NO314478B1 - Fremgangsmåte for å fremstille en piezoelektrisk resonator - Google Patents

Fremgangsmåte for å fremstille en piezoelektrisk resonator Download PDF

Info

Publication number: NO314478B1
Authority: NO; Norway
Prior art keywords: electrodes; insulating film; several; resonator; forming
Prior art date: 1997-10-03

Application number

NO19984637A

Other languages

English (en)

Norwegian (no)

Other versions

NO984637L (no

NO984637D0 (no

Inventor

Tetsuo Takeshima

Takeshi Yamazaki

Shigemasa Kusabiraki

Yutaka Kawai

Original Assignee

Murata Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-10-03

Filing date

1998-10-02

Publication date

2003-03-24

1998-10-02 Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co

1998-10-02 Publication of NO984637D0 publication Critical patent/NO984637D0/no

1999-04-06 Publication of NO984637L publication Critical patent/NO984637L/no

2003-03-24 Publication of NO314478B1 publication Critical patent/NO314478B1/no

Links

238000000034 method Methods 0.000 title claims description 30
239000000758 substrate Substances 0.000 claims description 20
238000004519 manufacturing process Methods 0.000 claims description 11
238000003475 lamination Methods 0.000 claims description 4
238000007493 shaping process Methods 0.000 claims 2
230000010355 oscillation Effects 0.000 description 9
238000005520 cutting process Methods 0.000 description 7
230000010287 polarization Effects 0.000 description 6
238000010276 construction Methods 0.000 description 3
230000000694 effects Effects 0.000 description 3
230000005684 electric field Effects 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
230000008878 coupling Effects 0.000 description 2
238000010168 coupling process Methods 0.000 description 2
238000005859 coupling reaction Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000002159 abnormal effect Effects 0.000 description 1
230000002411 adverse Effects 0.000 description 1
239000011230 binding agent Substances 0.000 description 1
239000004020 conductor Substances 0.000 description 1
230000002950 deficient Effects 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
239000003292 glue Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
229910052763 palladium Inorganic materials 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
238000000926 separation method Methods 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
238000005245 sintering Methods 0.000 description 1
238000005476 soldering Methods 0.000 description 1
238000010025 steaming Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Physics & Mathematics (AREA)
Acoustics & Sound (AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

NO19984637A 1997-10-03 1998-10-02 Fremgangsmåte for å fremstille en piezoelektrisk resonator NO314478B1 (no)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP28766897A JP3147834B2 (ja)	1997-10-03	1997-10-03	圧電共振子の製造方法

Publications (3)

Publication Number	Publication Date
NO984637D0 NO984637D0 (no)	1998-10-02
NO984637L NO984637L (no)	1999-04-06
NO314478B1 true NO314478B1 (no)	2003-03-24

Family

ID=17720185

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NO19984637A NO314478B1 (no)	1997-10-03	1998-10-02	Fremgangsmåte for å fremstille en piezoelektrisk resonator

Country Status (7)

Country	Link
US (1)	US6223406B1 (de)
EP (1)	EP0907240B1 (de)
JP (1)	JP3147834B2 (de)
KR (1)	KR100307679B1 (de)
CN (1)	CN1163980C (de)
DE (1)	DE69816737T2 (de)
NO (1)	NO314478B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20030073841A (ko) *	2002-03-13	2003-09-19	엘지이노텍 주식회사	박막용적 탄성공진기 필터의 전극 배치 구조
JP4804760B2 (ja) *	2005-01-21	2011-11-02	富士フイルム株式会社	積層型圧電構造体の製造方法
KR100819555B1 (ko) *	2006-12-29	2008-04-08	주식회사 에스세라	압전 공진자를 가지는 압전 공진 장치의 형성방법들
WO2009044941A1 (en) *	2007-09-29	2009-04-09	Innochips Technology Co., Ltd.	Vibrator and method of manufacturing the same
FR2932333B1 (fr) *	2008-06-04	2010-08-13	Centre Nat Rech Scient	Resonateur hbar a stabilite en temperature elevee
CN102192113B (zh) *	2011-01-28	2013-07-03	余义伦	一种弹性触发压电装置及其应用
US8816567B2 (en) *	2011-07-19	2014-08-26	Qualcomm Mems Technologies, Inc.	Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1207974A (en) *	1966-11-17	1970-10-07	Clevite Corp	Frequency selective apparatus including a piezoelectric device
CH607336A5 (de) *	1975-09-22	1978-12-15	Siemens Ag
GB2044527B (en) *	1978-12-27	1983-05-25	Murata Manufacturing Co	Piezoelectric unit and device
US4564782A (en) *	1983-09-02	1986-01-14	Murata Manufacturing Co., Ltd.	Ceramic filter using multiple thin piezoelectric layers
JPS6086880A (ja) *	1983-10-19	1985-05-16	Nec Corp	電歪効果素子
DE69725372T2 (de) *	1996-04-05	2004-07-22	Murata Mfg. Co., Ltd., Nagaokakyo	Piezoelektrischer Resonator
JP3577170B2 (ja) *	1996-08-05	2004-10-13	株式会社村田製作所	圧電共振子とその製造方法およびそれを用いた電子部品

