PL2220377T3 - Urządzenie zaworowe - Google Patents

Urządzenie zaworowe

Info

Publication number
PL2220377T3
PL2220377T3 PL08801707T PL08801707T PL2220377T3 PL 2220377 T3 PL2220377 T3 PL 2220377T3 PL 08801707 T PL08801707 T PL 08801707T PL 08801707 T PL08801707 T PL 08801707T PL 2220377 T3 PL2220377 T3 PL 2220377T3
Authority
PL
Poland
Prior art keywords
valve apparatus
valve
Prior art date
Application number
PL08801707T
Other languages
English (en)
Inventor
Axel Grigoleit
Bernhard Steinmann
Original Assignee
Hydac Fluidtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hydac Fluidtechnik Gmbh filed Critical Hydac Fluidtechnik Gmbh
Publication of PL2220377T3 publication Critical patent/PL2220377T3/pl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/028—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
    • B23B31/30—Chucks characterised by features relating primarily to remote control of the gripping means using fluid-pressure means in the chuck
    • B23B31/302—Hydraulic equipment, e.g. pistons, valves, rotary joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/002—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring the holding action of work or tool holders
    • B23Q17/005—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring the holding action of work or tool holders by measuring a force, a pressure or a deformation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F15B21/08—Servomotor systems incorporating electrically operated control means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205—Systems with pumps
    • F15B2211/2053—Type of pump
    • F15B2211/20538—Type of pump constant capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/21—Systems with pressure sources other than pumps, e.g. with a pyrotechnical charge
    • F15B2211/212—Systems with pressure sources other than pumps, e.g. with a pyrotechnical charge the pressure sources being accumulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/305—Directional control characterised by the type of valves
    • F15B2211/30505—Non-return valves, i.e. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/305—Directional control characterised by the type of valves
    • F15B2211/30505—Non-return valves, i.e. check valves
    • F15B2211/3051—Cross-check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/305—Directional control characterised by the type of valves
    • F15B2211/30525—Directional control valves, e.g. 4/3-directional control valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/305—Directional control characterised by the type of valves
    • F15B2211/3056—Assemblies of multiple valves
    • F15B2211/30565—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve
    • F15B2211/3057—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve having two valves, one for each port of a double-acting output member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/31—Directional control characterised by the positions of the valve element
    • F15B2211/3105—Neutral or centre positions
    • F15B2211/3111—Neutral or centre positions the pump port being closed in the centre position, e.g. so-called closed centre
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/31—Directional control characterised by the positions of the valve element
    • F15B2211/3138—Directional control characterised by the positions of the valve element the positions being discrete
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/32—Directional control characterised by the type of actuation
    • F15B2211/327—Directional control characterised by the type of actuation electrically or electronically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40507—Flow control characterised by the type of flow control means or valve with constant throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
    • F15B2211/41509—Flow control characterised by the connections of the flow control means in the circuit being connected to a pressure source and a directional control valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/505—Pressure control characterised by the type of pressure control means
    • F15B2211/50554—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure downstream of the pressure control means, e.g. pressure reducing valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/52—Pressure control characterised by the type of actuation
    • F15B2211/526—Pressure control characterised by the type of actuation electrically or electronically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/565—Control of a downstream pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/625—Accumulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/63—Electronic controllers
    • F15B2211/6303—Electronic controllers using input signals
    • F15B2211/6306—Electronic controllers using input signals representing a pressure
    • F15B2211/6313—Electronic controllers using input signals representing a pressure the pressure being a load pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/665—Methods of control using electronic components
    • F15B2211/6653—Pressure control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/705—Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
    • F15B2211/7051—Linear output members
    • F15B2211/7053—Double-acting output members
    • F15B2211/7054—Having equal piston areas
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7838—Plural
    • Y10T137/7846—Mechanically interconnected

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Gripping On Spindles (AREA)
  • Jigs For Machine Tools (AREA)
  • Control Of Fluid Pressure (AREA)
PL08801707T 2007-11-13 2008-08-26 Urządzenie zaworowe PL2220377T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200710054503 DE102007054503A1 (de) 2007-11-13 2007-11-13 Ventilvorrichtung
EP20080801707 EP2220377B1 (de) 2007-11-13 2008-08-26 Ventilvorrichtung
PCT/EP2008/006976 WO2009062558A1 (de) 2007-11-13 2008-08-26 Ventilvorrichtung

Publications (1)

