JPS64822B2 - - Google Patents

Info

Publication number
JPS64822B2
JPS64822B2 JP58115878A JP11587883A JPS64822B2 JP S64822 B2 JPS64822 B2 JP S64822B2 JP 58115878 A JP58115878 A JP 58115878A JP 11587883 A JP11587883 A JP 11587883A JP S64822 B2 JPS64822 B2 JP S64822B2
Authority
JP
Japan
Prior art keywords
area
peripheral circuit
cell array
pads
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58115878A
Other languages
English (en)
Other versions
JPS609152A (ja
Inventor
Yoshihiro Takemae
Tomio Nakano
Kimiaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58115878A priority Critical patent/JPS609152A/ja
Priority to US06/625,682 priority patent/US4660174A/en
Priority to DE8484304391T priority patent/DE3485625D1/de
Priority to EP84304391A priority patent/EP0130798B1/en
Priority to KR1019840003724A priority patent/KR910005597B1/ko
Publication of JPS609152A publication Critical patent/JPS609152A/ja
Publication of JPS64822B2 publication Critical patent/JPS64822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10807Making laminated safety glass or glazing; Apparatus therefor
    • B32B17/10816Making laminated safety glass or glazing; Apparatus therefor by pressing
    • B32B17/10825Isostatic pressing, i.e. using non rigid pressure-exerting members against rigid parts
    • B32B17/10834Isostatic pressing, i.e. using non rigid pressure-exerting members against rigid parts using a fluid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/14Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/05599Material
    • H01L2224/056Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624Aluminium [Al] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • H01L2224/854Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85417Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/85424Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01039Yttrium [Y]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01057Lanthanum [La]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Dram (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Wire Bonding (AREA)
  • Semiconductor Memories (AREA)

Description

【発明の詳細な説明】 発明の技術分野 本発明は半導体装置、特に、そのレイアウトに
関する。
技術の背景 半導体装置として、たとえばダイナミツク
RAM、スタテイツクRAMのレイアウトとして
は、主に、セルアレイ領域、周辺回路領域、およ
びボンデイングパツド領域に分けられる。この場
合、セルアレイ領域には、ワード線もしくはビツ
ト線毎に規則的な繰返しパターンとして設けられ
た回路たとえばセルアレイ、デコーダ、センスア
ンプ等が配置される。他方、周辺回路領域には、
回路はワード線もしくはビツト線毎に設けられ
ず、言い換えると、不規則的パターンの回路が配
置される。このようなセルアレイ領域、周辺回路
領域、ボンデイングパツド領域等のレイアウトは
半導体装置の大容量化の点で重要なことである。
従来技術と問題点 従来の半導体装置を第1図に示す。第1図には
たとえば16ピンダイナミツクRAMを示してあ
る。第1図において、デコーダ、センスアンプ等
をも含むセルアレイ領域1の両側に周辺回路領域
2−1,2−2を設けてあり、さらにその外側に
ボンデイングパツドP1〜P16が設けられている。
ここで、パツドP16がVSS電源用であり、パツドP8
がVCC電源用である。なお、第1図の装置はDIP
(デユアルインラインパツケージ)に実装する場
合を想定している。
第1図においては、各周辺回路領域2−1,2
−2共もパツドP1〜P16から信号を受けなければ
ならない。従つて、周辺回路領域2−1に対して
は領域X,Yを介してパツドP5〜P12が接続され、
他方、周辺回路領域2−2に対しても領域X,Y
を介してパツドP1〜P4,P13〜P16が接続されるこ
とになる。たとえば、領域X,Yにおける信号線
として、パツドP8およびP16の各電源線幅は、抵
抗を十分低くするために、100μm程度必要とす
る。また、その他の信号線幅も6μm程度必要と
し、その数はこの場合、20〜30である。従つて、
領域X,Yにおける総信号線幅は、 100×2+6(20〜30) =300〜400μm となり、これはセルアレイ領域1の面積を制限す
る要因となり、大容量化の点で不利である。しか
も、第1図の装置をサーデイプ又はプラスチツク
型パツケージに実装すれば、第2図に示すよう
に、パツドとリードとの間を接続するワイヤWを
短かくしてその容量を小さくすると、たとえば、
3番ピンのリード4−3と4番ピンのリード4−
4とが重なる部分Zが生じ、これも第1図の装置
の面積を制限するものであり、従つて、やはり、
大容量化の点で不利となる。
発明の目的 本発明の目的は、上述の従来形における問題点
に鑑み、セルアレイ領域を2分割し、その間に周
辺回路領域を設けることにより、周辺回路領域と
パツドとの間における信号線のトータル幅を減少
させ、つまり、第1図の領域X,Yの幅を低減し
て大容量化を達成することにある。
発明の構成 上述の目的を達成するために本発明によれば、
規則性的繰返しパターンからなる回路ブロツクを
2分割し、該2分割された回路ブロツクの間に不
規則的パターンを有する周辺回路を配置し、前記
2分割された回路ブロツクの外側にボンデイング
パツド領域を設けた半導体装置が提供される。
発明の実施例 以下、図面により本発明の実施例を説明する。
第3図は本発明に係る半導体装置の一実施例を
示すレイアウト図である。第3図においては、左
右に、セルアレイ領域1−1,1−2を設け、そ
の間に周辺回路領域2が設けられている。さら
に、各セルアレイ領域1−1,1−2の外側にボ
ンデイングパツドを設けてある。なお、パツド
P4,P5,P12,P13のみが中央部に設けられている
のはサーデイプまたはプラスチツクパツケージに
実装する場合を想定しているからであり、DIPに
実装する場合にはこれらのパツドもセルアレイ領
域1−1,1−2の外側に設けられる。
第3図においては、周辺回路領域2と電源用パ
ツドP8,P16との距離は第1図の場合に比べてほ
ぼ1/2となり、従つて、抵抗値を考慮すれば、周
辺回路2と電源用パツドP8,P16とを接続する電
源線の幅は1/2でよく、しかも、領域X′,Y′を通
過する電源線の本数も1/2となる。従つて、領域
X′,Y′における総信号線幅は、他の信号線を考
慮しても、第1図に場合に比べてほぼ1/4になる。
なお、セルアレイ領域1−1と1−2の両側の領
域X′,Y′はそれぞれ異なる本数の信号線が配線
されるため、セルアレイ領域のY軸方向の位置は
異なることがある。
第3図の装置をサーデイプ又はプラスチツク型
パツケージに実装すれば、第4図に示すように、
3番ピンのリード4−3と4番ピンのリード4−
4とが重複せず、従つて、パツケージに余裕が生
じ、延いては、第3図の装置の大容量化に役立つ
ものである。
発明の効果 以上説明したように本発明によれば、セルアレ
イ領域外の総信号線幅を減少させることができ、
従つて、装置の大容量化を達成できる。
【図面の簡単な説明】
第1図は従来の半導体装置のレイアウト図、第
2図は第1図の装置をサーデイプまたはプラスチ
ツクパツケージに実装した場合の部分レイアウト
図、第3図は本発明に係る半導体装置の一実施例
を示すレイアウト図、第4図は第3図の装置をサ
ーデイプまたはプラスチツクパツケージに実装し
た場合の部分レイアウト図である。 1−1,1−2:セルアレイ領域、2:周辺回
路領域、P1〜P16:ボンデイングパツド。

