KR101365049B1 - 취성 재료 기판의 롤링 브레이크 장치 - Google Patents
취성 재료 기판의 롤링 브레이크 장치 Download PDFInfo
- Publication number
- KR101365049B1 KR101365049B1 KR1020120084653A KR20120084653A KR101365049B1 KR 101365049 B1 KR101365049 B1 KR 101365049B1 KR 1020120084653 A KR1020120084653 A KR 1020120084653A KR 20120084653 A KR20120084653 A KR 20120084653A KR 101365049 B1 KR101365049 B1 KR 101365049B1
- Authority
- KR
- South Korea
- Prior art keywords
- brittle material
- material substrate
- rolling
- seating pad
- flexible seating
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Dicing (AREA)
- Footwear And Its Accessory, Manufacturing Method And Apparatuses (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120084653A KR101365049B1 (ko) | 2012-08-02 | 2012-08-02 | 취성 재료 기판의 롤링 브레이크 장치 |
TW102114560A TWI591031B (zh) | 2012-08-02 | 2013-04-24 | Rolling device for brittle material substrates |
JP2013127088A JP6274756B2 (ja) | 2012-08-02 | 2013-06-18 | 脆性材料基板のローリングブレーク装置 |
CN201310280463.3A CN103568138B (zh) | 2012-08-02 | 2013-07-02 | 脆性材料基板的滚动裂断装置 |
JP2017228984A JP6528829B2 (ja) | 2012-08-02 | 2017-11-29 | 脆性材料基板のローリングブレーク装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120084653A KR101365049B1 (ko) | 2012-08-02 | 2012-08-02 | 취성 재료 기판의 롤링 브레이크 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20140018504A KR20140018504A (ko) | 2014-02-13 |
KR101365049B1 true KR101365049B1 (ko) | 2014-02-20 |
Family
ID=50041268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020120084653A KR101365049B1 (ko) | 2012-08-02 | 2012-08-02 | 취성 재료 기판의 롤링 브레이크 장치 |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP6274756B2 (ja) |
KR (1) | KR101365049B1 (ja) |
CN (1) | CN103568138B (ja) |
TW (1) | TWI591031B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6387679B2 (ja) * | 2014-05-22 | 2018-09-12 | 三星ダイヤモンド工業株式会社 | ブレイク方法 |
CN105565254B (zh) * | 2014-10-17 | 2017-11-14 | 中芯国际集成电路制造(上海)有限公司 | 一种mems器件及其制备方法、电子装置 |
EP3222593B1 (en) * | 2014-11-19 | 2022-06-29 | Bando Kiko Co., Ltd | Method for splitting glass plate |
JP2016104683A (ja) | 2014-11-19 | 2016-06-09 | 坂東機工株式会社 | ガラス板の折割方法及びその折割装置 |
CN104843488B (zh) * | 2015-04-10 | 2017-12-29 | 京东方科技集团股份有限公司 | 一种输出装置和切割裂片*** |
JP6547556B2 (ja) * | 2015-09-29 | 2019-07-24 | 三星ダイヤモンド工業株式会社 | 脆性基板の分断方法 |
JP6149960B2 (ja) * | 2016-02-17 | 2017-06-21 | 坂東機工株式会社 | ガラス板の折割方法 |
JP6477946B2 (ja) * | 2018-03-02 | 2019-03-06 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
TWI664134B (zh) * | 2018-08-07 | 2019-07-01 | 住華科技股份有限公司 | 輸送設備及使用其之輸送方式 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5165585A (en) | 1990-05-15 | 1992-11-24 | Peter Lisec | Method and apparatus for breaking glass sheets |
JP2003127096A (ja) | 2001-10-24 | 2003-05-08 | Matsushita Electric Ind Co Ltd | 基板分割装置および基板分割方法 |
JP2010089361A (ja) | 2008-10-07 | 2010-04-22 | Mitsuboshi Diamond Industrial Co Ltd | 脆性材料プライヤ |
KR20110109784A (ko) * | 2010-03-29 | 2011-10-06 | 다이니폰 스크린 세이조우 가부시키가이샤 | 기판 처리 장치 및 이재 방법 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4989475A (ja) * | 1972-12-27 | 1974-08-27 | ||
JPS59120452A (ja) * | 1982-12-28 | 1984-07-12 | 昭和電工株式会社 | タ−ポリン |
JPS63172612U (ja) * | 1987-04-28 | 1988-11-09 | ||
JPS6457015U (ja) * | 1987-10-07 | 1989-04-10 | ||
JP2002050589A (ja) * | 2000-08-03 | 2002-02-15 | Sony Corp | 半導体ウェーハの延伸分離方法及び装置 |
JP2002184723A (ja) * | 2000-12-13 | 2002-06-28 | Sony Corp | 半導体製造方法および半導体製造装置 |
