KR950005390A - 제진장치 - Google Patents
제진장치 Download PDFInfo
- Publication number
- KR950005390A KR950005390A KR1019930030761A KR930030761A KR950005390A KR 950005390 A KR950005390 A KR 950005390A KR 1019930030761 A KR1019930030761 A KR 1019930030761A KR 930030761 A KR930030761 A KR 930030761A KR 950005390 A KR950005390 A KR 950005390A
- Authority
- KR
- South Korea
- Prior art keywords
- jet nozzle
- nozzle
- disposed
- suction
- chamber
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
- B08B5/026—Cleaning moving webs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
Landscapes
- Cleaning In General (AREA)
Abstract
워크에 부착한 먼지를 제거하는 세정효과에 우수하며 또한 소음을 저감할 수 있는 제진장치를 제공한다.
에어배출실(2)과 에어흡입실(3)과를 가지는 케이싱(4)의 하면측에 상호로 접근하는 방향으로 초음파에어를 분출하는 제1 분출노즐(11)과 제2 분출노즐(12)을 설치한다.
또한 제1 분출노즐(11)과 제2 분출노즐(12)의 사이에 흡인노즐(9)을 배설한다.
제1 분출노즐(11)과 제2 분출노즐(12)과 제2 분출노즐(12)과 워크(W) 표면과의 사이에, 합류난류공실(16)을 형성한다.
흡인노즐(9)의 개구부를 가지는 벽면(17, 17)을 측면에서 보는데 있어서 뒷쪽으로 호상으로 만곡하는 오목면(24)으로 형성한다. 오목면(24)의 상류측 끝가장자리에 제1 분출노즐(11)을 배설하고 또한 오목면(24)의 하류측 끝가장자리에 제2 분출노즐(12)을 배설한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (5)
- 서로 접근하는 방향으로 초음파에어(E1, E2)를 분출하는 제1 분출노즐(11)과 제2 분출노즐(12)을 설치하는 동시에 그 제1 분출노즐(11)과 제2 분출노즐(12)의 사이에 흡인노즐(9)을 배설한 것을 특징으로 하는 제진장치.
- 제1항에 있어서, 제1 분출노즐(11)과 제2 분출노즐(12)과 워크(W) 표면과의 합류난류공실(16)을 형성한 것을 특징으로 하는 제진장치.
- 제1항에 있어서, 흡인노즐(9)의 개구부를 가지는 벽면(17, 17)을 측면에서 보아 윗쪽으로 호상으로 만곡하는 오목면(24)으로 형성한 것을 특징으로 하는 제진장치.
- 제3항에 있어서, 오목면(24)의 상류측 끝가장자리에 제1 분출노즐(11)을 배설하고 또한 오목면(24)의 하류측 끝가장자리에 제2 분출노즐(12)을 배설한 것을 특징으로 하는 제진장치.
- 제1항에 있어서, 제1 분출노즐(11)과 제2 분출노즐(12)과 흡인노즐(9)과를 에어배출실(2)과 에어흡입실(3)과를 가지는 케이싱(4)의 하면측에 배설한 것을 특징으로 하는 제진장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5240672A JP2820599B2 (ja) | 1993-08-31 | 1993-08-31 | 除塵装置 |
JP93-240672 | 1993-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950005390A true KR950005390A (ko) | 1995-03-20 |
KR970009001B1 KR970009001B1 (ko) | 1997-06-03 |
Family
ID=17062992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930030761A KR970009001B1 (ko) | 1993-08-31 | 1993-12-29 | 제진장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5457847A (ko) |
EP (1) | EP0640411B1 (ko) |
JP (1) | JP2820599B2 (ko) |
KR (1) | KR970009001B1 (ko) |
DE (1) | DE69409314T2 (ko) |
TW (1) | TW231974B (ko) |
Families Citing this family (51)
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FI95611C (fi) * | 1994-05-16 | 1996-02-26 | Valmet Paper Machinery Inc | Menetelmä ja laite paperikoneella tai sen jälkikäsittelylaitteella rainasta irtoavan pölyn keräämiseksi ja poistamiseksi |
JP3122370B2 (ja) * | 1996-05-29 | 2001-01-09 | 株式会社伸興 | 除塵装置 |
US6148831A (en) * | 1996-10-25 | 2000-11-21 | Valmet Corporation | Method for cleaning a web |
FI104099B (fi) * | 1996-10-25 | 1999-11-15 | Valmet Corp | Menetelmä ja laite paperikoneella tai vastaavalla tai sen jälkikäsittelylaitteella pölyn poistamiseksi |
AT408462B (de) * | 1999-11-18 | 2001-12-27 | Andritz Ag Maschf | Verfahren und vorrichtung zur staubabtrennung von einer laufenden papierbahn |
US6490746B1 (en) * | 2000-07-24 | 2002-12-10 | Eastman Kodak Company | Apparatus and method for cleaning objects having generally irregular, undulating surface features |
US6543078B1 (en) * | 2000-07-24 | 2003-04-08 | Eastman Kodak Company | Apparatus and method for cleaning object having generally irregular surface features |
