段取得從該作業者正在進行作業之作業裝置傳來的作 -71 · (6) (6)200411512 業資訊，並根據這些區域資訊及作業資訊以特定該作業者的現在作業。 10.—種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及將作業之優先資訊加以記憶之作業優先資訊記憶手段 ;及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則以前記現在作業特定手段來特定全作業者的現在作業，這些現在作業中對於已經含有新作業的全作業，以前記作業優先資訊記憶手段之作業優先資訊賦予作業的優先順位，從優先度高的作業起再次進行全作業分配之作業再分配手段；及將前記作業再分配手段所分配的作業對全作業者指示之指示手段。 -72- (7) (7)200411512 1 1 ·如申請專利範圍第1 0項記載之作業者管理系統，其中前記作業再分配手段，係從作業優先順位高的作業起認定爲新作業；且設置：將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及根據前記作業者技能資訊記憶手段的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出手段；及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定手段〇 12·如申請專利範圍第10項記載的作業者管理系統，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成每一作業者發送不同頻率的電磁波；前記作業者位置特定手段，係將接收到視爲作業區域偵測對象之作業者頻率電磁波的前記作業者偵測手段找出 -73- (8) (8)200411512 ，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 1 3 .如申請專利範圍第1 0項記載的作業者管理系統，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成送出載有按照各作業者別而識別作業者之識別資訊的電磁波；前記作業者位置特定手段，係取得前記作業者偵測手段傳來的識別資訊，將接收到身爲作業區域偵測對象之作業者之識別資訊的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 1 4 ·如申請專利範圍第1 0項記載的作業者管理系統，其中設置從被設置於前記作業區域的作業裝置取得作業者之作業資訊的作業資訊取得手段；前記現在作業特定手段，係除了取得前記特定爲作業者所在之作業區域之作業區域資訊，還從前記作業資訊取得手段取得從該作業者正在進行作業之作業裝置傳來的作業資訊，並根據這些區域資訊及作業資訊以特定該作業者的現在作業。 15·—種作業者管理系統，其特徵爲具備：按照作業內容而區分成複數作業區域的作業場；及 -74- (9) (9)200411512 將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及設置在前記各作業區域的作業者偵測手段；及根據前記作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及每到所定時間，就以前記現在作業特定手段特定全作業者之現在作業，並將現在作業按全作業者分別記憶之作業資訊記憶手段；及根據作業資訊記憶手段之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生手段。 1 6.如申請專利範圍第1 5項記載之作業者管理系統，其中前記作業資訊記憶手段，係對於各作業亦記憶著該各作業進行時的作業單價；且前記作業報告書產生手段，係產生含有作業之作業單價及該作業單價之合計額的作業報告書。 1 7 ·如申請專利範圍第1 〇項記載之作業者管理系統，其中前記作業場，係半導體製造工廠。 -75- (10) (10)200411512 1 8 ·如申請專利範圍第〗7項記載之作業者管理系統，其中前記作業者，係由異於擁有前記作業場也就是半導體製造工廠之企業的企業所派遣過來的作業者。 1 9 · 一種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲具備：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及根據前記現在作業特定手段所特定出之現在作業，判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段；及按照前記判斷手段的判斷結果，對該作業者發出作業貫丫了指不的指不手段。 2 0.—種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲具備： -76- (11) (11)200411512 將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及將作業之優先資訊加以記憶之作業優先資訊記憶手段 ;及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則根據前記作業者技能資訊記憶手段的作業者技能資訊，抽出可進行前記新作業之作業者的作業者抽出手段；及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記新作業之優先順位較前記現在作業爲高的作業者特定爲前 -77- (12) (12)200411512 記新作業之作業者的作業者特定處理」的作業者特定手段 ;及對被前記作業者特定手段所特定出之作業者，發出指示請其進行前記新作業之作業的指示手段。 2 1 . —種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲具備：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記億的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及將作業之優先資訊加以記憶之作業優先資訊記憶手段 ;及偵測新作業之發生的新作業偵測手段；及若前記新作業偵測手段偵測到新作業，則以前記現在作業特定手段來特定全作業者的現在作業，這些現在作業中對於已經含有新作業的全作業，以前記作業優先資訊記憶手段之作業優先資訊賦予作業的優先順位，從優先度高 -78- (13) (13)200411512 的作業起再次進行全作業分配之作業再分配手段；及將前記作業再分配手段所分配的作業對全作業者指示之指示手段。 22·如申請專利範圍第21項記載之作業者管理裝置，其中前記作業再分配手段，係從作業優先順位高的作業起認疋爲新作業；且設置：將前記各作業者和該各作業者可進行之作業賦予關連之作業者技能資訊加以記憶之作業者技能資訊記憶手段；及根據前記作業者技能資訊記憶手段的作業者技能資訊 ’抽出可進行前記新作業之作業者的作業者抽出手段；及進行「以前記現在作業特定手段將前記作業者抽出手段所抽出之作業者之現在作業加以特定，並根據前記作業優先資訊記憶手段之作業優先資訊，將前記現在作業之優先順位與前記新作業的優先順位加以取得並比較，將前記 _ 新作業之優先順位較前記現在作業爲高的作業者特定爲前記新作業之作業者的作業者特定處理」的作業者特定手段〇 23 .如申請專利範圍第2 1項記載的作業者管理裝置，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成每一作業者發送不同頻率的電 -79- (14) (14)200411512 磁波；前記作業者位置特定手段，係將接收到視爲作業區域偵測對象之作業者頻率電磁波的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 24 ·如申請專利範圍第2 1項記載的作業者管理裝置，其中前記作業者偵測手段，係設置用來接收各作業者所持之發信機傳來的電磁波的收信機；前記發信機，係設定成送出載有按照各作業者別而識別作業者之識別資訊的電磁波；前記作業者位置特定手段，係取得前記作業者偵測手段傳來的識別資訊，將接收到身爲作業區域偵測對象之作業者之識別資訊的前記作業者偵測手段找出，將該作業者偵測手段被設置之作業區域特定爲該作業者所存在之作業區域。 2 5 .如申請專利範圍第2 1 .項記載的作業者管理裝置，設置從被設置於前記作業區域的作業裝置取得作業者之作業資訊的作業資訊取得手段；前記現在作業特定手段，係除了取得前記特定爲作業者所在之作業區域之作業區域資訊，還從前記作業資訊取得手段取得從該作業者正在進行作業之作業裝置傳來的作業資訊’並根據這些區域資訊及作業資訊以特定該作業者 -80- (15) (15)200411512 的現在作業。 2 6 .—種作業者管理裝置，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理裝置，其特徵爲設置：將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段；及根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定手段；及根據前記作業特定資訊記憶手段的作業特定資訊，由前記作業者位置特定手段所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定手段 ;及每到所定時間，就以前記現在作業特定手段特定全作業者之現在作業，並將現在作業按全作業者分別記憶之作 ·§ 業資訊記憶手段；及根據作業資訊記憶手段之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生手段。 2 7.—種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出 -81 - (16) (16)200411512 ，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊，由前記作業者位置特定工程所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定工程；及根據前記現在作業特定工程所特定出之現在作業，判斷是否使該作業者對於現在作業繼續進行，或是令其進行新的作業之判斷手段；及按照前記判斷手段的判斷結果，對該作業者發出作業實行指示的指示工程。 2 8 . —種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊，由前記作業者位置特定工程所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定工程；及偵測新作業之發生的新作業偵測工程；及 -82- (17) 200411512 若前記新作業偵測手段偵測到新作業，則根據將前各作業者和該各作業者可進行之作業賦予關連之作業者能資訊加以記憶之作業者技能資訊記憶手段之作業者技資訊，抽出可進行前記新作業之作業者的作業者抽出工 •，及進行「以前記現在作業特定工程將前記作業者抽出程所抽出之作業者之現在作業加以特定，並根據將作業優先資訊加以記憶之作業優先資訊記憶手段之作業優先訊，將前記現在作業之優先順位與前記新作業的優先順加以取得並比較，將前記新作業之優先順位較前記現在業爲高的作業者特定爲前記新作業之作業者的作業者特處理」的作業者特定工程；及對被前記作業者特定工程所特定出之作業者，發出示請其進行前記新作業之作業的指示工程。 