Claims (1)

    【特許請求の範囲】
  1. 1 規則的繰返しパターンからなる回路ブロツク
    を2分割し、該2分割された回路ブロツクの間に
    不規則的パターンを有する周辺回路を配置し、前
    記2分割された回路ブロツクの外側にボンデイン
    グパツド領域を設けた半導体装置。
JP58115878A 1983-06-29 1983-06-29 半導体装置 Granted JPS609152A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP58115878A JPS609152A (ja) 1983-06-29 1983-06-29 半導体装置
US06/625,682 US4660174A (en) 1983-06-29 1984-06-28 Semiconductor memory device having divided regular circuits
DE8484304391T DE3485625D1 (de) 1983-06-29 1984-06-28 Halbleiterspeicheranordnung.
EP84304391A EP0130798B1 (en) 1983-06-29 1984-06-28 Semiconductor memory device
KR1019840003724A KR910005597B1 (ko) 1983-06-29 1984-06-29 분할된 정류회로를 가진 반도체 기억장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58115878A JPS609152A (ja) 1983-06-29 1983-06-29 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1324891A Division JPH077819B2 (ja) 1989-12-16 1989-12-16 半導体記憶装置

Publications (2)

Publication Number Publication Date
JPS609152A JPS609152A (ja) 1985-01-18
JPS64822B2 true JPS64822B2 (ja) 1989-01-09

Family

ID=14673401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58115878A Granted JPS609152A (ja) 1983-06-29 1983-06-29 半導体装置

Country Status (5)

Country Link
US (1) US4660174A (ja)
EP (1) EP0130798B1 (ja)
JP (1) JPS609152A (ja)
KR (1) KR910005597B1 (ja)
DE (1) DE3485625D1 (ja)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0170052B1 (en) * 1984-07-02 1992-04-01 Fujitsu Limited Master slice type semiconductor circuit device
JPH0652784B2 (ja) * 1984-12-07 1994-07-06 富士通株式会社 ゲートアレイ集積回路装置及びその製造方法
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Also Published As

Publication number Publication date
US4660174A (en) 1987-04-21
KR850000124A (ko) 1985-02-25
DE3485625D1 (de) 1992-05-07
EP0130798B1 (en) 1992-04-01
EP0130798A2 (en) 1985-01-09
JPS609152A (ja) 1985-01-18
KR910005597B1 (ko) 1991-07-31
EP0130798A3 (en) 1988-08-31

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