WO2002053300A1 (en) * | 2001-01-04 | 2002-07-11 | Applied Materials, Inc. | Method and apparatus for critical flow particle removal |
JP2002287017A (ja) | 2001-03-28 | 2002-10-03 | Fuji Photo Optical Co Ltd | 撮影レンズのピント状態検出装置 |
JP2002296492A (ja) | 2001-03-30 | 2002-10-09 | Fuji Photo Optical Co Ltd | 撮影レンズのピント状態検出用アダプタ |
JP2002372661A (ja) | 2001-06-15 | 2002-12-26 | Fuji Photo Optical Co Ltd | 撮影レンズ |
US6868785B2 (en) * | 2002-03-13 | 2005-03-22 | Goss International Corporation | De-Duster for a moving printing material web and cutting device, folder and printing press having the de-duster |
DE10211309A1 (de) * | 2002-03-13 | 2003-09-25 | Heidelberger Druckmasch Ag | Schneidvorrichtung mit Entstaubungsvorrichtung im Falzapparat einer bahnverarbeitenden Druckmaschine |
JP4045483B2 (ja) | 2002-03-13 | 2008-02-13 | フジノン株式会社 | ピント状態検出装置 |
JP2005034782A (ja) * | 2003-07-17 | 2005-02-10 | Sony Corp | 洗浄装置及び洗浄方法 |
US20050126605A1 (en) * | 2003-12-15 | 2005-06-16 | Coreflow Scientific Solutions Ltd. | Apparatus and method for cleaning surfaces |
US7111797B2 (en) * | 2004-03-22 | 2006-09-26 | International Business Machines Corporation | Non-contact fluid particle cleaner and method |
PL1778393T3 (pl) | 2004-08-13 | 2020-11-16 | Sanovo Biosecurity A/S | Sposób ulepszenia procesu obejmującego ciało stałe i gaz |
US8118942B2 (en) * | 2004-09-17 | 2012-02-21 | David Featherson | Dust removal apparatus and method |
CN100372620C (zh) * | 2004-10-12 | 2008-03-05 | 友达光电股份有限公司 | 除尘装置、蒸镀机台及以其进行清洁遮罩的方法 |
GB2419276B (en) * | 2004-10-22 | 2007-08-15 | Polar Light Ltd | Cleaning head for a surface cleaning apparatus |
JP4710368B2 (ja) * | 2005-03-18 | 2011-06-29 | 富士フイルム株式会社 | 塗膜硬化方法及び装置 |
IES20050297A2 (en) * | 2005-05-10 | 2006-10-04 | Lifestyle Foods Ltd | Material recovery system |
ES2273587B1 (es) * | 2005-07-29 | 2008-04-16 | Forgestal, S.L. | Dispositivo para la limpieza bajo bloques de sobresolera para vagonetas de hornos tunel. |
KR200437869Y1 (ko) * | 2006-12-04 | 2008-01-04 | 씨티에스(주) | 제진노즐 내의 공기토출구 구조 |
DK2153704T3 (en) | 2007-05-11 | 2018-04-23 | Force Tech | AMPLIFICATION OF PLASMA SURFACE MODIFICATION BY USING HIGH-INTENSITY AND HIGH-EFFECT ULTRA WAVES |
AU2008275133A1 (en) * | 2007-07-09 | 2009-01-15 | S.C. Johnson & Son, Inc. | Handheld portable devices for touchless particulate matter removal |
JP5268097B2 (ja) * | 2008-09-04 | 2013-08-21 | ヒューグルエレクトロニクス株式会社 | 除塵装置 |
KR101341013B1 (ko) * | 2008-09-04 | 2013-12-13 | 엘지디스플레이 주식회사 | 세정 장치 |
MX2011005951A (es) | 2008-12-03 | 2011-08-17 | Johnson & Son Inc S C | Aparatos portatiles para la remocion de materia particulada sin hacer contacto. |
EP2311580B1 (en) | 2009-10-16 | 2012-08-08 | Shinko Co., Ltd. | Dust-removing apparatus |
CN102039613B (zh) * | 2009-10-22 | 2014-04-30 | 株式会社伸兴 | 除尘装置 |
US8695156B2 (en) * | 2010-02-10 | 2014-04-15 | Jeffrey S. Marshall | Aeroacoustic duster |
JP5162612B2 (ja) * | 2010-03-26 | 2013-03-13 | 三星ダイヤモンド工業株式会社 | エア集塵装置 |
TW201250014A (en) * | 2011-06-15 | 2012-12-16 | Hon Hai Prec Ind Co Ltd | Coating umbrella stand |
KR101341452B1 (ko) * | 2011-12-27 | 2013-12-13 | 씨티에스(주) | 플라즈마 애싱 건식 초음파세정기 및 그 플라즈마 헤드 |
CN102886370A (zh) * | 2012-03-09 | 2013-01-23 | 李小川 | 一种粉尘捕收方法与装置 |
US20140007372A1 (en) * | 2012-07-09 | 2014-01-09 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Cleaning device |