29 . —種作業者管理方法，係屬於管理在按照作業容而區分成複數作業區域的作業場進行作業之作業者之業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸，特定前記作業者位於哪個作業區域的作業者位置特定程；及根據將前記作業場之各作業區域和該各作業區域所行之作業內容賦予關連之作業特定資訊加以記憶的作業定資訊記憶手段中的作業特定資訊，由前記作業者位置定工程所特定出之作業者的作業區域，特定出該作業者記技能程工之資位作定指內作出工進特特現 -83- (18) (18)200411512 在正在進行之作業的現在作業特定工程；及偵測新作業之發生的新作業偵測工程；及若前記新作業偵測手段偵測到新作業，則以前記現在作業特定工程來特定全作業者的現在作業，這些現在作業中對於已經含有新作業的全作業，根據將作業之優先資訊加以記憶之作業優先資訊記憶手段之作業優先資訊賦予作業的優先順位，從優先度高的作業起再次進行全作業分配之作業再分配工程；及將前記作業再分配手段所分配的作業對全作業者指示之指示工程。 3 0 . —種作業者管理方法，係屬於管理在按照作業內容而區分成複數作業區域的作業場進行作業之作業者之作業者管理方法，其特徵爲具有：根據設置在前記各作業區域的作業者偵測手段的輸出，特定前記作業者位於哪個作業區域的作業者位置特定工程；及根據將前記作業場之各作業區域和該各作業區域所進行之作業內容賦予關連之作業特定資訊加以記憶的作業特定資訊記憶手段中的作業特定資訊，由前記作業者位置特定工程所特定出之作業者的作業區域，特定出該作業者現在正在進行之作業的現在作業特定工程；及每到所定時間，就以前記現在作業特定工程特定全作業者之現在作業，並將現在作業按全作業者分別記憶之作業資訊記憶工程；及 -84- (19) (19)200411512 根據作業資訊記憶工程所記憶之作業資訊，產生含有所望之作業者在各所定時間所進行之作業內容之作業報告書的作業報告書產生工程。 m -85-(1) (1) 200411512 Patent application scope 1. An operator management system, which is characterized by: a work field divided into a plurality of work areas according to the work content; and each work area of the previous work field and each work area Operation-specific information storage means for storing the operation-specific information associated with the content of the operation performed; and the operator detection means set in each operation area of the preamble; and based on the output of the preamble operator detection means, the specific preamble operator is located at Which work area's operator's location-specific means; and the work-specific information based on the previous work-specific information memorization means, then the operator's work area specified by §5 operator's location-specific means, specifies that the operator is currently in progress The current operation specific means of the operation, and the current operation specified by the previous current specific operation method, to determine whether to make the operator continue the current operation or to make a new operation; and Judgment result of judgment means It refers to the practice of not issuing work means not the means. 2. The operator management system described in item 1 of the scope of patent application, in which the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The transmitter is set to send electromagnetic waves of different frequencies to each operator; -67- (2) (2) 200411512 The pre-specified operator position specific means is to receive the electromagnetic waves of the operator's frequency regarded as the detection target of the operating area. The preamble operator detection means is found, and the operation area where the operator detection means is set is specified as the operation area where the operator exists. 3. The operator management system as described in item 1 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; the preamble transmitter It is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means and will be received as the operation area. The pre-operator detection means for identifying the identification information of the operator of the detection target is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 4. The operator management system described in item 1 of the scope of patent application, which includes a means for obtaining operation information for obtaining the operator's operation information from an operating device installed in the pre-operation area; the pre-existing current specific means, in addition to obtaining the pre-record The operation area information specific to the operation area where the operator is located, and also obtains the operation information transmitted from the operation device where the operator is working from the pre-recorded operation information acquisition means, and identifies the operator based on these area information and operation information. Now working. -68- (3) (3) 200411512 5. An operator management system, which is characterized by: a work field divided into a plurality of work areas according to the work content; and each work area of the pre-work area and the work area Operation specific information memorizing means for giving specific information related to the operation to be memorized; and operator detection means provided in each operation area of the preamble; and which predecessor operator is located based on the output of the predecessor operator detection means Means for specifying the position of the operator in the work area; and work-specific information based on the means for storing the specific information of the previous work; Specific means for current operations; and operator skill information memorization means for memorizing the skill information of related operators to the operations performed by each operator; and operation priority information memory for memorizing priority information of operations Means; and new operations that detect new operations If the new task is detected by the pre-record new operation detection method, the operator extraction method of the operator who can perform the pre-record new operation is extracted based on the pre-operator skill information memorization means of the operator's skill information; and The previous work specific means specifies the current work of the operator extracted by the previous work extraction means, and according to the work priority information of the previous work priority information storage means, the superiority of the current work is -69- (4) 200411512 first Obtain and compare the order of priority with the previous assignment of the new job, and assign the priority of the previous assignment to the current job that is higher than the previous assignment to the operator-specific processing of the operator who registered the new assignment. " For the operators specified by the specific means of the previous operator, issue instructions to ask them to perform the new tasks of the previous operator. 