Publication Number Publication Date
PL2220377T3 true PL2220377T3 (pl) 2013-03-29

Family

ID=39829011

Family Applications (1)

Application Number Title Priority Date Filing Date
PL08801707T PL2220377T3 (pl) 2007-11-13 2008-08-26 Urządzenie zaworowe

Country Status (8)

Country Link
US (1) US8739681B2 (pl)
EP (2) EP2518331B1 (pl)
JP (2) JP2011502806A (pl)
CN (1) CN101855456B (pl)
DE (1) DE102007054503A1 (pl)
ES (1) ES2391429T3 (pl)
PL (1) PL2220377T3 (pl)
WO (1) WO2009062558A1 (pl)

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DE102009044167A1 (de) * 2009-10-02 2011-04-07 Röhm Gmbh Verfahren zum Einspannen eines Werkzeugs oder eines Werkstücks sowie Vorrichtung zur Durchführung des Verfahrens
DE102010018317A1 (de) * 2010-04-27 2011-10-27 Wabco Gmbh Ventileinrichtung
DE102011105540A1 (de) 2011-06-24 2012-12-27 Hydac Fluidtechnik Gmbh Versorgungsvorrichtung und Verfahren zum Betrieb eines Verbrauchers unter Einsatz einer Versorgungsvorrichtung
DE102011118651A1 (de) * 2011-11-16 2013-05-16 Robert Bosch Gmbh Schnell schaltendes Ventil mit Überwachungseinrichtung
DE102013012528B4 (de) * 2013-07-27 2015-09-24 Hydrosaar Gmbh Druckversorgungseinrichtung
DE102014110007B4 (de) * 2014-07-16 2016-02-04 Gebr. Heller Maschinenfabrik Gmbh Spanneinheit und Spannfuttereinheit einer Spannvorrichtung sowie Verfahren zur Ausführung einer Spann- oder Lösebewegung zum Einspannen oder Lösen eines Werkstücks
DE102015101032A1 (de) * 2015-01-26 2016-07-28 Amazonen-Werke H. Dreyer Gmbh & Co. Kg Landwirtschaftliche Maschine und Regelungsverfahren
DE102015015858A1 (de) * 2015-12-03 2017-06-08 Sauter Feinmechanik Gmbh Überwachungseinrichtung für Werkzeugrevolver
CN105971977A (zh) * 2016-06-03 2016-09-28 南通纺都置业有限公司 一种手指油缸不同油压下夹持力测试装置
CN108591139A (zh) * 2018-03-13 2018-09-28 西安理工大学 一种液压动力卡盘夹紧力控制***及夹紧力控制方法
KR102456550B1 (ko) * 2020-12-03 2022-10-18 현대위아 주식회사 에어척의 공작물 이탈방지 시스템
CN114273973A (zh) * 2021-12-03 2022-04-05 浙江机电职业技术学院 液压卡盘夹持力的智能控制方法
IT202200010529A1 (it) * 2022-05-20 2023-11-20 Sicam Srl Sistema di movimentazione di almeno un oggetto
CN116700374B (zh) * 2023-08-03 2023-10-24 合肥市富林物联网技术股份有限公司 一种正负压力和差压力变送控制***及其装置

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US4747337A (en) * 1985-02-18 1988-05-31 Kitagawa Iron Works Co., Ltd. Rotary fluid cylinders for operating chucks
DE3836453A1 (de) 1987-12-21 1989-07-06 Bosch Gmbh Robert Ventilanordnung zur steuerung und ueberwachung des arbeitsdruckes eines hydraulischen verbrauchers
JPH03107108U (pl) * 1990-02-20 1991-11-05
JPH0492712U (pl) * 1990-12-28 1992-08-12
JPH04289007A (ja) * 1991-01-23 1992-10-14 Daikin Ind Ltd チャック圧制御装置
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Also Published As

Publication number Publication date
ES2391429T3 (es) 2012-11-26
CN101855456B (zh) 2013-12-18
EP2518331A1 (de) 2012-10-31
JP2011502806A (ja) 2011-01-27
US8739681B2 (en) 2014-06-03
US20100229970A1 (en) 2010-09-16
EP2220377B1 (de) 2012-10-03
JP2014078280A (ja) 2014-05-01
DE102007054503A1 (de) 2009-05-20
EP2220377A1 (de) 2010-08-25
WO2009062558A1 (de) 2009-05-22
EP2518331B1 (de) 2017-11-22
CN101855456A (zh) 2010-10-06

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