KR100796841B1 - 높은 유속으로 기체를 수송하는 방법 - Google Patents
높은 유속으로 기체를 수송하는 방법 Download PDFInfo
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- KR100796841B1 KR100796841B1 KR1020037009036A KR20037009036A KR100796841B1 KR 100796841 B1 KR100796841 B1 KR 100796841B1 KR 1020037009036 A KR1020037009036 A KR 1020037009036A KR 20037009036 A KR20037009036 A KR 20037009036A KR 100796841 B1 KR100796841 B1 KR 100796841B1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
- F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
- F17C2223/033—Small pressure, e.g. for liquefied gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
- F17C2223/042—Localisation of the removal point
- F17C2223/043—Localisation of the removal point in the gas
- F17C2223/045—Localisation of the removal point in the gas with a dip tube
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
- F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
- F17C2225/0107—Single phase
- F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
- F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
- F17C2225/033—Small pressure, e.g. for liquefied gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0367—Localisation of heat exchange
- F17C2227/0369—Localisation of heat exchange in or on a vessel
- F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0367—Localisation of heat exchange
- F17C2227/0369—Localisation of heat exchange in or on a vessel
- F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
- F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0367—Localisation of heat exchange
- F17C2227/0369—Localisation of heat exchange in or on a vessel
- F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
- F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
- F17C2227/0386—Localisation of heat exchange in or on a vessel in wall contact outside the vessel with a jacket
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/03—Control means
- F17C2250/032—Control means using computers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/04—Indicating or measuring of parameters as input values
- F17C2250/0404—Parameters indicated or measured
- F17C2250/043—Pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/04—Indicating or measuring of parameters as input values
- F17C2250/0404—Parameters indicated or measured
- F17C2250/0439—Temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0626—Pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0631—Temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/02—Improving properties related to fluid or fluid transfer
- F17C2260/025—Reducing transfer time
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
온도차 (Twout-TL)(℃) | 평균 암모니아 유속(F) (slpm) | 평균 열 플럭스 (Q/A) (kW/m-2) |
2.78 | 150 | 28.61 |
3.33 | 327 | 62.25 |
4.22 | 363 | 70.60 |
5.56 | 492 | 93.51 |
Claims (10)
- a. 액화된 압축 기체를 저장 용기에 전달하고;b. 온도 측정 수단을 압축된 기체 저장 용기의 벽상에 장착하고;c. 하나 이상의 가열 수단을 저장 용기에 인접하게 장착하고;d. 저장 용기내의 압축된 기체의 온도를 온도 측정 수단으로 모니터링하고;e. 가열 수단의 출력을 조절하여 저장 용기내의 액화된 압축 기체를 가열시키는 것을 포함하여, 저장 용기내의 액화된 압축 기체의 온도를 조절하는 방법 .
- 제 1 항에 있어서, 액화된 압축 기체가 암모니아, 염화수소, 브롬화수소, 염소 및 퍼플루오로프로판으로 구성된 군으로부터 선택된 반도체 공정용 기체임을 특징으로 하는 방법.
- 제 1 항에 있어서, 온도 측정 수단이 열전쌍임을 특징으로 하는 방법.
- 제 1 항에 있어서, 가열 수단이 세라믹 가열기임을 특징으로 하는 방법.
- 제 1 항에 있어서, 가열 수단이 가열 자켓임을 특징으로 하는 방법.
- 제 1 항에 있어서, 가열 수단이 고온 유체 열전달 장치임을 특징으로 하는 방법.
- a. 액화된 고순도의 반도체용 압축 기체를 저장 용기로 전달하고;b. 온도 측정 수단을 저장 용기의 벽상에 장착하고;c. 하나 이상의 가열 수단을 저장 용기에 인접하게 장착하고;d. 저장 용기내의 압축 기체의 온도를 온도 측정 수단으로 모니터링하고;e. 압력 측정 수단을 저장 용기의 배출구에 장착하고;f. 저장 용기내의 압축 기체의 압력을 압력 측정 수단으로 모니터링하고;g. 기체의 일부를 저장 용기로부터 배출시키고;h. 가열 수단의 열 배출량을 조절하여 원하는 압력을 유지시키는 것을 포함하여, 증기 수송 동안 저장 용기내의 액화된 압축 기체의 증발을 유지시키는 방법.
- a. 액화된 고순도의 반도체용 압축 기체를 저장 용기에 전달하고;b. 온도 측정 수단을 압축 기체 저장 용기의 벽상에 장착하고;c. 하나 이상의 가열 수단을 저장 용기에 인접하게 장착하고;d. 온도를 온도 측정 수단으로 모니터링하고;e. 압력 측정 수단을 저장 용기의 배출구에 위치시켜 용기 압력을 모니터링하고;f. 저장 용기내의 액화된 압축 기체를 가열하기 위한 가열 수단의 열 배출량을 조절하여 저장 용기내의 액화된 압축 기체의 증발을 조절하고;g. 저장 용기로부터 배출되는 기체의 흐름을 조정하는 것을 포함하여, 높은 유속으로 액화된 압축 기체를 수송하는 방법.