6. If the operator management system for item 5 of the scope of patent application, the pre-existing operator skill information memorization means is to classify the operator into memory for each operator type; and set up: each operation and the ability to perform the operation The skill operator classifies the skill information memory means for memorizing the related skill information; and obtains the operator class obtained by the former skill information memory means extracted by the former operator extraction means, and according to the former note The operation skill information of the operation skill memorization method is used to obtain the operator classification of the new operation, and set the priority order of the same operator to the high priority, and give priority to the operator. The prescriptive operator specific means means that among the operators extracted by the operator's extraction means, from the operator who has the higher priority to the operator given by the preface priority ordering means, the operator specific processing is performed sequentially. 7. If the operator management system described in item 5 of the scope of patent application, the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters sent by each operator; The ability to take the points is given in advance. -70- (5) (5) 200411512 The preamble transmitter is set to send each operator electromagnetic waves of different frequencies; the preamble operator location specific means is to receive The preamble operator detection method of the operator's frequency electromagnetic wave regarded as the detection object of the operation area is found, and the operation area where the operator detection method is set is specified as the operation area where the operator exists. 8. The operator management system as described in item 5 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from transmitters held by each operator; the preamble transmitter It is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means and will be received as the operation area. The pre-operator detection means for identifying the identification information of the operator of the detection target is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 9 · The operator management system described in item 5 of the scope of patent application, which includes a means for obtaining operation information for obtaining the operator's operation information from an operating device installed in the pre-operation area; the pre-existing current specific means, except for obtaining the pre-record The work area information specific to the work area where the operator is located, and the work information transmitted from the work device where the operator is working is also obtained from the pre-recorded work information acquisition means, and according to These area information and operation information are specific to the operator's current operation. 10. An operator management system, comprising: a work field divided into a plurality of work areas according to the work content; and specific work-related information given to each work area of the previous work field and the work content performed by each work area Memorized operation-specific information memorization means; and operator detection means provided in each operation area of the preamble; and specific operator position specific means of which operation area the preamble operator is located in, based on the output of the preamble operator detection means; and According to the work-specific information of the previous-work-specific information storage means, the work area of the operator specified by the previous-worker position-specific means, and the current work-specific means of the work that the operator is currently performing; and the priority of the work Information-memory-priority information-memory methods; and new-work detection methods that detect the occurrence of new operations; and if a new operation is detected by a previously recorded new operation detection method, the previous-record current operation-specific method is used to identify all operators Current assignments for these After all tasks including new tasks, the task priority information of the previously recorded task priority information storage means gives priority to the tasks, and the task redistribution method for all task assignments is performed again from the high priority task; and the method of redistributing previous tasks The assigned means