KR101209299B1 - 산업용 로봇 - Google Patents

산업용 로봇 Download PDF

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Publication number
KR101209299B1
KR101209299B1 KR1020060006454A KR20060006454A KR101209299B1 KR 101209299 B1 KR101209299 B1 KR 101209299B1 KR 1020060006454 A KR1020060006454 A KR 1020060006454A KR 20060006454 A KR20060006454 A KR 20060006454A KR 101209299 B1 KR101209299 B1 KR 101209299B1
Authority
KR
South Korea
Prior art keywords
arm
support base
robot
parallel link
link mechanism
Prior art date
Application number
KR1020060006454A
Other languages
English (en)
Korean (ko)
Other versions
KR20060085211A (ko
Inventor
야스노리 타케우치
타카유키 야자와
히로토 나카지마
Original Assignee
니혼 덴산 산쿄 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼 덴산 산쿄 가부시키가이샤 filed Critical 니혼 덴산 산쿄 가부시키가이샤
Publication of KR20060085211A publication Critical patent/KR20060085211A/ko
Application granted granted Critical
Publication of KR101209299B1 publication Critical patent/KR101209299B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020060006454A 2005-01-21 2006-01-20 산업용 로봇 KR101209299B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005014331 2005-01-21
JPJP-P-2005-00014331 2005-01-21
JP2006010451A JP4719010B2 (ja) 2005-01-21 2006-01-18 産業用ロボット
JPJP-P-2006-00010451 2006-01-18

Publications (2)

Publication Number Publication Date
KR20060085211A KR20060085211A (ko) 2006-07-26
KR101209299B1 true KR101209299B1 (ko) 2012-12-06

Family

ID=36986089

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060006454A KR101209299B1 (ko) 2005-01-21 2006-01-20 산업용 로봇

Country Status (3)

Country Link
JP (1) JP4719010B2 (ja)
KR (1) KR101209299B1 (ja)
TW (1) TWI398334B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254138A (ja) * 2007-04-06 2008-10-23 Yaskawa Electric Corp 多関節ロボット
JP4970128B2 (ja) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
WO2009034854A1 (ja) * 2007-09-13 2009-03-19 Kabushiki Kaisha Yaskawa Denki 移送ロボットおよび移送方法および制御方法
US8272830B2 (en) 2008-10-07 2012-09-25 Applied Materials, Inc. Scissor lift transfer robot
US9691650B2 (en) 2009-09-29 2017-06-27 Applied Materials, Inc. Substrate transfer robot with chamber and substrate monitoring capability
JP5563271B2 (ja) * 2009-10-19 2014-07-30 川崎重工業株式会社 基板搬送ロボット
JP5471399B2 (ja) * 2009-12-17 2014-04-16 株式会社安川電機 移送ロボット
TWI480142B (zh) * 2010-08-12 2015-04-11 Hon Hai Prec Ind Co Ltd 機器人臂部件
KR102392186B1 (ko) 2011-03-11 2022-04-28 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
CN103029125B (zh) 2011-09-30 2015-05-20 鸿富锦精密工业（深圳）有限公司 机器人
JP5893072B2 (ja) * 2014-04-16 2016-03-23 川崎重工業株式会社 基板搬送ロボット
JP6518037B2 (ja) * 2014-04-28 2019-05-22 川崎重工業株式会社 産業用ロボット
CN105480714A (zh) * 2015-12-29 2016-04-13 天津大学 一种大型lcd玻璃基板搬运机器人

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11267988A (ja) * 1998-03-20 1999-10-05 Kawasaki Heavy Ind Ltd パラレルリンクロボット
JP2001157974A (ja) * 1999-11-30 2001-06-12 Assist Japan Kk ダブルアーム型基板搬送ロボット
JP2001293676A (ja) * 2000-04-14 2001-10-23 Yaskawa Electric Corp パラレルリンクロボット
JP2002210684A (ja) * 2000-11-14 2002-07-30 Daihen Corp トランスファロボット

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446781A (ja) * 1990-06-11 1992-02-17 Seiko Instr Inc 真空内磁気浮上搬送ロボット
JP3781071B2 (ja) * 1997-05-21 2006-05-31 株式会社安川電機 真空ロボット
JPH11188669A (ja) * 1997-12-25 1999-07-13 Mitsubishi Electric Corp 搬送装置
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JP3806273B2 (ja) * 1999-09-17 2006-08-09 株式会社ジェイテクト 四自由度パラレルロボット
US6395648B1 (en) * 2000-02-25 2002-05-28 Wafermasters, Inc. Wafer processing system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11267988A (ja) * 1998-03-20 1999-10-05 Kawasaki Heavy Ind Ltd パラレルリンクロボット
JP2001157974A (ja) * 1999-11-30 2001-06-12 Assist Japan Kk ダブルアーム型基板搬送ロボット
JP2001293676A (ja) * 2000-04-14 2001-10-23 Yaskawa Electric Corp パラレルリンクロボット
JP2002210684A (ja) * 2000-11-14 2002-07-30 Daihen Corp トランスファロボット

Also Published As

Publication number Publication date
TW200631743A (en) 2006-09-16
KR20060085211A (ko) 2006-07-26
JP4719010B2 (ja) 2011-07-06
JP2006224297A (ja) 2006-08-31
TWI398334B (zh) 2013-06-11

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