CN202725553U (zh) * | 2012-07-09 | 2013-02-13 | 深圳市华星光电技术有限公司 | 清洁装置 |
KR20140049735A (ko) * | 2012-10-18 | 2014-04-28 | 삼성전기주식회사 | 기판의 이물 제거장치 및 기판의 이물 제거방법 |
CN103341405B (zh) * | 2013-07-24 | 2015-09-09 | 深圳市华星光电技术有限公司 | 玻璃基板的清洗方法及实现该方法的装置 |
US10112223B2 (en) * | 2013-07-26 | 2018-10-30 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Method for cleansing glass substrate and device for performing the method |
JP6781944B2 (ja) * | 2016-03-15 | 2020-11-11 | 大日本印刷株式会社 | 異物除去装置 |
JP6700150B2 (ja) * | 2016-10-03 | 2020-05-27 | 東京エレクトロン株式会社 | パーティクル捕集装置、パーティクル捕集方法、およびパーティクル捕集システム |
EP3418450B1 (de) * | 2017-06-21 | 2020-05-06 | Brügger HTB GmbH | Tunnelreinigungsvorrichtung |
KR101875715B1 (ko) * | 2017-06-27 | 2018-07-06 | 윤중식 | 필름 이물질 건식 제거 장치 |
KR102109357B1 (ko) * | 2017-11-29 | 2020-05-12 | 동우 화인켐 주식회사 | 필름 클리닝 장치 |
CN111299245A (zh) * | 2018-12-11 | 2020-06-19 | 韶阳科技股份有限公司 | 气体循环装置 |
US11541434B2 (en) * | 2019-01-09 | 2023-01-03 | Raytheon Technologies Corporation | Vortex assisted powder removal end effector |
TWI711495B (zh) * | 2019-08-27 | 2020-12-01 | 勵威電子股份有限公司 | 一種乾式超聲波清洗頭及清洗機 |
IT202000012211A1 (it) * | 2020-05-25 | 2021-11-25 | F M Srl | Sistema di captazione e processo di produzione di tale sistema di captazione |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3420710A (en) * | 1964-09-03 | 1969-01-07 | Du Pont | Process and apparatus for cleaning webs utilizing a sonic air blast |
US3678534A (en) * | 1970-07-06 | 1972-07-25 | Rohr Corp | Vacuum cleaner head with supersonic gas jets |
US3915739A (en) * | 1974-07-12 | 1975-10-28 | Montreal | Method of cleaning foreign matter from a cavity in a semiconductor |
DE2938863A1 (de) * | 1979-09-26 | 1981-04-09 | Agfa-Gevaert Ag, 5090 Leverkusen | Einrichtung zum kontaktlosen entfernen von staub |
SE8107374L (sv) * | 1981-12-09 | 1983-06-10 | Kelva Ab | Banrenare |
EP0127618A1 (en) * | 1982-11-29 | 1984-12-12 | HOWARD, Paul Clifford | Paperboard edge buffer and cleaner |
US4677704A (en) * | 1986-04-22 | 1987-07-07 | Huggins Richard A | Cleaning system for static charged semiconductor wafer surface |
DE3711777A1 (de) * | 1987-04-08 | 1988-10-27 | Claus G Dipl Ing Wandres | Verfahren und vorrichtung zum entstauben von folien o. dgl. |
DE4120973A1 (de) * | 1991-06-25 | 1993-01-07 | Eltex Elektrostatik Gmbh | Vorrichtung zum abfuehren von staub |
JP2567191Y2 (ja) * | 1992-04-13 | 1998-03-30 | 株式会社伸興 | パネル体の除塵装置 |
-
1993
- 1993-08-31 JP JP5240672A patent/JP2820599B2/ja not_active Expired - Fee Related
- 1993-11-02 TW TW082109119A patent/TW231974B/zh not_active IP Right Cessation
- 1993-12-20 US US08/169,206 patent/US5457847A/en not_active Expired - Lifetime
- 1993-12-29 KR KR1019930030761A patent/KR970009001B1/ko not_active IP Right Cessation
-
1994
- 1994-01-14 DE DE69409314T patent/DE69409314T2/de not_active Expired - Lifetime
- 1994-01-14 EP EP94100511A patent/EP0640411B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR970009001B1 (ko) | 1997-06-03 |
EP0640411B1 (en) | 1998-04-01 |
DE69409314T2 (de) | 1998-09-03 |
JPH0760211A (ja) | 1995-03-07 |
DE69409314D1 (de) | 1998-05-07 |
JP2820599B2 (ja) | 1998-11-05 |
US5457847A (en) | 1995-10-17 |
TW231974B (en) | 1994-10-11 |
EP0640411A1 (en) | 1995-03-01 |
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