CN103029033A - 研磨装置和研磨方法 - Google Patents

研磨装置和研磨方法 Download PDF

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Publication number
CN103029033A
CN103029033A CN2012103570012A CN201210357001A CN103029033A CN 103029033 A CN103029033 A CN 103029033A CN 2012103570012 A CN2012103570012 A CN 2012103570012A CN 201210357001 A CN201210357001 A CN 201210357001A CN 103029033 A CN103029033 A CN 103029033A
Authority
CN
China
Prior art keywords
workpiece
pinion frame
following table
retaining hole
table face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012103570012A
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English (en)
Chinese (zh)
Inventor
城崎友秀
松井俊辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of CN103029033A publication Critical patent/CN103029033A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
CN2012103570012A 2011-09-30 2012-09-21 研磨装置和研磨方法 Pending CN103029033A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-218469 2011-09-30
JP2011218469A JP2013078808A (ja) 2011-09-30 2011-09-30 研磨装置及び研磨方法

Publications (1)

Publication Number Publication Date
CN103029033A true CN103029033A (zh) 2013-04-10

Family

ID=47993006

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012103570012A Pending CN103029033A (zh) 2011-09-30 2012-09-21 研磨装置和研磨方法

Country Status (4)

Country Link
US (1) US20130084783A1 (ja)
JP (1) JP2013078808A (ja)
KR (1) KR20130035884A (ja)
CN (1) CN103029033A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103447906A (zh) * 2013-09-04 2013-12-18 南昌欧菲光学技术有限公司 玻璃弯曲校正装置及其使用方法
CN104097139A (zh) * 2014-07-15 2014-10-15 浙江固特气动机械有限公司 密封副偏心研磨机及其方法
CN104551961A (zh) * 2013-10-23 2015-04-29 有研新材料股份有限公司 一种12英寸硅片的双面抛光方法
CN110936286A (zh) * 2019-12-03 2020-03-31 江西合力泰科技有限公司 一种返修治具、返修机及返修方法
CN111300237A (zh) * 2020-04-14 2020-06-19 山东交通学院 高精度内孔密封球面研磨装置
CN113183028A (zh) * 2021-04-08 2021-07-30 江西钨业控股集团有限公司 行星盘夹具、利用其加工菱形刀片的工艺及菱形刀片
CN113442065A (zh) * 2021-07-12 2021-09-28 浙江开利电子有限公司 一种厚度易调节型游星轮
TWI817982B (zh) * 2018-02-14 2023-10-11 日商信越半導體股份有限公司 雙面研磨方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204366726U (zh) * 2015-01-04 2015-06-03 京东方光科技有限公司 抛光夹具
CN106363485B (zh) * 2016-09-30 2018-08-10 浙江星星科技股份有限公司 一种用于ag圆片玻璃的扫光机中的扫光装置
CN106392877B (zh) * 2016-09-30 2018-08-10 浙江星星科技股份有限公司 一种用于ag圆片玻璃的扫光机
JP6431560B2 (ja) * 2017-03-08 2018-11-28 日清工業株式会社 両頭平面研削盤および研削方法
JP6923374B2 (ja) * 2017-06-29 2021-08-18 京セラ株式会社 板状キャリア、研磨装置および研磨体の製造方法
CN111251078B (zh) * 2019-04-23 2021-09-14 新昌浙江工业大学科学技术研究院 GCr15轴承钢圆柱滚子圆柱面超精密抛光用半固着磨粒抛光盘

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3089292A (en) * 1961-04-14 1963-05-14 Norton Co Lapping machine
US3662498A (en) * 1968-08-29 1972-05-16 Peter Wolters Kratzenfabrik Un Redressing of laps in lapping or honing machines
US3593462A (en) * 1969-03-24 1971-07-20 Western Electric Co Apparatus for abrading articles
US3813828A (en) * 1973-01-05 1974-06-04 Westinghouse Electric Corp Method for controlling finished thickness of planetary-lapped parts
US4132311A (en) * 1977-09-29 1979-01-02 Shorewood Packaging Corp. Tape cartridge/cassette receptacle
DE3624878A1 (de) * 1985-07-31 1987-02-12 Speedfam Corp Flachlaeppmaschine
TW404875B (en) * 1996-07-24 2000-09-11 Komatsu Denshi Kinzoku Kk Method for lapping semiconductor wafers

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103447906A (zh) * 2013-09-04 2013-12-18 南昌欧菲光学技术有限公司 玻璃弯曲校正装置及其使用方法
CN104551961A (zh) * 2013-10-23 2015-04-29 有研新材料股份有限公司 一种12英寸硅片的双面抛光方法
CN104097139A (zh) * 2014-07-15 2014-10-15 浙江固特气动机械有限公司 密封副偏心研磨机及其方法
TWI817982B (zh) * 2018-02-14 2023-10-11 日商信越半導體股份有限公司 雙面研磨方法
CN110936286A (zh) * 2019-12-03 2020-03-31 江西合力泰科技有限公司 一种返修治具、返修机及返修方法
CN111300237A (zh) * 2020-04-14 2020-06-19 山东交通学院 高精度内孔密封球面研磨装置
CN111300237B (zh) * 2020-04-14 2024-05-24 山东交通学院 高精度内孔密封球面研磨装置
CN113183028A (zh) * 2021-04-08 2021-07-30 江西钨业控股集团有限公司 行星盘夹具、利用其加工菱形刀片的工艺及菱形刀片
CN113442065A (zh) * 2021-07-12 2021-09-28 浙江开利电子有限公司 一种厚度易调节型游星轮

Also Published As

Publication number Publication date
JP2013078808A (ja) 2013-05-02
KR20130035884A (ko) 2013-04-09
US20130084783A1 (en) 2013-04-04

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Application publication date: 20130410