KR970077202A - Method of forming a contact of a semiconductor device - Google Patents
Method of forming a contact of a semiconductor device Download PDFInfo
- Publication number
- KR970077202A KR970077202A KR1019960016222A KR19960016222A KR970077202A KR 970077202 A KR970077202 A KR 970077202A KR 1019960016222 A KR1019960016222 A KR 1019960016222A KR 19960016222 A KR19960016222 A KR 19960016222A KR 970077202 A KR970077202 A KR 970077202A
- Authority
- KR
- South Korea
- Prior art keywords
- contact
- semiconductor device
- forming
- dry etching
- present
- Prior art date
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Abstract
본 발명은 반도체소자의 콘택 형성 공정에 있어서, 콘택 건식식각공정시 발생하는 패턴 임계치수의 오차를 보정하기 위한 콘택 형성 방법에 관한 것이다.The present invention relates to a contact forming method for correcting an error of a pattern critical number generated in a contact dry etching process in a contact forming process of a semiconductor device.
본 발명은 콘택 건식식각공정 전에 PR 마스크를 필요한 양만큼 추가적으로 제거하는 공정을 진행함으로써 이루어진다.The present invention is achieved by carrying out a process of additionally removing a PR mask by a necessary amount before the contact dry etching process.
따라서, 본 발명의 반도체소자의 콘택 형성 방법은 콘택 패턴의 정확도 및 정밀도를 향상시켜 반도체소자의 신뢰성을 확보할 수 있는 효과가 있다.Therefore, the method of forming a contact of a semiconductor device of the present invention has the effect of improving the accuracy and precision of a contact pattern and securing the reliability of the semiconductor device.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제3도는 본 발명에 따라 Pr 추가제거공정을 진행한 후의 콘택 영역을 나타내는 단면도이다.FIG. 3 is a cross-sectional view showing the contact region after the Pr addition / removal process is performed according to the present invention. FIG.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960016222A KR970077202A (en) | 1996-05-15 | 1996-05-15 | Method of forming a contact of a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960016222A KR970077202A (en) | 1996-05-15 | 1996-05-15 | Method of forming a contact of a semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970077202A true KR970077202A (en) | 1997-12-12 |
Family
ID=66219477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960016222A KR970077202A (en) | 1996-05-15 | 1996-05-15 | Method of forming a contact of a semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970077202A (en) |
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1996
- 1996-05-15 KR KR1019960016222A patent/KR970077202A/en not_active Application Discontinuation
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