JPS649895A - Method for growing iii-v compound semiconductor crystal on si substrate - Google Patents

Method for growing iii-v compound semiconductor crystal on si substrate

Info

Publication number
JPS649895A
JPS649895A JP16569487A JP16569487A JPS649895A JP S649895 A JPS649895 A JP S649895A JP 16569487 A JP16569487 A JP 16569487A JP 16569487 A JP16569487 A JP 16569487A JP S649895 A JPS649895 A JP S649895A
Authority
JP
Japan
Prior art keywords
substrate
compound semiconductor
species containing
semiconductor crystal
gas species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16569487A
Other languages
English (en)
Inventor
Taku Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16569487A priority Critical patent/JPS649895A/ja
Priority to EP88305944A priority patent/EP0297867B1/en
Priority to US07/213,940 priority patent/US4840921A/en
Priority to DE88305944T priority patent/DE3884682T2/de
Publication of JPS649895A publication Critical patent/JPS649895A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16569487A 1987-07-01 1987-07-01 Method for growing iii-v compound semiconductor crystal on si substrate Pending JPS649895A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16569487A JPS649895A (en) 1987-07-01 1987-07-01 Method for growing iii-v compound semiconductor crystal on si substrate
EP88305944A EP0297867B1 (en) 1987-07-01 1988-06-30 A process for the growth of iii-v group compound semiconductor crystal on a si substrate
US07/213,940 US4840921A (en) 1987-07-01 1988-06-30 Process for the growth of III-V group compound semiconductor crystal on a Si substrate
DE88305944T DE3884682T2 (de) 1987-07-01 1988-06-30 Verfahren zur Züchtung eines Halbleiterkristalles aus III-V-Gruppen-Verbindung auf einem Si-Substrat.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16569487A JPS649895A (en) 1987-07-01 1987-07-01 Method for growing iii-v compound semiconductor crystal on si substrate

Publications (1)

Publication Number Publication Date
JPS649895A true JPS649895A (en) 1989-01-13

Family

ID=15817270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16569487A Pending JPS649895A (en) 1987-07-01 1987-07-01 Method for growing iii-v compound semiconductor crystal on si substrate

Country Status (1)

Country Link
JP (1) JPS649895A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5184539A (en) * 1991-12-02 1993-02-09 Meito Corporation Fryer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5184539A (en) * 1991-12-02 1993-02-09 Meito Corporation Fryer

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