of instruction to all operators. -72- (7) (7) 200411512 1 1 · If the operator management system described in item 10 of the scope of patent application, the pre-assignment of means of reassignment is identified as a new job from the job with the highest priority of the job; and Settings: operator skill information memorization means that memorizes each operator's previous work and the skills information associated with the work performed by each operator; and the operator's skill information memorization means based on the previous information Operator extraction methods for operators who perform new assignments; and "Previous operation specific means to specify the current operations of operators extracted by the previous operator extraction means, and to prioritize operations based on the prior operation priority information memory means Information to obtain and compare the priority order of the previous job and the priority order of the new job, and to prioritize the new job that has a higher priority than the current job of the predecessor. Operator-specific means 〇12. Such as the tenth item in the scope of patent application Operator management system, in which the preamble operator detection means is set up to receive electromagnetic waves from the transmitters held by each operator; the preamble sender is set to each operator to send different Electromagnetic wave of frequency; the specific means of the preamble operator position is to find the -73- (8) (8) 200411512 of the preamble operator detection means that received the electromagnetic wave of the operator's frequency as the detection object of the work area, and The work area where the worker detection means is set is specifically the work area in which the worker exists. 13. The operator management system as described in Item 10 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The receiver is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means, and will receive the information as The preamble operator detection means of the identification information of the operator of the operation area detection object is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 14 · The operator management system described in item 10 of the scope of patent application, which includes means for obtaining operation information for obtaining operator's operation information from an operating device provided in the operation area of the preamble; the preexisting current specific means are in addition to Obtain work area information specified in the work area where the operator is located, and also obtain work information transmitted from the work device in which the operator is working from the work information acquisition means, and use the area information and work information to specify the work area. Operator's current job. 15 · —A worker management system, which is characterized by having: a work field divided into a plurality of work areas according to the content of the work; and -74- (9) (9) 200411512 each work area of the previous work field and each work area Operation specific information memorizing means for giving specific information related to the operation to be memorized; and operator detection means provided in each operation area of the preamble; and which predecessor operator is located based on the output of the predecessor operator detection means Means for specifying the position of the operator in the work area; and work-specific information based on the means for storing the specific information of the previous work; Current operation specific means; and every time a predetermined time is reached, the current operation specific means specifies the current operation of the full operator, and the current operation is memorized by the operation information memorization means of each operator separately; and the operation according to the operation information memory means Information to generate Job report work report of the work carried out by the content of a given time generating means. 16. The operator management system as described in item 15 of the scope of the patent application, wherein the pre-job information storage means means that for each job, the unit price of the job at the time of each job is also memorized; and the pre-job report generation means is Generate an operation report containing the operation unit price of the operation and the total amount of the operation unit price. 17 · The operator management system as described in Item 10 of the scope of patent application, where the pre-operation site is a semiconductor manufacturing plant. -75- (10) (10) 200411512 1 8 · If the operator management system described in item 7 of the scope of patent application, the former operator is owned by an enterprise that is different from the company that owns the former operating field, that is, the semiconductor manufacturing plant. Dispatched operator. 