1997
- 1997-10-03 JP JP28766897A patent/JP3147834B2/ja not_active Expired - Lifetime
1998
- 1998-09-24 US US09/159,906 patent/US6223406B1/en not_active Expired - Lifetime
- 1998-09-25 EP EP19980118236 patent/EP0907240B1/de not_active Expired - Lifetime
- 1998-09-25 DE DE1998616737 patent/DE69816737T2/de not_active Expired - Lifetime
- 1998-09-29 CN CNB981208940A patent/CN1163980C/zh not_active Expired - Lifetime
- 1998-10-02 NO NO19984637A patent/NO314478B1/no not_active IP Right Cessation
- 1998-10-02 KR KR1019980041704A patent/KR100307679B1/ko not_active IP Right Cessation

Also Published As

Publication number	Publication date
US6223406B1 (en)	2001-05-01
EP0907240A3 (de)	2001-02-07
KR19990036874A (ko)	1999-05-25
EP0907240A2 (de)	1999-04-07
EP0907240B1 (de)	2003-07-30
CN1224248A (zh)	1999-07-28
KR100307679B1 (ko)	2001-11-17
JP3147834B2 (ja)	2001-03-19
DE69816737D1 (de)	2003-09-04
NO984637L (no)	1999-04-06
JPH11112260A (ja)	1999-04-23
NO984637D0 (no)	1998-10-02
DE69816737T2 (de)	2004-04-08
CN1163980C (zh)	2004-08-25

Legal Events

Date	Code	Title	Description
2018-11-12	MK1K	Patent expired

Publication	Publication Date	Title
US4759107A (en)	1988-07-26	Monolithic piezoelectric element and method of adjusting the resonant frequency thereof
NO313353B1 (no)	2002-09-16	Piezoelektrisk resonator og fremgangsmåte for innstilling av dens resonatorfrekvens
JP4434082B2 (ja)	2010-03-17	圧電共振子の製造方法
EP0823781A2 (de)	1998-02-11	Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator
JP2019208260A (ja)	2019-12-05	圧電薄膜素子の製造方法
NO313352B1 (no)	2002-09-16	Piezoelektrisk resonator og komponent med samme
KR0155437B1 (ko)	1998-12-15	끝면반사형 표면파 공진자
NO314478B1 (no)	2003-03-24	Fremgangsmåte for å fremstille en piezoelektrisk resonator
NO313354B1 (no)	2002-09-16	Piezoelektrisk resonator samt kretskomponent med samme
NO321564B1 (no)	2006-06-06	Piezoelektrisk resonator og kretskomponent med samme
NO313350B1 (no)	2002-09-16	Piezoelektrisk kretskomponent
NO319238B1 (no)	2005-07-04	Piezoelektrisk resonator og kretskomponent med en eller flere slike resonatorer
NO313356B1 (no)	2002-09-16	Piezoelektrisk resonator, måte å innstille dennes resonansfrekvens, og kommunikasjonsapparat
US6014799A (en)	2000-01-18	Method of manufacturing a piezoelectric resonator
JP2001119262A (ja)	2001-04-27	圧電共振子
NO319239B1 (no)	2005-07-04	Piezoelektrisk resonator og elektronisk kretskomponent med slik resonator
JP3885578B2 (ja)	2007-02-21	圧電共振子の製造方法
NO313357B1 (no)	2002-09-16	Elektronisk komponent og stigefilter
KR100280072B1 (ko)	2001-02-01	압전공진자및이를구비한전자부품
US6377135B1 (en)	2002-04-23	Piezoelectric resonator and piezoelectric resonant element
NO313355B1 (no)	2002-09-16	Elektrisk komponent og stigefilter
JP2001102892A (ja)	2001-04-13	圧電共振部品およびその製造方法
JPH03165613A (ja)	1991-07-17	圧電部品
JP2000196405A (ja)	2000-07-14	圧電共振子およびフィルタ
JP2000315932A (ja)	2000-11-14	積層型圧電共振子とその特性調整方法およびそれを用いたラダー型フィルタ