- a. 고순도의 액화된 암모니아 압축 기체를 톤 컨테이너 (ton container)로 전달하고;b. 열전쌍을 톤 컨테이너의 벽상에 장착하고;c. 하나 이상의 가열 수단을 톤 컨테이너에 인접하게 장착하고;d. 열전쌍을 모니터링하고;e. 압력 변환기를 톤 컨테이너의 배출구에 위치시켜 용기 압력을 모니터링하고;f. 톤 컨테이너내의 액화된 압축 암모니아의 평균 손실중량을 모니터링하고;g. 가열 수단의 배출구로부터의 온도를 조절하여 톤 컨테이너내의 액화 암모니아를 가열시키고;h. 대류 및 핵형성체 비등하에 액화된 압축 암모니아를 비등시키고;i. 대류 및 핵형성체 비등하에 톤 컨테이너내의 액화된 압축 암모니아의 증발을 조절하고;j. 톤 컨테이너로부터 배출되는 암모니아의 흐름을 조정하는 것을 포함하여, 높은 유속으로 암모니아를 수송하는 방법.
- a. 액화된 반도체 공정용 압축 기체를 함유하는 저장 용기;b. 저장 용기의 벽에 장착된 온도 측정 수단;c. 저장 용기의 배출구에 장착된 압력 프로브;d. 저장 용기에 인접하여 장착된 가열 수단으로서, 온도 프로브와 압력 프로브로 가열기의 출력을 조절하여, 압축 기체 저장 용기내의 액화된 반도체용 압축 기체를 가열하고, 반도체용 기체가 압축 기체 저장 용기로부터 높은 유속으로 배출될 수 있게 하는 가열 수단; 및e. 저장 용기로부터 배출되는 반도체용 기체의 유속을 조정하는 밸브 수단을 포함하는, 높은 유속으로 반도체 공정용 기체를 전달하는 시스템.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/755,590 | 2001-01-05 | ||
US09/755,590 US20020124575A1 (en) | 2001-01-05 | 2001-01-05 | Gas delivery at high flow rates |
PCT/US2001/051618 WO2002095797A2 (en) | 2001-01-05 | 2001-12-19 | Gas delivery at high flow rates |
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KR20030091956A KR20030091956A (ko) | 2003-12-03 |
KR100796841B1 true KR100796841B1 (ko) | 2008-01-22 |
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KR1020037009036A KR100796841B1 (ko) | 2001-01-05 | 2001-12-19 | 높은 유속으로 기체를 수송하는 방법 |
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US (2) | US20020124575A1 (ko) |
EP (2) | EP2375122A3 (ko) |
JP (1) | JP2004527712A (ko) |
KR (1) | KR100796841B1 (ko) |
CN (1) | CN1330902C (ko) |
AU (1) | AU2001297824A1 (ko) |
CA (1) | CA2433901A1 (ko) |
TW (1) | TW535196B (ko) |
WO (1) | WO2002095797A2 (ko) |
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- 2001-12-19 KR KR1020037009036A patent/KR100796841B1/ko active IP Right Grant
- 2001-12-19 WO PCT/US2001/051618 patent/WO2002095797A2/en active Search and Examination
- 2001-12-19 CN CNB018229700A patent/CN1330902C/zh not_active Expired - Fee Related
- 2001-12-19 EP EP11173062A patent/EP2375122A3/en not_active Withdrawn
- 2001-12-19 AU AU2001297824A patent/AU2001297824A1/en not_active Abandoned
- 2001-12-19 EP EP01273948.8A patent/EP1354165B1/en not_active Expired - Lifetime
- 2001-12-19 JP JP2002592163A patent/JP2004527712A/ja active Pending
- 2001-12-19 CA CA002433901A patent/CA2433901A1/en not_active Abandoned
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2002
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Also Published As
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EP2375122A3 (en) | 2013-02-27 |
AU2001297824A1 (en) | 2002-12-03 |
EP2375122A2 (en) | 2011-10-12 |
EP1354165A4 (en) | 2009-04-22 |
WO2002095797A3 (en) | 2003-08-28 |
TW535196B (en) | 2003-06-01 |
KR20030091956A (ko) | 2003-12-03 |
JP2004527712A (ja) | 2004-09-09 |
WO2002095797A2 (en) | 2002-11-28 |
EP1354165A2 (en) | 2003-10-22 |
CA2433901A1 (en) | 2002-11-28 |
US20030046941A1 (en) | 2003-03-13 |
US6581412B2 (en) | 2003-06-24 |
EP1354165B1 (en) | 2016-09-21 |
US20020124575A1 (en) | 2002-09-12 |
CN1330902C (zh) | 2007-08-08 |
CN1620575A (zh) | 2005-05-25 |
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