1 9 · A worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. The worker management device is characterized in that: each work area of the preceding work field and each Work-specific information memorization means that memorizes related work-specific information in the work area performed by the work area; and according to the output of the operator detection means provided in each work area of the preamble, the operator in which work area the specific preamble worker is located Location-specific means; and operation-specific information based on pre-job-specific information-memory means, the operation area of the operator specified by the pre-existing operator's position-specific means, and current operation-specific means specifying the operation that the operator is currently performing; And according to the current work specified by the predecessor current work specific means, to determine whether to make the operator continue the current work or to make a new operation; and according to the result of the predetermined judgment means, determine the work Issuer The finger does not refer to the means. 2 0.—A worker management device is a worker management device that belongs to a worker who manages work in a work field divided into a plurality of work areas according to the work content, and is characterized by: -76- (11) (11) 200411512 operation-specific information storage means for assigning the operation-specific information of each operation area of the pre-operation field and the operation content performed by each operation area to the related operation-specific information; and according to the output of the operator detection means provided in each pre-operation area, The operator's location-specific means of which work area a specific pre-worker is located in; and the work-specific information of the pre-worker-specific information storage means, and the work area of the operator specified by the pre-worker's location-specific means, to identify the operator Specific means of current work for current work; and means for memorizing operator skill information to memorize the skill information of related operators to the work performed by each operator; and prioritized information of work Priority information memorization means of memory operation; and detection A new operation detection method for detecting the occurrence of a new operation; and if a new operation is detected by the pre-recorded new operation detection method, the operator who can perform the pre-recorded new operation is extracted according to the skill information of the pre-recorded operator's skill information memory means The operator's extraction means; and "the previous operation specific means to specify the current operation of the operator extracted by the previous operator extraction means, and based on the operation priority information of the previous operation priority information storage means, the previous operation The priority order is obtained and compared with the priority order of the new job in the previous record, and the operator who has the higher priority order of the new job in the previous record than the current job is specified as the former-77- (12) (12) 200411512 Operator-specific processing ", operator-specific means; and instructional means for instructing operators identified by pre-existing operator-specific methods to perform pre-existing new operations. 2 1. —A worker management device is a worker management device that manages workers who work in a work area divided into a plurality of work areas according to the content of the work, and is characterized in that: each work area of the preceding work area and the The content of the work performed in each work area is given to the specific information of the related work, and the work-specific information memorizing means is recorded; and according to the output of the operator detection means provided in each work area of the preamble, the specific preamble operator is located in which work area. Operator position specific means; and operation specific information based on the previous operation specific information storage means, the operation area of the operator specified by the previous operator position specific means, and the current operation specific of the operation that the operator is currently performing Means; and a work priority information storage means that memorizes priority information of a job; and a new job detection means that detects the occurrence of a new job; and if a new job is detected by the previous new job detection means, the current job is previously recorded Specific means to specify the current operations of all operators For these current jobs, for all jobs that already contain new jobs, the job priority information previously recorded in the job priority information memory means gives priority to jobs, starting from jobs with high priority -78- (13) (13) 200411512 Means of job redistribution for all-job assignments; and means of instructions for all jobs assigned by the previous job redistribution means to all operators. 