KR20130035884A - 연마 장치 및 연마 방법 - Google Patents

연마 장치 및 연마 방법 Download PDF

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Publication number
KR20130035884A
KR20130035884A KR1020120103833A KR20120103833A KR20130035884A KR 20130035884 A KR20130035884 A KR 20130035884A KR 1020120103833 A KR1020120103833 A KR 1020120103833A KR 20120103833 A KR20120103833 A KR 20120103833A KR 20130035884 A KR20130035884 A KR 20130035884A
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KR
South Korea
Prior art keywords
support hole
polishing
polished
planetary carrier
rotating
Prior art date
Application number
KR1020120103833A
Other languages
English (en)
Korean (ko)
Inventor
토모히데 조자키
?스케 마츠이
Original Assignee
소니 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니 주식회사 filed Critical 소니 주식회사
Publication of KR20130035884A publication Critical patent/KR20130035884A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
KR1020120103833A 2011-09-30 2012-09-19 연마 장치 및 연마 방법 KR20130035884A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-218469 2011-09-30
JP2011218469A JP2013078808A (ja) 2011-09-30 2011-09-30 研磨装置及び研磨方法

Publications (1)

Publication Number Publication Date
KR20130035884A true KR20130035884A (ko) 2013-04-09

Family

ID=47993006

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120103833A KR20130035884A (ko) 2011-09-30 2012-09-19 연마 장치 및 연마 방법

Country Status (4)

Country Link
US (1) US20130084783A1 (ja)
JP (1) JP2013078808A (ja)
KR (1) KR20130035884A (ja)
CN (1) CN103029033A (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103447906A (zh) * 2013-09-04 2013-12-18 南昌欧菲光学技术有限公司 玻璃弯曲校正装置及其使用方法
CN104551961A (zh) * 2013-10-23 2015-04-29 有研新材料股份有限公司 一种12英寸硅片的双面抛光方法
CN104097139B (zh) * 2014-07-15 2016-06-15 浙江固特气动科技股份有限公司 密封副偏心研磨机及其方法
CN204366726U (zh) * 2015-01-04 2015-06-03 京东方光科技有限公司 抛光夹具
CN106363485B (zh) * 2016-09-30 2018-08-10 浙江星星科技股份有限公司 一种用于ag圆片玻璃的扫光机中的扫光装置
CN106392877B (zh) * 2016-09-30 2018-08-10 浙江星星科技股份有限公司 一种用于ag圆片玻璃的扫光机
JP6431560B2 (ja) * 2017-03-08 2018-11-28 日清工業株式会社 両頭平面研削盤および研削方法
JP6923374B2 (ja) * 2017-06-29 2021-08-18 京セラ株式会社 板状キャリア、研磨装置および研磨体の製造方法
JP2019136837A (ja) * 2018-02-14 2019-08-22 信越半導体株式会社 両面研磨方法
CN111251078B (zh) * 2019-04-23 2021-09-14 新昌浙江工业大学科学技术研究院 GCr15轴承钢圆柱滚子圆柱面超精密抛光用半固着磨粒抛光盘
CN110936286A (zh) * 2019-12-03 2020-03-31 江西合力泰科技有限公司 一种返修治具、返修机及返修方法
CN111300237B (zh) * 2020-04-14 2024-05-24 山东交通学院 高精度内孔密封球面研磨装置
CN113183028B (zh) * 2021-04-08 2022-11-29 江西钨业控股集团有限公司 利用行星盘夹具加工菱形刀片的工艺及菱形刀片
CN113442065A (zh) * 2021-07-12 2021-09-28 浙江开利电子有限公司 一种厚度易调节型游星轮

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3089292A (en) * 1961-04-14 1963-05-14 Norton Co Lapping machine
US3662498A (en) * 1968-08-29 1972-05-16 Peter Wolters Kratzenfabrik Un Redressing of laps in lapping or honing machines
US3593462A (en) * 1969-03-24 1971-07-20 Western Electric Co Apparatus for abrading articles
US3813828A (en) * 1973-01-05 1974-06-04 Westinghouse Electric Corp Method for controlling finished thickness of planetary-lapped parts
US4132311A (en) * 1977-09-29 1979-01-02 Shorewood Packaging Corp. Tape cartridge/cassette receptacle
DE3624878A1 (de) * 1985-07-31 1987-02-12 Speedfam Corp Flachlaeppmaschine
TW404875B (en) * 1996-07-24 2000-09-11 Komatsu Denshi Kinzoku Kk Method for lapping semiconductor wafers

Also Published As

Publication number Publication date
CN103029033A (zh) 2013-04-10
JP2013078808A (ja) 2013-05-02
US20130084783A1 (en) 2013-04-04

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