JP4647830B2 (ja) * | 2001-05-10 | 2011-03-09 | 株式会社ディスコ | 被加工物の分割処理方法および分割処理方法に用いるチップ間隔拡張装置 |
JP4256214B2 (ja) * | 2003-06-27 | 2009-04-22 | 株式会社ディスコ | 板状物の分割装置 |
CN100428418C (zh) * | 2004-02-09 | 2008-10-22 | 株式会社迪斯科 | 晶片的分割方法 |
JP4584607B2 (ja) * | 2004-03-16 | 2010-11-24 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
JP4514490B2 (ja) * | 2004-03-29 | 2010-07-28 | 日東電工株式会社 | 半導体ウエハの小片化方法 |
KR101170587B1 (ko) * | 2005-01-05 | 2012-08-01 | 티에이치케이 인텍스 가부시키가이샤 | 워크의 브레이크 방법 및 장치, 스크라이브 및 브레이크방법, 및 브레이크 기능을 갖는 스크라이브 장치 |
JP2006202933A (ja) * | 2005-01-20 | 2006-08-03 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
CN1994713B (zh) * | 2006-01-06 | 2010-05-12 | 日月光半导体制造股份有限公司 | 晶粒分离装置及其分离晶粒的方法 |
JP5546873B2 (ja) * | 2010-01-12 | 2014-07-09 | キヤノンマシナリー株式会社 | 半導体ウェハの分割方法及び装置 |
-
2012
- 2012-08-02 KR KR1020120084653A patent/KR101365049B1/ko active IP Right Grant
-
2013
- 2013-04-24 TW TW102114560A patent/TWI591031B/zh not_active IP Right Cessation
- 2013-06-18 JP JP2013127088A patent/JP6274756B2/ja not_active Expired - Fee Related
- 2013-07-02 CN CN201310280463.3A patent/CN103568138B/zh not_active Expired - Fee Related
-
2017
- 2017-11-29 JP JP2017228984A patent/JP6528829B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5165585A (en) | 1990-05-15 | 1992-11-24 | Peter Lisec | Method and apparatus for breaking glass sheets |
JP2003127096A (ja) | 2001-10-24 | 2003-05-08 | Matsushita Electric Ind Co Ltd | 基板分割装置および基板分割方法 |
JP2010089361A (ja) | 2008-10-07 | 2010-04-22 | Mitsuboshi Diamond Industrial Co Ltd | 脆性材料プライヤ |
KR20110109784A (ko) * | 2010-03-29 | 2011-10-06 | 다이니폰 스크린 세이조우 가부시키가이샤 | 기판 처리 장치 및 이재 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP6274756B2 (ja) | 2018-02-07 |
KR20140018504A (ko) | 2014-02-13 |
TWI591031B (zh) | 2017-07-11 |
JP2014031002A (ja) | 2014-02-20 |
CN103568138A (zh) | 2014-02-12 |
TW201406683A (zh) | 2014-02-16 |
JP6528829B2 (ja) | 2019-06-12 |
JP2018030376A (ja) | 2018-03-01 |
CN103568138B (zh) | 2016-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101365049B1 (ko) | 취성 재료 기판의 롤링 브레이크 장치 | |
WO2013100203A3 (en) | Apparatus for loading a flexible substrate and a lithography apparatus | |
JP5311527B1 (ja) | 貼付装置 | |
KR101010310B1 (ko) | 스크라이빙 장치, 그리고 이를 이용한 기판 절단 장치 및방법 | |
KR101788645B1 (ko) | 취성 재료 기판의 브레이크 장치 | |
KR102422164B1 (ko) | 반송체, 반송 장치 및 스크라이브 시스템 | |
JP2006117518A5 (ja) | ||
JP6792824B2 (ja) | 板ガラスの製造方法及び板ガラスの折割装置 | |
JP2015188968A (ja) | 樹脂シートの分断方法及び分断装置 | |
KR101991267B1 (ko) | 기판 절단 장치 | |
JP2015088606A (ja) | 保護テープ剥離方法および保護テープ剥離装置 | |
JP2014144509A (ja) | 保護フィルム裁断装置 | |
JP6032428B2 (ja) | ガラスフィルム切断装置及びガラスフィルム切断方法 | |
CN104803592B (zh) | 脆性材料基板的刻划装置 | |
TWM449806U (zh) | 玻璃切割機之移載機構 | |
TW201947644A (zh) | 基板分斷裝置 | |
JP2006128211A5 (ja) | ||
CN100529873C (zh) | 用于除去面板边缘的空白玻璃的装置及其方法 | |
KR20170104033A (ko) | 스크라이빙 장치 | |
CN107108323B (zh) | 使用研磨表面在薄玻璃基材中机械形成裂纹引发缺陷 | |
KR20190059577A (ko) | 기판 절단 장치 | |
JP2008094632A (ja) | パネル分断方法およびその装置 | |
KR102114025B1 (ko) | 기판 절단 장치 | |
KR20140125478A (ko) | 유리절단장치 및 유리절단방법 | |
KR20190059576A (ko) | 기판 절단 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20161115 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20171109 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20181107 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20200114 Year of fee payment: 7 |