22. The operator management device as described in item 21 of the scope of patent application, wherein the pre-job redistribution means is recognized as a new job from the job with the highest priority of the job; and it is set: the pre-job operators and the respective jobs Operator skill information memorizing means which gives the relevant operator skill information to memorize; and operator skill information 'extraction based on the previous operator skill information memorizing means' extraction of the operator who can perform new assignment Means; and "the previous work specific means to specify the current work of the operator extracted by the previous operator extraction means, and according to the work priority information of the previous work priority information memory means, the priority order of the current work and the previous record Obtain and compare the priority of the new job, and compare the predecessor _ The priority of the new job is higher than the predecessor's current job. The operator is specific to the predecessor of the new job's operator-specific processing. Operator management equipment described in the scope of patent application No. 21 Among them, the preamble operator detection means is a receiver set to receive electromagnetic waves from a transmitter held by each operator; the preamble transmitter is set to each operator to send electricity of a different frequency -79 -(14) (14) 200411512 Magnetic wave; The specific means for preamble operator position is to find the preamble operator detection means that has received electromagnetic waves of the frequency of the operator as the detection object of the work area, and to detect the operator The set work area is specifically the work area in which the operator exists. 24. The operator management device as described in item 21 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The machine is set to send electromagnetic waves containing the identification information that identifies the operator according to each operator. The specific means of preposition operator position is to obtain the identification information from the detection means of the preposition operator, and it will be received as the operation. The preamble operator detection means of the identification information of the operator of the area detection object is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 25. If the operator management device described in item 21 of the scope of patent application is provided with operation information acquisition means for acquiring operation information of the operator from the operation device installed in the operation area of the preamble; the preexisting current specific means are in addition to Obtain work area information specified in the work area where the operator is located, and also obtain work information from the work device where the operator is working from the work information acquisition means, and specify the area information based on these area information and work information. Operator -80- (15) (15) 200411512's current job. 2 6. A worker management device is a worker management device that manages workers who work in a work field that is divided into a plurality of work areas according to the content of the work. It is characterized by: setting each work area of the preceding work field and the Job-specific information storage means that memorizes the work-specific information associated with the work performed in each work area; and the work in which work area the specific pre-worker is located based on the output of the operator detection means provided in each work area Operator-specific means; and operation-specific information based on the previous-work-specific information-memory means, the work area of the operator specified by the previous-worker-specific position-specific means, and the current-work-specific means that specify the work that the operator is currently performing ; And every time the specified time, the current operation of the current operation specific means to specify the full operation of the current operator, and the current operation according to the operation of all the operators to memorize · § industry information memory means; and operation information according to the operation information memory means To produce the desired job Means of generating the work report of the work report of the work performed by the user at each set time. 2 7.—A worker management method, which belongs to a worker management method for managing workers who work in a work field that is divided into a plurality of work areas according to the content of the work, and is characterized by having the following operations: -81-(16) (16) 200411512, which specifies the operator's location and the specific project in which work area the predecessor is located; and according to the work area of the predecessor work area and the work performed in each work area Content-specific job-specific information is memorized. Job-specific information is stored in the job-specific information. The job-specific information is specified by the previous operator ’s location and specified by the project. Work-specific projects; and the means of judging whether to make the operator continue the current work or make new operations based on the current work specified by the pre-existing current work-specific project; and the judgment results according to the pre-judgment methods , Means to issue a job execution instruction to the operator Show project. 2 8. —A worker management method, which belongs to a worker management method for managing workers who work in a work field divided into a plurality of work areas according to the content of the work, and is characterized by having the following operations: The output of the operator detection means, the operator's position and the specific project in which operation area the predecessor operator is located; and the memorization based on the specific operation information of the predecessor operation field and the operation content performed by each operation area to the associated operation specific information. The operation-specific information in the operation-specific information memory means, the operation area of the operator specified by the specific project of the previous operator position, the current operation-specific project of the operation that the operator is currently performing; and the detection of the new operation. New work detection project that occurred; and -82- (17) 200411512 If a new work is detected by the previous new work detection means, the previous operator and the work that can be performed by each operator are assigned to the related operator according to Skills for memorizing information skills of operators ， Extract the operator who can perform the pre-recorded new operation, and perform the “Previous current operation specific project to specify the current operation of the operator extracted from the pre-existing operator's extraction process, and then assign it according to the priority information of the operation. Memorized job priority information The memorization of the job priority information, obtains and compares the prior order of the previous job and the prior order of the new job, and prioritizes the new job that has a higher priority than the present job. The operator-specific project of the new operator of the operator "and the operator-specific project of the specific project of the previous operator, and the instructed project that instructs them to carry out the new task of the previous project. 29. A method of operator management, which belongs to a method of operator management for managing operators who work in a work field that is divided into a plurality of operation areas according to the operation capacity, and is characterized by: Loss of measurement methods, specific location of the operator in which work area the preamble operator is located, and a specific process; and a work setting based on memorizing each work area of the predecessor work area and the content of the work performed by each work area to the associated work specific information. The specific information of the work in the information memory means that the position of the operator specified in the project is determined by the pre-recorded operator's position, and the level of the operator's skill in the process is specified. (18) (18) 200411512 Current operation-specific projects in ongoing operations; and new operation detection projects that detect the occurrence of new operations; and if a new operation is detected by the previous new operation detection means, the previous operation is recorded now Job-specific projects to specify the current jobs of all operators, For all operations including new operations, assign priority to the operations based on the operation priority information of the operation priority information memorizing means that memorizes the priority information of the operations, and re-allocate the entire operation from the high priority operation; and Instruct the project assigned by the previous assignment reallocation means to all operators. 30. —A worker management method, which belongs to a worker management method for managing workers who work in a work field that is divided into a plurality of work areas according to the work content, and is characterized by having the following operations: The output of the operator detection means, the operator's position and the specific project in which operation area the predecessor operator is located; and the memorization based on the specific operation information of the predecessor operation field and the operation content performed by each operation area to the associated operation specific information The operation-specific information in the operation-specific information storage means is the operation area of the operator specified by the predecessor operator ’s location-specific project, and the current operation-specific project of the operation that the operator is currently performing; and each time the predetermined time arrives, Remember the current work of a specific project and the current work of a specific full operator, and save the current operation as a work information memory project for all operators; and -84- (19) (19) 200411512 Operation information to generate The work report of the work report of the work performed at the given time generates the work. m -85-